US20160049478A1 - Semiconductor device and method for fabricating the same - Google Patents
Semiconductor device and method for fabricating the same Download PDFInfo
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- US20160049478A1 US20160049478A1 US14/678,331 US201514678331A US2016049478A1 US 20160049478 A1 US20160049478 A1 US 20160049478A1 US 201514678331 A US201514678331 A US 201514678331A US 2016049478 A1 US2016049478 A1 US 2016049478A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 57
- 238000009413 insulation Methods 0.000 claims abstract description 66
- 238000005121 nitriding Methods 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 34
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 96
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 35
- 229910021529 ammonia Inorganic materials 0.000 claims description 32
- 150000004767 nitrides Chemical class 0.000 claims description 15
- 239000010410 layer Substances 0.000 description 352
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- 238000004519 manufacturing process Methods 0.000 description 19
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- 238000005530 etching Methods 0.000 description 14
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- 239000011229 interlayer Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
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- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
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- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- XWCMFHPRATWWFO-UHFFFAOYSA-N [O-2].[Ta+5].[Sc+3].[O-2].[O-2].[O-2] Chemical compound [O-2].[Ta+5].[Sc+3].[O-2].[O-2].[O-2] XWCMFHPRATWWFO-UHFFFAOYSA-N 0.000 description 1
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- 229910052796 boron Inorganic materials 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
- VTGARNNDLOTBET-UHFFFAOYSA-N gallium antimonide Chemical compound [Sb]#[Ga] VTGARNNDLOTBET-UHFFFAOYSA-N 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
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- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
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- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
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- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- KJXBRHIPHIVJCS-UHFFFAOYSA-N oxo(oxoalumanyloxy)lanthanum Chemical compound O=[Al]O[La]=O KJXBRHIPHIVJCS-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- CZXRMHUWVGPWRM-UHFFFAOYSA-N strontium;barium(2+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[Ti+4].[Sr+2].[Ba+2] CZXRMHUWVGPWRM-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000003936 working memory Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823821—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Definitions
- a thickness of a gate conductive layer may be varied.
- a method for adjusting the threshold voltage while maintaining the thickness of the gate conductive layer is required.
- a method for fabricating a semiconductor device including forming a gate insulation layer on a substrate including a first region and a second region, forming a first gate conductive layer and a capping layer on the first region and the second region and then heat-treating the substrate, removing the capping layer from the first region and the second region, forming a second gate conductive layer on the first region and the second region, nitriding the second gate conductive layer, and forming a third gate conductive layer on the second region.
- the step of removing the capping layer from the first region and the second region further comprises removing the first gate conductive layer from the first region and the second region.
- the forming of the third gate conductive layer on the second region comprises: forming the third gate conductive layer on the second gate conductive layer of the first region and the second region; forming a mask pattern on the second region; and removing the second gate conductive layer from the first region using the mask pattern.
- the second gate conductive layer comprises a TaN layer.
- a method for fabricating a semiconductor device including forming a gate insulation layer on a substrate including a first region and a second region, forming a first gate conductive layer and a capping layer on the first region and the second region and then heat-treating the substrate, removing the first gate conductive layer and the capping layer from the first region and the second region, forming a second gate conductive layer on the first region and the second region, forming a third gate conductive layer on the second region, and nitriding the second gate conductive layer of the first region.
- the nitride gas includes ammonia (NH 3 ).
- a semiconductor device including an interlayer insulation layer formed on a substrate and including a first trench and a second trench, a first gate insulation layer formed along lateral surfaces and a bottom surface of the first trench and a second gate insulation layer formed along lateral surfaces and a bottom surface of the second trench, a first TaN layer formed on the first gate insulation layer and nitrided, a second TaN layer formed on the second gate insulation layer and nitrided, and a TiN layer formed on the second TaN layer and nitrided.
- the semiconductor device further comprises: a first TiN layer formed between the first gate insulation layer and the first TaN layer; and a second TiN layer formed between the second gate insulation layer and the second TaN layer.
- FIGS. 1 to 7 illustrate a method of fabricating a semiconductor device according to an embodiment of the present inventive concept
- FIG. 19 is a schematic block diagram illustrating a memory card including semiconductor devices fabricated according to some embodiments of the present inventive concept
- Each of the first dummy gate dielectric layer 212 and the second dummy gate dielectric layer 312 may include, for example, one of silicon oxide (SiO 2 ), silicon oxynitride (SiON) and a combination thereof.
- the first dummy gate dielectric layer 212 and the second dummy gate dielectric layer 312 may be formed by, for example, thermal treatment, chemical treatment, atomic layer deposition (ALD) or chemical vapor deposition (CVD).
- the first dummy gate dielectric layer 212 and the second dummy gate dielectric layer 312 may include, for example, silicon (Si), specifically, poly Si, amorphous silicon (a-Si) and a combination thereof.
- the first dummy gate 217 and the second dummy gate 317 may both not be doped with impurity or may be doped with similar impurities. Alternatively, one of the first dummy gate 217 and the second dummy gate 317 may be doped and the other may not be doped.
- the interlayer insulation layer 110 is planarized to expose top surfaces of the first dummy gate 217 and the second dummy gate 317 .
- the planarizing may be performed by chemical mechanical polishing (CMP).
- the interlayer insulation layer 110 including the first trench 230 and the second trench 330 is formed on the substrate 100 .
- the first trench 230 is formed on the first region I and the second trench 330 is formed on the second region II.
- the first trench 230 is formed on the NMOS region and the second trench 330 is formed on the PMOS region.
- the first dummy gate 217 , the second dummy gate 317 , the first dummy gate dielectric layer 212 and the second dummy gate dielectric layer 312 may be removed by wet etching or dry etching.
- the first interface layer 215 and the second interface layer 315 may include silicon oxide.
- the first interface layer 215 and the second interface layer 315 may be formed using, for example, chemical oxidation, UV oxidation, or dual plasma oxidation.
- the first gate conductive layers 222 and 322 formed on the high-k gate insulation layers 210 and 310 and the capping layers 224 and 324 are removed, thereby exposing the high-k gate insulation layers 210 and 310 .
