US20090023248A1 - Method of packaging a semiconductor die - Google Patents

Method of packaging a semiconductor die Download PDF

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Publication number
US20090023248A1
US20090023248A1 US12/242,622 US24262208A US2009023248A1 US 20090023248 A1 US20090023248 A1 US 20090023248A1 US 24262208 A US24262208 A US 24262208A US 2009023248 A1 US2009023248 A1 US 2009023248A1
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Prior art keywords
flange
die
leadframe
step
heatsink
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Abandoned
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US12/242,622
Inventor
David F. Abdo
Alexander J. Elliott
Lakshminarayan Viswanathan
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NXP USA Inc
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NXP USA Inc
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Priority to US11/336,368 priority Critical patent/US7445967B2/en
Priority to US12/242,622 priority patent/US20090023248A1/en
Application filed by NXP USA Inc filed Critical NXP USA Inc
Assigned to CITIBANK, N.A. reassignment CITIBANK, N.A. SECURITY AGREEMENT Assignors: FREESCALE SEMICONDUCTOR, INC.
Publication of US20090023248A1 publication Critical patent/US20090023248A1/en
Assigned to CITIBANK, N.A. reassignment CITIBANK, N.A. SECURITY AGREEMENT Assignors: FREESCALE SEMICONDUCTOR, INC.
Assigned to CITIBANK, N.A., AS COLLATERAL AGENT reassignment CITIBANK, N.A., AS COLLATERAL AGENT SECURITY AGREEMENT Assignors: FREESCALE SEMICONDUCTOR, INC.
Assigned to FREESCALE SEMICONDUCTOR, INC. reassignment FREESCALE SEMICONDUCTOR, INC. PATENT RELEASE Assignors: CITIBANK, N.A., AS COLLATERAL AGENT
Assigned to FREESCALE SEMICONDUCTOR, INC. reassignment FREESCALE SEMICONDUCTOR, INC. PATENT RELEASE Assignors: CITIBANK, N.A., AS COLLATERAL AGENT
Assigned to FREESCALE SEMICONDUCTOR, INC. reassignment FREESCALE SEMICONDUCTOR, INC. PATENT RELEASE Assignors: CITIBANK, N.A., AS COLLATERAL AGENT
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. SECURITY AGREEMENT SUPPLEMENT Assignors: NXP B.V.
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Assignors: NXP B.V.
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Assignors: NXP B.V.
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Assignors: NXP B.V.
Application status is Abandoned legal-status Critical

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4334Auxiliary members in encapsulations
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49175Parallel arrangements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Abstract

A method of packaging a semiconductor die includes the steps of providing a flange (110), coupling one or more active die (341) to the flange with a lead-free die attach material (350), staking a leadframe (120) to the flange after coupling the one or more active die to the flange, electrically interconnecting the one or more active die and the leadframe with an interconnect structure (470), and applying a plastic material (130) over the flange, the one or more active die, the leadframe, and the interconnect structure.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This is a continuation application of application Ser. No. 11/336,368, filed on Jan. 20, 2006.
  • FIELD OF THE INVENTION
  • This invention relates generally to semiconductor components, and relates more particularly to packaging for semiconductor components.
  • BACKGROUND OF THE INVENTION
  • Semiconductor die or chips are encapsulated in a semiconductor package for protection from damage by external stresses and to provide a system for carrying electrical signals to and from the chips. Many different types of semiconductor packages exist, including dual-in-line packages, pin grid array packages, tape-automated bonding (TAB) packages, multi-chip modules (MCMs), and power packages. One type of power package is a high power package that is used for a high power semiconductor device and that is capable of dissipating greater than ten watts of power.
  • Typically, these power packages use a relatively high resistivity die attach materials that have a high lead content, a large thickness, and a low thermal conductivity of approximately twenty to thirty watts per meter Kelvin (w/m-K). Each of these characteristics contribute to heat transfer problems during device operation. Radio frequency and other high frequency power packages also typically have an air cavity enclosed by ceramic components, which are expensive. Lower cost high frequency encapsulated power packages are typically limited to a single semiconductor chip per package, which requires: (1) matching components to be located on the same chip as the high power semiconductor device, which can result in lossy devices with lower electrical performance; or (2) matching components and/or other components to be located on one or more different chips in different packages and requires a larger footprint or a larger amount of space in the final product for multiple packages.
