US6387530B1 - Patterned magnetic media via thermally induced phase transition - Google Patents
Patterned magnetic media via thermally induced phase transition Download PDFInfo
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- US6387530B1 US6387530B1 US09/593,243 US59324300A US6387530B1 US 6387530 B1 US6387530 B1 US 6387530B1 US 59324300 A US59324300 A US 59324300A US 6387530 B1 US6387530 B1 US 6387530B1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/743—Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/855—Coating only part of a support with a magnetic layer
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
- Y10T428/12104—Particles discontinuous
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12465—All metal or with adjacent metals having magnetic properties, or preformed fiber orientation coordinate with shape
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12639—Adjacent, identical composition, components
- Y10T428/12646—Group VIII or IB metal-base
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31—Surface property or characteristic of web, sheet or block
Definitions
- the present invention relates to improved magnetic data/information recording, storage and retrieval media and to a method for manufacturing same. More specifically, the present invention relates to improved, high areal recording and storage density, patterned magnetic media and to a method for manufacturing same which can be readily practiced at a low cost comparable to that of conventional multi-grain magnetic media.
- Magnetic media are widely utilized in various applications, particularly in the computer industry, and efforts are continually made with the aim of increasing the areal recording density, i.e., the bit density, or bits/unit area, of the magnetic media.
- Conventional magnetic thin-film media wherein a fine-grained polycrystalline magnetic alloy layer serves as the active recording medium layer, are typically formed as “perpendicular” or “longitudinal” media, depending upon the direction of magnetization of the grains.
- the “perpendicular” recording media have been found superior to the more common “longitudinal” media in achieving very high bit densities.
- patterned magnetic media utilize only a single, relatively large-sized particle for storage of a single data bit.
- the single particles i.e., the basic storage unit
- the single particles are more than about ten times larger than the thermally unstable grains of conventional very high recording density magnetic media, in principle permitting storage densities of about 100 Gb/in 2 and above.
- patterned magnetic media Analogous to the situation with conventional polycrystalline thin film magnetic media, both “longitudinal” and “perpendicular” types of patterned magnetic media have been developed, depending upon whether the magnetization direction of the particles is parallel or perpendicular to the media surface.
- patterned media When fabricated in disk form, such “patterned” media are readily adapted for use in conventional hard drives, with most of the drive design features remaining the same.
- hard-drive based “patterned” media technology would comprise a spinning disk with a slider head flying above it in closely-spaced relation thereto, with read sensors or a read/write head that magnetizes and/or detects the magnetic fields emanating from the magnetic particles.
- AFM Atomic Force Microscopy
- the former type of AFM drive which provides write-once/read-only capability, utilizes a heated AFM tip for writing once by forming small indentations or pits in the surface of a substrate, e.g., of polycarbonate. Data is read by using the AFM tip to scan the thus-indented surface and sensing the changes in the force imposed on the AFM tip due to the presence of the indentations.
- the latter type of AFM drive functions in a read-only mode, and data is initially written in the form of indentations (pits) which are created in the surface of a SiO 2 master by means of an electron beam.
- the data, in the form of the indentations is then transferred, by replication, to a photopolymer-coated glass substrate, which photopolymer is cured by exposure to ultra-violet (UV) radiation to thereby form a surface topography representing the data.
- UV ultra-violet
- the data is then read from the cured photopolymer surface by scanning with the AFM tip to sense the changes in force thereat due to the indentations.
- thin film processes such as are utilized in the fabrication of semiconductor integrated circuits including micro-sized features are adapted for making high aspect ratio, single column/bit, perpendicularly patterned media.
- electroplated nickel (Ni) is utilized for forming the columns
- gallium arsenide (GaAs) and alumina (Al 2 O 3 ) are employed as embedding media for the columns.
- the fabrication process starts with an electrically conductive GaAs substrate, on which thin layers of aluminum arsenide (AlAs) and GaAs are successively deposited.
- Scanning electron-beam lithography is then utilized to define the magnet patterns on a resin-coated sample.
- the patterns in the e-beam exposed resin are developed utilizing an appropriate solvent system and then transferred, as by chemically-assisted ion beam etching (“CAIBE”), into the ALAs/GaAs layers.
