US20130202817A1 - Antistatic coating - Google Patents

Antistatic coating Download PDF

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Publication number
US20130202817A1
US20130202817A1 US13/364,710 US201213364710A US2013202817A1 US 20130202817 A1 US20130202817 A1 US 20130202817A1 US 201213364710 A US201213364710 A US 201213364710A US 2013202817 A1 US2013202817 A1 US 2013202817A1
Authority
US
United States
Prior art keywords
approximately
conductive layer
substrate
layer
nanometers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/364,710
Other languages
English (en)
Inventor
James DeCoux
Roger Gave
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tru Vue Inc
Original Assignee
Tru Vue Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tru Vue Inc filed Critical Tru Vue Inc
Priority to US13/364,710 priority Critical patent/US20130202817A1/en
Assigned to APOGEE ENTERPRISES, INC. reassignment APOGEE ENTERPRISES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DECOUX, James, GAVE, Roger
Assigned to TRU VUE, INC. reassignment TRU VUE, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: APOGEE ENTERPRISES, INC.
Publication of US20130202817A1 publication Critical patent/US20130202817A1/en
Abandoned legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/944Layers comprising zinc oxide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948Layers comprising indium tin oxide [ITO]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
US13/364,710 2012-02-02 2012-02-02 Antistatic coating Abandoned US20130202817A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/364,710 US20130202817A1 (en) 2012-02-02 2012-02-02 Antistatic coating

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US13/364,710 US20130202817A1 (en) 2012-02-02 2012-02-02 Antistatic coating
EP13705309.6A EP2809821A1 (fr) 2012-02-02 2013-01-31 Revêtement antistatique
AU2013215079A AU2013215079B2 (en) 2012-02-02 2013-01-31 Antistatic coating
PCT/US2013/024058 WO2013116468A1 (fr) 2012-02-02 2013-01-31 Revêtement antistatique
US14/313,093 US10301717B2 (en) 2012-02-02 2014-06-24 Antistatic coating

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/313,093 Division US10301717B2 (en) 2012-02-02 2014-06-24 Antistatic coating

Publications (1)

Publication Number Publication Date
US20130202817A1 true US20130202817A1 (en) 2013-08-08

Family

ID=47741275

Family Applications (2)

Application Number Title Priority Date Filing Date
US13/364,710 Abandoned US20130202817A1 (en) 2012-02-02 2012-02-02 Antistatic coating
US14/313,093 Active 2033-10-16 US10301717B2 (en) 2012-02-02 2014-06-24 Antistatic coating

Family Applications After (1)

Application Number Title Priority Date Filing Date
US14/313,093 Active 2033-10-16 US10301717B2 (en) 2012-02-02 2014-06-24 Antistatic coating

Country Status (4)

Country Link
US (2) US20130202817A1 (fr)
EP (1) EP2809821A1 (fr)
AU (1) AU2013215079B2 (fr)
WO (1) WO2013116468A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US222279A (en) * 1879-12-02 Improvement in picture-frames
WO1997035216A1 (fr) * 1996-03-15 1997-09-25 Sola International Holdings Ltd. Film de revetement s'appliquant sur des articles transparents
US5974714A (en) * 1997-06-23 1999-11-02 Intercraft Company Picture frame back attachment
US20050282139A1 (en) * 2004-05-24 2005-12-22 La Verne Hughes No Glue Puzzle Frame
US20080028984A1 (en) * 2003-10-28 2008-02-07 Tru Vue, Inc. Anti-Reflective Coating for a Substrate
WO2011136478A2 (fr) * 2010-04-27 2011-11-03 Korea Institute Of Science And Technology Procédé pour la préparation de films antistatiques transparents à l'aide de graphène et films antistatiques transparents préparés par celui-ci

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715702A (en) 1986-10-20 1987-12-29 Dillon Stephen M Decorative lens
EP0299687B1 (fr) * 1987-07-17 1993-06-23 LUCAS INDUSTRIES public limited company Objets transparents
US5362552A (en) * 1993-09-23 1994-11-08 Austin R Russel Visible-spectrum anti-reflection coating including electrically-conductive metal oxide layers
US5579162A (en) * 1994-10-31 1996-11-26 Viratec Thin Films, Inc. Antireflection coating for a temperature sensitive substrate
US5942090A (en) * 1996-04-12 1999-08-24 Asahi Glass Company Ltd. Methods of producing a laminate
US5892600A (en) 1996-12-27 1999-04-06 Kuo; Wei-Wu Alex Spectacle lens structure with a planar reflective outer surface
TW392189B (en) * 1997-01-17 2000-06-01 Koninkl Philips Electronics Nv Method of manufacturing a cathode ray tube and a cathode ray tube
US6319594B1 (en) 1998-03-17 2001-11-20 Dai Nippon Printing Co., Ltd. Low reflective antistatic hardcoat film
US6153060A (en) * 1999-08-04 2000-11-28 Honeywell International Inc. Sputtering process
US6852406B2 (en) 2000-01-26 2005-02-08 Sola International Holdings, Ltd. Anti-static, anti-reflection coating
ES2185454B1 (es) * 2000-08-28 2004-05-01 Centro De Investigaciones Energeticas, Medioambientales Y Tecnologicas (C.I.E.M.A.T.) Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica.
US6764580B2 (en) 2001-11-15 2004-07-20 Chungwa Picture Tubes, Ltd. Application of multi-layer antistatic/antireflective coating to video display screen by sputtering
WO2005098481A1 (fr) 2004-03-31 2005-10-20 Dai Nippon Printing Co., Ltd. Pellicule antireflet antistatique permettant d'eviter la survenue d'une frange d'interferences
US20060029815A1 (en) * 2004-07-21 2006-02-09 Woodruff Daniel P Substrate coating
US8354143B2 (en) * 2005-05-26 2013-01-15 Tpk Touch Solutions Inc. Capacitive touch screen and method of making same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US222279A (en) * 1879-12-02 Improvement in picture-frames
WO1997035216A1 (fr) * 1996-03-15 1997-09-25 Sola International Holdings Ltd. Film de revetement s'appliquant sur des articles transparents
US5974714A (en) * 1997-06-23 1999-11-02 Intercraft Company Picture frame back attachment
US20080028984A1 (en) * 2003-10-28 2008-02-07 Tru Vue, Inc. Anti-Reflective Coating for a Substrate
US20050282139A1 (en) * 2004-05-24 2005-12-22 La Verne Hughes No Glue Puzzle Frame
WO2011136478A2 (fr) * 2010-04-27 2011-11-03 Korea Institute Of Science And Technology Procédé pour la préparation de films antistatiques transparents à l'aide de graphène et films antistatiques transparents préparés par celui-ci

Also Published As

Publication number Publication date
US20140299464A1 (en) 2014-10-09
AU2013215079A1 (en) 2014-08-21
AU2013215079B2 (en) 2017-07-27
EP2809821A1 (fr) 2014-12-10
US10301717B2 (en) 2019-05-28
WO2013116468A1 (fr) 2013-08-08

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Legal Events

Date Code Title Description
AS Assignment

Owner name: APOGEE ENTERPRISES, INC., MINNESOTA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DECOUX, JAMES;GAVE, ROGER;REEL/FRAME:028051/0882

Effective date: 20120329

AS Assignment

Owner name: TRU VUE, INC., MINNESOTA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:APOGEE ENTERPRISES, INC.;REEL/FRAME:028385/0311

Effective date: 20120613

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION