US5856667A - Apparatus and method for detection and demodulation of an intensity-modulated radiation field - Google Patents

Apparatus and method for detection and demodulation of an intensity-modulated radiation field Download PDF

Info

Publication number
US5856667A
US5856667A US08776838 US77683897A US5856667A US 5856667 A US5856667 A US 5856667A US 08776838 US08776838 US 08776838 US 77683897 A US77683897 A US 77683897A US 5856667 A US5856667 A US 5856667A
Authority
US
Grant status
Grant
Patent type
Prior art keywords
light
signal
memory cell
produced
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US08776838
Inventor
Thomas Spirig
Peter Seitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Geosystems AG
Heptagon Micro Optics Pte Ltd
Original Assignee
Leica Geosystems AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4913Details of detection, sampling, integration or read-out circuits
    • G01S7/4914Details of detection, sampling, integration or read-out circuits of detector arrays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous unmodulated waves, amplitude-, frequency-, or phase-modulated waves
    • G01S17/36Systems determining position data of a target for measuring distance only using transmission of continuous unmodulated waves, amplitude-, frequency-, or phase-modulated waves with phase comparison between the received signal and the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/30Transforming light or analogous information into electric information
    • H04N5/335Transforming light or analogous information into electric information using solid-state image sensors [SSIS]
    • H04N5/369SSIS architecture; Circuitry associated therewith
    • H04N5/372Charge-coupled device [CCD] sensors; Time delay and integration [TDI] registers or shift registers specially adapted for SSIS
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/493Extracting wanted echo signals

Abstract

An imaging sensor (13) has a multiplicity of sensor elements (16). Each sensor element (16) has a light-sensitive zone (17) in which radiation is detected as a function of position. A multiplicity of storage cells (21) successively store charges detected in the light-sensitive zone (17) of each sensor element (16) in synchronism with a modulation signal which is produced by the radiation source. The imaging sensor (13) simultaneously detects and demodulates intensity-modulated radiation as a function of position. The invention makes it possible to determine a range of parameters for the object (11) being examined, thus ensuring that the object is accurately recorded for rangefinding purposes.

Description

BACKGROUND

The invention relates to an apparatus and a method for detection and demodulation of an intensity-modulated radiation field.

The behavior of many systems in technology is investigated, inter alia, with the aid of modulated signals. The system is in this case excited with a modulated signal, for example a sinusoidal signal, and the response of the system is measured. The modulation of the system response obtained, its phase shift with respect to the exciting signal, and the background signal level (offset) are defined as characteristic variables.

In the case of known semiconductor image sensors, two-dimensional distributions of the light intensity are converted into two-dimensional photoelectric current density distributions. The light-generated signal charges are integrated with respect to time in so-called pixels. For example, a CCD image sensor is disclosed in DE 39 09 394 C2, in which the charge pattern generated is shifted laterally during the exposure. This is intended to avoid the occurrence of movement blurring when recording objects which are moving relative to the image sensor.

A method is known for use in non-scanning, imaging laser-radar 3D cameras, in which modulated light is imaged on a conventional image sensor (Laser-Radar Imaging Without Scanners, Photonics Spectra, (28 Apr. 1994). The demodulation is carried out using an intensifier element, which receives images and is variable with respect to time, between the imaging objective and the semiconductor image sensor. The intensifier element is designed as a microchannel plate (MCP), it being necessary to operate at high voltages of 100 to 1000 volts. The incoming light is absorbed in the intensifier element, being modulated with respect to time, and then passes to the image sensor, the latter having only the function of an integrator. Three or more images can be recorded in this case, it being necessary to accept a considerable loss of light because of absorption in the intensifier element. In addition, the images must be read out of the image sensor completely between the recordings.

In addition, a CCD image sensor is known for the demodulation of time variable polarized light (H. Povel, H. Aebersold, J. O. Stenflo, "Charge-coupled device image sensor as a demodulator in a 2-D polarimeter with a piezoelastic modulator", Applied Optics, Vol. 29, pp. 1186-1190, 1990). A modulator is arranged between the objective and the CCD image sensor for this purpose, which modulator changes the polarization of the light between two states in rapid sequence. The two images produced of the two polarization states are accumulated and stored in the image sensor. A known image sensor is for this purpose provided with a strip mask, which covers every other image sensor line in a light-proof manner. In this way, the image of the respective polarization state can be accumulated in the correct cycle by shifting the image charge pattern up and down vertically.

SUMMARY OF THE INVENTION

An object of the present invention is to specify an apparatus and a method for detection and demodulation of an intensity-modulated radiation field, such that the determination of a plurality of parameters of the modulated radiation field is ensured.

The object is achieved by the features described herein.

The advantages achieved with the invention are, in particular, that an image sensor is provided which extends in one dimension or two dimensions and has a plurality of sensor elements which are in each case suitable on the one hand for detecting the modulated radiation and on the other hand for carrying out the demodulation thereof. A clock generator makes it possible for the demodulation which is carried out in the sensor elements in each case to be carried out in synchronism with the modulation signal which is transmitted from the radiation source, such that the parameters of the detected radiation field can be determined, as a function of position, once the measurements have been read out of the apparatus according to the invention.

The apparatus according to the invention preferably comprises a plurality of sensor units which extend in two dimensions. It can then advantageously be used for imaging interferometric measurement methods, time-modulated image signals being produced if the images are recorded using the heterodyne method. Moreover, the apparatus according to the invention may also comprise a single sensor element, such that measurements can be carried out point by point.

Each sensor element has at least one memory cell, which makes it possible to add up the charges detected in a light-sensitive part of the sensor element. This ensures the detection of low intensity signals.

According to a preferred embodiment, a sinusoidal radiation field is detected and demodulated. The amplitude, the phase and the background light on the radiation field can be determined using four samples per period. If the sampling rate is increased, other parameters of the detected radiation field can be obtained, such as the determination of Fourier coefficients, for example.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the invention will be described in more detail in the following text with reference to the drawing, in which:

FIG. 1 shows a block diagram of the apparatus according to the invention,

FIG. 2 shows an illustration of the structure of the image sensor according to a first exemplary embodiment,

FIG. 3 shows an illustration of the structure of the image sensor according to a second exemplary embodiment,

FIG. 4 shows a time profile of a detected, sinusoidal modulation signal.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The invention can advantageously be used for range measurement. The delay time of a modulated light pulse, which is transmitted from a radiation source, is reflected on the measurement object and is detected by the apparatus according to the invention, and can be defined by determining the phase difference of the modulated light. Furthermore, the invention offers the option of at the same time recording image information about the measurement object. Automatic sensor systems and robotics thus result as preferred fields of application of the invention.

