US20080264863A1 - Microfluidic Sieve Valves - Google Patents

Microfluidic Sieve Valves Download PDF

Info

Publication number
US20080264863A1
US20080264863A1 US11/792,170 US79217005A US2008264863A1 US 20080264863 A1 US20080264863 A1 US 20080264863A1 US 79217005 A US79217005 A US 79217005A US 2008264863 A1 US2008264863 A1 US 2008264863A1
Authority
US
United States
Prior art keywords
sieve
valve
beads
channel
valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/792,170
Inventor
Stephen R. Quake
Joshua S. Marcus
Carl L. Hansen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Original Assignee
California Institute of Technology CalTech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech filed Critical California Institute of Technology CalTech
Priority to US11/792,170 priority Critical patent/US20080264863A1/en
Assigned to CALIFORNIA INSTITUTE OF TECHNOLOGY reassignment CALIFORNIA INSTITUTE OF TECHNOLOGY ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: QUAKE, STEPHEN R., HANSEN, CARL L., MARCUS, JOSHUA S.
Publication of US20080264863A1 publication Critical patent/US20080264863A1/en
Assigned to NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT reassignment NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: CALIFORNIA INSTITUTE OF TECHNOLOGY
Assigned to ENERGY, UNITED STATES DEPARTMENT OF reassignment ENERGY, UNITED STATES DEPARTMENT OF CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: CALIFORNIA INSTITUTE OF TECHNOLOGY
Abandoned legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/281Sorbents specially adapted for preparative, analytical or investigative chromatography
    • B01J20/286Phases chemically bonded to a substrate, e.g. to silica or to polymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0026Valves using channel deformation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0055Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/60Construction of the column
    • G01N30/6004Construction of the column end pieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2220/00Aspects relating to sorbent materials
    • B01J2220/50Aspects relating to the use of sorbent or filter aid materials
    • B01J2220/54Sorbents specially adapted for analytical or investigative chromatography
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/0074Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/008Multi-layer fabrications
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0084Chemistry or biology, e.g. "lab-on-a-chip" technology
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/60Construction of the column
    • G01N30/6004Construction of the column end pieces
    • G01N30/603Construction of the column end pieces retaining the stationary phase, e.g. Frits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/60Construction of the column
    • G01N30/6095Micromachined or nanomachined, e.g. micro- or nanosize

Definitions

  • the present invention relates to microfabricated devices and microchromatography.
  • Microfluidic devices may be used in a variety of biomedical and pharmaceutical applications, including analysis, preparation and synthesis of chemical compounds and analysis and manipulation of cells, proteins and nucleic acids.
  • the ability to concentrate or chromatographically separate compounds in a microfluidic environment enhances the utility of microfluidic devices.
  • a rapid, inexpensive and effective method for performing chromatography and for microfluidic chromatography columns would be of great benefit.
  • the present invention meets these and many other needs.
  • the invention provides a microfabricated sieve valve structure having an elastomeric membrane that separates a first channel lumen and a second channel lumen, where pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 50% of the cross-sectional area when the membrane is not deflected.
  • the cross-sectional profile of the second channel is rectangular.
  • pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 75% of the cross-sectional area when the membrane is not deflected.
  • the range of pressures is a range of at least 7 psi, optionally at least 10 psi, optionally at least 15 psi or encompasses a range of 22-26 psi, optionally 20-28 psi, and optionally 18-30 psi.
  • the sieve valve has a retention size of from 1 micron to 20 microns.
  • the invention provides a microfluidic device having two or more sieve valves.
  • a chromatographic separation medium is disposed between two sieve valves thereby forming a separation column.
  • the device has more than 20 separation columns.
  • the invention provides a microfluidic device comprising a microfluidic chromatography column, the column comprising a chromatographic separation medium disposed behind a sieve valve, and optionally disposed between two sieve valves.
  • the chromatographic separation medium comprises a polymeric bead coupled to a ligand.