- a second gate conductive layer 220 is formed along lateral surfaces and a bottom surface of the first trench 230 and a second gate conductive layer 320 is formed along lateral surfaces and a bottom surface of the second trench 330 .
- the second gate conductive layers 220 and 320 may be brought into direct contact with the high-k gate insulation layers 210 and 310 .
- the mask layer 132 formed on the third gate conductive layer 226 is removed from the first region I by the etching process 145 , thereby forming the mask pattern 130 .
- the mask pattern 130 and the photoresist pattern 140 formed on the third gate conductive layer 326 may have a stacked structure to be used as an etch mask in a subsequent process.
- the second gate conductive layer 220 is removed using the mask pattern 130 as a mask to expose the high-k gate insulation layer 210 in the first region I.
- the second gate conductive layer 220 may be removed by wet etching using an etching solution including, for example, hydrogen peroxide (H 2 O 2 ).
- H 2 O 2 hydrogen peroxide
- the photoresist pattern 140 and the mask pattern 130 formed on the second region II are removed to expose the second gate conductive layer 320 in the second region II.
- the mask layer 132 filling the first trench 230 is removed using the photoresist pattern 140 as a mask in an etching process 145 .
- a mask pattern 130 is formed on the second gate conductive layer 320 .
- the mask pattern 130 fills the second trench 330 .
- the removing of the mask layer 132 from the first region I may further include removing the third gate conductive layer 226 of the first region I.
- the second gate conductive layer 220 is exposed in the first region I.
- the second gate conductive layer 320 of the second region II may be covered by the mask pattern 130 and the photoresist pattern 140 .
- the semiconductor device may further include a first TiN layer formed between the first gate insulation layer and the first TaN layer and a second TiN layer formed between the second gate insulation layer and the second TaN layer.
- the TiN layer may be formed on the second TaN layer while not being formed on the first TaN layer.
- the nitriding of the first TaN layer, the second TaN layer or the TiN layer may be performed using a gas including ammonia (NH 3 ) or plasma-state ammonia (NH 3 ).
- FIGS. 15 to 18 illustrate a method of fabricating a semiconductor device according to still another embodiment of the present inventive concept. Specifically, FIG. 18 illustrates cross-sectional views taken along lines A-A and B-B of FIG. 17 .
- the first fin type active pattern 420 and the second fin type active pattern 520 may extend lengthwise along second directions Y 1 and Y 2 , respectively.
- the first fin type active pattern 420 and the second fin type active pattern 520 may be portions of the substrate 100 and may include epitaxial layers grown from the substrate 100 .
- An isolation layer 150 may cover lateral surfaces of the first fin type active pattern 420 and the second fin type active pattern 520 .
- an etching process is performed using a first hard mask pattern 2404 and a second hard mask pattern 2504 , thereby forming a third dummy gate 443 crossing the first fin type active pattern 420 and extending in a first direction X 1 and a fourth dummy gate 543 crossing the second fin type active pattern 520 and extending in a first direction X 2 .
- a third dummy gate insulation layer 441 may be formed between the first fin type active pattern 420 and the third dummy gate 443 and a fourth dummy gate insulation layer 541 may be formed between the second fin type active pattern 520 and the fourth dummy gate 543 .
- the third dummy gate 443 and the third dummy gate insulation layer 441 are removed, thereby forming a third trench 423 crossing the first fin type active pattern 420 on the first fin type active pattern 420 .
- the fourth dummy gate 543 and the fourth dummy gate insulation layer 541 are removed, thereby forming a Fourth trench 523 crossing the second fin type active pattern 520 on the second fin type active pattern 520 .
- a memory 1210 fabricated according to some embodiments of the present inventive concept may be employed to a memory card 1200 .
- the memory card 1200 fabricated according to some embodiments of the present inventive concept includes a memory controller 1220 controlling data exchange between a host and the memory 1210 .
- the SRAM 1221 is used as a working memory of a central processing unit 1222 .
- a host interface 1223 includes a data exchange protocol of the host connected to the memory card 1200 .
- An error correction block 1224 detects and corrects an error included in data read from the memory 1210 .
- the memory interface 1225 interfaces with the memory 1210 according to the present inventive concept.
- the central processing unit 1222 performs an overall controlling operation for data exchange of the memory controller 1220 .
Abstract
A method for fabricating a semiconductor device comprises forming a gate insulation layer on a substrate including a first region and a second region, forming a first gate conductive layer and a capping layer on the first region and the second region and heat-treating the substrate, removing the capping layer from the first region and the second region, forming a second gate conductive layer on the first region and the second region, nitriding the second gate conductive layer, and forming a third gate conductive layer on the second region.
Description
- This application claims priority from Korean Patent Application No. 10-2014-0106987 filed on Aug. 18, 2014 in the Korean Intellectual Property Office, and all the benefits accruing therefrom under 35 U.S.C. 119, the contents of which in its entirety are herein incorporated by reference.
- 1. Technical Field
- The present inventive concepts relate to a semiconductor device and a method for fabricating the same.
- 2. Description of the Related Art
- To adjust a threshold voltage of a semiconductor chip, a thickness of a gate conductive layer may be varied. However, in consideration of manufacturability and stability of semiconductor chip, there may be a limitation in decreasing or increasing the thickness of the gate conductive layer. Therefore, a method for adjusting the threshold voltage while maintaining the thickness of the gate conductive layer is required. To achieve a stable operation of a semiconductor chip, it is also required to improve a threshold voltage distribution for providing relatively uniform threshold voltages from the semiconductor chip.
- According to an aspect of the present inventive concept, there is provided a method for fabricating a semiconductor device, the method including forming a gate insulation layer on a substrate including a first region and a second region, forming a first gate conductive layer and a capping layer on the first region and the second region and then heat-treating the substrate, removing the capping layer from the first region and the second region, forming a second gate conductive layer on the first region and the second region, nitriding the second gate conductive layer, and forming a third gate conductive layer on the second region.
- In some embodiments, the step of removing the capping layer from the first region and the second region further comprises removing the first gate conductive layer from the first region and the second region.
- In some embodiments, the step of forming the gate insulation layer on the substrate comprises: forming an interface layer on the substrate; and forming a high-k gate insulation layer on the interface layer, wherein the second gate conductive layer direct contacts the high-k gate insulation layer.
