US7335862B2 - Resistance heater having a thin-line-shaped resistor - Google Patents
Resistance heater having a thin-line-shaped resistor Download PDFInfo
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- US7335862B2 US7335862B2 US10/547,479 US54747905A US7335862B2 US 7335862 B2 US7335862 B2 US 7335862B2 US 54747905 A US54747905 A US 54747905A US 7335862 B2 US7335862 B2 US 7335862B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/24—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor being self-supporting
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
Definitions
- the present invention relates to resistive heaters for electrically generating Joule heat and particularly relates to a resistive heater including a wire resistor.
- the apparent (or superficial) electrical resistance of the resistive heater can be arbitrarily adjusted without changing the shape of the wire resistor.
- resistive heaters for generating Joule heat by applying currents to thin-film resistors are widely used for various applications.
- resistive heaters include micro-sized resistive heaters placed on circuit substrates or semiconductors such as silicon.
- a large number of attempts have been made to solve problems due to the size of the micro-sized resistive heaters. See, for example, Japanese Unexamined Patent Application Publication Nos. 58-134764, 3-164270, and 61-219666 and Japanese Patent No. 2811209. Techniques relating to these resistive heaters are usually used to heat specific micro-regions (several micrometers square) or relatively large-area regions which are several millimeters to several centimeters square such that semiconductor devices mounted on such regions are heated.
- the shape of a resistive heater placed in the region is not particularly limited. Therefore, a desired object can be readily achieved by allowing the resistive heater to have such a shape that the temperature distribution in the region can be desirably adjusted.
- the electrical resistance of resistive heaters since a large number of holes can be bored in a sheet-shaped resistive heater, the electrical resistance of the heater can be readily adjusted by varying the size and/or number of the holes as disclosed in Japanese Unexamined Patent Application Publication No. 58-134764.
- the temperature distribution obtained by the resistive heater and the electrical resistance of the resistive heater can be adjusted by varying the shape of the resistive heater.
- the electrical resistance of the resistive heater is a key factor to determine the necessary performance, for example, the maximum voltage, of an external circuit for driving the resistive heater. If the resistive heater has a large electrical resistance, an extremely high voltage must be applied to the driving circuit. In consideration of the voltage (about 5 to 12 V) of a power supply, connected to a control circuit (usually including semiconductor devices), for controlling the temperature, there is a problem in that these circuits cannot be connected to a common power supply. Thus, it is necessary to adjust the electrical resistance of the resistive heater.
- an optical component for example, “a thermooptic phase shifter”, used for optical communication includes a resistive heater (see, for example, Japanese Unexamined Patent Application Publication No. 6-34926).
- This resistive heater includes a resistor having a width of several micrometers to several tens micrometers and a length of about 2 to 5 mm. The length of the resistor is extremely greater than the width thereof. Therefore, this resistive heater is different from that resistive heater in that the resistor has a narrow line shape (a narrow stripe shape).
- the thermooptic phase shifter includes an optical waveguide section having a width of about 5 ⁇ m and a length of about 2 to 5 mm. In order to selectively heat the optical waveguide section having such a shape using this resistive heater, the resistor must also have a narrow line shape.
- the resistor is allowed to have a thickness of up to several hundreds nanometers because of the reason due to a semiconductor process used to form the thermooptic phase shifter. That is, the thickness of the resistor is limited.
- the number of materials for forming the optical waveguide section is not very large because such materials must have good machinability, high stability, and high adhesion to a glass material for forming the optical waveguide section.
- the resistor in the resistive heater included in the optical component, there is a limitation that the resistor must have a narrow line shape; hence, it is very difficult to prepare a heating element (in particular, a heating element with low electrical resistance) with desired electrical resistance properties by improving the shape of the resistor. Furthermore, it is not easy to adjust the thickness of the resistive heater or change a material for forming the resistive heater as required because of process and material constraints.
- Japanese Unexamined Patent Application Publication No. 2001-301219 discloses a thermal print head including a wire resistor.
- the thermal print head as specified in claim 1 of this patent document, includes “a linear resistor, a power supply line, a grounding line, and an integrated circuit device, wherein the integrated circuit device includes a plurality of transistors each including respective first electrodes connected to the power supply and respective second electrodes connected to the grounding line and also includes a plurality of pads for connecting the second electrodes to the grounding line and the resistor generates heat when a current is applied to the resistor by bring the transistors into conduction”.
- the second electrodes can be connected to the pads with short wires, the wires therefore have low resistance, a difference in wiring resistance between the transistors is small, electricity consumption is low, the life of a battery included in the thermal print head is long if the thermal print head is of a portable type, the thermal print head can be driven with a low-voltage battery because a voltage drop due to the wiring resistance is small, the quality of an image formed by the thermal print head is high because a difference in wiring resistance between the transistors is small and because a difference in temperature between portions of the resistor is small”.
- the resistor and the power supply line are connected to each other with a plurality of spaced wires and the first electrodes of the transistors are connected to the resistor with wires.
- the first and second electrodes of the transistors correspond to the drains and sources of MOS transistors, respectively. If one of the transistors in the integrated circuit device is turned on, a current flows from the power supply line to the grounding line through the resistor and the transistor. Since the current flows in two wires for connecting the power supply line to the resistor and flows in a portion of the resistor that is sandwiched between the two wires, the resistor portion can be selectively heated.
- Japanese Unexamined Patent Application Publication No. 2002-008901 discloses a thin-film resistor, a hybrid IC, and a microwave monolithic integrated circuit (MMIC).
- a first electrode and second electrode connected to thin-film resistor portions have narrow, irregular sections extending in the direction that the first and second electrodes face to each other; sides of the irregular sections of the first and second electrodes are arranged at predetermined intervals; and the thin-film resistor portions are arranged between the sides facing to each other”.
