US7724121B2 - Singly attached MEMS thermal device and method of manufacture - Google Patents
Singly attached MEMS thermal device and method of manufacture Download PDFInfo
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- US7724121B2 US7724121B2 US11/516,489 US51648906A US7724121B2 US 7724121 B2 US7724121 B2 US 7724121B2 US 51648906 A US51648906 A US 51648906A US 7724121 B2 US7724121 B2 US 7724121B2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
Definitions
- This invention relates to a microelectromechanical systems (MEMS) thermal device, and its method of manufacture. More particularly this invention relates to a MEMS thermal switch for switching electrical signals.
- MEMS microelectromechanical systems
- MEMS Microelectromechanical systems
- MEMS devices may be moveable actuators, valves, pistons, or switches, for example, with characteristic dimensions of a few microns to hundreds of microns.
- a moveable MEMS switch may be used to connect one or more input terminals to one or more output terminals, all microfabricated on a substrate.
- the actuation means for the moveable switch may be thermal, piezoelectric, electrostatic, or magnetic, for example.
- FIG. 1 shows an example of a prior art thermal switch, such as that described in U.S. Pat. No. 7,036,312, to Menard, et al.
- the thermal switch 10 includes two cantilevers, 100 and 200 .
- Each cantilever 100 and 200 contains a passive cantilevered beam 110 and 210 , respectively.
- a conductive circuit 120 and 220 is coupled to each cantilevered beam 110 and 210 by a plurality of dielectric tethers 150 and 250 , respectively.
- a voltage is applied between terminals 130 and 140
- a current is driven through conductive circuit 120 .
- the Joule heating generated by the current causes the circuit 120 to expand relative to the unheated cantilevered beam 110 . Since the circuit is coupled to the cantilevered beam 110 by the dielectric tether 150 , the expanding conductive circuit drives the cantilevered beam in the upward direction 165 .
- each dielectric tether 150 and 250 is attached to both arms of the conductive circuits 120 and 220 . Because of these attachments, substantial stress must be overcome in order to move cantilevers 100 and 200 in the desired directions 165 and 265 . In particular, tip member 260 and contact flange 270 may be required to move 15-20 ⁇ m to clear the width of contact flange 170 and to allow some budget for tolerances and initial offset. Using the design illustrated in FIG. 1 , a substantial amount of current may be required to achieve this deflection.
- an actuator which uses a passive cantilevered beam coupled to a thermally conductive drive circuit.
- a dielectric tether attaches the cantilevered beam only to the inner arm of the conductive circuit. Since the outer arm of the conductive circuit is not tethered to the cantilevered beam, it is allowed to bend relatively freely, and serves primarily to return the current to a low voltage return pad. This allows the actuator to have less stiffness, so that the cantilever bends more easily, with less stress, and therefore makes a more efficient actuator.
- a second dielectric tether tethers the distal end of the inner arm of the conductive circuit at a point where essentially no current is flowing in the conductive circuit.
- an extension is formed on the distal end of the inner arm of the conductive circuit, and the outer arm of the conductive circuit is electrically coupled to the inner arm at a point inboard of this extension. Since no current is flowing through the extension, the temperature of the extension may be relatively low compared to the temperature within the inner or outer arms.
- the outer arm of the conductive circuit is not coupled to the cantilevered beam, it may be made as flexible as possible, so as not to contribute to the stiffness of the actuator.
- one or more serpentine features may be formed in the outer arm.
- the outer arm may be coupled to the inner arm with dielectric tethers attached at a point within the serpentine feature, to resist buckling or column failure of the outer arm, which might otherwise lead to shorting of the outer arm with the inner arm.
- the cantilevered beam and conductive circuits may be made of nickel or a nickel alloy, for example.
- the nickel may be electroplated onto a seed layer through a photoresist stencil patterned on a substrate.
- the dielectric tethers may be conveniently made of a photoresist, which is hard baked after patterning to stabilize the material for permanent use in the actuator structure.