- In some embodiments, the step of forming the gate insulation layer on the substrate comprises: forming a first trench and a second trench on the first region and the second region, respectively; and forming the gate insulation layer along lateral surfaces and bottom surfaces of the first trench and the second trench.
- In some embodiments, the forming of the third gate conductive layer on the second region comprises: forming the third gate conductive layer on the second gate conductive layer of the first region and the second region; forming a mask pattern on the second region; and removing the second gate conductive layer from the first region using the mask pattern.
- In some embodiments, the step of nitriding the second gate conductive layer is performed using a gas including ammonia (NH3) or plasma-state ammonia (NH3).
- In some embodiments, the step of nitriding the second gate conductive layer using the gas including ammonia (NH3) is performed at a temperature ranging from about 500° C. to about 700° C.
- In some embodiments, the step of nitriding the second gate conductive layer using the plasma-state ammonia (NH3) is performed at a temperature ranging from about 25° C. to about 400° C.
- In some embodiments, the second gate conductive layer comprises a TaN layer.
- According to another aspect of the present inventive concept, there is provided a method for fabricating a semiconductor device, the method including forming a gate insulation layer on a substrate including a first region and a second region, forming a first gate conductive layer and a capping layer on the first region and the second region and then heat-treating the substrate, removing the first gate conductive layer and the capping layer from the first region and the second region, forming a second gate conductive layer on the first region and the second region, forming a third gate conductive layer on the second region, and nitriding the second gate conductive layer of the first region.
- In some embodiments, the step of nitriding the second gate conductive layer of the first region comprises implanting a gas including ammonia (NH3) into the second gate conductive layer of the first region and third gate conductive layer of the second region.
- In some embodiments, the second gate conductive layer of the first region is exposed to the gas including ammonia (NH3) and the second gate conductive layer of the second region is not exposed to the gas including ammonia (NH3).
- In some embodiments, after forming the second gate conductive layer on the first region and the second region, further comprising nitriding the second gate conductive layer.
- According to still another aspect of the present inventive concept, there is provided a method for fabricating a semiconductor device, the method including forming a first fin type active pattern and a second fin type active pattern on a substrate, forming a first trench crossing the first fin type active pattern on the first fin type active pattern and forming a second trench crossing the second fin type active pattern on the second fin type active pattern, forming a first TaN layer along lateral surfaces and a bottom surface of the first trench and forming a second TaN layer along lateral surfaces and a bottom surface of the second trench, implanting a nitride gas on the first TaN layer and the second TaN layer, forming a TiN layer on the second TaN layer, and implanting a nitride gas on the first TaN layer and the TiN layer.
- In some embodiments, the nitride gas includes ammonia (NH3).
- According to a further aspect of the present inventive concept, there is provided a semiconductor device including an interlayer insulation layer formed on a substrate and including a first trench and a second trench, a first gate insulation layer formed along lateral surfaces and a bottom surface of the first trench and a second gate insulation layer formed along lateral surfaces and a bottom surface of the second trench, a first TaN layer formed on the first gate insulation layer and nitrided, a second TaN layer formed on the second gate insulation layer and nitrided, and a TiN layer formed on the second TaN layer and nitrided.
- In some embodiments, the semiconductor device further comprises: a first TiN layer formed between the first gate insulation layer and the first TaN layer; and a second TiN layer formed between the second gate insulation layer and the second TaN layer.
- In some embodiments, the TiN layer is formed on the second TaN layer and is not formed on the first TaN layer.
- In some embodiments, the first trench is formed in an NMOS region and the second trench is formed in a PMOS region.
- In some embodiments, the first TaN layer, the second TaN layer or the TiN layer is nitrided using a gas including ammonia (NH3) or plasma-state ammonia (NH3).
- The above and other features and advantages of the present inventive concept will become more apparent by describing in detail preferred embodiments thereof with reference to the attached drawings in which:
-
FIGS. 1 to 7 illustrate a method of fabricating a semiconductor device according to an embodiment of the present inventive concept; -
FIGS. 8 to 11 illustrate a method of fabricating a semiconductor device according to another embodiment of the present inventive concept; -
FIGS. 12 to 14 illustrate a method of fabricating a semiconductor device according to another embodiment of the present inventive concept; -
FIGS. 15 to 18 illustrate a method of fabricating a semiconductor device according to still another embodiment of the present inventive concept; -
FIG. 19 is a schematic block diagram illustrating a memory card including semiconductor devices fabricated according to some embodiments of the present inventive concept; -
FIG. 20 is a schematic block diagram illustrating an information processing system using a semiconductor device fabricated by semiconductor device fabricating methods according to some embodiments of the present inventive concept; and -
FIG. 21 is a block diagram of an electronic device including a semiconductor device fabricated by a semiconductor device fabricating method according to some embodiments of the present inventive concept. -
FIGS. 1 to 7 illustrate a method of fabricating a semiconductor device according to an embodiment of the present inventive concept. - Referring to
FIG. 1 , asubstrate 100 may include a first region I and a second region II. The first region I and the second region II may be connected to each other or may be spaced apart from each other. In some embodiments of the present inventive concept, the first region I may be an NMOS region and the second region II may be a PMOS region. - The
substrate 100 may be bulk silicon or a silicon-on-insulator (SOI). Alternatively, thesubstrate 100 may be a silicon substrate, or a substrate made of other materials selected from the group consisting of, for example, germanium, silicon germanium, indium antimonide, lead telluride compound, indium arsenide, indium phosphide, gallium arsenide, and gallium antimonide, but aspects of the present inventive concept are not limited thereto. - A first dummy gate
dielectric layer 212 and afirst dummy gate 217 are formed on the first region I of thesubstrate 100. A second dummy gatedielectric layer 312 and asecond dummy gate 317 are formed on the second region II of thesubstrate 100. - Each of the first dummy gate