  • Accordingly, a need exists for a low cost package for a high power semiconductor device that has improved thermal conductivity for improved reliability, that is less expensive than air cavity packages, that can be used to package multiple semiconductor chips in a single package, and that is compatible with high frequency applications above approximately three hundred MegaHertz (MHz).
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The invention will be better understood from a reading of the following detailed description, taken in conjunction with the accompanying figures in the drawings in which:
  • FIG. 1 illustrates an isometric view of a package for a high power semiconductor device in accordance with an embodiment of the invention;
  • FIG. 2 illustrates an isometric view of the package of FIG. 1 during an initial step of the packaging process in accordance with an embodiment of the invention;
  • FIG. 3 illustrates an isometric view of the package of FIG. 2 during a subsequent step of the packaging process in accordance with an embodiment of the invention;
  • FIG. 4 illustrates an isometric view of the package of FIG. 3 during a later step of the packaging process in accordance with an embodiment of the invention;
  • FIG. 5 illustrates a partial cross-sectional, isometric view of the package of FIG. 4 during an even later step of the packaging process in accordance with an embodiment of the invention; and
  • FIG. 6 illustrates a flow chart of a method of assembling a semiconductor structure or semiconductor packaging system in accordance with an embodiment of the invention.
  • For simplicity and clarity of illustration, the drawing figures illustrate the general manner of construction, and descriptions and details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the invention. Additionally, elements in the drawing figures are not necessarily drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of embodiments of the present invention. The same reference numerals in different figures denote the same elements.
  • The terms “first,” “second,” “third,” “fourth,” and the like in the description and in the claims, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms “comprise,” “include,” “have,” and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements is not necessarily limited to those elements, but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
  • The terms “left,” “right,” “front,” “back,” “top,” “bottom,” “over,” “under,” and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in other orientations than those illustrated or otherwise described herein. The term “coupled,” as used herein, is defined as directly or indirectly connected in an electrical, mechanical, chemical, or other manner.
  • DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
  • FIG. 1 illustrates an isometric view of a package 100 for a semiconductor die. Package 100 includes a flange 110, one or more active die (not illustrated in FIG. 1) coupled to flange 110 with a lead-free die attach material (not illustrated in FIG. 1), a leadframe 120 staked or otherwise attached in a precise manner to flange 110, an interconnect structure (not illustrated in FIG. 1) electrically coupling together leadframe 120 and the one or more active die, and a plastic material 130 over flange 110, the one or more active die, leadframe 120, and the interconnect structure. In some embodiments where the active die include a high power semiconductor device, package 100 can be referred to as a high power semiconductor component.
  • As explained in more detail below, package 100 is more environmentally friendly, has better thermal conductivity, has better reliability, is less expensive, and requires less space than typical high power packages. More specifically, the lead-free die attach material provides package 100 with its more environmentally friendly characteristic, and the use of, for example, a gold silicon die attach and a copper or other non-ceramic flange provides package 100 with its better thermal conductivity and lowered thermal resistivity, which produces improved reliability characteristics over the ceramic-based, air cavity packages. Additionally, the exemplary copper flange and exemplary plastic overmolded material allow package 100 to be less expensive than the ceramic-based packages. Furthermore, the ability to package more than one semiconductor chip within the package permits package 100 to either: (1) have a smaller footprint and occupy less space within a final product compared to a typical two package solution; or (2) have a less lossy and improved electrical performance compared to a typical single integrated chip solution.
  • Turning to the next drawing, FIG. 2 illustrates, in general, an isometric view of package 100 in FIG. 1 during an initial step of the packaging process. More specifically, FIG. 2 illustrates an isometric view of flange 110. Flange 110 serves as a subsequent mounting surface for the semiconductor chips or die and can be part of a leadframe-type structure where multiple flanges are coupled together during this stage of the packaging process.
