US2957619A - Production of high vacua by gettering - Google Patents

Production of high vacua by gettering Download PDF

Info

Publication number
US2957619A
US2957619A US766445A US76644558A US2957619A US 2957619 A US2957619 A US 2957619A US 766445 A US766445 A US 766445A US 76644558 A US76644558 A US 76644558A US 2957619 A US2957619 A US 2957619A
Authority
US
United States
Prior art keywords
getter material
getter
gettering
action
abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US766445A
Inventor
Haine Michael Edward
Bloomer Ronald Noel
Francis Eric William Raymond
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Edison Swan Ltd
Original Assignee
Siemens Edison Swan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Edison Swan Ltd filed Critical Siemens Edison Swan Ltd
Priority to US766445A priority Critical patent/US2957619A/en
Application granted granted Critical
Publication of US2957619A publication Critical patent/US2957619A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels

Definitions

  • a getter is a chemically active material, usually a metal, which combines withgases impinging upon it. It thus removes them from the gas phase, and holds them in chemical combination.
  • the reaction which takes place on the getter surface is follower by diifusion of the unused getter material through the layer of reaction products to the outer surface, so that gettering continues until the whole bulk of the material is used up.
  • An example of such a getter process is barium interacting with oxygen gas.
  • Titanium may also be used as a getter.
  • the diffusion process is very limited, and when a thin surface layer of the titanium has become saturated the gettering action ceases.
  • the titanium can be continuously evaporated onto the gettering surface, so that, when the surface of the getter becomes saturated, it is immediately covered with a fresh layer of titanium which in turn can take up more gas.
  • Adequate evaporation is achieved by heating a quantity of the material to a temperature just above its melting point so that it evaporates, and by continuously replenishing the melt with material from the solid state. This process present difiiculties in the case of titanium, because, in the molten state, it is extremely reactive and it is difficult to find a suitable non-reactive crucible or hearth from which to evaporate it.
  • the object of the present invention is to provide a means of continuously presenting a clean metal surface for the getter reaction to proceed continuously.
  • the surface of the getter material is continuously subjected to erosion whereby the gas saturated outer layer is removed, thus rendering the gettering reaction continuous.
  • the erosion is conveniently effected mechanically e.g. by subjecting the getter material to abrasion, scraping or the like.
  • a boat-shaped sheet of titanium containing a small quantity of coarse carborundum grains is mounted in a glass bulb and incorporated into a vacuum system.
  • the bulb is shaken so that the abrasive grains slide back and forth along the titanium sheet from end to end, a continuous gettering action is obtained.
  • the gettering action ceases after a short time interval.
  • an abrading action may be obtained by rubbing an abrading surface on a block or sheet of the getter material, which may be titanium or any other metal, metal alloy or mixture.
  • grains of an abrasive may be placed inside a hollow drum of the getter material, and the drum rotated.
  • Fig. 1 shows an apparatus for applying the invention to the evacuation of a cathode ray tube
  • Fig. 2 illustrates an alternative manner for effecting the abrasive action of the getter material
  • Fig. 3 is an end view of the abrasive drum employed in the arrangement of Fig. 2,
  • Fig. 4 is a cross-section of the drum as shown in Fig. 2 to an enlarged scale.
  • a cathode ray tube 1 to be evacuated is mounted in a suitable support 2 and is connected by way of its evacuating tubulation 3 and an-intermediate connection 4 to a vacuum pump 5.
  • the intermediate connection 4 and the evacuating tubulation 3 may be removably connected by means of a rubber sleeve 6.
  • the removal of the major portion of the gaseous molecules enclosed in theenvelope of the cathode ray tube 1 is effected by the vacuum pump 5, and the residual portion thereof is removed by means of getter material 6', located in the intermediate connection 4, afterthe cathode ray tube envelope and the intermediate connection have been isolated from the pump by closure of valve 4'.
  • the surface of the getter material is continuously subjected to an abrasive action by means of a metal part 7 having an abrading surface 8 in the nature of file teeth which rests on the surface of the getter '6 and is moved to and fro by means of a magnet 9 located outside the intermediate connection 4.
  • a magnet 9 located outside the intermediate connection 4.
  • the getter material may conveniently be in the form of a sheet or block of titanium or any other reactive metal alloy or mixture which is capable of exercising a gettering action on the residual gas in the enclosed space formed by the envelope of the cathode ray tube 1, and the intermediate connection 4.
  • abrasive device In order to avoid the necessity for movement of the magnet 9 back and forth, an arrangement such as that shown in Figs. 2, 3 and 4 may be adopted.
  • the abrading device is in the form of a conical drum 11 against which blocks 12 of the getter material are adapted to rest, being prevented from movement when the drum 11 is rotated by providing internal projections 13 on the wall of the chamber 10.
  • the drum is mounted in a bearing 14 supported by the inner wall of the closed end of the casing 10 and is provided with diametrically extending armatures 15 of magnetic material.
  • a U-shaped magnet 16 is arranged with its limbs around the external periphery of the chamber 10 and is arranged to be rotated by a belt 17. As the magnet 16 is rotated, the magnetic field from the pole pieces thereof co-operating wtih the armatures 15 effects the rotation of the drum 11 and effects continual abrasion of the surface of the blocks 12 of getter material.
  • Portions 11' of the periphery of the drum are made of foraminated material so as to expose the surface of the getter material to the action of the residual gas contained in the system.
  • apparatus for removing residual gas'frornan enclosed space including a getter material located in said space and exposed to the action of residual gas therein, said getter material being capable of chemical combination with said residual gas, an abrasive device incontact with said gettermaterial; and means located outside said space for continually'moving said device whereby to remove from the surface of said getter material particles thereof. which havechemically combined with said residual gas; thereby exposing the clean surface of said getter material to the action of said gas.
  • Apparatus for avacuating an enclosed space comprising a vacuum pump,,an intermediate connection connected between said pump and said enclosed space, a
  • getter material located in said connection, an abrasive device movably supported in contact with said getter material, and means for causing relative movement betweensaid getter material and said abrasive device.
  • Apparatus for evacuating an enclosed space comprising a vacuum pump, an intermediate connection connected between said pump and said enclosed space, a getter material located in said connection, an abrasive device in contact with and movable relative to said getter material, and means located outside said connection for continually moving said abrasive device.
  • Apparatusfor evacuating an enclosed space comprising a vacuum pump, an intermediate connection between said-pumpand said enclosed space, a chamber communicating with said intermediate'connection, a getter material located in said chamber, a rotatably mounted abrasive device located in said chamber in contact with and movable-relative to said getter material, a magnetic armature carried by said abrasive device, a magnet located outside said chamber and having pole pieces cooperating with said armature, said magnet being rotatably mounted co-axially with said abrasive device, and means for rotating'said' magnet to cause rotation of said abrasive device by'interactionbetween said pole pieces and said armature.