dielectric layer 212 and the second dummy gatedielectric layer 312 may include, for example, one of silicon oxide (SiO2), silicon oxynitride (SiON) and a combination thereof. The first dummy gatedielectric layer 212 and the second dummy gatedielectric layer 312 may be formed by, for example, thermal treatment, chemical treatment, atomic layer deposition (ALD) or chemical vapor deposition (CVD). - The first dummy gate
dielectric layer 212 and the second dummy gatedielectric layer 312 may include, for example, silicon (Si), specifically, poly Si, amorphous silicon (a-Si) and a combination thereof. Thefirst dummy gate 217 and thesecond dummy gate 317 may both not be doped with impurity or may be doped with similar impurities. Alternatively, one of thefirst dummy gate 217 and thesecond dummy gate 317 may be doped and the other may not be doped. Alternatively, one of thefirst dummy gate 217 and thesecond dummy gate 317 may be doped with an n type material (e.g., arsenic, phosphorus, or the like) and the other may be doped with a p type material (e.g., boron, or the like). - After the
first dummy gate 217 and thesecond dummy gate 317 are formed, source/drain regions are formed at opposite sides of thefirst dummy gate 217 and thesecond dummy gate 317. - An
interlayer insulation layer 110 covering thefirst dummy gate 217 and thesecond dummy gate 317 is formed on thesubstrate 100. Theinterlayer insulation layer 110 may include, for example, at least one of a low k material, oxide, nitride and oxynitride. Examples of the low k material may include flowable oxide (FOX), tonen silazene (TOSZ), undoped silica glass (USG), borosilica glass (BSG), phosphosilaca glass (PSG), borophosphosilica glass (BPSG), plasma enhanced tetra ethyl ortho silicate (PRTEOS), fluoride silicate glass (FSG), high density plasma (HDP), plasma enhanced oxide (PEOX), flowable CVD (FCVD), and combinations thereof, but aspects of the present inventive concept are not limited thereto. - The
interlayer insulation layer 110 is planarized to expose top surfaces of thefirst dummy gate 217 and thesecond dummy gate 317. For example, the planarizing may be performed by chemical mechanical polishing (CMP). - Referring to
FIG. 2 , thefirst dummy gate 217 and thesecond dummy gate 317 are removed. After thefirst dummy gate 217 and thesecond dummy gate 317 are removed, the first dummy gatedielectric layer 212 and the second dummy gatedielectric layer 312 are removed, thereby forming afirst trench 230 and asecond trench 330. A top surface of thesubstrate 100 may be exposed by thefirst trench 230 and thesecond trench 330. - In other words, the
interlayer insulation layer 110 including thefirst trench 230 and thesecond trench 330 is formed on thesubstrate 100. Thefirst trench 230 is formed on the first region I and thesecond trench 330 is formed on the second region II. In some embodiments of the present inventive concept, thefirst trench 230 is formed on the NMOS region and thesecond trench 330 is formed on the PMOS region. - The
first dummy gate 217, thesecond dummy gate 317, the first dummygate dielectric layer 212 and the second dummygate dielectric layer 312 may be removed by wet etching or dry etching. - Referring to
FIG. 3 , a gate insulation layer is formed on thesubstrate 100. First, afirst interface layer 215 and asecond interface layer 315 are formed on a bottom surface of thefirst trench 230 and a bottom surface of thesecond trench 330, respectively. - The
first interface layer 215 and thesecond interface layer 315 may include silicon oxide. Thefirst interface layer 215 and thesecond interface layer 315 may be formed using, for example, chemical oxidation, UV oxidation, or dual plasma oxidation. - A high-k
gate insulation layer 210 is conformally formed on the top surface of theinterlayer insulation layer 110 and on the sidewall surfaces and bottom surface of thefirst trench 230. In addition, along with the high-kgate insulation layer 210, a high-kgate insulation layer 310 is conformally formed on the top surface of theinterlayer insulation layer 110 and on the sidewall surfaces and bottom surface of thesecond trench 330. In detail, the high-k gate insulation layers 210 and 310 are formed on thefirst interface layer 215 and thesecond interface layer 315, respectively. - In some embodiments of the present inventive concept, the high-k gate insulation layers 210 and 310 may be simultaneously formed using, for example, CVD or ALD. The high-k gate insulation layers 210 and 310 may include, for example, one or more selected from the group consisting of hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, and lead zinc niobate, but not limited thereto.
- Referring to
FIG. 4 , first gateconductive layers - The first gate
conductive layers conductive layers - Capping
layers conductive layers first interface layer 215 and thesecond interface layer 315 from increasing. - Referring to
FIG. 5 , the first gateconductive layers conductive layer 220 is formed along lateral surfaces and a bottom surface of thefirst trench 230 and a second gateconductive layer 320 is formed along lateral surfaces and a bottom surface of thesecond trench 330. In this case, the second gateconductive layers - The second gate
conductive layers conductive layers - Next, the second gate
conductive layers conductive layers conductive layers conductive layers conductive layers - In various embodiments of the present inventive concept, a threshold voltage of the NMOS region can be effectively adjusted by nitriding the second gate
conductive layers conductive layers conductive layers conductive layers conductive layers - Referring to
FIG. 6 , first, third gateconductive layers 226 and 326 may be formed on the second gateconductive layers conductive layers 226 and 326 may be conformally formed along the second gateconductive layers conductive layers 226 and 326 may be simultaneously formed and may include, for example, a TiN layer. - A
mask layer 132 filling thefirst trench 230 and thesecond trench 330 is formed on the third gateconductive layers 226 and 326. Themask layer 132 may include a good gap-filling capability to efficiently fill thefirst trench 230 and thesecond trench 330. - Next, a
photoresist pattern 140 is formed on themask layer 132. Thephotoresist pattern 140 exposes themask layer 132 formed on the third gate conductive layer 226 while covering themask layer 132 formed on the third gateconductive layer 326. That is to say, thephotoresist pattern 140 covers the second region II and exposes the first region I. In addition, thephotoresist pattern 140 may overlap with the third gateconductive layer 326 but may not overlap with the third gate conductive layer 226. - Referring to
FIG. 7 , themask layer 132 filling thefirst trench 230 is removed using thephotoresist pattern 140 as a mask in anetching process 145. Through theetching process 145, amask pattern 130 is formed on the third gateconductive layer 326. Themask pattern 130 fills thesecond trench 330. - In other words, the
mask layer 132 formed on the third gate conductive layer 226 is removed from the first region I by theetching process 145, thereby forming themask pattern 130. Themask pattern 130 and thephotoresist pattern 140 formed on the third gateconductive layer 326 may have a stacked structure to be used as an etch mask in a subsequent process. - In an embodiment, the removing of the
mask layer 132 from the first region I may further include removing the third gate conductive layer 226 from the first region I. As themask layer 132 and the third gate conductive layer 226 are removed from the first region I, the second gateconductive layer 220 is exposed in the first region I. Here, the second gateconductive layer 320 of the second region II is covered by themask pattern 130 and thephotoresist pattern 140. - The