The exemplary embodiments which are described in the following text are used to determine the phase, the peak value and the background light level of the detected radiation field. A laser 10, which is directed at a measurement object 11, is used as the radiation source for the transmission of a modulation signal (see FIG. 1). The radiation field which is reflected on the measurement object 11 is imaged, using conventional optics 12, on an image sensor 13 of the apparatus. A clock generator 14 is used to control the signals which are recorded in the image sensor 13 and, after detection and demodulation have been carried out in the image sensor 13, the image sensor 13 supplies them to an evaluation unit 15, in which the measurements are calculated and are passed on to a display unit, which is not illustrated.

In a first exemplary embodiment according to FIG. 2, the image sensor 13 comprises nine identically constructed sensor elements 16, which together form a 3×3 image sensor field. Each sensor element 16 comprises a light-sensitive part 17, on which the intensity-modulated radiation field occurs, and a number of signal charges are produced, corresponding to the intensity of the same. The light-sensitive part 17 of the sensor element 16 is designed as a photodiode. Alternatively, the light-sensitive part 17 can be designed as an MOS capacitor.

Furthermore, the sensor element 16 has a light-sensitive part 18, which comprises a memory area 19 and a switch area 20.

The memory area 19 and the switch area 20 each contain the same number of memory cells 21 and, respectively, electrical switches 22, the number of which corresponds to the number of integrations of the radiation carried out per period in the light-sensitive part 17. The memory cells 21 may each be designed as CCD pixels or CMOS capacitors. The electrical switches 22 are designed as transistor switches or as CCD gates.

The charges which are integrated in the light-sensitive part 17 are transferred to the memory area 19 by sequential actuation of the electrical switches 22. The electrical switches 22 are controlled by the clock generator 14 to this end in such a manner that the first switch 22 is closed at a specific time in order that the contents of the light-sensitive part 17 are stored in a first memory cell 21. Once the first switch has opened and a short, specified time interval has elapsed, the second switch 22 is closed, in order that the next quantity of charge integrated in the light-sensitive part 17 can be transferred to the second memory cell 21. This switching sequence continues until the last switch has been closed and opened again. After this, it is possible to begin passing the charges from the light-sensitive part 17 to the memory cells 21 from the start, the contents of the memory cells 21 in each case being added up in synchronism, in time, with the modulation signal which is transmitted by the laser 10.

According to FIG. 4, a sinusoidal radiation signal is detected. For this purpose, the charges are in each case integrated four times, within an integration interval I, in the light-sensitive part 17, within a period duration T of the radiation signal. The integration intervals are distributed equidistantly and at the same separations from one another. After the charge quantities have been transferred sequentially via the respectively associated switches 22 into the memory cells 21 and they have been added up in a repeated manner in the memory cells 21, the measurements, which are proportional to the charge, are passed on from the memory area into an evaluation unit 15, in which the parameters of the detected radiation signal are calculated.

As can be seen from FIG. 4, the following parameters are measured as a function of position. The phase difference Φ between the detected radiation signal and the transmitted modulation signal can be defined, so that the range to the measurement object 11 can be determined. The time tB of the peak value of the modulation signal is used as a time reference point. Furthermore, a peak value A and a background light level B can be defined from the demodulated radiation signal.

In a second exemplary embodiment according to FIG. 3, an image sensor 23 is designed exclusively using CCD technology. The image sensor 23 comprises a field of 3×3 reverse-biased MOS capacitors 24 as the light-sensitive part of the image sensor 23. Vertical CCD areas 25, which each comprise memory cells 26, are arranged between the light-sensitive MOS capacitors 24. In order to sample four charges per period, each light-sensitive MOS capacitor 24 is connected to four memory cells 26, via four transfer gates 27 as electrical switches. A clock generator, which is not illustrated, controls the passing of the signal charges from the MOS capacitors 24 into the vertical CCD areas 25 and, after this, the transfer of the signal charges from the vertical CCD areas 25 into a horizontal CCD area 28. The signal charges are supplied from there to an evaluation unit, in order to determine the measurements.

Alternatively, the CCD areas can also be designed in the form of circular arcs, the CCD areas each enclosing the MOS capacitors 24.

Claims (10)

