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Electrical socket

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Publication number
US5131852A
US5131852A US07749064 US74906491A US5131852A US 5131852 A US5131852 A US 5131852A US 07749064 US07749064 US 07749064 US 74906491 A US74906491 A US 74906491A US 5131852 A US5131852 A US 5131852A
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US
Grant status
Grant
Patent type
Prior art keywords
socket
housing
circuit
member
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07749064
Inventor
Dimitry G. Grabbe
Iosif Korsunsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMP Inc
Original Assignee
AMP Inc
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Filing date
Publication date
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/02Arrangements of circuit components or wiring on supporting structure
    • H05K7/10Plug-in assemblages of components, e.g. IC sockets
    • H05K7/1053Plug-in assemblages of components, e.g. IC sockets having interior leads
    • H05K7/1061Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49861Lead-frames fixed on or encapsulated in insulating substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • H05K3/326Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor the printed circuit having integral resilient or deformable parts, e.g. tabs or parts of flexible circuits
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/14Structural association of two or more printed circuits
    • H05K1/141One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/189Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit

Abstract

An electrical socket (10) for leadless electronic devices has been disclosed. The socket (10) includes a film-circuit member (16) having circuits (66) on a dielectric base (64) with inner ends (68) for electrically engaging conductive pads on the electronic device and outer ends (74) for being electrically attached to circuits on a substrate. The film-circuit member (16) rests on a support plate (18) positioned in a cavity (42) in a lower housing (20) and is overlaid by an upper housing (12) having an opening (24) for receiving an electronic device.

Description

FIELD OF THE INVENTION

The present invention relates to electrical sockets for interconnecting leadless electronic devices to a substrate.

BACKGROUND OF THE INVENTION

It is known from U.S. Pat. No. 4,969,828 to Bright, et al. to provide a socket having a flexible etched circuitry film positioned across a raised platform and a cover having a biasing plate. An IC chip, bonded to a film and positioned in a carrier can be tested by being placed over the film in the socket and biased there against by the cover.

Whereas the above described socket has many advantageous features, a problem of having a uniformity of force distribution over the mating contact areas exists. That is, the biasing plate provides a uniform force but cannot provide such a force for contact areas which are out of tolerance. Accordingly it is now proposed to provide a socket which has a high degree of uniformity of force distribution under even the most extreme out of tolerance conditions.

SUMMARY OF THE INVENTION

According to the present invention, an electrical socket is provided for electrically interconnecting an electronic device to a substrate. The socket includes a support plate of spring tempered metal positioned in a housing and having spring fingers on which inner ends of the circuits on a film-circuit member are positioned. The circuits further include outer ends for electrical engagement with circuits on a substrate. The inner ends engage conductive pads on the electronic device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an exploded view of a socket having the embodiments of the present invention and a bare IC chip;

FIG. 2 is a view of a film-circuit member of the socket;

FIG. 3 is a view of a stack of support plates of the socket;

FIG. 4 is a view of an assembled socket with the chip positioned therein;

FIG. 5 is a sectioned view of an assembled socket with a chip in place; and

FIG. 6 is the sectioned view of FIG. 5 with a load imposed on the chip.

DESCRIPTION OF THE INVENTION

With reference to FIG. 1, socket 10 of the present invention is shown with its several components exploded out. These components include upper housing 12, contact elements 14, film-circuit member 16 support plate 18 and lower housing 20. A bare integrated chip 22 is shown above upper housing 12.

Upper housing 12 is a molded part with one suitable molding material being polyphenylene sulfide. However, there are other equally well suited plastics as well as ceramics and metals which can be used. A centrally located opening 24 extends through housing 12 and is provided with a beveled lead-in portion 26. Alignment pegs 28, adjacent each corner, extend outwardly from surface 30. Pegs 28, in the embodiment illustrated, also serve to secure the components together as shown in FIG. 5 as well as providing an alignment function. Alternatively pins 32 (FIG. 6) can also be used in which case holes 33, indicated by the dashed lines would be provided.

