US4621434A - Multiple-coordinate scanner with regulated scanning force - Google Patents
Multiple-coordinate scanner with regulated scanning force Download PDFInfo
- Publication number
- US4621434A US4621434A US06/639,288 US63928884A US4621434A US 4621434 A US4621434 A US 4621434A US 63928884 A US63928884 A US 63928884A US 4621434 A US4621434 A US 4621434A
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- US
- United States
- Prior art keywords
- scanner
- measuring
- coordinate
- force
- measuring force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001105 regulatory effect Effects 0.000 title abstract description 7
- 230000033001 locomotion Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 description 6
- 238000013459 approach Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/002—Details
- G01B3/008—Arrangements for controlling the measuring force
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/168—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using counterbalancing forces
Definitions
- the invention relates to a multiple-coordinate scanner with regulated scanning force for scanning objects. With this scanner, the precise location of the scanned point on the object can be ascertained.
- the scanner is preferably used in multi-dimensional length-measuring apparatus.
- the multiple-coordinate scanner can be used in combination with a measuring machine for scanning and measuring arbitrarily curved three-dimensional surfaces such as are used in gear manufacturing.
- Multiple-coordinate scanners are known (German Pat. No. 22 42 355), the structure of which comprises a torsionally rigid succession of straight-line guides, each of which is associated with a travel measuring system.
- the measuring force is generated via plunger coils, or dynamic coils, independently of the force actually occurring, and is therefore subject to certain fluctuations.
- the accuracy of the measurement is affected by these fluctuations, as by the different flexions of the measuring system.
- the degree of possible deflection of the measuring scanner is thus severely restricted. Because of its necessarily rigid embodiment the measuring machine has large masses that must be moved, the restricted deflectability also severely restricts the speed of deflection, which results in measuring times of considerable length.
- the location of the scanning point of the scanning ball on the object is indirectly determined from the magnitude of the deflection of the individual straight-line guides.
- a multiple-coordinate scanner is designed with straight-line guides, including not only a travel transducer but also a drive element, with which the guides can be deflected.
- the amount of the deflection is regulated such that the resultant measuring force vector is constant in accordance with a predetermined variable.
- the amount of the deflection of the straight-line guides thus has no influence on the measuring force.
- the magnitude and direction of the measuring force is detected via a multiple-coordinate force measuring device disposed preceding the straight-line guides.
- the scanning speed can then be increased as well, because of the small masses of the scanning head, since the multiple-coordinate scanning head is itself capable of rapidly following the surface of the object to be scanned, independently of the movements of the sluggish carriage of the measuring machine.
- the guide variable is the measuring force
- the guide variable for the movement of the measuring machine carriage is the deflection of the scanning head.
- Connecting the straight-line guides in sequence can also be effected such that the spring parallelograms are nested inside one another. Because of the regulation, the necessarily different dimensions of the spring parallelograms have no effect on the measuring force. The travel transducers and the drive elements are then disposed outside the spring parallelograms.
- the drive elements may be electric, hydraulic or pneumatic linear motors, which are triggered by electrical signals.
- Corresponding rotator drives can also be used, however, if the rotational movement is converted into a linear movement and a speed reduction is simultaneously introduced.
- Known gear mechanisms cannot be used, among other reasons because of their inertial masses and their play.
- a suitable mechanism for this purpose is one comprising a narrow, thin belt or cable, which is twisted by the drive motor and by its helical deformation is shortened in length. One end of the belt is connected to the measuring scanner, and the other to the measuring scanner base. The advantages of this mechanism are its low mass, the play-free reversal of the drive direction and the simplicity of deflecting the belt in another direction.
- the straight-line guides with the travel measuring devices can be dispensed with either wholly or in part.
- the measuring force must then be kept constant via the coordinate axis drive mechanisms of the measuring machine.
- a further travel measuring device can also be used, its deflection being converted into a corresponding measuring force.
- the signal processing is initially done in an analog manner and then digitally in a subsequent computer.
- the computer also takes on the task of extensively automating the course of measurement, together with the measuring machine.