- an end section of the first electrode is shaped so as to have an interdigital shape so that the irregular electrode sections are formed
- an end section of the second electrode is shaped so as to have an interdigital shape so that the irregular electrode sections are formed
- the electrode sections are engaged with each other in such a manner that the interdigital electrode sections of the second electrode are placed in spaces between the interdigital electrode sections of the first electrode.
- the thin-film resistor portions are separately placed in spaces between the interdigital electrode sections engaged with each other.
- the thin-film resistor can be shaped so as to have a size close to the width of wires and a region for forming the thin-film resistor can therefore be formed so as to have a desired characteristic impedance”.
- tantalum nitride is usually used to prepare resistors.
- Thin-film heaters, made of TaN, for semiconductor circuits have a large electrical resistance because the resistivity of TaN is usually high, 200 to 300 ⁇ cm, under conditions for stably forming layers.
- a TaN layer is processed into fine wires having a thickness of 200 nm a width of 10 ⁇ m, and a length of 2 mm, the wires have an electrical resistance of 2 to 3 k ⁇ .
- the voltage necessary to energize the wire resistor is very high, 17 to 30 V.
- the wire resistor is made of a material, such as tantalum nitride or titanium nitride, having a relatively large resistivity, the apparent electrical resistance of the resistive heater (the superficial electrical resistance of the resistive heater) is less than the electrical resistance estimated from the material.
- a current flows through the resistor portion sandwiched between the two wires for connecting the power supply line to the resistor having a narrow line shape, whereby the resistor portion is selectively allowed to generate heat.
- a technique is not useful in achieving the following object of the present invention: “if the narrow resistor is made of a material, such as tantalum nitride or titanium nitride, having a relatively large resistivity, the apparent electrical resistance of the resistive heater is less than the electrical resistance estimated from the material”.
- the thermal print head is quite different from a resistive heater according to the present invention.
- the thin-film resistor disclosed in Japanese Unexamined Patent Application Publication No. 2002-008901 does not have a wire shape and is therefore different from “a resistive heater including a wire resistor” as specified herein.
- An object (purpose) thereof is as follows: “when the first and second electrodes have a size significantly greater than the width of lines, the first and second electrodes have a characteristic impedance (for example, 50 ⁇ ) unsuitable for transmission lines; hence, desired operations cannot be performed due to miss-matching”.
- An effect thereof is as follows: “the resistive heater can be formed so as to have a size close to the line width and a region for forming the thin-film resistor can therefore be formed so as to have a desired characteristic impedance”. As is clear from the object and effect, the thin-film resistor is quite different from a resistive heater of the present invention.
- a resistive heater of the present invention includes:
- first electrode is connected to a plurality of first nodes placed on the resistor with branches spaced along the resistor
- the second electrode is connected to a plurality of second nodes placed on the resistor with branches spaced along the resistor, the second nodes are spaced from the first nodes in the longitudinal direction of the resistor, and the resistor has effective regions each sandwiched between one of the first nodes and one of the second nodes that is adjacent to the first connection.
- the first electrode is placed on a side of the resistor and extends along the resistor and the second electrode is placed on the side opposite to the first electrode and extends along the resistor.
- the first electrode is connected to the first nodes placed on the resistor with the branches spaced along the resistor and the second electrode is connected to the second nodes placed on the resistor with the branches spaced along the resistor.
- the second nodes are spaced from the first nodes in the longitudinal direction of the resistor and the resistor has effective regions each sandwiched between one of the first nodes and one of the second nodes that is adjacent to the first connection.
- the first and second nodes are alternately arranged in the longitudinal direction of the resistor.
- thermooptic phase shifter of the present invention includes:
- resistor included in the resistive heater extends along the optical waveguide.
- thermooptic phase shifter of the present invention includes the resistive heater, according to Items (1) to (3) described above, for heating the optical waveguide and the resistor of the resistive heater extends along the optical waveguide.
- FIG. 1A is a plan view showing a resistive heater according to a first example of the present invention.
- FIG. 1B is a diagram showing an equivalent circuit of the resistive heater shown in FIG. 1A .
- FIG. 2A is a plan view showing a resistive heater according to a second example of the present invention.
- FIG. 2B is a diagram showing an equivalent circuit of the resistive heater shown in FIG. 2A .
- FIG. 3A is a plan view showing a resistive heater according to a third example of the present invention.
- FIG. 3B is a diagram showing an equivalent circuit of the resistive heater shown in FIG. 3A .
- FIG. 4A is a plan view showing a resistive heater according to a fourth example of the present invention.
- FIG. 4B is a diagram showing an equivalent circuit of the resistive heater shown in FIG. 4A .
- FIGS. 5A to 5E are sectional views showing principal parts of the resistive heater of the fourth example in the order of manufacturing steps.
- FIG. 6 is a plan view showing a configuration of a thermooptic phase shifter according to a fifth example of the present invention.
- FIG. 7A is a plan view showing a known resistive heater.
- FIG. 7B is a diagram showing an equivalent circuit of the known resistive heater shown in FIG. 7A .
- a resistive heater according to the present invention will now be described.
- the wire resistor is divided into a plurality of effective regions and non-effective regions other than the effective regions with the first and second nodes. If the resistor is made of a material, such as tantalum nitride or titanium nitride, having a relatively large resistivity, the apparent electrical resistance (the superficial electrical resistance of the resistive heater) is less than the electrical resistance of the material because the effective regions are connected to the first and second electrodes in parallel. Therefore, the amount of heat generated by the resistive heater can be controlled with a simple electronic circuit.
- the number, position, and/or length of the effective regions can be varied by changing the number and/or position of the branches of the first or second electrode. Therefore, the apparent electrical resistance of the resistive heater (the superficial electrical resistance of the resistive heater) can be readily adjusted to any value.