Description

Oct. 25, 1960 M. E. HAINE ETAL PRODUCTION OF HIGH VACUA BY GETTERING Filed Oct. 10. 1958 16 )Vl/CHA'EL RONALD M BL 00/1457? E /c 14 F1? F A' TTQH/VEK ted tems Far 2,957,619 PRODUCTION OF HIGH VACUA BY GETTERING Michael Edward Haine, *Sulhamstead, and Ronald Noel Bloomer and Eric William Raymond Francis, Reading, England, assignors to Siemens Edison Swan Limited, London, England, a'British company Filed Oct. 10, 1958, Ser. No. 766,445 Claims. c1. 230-69 This invention relates to the production of high vacua utilising the cleaning-up action on residual gases of certain materials known as getters. I 7
It is well known that a high vacuum can be produced in an enclosed space by the use of a getter following the removal of the greater part of the contained atmosphere by a pump. A getter is a chemically active material, usually a metal, which combines withgases impinging upon it. It thus removes them from the gas phase, and holds them in chemical combination. In one form of getter, the reaction which takes place on the getter surface is follower by diifusion of the unused getter material through the layer of reaction products to the outer surface, so that gettering continues until the whole bulk of the material is used up. An example of such a getter process is barium interacting with oxygen gas.
Titanium may also be used as a getter. In the case of titanium, the diffusion process is very limited, and when a thin surface layer of the titanium has become saturated the gettering action ceases. To overcome this limitation, the titanium can be continuously evaporated onto the gettering surface, so that, when the surface of the getter becomes saturated, it is immediately covered with a fresh layer of titanium which in turn can take up more gas. Adequate evaporation is achieved by heating a quantity of the material to a temperature just above its melting point so that it evaporates, and by continuously replenishing the melt with material from the solid state. This process present difiiculties in the case of titanium, because, in the molten state, it is extremely reactive and it is difficult to find a suitable non-reactive crucible or hearth from which to evaporate it.
The object of the present invention is to provide a means of continuously presenting a clean metal surface for the getter reaction to proceed continuously.
According to the invention the surface of the getter material is continuously subjected to erosion whereby the gas saturated outer layer is removed, thus rendering the gettering reaction continuous. The erosion is conveniently effected mechanically e.g. by subjecting the getter material to abrasion, scraping or the like.
In one application of the method using titanium as the getter, a boat-shaped sheet of titanium containing a small quantity of coarse carborundum grains is mounted in a glass bulb and incorporated into a vacuum system. When "the bulb is shaken so that the abrasive grains slide back and forth along the titanium sheet from end to end, a continuous gettering action is obtained. When the shaking is stopped, the gettering action ceases after a short time interval.
To utilise the method in practice, an abrading action may be obtained by rubbing an abrading surface on a block or sheet of the getter material, which may be titanium or any other metal, metal alloy or mixture. Alternatively, grains of an abrasive may be placed inside a hollow drum of the getter material, and the drum rotated.
The invention will now be described with reference to the accompanying drawings, in which:
Fig. 1 shows an apparatus for applying the invention to the evacuation of a cathode ray tube,
Fig. 2 illustrates an alternative manner for effecting the abrasive action of the getter material;
Fig. 3 is an end view of the abrasive drum employed in the arrangement of Fig. 2,
Fig. 4 is a cross-section of the drum as shown in Fig. 2 to an enlarged scale.
Referring to the drawings, a cathode ray tube 1 to be evacuated is mounted in a suitable support 2 and is connected by way of its evacuating tubulation 3 and an-intermediate connection 4 to a vacuum pump 5. The intermediate connection 4 and the evacuating tubulation 3 may be removably connected by means of a rubber sleeve 6. The removal of the major portion of the gaseous molecules enclosed in theenvelope of the cathode ray tube 1 is effected by the vacuum pump 5, and the residual portion thereof is removed by means of getter material 6', located in the intermediate connection 4, afterthe cathode ray tube envelope and the intermediate connection have been isolated from the pump by closure of valve 4'.