- FIG. 1 shows the basic structure of the multiple-coordinate scanner with regulated scanning force according to the invention
- FIG. 1a-c illustrate respective side, plan, and sectional views of the scanner shown in FIG. 1;
- FIG. 2 shows the basic structure of the multiple-coordinate force measuring device
- FIG. 3 is a block circuit diagram of the electrical force regulation and shows its connection with the computer
- FIG. 4 is a schematic illustration of the rotator drive mechanism with belt drives and a scanner pin.
- FIG. 1 shows the fundamental structure of the multiple-coordinate scanning head having three spring parallelogram units 3, 4 and 5, which are disposed such that they can perform a measuring movement in the directions of the coordinate axes of a rectangular, cartesian coordinate system.
- Each of the spring parallelogram units has an identical embodiment, but they are each in turn rotated by 90° relative to one another.
- Element 3 provides the positioning operation for the X direction;
- element 4 provides the positioning operation, rotated by 90° relative to that, for the Y direction;
- element 5 furnishes the positioning operation, now rotated by 90° relative to the Y direction, for the Z direction.
- these three positioning operations are carried out until such time as the scanning approach force of the scanner at the tooth flank corresponds to the value F set point.
- the spring parallelogram unit 3 As shown for the spring parallelogram unit 3, they comprise the actual spring parallelogram 3a, the drive unit 7, the travel transducer 8 and an oscillation damper 9.
- the object to be measured is touched by one of the balls 1, which is connected via the rod 2 with the multiple-coordinate force measuring device 6.
- the measuring force generated by the touch is detected by the multiple-coordinate force measuring device 6 in the same direction as that of the motions permitted by the three spring parallelogram units 3, 4 and 5.
- the measuring force components detected in the individual coordinate directions are added up to make the resultant total measuring force and then compared with the measuring force required. Deviations from the latter are compensated for in the X direction by the drive unit 7, in this case by way of example an electric linear motor.
- the compensation in the Y and Z directions is effected by corresponding drive units in the spring parallelogram units 4 and 5.
- the multiple-coordinate force measuring device 6 is connected via the base plate 11 with the spring parallelogram units 3, 4 and 5.
- the deflection of the scanning tip 1 is thus transmitted to the travel transducer 8 for the X direction and detected.
- Corresponding travel transducers for the Y and Z directions are contained in the spring parallelogram units 4 and 5.
- the position of the center of the scanning ball is determined by means of addition using the correct algebraic sign (i.e., + or -).
- the measuring force remains constant because of the regulation, regardless of the parallelogram deflection.
- the base plate 11 is suspended via spring suspensions and adjusting screws 10.
- the apparatus is suspended via springs and adjusting screws 10. This is applicable to an apparatus such as that shown in FIGS. 1a-c, below. If the apparatus is not suspended but is instead disposed horizontally, then natural the means for supporting its weight should be 20 given another direction accordingly.
- FIGS. 1a-c there is a machine frame a, on which a carriage b is displaceable as indicated by the arrows in FIG. 1a.
- This direction of displacement is the X direction.
- a carriage c is displaceable on the carriage b, transversely thereto, as indicated by the arrows in FIG. 1b. This in the Y direction.
- the carriage c supports a frame d.
- a carriage e is vertically displaceable as indicated by the arrows in FIG. 1c.
- a carriage f is displaceable in the carriage e as indicated by the arrows in FIG. 1a.
- the carriage f carries the measuring head g, which is shown in its entirety in FIG. 1.
- the measuring head g is moved into a usable position with respect to one flank of the gear wheel h. Then the carriage b is clamped together with the machine frame a. Further movements in the X, Y and Z directions are executed by the carriages c, e and f, so that only the smallest possible masses will have to be moved.
- the scanner of the measuring head g is brought into contact with one flank of the gear wheel h, which is done by moving the flank toward the scanner by rotating the gear wheel h. Since the scanner is aligned relative to the center of rotation of the gear wheel, one point of the surface (gear flank) that is to be tested and that is known in the computer of the measuring machine is thus ascertained.
- This surface of the tooth flank that is known in the computer is the set-point surface, which is now approached at several points for measurement or testing by the scanner, in order to ascertain whether the actual position of the scanner deviates from the set-point position, and if so, how great the deviation (error) is.
