US8390954B2 - Magnetic reproducing element using anomalous hall effect and magnetic head using the same - Google Patents
Magnetic reproducing element using anomalous hall effect and magnetic head using the same Download PDFInfo
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- US8390954B2 US8390954B2 US12/556,492 US55649209A US8390954B2 US 8390954 B2 US8390954 B2 US 8390954B2 US 55649209 A US55649209 A US 55649209A US 8390954 B2 US8390954 B2 US 8390954B2
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/37—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using galvano-magnetic devices, e.g. Hall-effect devices using Hall or Hall-related effect, e.g. planar-Hall effect or pseudo-Hall effect
- G11B5/372—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using galvano-magnetic devices, e.g. Hall-effect devices using Hall or Hall-related effect, e.g. planar-Hall effect or pseudo-Hall effect in magnetic thin films
- G11B5/374—Integrated structures
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/18—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using Hall-effect devices
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Definitions
- the present invention relates to a magnetic recording and reading, and specifically relates to a magnetic reproducing element using an anomalous Hall effect, a kind of galvanomagnetic effect, and uses thereof.
- HDDs hard disk drives
- a perpendicular magnetic recording method has been actively studied as a method that overcomes the limit of an in-plane magnetic recording method, and HDDs using the perpendicular magnetic recording method have already been commercialized.
- high track density and higher linear recording density need to be achieved.
- introduction of a reproducing head using a magneto-resistive effect has greatly contributed to improvements.
- a reproducing head using giant magneto-resistance (GMR) or tunnel magneto-resistance (TMR) is primarily used in such a head.
- GMR giant magneto-resistance
- TMR tunnel magneto-resistance
- FIG. 1 A summary of a current reproducing method using a GMR or a TMR element is described using FIG. 1 .
- the GMR or TMR element has a spin valve structure where a pinning layer 32 , in which magnetization is pinned by an antiferromagnetic material, and a free layer 31 , in which magnetization may be freely rotated by a magnetic field 37 applied from a medium 30 , are provided with an intermediate layer 33 between them. Electric resistance of an element as a whole is changed depending on a relative angle ⁇ formed by magnetization 32 a of the pinning layer and magnetization 31 a of the free layer. This is a fundamental principle of the spin-valve structure element.
- an in-plane magnetization film is used for each of the pinning layer and the free layer. Magnetization of each of the pinning layer and the free layer is stabilized in a plane placed in a direction perpendicular to a down-track direction due to an effect of magnetic anisotropy in an in-plane direction of an element. Magnetization of the pinning layer is stabilized in a cross-track direction due to an effect of a hard bias field applied in the cross-track direction. Electric resistance of the element varies depending on whether magnetization of the free layer is parallel or antiparallel to a magnetization direction of the pinning layer.
- track width 36 is reduced with an increase in TPI (tracks per inch), and therefore in order to prevent information at a track edge or on an adjacent track from being read, reproducing element width 35 is reduced also.
- TPI tracks per inch
- reproducing element width 35 is reduced also.
- an effect of shape magnetic anisotropy in an in-plane direction is strong, and therefore an aspect ratio (element width in the cross-track direction to element height) is reduced, in-plane alignment of magnetization becomes unstable, and a circular magnetization condition is most stable in a film plane. In this condition, sensitivity of a magnetic reproducing element is reduced, and SNR (Signal to Noise Ratio) of a reproducing head is drastically decreased.
- Jap. Pat. Appl. Nos. JP-A-2000-306376 and JP-A-4-351708 propose data reading using an anomalous Hall effect exhibited by the perpendicular magnetization film. Jap. Pat. Appl. No.
- JP-A-2000-306376 describes a method where current is flowed only through an upper layer in reading information recorded in two perpendicular magnetization films isolated by an insulating layer, so that anomalous Hall voltage appearing in the upper layer is extracted.
- Jap. Pat. Appl. No. JP-A-4-351708 describes a method that uses difference in polarity of generated anomalous Hall voltage depending on whether magnetization of a sensor portion is upward or downward when an external magnetic field is applied in a condition that a bias magnetic field is horizontally applied to tilt the magnetization of the sensor portion.
- the CPP-GMR element structure which has a merit that element resistance is small compared with the TMR element structure, is considered to be effective for achieving high density.
- an insulating layer having pin holes is provided between the pinning layer and the free layer, so that current density is controlled to improve SNR of the CPP-GMR element.
- a magnetic reproducing element which has high sensitivity, and thus may reproduce a magnetization pattern recorded on a narrow track, would be beneficial to enable higher track density and higher linear recording density.