- the first electrode and the second electrode i.e., a positive electrode and a negative electrode, are alternately arranged in the longitudinal direction of the resistor; hence, heat is generated from substantially the whole of the resistor. Therefore, there is an advantage in that the temperature of the resistive heater is uniform in the longitudinal direction thereof. Furthermore, since the temperature of the resistive heater is uniform in the longitudinal direction, the resistor can be prevented from being deteriorated. Therefore, there is an advantage in that the resistive heater has high long-term reliability.
- the first and second nodes are arranged such that the effective regions extending in the longitudinal direction of the resistor have the same length.
- the effective regions generate the same amount of heat (calorific power); hence, the temperature of the resistive heater is uniform in the longitudinal direction. Therefore, there is an advantage in that a stress applied to the resistor can be greatly reduced.
- the effective regions sandwiched between the first and second electrodes have the same electrical resistance; hence, there is an advantage in that the resistive heater can be readily designed, controlled, and operated.
- any two of the first and second nodes are each placed at one of both ends of the resistor.
- the apparent electrical resistance R′ of the resistive heater is determined depending only on the number n of the effective regions of the resistive heater. This means that the apparent electrical resistance R′ can be designed using only the number n of the effective regions; hence, there is an advantage in that the resistive heater can be readily designed.
- the resistor is made of a material principally containing tantalum nitride or titanium nitride.
- the material for forming the resistor has high reliability and the tantalum nitride and titanium nitride have relatively high resistivity; hence, there is an advantage in that advantages of the present invention can be maximized.
- the first and second electrodes are made of a material containing at least two selected from the group consisting of gold, platinum, chromium, titanium, copper, aluminum, titanium nitride, and tantalum nitride.
- the first and second electrodes have an electrical resistance sufficiently less than that of the resistor; hence, there is an advantage in that the resistor can efficiently generate heat.
- FIG. 1A is a plan view showing a configuration of a resistive heater according to a first example of the present invention and FIG. 1B is a diagram showing an equivalent circuit of the resistive heater.
- the resistive heater of the first example is placed on an insulating substrate (not shown) and includes a wire resistor 30 having a predetermined length; a positive electrode 10 , placed on a side (the upper side in FIG. 1A ) of the resistor 30 , extending along the resistor 30 ; and a negative electrode 20 , placed on the side (the lower side in FIG. 1A ) opposite to the positive electrode 10 , extending along the resistor 30 .
- the resistor 30 extends straight on the substrate and has a uniform width of, for example, 10 ⁇ m.
- the resistor 30 has a length of, for example, 2 mm and a thickness of, for example, 200 nm.
- the resistor 30 is made of TaN or TiN.
- the positive electrode 10 extends along the resistor 30 and they are spaced from each other.
- the negative electrode 20 extends along the resistor 30 and they are spaced from each other.
- the positive electrode 10 and the negative electrode 20 are parallel to the resistor 30 .
- the positive electrode 10 and the negative electrode 20 each include a conductive body having a resistivity sufficiently less than that of the resistor 30 .
- the conductive body has a triple layer structure consisting of an aluminum (Al) layer, a titanium (Ti) layer, and a gold (Au) layer.
- the positive electrode 10 includes a connection 11 , an extension 12 , and two branches 13 and 14 .
- the connection 11 is connected to an external circuit, that is, the connection 11 is used as a bonding pad.
- the extension 12 has a stripe shape and extends from the connection 11 in parallel to the resistor 30 .
- the branches 13 and 14 are arranged between the extension 12 and the resistor 30 .
- the branches 13 and 14 have a stripe shape, are narrower than the extension 12 , meet the resistor 30 and the extension 12 at right angles, and are spaced along the resistor 30 .
- the branch 13 is connected to a node P 2 placed on the resistor 30 .
- the branch 14 is connected to a node P 3 placed on the resistor 30 .
- the positive electrode 10 has an electrical resistance sufficiently less than that of the resistor 30 .
- the negative electrode 20 as well as the positive electrode 10 includes a connection 21 , an extension 22 , and two branches 23 and 24 .
- the connection 21 is connected to an external circuit, that is, the connection 21 is used as a bonding pad.
- the extension 22 has a stripe shape and extends from the connection 21 in parallel to the resistor 30 .
- the branches 23 and 24 are arranged between the extension 22 and the resistor 30 .
- the branches 23 and 24 have a stripe shape, are narrower than the extension 22 , meet the resistor 30 and the extension 22 at right angles, and are spaced along the resistor 30 .
- the branch 23 is connected to a node P 1 placed on the resistor 30 .
- the branch 24 is connected to a node P 4 placed on the resistor 30 .
- the negative electrode 20 also has an electrical resistance sufficiently less than that of the resistor 30 .
- the node P 2 connected to the branch 13 of the positive electrode 10 is spaced from the node P 3 connected to the branch 14 of the positive electrode 10 in the longitudinal direction of the resistor 30 .
- the node P 1 connected to the branch 23 of the negative electrode 20 is spaced from the node P 4 connected to the branch 24 of the negative electrode 20 in the longitudinal direction of the resistor 30 .
- the node P 1 connected to the negative electrode 20 is spaced from the nodes P 2 and P 3 placed on the positive electrode 10 in the longitudinal direction of the resistor 30 .
- the node P 4 placed on the negative electrode 20 is spaced from the nodes P 2 and P 3 placed on the positive electrode 10 in the longitudinal direction of the resistor 30 . That is, the nodes P 1 to P 4 are located at different positions.
- the resistor 30 has an effective region 31 sandwiched between the node P 2 placed on the positive electrode 10 and the node P 1 placed on the negative electrode 20 and an effective region 32 sandwiched between the node P 3 placed on the positive electrode 10 and the node P 4 placed on the negative electrode 20 (see FIGS. 1A and 1B ). Regions other than the effective regions 31 and 32 do not function as “resistive regions” and are therefore referred to as non-effective regions.