  • beads have been derivatized to bind a nucleic acid (e.g., oligo(dT)) or a protein (e.g., an antibody).
  • the invention provides a microfluidic device with two or more sieve valves paired with conventional valves. In a related aspect the invention provides a microfluidic device that contains five or more sieve valves paired with conventional valves.
  • the invention provides a method of making a microfluidic column in a microfluidic device, wherein the device comprises a flow channel and a sieve valve positioned to reduce the cross-sectional area of the lumen of the flow channel when closed.
  • the method involves providing a suspension of chromatography beads in the flow channel ante to the sieve valve, where the valve is closed and the beads are of a size that is retained by the closed sieve valve; flowing the suspension through the flow channel, whereby the movement of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel.
  • the device has two or more sieve valves each positioned to reduce the cross-sectional area of the lumen of the flow channel when closed
  • the method of making a microfluidic column in a microfluidic device includes providing the suspension of chromatography beads ante to a second sieve valve, wherein the second sieve valve is open and is ante to the closed sieve valve, and wherein the beads are of a size that is retained by the second sieve valve; flowing the suspension of chromatographic beads through the flow channel through and past the second sieve valve, wherein the flow of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel; and, closing the second sieve valve, thereby trapping the beads betwixt the sieve valves.
  • the invention provides a method for trapping particles in a microfluidic flow channel of a microfluidic device, by providing a suspension of the particles in a flow channel ante to a closed sieve valve, wherein the particles are of a size that is retained by the closed sieve valve; flowing the suspension through the flow channel, whereby the movement of the particles is impeded by the closed sieve valve and the solution in which the particles are suspended flows through the flow channel, thereby trapping the particles in the flow channel.
  • the particles are living cells.
  • FIG. 1 Schematic representations illustrate the operation mechanisms of (A) a regular valve having a round-profiled fluidic channel and (B) a sieve valve having a rectangular-profiled fluidic channel.
  • A a regular valve having a round-profiled fluidic channel
  • B a sieve valve having a rectangular-profiled fluidic channel.
  • the elastic membranes expand into the fluidic channels.
  • the fluidic channel is completely sealed because of the perfect fit between the expended membranes and the round profile of the fluidic channel.
  • the square-profiled fluidic channel is only partially closed, which allows fluid to flow through the two edges.
  • Sieve valves can be used to confine solid objects within the fluidic channel, but allow liquid to flow through it.
  • (C) Schematic illustration of the loading of anion exchange beads into a column module incorporating one fluidic channel and five sieve and five regular valves. [ ⁇ ], open valve; [X], closed valve. A suspended solution of anion exchange beads is introduced into the column modules where five sieve valves and five regular valves operate cooperatively to trap anion exchange beads inside the fluidic channel (total volume: 10 nL). A miniaturized anion exchange column for fluoride concentration is achieved when the fluidic channel is fully loaded. (D) A snapshot of the bead-loading process in action.
  • FIG. 2 A schematic representation corresponding to the column module of FIG. 1 .
  • FIG. 3 Microfluidic filter valve.
  • a Sampling of parameter space sufficient to build functional bead columns. Triangles represent the filter valve method (200 ⁇ 200 um valve, 13 um tall) and circles (100 ⁇ 100 um valve, 13 um tall) represent the previous approach using slightly opened valves (Hong et al., 2004 , Nat Biotechnol. 22:435-9). The flow channel pressure is the pressure applied to the bead inlet and the column pressure is the pressure applied to the column valve's inlet. Parameter space is measured by if the beads escape to waste.
  • b.-d Optical micrographs of the filter valve. Scale bars are 100 ⁇ m.
  • c Cross section of the valve and open channel above it.
  • d Cross section of the actuated filter valve and pinched off channel.
  • FIG. 4 A microfluidic device with 20 columns (yellow) in multiplex format. Flow channels are shown in white and control channels in purple. Scale bars are 800 ⁇ m.
  • the present invention provides a microfluidic device having at least one “sieve valve.”