- FIG. 1 is a schematic diagram of a prior art thermal switch
- FIG. 2 is a simplified diagram of one of the thermal actuators of the switch illustrated in FIG. 1 ;
- FIG. 3 is an illustration of a first exemplary embodiment of a singly attached thermal actuator
- FIG. 4 a is a diagram of the undeflected state of the actuator shown in FIG. 2 ;
- FIG. 4 b is an illustration of the deflected state of the actuator shown in FIG. 2 ;
- FIG. 4 c is an illustration of the deflected state of a singly attached actuator;
- FIG. 5 is a second exemplary embodiment of a singly attached thermal actuator
- FIG. 6 illustrates a first step in the fabrication of the singly attached MEMS actuator
- FIG. 7 illustrates a second step in the fabrication of the singly attached MEMS actuator
- FIG. 8 illustrates a third step in the fabrication of the singly attached MEMS actuator
- FIG. 9 illustrates a fourth step in the fabrication of the singly attached MEMS actuator.
- FIG. 10 illustrates a fifth step in the fabrication of the singly attached MEMS actuator.
- thermal actuator is described which is suitable for use in an electrical switch, such as a switch for telephone signals.
- an electrical switch such as a switch for telephone signals.
- this embodiment is exemplary only, and that this type of thermal actuator may be applied to any of a number of devices, including valves, optical devices and sensors, for example.
- FIG. 2 shows additional detail of a thermal actuator 100 , such as that used in the switch of FIG. 1 .
- the thermal actuator 100 may include a conductive circuit 120 having an inner arm 122 and an outer arm 124 .
- the thermal actuator may further include a cantilevered beam anchored at its proximal point to the substrate, and suspended freely at its distal end.
- beam and “arm” are used interchangeably herein, to refer to a member whose length is substantially longer than its thickness or width.
- Both the inner arm 122 and outer arm 124 of conductive circuit 120 are attached to the cantilevered beam 110 by at least two dielectric tethers 152 and 154 .
- Dielectric tether 152 may attach the distal ends of the inner arm 122 and outer arm 124 to the cantilevered beam 110 .
- Dielectric tether 154 may attach a proximal end of inner arm 122 and outer arm 124 to a proximal point on the cantilevered beam 110 .
- thermal actuator 100 may flex in such a way to accommodate the tethered endpoints of its three constituent beams. Because the ends of the three beams are tethered together by tethers 152 and 154 , the thermal actuator is forced to adopt an “S” shape as will be discussed in greater detail with respect to FIGS. 4 a - 4 c . The curvature of this shape causes substantial stress to the materials of the beam.
- FIG. 3 illustrates a first exemplary embodiment of a singly attached thermal actuator 1000 .
- the term “singly attached” should be understood to mean that the cantilevered beam is only attached to one arm of the conductive driving circuit, rather than to both as in MEMS thermal actuator 100 .
- the singly attached thermal actuator 1000 may be used in place of thermal actuator 100 in switch 10 .
- singly attached thermal actuator 1000 may be used to open or close a valve, as well as to open and close an electrical switch, for example.
- singly attached thermal actuator 1000 includes a cantilevered beam 1110 and a conductive circuit having an inner arm 1122 and an outer arm 1124 . Although not shown in FIG. 3 , singly attached thermal actuator 1000 may also include contact flanges and tip members, analogous to 160 and 170 of FIG. 1 .
- inner arm 1122 may have an extension 1123 at its distal end to which extends beyond the length of the outer arm 1124 and to which the outer arm 1124 may be joined at a point inboard of this extension 1123 . Therefore, essentially no current flows through extension 1123 , as the current flows to the outer arm 1124 at its connection point to the inner arm 1122 .
- Extension 1123 may fit into a substantially circular cavity 1112 in cantilevered beam 1110 .
- the extension 1123 is then attached to the cantilevered beam 1110 by a dielectric tether 1152 . Dielectric tether 1152 does not attach the hot outer arm 1124 to the cantilevered beam 1110 .