mask layer 132 filling thefirst trench 230 and the third gate conductive layer 226 may be removed by dry etching. The dry etching may be, for example, a reactive ion etching (RIE). As an example of the dry etching for forming themask pattern 130, themask layer 132 filling thefirst trench 230 is etched using a mixed gas including oxygen as an etching gas to then be removed. The mixed gas used as the etching gas may include chlorine in addition to oxygen. The mixed gas may further include helium. As another example of the dry etching for forming themask pattern 130, themask layer 132 filling thefirst trench 230 is etched using a mixed gas including nitrogen and hydrogen as an etching gas to then be removed. - Thereafter, processes of forming gate metals on the first region I and the second region II are performed. In detail, For example, after the
mask layer 132 is removed from the first region I, the second gateconductive layer 220 is removed using themask pattern 130 as a mask to expose the high-kgate insulation layer 210 in the first region I. Here, the second gateconductive layer 220 may be removed by wet etching using an etching solution including, for example, hydrogen peroxide (H2O2). Next, thephotoresist pattern 140 and themask pattern 130 formed on the second region II are removed to expose the second gateconductive layer 320 in the second region II. Thephotoresist pattern 140 and themask pattern 130 may be removed by, for example, a gas including hydrogen (H2) and nitrogen (N2). Then, a first metal gate may be formed to fill thefirst trench 230 and a second metal gate may be formed to fill thesecond trench 330. Accordingly, for example, an n type transistor may be formed on the first region I and a p type transistor may be formed on the second region II. -
FIGS. 8 to 11 illustrate intermediate process steps in a method of fabricating a semiconductor device according to another embodiment of the present inventive concept. - The following description will focus on differences between the present embodiment and the previous embodiment shown in
FIGS. 1 to 7 . - Referring to
FIGS. 5 and 8 , the present embodiment is different from the previous embodiment in that capping layers 224 and 324 are formed on first gateconductive layers conductive layers conductive layers conductive layer 220 is formed along lateral surfaces and a bottom surface of thefirst trench 230 and the second gateconductive layer 320 is formed along lateral surfaces and a bottom surface of thesecond trench 330. - As described above, in some embodiments of the present inventive concept, the first gate
conductive layers conductive layers - Referring to
FIG. 9 , next, the second gateconductive layers conductive layers conductive layers conductive layers conductive layers - In various embodiments of the present inventive concept, a threshold voltage of the NMOS region can be effectively adjusted by nitriding the second gate
conductive layers conductive layers conductive layers conductive layers conductive layers conductive layers - Referring to
FIG. 10 , first, the third gateconductive layers 226 and 326 may be formed on the first gateconductive layers mask layer 132 filling thefirst trench 230 and thesecond trench 330 is formed on the third gateconductive layers 226 and 326. Next, thephotoresist pattern 140 covering the second region II while exposing the first region I is formed on themask layer 132. - Referring to
FIG. 11 , themask layer 132 filling thefirst trench 230 is removed using thephotoresist pattern 140 as a mask in anetching process 145. Through theetching process 145, amask pattern 130 is formed on the second gateconductive layer 320. Themask pattern 130 fills thesecond trench 330. Meanwhile, the removing of themask layer 132 from the first region I may further include removing the third gate conductive layer 226 of the first region I. As the result of the removing themask layer 132 and the third gate conductive layer 226 from the first region I, the second gateconductive layer 220 is exposed in the first region I. However, the second gateconductive layer 320 of the second region II may be covered by themask pattern 130 and thephotoresist pattern 140. - Processes of forming metal gates on the first region I and the second region II are performed. For example, after the
mask layer 132 is removed from the first region I, the second gateconductive layer 220 is removed using themask pattern 130 as a mask, thereby exposing the first gateconductive layer 222 in the first region I. Meanwhile, the first gateconductive layer 222 is further removed from the first region I, thereby exposing the high-kgate insulation layer 210 in the first region I. Here, the first gateconductive layer 222 or the second gateconductive layer 220 may be removed by wet etching using an etching solution including, for example, hydrogen peroxide (H2O2). Next, thephotoresist pattern 140 and themask pattern 130 formed on the second region II are removed, thereby exposing the second gateconductive layer 320 in the second region II. Thephotoresist pattern 140 and the mask pattern 13Q may be removed using a gas including, for example, hydrogen (H2) and nitrogen (N2). Thereafter, a first metal gate may be formed to fill thefirst trench 230 and a second metal gate may be formed to fill thesecond trench 330. Accordingly, For example, an n type transistor may be formed on the first region I and a p type transistor may be formed on the second region II. -
FIGS. 12 to 14 illustrate a method of fabricating a semiconductor device according to another embodiment of the present inventive concept. - Referring to
FIGS. 5 , 12 and 13, second gateconductive layers conductive layers conductive layers conductive layer 220 is formed along lateral surfaces and a bottom surface of thefirst trench 230 and the second gateconductive layer 320 is formed along lateral surfaces and a bottom surface of thesecond trench 330. Thereafter, third gate conductive layers 226 and 228 are formed on the second gateconductive layers conductive layers mask layer 132 filling thefirst trench 230 and thesecond trench 330 is then formed. - Referring to
FIGS. 13 and 14 , themask layer 132 filling thefirst trench 230 is removed using aphotoresist pattern 140 as a mask of anetching process 145 and themask pattern 130 is formed on the third gateconductive layer 326 through theetching process 145, followed by nitriding the second gateconductive layer 220 and the third gateconductive layer 326. In detail, after thephotoresist pattern 140 and themask pattern 130 formed on the second region II are removed, a gas for nitriding, for example, a gas including ammonia (NH3), may be implanted on the second gateconductive layer 220 of the first region I and the third gateconductive layer 326 of the second region II. - Here, the second gate
conductive layer 220 of the first region I is exposed to the gas including ammonia (NH3) while the third gateconductive layer 326 of the second region II is not exposed to the gas including ammonia (NH3). - In various embodiments of the present inventive concept, as the result of nitriding the second gate
conductive layers FIGS. 5 and 9 , a threshold voltage of the NMOS region can be effectively adjusted. Accordingly, the threshold voltage of the semiconductor device can be adjusted while maintaining the second gateconductive layers conductive layers conductive layers - Meanwhile, in the method for fabricating a semiconductor device according to still another embodiment of the present inventive concept, two nitriding processes may be performed. That is to say, after forming the second gate