  • the invention provides a microfluidic device having at least one chromatography module comprising a chromatographic separation medium held in place in a microfluidic channel by one or more “sieve valves,” or a method for making such a module.
  • the invention provides a device adapted for forming a chromatography module as described.
  • the sieve valves of the invention have an elastomeric component and, in a preferred embodiment, the microfluidic channel is fabricated from an elastomeric material.
  • Microfluidic devices both elastomeric and nonelastomeric, are widely known. Thus, the ordinarily skilled artisan will be familiar with such devices, their components and features, and methods of fabrication. For purposes of the following discussion it is assumed the reader is familiar with microfluidic devices generally, and in particular is familiar with elastomeric devices fabricated using multilayer soft lithography (MSL) methods and comprising flow channels, control channels, valves, pumps and other microfluidic and auxiliary components.
  • MSL multilayer soft lithography
  • flow channel refers to a microfluidic channel through which a solution can flow.
  • the dimensions of flow channels can vary widely but typically include at least one cross-sectional dimension (e.g., height, width, or diameter) less than 1 mm, preferably less than 0.5 mm, and often less than 0.3 mm. Different flow channels in a particular microfluidic device may have different dimensions, depending on the function of the particular channel.
  • the flow channel has a low aspect ratio (e.g., a height to width ratio of less than 1:5, preferably less than 1:10; sometimes less than 1:15).
  • the height of the rectangular channel in which a sieve valve is positioned is about 10 microns, with a width of 200 microns. In some embodiments of the invention, the height of the (rectangular) channel in which a sieve valve is positioned is less than about 30 microns, often less than about 20 microns, and very often less than about 15 microns.
  • control channel is a channel separated from a flow channel by an elastomeric membrane that can be deflected into or retracted from the flow channel in response to an actuation force.
  • the dimensions of control channels can vary widely but typically include at least one cross-sectional dimension (e.g., height, width, or diameter) less than 1 mm, preferably less than 0.5 mm, and often less than 0.3 mm.
  • a control channel has dimensions of 250 micrometers wide by 250 micrometers high.
  • a control channel has dimensions of 300 micrometers wide by 50 micrometers high.
  • Elastomeric valves consist of a configuration in which two microchannels are separated by an elastomeric segment that can be deflected into or retracted from one of the channels (a flow channel) in response to an actuation force applied to the other channel (a control channel).
  • the elastomeric segment has a substantially constant thickness (i.e., the thickness does not vary more than 25%, preferably not more than 5%).
  • the elastomeric segment is usually between 1 micron and 50 microns in thickness, preferably between 5 microns and 20 microns in thickness.
  • elastomeric valves include, without limitation, upwardly-deflecting valves (see, e.g., US 20050072946), downwardly deflecting valves (see, e.g., U.S. Pat. No. 6,408,878), side actuated valves (see, e.g., US 20020127736).
  • the elastomeric segment may be substantially In one embodiment the valve is a push-down valve and the elastomeric segment has a convex shaped membrane (thin in the center [e.g., 10 ⁇ m] and thicker at the edges [e.g., 46 ⁇ m].
  • the valve is a push-up valve and the elastomeric segment has a uniform thickness (e.g., 5-15 microns).
  • the flow channel has a rounded surface opposite the elastomeric segment, so that the deflected membrane can form a tight seal with the inner surface of the channel.
  • the flow channel section is bounded by a circular arc 300 ⁇ m in width and 50 ⁇ m in height.
  • Valves can be actuated by injecting gases (e.g., air, nitrogen, and argon), liquids (e.g., water, silicon oils and other oils), solutions containing salts and/or polymers (including but not limited to polyethylene glycol, glycerol and carbohydrates) and the like into the control channel, a process referred to as “pressurizing” the control channel.
  • gases e.g., air, nitrogen, and argon
  • liquids e.g., water, silicon oils and other oils
  • solutions containing salts and/or polymers including but not limited to polyethylene glycol, glycerol and carbohydrates
  • pressurizing a process referred to as “pressurizing” the control channel.