- thermal actuator 1000 affords singly attached thermal actuator 1000 a number of advantages relative to thermal actuator 100 .
- extension 1123 remains relatively cool compared to inner arm 1122 and outer arm 1124 of conductive circuit 1120 .
- dielectric tether 1152 Because of its relatively low temperature, less heat is transferred to cantilevered beam 1110 by dielectric tether 1152 . This improves the efficiency of the device, because the cantilevered beam remains relatively cool, and therefore primarily bends in response to the heating of the hot inner arm 1122 of the conductive circuit 1120 , rather than expanding from its own heating.
- the extension 1123 fits into a substantially circular cavity, which helps anchor extension 1123 to the cantilevered beam 1110 , and reduces the likelihood of the extension 1123 shearing away from cantilevered beam 1110 .
- Use of the substantially circular cavity reduces the amount of dielectric required to attach the extension to the cantilevered beam 1110 . By reducing the dielectric volume, the thermal resistance between the conductive circuit 1120 and cantilevered beam is increased, temperature differential between the two beams is increased, and thus the beam will move farther for a given current input or drive beam temperature.
- the force delivered by hot inner arm 1122 of conductive circuit 1120 to the cantilevered beam 1110 is closer to the neutral axis of the cantilevered beam 1110 . This enhances the response of the cantilevered beam 1110 to the force applied by hot inner arm 1122 .
- a second dielectric tether 1154 tethers a proximal portion of inner arm 1122 of conductive circuit 1120 to cantilevered beam 1110 .
- Dielectric tether 1154 tethers only the inner arm 1122 of conductive circuit 1120 to the cantilevered beam 1110 , whereas the outer arm 1124 is not tethered directly to the cantilevered beam 1110 . For this reason, the outer arm 1124 is free to expand relative to the cantilevered beam 1110 , and the driving force for the cantilevered beam 1110 is delivered by the inner arm 1122 via the dielectric tethers 1152 and 1154 .
- the hot, inner arm 1122 tends to expand as it heats, but it is tied to cantilevered beam 1110 , it tends to drive cantilevered beam 1110 in direction 1165 . Because the outer arm 1124 is not highly stressed, a larger proportion of the force delivered by hot inner arm 1122 may be translated into motion of the cantilevered beam 1110 , rather than taken up by distorting the hot inner arm 1122 and hot outer arm 1124 as was the case with thermal actuator 1000 shown in FIG. 2 .
- Two additional dielectric tethers 1156 may connect the inner hot arm 1122 to the outer hot arm 1124 .
- the two additional dielectric tethers may preferably be placed approximately as shown in FIG. 3 , within between about one quarter and one third of the distance to each end of the hot inner arm 1122 and the hot outer arm 1124 . Being so placed, dielectric tethers 1156 resist the tendency of hot outer arm 1124 to buckle away from the hot inner arm 1122 and from cantilevered beam 1110 or suffer column failure at these locations.
- FIG. 4 a - 4 c illustrate the difference in the kinematic behavior of thermal actuator 100 compared to singly attached thermal actuator 1000 .
- FIG. 4 a shows the undeflected position of thermal actuator 100 .
- FIG. 4 b illustrates thermal actuator 100 in a deflected state. Because the three beams are tethered at two points, the expansion of the hot inner arm and hot outer arm may cause the beams to take up an “S” shape, such that the endpoints are still aligned in the same line.
- FIG. 4 c illustrates the curvature of the singly attached thermal actuator 1000 in a deflected position.
- the singly attached thermal actuator 1000 may bend in a less pronounced, less curved S-shape than the doubly attached actuator. Because of the less predominant S-shape, the deflection in FIG. 4 c has less stress than the shape of FIG. 4 b . Therefore, the actuator shown in FIG. 4 c may have increased deflection without plastically deforming due to high stress levels. In addition, a greater proportion of the force may go to deflecting the actuator in the desired direction, rather than into distorting the cantilevered beams. This may improve the efficiency of the singly attached thermal actuator 1000 , that is, the amount by which the singly attached thermal actuator 1000 moves in response to a given input current, compared to thermal actuator 100 .