- magnetic reproducing element for detecting a magnetic field from a magnetic recording medium comprises a sensor film including a perpendicular magnetization film having a magnetization easy axis in a direction perpendicular to a film plane, wherein magnetization in the sensor film tilts upward or downward in an element height direction from the magnetization easy axis while no magnetic field is applied from the magnetic recording medium, and change in anomalous Hall voltage generated in the sensor film is detected, thereby allowing the magnetic field applied from the magnetic recording medium to be detected.
- a magnetic reproducing element comprises a sensor film including a perpendicular magnetization film, a bias film for applying a bias magnetic field in an in-plane direction of the sensor film, a pair of current terminals for flowing a current through the sensor film, and a pair of voltage terminals for measuring a voltage generated in the sensor film.
- Change in the perpendicular magnetization component of the sensor film is detected as change in anomalous Hall voltage and is caused by rotation of magnetization in the sensor film due to an external magnetic field applied in the in-plane direction of the sensor film.
- a magnetic head in another embodiment, includes a recording element for generating a recording magnetic field to a Magnetic recording medium, and a magnetic reproducing element for detecting a magnetic field from the magnetic recording medium.
- the magnetic reproducing element includes a sensor film including a perpendicular magnetization film, a bias film for applying a bias magnetic field in an in-plane direction of the sensor film, a pair of current terminals for flowing a current through the sensor film, and a pair of voltage terminals for measuring a voltage generated in the sensor film.
- Change in a perpendicular magnetization component of the sensor film is detected as change in voltage, the change being caused by rotation of magnetization in the sensor film due to an external magnetic field being applied in the in-plane direction of the sensor film.
- a magnetic data storage system such as a disk drive system, which may include a magnetic head, a drive mechanism for passing a magnetic medium (e.g., hard disk) over the magnetic head, and a controller electrically coupled to the magnetic head.
- a magnetic medium e.g., hard disk
- FIG. 1 is an explanatory view of a method of detecting a magnetic field from a medium by a magnetic reproducing element using an in-plane magnetization film, according to one embodiment.
- FIG. 2 is a view showing a basic structure of a magnetic reproducing element, according to one embodiment.
- FIG. 3 is views showing operation of the magnetic reproducing element, according to one embodiment.
- FIG. 4 is explanatory views of a method of applying bias to the magnetic reproducing element, according to one embodiment.
- FIG. 5 is a diagram for illustrating switching of a sensor film.
- FIG. 6 is a diagram showing a relationship between strength of magnetic anisotropy of the sensor film and change in anomalous Hall voltage.
- FIG. 7 is a diagram showing a relationship between saturation magnetization of the sensor film and change in anomalous Hall voltage.
- FIG. 8 is a diagram showing sensor-thickness dependence of change in anomalous Hall voltage.
- FIG. 9 is a diagram showing change in element output with respect to element width.
- FIG. 10 is a diagram showing a relationship between a bias magnetic field applied to an element of a reproducing head using an in-plane magnetization film and reproduced output for each of different element width dimensions.
- FIG. 11 is diagrams showing wiring to the element (in the case of horizontal bias), according to one embodiment.
- FIG. 12 is diagrams showing wiring to the element (in the case of vertical bias), according to one embodiment.
- FIG. 13 is a schematic view of a magnetic head, according to one embodiment.
- FIG. 14 is a schematic view of a magnetic storage device, according to one embodiment.
- Track width is essentially reduced for achieving high TPI, and width of a reproducing head using a current GMR or TMR element needs to be decreased in order to read data written in the reduced track.
- element width in a track-width direction is reduced in, the current head element using an in-plane magnetization film, magnetization has a circular domain structure being stable in energy in an element plane. In this condition, element sensitivity is reduced, and SNR of a reproducing head is accordingly reduced.
- Some prior art methods use complete reversal of magnetization, where magnetization reversal irreversibly proceeds. As a result, an anomalous Hall voltage characteristic also draws hysteresis with respect to an external magnetic field. While a reversibly changeable characteristic is desirable for a method of detecting the external magnetic field, the characteristic becomes hysteretic as long as complete reversal of magnetization in a perpendicular magnetization film is used. Therefore, it is difficult to use the sensor using the perpendicular magnetization film for a device such as HDD, which needs to determine “1” or “0” of data at high speed.
- all the described reproducing head elements have the spin valve structure as a basic structure, and therefore many layers including an underlayer, a pinning layer, an intermediate layer (or insulating layer), and a free layer are typically necessary to be deposited.