  • monolithic valves with an elastomeric component and electrostatic, magnetic, electrolytic and electrokinetic actuation systems may be used. See, e.g., US 20020109114; US 20020127736, and U.S. Pat. No. 6,767,706.
  • a sieve valve (also called a “filter valve”) is a type of elastomeric valve. Like a conventional valve, the sieve valve consists of a configuration in which a control channel and a flow channel are separated by an elastomeric segment that can be deflected into the flow channel in response to an actuation force applied to the control channel.
  • small gap(s) between the elastomeric segment and the flow channel walls permit fluid to flow through the channel even with the elastomeric segment is maximally deflected into the flow channel.
  • FIG. 1 The figure illustrates the operation mechanisms of (A) a regular valve having a round-profiled fluidic channel and (B) a sieve valve having a rectangular-profiled fluidic channel.
  • the elastic membranes deflect into the fluidic channels.
  • the valve membranes deflect in an elliptic shape.
  • FIG. 1A the deflected membrane is fully compliant to the round-profile fluidic channel lead to complete close of the valve.
  • FIG. 1B For a sieve valve ( FIG. 1B ), a deflected membrane partially closes the valve, for example generating two small gaps the two channel edges of a rectangular-profile channel through which fluid can flow.
  • sieve valves can be used to confine solid objects within the fluidic channel, but allow liquid to flow through it, when a suspension of a particulate chromatographic separation material (“beads” or “chromatography beads”) is introduced into the flow channel the beads are trapped by the closed sieve valve and while the solution is allowed to pass through.
  • beads e.g., ion exchange resin, affinity resin, size exclusion, etc.
  • the chromatography beads are roughly spherical and have diameters of between about 1 micron and 15 microns, such as approximately 1, approximately 2, approximately 3, approximately 4, approximately 5, approximately 6, approximately 7, approximately 8, approximately 9, approximately 10, approximately 11, approximately 12, approximately 13, or approximately 14 microns.
  • the elastomeric segment of the sieve valve is upwardly deflecting, as shown in FIG. 1 .
  • downward and sideways deflecting channels for example, can also be used.
  • a sieve valve is comprised of an elastomeric segment that can be deflected into a channel true “rectangular-profiled” fluidic channel.
  • a cross-sectional profile of the portion of the channel opposite the elastomeric segment does not have the shape of a section (arc) of a circle or ellipse or other conical section (assuming an orientation in which the elastomeric segment is located at the concave face of the circle or ellipse).
  • a sieve valve is comprised of an elastomeric segment that can be deflected into a true “rectangular-profiled” fluidic channel.
  • “Rectangular-profiled” means the cross-section has the profile of a rectangle, and comprises first and second sides, which are opposite each other and of approximately equal length, and a third side (floor) at right angles to the first and second sides. It will be appreciated that deflection of the elastomeric segment onto channels with somewhat different profiles will also achieve the desired result of allowing liquid to flow through will retaining particles.
  • the cross-sectional profile of the channel is not truly rectangular but has a different shape that precludes the elastomeric segment from entirely blocking the channel into which it is deflected.
  • the cross-section has the profile of one-half of a rounded rectangle.
  • a rounded rectangle is the shape obtained by taking the convex hull of four equal circles of radius (r) and placing their centers at the four corners of a rectangle with side lengths a and b.
  • the profile of the flow channel is rectangular.
  • sieve valves are present on a portion of the flow channel that is 200 microns wide, 13 microns high, and has a rectangular profile.
  • a particular advantage of the present invention is the ability of sieve valves to function over a wide range of actuation pressures. This represents a significant advance over previous designs in which a “slightly opened” valve present on a flow channel with a semicircular profile allowed fluid, but not particles, to pass through (see Hong et al., 2004 , Nat Biotechnol.