We claim:
1. An apparatus for detection and demodulation of an intensity-modulated radiation field produced by a radiation source, comprising:
(a) an image sensor comprising an arrangement of sensor elements arranged in at least one dimension, each sensor element having a light-sensitive part for converting a radiation signal into an electrical signal, and a light-insensitive part having at least one electrical switch and having at least one memory cell which is assigned to the switch; and
(b) a clock generator for controlling the electrical switch in such a manner that signal charges which are produced in the light-sensitive part are passed through into the memory cell in synchronism with a modulation signal which is produced by the radiation source, and for controlling the memory cell such that signal changes which are stored in the memory cell are transferred into an evaluation unit for evaluation.
2. An apparatus according to claim 1, wherein the image sensor is of integral construction, and sensor elements are located directly along-side one another.
3. An apparatus according to claim 1, wherein the light-sensitive part of the sensor element is a photodiode or a MOS capacitor which is provided with a bias voltage.
4. An apparatus according to claim 1, wherein the memory cell is a MOS capacitor or a CCD pixel which is protected from light.
5. An apparatus according to claim 1, wherein memory cells form CCD areas in the form of straight-line CCD areas, from which stored measurements are transferred sequentially to the evaluation unit.
6. An apparatus according to claim 1, wherein memory cells are arranged alongside one another in such a manner that they form CCD areas in the form of circles.
7. An apparatus according to claim 1, wherein the switch is a transistor switch or a CCD transfer gate.
8. A method for detection and demodulation of an intensity-modulated radiation field produced by a radiation source, comprising the steps of:
(a) imaging the radiation field using optics onto an image sensor which comprises sensor elements which are arranged in at least one dimension;
(b) producing signal charges successively in a light-sensitive part of a sensor element corresponding to the intensity of the radiation field, the signal charges being integrated during an integration interval;
(c) transferring respectively integrated signal charges into a light-insensitive part of the sensor element in synchronism with a modulation signal which is produced by the radiation source, and storing the signal changes in a memory cell, the signal charges which are produced in the light-sensitive part being sequentially supplied from the light-sensitive part of the sensor element via at least one electrical switch which is assigned to a memory cell to a corresponding memory cell and stored; and
(d) reading out signal charges which are stored in memory cells successively for measurement and supplying read-out signal charges to an evaluation unit.
9. A method according to claim 8, wherein an object is illuminated with a periodic or pulsed modulation signal, which is produced by the radiation source, and the object is imaged two-dimensionally on the image sensor as an intensity-modulated radiation field such that information is present about the form and/or structure of the object.
10. A method according to claim 8, wherein the signal charges are added up periodically in the memory cells.
US08776838 1994-11-14 1995-10-28 Apparatus and method for detection and demodulation of an intensity-modulated radiation field Expired - Lifetime US5856667A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE4440613.4 1994-11-14
DE19944440613 DE4440613C1 (en) 1994-11-14 1994-11-14 Device and method for the detection and demodulation of an intensity-modulated radiation field
PCT/EP1995/004235 WO1996015626A1 (en) 1994-11-14 1995-10-28 Device and method for the detection and demodulation of an intensity-modulated radiation field

Publications (1)

Publication Number Publication Date
US5856667A true US5856667A (en) 1999-01-05

Family

ID=6533266

Family Applications (1)

Application Number Title Priority Date Filing Date
US08776838 Expired - Lifetime US5856667A (en) 1994-11-14 1995-10-28 Apparatus and method for detection and demodulation of an intensity-modulated radiation field

Country Status (8)

Country Link
US (1) US5856667A (en)
EP (1) EP0792555B1 (en)
JP (1) JP3723215B2 (en)
KR (1) KR100404961B1 (en)
CN (1) CN1099802C (en)
CA (1) CA2197079C (en)
DE (2) DE4440613C1 (en)
WO (1) WO1996015626A1 (en)