Contact elements 14 include head 34 and shelf 36 and are of a suitable conductive material. In the embodiment shown in FIG. 1, elements 14 have a tipped free end 38 which are inserted into holes in test boards (not shown) and soldered. Another embodiment is shown in FIG. 5.

Film member 16 and support plate 18 are described below in conjunction with FIGS. 2 and 3 respectively.

Lower housing 20 is a molded part with the molding material preferably being the same as or compatible with the material of upper housing 12. A first cavity 42 extends into housing 20 from surface 44 and a second cavity 46 or alternative an opening (not shown) of smaller dimensions is provided in floor 48 of the first cavity. Alignment holes 52 adjacent each corner of first cavity 42 extend through housing 20 and may, as shown in the embodiment in FIG. 5, join holes 54 of a larger diameter extending into housing 20 from opposite surface 56.

Contact element holes 60 extend along each side of and through housing 20 to open on opposing surfaces 44,56.

Film-circuit member 16 typically has a Kapton base 64 with conductive traces or circuits 66 on one surface. Each circuit 66 has an inner end 68 which preferably includes a raised contact area 70 which preferably is a gold dot or other noble metals or platings. Areas 70 can be produced by electroforming, wire bonding and breaking off the wires, sometimes followed by laser fusing, or by a number of other, well known processes. Inner ends 68 form a pattern identical to the layout of the bonding pads (not shown) on the chips to be tested.

Each circuit 66 has an outer end pad 74 with holes 76 extending through the pads and through base 64. Alternatively circuits 66 are extended and formed to provide a Gullwing lead 77 as shown in FIG. 4. In this case, holes 76 are replaced by slots 76a.

Four alignment holes 78, located inwardly from each corner, extend through base 64.

Support plate 18 is a stack of thin sheets 80 of spring temper metal which have been contoured by stamping or chemical milling to produce a central opening 82 and spring fingers 84 which project into the opening 82. Fingers 84 are on the same pattern as the inner ends 68 on film-circuit member 16. The number of sheets 80 stacked together determine the amount of stored energy normal force for each bonding pad on the chip. Thus, by selecting the appropriate number of sheets 80, forces from low grams to hundreds of grams can be obtained. The sheets 80 may be bonded together if desired.

Alignment holes 86 are provided through each sheet 80 adjacent the corners thereof.

FIG. 4 shows an assembled socket 10 with chip 22 therein. Note that upper housing 12 is sized so that circuit pads 74 and holes 76 are accessible for the insertion and soldering of contact elements 14.

FIG. 5 shows how socket 10 is assembled. Support plate 18 is placed into lower housing 20 and more particularly in first cavity 42 with spring fingers 84 projecting out over second cavity 46. Film-circuit member 16 is placed on surface 44 and over support plate 18 with the inner ends 68 over respective fingers 84. Upper housing 12 is then added with alignment pegs 28 going through alignment holes 78,86 and 52 in circuit member 16, support plate 18 and lower housing 20 respectively. By upsetting pegs 28 so that it mushrooms out in counterbore 54, the assembly is secured. The assembly can also be secured by pegs 28 or by discrete pins 32 being frictionally received in holes 52. In this case counterbores 54 are not required. Pins 32 would be preferred where housings 12 and 20 are of ceramic or metal.

Contact elements 14 are then inserted through holes 76 and heads 34 soldered to pads 74.

In the event elements 14 are to be soldered to circuit pads on substrate 90 as shown in FIG. 6, lower housing 20 requires side openings 92 to holes 76 so that the element shafts 36 which have been bent, can extend outwardly therethrough.

Gullwing leads 77, if provided on circuit member 16, extend down slots 76a and onto the circuit pads as shown in FIG. 5.

FIG. 5 also shows chip 22 in opening 24 in upper housing 12 with the bonding pads thereon engaging raised contact areas 70.