  • the flow gap generated by the “slightly opened” valves varies continuously with changes in actuation pressure (i.e., an “analog” filter valve that may be more open or less open) while the sieve valve creates flow gaps of more-or-less constant size over a broad range of actuation pressures (i.e., an “digital valve” that is open or closed, with gaps).
  • FIG. 3 A sampling of parameter space sufficient to build functional bead columns by the two methods is shown in FIG. 3 .
  • the experiment either applied 1.5 psi pneumatic pressure to the bead inlet while varying the valve's pressure, or kept the column valve's pressure constant while varying the pressure applied to the flow inlet.
  • flow pressure can be varied by an order of magnitude more than the “slightly opened” valves, measured by whether or not beads escape to waste ( FIG. 3 ).
  • the pressure applied to the sieve valve used to stack the beads can be varied seven-fold more than the “slightly opened” valves.
  • the proportion of the cross-sectional area of the channel that remains open when the sieve valve is closed is another characteristic feature of the valve, and can be adjusted by varying the height and width of the flow chamber profile, the pressure applied to the sieve valve, the length, width, and thickness of the membrane, the flexibility of the membrane (Young's modulus), and the applied actuation force. See US Pat. App. 2005/0053952 for a discussion.
  • the cross-sectional area of the lumen is reduced but is not fully blocked.
  • the cross-sectional area of the lumen is reduced by at least 30%, more often at least 40% and preferably by at least 50%.
  • the cross-sectional area of the lumen is reduced to from 5% to 50% (more often 10% to 50%, and very often from 10% to 25%) of the cross-sectional area of the lumen when the membrane is not deflected. That is, in some embodiments fully actuating the sieve valve results in a reduction in the lumen size by 50% to 90%, preferably from 75 to 90%. In the case in which two small gaps are maintained at the two channel edges of a rectangular-profile channel, both of the gaps are considered in determining the cross-sectional area of the lumen when the valve is closed.
  • a sieve valve of the present invention will remain closed with gaps over a wide range of actuation pressures and flow channel pressures.
  • the present invention provides a valve that remains deflected into the flow channel lumen sufficient to reducing the cross-sectional area of the lumen by from 50% to 90%, preferably by from 75 to 90% over a wide range of flow pressures and/or actuation pressures.
  • a wide range means a range of at least 7 psi (e.g., from 16-23 psi, or 18 to 25 psi) and preferably a range of at least 10 psi (e.g., from 16-26 psi, or 20 to 30 psi), and most preferably a range of at least 14 psi (e.g., from 16-30 psi, or 18 to 32 psi).
  • the wide range is at least 7, at least 8, at least 9, at least 11, least 12, at least 13, at least 15, or at least 16 psi.
  • the range of pressures encompasses a range of 22-26 psi, alternatively 20-28 psi, alternatively 18-30 psi, alternatively 16-20 psi.
  • the sieve valve having these properties has a width of from 50 to 300 microns, a length of from 50 to 300 microns, and is deflected into a channel depth of 5 to 30 microns.
  • the sieve valve membrane has a width of from 100 to 300 microns, a length of from 100 to 300 microns, and is deflected into a channel with a depth of 10 to 20 microns.
  • the sieve valve has a width of from 100 to 200 microns, a length of from 100 to 200 microns, and is deflected into a channel with a of 10 to 20 microns.
  • the sieve valve membrane is approximately square and has width and length dimensions of 100 to 300 microns (e.g., 100 ⁇ 100, 150 ⁇ 150, 200 ⁇ 200, and 250 ⁇ 250 microns) and has a channel depth of 5 to 30 microns, preferably 10 to 20 microns.
  • valves do not completely block the flow channel lumen with the membrane is fully actuated by a control channel pressure of 30, 32, 34, 35, 38 or 40 psi.
