US20190312232A1 - Light emitting device and manufacturing method thereof - Google Patents

Light emitting device and manufacturing method thereof Download PDF

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Publication number
US20190312232A1
US20190312232A1 US16/442,859 US201916442859A US2019312232A1 US 20190312232 A1 US20190312232 A1 US 20190312232A1 US 201916442859 A US201916442859 A US 201916442859A US 2019312232 A1 US2019312232 A1 US 2019312232A1
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United States
Prior art keywords
film
light emitting
layer
substrate
over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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US16/442,859
Inventor
Shunpei Yamazaki
Toru Takayama
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to JP2002-169819 priority Critical
Priority to JP2002169819 priority
Priority to JP2002-233691 priority
Priority to JP2002233691 priority
Priority to US10/636,545 priority patent/US7230271B2/en
Priority to US11/802,961 priority patent/US8362487B2/en
Priority to US13/315,312 priority patent/US20120080669A1/en
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to US16/442,859 priority patent/US20190312232A1/en
Publication of US20190312232A1 publication Critical patent/US20190312232A1/en
Pending legal-status Critical Current

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