US7595884B2 - Measurement of sample reflectance - Google Patents
Measurement of sample reflectance Download PDFInfo
- Publication number
- US7595884B2 US7595884B2 US11/040,535 US4053505A US7595884B2 US 7595884 B2 US7595884 B2 US 7595884B2 US 4053505 A US4053505 A US 4053505A US 7595884 B2 US7595884 B2 US 7595884B2
- Authority
- US
- United States
- Prior art keywords
- sample
- radiation
- detector
- reflector
- accessory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime, expires
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
Definitions
- This invention relates to spectrometry and in particular relates to an assembly of components which can be used with a spectrometer in order to measure specular reflectance of a sample.
- FIG. 2 is a perspective view from the front left of a reflectance accessory in accordance with an embodiment of the present invention
- FIGS. 13 to 16 are schematic views illustrating how the components of the accessory move in different measurement configurations.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/552,006 US8345235B2 (en) | 2004-01-20 | 2009-09-01 | Measurement of sample reflectance |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP04250265.8 | 2004-01-20 | ||
| EP04250265.8A EP1557652B1 (en) | 2004-01-20 | 2004-01-20 | Apparatus for measuring specular reflectance of a sample |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/552,006 Continuation US8345235B2 (en) | 2004-01-20 | 2009-09-01 | Measurement of sample reflectance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20050185185A1 US20050185185A1 (en) | 2005-08-25 |
| US7595884B2 true US7595884B2 (en) | 2009-09-29 |
Family
ID=34626539
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/040,535 Expired - Lifetime US7595884B2 (en) | 2004-01-20 | 2005-01-21 | Measurement of sample reflectance |
| US12/552,006 Expired - Fee Related US8345235B2 (en) | 2004-01-20 | 2009-09-01 | Measurement of sample reflectance |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/552,006 Expired - Fee Related US8345235B2 (en) | 2004-01-20 | 2009-09-01 | Measurement of sample reflectance |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US7595884B2 (en) |
| EP (4) | EP1950541B1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014215193A1 (en) * | 2014-08-01 | 2016-02-04 | Carl Zeiss Spectroscopy Gmbh | Measuring arrangement for reflection measurement |
| JP6849405B2 (en) * | 2016-11-14 | 2021-03-24 | 浜松ホトニクス株式会社 | Spectral measuring device and spectroscopic measuring system |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4657390A (en) * | 1985-02-21 | 1987-04-14 | Laser Precision Corporation | Universal spectrometer system having modular sampling chamber |
| US4712912A (en) * | 1986-03-10 | 1987-12-15 | Spectra-Tech, Inc. | Spectrophotometric image scrambler for full aperture microspectroscopy |
| US5048970A (en) * | 1990-06-29 | 1991-09-17 | Nicolas J. Harrick | Optical attachment for variable angle reflection spectroscopy |
| US5088821A (en) * | 1990-06-29 | 1992-02-18 | Nicolas J. Harrick | Spectroscopic analysis system with remote terminals |
| US5106196A (en) | 1990-08-21 | 1992-04-21 | Brierley Philip R | Single adjustment specular reflection accessory for spectroscopy |
| US5262845A (en) * | 1992-06-08 | 1993-11-16 | Harrick Scientific Corporation | Optical accessory for variable angle reflection spectroscopy |
| EP0713082A2 (en) | 1994-11-17 | 1996-05-22 | Ford Motor Company Limited | Optical module for a spectrometer |
| US5903351A (en) | 1996-11-13 | 1999-05-11 | Samsung Electronics Co., Ltd. | Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber |
| US6184980B1 (en) * | 1995-02-27 | 2001-02-06 | The Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations | Fiber optic sensor for petroleum |
| US6310348B1 (en) | 1999-06-25 | 2001-10-30 | Ramspec Corporation | Spectroscopic accessory for examining films and coatings on solid surfaces |
| WO2002082062A1 (en) * | 2001-04-04 | 2002-10-17 | Varian Australia Pty Ltd | Measuring specular reflectance of a sample |
| WO2002084237A1 (en) | 2001-04-11 | 2002-10-24 | Rio Grande Medical Technologies, Inc. | Illumination device and method for spectroscopic analysis |
| US7265844B2 (en) * | 2003-04-10 | 2007-09-04 | Wisconsin Alumni Research Foundation | Horizontal surface plasmon resonance instrument with improved light path |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3701589A (en) * | 1968-11-08 | 1972-10-31 | Heath Co | Variable width slit mechanism for use in a scanning monochromator |
-
2004
- 2004-01-20 EP EP08075196.9A patent/EP1950541B1/en not_active Expired - Lifetime