- an equivalent circuit of the resistor 30 is as shown in FIG. 1B , wherein R 1 represents the electrical resistance of the effective region 31 and R 2 represents the electrical resistance of the effective region 32 .
- the apparent electrical resistance of the resistive heater (the superficial electrical resistance of the resistive heater) according to the first example of the present invention is equal to the electrical resistance of a circuit including two resistors, connected to each other in parallel, having an electrical resistance equal to R 1 or R 2 . Therefore, the apparent electrical resistance of the resistive heater is greatly less than the electrical resistance estimated from the resistivity of the resistor 30 .
- the resistor 30 is made of a material, such as TaN or TiN, having a relatively large resistivity
- the resistive heater (see FIGS. 1A and 1B ) according to the first example of the present invention has an apparent electrical resistance less than that estimated from the material. Therefore, the amount of heat generated by the resistive heater can be controlled with a simple electronic circuit.
- the number, position, and/or length of the effective regions of the resistor 30 can be varied by changing the number and/or position of the branches of the positive or negative electrode 10 or 20 . Therefore, the apparent electrical resistance of the resistive heater can be adjusted to any value.
- control circuit a control circuit, a driving circuit, and other circuits can be connected to a common power supply; hence, a small-sized, user-friendly heating element can be achieved.
- FIG. 7A is a plan view showing a configuration of a known resistive heater, which is a comparative example
- FIG. 7B is a diagram showing an equivalent circuit of the known resistive heater.
- the known resistive heater shown in FIG. 7A includes a wire resistor 130 , a positive electrode 110 connected to one end of the resistor 130 , a negative electrode 120 connected to the other end thereof.
- the equivalent circuit thereof is as shown in FIG. 7B and the apparent electrical resistance of this resistive heater is equal to the electrical resistance R of the resistor 130 . Therefore, once the resistor 130 is formed, the apparent electrical resistance of this resistive heater cannot be adjusted.
- the configuration of the resistive heater according to the first example of the present invention can be generally described as below.
- the resistive heater has an electrical resistance less than that of the known resistive heater shown in FIGS. 7A and 7B .
- FIG. 2A is a plan view showing a configuration of a resistive heater according to a second example of the present invention and FIG. 2B is a diagram showing an equivalent circuit of the resistive heater.
- the resistive heater of the second example is placed on an insulating substrate (not shown) and includes a wire resistor 30 A having a predetermined length; a positive electrode 10 A, placed on a side (the upper side in FIG. 2A ) of the resistor 30 A, extending along the resistor 30 A; and a negative electrode 20 A, placed on the side (the lower side in FIG. 2A ) opposite to the positive electrode 10 A, extending along the resistor 30 A.
- resistor 30 A Other components of the resistor 30 A are the same as those of the resistor 30 of the first example and the description of the resistor 30 A is therefore omitted.
- the positive electrode 10 A extends along the resistor 30 A and they are spaced from each other.
- the negative electrode 20 A extends along the resistor 30 A and they are spaced from each other.
- the positive electrode 10 A and the negative electrode 20 A are parallel to the resistor 30 A.
- the positive electrode 10 and the negative electrode 20 each include a conductive body having a resistivity sufficiently less than that of the resistor 30 A.
- the positive electrode 10 A includes a connection 11 A, an extension 12 A, and three branches 13 A, 14 A, and 15 A.
- the connection 11 A is connected to an external circuit.
- the extension 12 A has a stripe shape and extends from the connection 11 A in parallel to the resistor 30 A.
- the branches 13 A, 14 A, and 15 A are arranged between the extension 12 A and the resistor 30 A.
- the branches 13 A, 14 A, and 15 A have a stripe shape, are narrower than the extension 12 A, meet the resistor 30 A and the extension 12 A at right angles, and are spaced along the resistor 30 .
- the branch 13 A is connected to a node P 11 placed on the resistor 30 A.
- the branch 14 A is connected to a node P 13 placed on the resistor 30 A.
- the branch 15 A is connected to a node P 15 placed on the resistor 30 A.
- the positive electrode 10 A has an electrical resistance sufficiently less than that of the resistor 30 A.
- the negative electrode 20 A as well as the positive electrode 10 A includes a connection 21 A, an extension 22 A, and three branches 23 A, 24 A, and 25 A.
- the connection 21 A is connected to an external circuit.
- the extension 22 A has a stripe shape and extends from the connection 21 A in parallel to the resistor 30 A.
- the branches 23 A, 24 A, and 25 A are arranged between the extension 22 A and the resistor 30 A.
- the branches 23 A, 24 A, and 25 A have a stripe shape, are narrower than the extension 22 A, meet the resistor 30 A and the extension 22 A at right angles, and are spaced along the resistor 30 A.
- the branch 23 A is connected to a node P 12 placed on the resistor 30 A.
- the branch 24 A is connected to a node P 14 placed on the resistor 30 A.
- the branch 25 A is connected to a node P 16 placed on the resistor 30 A.
- the negative electrode 20 A also has an electrical resistance sufficiently less than that of the resistor 30 A.
- the nodes P 11 , P 13 , and P 15 connected to the branches 13 A, 14 A, and 15 A, respectively, on the positive electrode 10 A are spaced from each other in the longitudinal direction of the resistor 30 A.
- the nodes P 12 , P 14 , and P 16 connected to the branches 23 A, 24 A, and 25 A, respectively, on the positive electrode 10 A are spaced from each other in the longitudinal direction of the resistor 30 A.
- the node P 12 on the negative electrode 20 A is spaced from the nodes P 11 , P 13 , and P 15 on the positive electrode 10 A in the longitudinal direction of the resistor 30 A.
- the node P 14 on the negative electrode 20 A is spaced from the nodes P 11 , P 13 , and P 15 on the positive electrode 10 A in the longitudinal direction of the resistor 30 A.