- CAIBE chemically-assisted ion beam etching
- the AlAs layer is converted into Al 2 O 3 by wet thermal oxidation.
- the thus-produced patterned layer acts as a mask for additional etching for extending the pattern of depressions perpendicularly into the GaAs substrate.
- the etched depressions in the Al 2 O 3 substrate are then filled with electroplated Ni. Overplated Ni “mushrooms” are then removed, as by polishing, to create a smooth surface for accommodating slider contact therewith.
- the overall process sequence for forming such media requires successive, diverse technology steps for (1) MBE growth and mask deposition; (2) electron beam lithography; (3) chemically assisted ion beam etching; (4) wet thermal oxidation; (5) chemically assisted ion beam etching; and (6) electroplating and polishing.
- the result is a complex and time-consuming fabrication process.
- each of the above-described approaches for patterned media manufacture typically involves substantial capital investment for the process equipment, which together with the inherent process complexity, render them too costly for use in high product throughput, magnetic disk media manufacture.
- the present invention addresses and solves problems attendant upon patterned magnetic media manufacture, and affords rapid, cost-effective fabrication of high bit density, patterned magnetic media, e.g., in the, form of hard disks, while providing substantially full compatibility with all mechanical and electrical aspects of conventional hard disk technology.
- the patterned magnetic media of the present invention can be simply and reliably manufactured largely by means of conventional manufacturing techniques.
- An advantage of the present invention is an improved method of manufacturing a high areal storage density, patterned magnetic data/information recording, storage and retrieval medium.
- Another advantage of the present invention is an improved, high areal storage density, patterned magnetic data/information recording, storage and retrieval medium.
- a method of manufacturing a high areal storage density, patterned magnetic recording, storage and retrieval medium which method comprises the sequential steps of:
- step (b) comprises forming as the amorphous, paramagnetic or anti-paramagnetic layer a metal glass layer including at least one metal element which is ferromagnetic when in at least partially crystallized form, e.g., the metal glass layer comprises at least one of iron (Fe), nickel (Ni), and cobalt (Co); and step (c) comprises at least partially crystallizing the at least one component of the amorphous, paramagnetic or anti-paramagnetic layer by increasing the temperature thereof at the selected locations, e.g., increasing the temperature at the selected locations up to at least a phase transition temperature of the at least one component.
- a metal glass layer including at least one metal element which is ferromagnetic when in at least partially crystallized form
- the metal glass layer comprises at least one of iron (Fe), nickel (Ni), and cobalt (Co)
- step (c) comprises at least partially crystallizing the at least one component of the amorphous, paramagnetic or anti-paramagnetic
- step (c) comprises increasing the temperature of the amorphous, paramagnetic or anti-paramagnetic layer to up to the melting point of the at least one component thereof, e.g., by irradiating the layer with photons or energetic particles at the selected locations, such as by photon irradiation utilizing a focussed laser or a focussed, high-intensity lamp as a photon source, or by utilizing an electron beam source as a source of energetic particles.
- step (c) comprises scanning the photons or energetic particles across the surface of the amorphous, paramagnetic or anti-paramagnetic layer to impinge at the selected locations thereof, or irradiating the photons or energetic particles through an aperture-patterned mask having a plurality of openings therethrough with predetermined dimensions corresponding to a preselected size of the at least partially crystalline, ferromagnetic particles or grains; the pattern being two-dimensional and defining a checkerboard or other shape pattern of the at least partially crystallized, ferromagnetic particles or grains surrounded by the amorphous, paramagnetic or anti-paramagnetic layer.
- step (a) comprises providing a non-magnetic, disk-shaped substrate comprising a material selected CL from the group consisting of metals, metal alloys, aluminum (Al), Al-based alloys, ceramics glasses, polymers, and composites thereof;
- step (b) comprises forming a layer of amorphous nickel-phosphorus (Ni—P) as the amorphous, paramagnetic or anti-paramagnetic material;
- step (c) comprises increasing the temperature of the amorphous Ni—P layer at the selected locations to a temperature, e.g., up to about 350° C., for an interval sufficient to form and at least partially crystallize ferromagnetic Ni particles or grains thereat.
- a high areal storage density, patterned magnetic data/information recording, storage and retrieval medium comprises:
- the patterned magnetic layer comprising a plurality of spaced-apart, at least partially crystalline, ferromagnetic particles or grains surrounded by a matrix of an amorphous, paramagnetic or anti-paramagnetic material.