conductive layers FIG. 5 , the second gateconductive layers etching process 145, as shown inFIG. 14 , to form a third gateconductive layer 326 on the second gateconductive layer 320, and the second gateconductive layer 220 and the third gateconductive layer 326 are then secondly nitrided. - Accordingly, after the second gate
conductive layers conductive layer 220 is nitrided once more to reduce the oxidized second gateconductive layers - The semiconductor device manufactured according to the present embodiment include an
interlayer insulation layer 110 formed on asubstrate 100 and including afirst trench 230 and asecond trench 330, a first gate insulation layer formed along lateral surfaces and bottom surfaces of thefirst trench 230, a second gate insulation layer formed along lateral surfaces and bottom surfaces of thesecond trench 330, a first TaN layer formed on the first gate insulation layer and nitrided, and a second TaN layer formed on the second gate insulation layer and nitrided. A nitride TiN layer may further be formed on the second TaN layer. For example, when each of the second TaN layer and the TiN layer formed on the second TaN layer is nitrided once, two nitriding processes may be performed on the first TaN layer. Here, the first gate insulation layer may include afirst interface layer 215 and a high-kgate insulation layer 210, and the second gate insulation layer may include asecond interface layer 315 and a high-kgate insulation layer 310. Meanwhile, the first TaN layer may be the second gateconductive layer 220 and the second TaN layer may be the second gateconductive layer 320. - According to some embodiments of the present inventive concept, the semiconductor device may further include a first TiN layer formed between the first gate insulation layer and the first TaN layer and a second TiN layer formed between the second gate insulation layer and the second TaN layer. Meanwhile, according to some embodiments of the present inventive concept, the TiN layer may be formed on the second TaN layer while not being formed on the first TaN layer. As described above, the nitriding of the first TaN layer, the second TaN layer or the TiN layer may be performed using a gas including ammonia (NH3) or plasma-state ammonia (NH3).
- Hereinafter, a method of fabricating a semiconductor device according to still another embodiment of the present inventive concept will be described with reference to
FIGS. 15 to 18 . -
FIGS. 15 to 18 illustrate a method of fabricating a semiconductor device according to still another embodiment of the present inventive concept. Specifically,FIG. 18 illustrates cross-sectional views taken along lines A-A and B-B ofFIG. 17 . - Referring to
FIG. 15 , a first fin typeactive pattern 420 and a second fin typeactive pattern 520 are formed on thesubstrate 100. In some embodiments of the present inventive concept, the first fin typeactive pattern 420 is formed on the first region I and the second fin typeactive pattern 520 is formed on the second region II. - The first fin type
active pattern 420 and the second fin typeactive pattern 520 may extend lengthwise along second directions Y1 and Y2, respectively. The first fin typeactive pattern 420 and the second fin typeactive pattern 520 may be portions of thesubstrate 100 and may include epitaxial layers grown from thesubstrate 100. Anisolation layer 150 may cover lateral surfaces of the first fin typeactive pattern 420 and the second fin typeactive pattern 520. - The first fin type
active pattern 420 and the second fin typeactive pattern 520 may include, for example, an element semiconductor material, such as silicon or germanium. In an embodiment, the first fin typeactive pattern 420 and the second fin typeactive pattern 520 may include compound semiconductors, for example, Group IV-IV compound semiconductors or Group III-V compound semiconductors. In detail, examples of the Group IV-IV compound semiconductors doped into the first fin typeactive pattern 420 and the second fin typeactive pattern 520 may include a binary compound or a ternary compound including at least two elements selected from the group consisting of carbon (C), silicon (Si), germanium (Ge), and tin (Sn), and compounds doped with Group IV elements. The III-V group compound semiconductor doped into the first fin typeactive pattern 420 and the second fin typeactive pattern 520 may include, for example, a binary compound, a ternary compound or a quaternary compound, prepared by combining at least one group III element of aluminum (Al), gallium (Ga) and indium (In) with at least one group V element of phosphorus (P), arsenic (As) and antimony (Sb). - Referring to
FIG. 16 , an etching process is performed using a firsthard mask pattern 2404 and a secondhard mask pattern 2504, thereby forming athird dummy gate 443 crossing the first fin typeactive pattern 420 and extending in a first direction X1 and afourth dummy gate 543 crossing the second fin typeactive pattern 520 and extending in a first direction X2. Here, a third dummygate insulation layer 441 may be formed between the first fin typeactive pattern 420 and thethird dummy gate 443 and a fourth dummygate insulation layer 541 may be formed between the second fin typeactive pattern 520 and thefourth dummy gate 543. - The third dummy
gate insulation layer 441 and the fourth dummygate insulation layer 541 may include, for example, at least one of silicon oxide (SiO2), silicon oxynitride (SiON) and a combination thereof. Thethird dummy gate 443 and thefourth dummy gate 543 may include, for example, at least one of polysilicon (poly Si), amorphous silicon (a-Si) and a combination thereof. - Referring to
FIGS. 16 to 18 , thethird dummy gate 443 and the third dummygate insulation layer 441 are removed, thereby forming athird trench 423 crossing the first fin typeactive pattern 420 on the first fin typeactive pattern 420. In addition, thefourth dummy gate 543 and the fourth dummygate insulation layer 541 are removed, thereby forming aFourth trench 523 crossing the second fin typeactive pattern 520 on the second fin typeactive pattern 520. - In an embodiment, a
first spacer 451 and asecond spacer 551 are formed on sidewalls of thethird dummy gate 443 and thefourth dummy gate 543, respectively. When thefirst spacer 451 and thesecond spacer 551 are formed, portions of the first fin typeactive pattern 420 and the second fin typeactive pattern 520 not overlapping with thethird dummy gate 443 and thefourth dummy gate 543 are removed, thereby forming recesses. - A first source/
drain 461 and a second source/drain 561 are formed at opposite sides of thethird dummy gate 443 and thefourth dummy gate 543, respectively. - An
interlayer insulation layer 110 covering the first source/drain 461 and the second source/drain 561 is formed. Through a planarizing process, top surfaces of thethird dummy gate 443 and thefourth dummy gate 543 are exposed. - The
third dummy gate 443 and the third dummygate insulation layer 441 are removed, thereby forming thethird trench 423 on the first region I and thefourth dummy gate 543 and the fourth dummygate insulation layer 541 are removed, thereby forming thefourth trench 523 on the second region II. - Subsequent processes after the forming of the
third trench 423 and thefourth trench 523, as shown inFIG. 18 , are substantially the same as those of the previous embodiments, and detailed descriptions thereof will not be given or will be briefly given. - In some embodiments of the present inventive concept, a first TaN layer is formed along lateral surfaces and a bottom surface of the
third trench 423 of the first region I and a second TaN layer is formed along lateral surfaces and a bottom surface of thefourth trench 523. As described above, gate conductive layers previously formed along the lateral surfaces and a bottom surface of thethird trench 423 and thefourth trench 523 may have been removed before the forming of the first TaN layer and the second TaN layer. Next, after a nitrogen gas is implanted on the first TaN layer and the second TaN layer, a TiN layer may be formed on the second TaN layer. - In some embodiments of the present inventive concept, As described above, the gate conductive layers including, for example, TiN, previously been formed along the lateral surfaces and the bottom surface of the
third trench 423 and thefourth trench 523, may not have been removed before the forming of the first TaN layer and the second TaN layer. That is to say, on the gate conductive layer including TiN, the first TaN layer is formed along the lateral surfaces and the bottom surface of thethird trench 423 of the first region I and the second TaN layer is formed along the lateral surfaces and the bottom surface of thefourth trench 523. Next, the nitride gas is implanted on the first TaN layer and the second TaN layer, thereby forming a TiN layer on the second TaN layer. - Meanwhile, in some embodiments of the present inventive concept, the first TaN layer is formed along the lateral surfaces and the bottom surface of the
third trench 423 of the first region I, and the second TaN layer is formed along the lateral surfaces and the bottom surface of thefourth trench 523. Next, the TiN layer may be formed on the second TaN layer without implanting a nitride gas into the first TaN layer and the second TaN layer. Then, a nitride gas may be implanted on the first TaN layer and the TiN layer. - In some embodiments of the present inventive concept, the first TaN layer is formed along the lateral surfaces and the bottom surface of the
third trench 423 of the first region I, and the second TaN layer is formed along the lateral surfaces and the bottom surface of thefourth trench 523. Next, the nitride gas may be implanted on the first TaN layer and the second TaN layer and a TiN layer may be formed on the second TaN layer. Next, the nitride gas may be implanted on the first TaN layer and the TiN layer. That is to say, the nitride gas may be implanted two times during the semiconductor device manufacturing process. - In some embodiments of the present inventive concept, the nitride gas may include ammonia (NH3).
- As described above, as the result of the nitriding of the first TaN layer and the second TaN layer, a threshold voltage of the NMOS region can be effectively reduced, thereby suppressing the effect of increasing the threshold voltage of the NMOS region, occurring due to, for example, additionally forming of a TiN layer. Accordingly, the threshold voltage of the semiconductor device may be adjusted while maintaining the TaN layer in a thickness range enabling mass production of semiconductor devices. Meanwhile, the TaN layer may be oxidized during the semiconductor device manufacturing process, resulting in non-uniformity in the threshold voltage distribution. In this case, in various embodiments of the present inventive concept, the TaN layer oxidized by nitriding the same may be reduced, thereby providing uniformity in the threshold voltage distribution of the semiconductor device.
-
FIG. 19 is a schematic block diagram illustrating a memory card including semiconductor devices fabricated according to some embodiments of the present inventive concept. - Referring to
FIG. 19 , amemory 1210 fabricated according to some embodiments of the present inventive concept may be employed to amemory card 1200. Thememory card 1200 fabricated according to some embodiments of the present inventive concept includes amemory controller 1220 controlling data exchange between a host and thememory 1210. TheSRAM 1221 is used as a working memory of acentral processing unit 1222. Ahost interface 1223 includes a data exchange protocol of the host connected to thememory card 1200. Anerror correction block 1224 detects and corrects an error included in data read from thememory 1210. Thememory interface 1225 interfaces with thememory 1210 according to the present inventive concept. Thecentral processing unit 1222 performs an overall controlling operation for data exchange of thememory controller 1220. -
FIG. 20 is a schematic block diagram illustrating an information processing system using a semiconductor device fabricated by semiconductor device fabricating methods according to some embodiments of the present inventive concept. - Referring to
FIG. 20 , aninformation processing system 1300 may include amemory system 1310 including semiconductor devices fabricated by semiconductor device fabricating methods according to embodiments of the present inventive concept. Theinformation processing system 1300 in accordance with the present inventive concept includes thememory system 1310 and amodem 1320, a central processing unit (CPU) 1330, a random access memory (RAM) 1340, and auser interface 1350 that are electrically connected to asystem bus 1360, respectively. Thememory system 1310 may include amemory 1311 and amemory controller 1312 and may have a configuration that is the same as or substantially similar to thememory card 1200 shown inFIG. 19 . Thememory system 1310 may store data processed by thecentral processing unit 1330 or data received from an external device. Theinformation processing system 1300 can be applied to a memory card, a solid-state drive (SSD), a camera image sensor or other various kinds of chip sets. For example, thememory system 1310 may be configured to employ an SSD. In this case, theinformation processing system 1300 may process store huge amounts of data in a stable, reliable manner. -
FIG. 21 is a block diagram of an electronic device including a semiconductor device fabricated by a semiconductor device fabricating method according to some embodiments of the present inventive concept. - Referring to
FIG. 21 , theelectronic device 1400 may include a semiconductor device according to various embodiments of the present inventive concept. Theelectronic device 1400 may be applied to a wireless communication device (for example, a personal digital assistant (PDA), a notebook computer, a portable computer, a web tablet, a wireless phone, and/or a wireless digital music player) or any type of electronic device capable of transmitting and/or receiving information in a wireless environment. - The
electronic device 1400 may include acontroller 1410, an input/output device (I/O) 1420, amemory 1430, and awireless interface 1440. Here, thememory 1430 may include a semiconductor device according to various embodiments of the present inventive concept. Thecontroller 1410 may include a microprocessor, a digital signal processor, and a processor capable of performing functions similar to these components. Thememory 1430 may be used to store commands processed by the controller 1410 (or user data). Thewireless interface 1440 may be used to exchange data through a wireless data network. Thewireless interface 1440 may include an antenna or a wired/wireless transceiver. For example, theelectronic device 1400 may use a third generation communication system protocol, such as CDMA, GSM, NADC, E-TDMA, WCDMA, CDMA2000, or the like. - Meanwhile, the semiconductor device to which the present inventive concept can be applied may include a multi-gate field electric transistor (MuGFET), for example, a fin type field electric transistor (FinFET).