- 2004-01-20 EP EP08075194.4A patent/EP1939595B1/en not_active Expired - Lifetime
- 2004-01-20 EP EP04250265.8A patent/EP1557652B1/en not_active Expired - Lifetime
- 2004-01-21 EP EP08075195A patent/EP1944588A3/en not_active Withdrawn
-
2005
- 2005-01-21 US US11/040,535 patent/US7595884B2/en not_active Expired - Lifetime
-
2009
- 2009-09-01 US US12/552,006 patent/US8345235B2/en not_active Expired - Fee Related
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4657390A (en) * | 1985-02-21 | 1987-04-14 | Laser Precision Corporation | Universal spectrometer system having modular sampling chamber |
| US4712912A (en) * | 1986-03-10 | 1987-12-15 | Spectra-Tech, Inc. | Spectrophotometric image scrambler for full aperture microspectroscopy |
| US5048970A (en) * | 1990-06-29 | 1991-09-17 | Nicolas J. Harrick | Optical attachment for variable angle reflection spectroscopy |
| US5088821A (en) * | 1990-06-29 | 1992-02-18 | Nicolas J. Harrick | Spectroscopic analysis system with remote terminals |
| US5106196A (en) | 1990-08-21 | 1992-04-21 | Brierley Philip R | Single adjustment specular reflection accessory for spectroscopy |
| US5262845A (en) * | 1992-06-08 | 1993-11-16 | Harrick Scientific Corporation | Optical accessory for variable angle reflection spectroscopy |
| EP0713082A2 (en) | 1994-11-17 | 1996-05-22 | Ford Motor Company Limited | Optical module for a spectrometer |
| US6184980B1 (en) * | 1995-02-27 | 2001-02-06 | The Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations | Fiber optic sensor for petroleum |
| US5903351A (en) | 1996-11-13 | 1999-05-11 | Samsung Electronics Co., Ltd. | Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber |
| US6310348B1 (en) | 1999-06-25 | 2001-10-30 | Ramspec Corporation | Spectroscopic accessory for examining films and coatings on solid surfaces |
| WO2002082062A1 (en) * | 2001-04-04 | 2002-10-17 | Varian Australia Pty Ltd | Measuring specular reflectance of a sample |
| US20040136005A1 (en) * | 2001-04-04 | 2004-07-15 | Hammer Michael R. | Measuring specular reflectance of a sample |
| WO2002084237A1 (en) | 2001-04-11 | 2002-10-24 | Rio Grande Medical Technologies, Inc. | Illumination device and method for spectroscopic analysis |
| US7265844B2 (en) * | 2003-04-10 | 2007-09-04 | Wisconsin Alumni Research Foundation | Horizontal surface plasmon resonance instrument with improved light path |
Non-Patent Citations (4)
| Title |
|---|
| European Search Report-Jan. 24, 2005. |
| Extended European Search Report; EP 08 07 5194; Mar. 24, 2009; 8 pages. |
| Extended European Search Report; EP 08 07 5195; Mar. 23, 2009; 8 pages. |
| Extended European Search Report; EP 08 07 5196; Mar. 24, 2009; 9 pages. |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1944588A3 (en) | 2009-05-06 |
| US20090323072A1 (en) | 2009-12-31 |
| EP1950541A2 (en) | 2008-07-30 |
| EP1557652A1 (en) | 2005-07-27 |
| EP1939595A3 (en) | 2009-05-06 |
| EP1950541B1 (en) | 2019-05-08 |
| EP1939595B1 (en) | 2016-01-20 |
| EP1557652B1 (en) | 2019-04-17 |
| US8345235B2 (en) | 2013-01-01 |
| US20050185185A1 (en) | 2005-08-25 |
| EP1950541A3 (en) | 2009-05-06 |
| EP1944588A2 (en) | 2008-07-16 |
| EP1939595A2 (en) | 2008-07-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: PERKINELMER LAS, INC., MASSACHUSETTS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HOULT, ROBERT ALAN;EVETTS, PAUL ALEXANDER;REEL/FRAME:016525/0323 Effective date: 20050429 |
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| STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
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| CC | Certificate of correction | ||
| FPAY | Fee payment |
Year of fee payment: 4 |
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| FPAY | Fee payment |
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| MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 12 |
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| AS | Assignment |
Owner name: PERKINELMER HEALTH SCIENCES, INC., MASSACHUSETTS Free format text: CHANGE OF NAME;ASSIGNOR:PERKINELMER LAS, INC.;REEL/FRAME:061456/0488 Effective date: 20081204 |
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| AS | Assignment |
Owner name: OWL ROCK CAPITAL CORPORATION, NEW YORK Free format text: SECURITY INTEREST;ASSIGNOR:PERKINELMER U.S. LLC;REEL/FRAME:066839/0109 Effective date: 20230313 |
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| AS | Assignment |
Owner name: PERKINELMER U.S. LLC, CONNECTICUT Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PERKINELMER HEALTH SCIENCES INC.;REEL/FRAME:063172/0574 Effective date: 20230313 |