- the non ⁇ magnetic substrate comprises a material selected from the group consisting of metals, metal alloys, aluminum (Al), Al-based alloys, ceramics, glasses, polymers, and composites thereof; and the patterned magnetic layer comprises a plurality of spaced-apart, at least partially crystalline, ferromagnetic particles or grains comprising at least one metal element which is ferromagnetic when in at least partially crystalline form, selected from the group of metal elements consisting of iron (Fe), nickel (Ni), and cobalt (Co), the particles or grains being surrounded by a matrix comprised of a metal glass paramagnetic or anti-paramagnetic layer including at least one of the aforementioned metal elements.
- the patterned magnetic layer comprises a plurality of spaced-apart, at least partially crystalline, ferromagnetic particles or grains comprising at least one metal element which is ferromagnetic when in at least partially crystalline form, selected from the group of metal elements consisting of iron (Fe), nickel (Ni), and cobalt (
- the non-magnetic substrate is disk-shaped; and the patterned magnetic layer comprises a plurality of spaced-apart, at least partially crystalline, ferromagnetic Ni particles or grains surrounded by a matrix of amorphous Ni—P.
- the patterned magnetic layer comprises a two-dimensional, checkerboard pattern of at least partially crystalline, ferromagnetic particles or grains and a surrounding matrix of amorphous, paramagnetic or anti-paramagnetic material; and the magnetic medium further comprises a protective overcoat layer over the patterned magnetic layer and a lubricant topcoat layer over the protective overcoat layer.
- a magnetic medium comprises:
- a non-magnetic substrate including a surface
- patterned magnetic means formed within a layer of amorphous material on the substrate surface.
- the patterned magnetic layer means comprises a plurality of spaced-apart, at least partially crystalline, ferromagnetic particles or grains surrounded by a matrix of amorphous, paramagnetic or anti-paramagnetic material comprising at least one component which is ferromagnetic when in at least partially crystalline form.
- FIGS. 1 (A) and 1 (B), respectively, show cross-sectional and plan views of a Ni—P plated, Al-based substrate prior to patterned Ni crystallization processing;
- FIGS. 2 (A) and 2 (B), respectively, show cross-sectional and plan views of the Ni—P plated, Al-based substrate subsequent to irradiation with a focussed heat source for inducing patterned Ni crystallization;
- FIGS. 3 (A) and 3 (B) are drawings of image patterns of Ni—P plated, Al-based substrates after high power laser irradiation to temperatures close to the Ni—P melting point, obtained via Atomic Force Microscopy (AFM) and Magnetic Force Microscopy (MFM), respectively; and
- FIGS. 4 (A) and 4 (B) are drawings of image patterns of Ni—P plated, Al-based substrates after low power laser irradiation to temperatures below the Ni—P melting point, obtained via AFM and MFM, respectively.
- the present invention has, as a principal aim, provision of a simple, convenient, and reliable method of forming magnetic patterns on or within substrate surfaces, for use in manufacturing high areal density data/information recording, storage and retrieval media suitable for operation with conventional disk drive technology, which method relies largely upon techniques, methodologies, and instrumentalities currently utilized in the manufacture of magnetic media.
- the present invention also has, as a principal aim, provision of high areal density, patterned magnetic data/information recording, storage and retrieval media, e.g., hard disks, which can be manufactured at a cost compatible with that of conventional, multi-grain magnetic media.
- An essential feature of the patterned magnetic media of the present invention, and manufacturing method therefor, is the formation on a surface of a suitable substrate, such as a non-magnetic disk, of a pattern of spaced-apart, individual ferromagnetic particles or grains surrounded by a matrix comprised of an amorphous, paramagnetic or anti-paramagnetic material, whereby minimal magnetic coupling occurs between closely-spaced, e.g., adjacent, particles or grains.
- the ferromagnetic particles or grains are arranged in a regular, i.e., orderly, pattern for facilitating data recording, storage, and retrieval.
- patterned magnetic media of the type contemplated herein when fabricated to include appropriately dimensioned magnetic particles or grains with no, or very little inter-grain coupling, can exhibit very high areal recording densities, e.g., on the order of about 100 Gb/in 2 and greater.