- the differential-type head structure after one spin valve structure is formed, another free layer (or spin valve structure as a whole) needs to be formed. As a result, since thickness of an element is increased in a down-track direction, resolution is reduced in high linear recording density.
- an object of the invention is to provide a reproducing head, which has high sensitivity, and thus may meet narrow track width to achieve high recording density invention, that uses an anomalous Hall effect of a perpendicular magnetization film having magnetic anisotropy in a direction perpendicular to a film plane. While magnetization in a sensor film including a perpendicular magnetization film is tilted upward or downward in an element height direction from a magnetization easy axis in a condition that no external magnetic field is applied, an external magnetic field is detected by detecting change in anomalous Hall voltage generated in the sensor film.
- a bias film which applies a bias magnetic field in an in-plane direction of the sensor film.
- Change in the perpendicular magnetization component which is caused by rotation of magnetization in the sensor film in an applied magnetic-field direction, is detected as change in voltage caused by the anomalous Hall effect.
- the bias film is an in-plane magnetization film adjacent to or stacked on the sensor film, and an insulating film is disposed between the bias film and the sensor film.
- the sensor film has current flowing in a direction parallel to a medium-facing surface so that voltage generated in a direction perpendicular to the medium-facing surface is detected.
- the invention may solve the problems that are confronted by the current magnetic reproducing element using an in-plane magnetization film in meeting narrow track width.
- a magnetization easy axis direction of a sensor film that detects an external magnetic field is along a down-track direction, and therefore even if element width in a cross-track direction is decreased, the magnetization easy direction is not affected, and consequently perpendicular alignment of magnetization is kept.
- the invention uses anomalous Hall voltage exhibited by a perpendicular magnetization film in a method of detecting an external magnetic field, which is not based on complete reversal of magnetization, but is based on a phenomenon that element magnetization rotates due to an effect of an external magnetic field, so that a perpendicular magnetization component thereof is changed. Therefore, a sensitivity characteristic with respect to an external magnetic field is reversible, which is suitable for a sensor.
- the magnetic reproducing element of the invention completely unlike a spin valve structure being a basic structure of the previous GMR or TMR element, in the magnetic reproducing element of the invention, only a layer corresponding to a free layer of GMR or TMR is used as a basic configuration, thereby number of layers required for the previous GMR or TMR element can be remarkably decreased, which is a large merit even in the light of production.
- spin torque noise occurs due to a phenomenon that current flows in a direction perpendicular to a film plane.
- the spin torque noise further increases, which is considered to be extremely problematic.
- the spill torque noise does not occur.
- a magnetic reproducing element of the invention has a perpendicular magnetization film, and uses change in anomalous Hall voltage generated from the perpendicular magnetization film in a method of detecting a leakage magnetic field from a medium.
- the anomalous Hall voltage is caused by an “anomalous Hall effect” exhibited by the perpendicular magnetization film.
- Carrier density distribution is formed on both sides in a direction perpendicular to a current flow direction in a film plane, so that electromotive force is newly generated.
- the electromotive force can be extracted as the anomalous Hall voltage.
- the anomalous Hall voltage is expressed as Equation (1).
- V H R AHE ⁇ I ⁇ ( M ) ⁇ t Equation ⁇ ⁇ ( 1 )
- V H shows anomalous Hall voltage
- R AHE shows an anomalous Hall coefficient
- l shows current flowed through a film
- M ⁇ shows a component in a normal direction to a film of in-film spontaneous magnetization (hereinafter, called “perpendicular magnetization component”)
- t shows thickness of a film.
- the anomalous Hall voltage is in proportion to current flowed through a film, that is, when electric resistance of a film is determined, the anomalous Hall voltage is in proportion to voltage applied between two points in the film.
- the anomalous Hall voltage is in proportion to spontaneous magnetization in a film, as spontaneous magnetization is larger, larger anomalous Hall voltage is generated.
- the anomalous Hall voltage is inversely proportional to thickness, that is, as film thickness is reduced, sensitivity is improved.
- the anomalous Hall coefficient in Equation (1) is an important factor in characterizing the anomalous Hall effect, and is dependent on a physical structure of an objective film (for example, types of compositional elements, a composition ratio, uniformity, etc.), and an electronic structure (for example, a shape of a Fermi surface, a carrier type: electron or hole, etc.).
- a physical structure of an objective film for example, types of compositional elements, a composition ratio, uniformity, etc.
- an electronic structure for example, a shape of a Fermi surface, a carrier type: electron or hole, etc.