- the node P 16 on the negative electrode 20 A is spaced from the nodes P 11 , P 13 , and P 15 on the positive electrode 10 A in the longitudinal direction of the resistor 30 A. That is, the nodes P 11 to P 16 are located at different positions.
- the resistor 30 A has effective regions 31 A, 32 A, 33 A, 34 A, and 35 A (see FIGS. 2A and 2B ). Regions other than the five effective regions 31 A, 32 A, 33 A, 34 A, and 35 A do not function as “resistive regions” and are therefore referred to as non-effective regions.
- the region 31 A is a portion of the resistor 30 A that is sandwiched between the node P 11 on the positive electrode 10 A and the node P 12 on the negative electrode 20 A.
- the region 32 A is a portion of the resistor 30 A that is sandwiched between the node P 13 on the positive electrode 10 A and the node P 12 on the negative electrode 20 A.
- the region 33 A is a portion of the resistor 30 A that is sandwiched between the node P 13 on the positive electrode 10 A and the node P 14 on the negative electrode 20 A.
- the region 34 A is a portion of the resistor 30 A that is sandwiched between the node P 15 on the positive electrode 10 A and the node P 14 on the negative electrode 20 A.
- the region 35 A is a portion of the resistor 30 A that is sandwiched between the node P 15 on the positive electrode 10 A and the node P 16 on the negative electrode 20 A.
- an equivalent circuit of the resistor 30 A is as shown in FIG. 2B , wherein R 1 , R 2 , R 3 , R 4 , and R 5 represent the electrical resistance of the effective regions 31 A, 32 A, 33 A, 34 A, and 35 A, respectively.
- the apparent electrical resistance R′ of the resistive heater according to the second example of the present invention is equal to the electrical resistance of a circuit including five resistors, connected to each other in parallel, having an electrical resistance equal to R 1 , R 2 , R 3 , R 4 , or R 5 . Therefore, the apparent electrical resistance R′ of the resistive heater is greatly less than the electrical resistance estimated from the resistivity of the resistor 30 A.
- the resistive heater of the second example has the same advantages as those of the resistive heater of the first example. Furthermore, the apparent electrical resistance R′ of the resistive heater of the second example is less than that of the resistive heater of the first example.
- the resistor 30 A has no non-effective regions except for both end regions thereof. This means that available regions of the resistor 30 A can be fully used. Therefore, almost all regions of the resistor 30 A are allowed to generate heat; hence, the temperature thereof is uniform.
- the resistive heater of the second example since the resistive heater of the second example generates heat from the effective regions having a larger area as compared to the resistive heater of the first example, a load applied to the resistor 30 A is distributed; hence, there is an advantage in that this resistive heater can be prevented from being deteriorated.
- FIG. 3A is a plan view showing a configuration of a resistive heater according to a third example of the present invention and FIG. 3B is a diagram showing an equivalent circuit of the resistive heater.
- the resistive heater of the third example as well as the resistive heater of the first example is placed on an insulating substrate (not shown) and includes a wire resistor 30 B having a predetermined length; a positive electrode 10 B, placed on a side (the upper side in FIG. 3A ) of the resistor 30 B, extending along the resistor 30 B; and a negative electrode 20 B, placed on the side (the lower side in FIG. 3A ) opposite to the positive electrode 10 B, extending along the resistor 30 B.
- resistor 30 B Other components of the resistor 30 B are the same as those of the resistor 30 of the first example and the description of the resistor 30 B is therefore omitted.
- the positive electrode 10 B has the same configuration as that of the positive electrode 10 of the first example except that the positive electrode 10 B includes three branches 13 B, 14 B, and 15 B.
- Reference numeral 11 B represents a connection and reference numeral 12 B represents an extension.
- the branch 13 B of the positive electrode 10 B is connected to a node P 21 placed on the resistor 30 B.
- the branch 14 B is connected to a node P 23 placed on the resistor 30 B.
- the branch 15 B is connected to a node P 24 placed on the resistor 30 B.
- the negative electrode 20 B has the same configuration as that of the negative electrode 20 of the first example.
- Reference numeral 21 B represents a connection
- reference numeral 22 B represents an extension
- reference numerals 23 B and 24 B represent branches.
- the branch 23 B of the negative electrode 20 B is connected to a node P 22 placed on the resistor 30 B.
- the branch 24 B is connected to a node P 25 placed on the resistor 30 B.
- an effective region 31 B is present between the nodes P 21 and P 22 of the resistor 30 B
- an effective region 32 B is present between the nodes P 22 and P 23
- an effective region 33 B is present between the nodes P 24 and P 25 .
- the nodes P 21 to P 25 are arranged such that the three effective regions 31 B, 32 B, and 33 B have the same length. Therefore, the effective regions 31 B, 32 B, and 33 B have the same electrical resistance.
- the apparent electrical resistance R′ of the resistive heater according to the third example of the present invention is equal to the electrical resistance of a circuit including three resistors, connected to each other in parallel, having an electrical resistance equal to R 1 , R 2 , or R 3 . Therefore, the apparent electrical resistance R′ of the resistive heater is greatly less than the electrical resistance estimated from the resistivity of the resistor 30 B.
- the resistive heater of the third example has the same advantage as that of the resistive heater of the first example.
- the apparent electrical resistance R′ of the resistive heater can be readily determined using the number n of the effective regions of the resistive heater and the percentage m of the effective regions in the resistive heater.
- FIG. 4A is a plan view showing a configuration of a resistive heater according to a fourth example of the present invention and FIG. 4B is a diagram showing an equivalent circuit of the resistive heater.