Cited By (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000052926A1 (en) * 1999-03-04 2000-09-08 Vision-Sciences Inc. Image sensor's unit cell with individually controllable electronic shutter circuit
WO2000055642A1 (en) * 1999-03-18 2000-09-21 Siemens Aktiengesellschaft Resoluting range finding device
US20020054390A1 (en) * 2000-08-25 2002-05-09 Toru Koizumi Image pickup apparatus
US6469489B1 (en) * 1999-07-02 2002-10-22 Csem Centre Suisse D'electronique Et De Microtechnique Sa Adaptive array sensor and electrical circuit therefore
US6492652B2 (en) * 1999-12-24 2002-12-10 Hera Rotterdam B.V. Opto-electronic distance sensor and method for the opto-electronic distance measurement
US20030059087A1 (en) * 2001-08-07 2003-03-27 Sick Ag Monitoring method and an optoelectronic sensor
WO2003085413A2 (en) * 2002-04-08 2003-10-16 Matsushita Electric Works, Ltd. Three dimensional image sensing device using intensity modulated light
US6639656B2 (en) 2001-03-19 2003-10-28 Matsushita Electric Works, Ltd. Distance measuring apparatus
US20030201379A1 (en) * 2000-11-27 2003-10-30 Moshe Stark Noise floor reduction in image sensors
WO2004008175A1 (en) * 2002-07-15 2004-01-22 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatial information detecting apparatus using the same
US6693670B1 (en) 1999-07-29 2004-02-17 Vision - Sciences, Inc. Multi-photodetector unit cell
US20040036797A1 (en) * 2000-07-05 2004-02-26 Moshe Stark Dynamic range compression method
WO2004038803A1 (en) * 2002-10-24 2004-05-06 Council For The Central Laboratory Of The Research Councils Imaging device
US20040195493A1 (en) * 2003-04-07 2004-10-07 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatical information detecting apparatus using the same
US6906793B2 (en) 2000-12-11 2005-06-14 Canesta, Inc. Methods and devices for charge management for three-dimensional sensing
WO2006030989A1 (en) * 2004-09-17 2006-03-23 Matsushita Electric Works, Ltd. A range image sensor
US20070146539A1 (en) * 2004-10-25 2007-06-28 Matsushita Electric Works, Ltd. Spatial information detecting device
US20070176079A1 (en) * 2003-09-18 2007-08-02 Photonfocus Ag Optoelectronic detector with multiple readout nodes and its use thereof
US20070200943A1 (en) * 2006-02-28 2007-08-30 De Groot Peter J Cyclic camera
US20070206201A1 (en) * 2006-03-02 2007-09-06 De Groot Peter Phase Shifting Interferometry With Multiple Accumulation
US20070237363A1 (en) * 2004-07-30 2007-10-11 Matsushita Electric Works, Ltd. Image Processing Device
US20080247033A1 (en) * 2005-10-19 2008-10-09 Mesa Imaging Ag Device and Method for the Demodulation of Modulated Electric Signals
US20080273758A1 (en) * 2005-11-14 2008-11-06 Oliver Fuchs Apparatus and method for monitoring a spatial area, in particular for safeguarding a hazardous area of an automatically operated installation
FR2915833A1 (en) * 2007-05-04 2008-11-07 Thales Sa Detector matrix pulse laser with rapid summation.
US20090014658A1 (en) * 2004-07-26 2009-01-15 Mesa Inaging Ag Solid-state photodetector pixel and photodetecting method
EP2018041A2 (en) 2007-07-18 2009-01-21 MESA Imaging AG On-chip time-based digital conversion of pixel outputs
EP2017651A2 (en) 2007-07-18 2009-01-21 MESA Imaging AG Reference pixel array with varying sensitivities for TOF sensor
US20090079959A1 (en) * 2007-09-26 2009-03-26 Fujifilm Corporation Method and device for measuring distance
US20090121308A1 (en) * 2002-06-20 2009-05-14 Mesa Imaging Ag Image sensing device and method of
US20090190007A1 (en) * 2008-01-30 2009-07-30 Mesa Imaging Ag Adaptive Neighborhood Filtering (ANF) System and Method for 3D Time of Flight Cameras
US20090212197A1 (en) * 2004-08-04 2009-08-27 Bernhard Buttgen Large -area pixel for use in an image sensor
US20090224139A1 (en) * 2008-03-04 2009-09-10 Mesa Imaging Ag Drift Field Demodulation Pixel with Pinned Photo Diode
WO2010013779A1 (en) 2008-07-30 2010-02-04 国立大学法人静岡大学 Distance image sensor and method for generating image signal by time-of-flight method
US20100053405A1 (en) * 2008-08-28 2010-03-04 Mesa Imaging Ag Demodulation Pixel with Daisy Chain Charge Storage Sites and Method of Operation Therefor
US7719589B2 (en) 2004-06-02 2010-05-18 The Science And Technology Facilities Council Imaging array with enhanced event detection
US7755743B2 (en) 2006-10-18 2010-07-13 Panasonic Electric Works Co., Ltd. Spatial information detecting apparatus
US20100308209A1 (en) * 2009-06-09 2010-12-09 Mesa Imaging Ag System for Charge-Domain Electron Subtraction in Demodulation Pixels and Method Therefor
EP2284897A2 (en) 2009-08-14 2011-02-16 Bernhard Buettgen Demodulation pixel incorporating majority carrier current, buried channel and high-low junction
WO2011020921A1 (en) * 2009-08-21 2011-02-24 Iee International Electronics & Engineering S.A. Time-of-flight sensor
WO2011057244A1 (en) 2009-11-09 2011-05-12 Mesa Imaging Ag Multistage demodulation pixel and method
US20110114821A1 (en) * 2009-05-05 2011-05-19 Mesa Imaging Ag 3D CCD-Style Imaging Sensor with Rolling Readout
US20110164132A1 (en) * 2010-01-06 2011-07-07 Mesa Imaging Ag Demodulation Sensor with Separate Pixel and Storage Arrays
WO2012076500A1 (en) 2010-12-06 2012-06-14 Melexis Tessenderlo Nv Method and system for demodulating signals
WO2013041949A1 (en) 2011-09-20 2013-03-28 Mesa Imaging Ag Time of flight sensor with subframe compression and method
US8436401B2 (en) 2004-08-04 2013-05-07 Csem Centre Suisse D'electronique Et De Microtechnique Sa Solid-state photosensor with electronic aperture control
DE102012109129A1 (en) 2011-09-27 2013-05-08 Mesa Imaging Ag Sensor pixel array and separate arrangement of a storage and accumulation with parallem detecting and reading
WO2014021417A1 (en) 2012-08-03 2014-02-06 国立大学法人 静岡大学 Semiconductor element and solid-state image pickup device
US9000349B1 (en) 2009-07-31 2015-04-07 Mesa Imaging Ag Sense node capacitive structure for time of flight sensor
US9117712B1 (en) 2009-07-24 2015-08-25 Mesa Imaging Ag Demodulation pixel with backside illumination and charge barrier
US9231006B2 (en) 2009-10-05 2016-01-05 National University Corporation Shizuoka University Semiconductor element and solid-state imaging device
US20160163110A1 (en) * 2014-12-04 2016-06-09 Htc Corporation Virtual reality system and method for controlling operation modes of virtual reality system
US9410800B1 (en) 2010-08-02 2016-08-09 Heptagon Micro Optics Pte. Ltd. 3D TOF camera with masked illumination
US9961280B2 (en) 2013-03-08 2018-05-01 Canon Kabushiki Kaisha Image forming apparatus and imaging system
US9976894B2 (en) 2015-11-17 2018-05-22 Heptagon Micro Optics Pte. Ltd. Optical device
US10016137B1 (en) 2017-11-22 2018-07-10 Hi Llc System and method for simultaneously detecting phase modulated optical signals
KR101884952B1 (en) 2010-01-06 2018-08-02 헵타곤 마이크로 옵틱스 피티이. 리미티드 Demodulation sensor with separate pixel and storage arrays