- FIG. 2 shows a structure of a magnetic reproducing element according to one embodiment.
- An element film 22 acting as a sensor (hereinafter, called sensor film) is a perpendicular magnetization film, and a magnetization easy axis of the film is parallel to a track direction (down-track direction) of a medium 30 .
- Current 10 is flowed through the sensor film 22 via a pair of current electrodes 12 a and 12 b .
- Anomalous Hall voltage V H is extracted between voltage electrode terminals 11 c and 11 d via a pair of voltage electrodes 11 b and 11 a.
- the sensor film 22 is applied with a bias magnetic field 14 from a side opposite to a medium 30 side.
- the bias magnetic field 14 is applied in such a manner that spontaneous magnetization 22 a in the sensor film 22 is tilted upward or downward in an clement height direction from the magnetization easy axis of the film 22 .
- the bias magnetic field is applied such that the spontaneous magnetization 22 a is tilted downward in the element height direction, that is, tilted toward the medium.
- the bias magnetic field may be conversely applied so that the spontaneous magnetization is tilted upward in the element height direction, that is, tilted to the upside of the figure.
- FIG. 3( a ) shows a physical state of an element in operation.
- an initial state that is, in a condition (i) where the element is not subjected to a magnetic field from the medium 30
- the spontaneous magnetization 22 a in the sensor film 22 is stabilized with an angle being kept from the magnetization easy axis of the film 22 due to an effect of the bias magnetic field 14 .
- a downward magnetic field 37 is applied from the medium 30 as shown in (ii)
- the spontaneous magnetization 22 a in the sensor film 22 rotates in a direction further away from the initial state due to the magnetic field from the medium.
- the spontaneous magnetization 22 a in the sensor film 22 rotates in an opposite direction, that is, rotates upward so as to return in a direction to a magnetization easy axis. Since the bias magnetic field 14 exists, when a downward magnetic field and an upward magnetic field, each having the same magnitude, are separately applied to the sensor film 22 , rotation amount of the spontaneous magnetization 22 a in the sensor film 22 in a direction away from the magnetization easy axis is different from rotation amount thereof in a direction returning to the magnetization easy axis.
- the rotation amount in the direction away from the magnetization easy axis (that is, downward direction) is large compared with the rotation amount in the opposite direction, that is, rotation amount in the case that upward magnetization is applied from the medium 30 .
- magnitude of a perpendicular magnetization component 22 b is accordingly changed, and consequently the anomalous Hall voltage detected between the voltage electrode terminals 11 e and 11 d is changed.
- FIG. 3( b ) shows change in anomalous Hall voltage.
- (ii) where downward magnetization is applied from the medium 30 , the rotation angle of the spontaneous magnetization 22 a in the sensor film 22 is increased, and the perpendicular magnetization component 22 b of the film is reduced, and consequently the anomalous Hall voltage is reduced.
- (iii) where an upward magnetic field is applied from the medium 30 , the rotation angle of the spontaneous magnetization 22 a in the sensor film 22 is reduced, and the perpendicular magnetization component 22 b is increased, and consequently the anomalous Hall voltage is increased.
- a magnitude correlation of anomalous Hall voltage detected for a certain base line is determined, whereby detection can be made on whether an “upward” or “downward” magnetic field is applied from the medium.
- the bias magnetic field is applied to the sensor film from a side opposite to a medium-facing surface of the sensor film. Even if a bias magnetic field is applied from the side of the medium-facing surface of the sensor film 22 , an initial state of the sensor film can be established. However, the bias magnetic field possibly affects a leakage magnetic field from the medium at the time of reproduction, so that sensing sensibility may be reduced, therefore the bias magnetic field is desirably applied from the side opposite to the medium-facing surface.
- FIG. 4 shows formation of the bias layer by two different methods. Other methods are possible also. A structure shown in FIG.
- FIG. 4( a ) may be formed by a method called vertical bias method, and a structure shown in FIG. 4( b ) may be formed by a method called horizontal bias method.
- 21 a and 21 b show side shields respectively.
- the vertical bias method a bias layer 24 having magnetization 24 a exists on the sensor film 22 in a view from a flying surface side.
- the horizontal bias method the bias layer 24 and the sensor film 22 are in a stacked form in a down-track direction.
- An insulating layer 23 is provided between the sensor film 22 and the bias layer, according to some approaches.
- the insulating layer 23 limits current so that the current flows only through the sensor film 22 , thereby Hall voltage is prevented from being generated from the bias layer 24 due to current flow through the bias layer 24 .