- FIG. 5 shows a second exemplary embodiment of the singly attached thermal actuator 2000 .
- singly attached thermal actuator 2000 may have an extension 2123 added to the distal end of the hot, inner arm 2122 , which extends beyond the length of the hot, outer arm 2124 .
- This extension 2123 may fit into a substantially circular cavity 2112 of the cantilevered beam 2110 .
- the hot, outer arm 2124 may be electrically coupled to the hot, inner arm at a point inboard of this extension 2123 .
- a single dielectric tether 2152 tethers the extension 2123 to the cantilevered beam 2110 .
- singly attached thermal actuator 2000 has a second dielectric tether 2154 that tethers the hot inner arm 2122 to the cantilevered beam 2110 at a point nearer its proximal end.
- serpentine shapes, 2126 and 2128 may be added to the outer hot arm 2124 .
- a serpentine shape may be two substantially right-angled turns placed in the otherwise substantially linear extent of the cantilevered beam.
- the serpentine shapes may reduce the stiffness of the hot outer arm 2124 , so that less stress is created by its deflection. This allows the hot, outer arm 2124 to serve primarily to return the current from the hot, inner arm 2122 , without adding stiffness to the device.
- At least one, and preferably two additional dielectric tethers 2156 and 2158 may serve to attach the hot, outer arm 2124 to the hot, inner arm 2122 .
- These additional dielectric tethers 2156 and 2158 may preferably be located within the serpentine portions 2126 and 2128 , respectively, of the hot, outer arm 2124 .
- the dielectric tethers 2156 and 2158 may thereby serve to transmit additional longitudinal force to the hot, inner arm 2122 , while allowing the hot, outer arm 2124 to flex longitudinally within the serpentine area.
- the dielectric tethers may also help the hot, outer arm 2124 to resist buckling and column failure in the regions adjacent to dielectric tethers 2156 and 2158 . Otherwise, the serpentine shape of the outer hot arm 2124 may be more susceptible to buckling than the simple straight linear shape of outer arm 1124 of singly attached thermal actuator 1000 shown in FIG. 3 .
- serpentine portions 2126 and 2128 with respect to the dielectric tether positions in the preferred arrangement shown in FIG. 5 maximizes the length of straight outer hot beam section that extends between the serpentines. This configuration creates a structure with low stiffness.
- a similar but less efficient design would be to position the serpentine in between the two dielectric tether points with short outer hot beams of similar lengths on either side connecting the serpentine to the tether points.
- the serpentine itself would provide similar flexibility as in the preferred design, but the short beam sections between the serpentine and the tether points would create a much stiffer structure than a serpentine with one long beam section. This increase in stiffness would increase the stress levels in this beam for the same magnitude of deflection.
- the inset in FIG. 5 shows additional detail of the dielectric tethers 2156 and 2158 .
- the tether connection may be made up of a portion of dielectric material 2156 and 2158 , and a portion of the conductive material 2123 and 2125 of hot, inner arm 2122 .
- the conductive material 2123 and 2125 may be formed monolithically and integrally with the hot, inner arm 2122 by, for example, the methods described below.
- the conductive material may be shaped so as to form the interlocking feature shown in the inset, which may mate with the shape of the dielectric material 2156 and 2158 . Such shapes may enhance the ability of the outer, hot arm 2124 to transmit longitudinal force to the inner, hot arm 2122 , while reducing the chances of the dielectric tether failing or breaking.
- Singly attached thermal actuator 2000 may be used in conjunction with singly attached thermal actuator 1000 , to form the two cantilevers of an electrical switch.
- the two cantilevers are generally disposed in a substantially orthogonal relationship, as shown in FIG. 1 , such that one cantilever bends in one direction 165 , and the other cantilever bends in the orthogonal direction 265 .