- the invention described herein has the object of keeping the scanning approach [i.e., the force as the scanner approaches what is scanned] of the measuring scanner constant for the various measurement points, that is, keeping it independent of how large the deviation of the actual position of the scanner is from the set-point position stored in the computer.
- FIG. 2 shows the fundamental structure of the multiple-coordinate force measuring device which in the present instance comprises three interleaved force measuring devices 61, 62 and 63.
- the measuring force that is exerted is transmitted via the rods 2 to the housing 64, via the connecting plate 65 to the base plate 66 for the X force measuring device.
- the X force measuring device measuring two bending beams 61, which are connected via the intermediate plate 67 to make a spring parallelogram.
- Measured-value transducers which are sensitive to expansion or strain are disposed on the bending beams 61, and in combination with known intermediate electrical circuits these transducers furnish an electrical signal FX 61b which is proportional to the effective force component FX of the measuring force.
- the force component 62b is measured via the spring parallelogram 62 and the measured-value transducer 62a.
- the bending beams 62 are connected at 68 with the Z force measuring device 63, which here is represented by a crusher gauge, of which only struts rotated relative to one another by 90° are used, and on which the measured-value transducers 63a are disposed, which furnish the signal FZ 63b.
- the Z force measuring device 63 is connected to the base plate 11. The measured-value transducers are connected such that undesired force components and moments cancel each other out.
- FIG. 3 shows a block circuit diagram of the electrical force regulation and the transmission of data to the computer 28.
- the multiple-coordinate force transducer upon scanning the object 26, furnishes the electrical signals FX 61b, FY 62b and FZ 63b.
- the signals 61b, 62b and 63b are sent on the one hand via the analog/digital converters 61c, 62c, 63c to the computer 26 via the lines 12 and evaluated together with the signals of the algebraic-sign logic element 14, which is connected with the computer 26 via the lines 13.
- the computer 26 furnishes the magnitude and direction of the measuring force vector F and thus the location of the scanning point of the measuring ball on the object 26 and the direction of the normals to the surface at the point being scanned.
- the amount of the measuring force vector is ascertained and compared in the comparator 16 with the required measuring force.
- the deviation is multiplicatively linked in the circuits 17, 18 and 19 with the measuring force components 61b, 62b and 63b and delivered to the output amplifiers 20, 21 and 22, which via the lines 23, 24 and 25 supply the drive units in the spring parallelogram units with energy.
- the value F set point at the incremental travel transducers 8 already causes a certain deflection, which corresponds to a previously selected zero value. If this basic deflection were not present, then the scanner would rest on the flank without any force; that is, the value F set point would equal zero, which naturally is not usable in practical terms. A value F set point is therefore selected as a desired contacting force of the scanner on the flank. A predetermined deflection of the incremental travel transducer 8 corresponds to this desired value F set point. Deviations from this deflection, resulting at an individual measuring point because the value F actual is made to match the value F set point with the aid of the drive units 7, represent the measured value (error). If the subject of FIG.
- FIG. 4 is a schematic illustration of the rotator drive having a belt drive 70, a scanner and a spring parallelogram 3 for one coordinate axis.
- the drive motor 73 transmits its rotational movement to the thin belt 70, thereby twisting it and shortening its length.