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098952B2 (en) 1998-04-16 2006-08-29 Intel Corporation Imager having multiple storage locations for each pixel sensor
US6410899B1 (en) 1998-06-17 2002-06-25 Foveon, Inc. Active pixel sensor with bootstrap amplification and reduced leakage during readout
WO2000005874A1 (en) * 1998-07-22 2000-02-03 Foveon, Inc. Multiple storage node active pixel sensors
US6697114B1 (en) 1999-08-13 2004-02-24 Foveon, Inc. Triple slope pixel sensor and arry
US6809768B1 (en) 2000-02-14 2004-10-26 Foveon, Inc. Double slope pixel sensor and array
US6882367B1 (en) 2000-02-29 2005-04-19 Foveon, Inc. High-sensitivity storage pixel sensor having auto-exposure detection
FR2807264B1 (en) * 2000-03-31 2003-01-10 Matra Marconi Space France An imaging device has active pixels and accumulation
EP1152261A1 (en) 2000-04-28 2001-11-07 CSEM Centre Suisse d'Electronique et de Microtechnique SA Device and method for spatially resolved photodetection and demodulation of modulated electromagnetic waves
US7607509B2 (en) 2002-04-19 2009-10-27 Iee International Electronics & Engineering S.A. Safety device for a vehicle
LU90912A1 (en) 2002-04-19 2003-10-20 Iee Sarl Safety device for a vehicle
LU90914A1 (en) * 2002-04-26 2003-10-27 Iee Sarl Safety device for a vehicle
EP1659418A1 (en) 2004-11-23 2006-05-24 IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. Method for error compensation in a 3D camera
JP4645177B2 (en) * 2004-11-30 2011-03-09 パナソニック電工株式会社 Measuring device
JP4200328B2 (en) 2005-04-18 2008-12-24 パナソニック電工株式会社 Spatial information detecting system
JP4788187B2 (en) 2005-05-02 2011-10-05 パナソニック電工株式会社 Spatial information detecting apparatus
JP4673674B2 (en) * 2005-06-06 2011-04-20 株式会社リコー Shape measurement device
EP1752793B1 (en) 2005-08-08 2010-04-14 MESA Imaging AG Method and device for redundant distance measurement and mismatch cancellation in phase-measurement systems
DE602005010696D1 (en) 2005-08-12 2008-12-11 Mesa Imaging Ag Sensitive, fast pixel for use in an image sensor
EP1777747B1 (en) 2005-10-19 2008-03-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Device and method for the demodulation of modulated electromagnetic wave fields
DE202007018027U1 (en) 2007-01-31 2008-04-17 Richard Wolf Gmbh endoscope system
JP5280030B2 (en) * 2007-09-26 2013-09-04 富士フイルム株式会社 Ranging method and apparatus
EP2073035A1 (en) 2007-12-18 2009-06-24 IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. Recording of 3D images of a scene
EP2138865A1 (en) * 2008-06-25 2009-12-30 IEE International Electronics & Engineering S.A.R.L. Method and device for recording 3D images of a scene
JP5283216B2 (en) 2008-07-31 2013-09-04 国立大学法人静岡大学 Fast charge transfer photodiode lock-in pixels and a solid-state imaging device
JP5688756B2 (en) 2008-12-25 2015-03-25 国立大学法人静岡大学 Semiconductor device and a solid-state imaging device
DE102009001159A9 (en) 2009-02-25 2011-02-24 Johann Wolfgang Goethe-Universität Frankfurt am Main Electro-optical camera with demodulierendem detector array
LU91688A1 (en) 2010-05-17 2011-11-18 Iee Sarl Scanning 3D imager
WO2011157726A1 (en) 2010-06-16 2011-12-22 Iee International Electronics & Engineering S.A. Switch and gate topologies for improved demodulation performance of time of flight pixels
EP2551698B1 (en) 2011-07-29 2014-09-17 Richard Wolf GmbH Endoscopic instrument
DE102013218231A1 (en) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh An optical system for generating a time-varying pattern for a confocal microscope
WO2017168711A1 (en) * 2016-03-31 2017-10-05 株式会社ニコン Imaging element, imaging system, and imaging method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3909394A1 (en) * 1989-03-22 1990-09-27 Messerschmitt Boelkow Blohm Two-dimensional CCD image sensor, image acquisition method for a moving scene and control device and method for the image sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2122833B (en) * 1982-06-24 1985-06-26 Ferranti Plc Radiation detecting apparatus
DE3404396C2 (en) * 1984-02-08 1989-04-13 Dornier Gmbh, 7990 Friedrichshafen, De
US4780605A (en) * 1987-11-16 1988-10-25 General Electric Company Coherent light phase detecting focal plane charge-transfer-device
US4878116A (en) * 1988-06-02 1989-10-31 Wayne State University Vector lock-in imaging system
FR2664048B1 (en) * 1990-06-29 1993-08-20 Centre Nat Rech Scient Method and multichannel analog detection device.
DE4303015C1 (en) * 1991-09-09 1994-07-07 Dornier Luftfahrt Method for the recording of distance images (range images)
DE4129912C1 (en) * 1991-09-09 1992-10-22 Dornier Luftfahrt Gmbh, 8031 Wessling, De
FR2699779B1 (en) * 1992-12-22 1995-01-27 Thomson Csf Semiconducteurs thermal image detector with removal means of the fixed pattern noise.
FR2700091B1 (en) * 1992-12-30 1995-01-27 Thomson Csf Semiconducteurs Thermal image detector with fast shutter period and method of operation.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3909394A1 (en) * 1989-03-22 1990-09-27 Messerschmitt Boelkow Blohm Two-dimensional CCD image sensor, image acquisition method for a moving scene and control device and method for the image sensor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Povel, et al., "Charge-Coupled Device Image Sensor As A Demodulator In A 2-D Polarimeter With A Piezoelastic Modulator", Applied Optics, vol. 29(8):1186-1190, Mar. 1990.
Povel, et al., Charge Coupled Device Image Sensor As A Demodulator In A 2 D Polarimeter With A Piezoelastic Modulator , Applied Optics, vol. 29(8):1186 1190, Mar. 1990. *