- the present invention also avoids the drawbacks and disadvantages of earlier patterned magnetic recording media resulting from the use of technologically diverse, complicated, and capital-intensive manufacturing procedures, equipment, and methodology.
- the present invention can be practiced by utilizing materials, techniques, and methodologies commonly and currently employed in the manufacture of conventional multi-grain magnetic recording media.
- a conventionally utilized substrate 1 e.g., a disk-shaped substrate comprised of a non-magnetic material selected from among metals, metal alloys, aluminum (Al), Al-based alloys, glasses, ceramics, polymers, and all manner of composites thereof, is initially provided, and an appropriate thickness film or layer 2 of an amorphous, paramagnetic or anti-paramagnetic material is formed on a major surface 1 M thereof, as by a suitable amorphous thin film deposition technique (e.g., chemical vapor deposition (CVD); plasma enhanced CVD (PECVD); physical vapor deposition (PVD), including sputtering, vacuum evaporation, ion plating, etc.; electroless plating; and electroplating).
- CVD chemical vapor deposition
- PECVD plasma enhanced CVD
- PVD physical vapor deposition
- the amorphous, paramagnetic or anti-paramagnetic material be comprised of at least one component, which when present in at least partially crystallized form, exhibits ferromagnetism.
- Suitable materials for such amorphous, paramagnetic or anti-paramagnetic layer include, inter alia, metallic glasses comprised of one or more metallic elements which exhibit ferromagnetism when in at least partially crystallized form, notably iron (Fe), nickel (Ni), and cobalt (Co).
- phase transition by melting/crystallization can be readily achieved selectively and locally by means of a variety of processes and sources 4 for locally applying thermal energy beams 5 to the upper surface 2 U of layer 2 , such as, for example, by laser heating, high-intensity radiant lamp heating, infra-red heating, kinetic energy transfer by energetic particle bombardment, e.g., electron-beam heating, etc.
- the local heating is performed by selectively applying a suitable source 4 intensity for a duration sufficient to achieve a desired temperature within a desired depth below upper surface 2 U of a patterned plurality of local areas of the amorphous, paramagnetic or anti-paramagnetic layer 2 .
- Pattern definition can be accomplished by various techniques, including, inter alia, scanning of focussed photon irradiation or energetic particle beams over the surface of the amorphous layer or passage through an apertured mask overlying the surface of the amorphous layer, the mask including a pattern of openings corresponding to the desired pattern of magnetic particles or grains 3 to be formed in the amorphous layer.
- other photon irradiation techniques may be employed to similar effect, including, for example, interference lithography, contact lithography, and spot scanning.
- energetic particle bombardment can be accomplished by means of, for example, scanning and mask imaging techniques.
- complete crystallization of the selectively photon irradiated or energetic particle bombarded areas is not required in order to form functional ferromagnetic particles or grains 3 .
- the selective, locally photon irradiated or energetic particle bombarded areas reach temperatures as high as the melting point of the amorphous material during irradiation or bombardment, and local heating to temperatures below the melting point can, depending upon the particular material of the amorphous layer, result in formation of ferromagnetic particles or grains 3 capable of recording and reading-out data/information stored therein.
- lasers suitable for use as a photon irradiation source with metallic glass materials according to the present invention can have wavelengths ranging from the deep ultra-violet (“DUV”) to the ultra-violet (“UV”) to the visible and even infra-red (“IR”) regions of the electromagnetic spectrum, with the shorter wavelength DUV-UV regions being preferable from the point of view of higher pattern resolution.
- the lasers may also be pulsed, with pulse durations ranging from below about one nanosecond ( ⁇ 10 ⁇ 9 sec.) to about one microsecond (10 ⁇ 6 sec.), typically about 3 ⁇ 50 nanoseconds.
- FIGS. 3 (A) and 3 (B) are drawings respectively of Atomic Force Microscopy (AFM) and Magnetic Force Microscopy MFM) images obtained when the laser output power and duration were selected to provide the pattern of locally heated areas with a temperature close to the crystallization phase transition temperature of amorphous Ni—P, i.e., about 300-350° C.