  • In some embodiments, flange 110 also serves as a heatsink and, in such embodiments, can be referred to as a heatsink. When flange 110 serves as a heat sink, flange 110 can be comprised of a high thermal conductivity material such as, for example, copper. In this embodiment, flange 110 can have a high thermal conductivity of greater than approximately three hundred fifty w/m-K.
  • As illustrated in FIG. 2, flange 110 includes two or more features 211. As illustrated in the drawings, features 211 can be through-holes in flange 110, but in a different embodiment, features 211 can extend only part of the way through flange 110. In yet another embodiment, features 211 can be a protrusion that rises above the top surface of flange 110. As an example, each of features 211 can have a cylindrical cross-section and can be approximately five hundred micrometers in diameter or can have a diameter varying from approximately four hundred to one thousand micrometers. As another example, each of features 211 can have a constant or varying rectangular cross-section through the thickness of flange 110. One skilled in the art will understand that flange 110 can include more or less than two features and that the one or more features can have a variety of shapes and can be arranged in a variety of configurations. Regardless of their shapes and configurations, features 211 can serve as a region for precisely staking the leadframe to flange 110 and can also serve as a mold lock for the subsequent overmolded plastic material. Flange 110 can also include other mold locks.
  • As also illustrated in FIG. 2, flange 110 can include features 212. Features 212 can be located at opposite ends of flange 110 and can be used for attaching package 100 to a printed circuit (PC) board, another heatsink, or other system or product. FIG. 2 depicts two features having a particular shape, but the specific quantity and shape of features 212 may vary.
  • In one embodiment, flange 110 can comprise two or more layers or materials such as, for example, materials 213 and 214. In this embodiment, material 214 can be more ductile and/or more thermally conductive than material 213, and material 213 can be more rigid than material 214. In this manner, flange 110 can be a composite flange with a top surface that is better suited for improving die integrity and a bottom surface that is better suited for improving the mechanical integrity of package 100. As an example, material 213 can be a material known in the art as “copper 151,” and material 214 can be a material known in the art as “copper 102.”
  • Regardless of the number of layers that flange 110 contains, however, flange 110 can be thinner than other flanges or heatsinks because of the use of an overmolded plastic package. As an example, flange 110 can have a thickness of approximately 33 mils or 0.84 millimeters. As part of this embodiment or as part of a different embodiment, material 214 can be selectively plated with a suitable metal such as, for example, gold to be compatible with a subsequent die attach step. In this embodiment, the remainder of flange 110 is not coated with gold to improve the subsequent adhesion between plastic material 130 and flange 110.
  • In the same or a different embodiment, flange 110 can include a recess 215 at a perimeter of its bottom surface (i.e., material 213). For improved package integrity, a subsequently molded packaging material can be molded over the top surface of flange 110, over the side surfaces of flange 110, and in recess 215 such that the packaging material is flush or co-planar with the bottom surface of flange 110. In this manner, package 100 can be a surface-mountable package.
  • FIG. 3 illustrates, generally, an isometric view of package 100 during a subsequent step of the packaging process. More specifically, FIG. 3 illustrates several semiconductor chips or die 341 and 342, where each of die 341 are located between two of die 342. In one embodiment, package 100 includes only a single die 341, and in a different embodiment, package 100 includes only a single die 341 and a single or multiple die 342. In an embodiment having multiple die, the relative locations of the die may vary from the locations illustrated in FIG. 3.
  • Die 341 are active die, each of which have at least one active device. As an example, the active device can be a high power transistor that dissipates greater than approximately ten watts, a high frequency transistor operating a frequency greater than approximately three hundred MHz, or a high power and high frequency transistor. Die 341 can also be devoid of or without any passive devices. In the same or a different embodiment, die 342 are passive die, each of which have at least one passive device. As an example, the passive device can be a capacitor, resistor, inductor, or the like. Die 342 can also be devoid of or without any active devices.
  • In this multi-die configuration having separate active die packaged together with high frequency matching or passive components, the high frequency performance of the component can be improved by reducing the detrimental effects of lossy silicon without sacrificing additional space within the final product and while maintaining industry standard package outlines. The multi-die configuration can also improve the high frequency performance of the component by including multiple matching stages to obtain a higher Q factor and improved impedance. The multi-die configuration can further improve the electrical performance of the component by spreading out the die layout over flange 110 to improve the heat dissipation from the die, particularly when the power density is high, and with the improved heat dissipation, the active devices or transistors can have shorter finger lengths and more fingers to achieve the same output power. Finally, the multi-die configuration can shorten the design cycle time over that of integrated circuit, single die solutions.
