US2793609A - Means for the deposition of materials by evaporation in a vacuum - Google Patents
Means for the deposition of materials by evaporation in a vacuum Download PDFInfo
- Publication number
- US2793609A US2793609A US405227A US40522754A US2793609A US 2793609 A US2793609 A US 2793609A US 405227 A US405227 A US 405227A US 40522754 A US40522754 A US 40522754A US 2793609 A US2793609 A US 2793609A
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- passage
- container
- entrance
- vapour
- vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/10—Vacuum distillation
Definitions
- This invention relates to the deposition of material as a surface coating on articles by the aid of the production of vapour in a vacuum. It deals particularly with the form of the container in which the material is heated for the production of vapour and from which the vapour is directed towards the surface to be coated.
- bafile and outlet may be placed on or directly above the container and, in the former case, may be part of or be a separate attachment .to the container. It provides a passage which in the part .nearest the container presents by means of the bafiie an iobstructing surface on which any solid or liquid particles shot off from the metal will strike. It also provides guiding surfaces which lead the vapour past the obstruction and which beyond that obstruction direct it towards the surface to be coated.
- the solid or liquid particles which strike the arresting cess localised heating may be applied to the surface or surfaces.
- Figure 1 is a diagrammatic drawing of a crucible provided with the essential features of the improved device
- Figure 2 is a view in section of a long narrow crucible showing the preferred arrangement
- Figure 3 is a view upon an increased scale of part of the arrangement shown in Figure 2.
- a crucible 1 contains a body of molten metal 2 and is surrounded by a heater coil 3 which maintains the liquid at the required temperature.
- the crucible cover 4 comprises portions 5 extending inwardly from the side walls and upwards to the entrance to a central vertical passage 6.
- a horizontal baflle plate 7 is supported above the surface of the metal 2 and below the entrance to the passage 6. This bafile plate completely interrupts the pasice sage of vapour in direct lines, represented by arrows 8, from the liquid surface to the passage.- Any solid or liquid particles leaving the metal surface will strike the baiiie or the portions 5 of the cover extending beyond the edges of the baffle.
- Vapour from the liquid will be deflected around the bafile along the paths 9 extending between the edges of the baffle and the'portions 5 of the cover to en ter the vertical passage and be discharged at the upper end as indicated by the arrow 10.
- the surface to be coated will be positioned opposite the exit from the ver tical passage 6 and the complete device will be maintained in a vacuum in known manner. Any solid or liquid particles striking the underside of the bathe plate 7 or of the portions 5' of the cover will be retained there or thrown back or evaporated. In any event they will not pass outwards from the vertical passage 6.
- the crucible 11 is a long narrow member arranged to discharge upward to cover a strip of the surface of a body which is placed above it and may be in motion across it.
- the crucible is provided with an external heating coil 18.
- Resting upon the upper part of the crucible is a titting 12 having an upward extension 13 through which extends the vertical passage 16.
- the fitting 12 has an external horizontal flange 14 by which it rests on the upper edge of the crucible 11 throughout the periphery thereof. Below this flange a downward extension 15 in line with the upper extension 13 fits inside the walls of the crucible.
- a bar 17 which is of about the same width or slightly wider than the width of the passage and has a length equal to the other transverse dimension of the passage.
- the walls of the passage at the lower end diverge on each side of this bar to meet the inside of the crucible.
- the bar 17 forms a barrier to the straight line movement of solid or liquid particles arising from the material in the crucible.
- the lateral widening of the passage at the lower end provides spaces at each side between the bar 17 and the mouth of the passage through which the vapour can stream.
- the bar 17 thus forms a complete bafile to solid particles projected upward from the surface of the material in the crucible but it does not unduly obstruct the flow of the vapour.
- a second heater coil 19 enclosing the upper extension 13 about the passage 16 provides localised heating to prevent condensation of the vapour on the passage walls.
- the discharge is effected through straight vertical passages in alignment with the crucible, the escape of solid particles being prevented by the introduction of a separate bafile at the entrance to the passage.