- a material having high electric resistance is desirable for the insulating layer 23 , and for example, an oxide film of Al or Si may be used.
- the insulating layer 23 mainly acts to prevent current from flowing through the bias layer 24 , and may have predetermined insulating performance by optimizing a thickness and compositional materials thereof.
- the insulating layer may or may not include a film having high crystallinity for improving a magneto-resistive effect unlike a TMR element film.
- Thickness of the insulating layer affects not only insulating performance, but also guides the bias magnetic field 14 from the bias layer 24 to the sensor film 22 . If thickness of the insulating layer 23 is increased, a distance between the bias layer 24 and the sensor film 22 is increased, which may weaken a bias magnetic field. Thickness of the insulating layer 23 may be adjusted, thereby resulting in certain guiding efficiency of the bias magnetic field to the sensor film and certain insulating performance being achieved together.
- Magnetization in the sensor film 22 may be tilted by a predetermined angle from an easy axis of the film in a direction to a medium or a direction opposite to the direction in an initial state of magnetizing the sensor film, according to preferred approaches. Such tilting conditions are determined by the magnetic field 14 applied from the bias layer 24 and response of the magnetization 22 a in the sensor film to the magnetic field.
- a film having in-plane magnetic anisotropy is used for the bias layer 24 .
- As the in-plane magnetization film a Fe—Co alloy film, a Co—Cr alloy film with a Cr alloy underlayer, a Co—Pt alloy film, etc., and combinations thereof may be used.
- a uniform magnetic field is desirably generated from the bias layer to the sensor film, and therefore formation of magnetic domains is suppressed within the bias layer.
- a perpendicular magnetization film is included for a material of the sensor film 22 , and magnetization in the film can easily rotate in a direction away from or approaching an easy axis, according to some embodiments. This can be achieved by using a film having an excellent, perpendicular soft-magnetic characteristic. Rotation of magnetization in the sensor film induces change in a perpendicular magnetization component of the film, and as this change becomes larger, change in outputted anomalous Hall voltage becomes larger.
- a material having a large anomalous Hall coefficient is desirably used for the sensor film in order to achieve a large anomalous Hall voltage.
- a rare-earth/transition metal film for example, a FeCo film containing Gd may be used.
- the rare-earth/transition metal material becomes a perpendicular magnetization film near a compensation point, and accordingly the anomalous Hall coefficient becomes large, and consequently a large anomalous Hall voltage is generated.
- a switching magnetic field of the rare-earth/transition metal film also becomes large near the compensation point.
- a composition near the compensation point and a film formation condition are optimized, thereby the switching magnetic field can be reduced while keeping the large anomalous Hall coefficient.
- an artificial-lattice multilayer film structure may be used as a material having a large anomalous Hall coefficient.
- a multilayer film structure with X/Y (X ⁇ Fe or Co; Y ⁇ Pt or Pd) as a unit period may easily have perpendicular magnetic anisotropy by changing thickness of each of X and Y or an interface state between X and Y in each period.
- a configuration of the multilayer film for example, number of periods or thickness of each layer, or a condition during film formation (for example, in the case of film formation by sputter, gas pressure, or a gas species) is adjusted, thereby a film having a low switching magnetic field can be formed.
- FIG. 5 A horizontal axis of FIG. 5 shows magnitude of an external magnetic field applied in a direction perpendicular to a magnetization easy axis of the sensor film, that is, in an in-plane direction of the film.
- a positive magnetic field shows a magnetic field in the case that the magnetic field is applied in a direction where magnetization 22 a is away from the magnetization easy axis of the sensor film 22 (an external magnetic field shown by a downward, thick arrow in the figure), and a negative magnetic field shows a magnetic field in the case that the magnetic field is applied in a direction where the magnetization 22 a rotates in a direction to the magnetization easy axis of the sensor film 22 (an external magnetic field shown by an upward, thick arrow in the figure).
- a vertical axis of FIG. 5 shows change in anomalous Hall voltage along with rotation of the magnetization 22 a in the sensor film 22 when the magnetization rotates due to an effect of the external magnetic field.
- the vertical axis of FIG. 5 shows change in anomalous Hall voltage in a region where the voltage is significantly reduced from its maximum value.
- an aspect of rotation of the magnetization 22 a in the sensor film 22 is shown in order of states 1 , 2 and 3 in FIG. 5 .
- the magnetization 22 a in the sensor film 22 rotates in a direction away from a magnetization easy direction, and a perpendicular magnetization component of the film is decreased, therefore an anomalous Hall voltage is decreased in order of the states 1 , 2 and 3 .