FIG. 6 shows socket 10 on substrate 90 with load 96 bearing down on chip 22 to produce the required normal force between contact areas 70 and the bonding pads. As the force exceeds a given level, spring fingers 84 bend down into second cavity 46 as indicated by dashed lines 98 thus storing energy. The floor of second cavity 46 prevents the fingers 84 from being overstressed. As spring fingers are being moved downwardly, raised contact areas 70 are wiping across the bonding pads to clean dirt and other debris and thereby enhance the electrical path therebetween.

Whereas socket 10 can be made as large as required, the principal advantage is that it can be made for chips having bonding pads on very close center lines; e.g. four mill centers. This is possible because spring finger 84 can be produced having a width of just two mills. Thus a very high, uniform force can be provided in a very limited space.

As can be discerned from the foregoing, an electrical socket having the capability of testing bare integrated circuit chips having bonding pads on extremely close centers and requiring a high normal contact force has been described. The socket includes a two piece housing, a film-circuit member and a support member having discrete spring fingers for each inner end on the circuit member. The support member is comprised of a number of thin, spring temper metal sheets stacked up to provide the support and stored energy for the required normal force.

Claims (27)

We claim:
1. An electrical socket for electrically interconnecting an electronic device to a substrate, comprising:
a housing having a cavity;
a support plate of spring tempered metal having a central opening and spring fingers projecting into said opening, said plate positioned on said housing with said finger extending over said cavity;
a film-circuit member having circuits thereon with said circuits having inner ends overlying respective said spring fingers and having contact areas thereon for electrically engaging contact areas on an electronic device, said circuits further having outer ends for being electrically attached to circuits on a substrate.
2. The socket of claim 1 wherein said support plate comprises a plurality of thin spring tempered metal sheets stacked on top of each other.
3. The socket of claim 1 further including connecting means connecting said outer ends to circuits on a substrate.
4. The socket of claim 1 wherein said contact areas are raised above the level of the inner ends.
5. The socket of claim 4 wherein said raised contact areas are formed by electroforming.
6. The socket of claim 4 wherein said raised contact areas are formed by wire bonding.
7. The socket of claim 6 wherein said wire bonding is followed by laser fusing.
8. The socket of claim 1 further including an upper housing over said film-circuit member and having an opening for receiving an electronic device.
9. The socket of claim 8 wherein said upper housing includes means for aligning said film-circuit member with said support plate.
10. The socket of claim 1 wherein said housing includes a first cavity for receiving the support plate and a second cavity over which said spring fingers extend.
11. The socket of claim 1 wherein said housing is of a ceramic material.
12. The socket of claim 1 wherein said housing is of a metal material.
13. The socket of claim 1 wherein said housing includes a first cavity for receiving the support plate and an opening over which said spring fingers extend.
14. An electrical socket for electrically connecting leadless electronic devices to a substrate, comprising:
a lower housing having a first cavity in one surface and a smaller second cavity in a floor of said first cavity;
a support plate having a central opening and a plurality of spring fingers projecting into said opening, said plate being positioned in said first cavity with said spring fingers overlying said second cavity;
a film-circuit member having conductive-circuit with inner ends arranged in a given pattern and outer ends around the periphery, said circuit member positioned on said one surface with said inner ends in registration with respective said spring fingers and said outer ends adjacent sides of said lower housing;
an upper housing having a central opening and positioned on said film-circuit member with said inner ends exposed in said opening for electrically engaging conductive pads on an electronic device which may be positioned in said opening; and
connecting means for electrically connecting said outer ends of said circuits to a substrate on which said socket may be mounted.
15. The socket of claim 14 wherein said support plate comprises a plurality of stacked, thin spring temper metal sheets.
16. The socket of claim 14 wherein said upper housing further includes alignment pegs and said film-circuit member, support plate and lower housing have alignment holes for receiving said pegs.
17. The socket of claim 14 wherein said connecting means include contact elements having a shaft and said outer ends and lower housing having holes through which said shafts extend.
18. The socket of claim 17 wherein said shaft includes a bent free end for being soldered to circuits on a substrate.
19. The socket of claim 17 wherein said outer ends include a conductive pad and said contact elements include means thereon for being mechanically and electrically fixed to said pads.
20. The socket of claim 14 wherein said inner ends of said film-circuit member includes raised contact areas thereon.
21. The socket of claim 14 further including securing means for securing said lower housing, support plate, film-circuit member and upper housing together.
22. The socket of claim 21 wherein said securing means include pegs extending outwardly from one surface of said upper housing and said lower housing, support plate and film-circuit member have holes for receiving said pegs.
23. The socket of claim 22 wherein said holes in said lower housing include a shoulder and said pegs are upset against said shoulders.
24. The socket of claim 1 wherein said contact areas on said inner ends are raised.
25. The socket of claim 24 wherein said raised contact areas are plated with a noble metal.
26. The socket of claim 24 wherein said raised contact areas are formed from a noble metal.
27. The socket of claim 24 wherein said raised contact areas are formed from gold.
US07749064 1991-08-23 1991-08-23 Electrical socket Expired - Lifetime US5131852A (en)