In order to maintain the effectiveness of the getter material 6, according to the invention, the surface of the getter material is continuously subjected to an abrasive action by means of a metal part 7 having an abrading surface 8 in the nature of file teeth which rests on the surface of the getter '6 and is moved to and fro by means of a magnet 9 located outside the intermediate connection 4. By moving the magnet 9 back and forth, the surface particles of the getter material 6' which have chemically combined with the residual gaseous molecules are continuously removed by the abrasive action of the metal part 7, thereby exposing a clean surface of the getter to the action of the residual gas.
The getter material may conveniently be in the form of a sheet or block of titanium or any other reactive metal alloy or mixture which is capable of exercising a gettering action on the residual gas in the enclosed space formed by the envelope of the cathode ray tube 1, and the intermediate connection 4.
In order to avoid the necessity for movement of the magnet 9 back and forth, an arrangement such as that shown in Figs. 2, 3 and 4 may be adopted. In this arrangement the getter material and the abrasive device are located in a chamber 10 communicating with the intermediate connection 4. The abrading device is in the form of a conical drum 11 against which blocks 12 of the getter material are adapted to rest, being prevented from movement when the drum 11 is rotated by providing internal projections 13 on the wall of the chamber 10. The drum is mounted in a bearing 14 supported by the inner wall of the closed end of the casing 10 and is provided with diametrically extending armatures 15 of magnetic material. A U-shaped magnet 16 is arranged with its limbs around the external periphery of the chamber 10 and is arranged to be rotated by a belt 17. As the magnet 16 is rotated, the magnetic field from the pole pieces thereof co-operating wtih the armatures 15 effects the rotation of the drum 11 and effects continual abrasion of the surface of the blocks 12 of getter material.
Portions 11' of the periphery of the drum are made of foraminated material so as to expose the surface of the getter material to the action of the residual gas contained in the system.
It will be appreciated that, in the interests of economy and long life, the abrasive action should remove only the thin surface layer which has become saturated. Naturally, if more than this is removed, all the fresh surfaces so formed still contribute to the overall pumping action. 7
contact with and movable relativetothe'surface' of getter material on saidsupporting meanswhereby continually to expose a fresh surface of such getter material to the action of said-residual gas.
2. In apparatus for removing residual gas'frornan enclosed space including a getter material located in said space and exposed to the action of residual gas therein, said getter material being capable of chemical combination with said residual gas, an abrasive device incontact with said gettermaterial; and means located outside said space for continually'moving said device whereby to remove from the surface of said getter material particles thereof. which havechemically combined with said residual gas; thereby exposing the clean surface of said getter material to the action of said gas.
3. Apparatus for avacuating an enclosed space comprising a vacuum pump,,an intermediate connection connected between said pump and said enclosed space, a
getter material located in said connection, an abrasive device movably supported in contact with said getter material, and means for causing relative movement betweensaid getter material and said abrasive device.
4. Apparatus for evacuating an enclosed space comprising a vacuum pump, an intermediate connection connected between said pump and said enclosed space, a getter material located in said connection, an abrasive device in contact with and movable relative to said getter material, and means located outside said connection for continually moving said abrasive device.
5. Apparatusfor evacuating an enclosed space comprising a vacuum pump, an intermediate connection between said-pumpand said enclosed space, a chamber communicating with said intermediate'connection, a getter material located in said chamber, a rotatably mounted abrasive device located in said chamber in contact with and movable-relative to said getter material, a magnetic armature carried by said abrasive device, a magnet located outside said chamber and having pole pieces cooperating with said armature, said magnet being rotatably mounted co-axially with said abrasive device, and means for rotating'said' magnet to cause rotation of said abrasive device by'interactionbetween said pole pieces and said armature.
. References Cited in the file of this patent UNIT ED STATES PATENTS 2,636,664 Hertzler' Apr. 28, 1953
US766445A 1958-10-10 1958-10-10 Production of high vacua by gettering Expired - Lifetime US2957619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US766445A US2957619A (en) 1958-10-10 1958-10-10 Production of high vacua by gettering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US766445A US2957619A (en) 1958-10-10 1958-10-10 Production of high vacua by gettering