  • Die 341 and 342 can comprise different materials or the same materials with the same or different orientations. For example, die 341 can comprise silicon for active devices, and die 342 can comprise gallium arsenide or other substrate materials for passive structures. To improve the high frequency performance of the component, die 341 can be thinned to approximately one to four mils or approximately twenty-five to one hundred micrometers.
  • Die 341 and 342 are coupled to the top surface of flange 110 using a lead-free die attach 350. As an example, die attach 350 can comprise a metallurgical die attach material, such as gold silicon, having a melting temperature greater than approximately 250 degrees Celsius. As another example, die attach 350 can comprise gold tin or the like. In a different embodiment where die 341 and 342 are comprised of different materials, one lead-free metallurgical die attach material can be used to couple die 341 to flange 110, and a different die attach material can be used to couple die 342 to flange 110. As an example, the different die attach material can be a non-metallurgical die attach material.
  • FIG. 4 illustrates an isometric view of package 100 during a later step of the packaging process. More specifically, FIG. 4 illustrates a leadframe 120 having leads 421, tie bars, dam bars, and the like. In one embodiment, leadframe 120 comprises copper and other non-precious metals to lower the cost of package 100.
  • After coupling die 341 and 342 to flange 110, leadframe 120 and flange 110 are coupled together using a staking process. As an example, the staking process can be a high precision mechanical staking process, laser joining process, or spot welding process. As an example of a high precision mechanical staking process, stakes 460 can be inserted into holes in leadframe 120 and in features 211 of flange 110 to precisely couple together leadframe 120 and flange 110. In one embodiment, features 211 can be electrically insulated such that after the staking process, leadframe 120 and flange 110 remain or are kept electrically isolated from each other. In a different embodiment, stakes 460 can be electrically insulated to accomplish the same function. In another embodiment where features 211 are protrusions extending from the top surface of flange 110, the staking process can include inserting the protrusions into the holds in leadframe 120. The high precision staking process can attach leadframe 120 to flange 110 to within an accuracy of at least approximately +/−1 mils or +/−25.4 micrometers.
  • When flange 110 comprises layers or materials 213 and 214, the staking process can also stake materials 213 and 214 together such that, prior to the staking, materials 213 and 214 are separate layers and such that, after the staking, materials 213 and 214 are joined together. In another embodiment, stakes 460 can be used to first join together materials 213 and 214, and later, stakes 460 can be used to precisely align and attach leadframe 120 to flange 110.
  • In the same or a different embodiment, after the staking process, leadframe 120 and flange 110 are non-coplanar with each other. For example, a bottom surface of leadframe 120 can be non-coplanar with the bottom surface of flange 110, and a top surface of leadframe 120 can be non-coplanar with the top surface of flange 110, as illustrated in FIG. 4.
  • FIG. 4 also illustrates an interconnect structure 470. As an example, interconnect structure 470 can comprise wire bonds. In this example, the wire bonds can comprise aluminum when die 341 are comprised of silicon, and the wire bonds can comprise gold when die 341 are comprised of gallium arsenide. In the preferred embodiment, package 100 contains a single type of wire bond, but package 100 can contain different types of wire bonds when die 341 and 342 comprise different substrate materials. In a different embodiment, interconnect structure 470 can comprise tape automated bonding (TAB) or ribbon bonding. Interconnect structure 470 electrically interconnects die 341 and 342 to each other and to leads 421 of leadframe 120. In one embodiment, interconnect structure 470 can also electrically interconnect one or more of die 341 and 342 and/or leads 421 of leadframe 120 to flange 110.