- Apparatus for the deposition of vaporised material upon a surface in a vacuum comprising a container for the material to be vaporised, an outlet passage for directing the vapour from the container to the surface to be coated, the passage having an elongated cross-section, and a cylindrical rod at the entrance to the passage having a diameter at least equal to the smallest transverse dimension of the passage and extending completely across the longest transverse dimension of the passage, the rod completely interrupting all straight line paths through the passage from the material in the container and providing paths for the flow of vapour between the rod and the entrance to the passage.
- Apparatus for the deposition of vaporized material upon a surface in a vacuum comprising a container for the material to be vaporized, an outlet passage for the vapour from the container, said outlet passage having a transverse sectional area less than that of the container, an entrance to said passage with walls converging from Patented May 28, 1957 the inner walls of the container to the passage, and a baflle positioned in the said entrance to interrupt all straight line paths through the passage from the material in the container and to provide paths for the flow of vapour between the baflie and the walls of the entrance.
- Apparatus for the deposition of vaporized material upon a surface in a vacuum comprising a container for the material to be vaporized, an outlet passage for directing the vapour from thecoutainer to the surface to be coated, the passage having a smaller cross-section than the container, an entrance to the passage converging from the container walls to the passage walls, and Within the entrance 2.
- bafile plate disposed transversely to the axis of the passage to interrupt all straight line paths through the 4 passage from the material in the container and to provide paths for the flow of vapour between the baffle plate and the Walls of the entrance.
- Apparatus as claimed in claim 2 for the deposition of vaporised material upon a surface in a vacuum, in which there is provided" means for heating the walls of the passage to prevent the condensation of vapour thereon.
Description
May 28, 1957 TZU EN N ET AL 2,793,609
MEANS FOR THE DEPOSITION OF MATERIALS. BY EVAPORATION IN A VACUUM Filed Jan. 20, 1954 Inventor-r 7224/ 0 She/v 8 Jab/2 734/7 #9 982 1 Q Attorneyf United States Patent MEANS FOR THE DEPOSITION OF MATERIALS BY EVAPORATION IN A VACUUM Tzu En Shen, Ealing, London, and John Philip Huggett,
Forest Hill, London, England, assignors to British Dielectric Research Limited, London, England, a British company Application January 20, 1954, Serial No. 405,227
Claims priority, application Great Britain January 26, 1953 4 Claims. (Cl. 118-49) This invention relates to the deposition of material as a surface coating on articles by the aid of the production of vapour in a vacuum. It deals particularly with the form of the container in which the material is heated for the production of vapour and from which the vapour is directed towards the surface to be coated.
We have found that in working with the evaporation of certain materials, for instance the metals cadmium, zinc and magnesium, solid or liquid particles may be thrown off from the surface of the material in the container in the course of its melting and evaporation. These particles strike the surface to be coated and impair the regularity of the deposit thereon and may injure the surface itself. In accordance with the invention this defeet is overcome by inserting in the region between the material in the container and the entrance to an outlet passage a bafile which combines with the entrance to form a guide providing for the free flow of vapour be- ;tween the baffle and the entrance into the passage. The bafile cuts oflf the straight line paths between the surface .of the material in the container and the surface to be coated, thereby arresting solid or liquid particles thrown .off from the surface of the material. The outlet directs the vapour towards the surface to be coated.
This structural arrangement of bafile and outlet may be placed on or directly above the container and, in the former case, may be part of or be a separate attachment .to the container. It provides a passage which in the part .nearest the container presents by means of the bafiie an iobstructing surface on which any solid or liquid particles shot off from the metal will strike. It also provides guiding surfaces which lead the vapour past the obstruction and which beyond that obstruction direct it towards the surface to be coated.
The solid or liquid particles which strike the arresting cess localised heating may be applied to the surface or surfaces.
The invention is further described hereinafter with reference by way of example to the accompanying illustrations wherein:
Figure 1 is a diagrammatic drawing of a crucible provided with the essential features of the improved device;
Figure 2 is a view in section of a long narrow crucible showing the preferred arrangement, and
Figure 3 is a view upon an increased scale of part of the arrangement shown in Figure 2.
Referring to the arrangement shown in Figure 1 a crucible 1 contains a body of molten metal 2 and is surrounded by a heater coil 3 which maintains the liquid at the required temperature. The crucible cover 4 comprises portions 5 extending inwardly from the side walls and upwards to the entrance to a central vertical passage 6. A horizontal baflle plate 7 is supported above the surface of the metal 2 and below the entrance to the passage 6. This bafile plate completely interrupts the pasice sage of vapour in direct lines, represented by arrows 8, from the liquid surface to the passage.- Any solid or liquid particles leaving the metal surface will strike the baiiie or the portions 5 of the cover extending beyond the edges of the baffle. Vapour from the liquid will be deflected around the bafile along the paths 9 extending between the edges of the baffle and the'portions 5 of the cover to en ter the vertical passage and be discharged at the upper end as indicated by the arrow 10.- The surface to be coated will be positioned opposite the exit from the ver tical passage 6 and the complete device will be maintained in a vacuum in known manner. Any solid or liquid particles striking the underside of the bathe plate 7 or of the portions 5' of the cover will be retained there or thrown back or evaporated. In any event they will not pass outwards from the vertical passage 6.
In the preferred form of construction shown in Figures 2 and 3 the crucible 11 is a long narrow member arranged to discharge upward to cover a strip of the surface of a body which is placed above it and may be in motion across it. The crucible is provided with an external heating coil 18. Resting upon the upper part of the crucible is a titting 12 having an upward extension 13 through which extends the vertical passage 16. The fitting 12 has an external horizontal flange 14 by which it rests on the upper edge of the crucible 11 throughout the periphery thereof. Below this flange a downward extension 15 in line with the upper extension 13 fits inside the walls of the crucible. Below the lower end of the passage 16 which runs through the two extensions 13 and 15 there is arranged a bar 17 which is of about the same width or slightly wider than the width of the passage and has a length equal to the other transverse dimension of the passage. The walls of the passage at the lower end diverge on each side of this bar to meet the inside of the crucible. The bar 17 forms a barrier to the straight line movement of solid or liquid particles arising from the material in the crucible. The lateral widening of the passage at the lower end provides spaces at each side between the bar 17 and the mouth of the passage through which the vapour can stream. The bar 17 thus forms a complete bafile to solid particles projected upward from the surface of the material in the crucible but it does not unduly obstruct the flow of the vapour. A second heater coil 19 enclosing the upper extension 13 about the passage 16 provides localised heating to prevent condensation of the vapour on the passage walls.
In the arrangements which have been described by way of example the discharge is effected through straight vertical passages in alignment with the crucible, the escape of solid particles being prevented by the introduction of a separate bafile at the entrance to the passage.
What we claim as our invention is:
1. Apparatus for the deposition of vaporised material upon a surface in a vacuum, comprising a container for the material to be vaporised, an outlet passage for directing the vapour from the container to the surface to be coated, the passage having an elongated cross-section, and a cylindrical rod at the entrance to the passage having a diameter at least equal to the smallest transverse dimension of the passage and extending completely across the longest transverse dimension of the passage, the rod completely interrupting all straight line paths through the passage from the material in the container and providing paths for the flow of vapour between the rod and the entrance to the passage.
2. Apparatus for the deposition of vaporized material upon a surface in a vacuum, comprising a container for the material to be vaporized, an outlet passage for the vapour from the container, said outlet passage having a transverse sectional area less than that of the container, an entrance to said passage with walls converging from Patented May 28, 1957 the inner walls of the container to the passage, and a baflle positioned in the said entrance to interrupt all straight line paths through the passage from the material in the container and to provide paths for the flow of vapour between the baflie and the walls of the entrance.
3. Apparatus for the deposition of vaporized material upon a surface in a vacuum, comprising a container for the material to be vaporized, an outlet passage for directing the vapour from thecoutainer to the surface to be coated, the passage having a smaller cross-section than the container, an entrance to the passage converging from the container walls to the passage walls, and Within the entrance 2. bafile plate disposed transversely to the axis of the passage to interrupt all straight line paths through the 4 passage from the material in the container and to provide paths for the flow of vapour between the baffle plate and the Walls of the entrance.
4. Apparatus as claimed in claim 2, for the deposition of vaporised material upon a surface in a vacuum, in which there is provided" means for heating the walls of the passage to prevent the condensation of vapour thereon.
References Cited in the file of this patent UNITED STATES PATENTS 2,100,045 Alexander Nov. 23, 1937 2,416,211 Osterberg et a1. Feb. 18, 1947 2,439,983 Morgan et al. Apr. 20, 1948
Claims (1)
1. APPARATUS FOR THE DEPOSITION OF VAPORISED MATERIAL UPON A SURFACE IN A VACUUM, COMPRISING A CONTAINER FOR THE MATERIAL TO BE VAPORISED, AN OUTLET PASSAGE FOR DIRECTING THE VAPOR FROM THE CONTAINER TO THE SURFACE TO BE COATED, THE PASSAGE HAVING AN ELONGATED CROSS-SECTION, AND A CYLINDRICAL ROD AT THE ENTRANCE TO THE PASSAGE HAVING A DIAMETER AT LEAST EQUAL TO THE SMALLEST TRANSVERSE DIMENSION OF THE PASSAGE AND EXTENDING COMPLETELY ACROSS THE LONGEST TRANSVERSE DIMENSION OF THE PASSAGE, THE ROD COMPLETELY INTERRUPTING ALL STRAIGHT LINE PATHS THROUGH THE PASSAGE FROM THE MATERIAL IN THE CONTAINER AND PROVIDING PATHS FOR THE FLOW OF VAPOR BETWEEN THE ROD AND THE ENTRANCE TO THE PASSAGE.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2793609X | 1953-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US2793609A true US2793609A (en) | 1957-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US405227A Expired - Lifetime US2793609A (en) | 1953-01-26 | 1954-01-20 | Means for the deposition of materials by evaporation in a vacuum |
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|---|---|
| US (1) | US2793609A (en) |
Cited By (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2887984A (en) * | 1954-06-24 | 1959-05-26 | Ohio Commw Eng Co | Apparatus for gas plating continuous length of metal strip |
| US2902574A (en) * | 1958-02-03 | 1959-09-01 | Hughes Aircraft Co | Source for vapor deposition |
| US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
| US3210525A (en) * | 1963-12-24 | 1965-10-05 | Liben William | Vacuum evaporation crucible |
| US3253331A (en) * | 1962-12-06 | 1966-05-31 | Westinghouse Electric Corp | Glass-metallizing technique |
| US3271561A (en) * | 1964-03-02 | 1966-09-06 | Martin Marietta Corp | Apparatus for thermally evaporating various materials in vacuums for producing thin films |
| US3281517A (en) * | 1963-11-19 | 1966-10-25 | Melpar Inc | Vacuum furnace |
| US3325628A (en) * | 1966-02-16 | 1967-06-13 | Union Carbide Corp | Vapor generator |
| US3373260A (en) * | 1964-04-30 | 1968-03-12 | Poudres Metalliques Alliages Speciaux Ugine Carbone | Vaporization of metals and metalloids |
| US3446936A (en) * | 1966-01-03 | 1969-05-27 | Sperry Rand Corp | Evaporant source |
| US3466424A (en) * | 1967-08-31 | 1969-09-09 | Nasa | Evaporant source for vapor deposition |
| US3598384A (en) * | 1968-09-13 | 1971-08-10 | Getters Spa | Metal vapor generators |
| US3627569A (en) * | 1968-12-27 | 1971-12-14 | Bell Telephone Labor Inc | Deposition of thin films with controlled thickness and planar area profile |
| US3632439A (en) * | 1969-04-25 | 1972-01-04 | Westinghouse Electric Corp | Method of forming thin insulating films particularly for piezoelectric transducer |