- the belt In the axial bearing 72 the belt is fixed in the longitudinal direction, so that the shortening can be transmitted via the base plate 11, the force measuring device 6 and the rod 2 to the ball 1. If it should be required, the thin belt can also be diverted over a roller 71, as shown.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3210711A DE3210711C2 (en) | 1982-03-24 | 1982-03-24 | Multi-coordinate probe with adjustable measuring force for scanning multi-dimensional, stationary objects |
Publications (1)
Publication Number | Publication Date |
---|---|
US4621434A true US4621434A (en) | 1986-11-11 |
Family
ID=6159106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US06/639,288 Expired - Fee Related US4621434A (en) | 1982-03-24 | 1984-08-10 | Multiple-coordinate scanner with regulated scanning force |
Country Status (2)
Country | Link |
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US (1) | US4621434A (en) |
DE (1) | DE3210711C2 (en) |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4716656A (en) * | 1986-03-24 | 1988-01-05 | Renishaw Plc | Position - sensing probe |
WO1988006269A1 (en) * | 1987-02-18 | 1988-08-25 | Merrill Engineering Laboratories, Inc. | Single contact point distance measuring for plane determination |
WO1988006710A1 (en) * | 1987-02-26 | 1988-09-07 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
US4807152A (en) * | 1986-03-04 | 1989-02-21 | Rank Taylor Hobson Limited | Metrological apparatus |
US4937948A (en) * | 1987-07-30 | 1990-07-03 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Probe head for a coordinate-measuring instrument |
US5005297A (en) * | 1988-12-22 | 1991-04-09 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Probe head of the switching type |
US5020229A (en) * | 1982-05-13 | 1991-06-04 | Mauser-Werke Obernourf Gmbh | Apparatus and method for measuring screw threads |
US5029398A (en) * | 1989-02-25 | 1991-07-09 | Fag Kugelfischer Georg Schafer (Kgaa) | Multiple-coordinate measurement sensor |
US5048194A (en) * | 1987-12-05 | 1991-09-17 | Renishaw Plc | Position sensing probe |
US5101572A (en) * | 1990-02-16 | 1992-04-07 | Kwong Kam H | Displacement following arrangement and measuring device including such arrangement |
US5119568A (en) * | 1987-01-15 | 1992-06-09 | Fidia S.P.A. | Feeler device, particularly for copying machines |
US5186041A (en) * | 1990-11-28 | 1993-02-16 | International Business Machines Corporation | Microprobe-based CD measurement tool |
US5390423A (en) * | 1991-01-22 | 1995-02-21 | Renishaw Plc | Analogue probe |
US5414940A (en) * | 1993-05-19 | 1995-05-16 | Hughes Aircraft Company | Contact position sensor using constant contact force control system |
US5471406A (en) * | 1992-04-14 | 1995-11-28 | Carl Zeiss-Stiftung | Method of measuring elemental shapes of a workpiece on a coordinate measuring machine |
US5507099A (en) * | 1993-03-20 | 1996-04-16 | Pietzsch Automatisierungstechnik Gmbh | Device for measuring distortion in cylinders |
US5691909A (en) * | 1995-12-29 | 1997-11-25 | Western Atlas | Method of virtual machining to predict the accuracy of part to be made with machine tools |
US5867916A (en) * | 1996-07-31 | 1999-02-09 | Carl-Zeiss-Stiftung | Coordinate measuring machine with collision protection |
US20040093753A1 (en) * | 2002-09-27 | 2004-05-20 | Mcinroy John E. | Precision positioning device |
US20040128847A1 (en) * | 2002-09-18 | 2004-07-08 | Maurice Fracheboud | Touch probing device |
US6955297B2 (en) | 2004-02-12 | 2005-10-18 | Grant Isaac W | Coordinate designation interface |
US20070056177A1 (en) * | 2004-03-05 | 2007-03-15 | Eckhard Enderle | Probe for a coordinate measuring machine |
EP2017570A1 (en) * | 2007-07-17 | 2009-01-21 | Canon Kabushiki Kaisha | Shape measuring device and method with regulated scanning force based on monitoring the position of a resiliently mounted probe with several interferometers. |
WO2010037506A3 (en) * | 2008-10-01 | 2011-02-24 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for measuring a work piece, calibration method and coordinate measuring device that take into consideration the directional-dependent flexibility of the feeler |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60170709A (en) * | 1984-02-16 | 1985-09-04 | Toshiba Corp | Measuring insturment for shape |