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Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560471A2 (en) * 1992-03-12 1993-09-15 Yamaichi Electronics Co., Ltd. Integrated circuit carrier
US5414298A (en) * 1993-03-26 1995-05-09 Tessera, Inc. Semiconductor chip assemblies and components with pressure contact
US5455390A (en) * 1994-02-01 1995-10-03 Tessera, Inc. Microelectronics unit mounting with multiple lead bonding
US5491891A (en) * 1993-03-25 1996-02-20 Probes Associates, Inc. Method of making a test probe ring
US5499929A (en) * 1993-06-11 1996-03-19 Kel Corporation Socket connector for electronic devices
US5518964A (en) * 1994-07-07 1996-05-21 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US5590460A (en) * 1994-07-19 1997-01-07 Tessera, Inc. Method of making multilayer circuit
US5615824A (en) * 1994-06-07 1997-04-01 Tessera, Inc. Soldering with resilient contacts
US5632631A (en) * 1994-06-07 1997-05-27 Tessera, Inc. Microelectronic contacts with asperities and methods of making same
US5688716A (en) * 1994-07-07 1997-11-18 Tessera, Inc. Fan-out semiconductor chip assembly
US5798286A (en) * 1995-09-22 1998-08-25 Tessera, Inc. Connecting multiple microelectronic elements with lead deformation
US5802699A (en) * 1994-06-07 1998-09-08 Tessera, Inc. Methods of assembling microelectronic assembly with socket for engaging bump leads
US5820014A (en) 1993-11-16 1998-10-13 Form Factor, Inc. Solder preforms
US5830782A (en) * 1994-07-07 1998-11-03 Tessera, Inc. Microelectronic element bonding with deformation of leads in rows
US5983492A (en) * 1996-11-27 1999-11-16 Tessera, Inc. Low profile socket for microelectronic components and method for making the same
US5994152A (en) 1996-02-21 1999-11-30 Formfactor, Inc. Fabricating interconnects and tips using sacrificial substrates
US6072325A (en) * 1993-07-20 2000-06-06 Tokyo Electron Kabushiki Kaisha Probe device
US6117694A (en) * 1994-07-07 2000-09-12 Tessera, Inc. Flexible lead structures and methods of making same
US6133072A (en) * 1996-12-13 2000-10-17 Tessera, Inc. Microelectronic connector with planar elastomer sockets
US6174173B1 (en) * 1998-02-25 2001-01-16 Enplas Corporation IC socket
US6247228B1 (en) 1996-08-12 2001-06-19 Tessera, Inc. Electrical connection with inwardly deformable contacts
US6274823B1 (en) 1993-11-16 2001-08-14 Formfactor, Inc. Interconnection substrates with resilient contact structures on both sides
US20030071346A1 (en) * 1994-07-07 2003-04-17 Tessera, Inc. Flexible lead structures and methods of making same
US6582238B2 (en) * 2000-08-10 2003-06-24 Denso Corporation Printed circuit board with ground corner regions
US6853210B1 (en) 1999-03-25 2005-02-08 Micron Technology, Inc. Test interconnect having suspended contacts for bumped semiconductor components
US20050155223A1 (en) * 1994-07-07 2005-07-21 Tessera, Inc. Methods of making microelectronic assemblies
US6980017B1 (en) 1999-03-10 2005-12-27 Micron Technology, Inc. Test interconnect for bumped semiconductor components and method of fabrication
EP1610381A2 (en) * 2004-06-23 2005-12-28 Delphi Technologies, Inc. Electronic package employing segmented connector and solder joint
US20070026710A1 (en) * 2003-09-30 2007-02-01 Shuichi Inoue Electrical connection component
US20080085615A1 (en) * 2004-10-25 2008-04-10 Hong Xie Protected socket for integrated circuit devices
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US20140342572A1 (en) * 2013-05-16 2014-11-20 Nisene Technology Group Decapsulator with applied voltage and etchant cooling system for etching plastic-encapsulated devices
US20160126656A1 (en) * 2013-06-13 2016-05-05 Omron Corporation Connecting mechanism