Cited By (121)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000052926A1 (en) * 1999-03-04 2000-09-08 Vision-Sciences Inc. Image sensor's unit cell with individually controllable electronic shutter circuit
WO2000055642A1 (en) * 1999-03-18 2000-09-21 Siemens Aktiengesellschaft Resoluting range finding device
US6636300B2 (en) 1999-03-18 2003-10-21 Siemens Aktiengesellschaft Spatially resolving range-finding system
US6469489B1 (en) * 1999-07-02 2002-10-22 Csem Centre Suisse D'electronique Et De Microtechnique Sa Adaptive array sensor and electrical circuit therefore
US6693670B1 (en) 1999-07-29 2004-02-17 Vision - Sciences, Inc. Multi-photodetector unit cell
US20040169752A1 (en) * 1999-07-29 2004-09-02 Moshe Stark Multi-photodetector unit cell
US6492652B2 (en) * 1999-12-24 2002-12-10 Hera Rotterdam B.V. Opto-electronic distance sensor and method for the opto-electronic distance measurement
US20040036797A1 (en) * 2000-07-05 2004-02-26 Moshe Stark Dynamic range compression method
US7336309B2 (en) 2000-07-05 2008-02-26 Vision-Sciences Inc. Dynamic range compression method
US7995127B2 (en) 2000-08-25 2011-08-09 Canon Kabushiki Kaisha Pixel drive circuit for image pickup apparatus
US20090128659A1 (en) * 2000-08-25 2009-05-21 Canon Kabushiki Kaisha Image pickup apparatus
US20020054390A1 (en) * 2000-08-25 2002-05-09 Toru Koizumi Image pickup apparatus
US9088743B2 (en) 2000-08-25 2015-07-21 Canon Kabushiki Kaisha Scanning circuit for image pickup apparatus
US7688371B2 (en) * 2000-08-25 2010-03-30 Canon Kabushiki Kaisha Pixel drive circuit for an image pickup apparatus
US20050156121A1 (en) * 2000-11-09 2005-07-21 Canesta, Inc. Methods and devices for charge management for three-dimensional and color sensing
US7464351B2 (en) 2000-11-09 2008-12-09 Canesta, Inc. Method enabling a standard CMOS fab to produce an IC to sense three-dimensional information using augmented rules creating mask patterns not otherwise expressible with existing fab rules
US6822213B2 (en) 2000-11-27 2004-11-23 Vision - Sciences Inc Image sensors with improved signal to noise ratio
US20030201379A1 (en) * 2000-11-27 2003-10-30 Moshe Stark Noise floor reduction in image sensors
US6906793B2 (en) 2000-12-11 2005-06-14 Canesta, Inc. Methods and devices for charge management for three-dimensional sensing
US6639656B2 (en) 2001-03-19 2003-10-28 Matsushita Electric Works, Ltd. Distance measuring apparatus
US20030059087A1 (en) * 2001-08-07 2003-03-27 Sick Ag Monitoring method and an optoelectronic sensor
US7012539B2 (en) * 2001-08-07 2006-03-14 Sick Ag Monitoring method and an optoelectronic sensor
WO2003085413A2 (en) * 2002-04-08 2003-10-16 Matsushita Electric Works, Ltd. Three dimensional image sensing device using intensity modulated light
WO2003085413A3 (en) * 2002-04-08 2004-04-15 Matsushita Electric Works Ltd Three dimensional image sensing device using intensity modulated light
US7119350B2 (en) 2002-04-08 2006-10-10 Matsushita Electric Works, Ltd. Spatial information detecting device using intensity-modulated light and a beat signal
US20050145773A1 (en) * 2002-04-08 2005-07-07 Yusuke Hashimoto Spatial information detecting device using intensity-modulated light
US20090121308A1 (en) * 2002-06-20 2009-05-14 Mesa Imaging Ag Image sensing device and method of
US8299504B2 (en) 2002-06-20 2012-10-30 Mesa Imaging Ag Image sensing device and method of
US7138646B2 (en) 2002-07-15 2006-11-21 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatial information detecting apparatus with charge discarding device using the same
WO2004008175A1 (en) * 2002-07-15 2004-01-22 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatial information detecting apparatus using the same
WO2004038803A1 (en) * 2002-10-24 2004-05-06 Council For The Central Laboratory Of The Research Councils Imaging device
US20060176401A1 (en) * 2002-10-24 2006-08-10 Turchetta Renato Andrea D Imaging device
US7034274B2 (en) 2003-04-07 2006-04-25 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatial information detecting apparatus using the same
US20040195493A1 (en) * 2003-04-07 2004-10-07 Matsushita Electric Works, Ltd. Light receiving device with controllable sensitivity and spatical information detecting apparatus using the same
CN100568536C (en) 2003-04-07 2009-12-09 松下电工株式会社 Light receiving device with controllable sensitivity, and control method and detection apparatus thereof
WO2004090994A1 (en) * 2003-04-07 2004-10-21 Matsushita Electric Works Ltd. Light receiving device with controllable sensitivity and spatial information detecting apparatus using the same
US7521663B2 (en) 2003-09-18 2009-04-21 Mesa Imaging Ag Optoelectronic detector with multiple readout nodes and its use thereof
US20090173874A1 (en) * 2003-09-18 2009-07-09 Mesa Imaging Ag Optoelectronic Detector with Multiple Readout Nodes and Its Use Thereof
US20070176079A1 (en) * 2003-09-18 2007-08-02 Photonfocus Ag Optoelectronic detector with multiple readout nodes and its use thereof
US7622704B2 (en) 2003-09-18 2009-11-24 Mesa Imaging Ag Optoelectronic detector with multiple readout nodes and its use thereof
US7719589B2 (en) 2004-06-02 2010-05-18 The Science And Technology Facilities Council Imaging array with enhanced event detection
US7897928B2 (en) 2004-07-26 2011-03-01 Mesa Imaging Ag Solid-state photodetector pixel and photodetecting method
US9209327B2 (en) 2004-07-26 2015-12-08 Heptagon Micro Optics Pte. Ltd. Solid-state photodetector pixel and photodetecting method
US20110101241A1 (en) * 2004-07-26 2011-05-05 Mesa Imaging Ag Solid-State Photodetector Pixel and Photodetecting Method
US20090014658A1 (en) * 2004-07-26 2009-01-15 Mesa Inaging Ag Solid-state photodetector pixel and photodetecting method
US20070237363A1 (en) * 2004-07-30 2007-10-11 Matsushita Electric Works, Ltd. Image Processing Device
US7834305B2 (en) 2004-07-30 2010-11-16 Panasonic Electric Works Co., Ltd. Image processing device
EP2312336A1 (en) 2004-07-30 2011-04-20 Panasonic Electric Works Co., Ltd Image processing device
US20090212197A1 (en) * 2004-08-04 2009-08-27 Bernhard Buttgen Large -area pixel for use in an image sensor
US7923673B2 (en) 2004-08-04 2011-04-12 Mesa Imaging Ag Large-area pixel for use in an image sensor
US8436401B2 (en) 2004-08-04 2013-05-07 Csem Centre Suisse D'electronique Et De Microtechnique Sa Solid-state photosensor with electronic aperture control
WO2006030989A1 (en) * 2004-09-17 2006-03-23 Matsushita Electric Works, Ltd. A range image sensor
US7362419B2 (en) 2004-09-17 2008-04-22 Matsushita Electric Works, Ltd. Range image sensor
US20070057209A1 (en) * 2004-09-17 2007-03-15 Matsushita Electric Works, Ltd. Range image sensor
US20070146539A1 (en) * 2004-10-25 2007-06-28 Matsushita Electric Works, Ltd. Spatial information detecting device
US7645975B2 (en) * 2004-10-25 2010-01-12 Panasonic Electric Works Co., Ltd. Spatial information detecting device
US7671671B2 (en) 2005-10-19 2010-03-02 Mesa Imaging Ag Device and method for the demodulation of modulated electric signals
US20080247033A1 (en) * 2005-10-19 2008-10-09 Mesa Imaging Ag Device and Method for the Demodulation of Modulated Electric Signals
US8224032B2 (en) 2005-11-14 2012-07-17 Pilz Gmbh & Co. Kg Apparatus and method for monitoring a spatial area, in particular for safeguarding a hazardous area of an automatically operated installation
US20080273758A1 (en) * 2005-11-14 2008-11-06 Oliver Fuchs Apparatus and method for monitoring a spatial area, in particular for safeguarding a hazardous area of an automatically operated installation
US20070200943A1 (en) * 2006-02-28 2007-08-30 De Groot Peter J Cyclic camera