- the magnetization 22 a in the sensor film falls down in a plane of the sensor film 22 , so that the perpendicular magnetization component of the film disappears, and therefore the anomalous Hall voltage becomes zero.
- a magnetic field at which the anomalous Hall voltage becomes zero is assumed as the switching magnetic field H sw of magnetization in the sensor film.
- an upward magnetic field from the medium is a negative field
- a downward magnetic field is a positive field.
- H b ⁇ H sw is given.
- the perpendicular magnetization component 22 b increases (state 4 in FIG. 5 ), and the anomalous Hall voltage becomes high compared with an initial voltage level as shown in the state (iii) of FIG. 3 .
- the bias-layer magnetic field H b is determined by a material used for the bias layer, a distance from the sensor film isolated by an insulating layer, and the like.
- the switching magnetic field H sw and the anomalous Hall voltage from the sensor film are determined by material of the sensor film, a soft magnetic property thereof, a degree of change in perpendicular magnetization component, and the like.
- a sensor film prepared in the example and a characteristic of an element using the sensor film are described as an example.
- a Gd x (Fe y Co 100-y ) 100-x (x is 20 to 30 at. %, and y is 80 to 90 at. %) thin film was prepared as the sensor film on a nonconductive substrate by an ion beam sputter method.
- An element pattern was formed in the prepared thin film by lithography. While element height was fixed to 50 nm, element width (width in a track width direction) was varied in a range of 20 to 60 nm.
- An in-plane magnetization film including Co-25 at. % Pt was used for the bias layer.
- the film was deposited by DC magnetron sputter using a Co—Pt alloy target.
- An alloy film including Co—Pt—Cr may be used for the bias layer.
- Each of the alloys typically has a crystal structure including a mixed phase of a face-centered cubic structure and a hexagonal close-packed structure.
- Alumina or a silicon oxide was used for the insulating layer 23 between the bias layer 24 and the sensor film 22 .
- a soft magnetic material such as NiFe was used for each shield film.
- the electrodes 12 a and 12 b for flowing a current through the sensor film 22 , and the electrodes 11 a and 11 b for extracting the anomalous Hall voltage were formed of a conductive material such as Cr or Cu.
- a lower shield 21 b is formed on a nonconductive substrate, then a bias layer 24 is formed thereon while being insulated by an insulating layer, and then an insulating layer 23 is further formed thereon.
- a sensor film 22 is formed on the insulating layer 23 , and voltage electrodes 11 a and 11 b are formed thereon.
- Current electrode films 12 a and 12 b are formed on both sides of the sensor film 22 by using photolithography. After the voltage electrodes and the current electrodes are formed, the electrodes are covered by an insulating layer 23 , and an upper shield 21 a is formed thereon.
- a lower shield 21 b is formed on a nonconductive substrate, and then an insulating layer is formed thereon.
- a sensor film 22 and a bias layer 24 are formed on the insulating layer while being isolated by an insulating layer 23 .
- voltage electrodes and current electrodes are formed thereon in the same way as in the horizontal bias type, and then an insulating layer is formed thereon.
- an upper shield film 21 a is formed on the insulating layer.
- change in anomalous Hall voltage due to rotation of magnetization in the sensor film is given.
- reproducing sensitivity is also large.
- Change in anomalous Hall voltage is dependent on rotatability of magnetization in the sensor film.
- the rotatability of magnetization in the sensor film is affected by perpendicular magnetic anisotropy energy, saturation magnetization, and thickness of the sensor film.
- a switching magnetic field of the sensor film is desirably reduced to the utmost in order to easily rotate magnetization in the sensor film.
- FIGS. 6 , 7 and 8 show change in anomalous Hall voltage with respect to an external magnetic field in the case that physical parameters of a sensor film having an element width of 58 nm are changed.
- a horizontal axis shows strength of an external magnetic field applied in an in-plane direction of the sensor film.
- a positive, externally-applied magnetic field shows that the magnetic field is applied in a direction where magnetization in the sensor film rotates in a direction away from an easy axis direction with respect to an initial state of the magnetization
- a negative magnetic field shows that the magnetic field is applied in a direction where the magnetization 22 a rotates in a direction to a magnetization easy axis direction.
- a point at which the external magnetic field is “0” corresponds to the initial state.
- a vertical axis of each of FIGS. 6 , 7 and 8 shows change in anomalous Hall voltage.
- FIG. 6 shows the influence of perpendicular magnetic anisotropy of the sensor film on change in anomalous Hall voltage.