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US4169642A (en) * 1976-09-16 1979-10-02 E. I. Du Pont De Nemours And Company Integrated circuit connector
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Cited By (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560471A3 (en) * 1992-03-12 1993-09-29 Yamaichi Electronics Co., Ltd. Integrated circuit carrier
EP0560471A2 (en) * 1992-03-12 1993-09-15 Yamaichi Electronics Co., Ltd. Integrated circuit carrier
US5491891A (en) * 1993-03-25 1996-02-20 Probes Associates, Inc. Method of making a test probe ring
US5414298A (en) * 1993-03-26 1995-05-09 Tessera, Inc. Semiconductor chip assemblies and components with pressure contact
US5499929A (en) * 1993-06-11 1996-03-19 Kel Corporation Socket connector for electronic devices
US6072325A (en) * 1993-07-20 2000-06-06 Tokyo Electron Kabushiki Kaisha Probe device
US6274823B1 (en) 1993-11-16 2001-08-14 Formfactor, Inc. Interconnection substrates with resilient contact structures on both sides
US5820014A (en) 1993-11-16 1998-10-13 Form Factor, Inc. Solder preforms
US5455390A (en) * 1994-02-01 1995-10-03 Tessera, Inc. Microelectronics unit mounting with multiple lead bonding
US5794330A (en) * 1994-02-01 1998-08-18 Tessera, Inc. Microelectronics unit mounting with multiple lead bonding
US5632631A (en) * 1994-06-07 1997-05-27 Tessera, Inc. Microelectronic contacts with asperities and methods of making same
US5980270A (en) * 1994-06-07 1999-11-09 Tessera, Inc. Soldering with resilient contacts
US6938338B2 (en) 1994-06-07 2005-09-06 Tessera, Inc. Method of making an electronic contact
US5934914A (en) * 1994-06-07 1999-08-10 Tessera, Inc. Microelectronic contacts with asperities and methods of making same
US5802699A (en) * 1994-06-07 1998-09-08 Tessera, Inc. Methods of assembling microelectronic assembly with socket for engaging bump leads
US5812378A (en) * 1994-06-07 1998-09-22 Tessera, Inc. Microelectronic connector for engaging bump leads
US5615824A (en) * 1994-06-07 1997-04-01 Tessera, Inc. Soldering with resilient contacts
US6205660B1 (en) 1994-06-07 2001-03-27 Tessera, Inc. Method of making an electronic contact
US6080603A (en) * 1994-07-07 2000-06-27 Tessera, Inc. Fixtures and methods for lead bonding and deformation
US5801441A (en) * 1994-07-07 1998-09-01 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US5959354A (en) * 1994-07-07 1999-09-28 Tessera, Inc. Connection components with rows of lead bond sections
US5688716A (en) * 1994-07-07 1997-11-18 Tessera, Inc. Fan-out semiconductor chip assembly
US20050155223A1 (en) * 1994-07-07 2005-07-21 Tessera, Inc. Methods of making microelectronic assemblies
US6828668B2 (en) 1994-07-07 2004-12-07 Tessera, Inc. Flexible lead structures and methods of making same
US7166914B2 (en) 1994-07-07 2007-01-23 Tessera, Inc. Semiconductor package with heat sink
US5913109A (en) * 1994-07-07 1999-06-15 Tessera, Inc. Fixtures and methods for lead bonding and deformation