US20070206201A1 (en) * 2006-03-02 2007-09-06 De Groot Peter Phase Shifting Interferometry With Multiple Accumulation
US7564568B2 (en) 2006-03-02 2009-07-21 Zygo Corporation Phase shifting interferometry with multiple accumulation
US7755743B2 (en) 2006-10-18 2010-07-13 Panasonic Electric Works Co., Ltd. Spatial information detecting apparatus
US20100207028A1 (en) * 2007-05-04 2010-08-19 Thales Laser-Pulse Matrix Detector with Rapid Summation
US8421016B2 (en) 2007-05-04 2013-04-16 Thales Laser-pulse matrix detector with rapid summation
WO2008135388A1 (en) * 2007-05-04 2008-11-13 Thales Laser-pulse matrix detector with rapid summation
FR2915833A1 (en) * 2007-05-04 2008-11-07 Thales Sa Detector matrix pulse laser with rapid summation.
EP2018041A2 (en) 2007-07-18 2009-01-21 MESA Imaging AG On-chip time-based digital conversion of pixel outputs
US7586077B2 (en) 2007-07-18 2009-09-08 Mesa Imaging Ag Reference pixel array with varying sensitivities for time of flight (TOF) sensor
EP2017651A2 (en) 2007-07-18 2009-01-21 MESA Imaging AG Reference pixel array with varying sensitivities for TOF sensor
US20090021617A1 (en) * 2007-07-18 2009-01-22 Mesa Imaging Ag On-chip time-based digital conversion of pixel outputs
US7889257B2 (en) 2007-07-18 2011-02-15 Mesa Imaging Ag On-chip time-based digital conversion of pixel outputs
US20090020687A1 (en) * 2007-07-18 2009-01-22 Mesa Imaging Ag Reference Pixel Array with Varying Sensitivities for TOF Sensor
US20090079959A1 (en) * 2007-09-26 2009-03-26 Fujifilm Corporation Method and device for measuring distance
US7880866B2 (en) 2007-09-26 2011-02-01 Fujifilm Corporation Method and device for measuring distance
US8223215B2 (en) 2008-01-30 2012-07-17 Mesa Imaging Ag Adaptive neighborhood filtering (ANF) system and method for 3D time of flight cameras
US20090190007A1 (en) * 2008-01-30 2009-07-30 Mesa Imaging Ag Adaptive Neighborhood Filtering (ANF) System and Method for 3D Time of Flight Cameras
WO2009097516A1 (en) 2008-01-30 2009-08-06 Mesa Imaging Ag Adaptive neighborhood filtering (anf) system and method for 3d time of flight cameras
US20090224139A1 (en) * 2008-03-04 2009-09-10 Mesa Imaging Ag Drift Field Demodulation Pixel with Pinned Photo Diode
WO2010013779A1 (en) 2008-07-30 2010-02-04 国立大学法人静岡大学 Distance image sensor and method for generating image signal by time-of-flight method
US20110157354A1 (en) * 2008-07-30 2011-06-30 Shoji Kawahito Distance image sensor and method for generating image signal by time-of-flight method
US8537218B2 (en) 2008-07-30 2013-09-17 National University Corporation Shizuoka University Distance image sensor and method for generating image signal by time-of-flight method
US20100053405A1 (en) * 2008-08-28 2010-03-04 Mesa Imaging Ag Demodulation Pixel with Daisy Chain Charge Storage Sites and Method of Operation Therefor
US8760549B2 (en) 2008-08-28 2014-06-24 Mesa Imaging Ag Demodulation pixel with daisy chain charge storage sites and method of operation therefor
US9076709B2 (en) 2009-05-05 2015-07-07 Mesa Imaging Ag 3D CCD-style imaging sensor with rolling readout
US20110114821A1 (en) * 2009-05-05 2011-05-19 Mesa Imaging Ag 3D CCD-Style Imaging Sensor with Rolling Readout
WO2010144616A1 (en) 2009-06-09 2010-12-16 Mesa Imaging Ag System for charge-domain electron subtraction in demodulation pixels and method therefor
US20100308209A1 (en) * 2009-06-09 2010-12-09 Mesa Imaging Ag System for Charge-Domain Electron Subtraction in Demodulation Pixels and Method Therefor
US9117712B1 (en) 2009-07-24 2015-08-25 Mesa Imaging Ag Demodulation pixel with backside illumination and charge barrier
US9000349B1 (en) 2009-07-31 2015-04-07 Mesa Imaging Ag Sense node capacitive structure for time of flight sensor
US20110089471A1 (en) * 2009-08-14 2011-04-21 Mesa Imaging Ag Demodulation Pixel Incorporating Majority Carrier Current, Buried Channel and High-Low Junction
US9698196B2 (en) 2009-08-14 2017-07-04 Heptagon Micro Optics Pte. Ltd. Demodulation pixel incorporating majority carrier current, buried channel and high-low junction
EP2284897A2 (en) 2009-08-14 2011-02-16 Bernhard Buettgen Demodulation pixel incorporating majority carrier current, buried channel and high-low junction
WO2011020921A1 (en) * 2009-08-21 2011-02-24 Iee International Electronics & Engineering S.A. Time-of-flight sensor
US9231006B2 (en) 2009-10-05 2016-01-05 National University Corporation Shizuoka University Semiconductor element and solid-state imaging device
WO2011057244A1 (en) 2009-11-09 2011-05-12 Mesa Imaging Ag Multistage demodulation pixel and method
DE112010004328T5 (en) 2009-11-09 2013-02-28 Mesa Imaging Ag A multi-stage process and Demodulationsbildpunkt
US8754939B2 (en) * 2009-11-09 2014-06-17 Mesa Imaging Ag Multistage demodulation pixel and method
US20110273561A1 (en) * 2009-11-09 2011-11-10 Mesa Imaging Ag Multistage Demodulation Pixel and Method
CN102822693A (en) * 2010-01-06 2012-12-12 美萨影像股份公司 Demodulation Sensor with Separate Pixel and Storage Arrays
KR101884952B1 (en) 2010-01-06 2018-08-02 헵타곤 마이크로 옵틱스 피티이. 리미티드 Demodulation sensor with separate pixel and storage arrays
CN102822693B (en) 2010-01-06 2014-09-10 美萨影像股份公司 Demodulation Sensor with Separate Pixel and Storage Arrays
US20110164132A1 (en) * 2010-01-06 2011-07-07 Mesa Imaging Ag Demodulation Sensor with Separate Pixel and Storage Arrays
WO2011085079A1 (en) 2010-01-06 2011-07-14 Mesa Imaging Ag Demodulation sensor with separate pixel and storage arrays
US9442196B2 (en) 2010-01-06 2016-09-13 Heptagon Micro Optics Pte. Ltd. Demodulation sensor with separate pixel and storage arrays
US9410800B1 (en) 2010-08-02 2016-08-09 Heptagon Micro Optics Pte. Ltd. 3D TOF camera with masked illumination
US9151677B2 (en) 2010-12-06 2015-10-06 Melexis Technologies Nv Method and system for demodulating signals
WO2012076500A1 (en) 2010-12-06 2012-06-14 Melexis Tessenderlo Nv Method and system for demodulating signals
WO2013041949A1 (en) 2011-09-20 2013-03-28 Mesa Imaging Ag Time of flight sensor with subframe compression and method
US9140795B2 (en) 2011-09-20 2015-09-22 Mesa Imaging Ag Time of flight sensor with subframe compression and method
US8829408B2 (en) 2011-09-27 2014-09-09 Mesa Imaging Ag Sensor pixel array and separated array of storage and accumulation with parallel acquisition and readout wherein each pixel includes storage sites and readout nodes
DE102012109129B4 (en) * 2011-09-27 2017-06-29 Heptagon Micro Optics Pte. Ltd. Sensor pixel array and separate arrangement of a storage and accumulation with parallel sensing and readout
DE102012109129A1 (en) 2011-09-27 2013-05-08 Mesa Imaging Ag Sensor pixel array and separate arrangement of a storage and accumulation with parallem detecting and reading
US9202902B2 (en) 2012-08-03 2015-12-01 National University Corporation Shizuoka University Semiconductor element and solid-state imaging device
WO2014021417A1 (en) 2012-08-03 2014-02-06 国立大学法人 静岡大学 Semiconductor element and solid-state image pickup device
US9961280B2 (en) 2013-03-08 2018-05-01 Canon Kabushiki Kaisha Image forming apparatus and imaging system
US9881422B2 (en) * 2014-12-04 2018-01-30 Htc Corporation Virtual reality system and method for controlling operation modes of virtual reality system
US20160163110A1 (en) * 2014-12-04 2016-06-09 Htc Corporation Virtual reality system and method for controlling operation modes of virtual reality system
US9976894B2 (en) 2015-11-17 2018-05-22 Heptagon Micro Optics Pte. Ltd. Optical device
US10016137B1 (en) 2017-11-22 2018-07-10 Hi Llc System and method for simultaneously detecting phase modulated optical signals