  • FIG. 5 illustrates a partial cross-sectional, isometric view of package 100 during an even later step of the packaging process. More specifically, FIG. 5 illustrates a plastic material 130. As an example, plastic material 130 can comprise a glass-filled epoxy-based plastic and can reinforce or improve the strength of package 100 that is provided by flange 110. In one embodiment, plastic material 130 can be molded over flange 110, die 341 and 342 (FIG. 3), leadframe 120, interconnect structure 470 (FIG. 4). More specifically, plastic material 130 can be overmolded over a portion of flange 110, die 341 and 342, portions of leadframe 120, interconnect structure 470. In one embodiment, regardless of whether features 211 are through-holes or protrusions, features 211 (and stakes 460, when used) can serve as mold locks to improve the adhesion of plastic material 130 to flange 110.
  • In the same or a different embodiment where the bottom surface of flange 110 has recess 215, plastic material 130 can also be molded over the sides of flange 110 and in recess 215 (underneath flange 110) to further improve the adhesion of plastic material 130 to flange 110 and to make package 100 a surface-mount component. In a different embodiment, plastic material 130 is not molded over the sides of flange 110 or in recess 215, if any. In this different embodiment, the sides of flange 110 remain substantially exposed.
  • Next, leadframe 120 can be singulated by cutting the tie and dam bars of leadframe 120 such that leads 421 are no longer electrically coupled together by leadframe 120. In an embodiment where flange 110 was part of a different leadframe, flange 110 can also be singulated at this time from the other flanges in the different leadframe. Finally, leads 421 can be bent into a desired configuration.
  • FIG. 6 illustrates a flow chart of a method 600 of packaging a semiconductor die. In general, according to an embodiment of the invention, method 600 includes the steps of providing a flange, coupling one or more active die to the flange with a lead-free metallurgical die attach material, staking a leadframe to the flange after coupling the one or more active die to the flange, electrically interconnecting the one or more active die and the leadframe with an interconnect structure, and applying a plastic material over the flange, the one or more active die, the leadframe, and the interconnect structure.
  • More specifically, as illustrated in FIG. 6, method 600 includes a step 601 for providing a flange. As an example, the flange of step 601 can be similar to flange 110 in FIG. 2, and the flange of step 601 can have one or more of features 211 and 212 and recesses 215 and can also have one or more of materials 213 and 214, among other characteristics. Additionally, the flange of step 610 can be part of a leadframe having multiple flanges, as described for flange 110 in FIG. 2.
  • As also previously described for flange 110, the flange of step 601 in FIG. 6 can be selectively plated to provide a portion of the top surface of the flange to be suitable for a subsequent die attach step. In one embodiment, this selectively plating step can be part of step 601.
  • Method 600 in FIG. 6 also includes a step 602 for providing one or more semiconductor die. As an example, the die of step 602 can be similar to one or more of die 341 and/or 342 in FIG. 3. One skilled in the art will understand that the sequence of steps 601 and 602 can be interchanged with each other.
  • Returning to FIG. 6, method 600 includes a step 603 is for coupling the one or more semiconductor die to the flange with a lead-free metallurgical die attach material. As an example, the die attach material of step 603 can be similar to die attach 350 in FIG. 3. In one embodiment, step 603 is performed in a heated chamber or on a heated support surface, and the semiconductor die are scrubbed against the flange, or vice versa, during the coupling process to improve the precision of the location of the die.
  • In the same or a different embodiment, the die attach material can be plated or otherwise deposited on the back surface of the semiconductor die during the manufacturing process of the semiconductor die and before the semiconductor die is singulated from a wafer. This process is preferred over using a perform and other techniques known in the art because this process improves the thermal conductivity compared to the use of performs due to the fact that the die attach material can be thinner and can have a lower thermal resistivity than that of performs. As described previously, in one embodiment, different die attach material can be used for different semiconductor die.
  • Next, after step 603, method 600 continues with a step 604 for staking the leadframe to the flange. As an example, the staking step or process can be similar to that described previously with reference leadframe 120 in FIG. 4. In the preferred embodiment, step 604 occurs at a relatively lower temperature compared to other leadframe attachment processes.
  • Also in the preferred embodiment, step 604 occurs after step 603. Using these two particular steps in this particular sequence, the die attach material of step 603 can have a lower melting temperature than in prior art methods, which enables the use of a wider range of materials for the die attach material. Also, the leadframe and the die can be positioned relative to each other with improved precision such that the length of the subsequent electrical interconnect structure (i.e., wire bonds) is more consistent for more precise parasitic inductance from the interconnect structure, which results in improved high frequency performance.
