US20150024989A1 - Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof - Google Patents

Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof Download PDF

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Publication number
US20150024989A1
US20150024989A1 US14/510,381 US201414510381A US2015024989A1 US 20150024989 A1 US20150024989 A1 US 20150024989A1 US 201414510381 A US201414510381 A US 201414510381A US 2015024989 A1 US2015024989 A1 US 2015024989A1
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US
United States
Prior art keywords
acid
cleaning
semiconductor
cleaning solution
tooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/510,381
Inventor
Vishal Chhabra
Laertis Economikos
John A. Fitzsimmons
James Hannah
Mahmoud Khojasteh
Jennifer Muncy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalFoundries Inc
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US13/669,627 priority Critical patent/US9058976B2/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to US14/510,381 priority patent/US20150024989A1/en
Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION reassignment INTERNATIONAL BUSINESS MACHINES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HANNAH, JAMES, ECONOMIKOS, LAERTIS, MUNCY, JENNIFER, CHHABRA, VISHAL, FITZSIMMONS, JOHN A., KHOJASTEH, MAHMOUD
Publication of US20150024989A1 publication Critical patent/US20150024989A1/en
Assigned to GLOBALFOUNDRIES U.S. 2 LLC reassignment GLOBALFOUNDRIES U.S. 2 LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INTERNATIONAL BUSINESS MACHINES CORPORATION
Assigned to GLOBALFOUNDRIES INC. reassignment GLOBALFOUNDRIES INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GLOBALFOUNDRIES U.S. 2 LLC, GLOBALFOUNDRIES U.S. INC.
Assigned to GLOBALFOUNDRIES U.S. INC. reassignment GLOBALFOUNDRIES U.S. INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WILMINGTON TRUST, NATIONAL ASSOCIATION
Abandoned legal-status Critical Current

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