- the resistive heater of the fourth example is placed on an insulating substrate (not shown) and includes a wire resistor 30 C having a predetermined length; a positive electrode 10 C, placed on a side (the upper side in FIG. 4A ) of the resistor 30 C, extending along the resistor 30 C; and a negative electrode 20 C, placed on the side (the lower side in FIG. 4A ) opposite to the positive electrode 10 C, extending along the resistor 30 C.
- the resistor 30 C has no region extending out of a node P 31 nor P 36 .
- the resistor 30 C has substantially the same configuration as that of the resistor 30 A, shown in FIGS. 2A and 2B , according to the second example except that the nodes P 31 and P 36 are each placed at one of both ends of the resistor 30 C; hence, the description of the resistor 30 C is omitted.
- the positive electrode 10 C has the same configuration as that of the positive electrode 10 A of the second example except that the positions of three branches 13 C, 14 C, and 15 C included in the positive electrode 10 C are different from those of the branches of the positive electrode 10 A of the second example.
- Reference numeral 11 C represents a connection and reference numeral 12 C represents an extension.
- the branch 13 C of the positive electrode 10 C is connected to the node P 31 of the resistor 30 C.
- the branch 14 C is connected to a node P 33 placed on the resistor 30 C.
- the branch 15 C is connected to a node P 35 placed on the resistor 30 C.
- the negative electrode 20 C has the same configuration as that of the negative electrode 20 A of the second example except that the positions of three branches 23 C, 24 C, and 25 C included in the negative electrode 20 C are different from those of the branches of the negative electrode 20 A of the second example.
- Reference numeral 21 C represents a connection and reference numeral 22 C represents an extension.
- the branch 23 C of the negative electrode 20 C is connected to a node P 32 placed on the resistor 30 C.
- the branch 24 C is connected to a node P 34 placed on the resistor 30 C.
- the branch 25 C is connected to the node P 36 of the resistor 30 C.
- an effective region 31 C is present between the nodes P 31 and P 32 of the resistor 30 C
- an effective region 32 C is present between the nodes P 32 and P 33
- an effective region 33 C is present between the nodes P 33 and P 34
- an effective region 34 C is present between the nodes P 34 and P 35
- an effective region 35 C is present between the nodes P 35 and P 36 .
- the nodes P 31 to P 36 are arranged such that the five effective regions 31 C, 32 C, 33 C, 34 C, and 35 C have the same length. Therefore, the effective regions 31 C, 32 C, 33 C, 34 C, and 35 C have the same electrical resistance.
- the apparent electrical resistance R′ of the resistive heater according to the fourth example of the present invention is equal to the electrical resistance of a circuit including five resistors, connected to each other in parallel, having an electrical resistance equal to R 1 , R 2 , R 3 , R 4 , or R 5 . Therefore, the apparent electrical resistance R′ of the resistive heater is greatly less than the electrical resistance estimated from the resistivity of the resistor 30 C.
- the resistive heater of the fourth example has the same advantage as that of the resistive heater of the first example.
- the apparent electrical resistance R′ of the resistive heater can be determined using only the number n of the effective regions of the resistive heater. This means that the apparent electrical resistance R′ can be designed based only on the number n of the effective regions; hence, there is an advantage in that the resistive heater of the fourth example can be readily designed in addition to the advantages described in the third example.
- FIGS. 4A and 4B A method for manufacturing the resistive heater (see FIGS. 4A and 4B ) according to the fourth example of the present invention will now be described.
- FIGS. 5A to 5E are sectional views showing principal parts of the resistive heater in the order of manufacturing steps.
- the resistor 30 C is made of a material, such as TiN, having a resistivity of 200 ⁇ cm.
- TiN as well as TaN is very chemically stable as disclosed in Japanese Unexamined Patent Application Publication Nos. 2000-294738 and 6-34925; hence, TiN is useful in achieving high long-term reliability.
- the following layers are formed on an insulating substrate 50 in this order by a sputtering process: a TiN layer 51 having a thickness of, for example, 200 nm; an aluminum (Al) layer 52 having a thickness of, for example, 200 nm; a titanium (Ti) layer 53 having a thickness of, for example, 100 nm; and a gold (Au) layer 54 having a thickness of, for example, 500 nm.
- the insulating substrate 50 include a glass substrate, ceramic substrate, and silicon substrate having a silica layer thereon.
- the following process can be used instead of the sputtering process: a reactive sputtering process, an electron beam vapor deposition process, a resistance-heating vapor deposition process, or another process.
- the resistor 30 C is prepared by processing the TiN layer 51 and may be made of TaN or another material.
- the aluminum layer 52 , the titanium layer 53 , and the gold layer 54 form a conductive layer having a triple layer structure.
- the conductive layer is patterned into the positive electrode 10 C and the negative electrode 20 C.
- the conductive layer may have a triple layer structure consisting of a copper (Cu) layer, a chromium (Cr) layer, and a platinum (Pt) layer without including the aluminum layer 52 and the titanium layer 53 and another type of conductive layer may be used.
- a photoresist layer 60 is formed on the Au layer 54 and then patterned by a photolithographic process.
- the resulting photoresist layer 60 is used as a mask when the Al layer 52 , the Ti layer 53 , and the Au layer 54 are etched into the positive electrode 10 C and the negative electrode 20 C.
- the Al layer 52 , the Ti layer 53 , and the Au layer 54 are etched using the photoresist layer 60 as a mask, whereby the positive electrode 10 C and negative electrode 20 C each including portions of these three layers are formed as shown in FIG. 5C .
- a wet etching process or a dry etching process such as a milling process or a reactive ion etching process may be used.
- the photoresist layer 60 is removed and the surfaces of the positive electrode 10 C, the negative electrode 20 C, and the TiN layer 51 are then cleaned. As shown in FIG. 5D , another photoresist layer 61 is formed on the TiN layer 51 and then patterned by a photolithographic process. This photoresist layer 61 is used as a mask when the TiN layer 51 is etched so as to have a wire shape identical to the shape of the resistor 30 C.