  • Method 600 also includes a step 605 for electrically interconnecting the one or more semiconductor die and the leadframe with an interconnect structure. As an example, the interconnect structure can be similar to interconnect structure 470 in FIG. 4. In one embodiment, step 605 can include electrically interconnecting the one or more semiconductor die with the flange, as explained previously for interconnect structure 470 in FIG. 4. In the same or a different embodiment, steps 604 and 605 can occur simultaneously with each other.
  • Next, after step 605, method 600 continues with a step 606 for overmolding or otherwise applying a plastic material over the flange, the one or more active die, the leadframe, and the interconnect structure. As an example, the plastic material of step 606 can be similar to plastic material 130 in FIG. 5. In one embodiment, the semiconductor die can be coated or otherwise passivated before step 606.
  • Then, method 600 continues with a step 607 for singulating leads of the leadframe, as described previously with respect to leads 421 of leadframe 120 in FIG. 5, and in one embodiment, method 600 can also include a step 608 for singulating the multiple flanges from each other. Step 608 can occur before, after, or simultaneously with step 607.
  • As illustrated in FIG. 6, method 600 also includes a step 609 for bending the leads into a pre-determined shape. The bending process of step 609 can include forming the leads into the pre-determined shape. As an example, step 609 can form the leads to create a package that is a surface mount package.
  • Although the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes may be made without departing from the spirit or scope of the invention. Various examples of such changes have been given in the foregoing description. Accordingly, the disclosure of embodiments of the invention is intended to be illustrative of the scope of the invention and is not intended to be limiting. It is intended that the scope of the invention shall be limited only to the extent required by the appended claims. For example, to one of ordinary skill in the art, it will be readily apparent that the configuration, geometry, shape, and size of recess 211 in FIG. 2 may vary, and that the foregoing discussion of certain of these embodiments does not necessarily represent a complete description of all possible embodiments. Similarly, the material compositions of the various elements of package 100 may vary from the details described above.
  • All elements claimed in any particular claim are essential to the invention claimed in that particular claim. Consequently, replacement of one or more claimed elements constitutes reconstruction and not repair. Additionally, benefits, other advantages, and solutions to problems have been described with regard to specific embodiments. The benefits, advantages, solutions to problems, and any element or elements that may cause any benefit, advantage, or solution to occur or become more pronounced, however, are not to be construed as critical, required, or essential features or elements of any or all of the claims.
  • Moreover, embodiments and limitations disclosed herein are not dedicated to the public under the doctrine of dedication if the embodiments and/or limitations: (1) are not expressly claimed in the claims; and (2) are or are potentially equivalents of express elements and/or limitations in the claims under the doctrine of equivalents.

Claims (20)

1. A method of packaging a semiconductor die comprising the steps of:
providing a flange;
coupling one or more active die to the flange with a lead-free die attach material;
after coupling the one or more active die to the flange, staking a leadframe to the flange;
electrically interconnecting the one or more active die and the leadframe with an interconnect structure; and
applying a plastic material over the flange, the one or more active die, the leadframe, and the interconnect structure.
2. The method of claim 1 wherein:
the step of coupling the leadframe to the flange and the step of electrically interconnecting the one or more active die and the leadframe occur simultaneously with each other.
3. The method of claim 1 wherein:
the step of coupling the leadframe to the flange further comprises keeping the leadframe and the flange electrically isolated from each other.
4. The method of claim 1 wherein:
the step of providing the flange further comprises providing multiple flanges coupled together in a leadframe-type structure; and
after applying the plastic material, further comprising:
singulating leads of the leadframe; and
singulating the flange.
5. The method of claim 1 wherein:
the step of coupling the one or more active die to the flange further comprises providing the lead-free die attach material with a melting temperature greater than approximately 250 degrees Celsius.
6. The method of claim 1 wherein:
the step of coupling the leadframe to the flange further comprises coupling the leadframe to the flange such that a bottom surface of the leadframe is not co-planar with a bottom surface of the flange and such that a top surface of the leadframe is not co-planar with a top surface of the flange.