| US3655429A (en) * | 1969-04-16 | 1972-04-11 | Westinghouse Electric Corp | Method of forming thin insulating films particularly for piezoelectric transducers |
| US3678888A (en) * | 1969-02-28 | 1972-07-25 | British Iron Steel Research | Material depositing apparatus |
| US3971334A (en) * | 1975-03-04 | 1976-07-27 | Xerox Corporation | Coating device |
| US4146774A (en) * | 1975-11-14 | 1979-03-27 | Hughes Aircraft Company | Planar reactive evaporation apparatus for the deposition of compound semiconducting films |
| US4217856A (en) * | 1977-07-08 | 1980-08-19 | Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten | Vacuum evaporation apparatus |
| US4552092A (en) * | 1984-09-19 | 1985-11-12 | Mitsubishi Jukogyo Kabushiki Kaisha | Vacuum vapor deposition system |
| US4648347A (en) * | 1984-05-30 | 1987-03-10 | Leybold-Heraeus Gmbh | Vacuum depositing apparatus |
| US4880960A (en) * | 1987-03-06 | 1989-11-14 | Centre National D'etudes Spatiales | Continuous vacuum evaporation device for metal |
| US5032421A (en) * | 1990-08-21 | 1991-07-16 | Amp Incorporated | Metal coating method |
| US5034604A (en) * | 1989-08-29 | 1991-07-23 | Board Of Regents, The University Of Texas System | Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction |
| US5080870A (en) * | 1988-09-08 | 1992-01-14 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5156815A (en) * | 1988-09-08 | 1992-10-20 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5350453A (en) * | 1990-03-02 | 1994-09-27 | Hoechst Aktiengesellschaft | Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate |
| US5496517A (en) * | 1989-12-22 | 1996-03-05 | Beckman Instruments, Inc. | Laboratory workstation using thermal vaporization control |
| EP0735157A2 (en) * | 1995-03-28 | 1996-10-02 | Nisshin Steel Co., Ltd. | Formation of magnesium vapor with high evaporation speed |
| US6202591B1 (en) * | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
| US20040035366A1 (en) * | 2002-07-23 | 2004-02-26 | Samsung Nec Mobile Display Co., Ltd. | Heating crucible and deposition apparatus using the same |
| EP1466030A1 (en) * | 2001-12-18 | 2004-10-13 | Advanced Technology Materials, Inc. | Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| US20050000448A1 (en) * | 2003-07-04 | 2005-01-06 | Verreyken Guido | Vapor deposition apparatus |
| EP1496134A1 (en) * | 2003-07-04 | 2005-01-12 | Agfa-Gevaert | Vapor deposition apparatus. |
| US20050034672A1 (en) * | 2002-03-19 | 2005-02-17 | Jae-Gyoung Lee | Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire |
| US20050103273A1 (en) * | 2003-09-18 | 2005-05-19 | Fuji Photo Film Co., Ltd. | Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same |
| US20050211172A1 (en) * | 2002-03-08 | 2005-09-29 | Freeman Dennis R | Elongated thermal physical vapor deposition source with plural apertures |
| US20060054089A1 (en) * | 2002-07-19 | 2006-03-16 | Lg Electronics Inc. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
| US20100189929A1 (en) * | 2009-01-28 | 2010-07-29 | Neal James W | Coating device and deposition apparatus |
| US20100285218A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
| US20100282167A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
| DE102011122591A1 (en) * | 2011-12-30 | 2013-07-04 | Dr. Eberl Mbe-Komponenten Gmbh | Device for evaporating a vaporized product |
| US20160258051A1 (en) * | 2014-07-22 | 2016-09-08 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Heating device for evaporation of oled material |
| US20210238734A1 (en) * | 2018-06-15 | 2021-08-05 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2100045A (en) * | 1935-10-12 | 1937-11-23 | Alexander Paul | Deposition of metallic films from metal vaporized in vacuo |