- In addition, the semiconductor device to which the present inventive concept can be applied may include a logic region and an SRAM region. The transistor formed according to the aforementioned embodiment may be selectively formed as a logic nFET, a logic pFET, an SRAM nFET, or an SRAM pFET in the logic region or the SRAM region. Meanwhile, the regions to which the present inventive concept can be applied are not limited to the logic region and the SRAM region. Rather, the present inventive concept may also be applied to a region other than the logic region, for example, a memory region where a memory, such as DRAM, MRAM, RRAM, PRAM, etc. is formed.
- The present inventive concept provides a method for fabricating a semiconductor device, which can adjust a threshold voltage of the semiconductor device while maintaining the thickness of a gate conductive layer.
- The present inventive concept also provides a semiconductor device, which can adjust a threshold voltage of the semiconductor device while maintaining the thickness of a gate conductive layer.
- The present inventive concept also provides a method for fabricating a semiconductor device, which can provide a uniform threshold voltage distribution.
- The present inventive concept also provides a semiconductor device, which can provide a uniform threshold voltage distribution.
- While the present inventive concept has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present inventive concept as defined by the following claims. It is therefore desired that the present embodiments be considered in all respects as illustrative and not restrictive, reference being made to the appended claims rather than the foregoing description to indicate the scope of the inventive concept.
Claims (16)
1. A method for fabricating a semiconductor device, the method comprising:
forming a gate insulation layer on a substrate including a first region and a second region;
forming a first gate conductive layer and a capping layer on the first region and the second region and heat-treating the substrate;
removing the capping layer from the first region and the second region;
forming a second gate conductive layer on the first region and the second region;
nitriding the second gate conductive layer; and
forming a third gate conductive layer on the second region.
2. The method of claim 1 , wherein the step of removing the capping layer from the first region and the second region further comprises removing the first gate conductive layer from the first region and the second region.
3. The method of claim 2 , wherein the step of forming the gate insulation layer on the substrate comprises:
forming an interface layer on the substrate; and
forming a high-k gate insulation layer on the interface layer,
wherein the second gate conductive layer direct contacts the high-k gate insulation layer.
4. The method of claim 1 , wherein the step of forming the gate insulation layer on the substrate comprises:
forming a first trench and a second trench on the first region and the second region, respectively; and
forming the gate insulation layer along lateral surfaces and bottom surfaces of the first trench and the second trench.
5. The method of claim 4 , wherein the forming of the third gate conductive layer on the second region comprises:
forming the third gate conductive layer on the second gate conductive layer of the first region and the second region;
forming a mask pattern on the second region; and
removing the second gate conductive layer from the first region using the mask pattern.
6. The method of claim 1 , wherein the step of nitriding the second gate conductive layer is performed using a gas including ammonia (NH3) or plasma-state ammonia (NH3).
7. The method of claim 6 , wherein the step of nitriding the second gate conductive layer using the gas including ammonia (NH3) is performed at a temperature ranging from about 500° C. to about 700° C.
8. The method of claim 6 , wherein the step of nitriding the second gate conductive layer using the plasma-state ammonia (NH3) is performed at a temperature ranging from about 25° C. to about 400° C.
9. The method of claim 1 , wherein the second gate conductive layer comprises a TaN layer.
10. A method for fabricating a semiconductor device, the method comprising:
forming a gate insulation layer on a substrate including a first region and a second region;
forming a first gate conductive layer and a capping layer on the first region and the second region and heat-treating the substrate;
removing the first gate conductive layer and the capping layer from the first region and the second region;
forming a second gate conductive layer on the first region and the second region;
forming a third gate conductive layer on the second region; and
nitriding the second gate conductive layer of the first region.
11. The method of claim 10 , wherein the step of nitriding the second gate conductive layer of the first region comprises implanting a gas including ammonia (NH3) into the second gate conductive layer of the first region and third gate conductive layer of the second region.
12. The method of claim 11 , wherein the second gate conductive layer of the first region is exposed to the gas including ammonia (NH3) and the second gate conductive layer of the second region is not exposed to the gas including ammonia (NH3).
13. The method of claim 10 , after forming the second gate conductive layer on the first region and the second region, further comprising nitriding the second gate conductive layer.
14. A method for fabricating a semiconductor device, the method comprising:
forming a first fin type active pattern and a second fin type active pattern on a substrate;
forming a first trench crossing the first fin type active pattern on the first fin type active pattern and forming a second trench crossing the second fin type active pattern on the second fin type active pattern;
forming a first TaN layer along lateral surfaces and a bottom surface of the first trench and forming a second TaN layer along lateral surfaces and a bottom surface of the second trench;
implanting a nitride gas on the first TaN layer and the second TaN layer;
forming a TiN layer on the second TaN layer; and
implanting a nitride gas on the first TaN layer and the TiN layer.
15. The method of claim 14 , wherein the nitride gas includes ammonia (NH3).
16-20. (canceled)
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