- a compact electrical switch may be formed from two orthogonal actuators. One of the actuators, the “latch” actuator, is less stiff than the other actuator, the “spring” actuator.
- the opening and closing algorithms for the switch may be simpler, and the switch may be made more compact than switches using two equivalent actuators. Because singly attached thermal actuator 2000 includes the flexible serpentines, it may be made less stiff than singly attached thermal actuator 1000 . Accordingly, a compact electrical switch may be made using singly attached thermal actuator 1000 as the spring actuator, and singly attached thermal actuator 2000 as the latch actuator, as taught in the incorporated '912 application.
- the singly attached thermal actuator may be manufactured using processes well known in the art of MEMS manufacturing. One exemplary method for forming the singly attached thermal actuator will be described next.
- FIG. 6 illustrates a first exemplary step in the fabrication of the singly attached thermal actuator 1000 or 2000 .
- all the cantilever beams are referred to in FIGS. 6-10 simply as reference number 400 .
- any and all cantilever beams 1110 , 1120 , 2110 , and 2120 may be formed in a similar, if not identical fashion to cantilever 400 in the ensuing description.
- the process begins with the deposition of a seed layer 630 for later plating of the cantilever 400 , over the substrate 620 .
- the seed layer 630 may be chromium (Cr) and gold (Au), deposited by chemical vapor deposition (CVD) or sputter deposition to a thickness of 100-200 nm.
- Photoresist may then be deposited over the seed layer 630 , and patterned by exposure through a mask.
- a sacrificial layer 680 such as copper, may then be electroplated over the seed layer.
- the plating solution may be any standard commercially available or in house formulated copper plating bath. Plating conditions are particular to the manufacturer's guidelines. However, any other sacrificial material that can be electroplated may also be used.
- deposition processes other than plating may be used to form sacrificial layer 680 .
- the photoresist may then be stripped from the substrate 620 .
- FIG. 7 A second exemplary step in fabricating the singly attached thermal actuator 1000 or 2000 is illustrated in FIG. 7 .
- the substrate 620 is again covered with photoresist (not shown), which is exposed through a mask with features corresponding to gold pads 640 and 645 and a gold tip member 460 .
- Gold may be used for the tip members 160 , 260 , 170 and 270 because it may have lower contact resistance than the material that will form the cantilever 400 .
- the features 460 and 640 will subsequently be plated in the appropriate areas.
- the gold features 640 , 645 may include a bonding ring, which may eventually form a portion of a hermetic seal which may bond a cap layer over the substrate 620 and actuator 1000 or 2000 .
- One of the gold features 645 may also be an external access pad that will provide access to the singly attached thermal actuator 1000 or 2000 electrically, from outside the hermetically sealed structure.
- the gold features 640 , 645 and 460 may then be electroplated in the areas exposed by the photoresist, to form gold features 640 , 645 and 460 and any other gold structures needed.
- the photoresist is then stripped from the substrate 620 .
- the thickness of the gold features 640 , 645 and 460 may be, for example, 1 ⁇ m.
- FIG. 8 illustrates a third step in fabricating the singly attached thermal actuator 1000 or 2000 .
- photoresist is once again deposited over the substrate 620 , and patterned according to the features in a mask.
- the exposed portions of the photoresist are then dissolved as before to form a stencil for electroplating of the cantilever material, by exposing only certain appropriate areas of the seed layer 630 to the electroplating solution.
- the exposed seed layer 630 may then be electroplated with nickel or a nickel alloy to form the cantilevered beam 400 .
- cantilever beam 400 may represent any and all of cantilevered beams 1120 , 1222 , 1224 , 2110 , 2122 or 2124 of the singly attached thermal actuator 1000 or 2000 .
- the tip member 460 will be affixed to the cantilevered beam 400 by the natural adhesion of the gold to the nickel, after deposition of the nickel.