7. The method of claim 1 wherein:
the step of coupling one or more active die to the flange further comprises coupling two or more high power, active die to the flange.
8. The method of claim 1 further comprising:
coupling one or more passive die to the flange with an other lead-free die attach material, wherein the other lead-free die attach material is different from the lead-free die attach material.
9. The method of claim 1 wherein:
the step of electrically interconnecting the one or more active die and the leadframe further comprises electrically interconnecting the one or more active die to the flange.
10. A method of packaging a high power and high frequency semiconductor die comprising the steps of:
providing a heatsink;
providing at least two semiconductor die, wherein at least a first one of the at least two semiconductor die has at least one high power, active device and wherein at least a second one of the at least two semiconductor die has at least one passive device;
using a lead-free, gold silicon die attach to couple the at least two semiconductor die to the heatsink;
after the step of using a gold silicon die attach, mechanically staking a leadframe and the heatsink together;
using wire bonds to electrically interconnect the at least two semiconductor die to the leadframe;
overmolding a plastic material over the at least two semiconductor die, the gold silicon die attach, the wire bonds, and at least a portion of the leadframe; and
singulating leads of the leadframe.
11. The method of claim 10 wherein:
the step of providing the heatsink further comprises providing the heatsink comprised of a first material and a second material;
the first material is more ductile and thermally conductive than the second material;
the second material is more rigid than the first material; and
the first material is closer to the at least two semiconductor die than the second material.
12. The method of claim 11 wherein:
the step of mechanically staking further comprises mechanically staking the first and second materials of the heatsink together; and
after the step of mechanically staking, the leadframe and the heatsink are non-coplanar with each other.
13. The method of claim 10 wherein:
the step of providing the heatsink further comprises providing the heatsink with at least one feature; and
the step of mechanically staking further comprises mechanically staking the leadframe to the at least one feature of the heatsink.
14. The method of claim 13 wherein:
the at least one feature of the heatsink is a through-hole in the heatsink; and
the step of overmolding the plastic material further comprises using the through-hole in the heatsink as a mold lock for the plastic material.
15. The method of claim 10 wherein:
the step of providing the at least two semiconductor die further comprises:
providing the at least the first one of the at least two semiconductor die without a passive device; and
providing the at least the second one of the at least two semiconductor die without an active device.
16. The method of claim 15 wherein:
the step of providing the at least two semiconductor die further comprises providing an additional semiconductor die;
the additional semiconductor die has a first high power transistor and is devoid of a passive device; and
the at least one high power, active device of the first one of the at least two semiconductor die is a second high power transistor.
17. The method of claim 10 wherein:
the step of providing the heatsink further comprises selectively plating the heatsink.
18. The method of claim 10 wherein:
the step of using the lead-free, gold silicon die attach further comprises using a heated scrubbing process to attach the at least two semiconductor die to the heatsink.
19. The method of claim 10 wherein:
the step of providing the heatsink further comprises providing a recess at a perimeter of a bottom surface of the heatsink;
the step of using the lead-free, gold silicon die attach further comprises coupling the at least two semiconductor die to a top surface of the heatsink;
the step of overmolding the plastic material further comprises overmolding the plastic material under the heatsink and in the recess of the bottom surface of the heatsink; and
further comprising bending the leads to form a surface mount package for the high power semiconductor die.
20. A semiconductor component comprising:
a flange;
two or more active die coupled to the flange with a lead-free die attach material;
a leadframe and the flange staked together;
an interconnect structure electrically coupling together the two or more active die and the leadframe; and
a plastic packaging material over the flange, the two or more active die, the leadframe, and the interconnect structure.
US12/242,622 2006-01-20 2008-09-30 Method of packaging a semiconductor die Abandoned US20090023248A1 (en)

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US7445967B2 (en) 2008-11-04
TW200737373A (en) 2007-10-01
CN101371333A (en) 2009-02-18
US20070172990A1 (en) 2007-07-26
WO2007100927A2 (en) 2007-09-07
WO2007100927A3 (en) 2008-02-21

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