- perpendicular magnetic anisotropic energy per unit volume of the sensor film is changed, absolute amount of change in anomalous Hall voltage does not change, but the switching magnetic field is greatly affected.
- the perpendicular magnetic anisotropic energy per unit volume is reduced, the switching magnetic field of the sensor film is decreased. Decreased switching magnetic field improves sensitivity to a low leakage magnetic field from a medium in a region of higher line recording density, consequently improvement in resolution can be expected.
- FIG. 7 shows influence of saturation magnetization of the sensor film on change in anomalous Hall voltage.
- saturation magnetization of the sensor film is increased, anomalous Hall voltage in the initial state is increased, and amount of change in anomalous Hall voltage is accordingly increased.
- the phenomenon is caused by a fact that anomalous Hall voltage is proportional to saturation magnetization of a film generating the voltage as shown in Equation (1). This contributes to increasing reproduced output.
- FIG. 8 shows influence of thickness of the sensor film on change in anomalous Hall voltage.
- thickness of the sensor film is decreased, anomalous Hall voltage in the initial state is increased, and voltage to be changed with respect to the external magnetic field is accordingly increased. This is because the anomalous Hall voltage increases in inverse proportion to thickness as shown in Equation (1).
- the switching magnetic field tends to be slightly reduced with decrease in thickness of the sensor film.
- FIG. 9 shows output voltage with respect to element width in a track width direction (left vertical axis), and output per unit width (right vertical axis).
- sensor thickness is 5 nm, and constant current flows in an element width direction.
- element width was varied in a range of 15 to 58 nm, change in output was scarcely seen, and output per unit width was increased.
- a magnetic reproducing element which can meet a narrow track of about 20 nm, is used, thereby a track density of 1000 ktpi (kilo tracks per inch) or more can be attained.
- line recording density of about 5000 kbpi (kilo bits per inch) can be achieved.
- the current GMR head having a spin valve structure using an in-plane magnetization film needs to be modified in some way, for example, it needs to be strengthened in bias magnetic field, to prevent formation of a circular domain structure in a region of element width of 20 nm or less.
- bias magnetic field if the bias magnetic field is strengthened, rotation of magnetization in a free layer becomes dull, leading to reduction in reproduced output.
- FIG. 10 shows change in reproduced output with respect to a bias magnetic field in a current GMR element. Reduction in reproduced output along with increase in bias magnetic field is more significantly seen in the region of element width of 20 nm or less.
- FIG. 11 shows the layouts of the horizontal-bias-type element
- FIG. 12 shows the layouts of the vertical-bias-type element.
- (a) shows a schematic section view of the element
- (b) shows a schematic view seen from a head flying surface.
- an insulating layer 23 is formed on a lower shield film 21 b , and a bias layer 24 , an insulating layer 23 , and a sensor film 22 are sequentially deposited on the insulating layer.
- Voltage electrode films 11 a and 11 b are formed on the sensor film, and current electrodes 12 a and 12 b are formed in a direction perpendicular to the voltage electrode films.
- an insulating layer 23 is formed in a manner of covering the respective electrodes, and an upper shield film 21 a is formed thereon.
- an insulating layer 23 is formed on a lower shield 21 b, and a sensor film 22 and a bias layer 24 are formed while being isolated by an insulating layer.
- Voltage electrode films 11 a and 11 b are formed thereon, and current electrodes 12 a and 12 b are formed in a direction perpendicular to the voltage electrode films.
- an insulating layer 23 is formed, and an upper shield film 21 a is formed thereon.
- the magnetic reproducing element of the invention enables improvement in reproduction sensitivity by optimizing saturation magnetization, perpendicular magnetic anisotropic energy per unit volume, and thickness of a sensor film.
- the magnetic reproducing element using the perpendicular magnetization film according to the invention may exceed the limit of narrow-track reproduction sensitivity in the previous element using the in-plane magnetization film.
- the magnetic reproducing element of the invention since current is not flowed in a direction perpendicular to a plane of a sensor film unlike TMR or CPP-GMR, spin torque noise does not occur, and consequently high SNR can be achieved.
- the magnetic reproducing element of the invention does not use the spin valve structure used in the previous TMR or GMR element, so that number of layers to be stacked can be reduced, and consequently improvement in production efficiency can be expected.
- FIG. 13 is a conceptual view of a magnetic head mounted with the magnetic reproducing element according to the invention.
- the figure shows an example of a recording/reproducing separated magnetic head for perpendicular recording.