- nickel is chosen in this example, it should be understood that any other conductive material that can be electroplated may also be used.
- deposition processes other than plating may be used to form conductive cantilevered beam 400 .
- Exemplary dimensions of the cantilevered beam 400 may be, for example, about 300 ⁇ m long, 5 ⁇ m wide and about 5 ⁇ m thick. However, it should be understood that these dimensions are exemplary only, and that other dimensions may be chosen, depending on the requirements of the application.
- the photoresist may then be stripped from the substrate 620 .
- FIG. 9 illustrates a fourth step in the fabrication of the compact MEMS switch 1000 or 2000 .
- a polymeric nonconducting material such as the photoresist SU-8 is deposited over the substrate 620 , the cantilevered beam 400 and the hot, inner arm.
- the photoresist is then cross linked, by for example, exposure to UV light.
- the unexposed resist is then dissolved and removed from the substrate 620 and structure 400 in all areas that the dielectric tether is absent.
- This step forms the dielectric tethers 450 , that tether a single drive loop, such as 1122 and 2122 to cantilevered beam 1110 and 2110 , respectively.
- this step forms dielectric tethers 1152 , 1154 , 2152 and 2154 on singly attached thermal actuators 1000 and 2000 , respectively.
- This step, or a similar step may also form tethers 1156 , 2156 and 2158 , that tether the outer arms 1124 and 2124 of the conductive circuits 1120 and 2120 , respectively, to inner arms 1122 and 2122 .
- the photoresist may then be cured by, for example, baking. The baking may be conducted for a period which assures that the photoresist is substantially cured, for example, at a temperature of at least about 210 degrees centigrade for at least about 30 minutes.
- the curing may also be accomplished using a continuously varying temperature profile, as set forth in U.S.
- thermal actuator 1000 or 2000 may be used as part of a switch, such as that shown in FIG. 1 , then additional singly attached thermal actuators 1000 or 2000 may be fabricated in a manner similar and perhaps simultaneously with that described above for cantilever 400 .
- FIG. 10 illustrates a fifth step in the fabrication of the singly attached thermal actuator 1000 or 2000 .
- the cantilever 400 may be released by etching the sacrificial copper layer 680 .
- Suitable etchants may include, for example, an isotropic etch using an ammonia based Cu etchant.
- the Cr and Au seed layer 630 is then also etched using, for example, a wet etchant such as iodine/iodide for the Au and permanganate for the Cr, to expose the SiO 2 surface of the substrate 620 .
- the substrate 620 and MEMS actuator 1000 or 2000 may then be rinsed and dried.
- the resulting singly attached MEMS thermal actuator may then be encapsulated in a protective lid or cap wafer. Details relating to the fabrication and assembly of a cap wafer may be found in co-pending U.S. patent application Ser. No. 11/211,625, and U.S. patent application Ser. No. 11/211,622 incorporated by reference herein in their entireties.
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Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/516,489 US7724121B2 (en) | 2006-09-07 | 2006-09-07 | Singly attached MEMS thermal device and method of manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US11/516,489 US7724121B2 (en) | 2006-09-07 | 2006-09-07 | Singly attached MEMS thermal device and method of manufacture |
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US20070215448A1 (en) * | 2006-03-20 | 2007-09-20 | Innovative Micro Technology | MEMS thermal device with slideably engaged tether and method of manufacture |
US11536872B2 (en) * | 2012-11-16 | 2022-12-27 | Stmicroelectronics (Rousset) Sas | Method for producing an integrated circuit pointed element comprising etching first and second etchable materials with a particular etchant to form an open crater in a project |
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US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
US20090033454A1 (en) * | 2007-08-01 | 2009-02-05 | Simpler Networks Inc. | MEMS actuators with even stress distribution |
US8779886B2 (en) * | 2009-11-30 | 2014-07-15 | General Electric Company | Switch structures |
US20170287664A1 (en) * | 2016-04-01 | 2017-10-05 | Intel Corporation | Thermally activated switch |
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