Publications (1)

Publication Number Publication Date
US2957619A true US2957619A (en) 1960-10-25

Family

ID=25076441

Family Applications (1)

Application Number Title Priority Date Filing Date
US766445A Expired - Lifetime US2957619A (en) 1958-10-10 1958-10-10 Production of high vacua by gettering

Country Status (1)

Country Link
US (1) US2957619A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3050236A (en) * 1960-04-26 1962-08-21 Thomas H Batzer Renewable liquid gettering pump
US3443742A (en) * 1967-06-09 1969-05-13 Itt Pumping device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3050236A (en) * 1960-04-26 1962-08-21 Thomas H Batzer Renewable liquid gettering pump
US3443742A (en) * 1967-06-09 1969-05-13 Itt Pumping device

Similar Documents

Publication Publication Date Title
Rutherford et al. XXI. The nature of the α particle from radioactive substances
GB1396987A (en) Method of producing artificial diamonds
US3780501A (en) Getter pumps
US4487161A (en) Semiconductor device manufacturing unit
US4633812A (en) Vacuum plasma treatment apparatus
US2957619A (en) Production of high vacua by gettering
US4432813A (en) Process for producing extremely low gas and residual contents in metal powders
Taylor et al. Surface alteration of graphite, graphite monofluoride and teflon by interaction with Ar+ and Xe+ beams
US3243363A (en) Method of producing metallic and dielectric deposits by electro-chemical means
JPS56105483A (en) Dry etching device
GB957197A (en) Improvements in or relating to evaporators for evaporating materials used in coating, gettering, ionic pumping of gas and the like
US3395674A (en) Apparatus for vapor coating tumbling substrates
US4305631A (en) High temperature bearing bakeout process
US3277864A (en) Device for vapor-coating selected areas of an internal surface
JPS5587435A (en) Method of producing semiconductor device
US3858551A (en) Apparatus for epitaxial growth from the liquid state
US3017284A (en) Process of casting film employing 2-(2-aminoethylamine) ethanol as a release agent
US2456968A (en) Process for outgassing photocells containing antimony
US2444158A (en) Thermionic device and getter elements therefor
US3486935A (en) Method for the preparation of films containing radioactive materials and mounted on carriers
JP2001192814A (en) WORKING METHOD FOR Mg EVAPORATION MATERIAL
US2029414A (en) Photo-electric tube and the method of making same
US3102633A (en) Getter structure
US3310375A (en) Method of forming a sheet
US3628933A (en) Method of activating lead glass microchannel plates