- the horizontal-bias magnetic reproducing element shown in FIG. 11 is used as a reproducing head, and a perpendicular recording head including a sub pole 41 , a coil 42 , a main pole 43 , and a yoke section 44 is formed above the reproducing head.
- the invention relates to a magnetic reproducing element, and therefore even if a recording head includes either a perpendicular recording head or an in-plane recording head, the invention may be used.
- the magnetic reproducing element of the invention is combined with a perpendicular recording head, which allows more effective functions to be achieved.
- FIG. 14 is a conceptual view of a magnetic recording/reproducing device.
- the magnetic recording/reproducing device performs recording and reproducing of a magnetization signal by a magnetic head mounted on a slider 54 fixed to a tip of a suspension arm 53 at a predetermined position on a magnetic disk 52 rotated by a motor 51 .
- a rotary actuator 55 is driven, so that a position in a radial direction of the magnetic disk (track) of the magnetic head can be selected.
- a write signal into the magnetic head and a read signal from the magnetic head are processed by a signal processing circuits 56 a and 56 b.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Hall/Mr Elements (AREA)
- Magnetic Heads (AREA)
Abstract
Description
-
- 10: current
- 11 a, 11 b: voltage electrode
- 11 e, 11 d: voltage electrode terminal
- 12 a, 12 b: current electrode
- 14: bias magnetic field
- 21 a: upper shield
- 21 b: lower shield
- 22: sensor film
- 22 a: spontaneous magnetization of sensor film
- 22 b: perpendicular magnetization component of sensor film
- 22 c: thickness of sensor film
- 23: insulating layer
- 24: bias layer
- 24 a: magnetization of bias layer
- 30: magnetic recording medium
- 31: free layer
- 31 a: magnetization of free layer
- 32: pinning layer
- 32 a: magnetization of pinning layer
- 33: intermediate layer
- 35: element width
- 36: track width
- 37: magnetic field from medium
- 41: sub pole
- 42: coil
- 43: main pole
- 44: yoke section
- 51: motor
- 52: magnetic disk
- 53: suspension arm
- 54: slider
- 55: rotary actuator
- 56 a, 56 b: signal processing circuit
Claims (11)
Applications Claiming Priority (2)
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JP2008231710A JP2010067304A (en) | 2008-09-10 | 2008-09-10 | Magnetic reproducing element using anomalous hall effect and magnetic head using the same |
JP2008-231710 | 2008-09-10 |
Publications (2)
Publication Number | Publication Date |
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US20100061014A1 US20100061014A1 (en) | 2010-03-11 |
US8390954B2 true US8390954B2 (en) | 2013-03-05 |
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US12/556,492 Expired - Fee Related US8390954B2 (en) | 2008-09-10 | 2009-09-09 | Magnetic reproducing element using anomalous hall effect and magnetic head using the same |
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US (1) | US8390954B2 (en) |
JP (1) | JP2010067304A (en) |
Cited By (1)
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US9293160B1 (en) | 2015-02-06 | 2016-03-22 | HGST Netherlands B.V. | Magnetic stabilization and scissor design for anomalous hall effect magnetic read sensor |
Families Citing this family (8)
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JP2010067304A (en) | 2008-09-10 | 2010-03-25 | Hitachi Global Storage Technologies Netherlands Bv | Magnetic reproducing element using anomalous hall effect and magnetic head using the same |
US8189302B2 (en) | 2010-09-11 | 2012-05-29 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic field sensor with graphene sense layer and ferromagnetic biasing layer below the sense layer |
US8760801B2 (en) * | 2010-12-22 | 2014-06-24 | HGST Netherlands B.V. | Magnetic head having a planar hall effect read sensor |
KR20140035013A (en) * | 2012-09-12 | 2014-03-21 | 삼성전자주식회사 | Magnetic field generation unit and semiconductor testing apparatus comprising the same |
US8922951B2 (en) | 2012-12-11 | 2014-12-30 | Seagate Technology Llc | Data storage device with variable anisotropy side shield |
US9047887B2 (en) | 2013-07-12 | 2015-06-02 | Kabushiki Kaisha Toshiba | Magnetic recording head and disk apparatus with the same |
US10014012B1 (en) * | 2017-06-23 | 2018-07-03 | Western Digital Technologies, Inc. | Spin-orbit torque based magnetic recording |
US10789977B1 (en) | 2019-06-26 | 2020-09-29 | Western Digital Technologies, Inc. | Spin orbital torque via spin hall effect based energy assisted magnetic recording |
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US20100061014A1 (en) | 2010-03-11 |
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