| US2416211A (en) * | 1943-09-15 | 1947-02-18 | American Optical Corp | Apparatus for coating articles |
| US2439983A (en) * | 1944-01-15 | 1948-04-20 | Libbey Owens Ford Glass Co | Means for thermally evaporating various materials in vacuums for coating purposes |
-
1954
- 1954-01-20 US US405227A patent/US2793609A/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2100045A (en) * | 1935-10-12 | 1937-11-23 | Alexander Paul | Deposition of metallic films from metal vaporized in vacuo |
| US2416211A (en) * | 1943-09-15 | 1947-02-18 | American Optical Corp | Apparatus for coating articles |
| US2439983A (en) * | 1944-01-15 | 1948-04-20 | Libbey Owens Ford Glass Co | Means for thermally evaporating various materials in vacuums for coating purposes |
Cited By (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2887984A (en) * | 1954-06-24 | 1959-05-26 | Ohio Commw Eng Co | Apparatus for gas plating continuous length of metal strip |
| US2902574A (en) * | 1958-02-03 | 1959-09-01 | Hughes Aircraft Co | Source for vapor deposition |
| US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
| US3253331A (en) * | 1962-12-06 | 1966-05-31 | Westinghouse Electric Corp | Glass-metallizing technique |
| US3281517A (en) * | 1963-11-19 | 1966-10-25 | Melpar Inc | Vacuum furnace |
| US3210525A (en) * | 1963-12-24 | 1965-10-05 | Liben William | Vacuum evaporation crucible |
| US3271561A (en) * | 1964-03-02 | 1966-09-06 | Martin Marietta Corp | Apparatus for thermally evaporating various materials in vacuums for producing thin films |
| US3373260A (en) * | 1964-04-30 | 1968-03-12 | Poudres Metalliques Alliages Speciaux Ugine Carbone | Vaporization of metals and metalloids |
| US3446936A (en) * | 1966-01-03 | 1969-05-27 | Sperry Rand Corp | Evaporant source |
| US3325628A (en) * | 1966-02-16 | 1967-06-13 | Union Carbide Corp | Vapor generator |
| US3466424A (en) * | 1967-08-31 | 1969-09-09 | Nasa | Evaporant source for vapor deposition |
| US3598384A (en) * | 1968-09-13 | 1971-08-10 | Getters Spa | Metal vapor generators |
| US3627569A (en) * | 1968-12-27 | 1971-12-14 | Bell Telephone Labor Inc | Deposition of thin films with controlled thickness and planar area profile |
| US3678888A (en) * | 1969-02-28 | 1972-07-25 | British Iron Steel Research | Material depositing apparatus |
| US3655429A (en) * | 1969-04-16 | 1972-04-11 | Westinghouse Electric Corp | Method of forming thin insulating films particularly for piezoelectric transducers |
| US3632439A (en) * | 1969-04-25 | 1972-01-04 | Westinghouse Electric Corp | Method of forming thin insulating films particularly for piezoelectric transducer |
| US3971334A (en) * | 1975-03-04 | 1976-07-27 | Xerox Corporation | Coating device |
| US4146774A (en) * | 1975-11-14 | 1979-03-27 | Hughes Aircraft Company | Planar reactive evaporation apparatus for the deposition of compound semiconducting films |
| US4217856A (en) * | 1977-07-08 | 1980-08-19 | Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten | Vacuum evaporation apparatus |
| US4648347A (en) * | 1984-05-30 | 1987-03-10 | Leybold-Heraeus Gmbh | Vacuum depositing apparatus |
| US4552092A (en) * | 1984-09-19 | 1985-11-12 | Mitsubishi Jukogyo Kabushiki Kaisha | Vacuum vapor deposition system |
| US4880960A (en) * | 1987-03-06 | 1989-11-14 | Centre National D'etudes Spatiales | Continuous vacuum evaporation device for metal |
| US5156815A (en) * | 1988-09-08 | 1992-10-20 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5080870A (en) * | 1988-09-08 | 1992-01-14 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
| US5034604A (en) * | 1989-08-29 | 1991-07-23 | Board Of Regents, The University Of Texas System | Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction |
| US5552580A (en) * | 1989-12-22 | 1996-09-03 | Beckman Instruments, Inc. | Heated cover device |
| US5496517A (en) * | 1989-12-22 | 1996-03-05 | Beckman Instruments, Inc. | Laboratory workstation using thermal vaporization control |
| US5350453A (en) * | 1990-03-02 | 1994-09-27 | Hoechst Aktiengesellschaft | Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate |
| US5032421A (en) * | 1990-08-21 | 1991-07-16 | Amp Incorporated | Metal coating method |
| EP0735157A2 (en) * | 1995-03-28 | 1996-10-02 | Nisshin Steel Co., Ltd. | Formation of magnesium vapor with high evaporation speed |
| US5705226A (en) * | 1995-03-28 | 1998-01-06 | Nisshin Steel Co., Ltd. | Formation of magnesium vapor with high evaporation speed |
| CN1070934C (en) * | 1995-03-28 | 2001-09-12 | 日新制钢株式会社 | Evaporative method for raising evaporating speed of magnesium |
| EP0735157B1 (en) * | 1995-03-28 | 2001-10-04 | Nisshin Steel Co., Ltd. | Formation of magnesium vapor with high evaporation speed |
| US6202591B1 (en) * | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
| US6367414B2 (en) | 1998-11-12 | 2002-04-09 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
| EP1466030A1 (en) * | 2001-12-18 | 2004-10-13 | Advanced Technology Materials, Inc. | Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| EP1466030A4 (en) * | 2001-12-18 | 2008-07-23 | Advanced Tech Materials | Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| US20050211172A1 (en) * | 2002-03-08 | 2005-09-29 | Freeman Dennis R | Elongated thermal physical vapor deposition source with plural apertures |
| US20050034672A1 (en) * | 2002-03-19 | 2005-02-17 | Jae-Gyoung Lee | Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire |
| US7815737B2 (en) * | 2002-07-19 | 2010-10-19 | Lg Display Co., Ltd. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| US20060054089A1 (en) * | 2002-07-19 | 2006-03-16 | Lg Electronics Inc. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| US20060070576A1 (en) * | 2002-07-19 | 2006-04-06 | Lg Electronics Inc. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| US20040035366A1 (en) * | 2002-07-23 | 2004-02-26 | Samsung Nec Mobile Display Co., Ltd. | Heating crucible and deposition apparatus using the same |
| US8025733B2 (en) * | 2002-07-23 | 2011-09-27 | Samsung Mobile Display Co., Ltd. | Heating crucible and deposition apparatus using the same |
| US20050000448A1 (en) * | 2003-07-04 | 2005-01-06 | Verreyken Guido | Vapor deposition apparatus |
| EP1496134A1 (en) * | 2003-07-04 | 2005-01-12 | Agfa-Gevaert | Vapor deposition apparatus. |
| US7070658B2 (en) * | 2003-07-04 | 2006-07-04 | Agfa-Gevaert | Vapor deposition apparatus |
| US20060162663A1 (en) * | 2003-07-04 | 2006-07-27 | Verreyken Guido | Vapor deposition apparatus |
| US20050103273A1 (en) * | 2003-09-18 | 2005-05-19 | Fuji Photo Film Co., Ltd. | Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same |
| US20100285218A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
| US20100282167A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
| US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
| US20100189929A1 (en) * | 2009-01-28 | 2010-07-29 | Neal James W | Coating device and deposition apparatus |
| DE102011122591A1 (en) * | 2011-12-30 | 2013-07-04 | Dr. Eberl Mbe-Komponenten Gmbh | Device for evaporating a vaporized product |
| US20160258051A1 (en) * | 2014-07-22 | 2016-09-08 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Heating device for evaporation of oled material |
| US9790588B2 (en) * | 2014-07-22 | 2017-10-17 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Heating device for evaporation of OLED material |
| US20210238734A1 (en) * | 2018-06-15 | 2021-08-05 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
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