- the TiN layer 51 is etched using the photoresist layer 61 as a mask, whereby the resistor 30 C made of TiN layer 51 as shown in FIG. 5E .
- a wet etching process or a dry etching process such as a milling process or a reactive ion etching process may be used.
- the resistive heater shown in FIGS. 4A and 4B , according to the fourth example is completed.
- the resistor 30 C made of TiN layer 51 has a width of 10 ⁇ m, a length of 2 mm, and a thickness of 200 nm. If the known resistive heater shown in FIGS. 7A and 7B includes the resistor 30 C, this known resistive heater has an electrical resistance of 2 k ⁇ because the resistivity of TiN is 200 ⁇ cm. In order to allow this known resistive heater to generate 300 mW of heat, a power supply with a voltage of 17 V or more must be used. However, the voltage of a power supply for electronic circuits is about 3 to 12 V; hence, it is useless to connect this known resistive heater and an electronic circuit to a common power supply. Therefore, a power supply devoted to this known resistive heater must be designed.
- the voltage of a necessary power supply is about 3.1 V. Therefore, it is more useful to commonly connect this resistive heater and the electronic circuit to this power supply.
- Such a material preferably contains at least two selected from the group consisting of gold, platinum, chromium, titanium, copper, aluminum, titanium nitride, and tantalum nitride. Other conductive elements or compounds other than these elements and compounds may be used.
- the resistivity of the positive electrode 10 C and that of the negative electrode 20 C are critical.
- an imaginary resistive heater has the same configuration as that of the known resistive heater shown in FIGS. 7A and 7B and includes a positive electrode 110 , a negative electrode 120 , and a resistor 130 and a material for forming this positive electrode 110 and this negative electrode 120 has a resistivity equal to that of a material for forming this resistor 130 .
- a positive electrode and a negative electrode have a length greater than or equal to that of this resistor 130 .
- this positive electrode 110 and this negative electrode 120 have a length equal to that of this resistor 130 , this positive electrode 110 and this negative electrode 120 consume half of the electricity input to the imaginary resistive heater. That is, in order to allow this resistor 130 to generate 300 mW of heat, 600 mW of electricity must be input to the imaginary resistive heater.
- another imaginary resistive heater has the same configuration as that of the resistive heater, shown in FIGS. 4A and 4B , according to the fourth example and includes a positive electrode 10 C, a negative electrode 20 C, and a resistor 30 C. Since these positive and negative electrodes 10 C and 20 C have a length greater than that of those positive and negative electrodes included in the known resistive heater shown in FIGS. 7A and 7B , this resistor 30 C has an apparent electrical resistance R′ less than that of that resistor included in the known resistive heater; however, the sum of the electrical resistances of these positive and negative electrodes 10 C and 20 C is greater than the sum of the electrical resistances of those positive and negative electrodes of the known resistive heater.
- each section between the connection 11 C (bonding pad) of the positive electrode 10 C and the node P 31 , P 33 , or P 35 thereof has an electrical resistance of about 1 to 3 ⁇ and each section between the connection 21 C (bonding pad) of the negative electrode 20 C and the node P 32 , P 34 , or P 36 thereof has an electrical resistance of about 1 to 3 ⁇ . Since the number n of the effective regions of the resistor 30 C is five (see FIGS.
- the positive and negative electrodes 10 C and 20 C are allowed to have an electrical resistance less than 4% of that of the resistor 30 C. If the number n of the effective regions of the resistor 30 C is eight, the positive and negative electrodes 10 C and 20 C are allowed to have an electrical resistance less than 10% of that of the resistor 30 C.
- FIG. 6 is a plan view showing a configuration of a thermooptic phase shifter according to a fifth example of the present invention.
- the thermooptic phase shifter includes a resistive heater, which has substantially the same configuration as that of the resistive heater of the fourth example.
- the thermooptic phase shifter further includes an insulating substrate (not shown) and a straight optical waveguide extending along the insulating substrate.
- the optical waveguide has a core 70 , which is simply shown in FIG. 6 .
- the core 70 is surrounded by a clad layer, which is not shown.
- the resistive heater included in the thermooptic phase shifter includes a wire resistor 30 D having a predetermined length; a positive electrode 10 D, placed on a side (the upper side in FIG. 6 ) of the resistor 30 D, extending along the resistor 30 D; and a negative electrode 20 D, placed on the side (the lower side in FIG. 6 ) opposite to the positive electrode 10 D, extending along the resistor 30 D.
- the resistor 30 D has the same configuration as that of the resistor 30 C, shown in FIGS. 4A and 4B , according to the fourth example.
- the resistor 30 D is placed above the clad layer surrounding the optical waveguide core 70 and extends in parallel to the optical waveguide core 70 .
- the positive electrode 10 D includes a connection 11 D, an L-shaped extension 12 D, and three straight branches 13 D, 14 D, and 15 D.
- the branch 13 D is connected to a node P 41 placed at one end of the resistor 30 D.
- the branch 14 D is connected to a node P 43 placed on the resistor 30 D.
- the branch 15 D is connected to a node P 45 placed on the resistor 30 D.
- the negative electrode 20 D includes a connection 21 D, a straight extension 22 D, and three straight branches 23 D, 24 D, and 25 D.
- the branch 23 D is connected to a node P 42 placed on the resistor 30 D.
- the branch 24 D is connected to a node P 44 placed on the resistor 30 D.
- the branch 25 D is connected to a node P 46 placed at the other end of the resistor 30 D.
- An effective region 31 D is present between the nodes P 1 and P 42 of the resistor 30 C
- an effective region 32 D is present between the nodes P 42 and P 43
- an effective region 33 D is present between the nodes P 43 and P 44
- an effective region 34 D is present between the nodes P 44 and P 45
- an effective region 35 D is present between the nodes P 45 and P 46 .