Also Published As

Publication number Publication date Type
EP0792555A1 (en) 1997-09-03 application
KR100404961B1 (en) 2003-12-18 grant
JP3723215B2 (en) 2005-12-07 grant
CN1163687A (en) 1997-10-29 application
DE59504935D1 (en) 1999-03-04 grant
CN1099802C (en) 2003-01-22 grant
EP0792555B1 (en) 1999-01-20 grant
DE4440613C1 (en) 1996-07-25 grant
CA2197079C (en) 2004-10-12 grant
CA2197079A1 (en) 1996-05-23 application
WO1996015626A1 (en) 1996-05-23 application
JPH10508736A (en) 1998-08-25 application

Similar Documents

Publication Publication Date Title
US5040057A (en) Multi-mode TDI/raster-scan television camera system
US7560679B1 (en) 3D camera
US4707698A (en) Coordinate measurement and radar device using image scanner
Niclass et al. Single-photon synchronous detection
US7016519B1 (en) Method and device for detecting three-dimensional information
Ando et al. Correlation image sensor: Two-dimensional matched detection of amplitude-modulated light
US4949172A (en) Dual-mode TDI/raster-scan television camera system
US6002435A (en) Solid-state imaging apparatus
US4047022A (en) Auto focus with spatial filtering and pairwise interrogation of photoelectric diodes
Büttgen et al. CCD/CMOS lock-in pixel for range imaging: Challenges, limitations and state-of-the-art
US4315159A (en) Optical sensor device with reduction of ambient light effects
Spirig et al. The lock-in CCD-two-dimensional synchronous detection of light
US4523829A (en) Automatic focus detecting device
US4293877A (en) Photo-sensor device and image scanning system employing the same
US5965871A (en) Column readout multiplexer for CMOS image sensors with multiple readout and fixed pattern noise cancellation
US4164740A (en) Synthetic aperture using image scanner
US6002423A (en) Three-dimensional imaging system
US4881127A (en) Still video camera with electronic shutter and flash
US4673276A (en) Blur detecting device for a camera
US4180309A (en) Focal point detecting device for SLR camera
US4935616A (en) Range imaging laser radar
Lange et al. Solid-state time-of-flight range camera
US6600168B1 (en) High speed laser three-dimensional imager
US7834985B2 (en) Surface profile measurement
US20100046802A1 (en) Distance estimation apparatus, distance estimation method, storage medium storing program, integrated circuit, and camera

Legal Events

Date Code Title Description
AS Assignment

Owner name: LEICA AG, SWITZERLAND

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SPIRIG, THOMAS;SEITZ, PETER;REEL/FRAME:008580/0676;SIGNING DATES FROM 19970121 TO 19970122

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12

AS Assignment

Owner name: HEPTAGON MICRO OPTICS PTE. LTD., SINGAPORE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MESA IMAGING AG;REEL/FRAME:037211/0220

Effective date: 20150930