GB8409091D0 (en) * | 1984-04-09 | 1984-05-16 | Renishaw Plc | Probe for measuring workpieces |
EP0242710B1 (en) * | 1986-04-17 | 1990-07-25 | Renishaw plc | Contact-sensing probe |
GB8610087D0 (en) * | 1986-04-24 | 1986-05-29 | Renishaw Plc | Probe |
GB8610088D0 (en) * | 1986-04-24 | 1986-05-29 | Renishaw Plc | Probe |
DE3788360T2 (en) * | 1986-09-03 | 1994-03-17 | Renishaw Plc | Signal processing for touch probe. |
DE3725205A1 (en) * | 1987-07-30 | 1989-02-09 | Zeiss Carl Fa | PROBE HEAD FOR COORDINATE MEASURING DEVICES |
DE8909048U1 (en) * | 1989-07-26 | 1989-10-05 | Dornier Gmbh, 7990 Friedrichshafen | Force sensor |
EP0572800A1 (en) * | 1992-05-06 | 1993-12-08 | Baumer Electric Ag | Sensing probe |
DE4308823C2 (en) * | 1993-03-19 | 2002-11-07 | Zeiss Carl | Measuring probe for coordinate measuring machines |
DE4424225A1 (en) * | 1994-07-09 | 1996-01-11 | Zeiss Carl Fa | Probe for coordinate measuring machines |
DE19641720C2 (en) * | 1996-10-10 | 2002-01-24 | Mahr Gmbh | Probe head with electronic guidance |
DE102010016739A1 (en) * | 2010-05-03 | 2011-11-03 | Hexagon Metrology Gmbh | Measuring head for a coordinate measuring machine |
JP5843531B2 (en) | 2010-09-27 | 2016-01-13 | 株式会社ミツトヨ | Coordinate measuring head unit and coordinate measuring machine |
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DE2841548A1 (en) * | 1978-09-23 | 1980-04-03 | Leitz Ernst Gmbh | Assembly measuring test-piece dimensions - uses flexible mechanical sensor with threshold force transducer and photoelectric position transducers |
GB2045437B (en) * | 1979-03-30 | 1984-02-08 | Renishaw Electrical Ltd | Coordinate measuring machine |
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Cited By (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020229A (en) * | 1982-05-13 | 1991-06-04 | Mauser-Werke Obernourf Gmbh | Apparatus and method for measuring screw threads |
US4807152A (en) * | 1986-03-04 | 1989-02-21 | Rank Taylor Hobson Limited | Metrological apparatus |
US4716656A (en) * | 1986-03-24 | 1988-01-05 | Renishaw Plc | Position - sensing probe |
US5119568A (en) * | 1987-01-15 | 1992-06-09 | Fidia S.P.A. | Feeler device, particularly for copying machines |
GB2223321B (en) * | 1987-02-18 | 1991-05-15 | Merrill Eng Lab Inc | Single contact point distance measuring for plane determination |
WO1988006269A1 (en) * | 1987-02-18 | 1988-08-25 | Merrill Engineering Laboratories, Inc. | Single contact point distance measuring for plane determination |
GB2223321A (en) * | 1987-02-18 | 1990-04-04 | Merrill Eng Lab Inc | Single contact point distance measuring for plane determination |
US5154002A (en) * | 1987-02-26 | 1992-10-13 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
WO1988006710A1 (en) * | 1987-02-26 | 1988-09-07 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
US4937948A (en) * | 1987-07-30 | 1990-07-03 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Probe head for a coordinate-measuring instrument |
US5048194A (en) * | 1987-12-05 | 1991-09-17 | Renishaw Plc | Position sensing probe |
US5005297A (en) * | 1988-12-22 | 1991-04-09 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Probe head of the switching type |
US5029398A (en) * | 1989-02-25 | 1991-07-09 | Fag Kugelfischer Georg Schafer (Kgaa) | Multiple-coordinate measurement sensor |
US5101572A (en) * | 1990-02-16 | 1992-04-07 | Kwong Kam H | Displacement following arrangement and measuring device including such arrangement |
US5186041A (en) * | 1990-11-28 | 1993-02-16 | International Business Machines Corporation | Microprobe-based CD measurement tool |
US5390423A (en) * | 1991-01-22 | 1995-02-21 | Renishaw Plc | Analogue probe |
US5471406A (en) * | 1992-04-14 | 1995-11-28 | Carl Zeiss-Stiftung | Method of measuring elemental shapes of a workpiece on a coordinate measuring machine |
US5507099A (en) * | 1993-03-20 | 1996-04-16 | Pietzsch Automatisierungstechnik Gmbh | Device for measuring distortion in cylinders |
US5414940A (en) * | 1993-05-19 | 1995-05-16 | Hughes Aircraft Company | Contact position sensor using constant contact force control system |
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Also Published As
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DE3210711A1 (en) | 1984-02-02 |
DE3210711C2 (en) | 1986-11-13 |
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