- FIGS. 3 (A) and 3 (B) are drawings respectively of Atomic Force Microscopy (AFM) and Magnetic Force Microscopy MFM) images obtained when the laser output power and duration were selected to provide the pattern of locally heated areas with a temperature close to the crystallization phase transition temperature of amorphous Ni—P, i.e., about 300-350° C.
- FIGS. 3 (A) and 3 (B) are analogous to FIGS. 3 (A) and 3 (B), but illustrate the case where the laser output power was reduced such that the maximum temperature of the locally heated areas achieved during laser irradiation was below the melting point of amorphous Ni—P.
- both the AFM and MFM images clearly show a checkerboard pattern of ferromagnetic particles or grains corresponding to the laser irradiation pattern; whereas, in the latter instance, i.e., with reduced laser output power, the checkerboard pattern indicating formation of ferromagnetic particles or grains is clearly visible only in the MFM image.
- inventive methodology which is largely based upon conventional magnetic media manufacturing technology, can be effectively utilized for facilitating rapid, convenient, and technologically simplified fabrication of patterned magnetic media at product throughput rates consistent with the requirements of low cost automated magnetic media manufacture.
- inventive methodology which is largely based upon conventional magnetic media manufacturing technology, can be effectively utilized for facilitating rapid, convenient, and technologically simplified fabrication of patterned magnetic media at product throughput rates consistent with the requirements of low cost automated magnetic media manufacture.
- Example illustrates an embodiment wherein a checkerboard type two-dimensional pattern is formed, the invention is not limited to formation of any particular geometric pattern or arrangement of magnetic particles, and the formation of patterns of other shapes, designs, or arrangements is within the ambit of the present invention.
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- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
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US09/593,243 US6387530B1 (en) | 1999-08-27 | 2000-06-14 | Patterned magnetic media via thermally induced phase transition |
US10/138,265 US6749904B1 (en) | 1999-08-27 | 2002-05-06 | Patterned magnetic media via thermally induced phase transition |
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US09/593,243 US6387530B1 (en) | 1999-08-27 | 2000-06-14 | Patterned magnetic media via thermally induced phase transition |
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Cited By (18)
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US20020136927A1 (en) * | 2001-03-22 | 2002-09-26 | Hiroyuki Hieda | Recording medium, method of manufacturing recording medium and recording apparatus |
US20020142192A1 (en) * | 2001-03-30 | 2002-10-03 | Kabushiki Kaisha Toshiba | Method of patterning magnetic products using chemical reactions |
US20030019837A1 (en) * | 2001-07-30 | 2003-01-30 | Alfred Kersch | Method and apparatus for producing at least one depression in a semiconductor material |
US6562633B2 (en) * | 2001-02-26 | 2003-05-13 | International Business Machines Corporation | Assembling arrays of small particles using an atomic force microscope to define ferroelectric domains |
US20040033425A1 (en) * | 2002-05-16 | 2004-02-19 | Koops Hans Wilfried Peter | Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
US20040140017A1 (en) * | 2000-11-09 | 2004-07-22 | Branagan Daniel J. | Hard metallic materials |
US20050072753A1 (en) * | 2002-10-16 | 2005-04-07 | Koops Hans Wilfried Peter | Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface |
US20050083047A1 (en) * | 2003-10-15 | 2005-04-21 | Shih-Fu Lee | High throughput missing pattern detector for servo printed recording medial |
US20050164016A1 (en) * | 2004-01-27 | 2005-07-28 | Branagan Daniel J. | Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
US20050264958A1 (en) * | 2004-03-12 | 2005-12-01 | The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth | Magnetoresistive medium including nanowires |
US20060192141A1 (en) * | 2003-01-24 | 2006-08-31 | Koops Hans Wilfred P | Method and devices for producing corpuscular radiation systems |
US20080192606A1 (en) * | 2006-10-03 | 2008-08-14 | Kabushiki Kaisha Toshiba | Magnetic recording medium, method of fabricating the same, and magnetic recording apparatus |
US20090323407A1 (en) * | 2003-12-09 | 2009-12-31 | James Stanislaus Williams | Memory device, an information storage process, a process, and a structured material |
US20100110577A1 (en) * | 2006-01-20 | 2010-05-06 | Seagate Technology Llc | Composite Heat Assisted Magnetic Recording Media With Temperature Tuned Intergranular Exchange |
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