US6104087A (en) * 1994-07-07 2000-08-15 Tessera, Inc. Microelectronic assemblies with multiple leads
US6117694A (en) * 1994-07-07 2000-09-12 Tessera, Inc. Flexible lead structures and methods of making same
US20030071346A1 (en) * 1994-07-07 2003-04-17 Tessera, Inc. Flexible lead structures and methods of making same
US5518964A (en) * 1994-07-07 1996-05-21 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US6265765B1 (en) 1994-07-07 2001-07-24 Tessera, Inc. Fan-out semiconductor chip assembly
US6194291B1 (en) 1994-07-07 2001-02-27 Tessera, Inc. Microelectronic assemblies with multiple leads
US5830782A (en) * 1994-07-07 1998-11-03 Tessera, Inc. Microelectronic element bonding with deformation of leads in rows
US6635553B1 (en) 1994-07-07 2003-10-21 Iessera, Inc. Microelectronic assemblies with multiple leads
US6239386B1 (en) 1994-07-19 2001-05-29 Tessera, Inc. Electrical connections with deformable contacts
US5590460A (en) * 1994-07-19 1997-01-07 Tessera, Inc. Method of making multilayer circuit
US6274820B1 (en) 1994-07-19 2001-08-14 Tessera, Inc. Electrical connections with deformable contacts
US5798286A (en) * 1995-09-22 1998-08-25 Tessera, Inc. Connecting multiple microelectronic elements with lead deformation
US6147400A (en) * 1995-09-22 2000-11-14 Tessera, Inc. Connecting multiple microelectronic elements with lead deformation
US6365436B1 (en) 1995-09-22 2002-04-02 Tessera, Inc. Connecting multiple microelectronic elements with lead deformation
US5994152A (en) 1996-02-21 1999-11-30 Formfactor, Inc. Fabricating interconnects and tips using sacrificial substrates
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US6247228B1 (en) 1996-08-12 2001-06-19 Tessera, Inc. Electrical connection with inwardly deformable contacts
US6229100B1 (en) 1996-11-27 2001-05-08 Tessera, Inc. Low profile socket for microelectronic components and method for making the same
US5983492A (en) * 1996-11-27 1999-11-16 Tessera, Inc. Low profile socket for microelectronic components and method for making the same
US6700072B2 (en) 1996-12-13 2004-03-02 Tessera, Inc. Electrical connection with inwardly deformable contacts
US20040045159A1 (en) * 1996-12-13 2004-03-11 Tessera, Inc. Electrical connection with inwardly deformable contacts
US6706973B2 (en) 1996-12-13 2004-03-16 Tessera, Inc. Electrical connection with inwardly deformable contacts
US6541867B1 (en) 1996-12-13 2003-04-01 Tessera, Inc. Microelectronic connector with planar elastomer sockets
US6133072A (en) * 1996-12-13 2000-10-17 Tessera, Inc. Microelectronic connector with planar elastomer sockets
US6978538B2 (en) 1996-12-13 2005-12-27 Tessera, Inc. Method for making a microelectronic interposer
US20060040522A1 (en) * 1996-12-13 2006-02-23 Tessera, Inc. Method for making a microelectronic interposer
US6174173B1 (en) * 1998-02-25 2001-01-16 Enplas Corporation IC socket
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