- the nodes P 41 to P 46 are arranged such that the five effective regions 31 D, 32 D, 33 D, 34 D, and 35 D have the same length. Therefore, the effective regions 31 D, 32 D, 33 D, 34 D, and 35 D have the same electrical resistance.
- the apparent electrical resistance R′ of the resistive heater according to the fifth example of the present invention is equal to the electrical resistance of a circuit including five resistors, connected to each other in parallel, having an electrical resistance equal to R 1 , R 2 , R 3 , R 4 , or R 5 .
- thermooptic phase shifter can vary the phase of light propagated through the optical waveguide in such a manner that the resistor 30 D is allowed to generate heat by applying a current to the resistive heater and the refractive index of the optical waveguide core 70 is varied by heating the optical waveguide core 70 using the heat.
- the optical waveguide core 70 In order to minimize the amount of electricity consumed by the resistor 30 D, the optical waveguide core 70 must be efficiently heated. Since the heat generated from the resistor 30 D is transmitted to the optical waveguide core 70 through the clad layer made of glass, the distance between the optical waveguide core 70 and the resistor 30 D for generating heat is preferably small as long as optical properties of the core 70 are not deteriorated. In this example, the resistor 30 D is placed close to the optical waveguide core 70 and extends in parallel to the optical waveguide core 70 ; hence, the distance therebetween is minimum and the heat generated from the resistor 30 D can therefore be efficiently transmitted to the core 70 . Furthermore, the temperature of a section, extending in the direction that light travels, for heating the core 70 is uniform; hence, optical properties of the core 70 can be prevented from being deteriorated due to thermal stress.
- the apparent electrical resistance (the superficial electrical resistance of the resistive heater) is less than the electrical resistance estimated from the material. Therefore, the amount of heat generated from the resistive heater can be controlled with a simple electronic circuit.
- the apparent electrical resistance of the resistive heater can be adjusted to any value. Accordingly, the present invention is exceedingly useful in manufacturing a wire-shaped resistive heater controllable with a simple electronic circuit.
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
(1/R′)=(1/R)×{(1/m 1)+(1/m 2)+ . . . +(1/m n)} (1)
wherein R′ represents the apparent electrical resistance of the resistive heater observed from an external driving circuit, m1, m2, . . . , and mn represent the percentages of effective regions in the resistive heater and are less than 1, and n represents the number of the effective regions and is not equal to 0.
1/R′=(1/R)×(n/m) (2)
wherein R′ represents the apparent electrical resistance of the resistive heater observed from an external driving circuit, n represents the number of the effective regions of the resistive heater and is not equal to 0, and m represents the percentage of the effective regions in the resistive heater and is less than 1.
m×n=1 (3)
R′=R/(n 2) (4)
R′=2 kΩ/(52)=80 Ω
In order to allow the resistive heater to generate 300 mW of heat, the voltage of a necessary power supply is 4.9 V. Therefore, it is useful to commonly connect the resistive heater and an electronic circuit to this power supply.
R′=2 kΩ/(82)=31.25 Ω
In order to allow this resistive heater to generate 300 mW of heat, the voltage of a necessary power supply is about 3.1 V. Therefore, it is more useful to commonly connect this resistive heater and the electronic circuit to this power supply.
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/954,282 US20080107370A1 (en) | 2003-05-30 | 2007-12-12 | Resistive heater including wire resistor |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2003-153903 | 2003-05-30 | ||
JP2003153903 | 2003-05-30 | ||
PCT/JP2004/007738 WO2004107813A1 (en) | 2003-05-30 | 2004-05-28 | Resistance heater having a thin-line-shaped resistor |
Related Child Applications (1)
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US11/954,282 Division US20080107370A1 (en) | 2003-05-30 | 2007-12-12 | Resistive heater including wire resistor |
Publications (2)
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US20060191900A1 US20060191900A1 (en) | 2006-08-31 |
US7335862B2 true US7335862B2 (en) | 2008-02-26 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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US10/547,479 Expired - Fee Related US7335862B2 (en) | 2003-05-30 | 2004-05-28 | Resistance heater having a thin-line-shaped resistor |
US11/954,282 Abandoned US20080107370A1 (en) | 2003-05-30 | 2007-12-12 | Resistive heater including wire resistor |
Family Applications After (1)
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US11/954,282 Abandoned US20080107370A1 (en) | 2003-05-30 | 2007-12-12 | Resistive heater including wire resistor |
Country Status (4)
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US (2) | US7335862B2 (en) |
JP (1) | JPWO2004107813A1 (en) |
CN (1) | CN1757264A (en) |
WO (1) | WO2004107813A1 (en) |
Cited By (2)
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---|---|---|---|---|
US20090162010A1 (en) * | 2007-10-15 | 2009-06-25 | Wei Wu | Electrode having nanofilaments |
US20090188904A1 (en) * | 2008-01-30 | 2009-07-30 | Raytheon Company | Fault Tolerant Heater Circuit |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017181849A (en) * | 2016-03-31 | 2017-10-05 | ルネサスエレクトロニクス株式会社 | Semiconductor device and method for manufacturing the same |
JP2019191474A (en) * | 2018-04-27 | 2019-10-31 | 日本電気株式会社 | Connection structure and wavelength-variable laser |
CN111106205A (en) * | 2019-11-29 | 2020-05-05 | 中国科学院微电子研究所 | Silicon-based photonic devices and methods of fabricating the same |
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Also Published As
Publication number | Publication date |
---|---|
WO2004107813A1 (en) | 2004-12-09 |
CN1757264A (en) | 2006-04-05 |
US20080107370A1 (en) | 2008-05-08 |
US20060191900A1 (en) | 2006-08-31 |
JPWO2004107813A1 (en) | 2006-07-20 |
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