  • “Retention size” is another characteristic feature of a sieve valve. “Retention size” refers to the diameter of a spherical particle, i.e., bead, that is retained by the sieve valve when actuated. Accordingly, in preferred embodiments the retention size of a sieve valve is about 1 micron, about 2 microns, about 3 microns, about 4 microns, about 5 microns, about 6 microns, about 7 microns, about 8 microns, about 9 microns, about 10 microns, about 11 microns, about 12 microns, about 13 microns, about 14 microns, about 15 microns, or larger than about 15 microns.
  • the optimal diameters of beads for use in chromatography are in the range of 2 ⁇ m to as 50 ⁇ m, depending on the specific geometry to the channels and valves.
  • Retention size can be calculated or measured.
  • One way to measure retention size is to use a roughly spherical polymeric bead of known diameter (e.g., 3 microns) and determining whether or not the bead is retained by the valve.
  • Beads that may be used include polystyrene beads.
  • the beads are monosized polymer particles known as DYNABEADS (Invitrogen Corp. Carlsbad, Calif.).
  • a microfluidic column module of the invention has one or more sieve valves, and a chromatographic separation medium disposed adjacent to a sieve valve or between a pair of sieve valves.
  • ante or “ante-valve,” “post” or “post-valve,” and “betwixt” can be used to describe a position in a flow channel relative to a sieve-valve and the direction of fluid flow in the channel.
  • Ante refers to a position upstream of valve.
  • chromatographic separation material is introduced ante (see FIG. 1C ).
  • Post refers to a position downstream of valve.
  • Betwixt refers to the region of a microfluidic flow channel between two sieve valves (e.g., the separation material-containing region of the flow channel in FIG. 1 ).
  • a microfluidic chromatography column can be prepared by introducing a suspension (e.g., an aqueous suspension) of a particulate chromatographic separation material (“beads”) ante to a closed sieve valve, allowing the beads to be trapped.
  • a second sieve valve ante to the first is then closed to confine the separation material.
  • the chromatography beads lie between the two valves.
  • the second sieve valve is useful to contain the beads and permits fluid to be flowed through the column in either direction. It will be immediately recognized that the ability to flow solution in both directions through a column has a number of applications, including applications in chromatography.
  • chromatographic separation material can include a bead material (e.g., cross-lined agarose or dextran beads, functionalized silica, polymer-coated silica, or porous silica particles, resins such as copolymers of styrene and divinylbenzen, and divinylbenzene and acrylic or methacrylic acid, metal and other materials) which may be derivatized, bound to or coated with a compound(s) that specifically interacts with a compound in solution as it passes through the column.
  • a bead material e.g., cross-lined agarose or dextran beads, functionalized silica, polymer-coated silica, or porous silica particles, resins such as copolymers of styrene and divinylbenzen, and divinylbenzene and acrylic or methacrylic acid, metal and other materials
  • chromatographic separation material can be adapted for many types of chromatography including gel filtration, anion exchange, cation exchange, hydrophobic interaction, size exclusion, reverse phase, metal ion affinity chromatography, IMAC, immunoaffinity chromatography, and adsorption chromatography.
  • chromatographic separation material that can be used in the column module can be HEI X8 (BioRad Corp.).
  • the region of the flow channel in which the chromatographic material is disposed (betwixt two sieve valves) is in fluidic communication with one, two, three or more than three branch flow channels for which there are additional sieve valves and/or conventional valves situated near the junction of the main flow channel and branch flow channels, as shown in FIGS. 1 and 2 .
  • This arrangement facilitates the use of the column for separations, concentrations and the like.
  • FIG. 1C is a schematic illustration of the loading of anion exchange beads into a column module incorporating one fluidic channel and five sieve and five regular valves. [ ⁇ ], open valve; [X], closed valve.
  • a suspended solution of anion exchange beads is introduced into the column modules where five sieve valves and five regular valves operate cooperatively to trap anion exchange beads inside the fluidic channel (total volume: 10 nL).
  • a miniaturized anion exchange column for fluoride concentration is achieved when the fluidic channel is fully loaded (See FIG. 1D ).
  • a suspension of chromatographic beads introduced though flow channel 2 (column inlet) through open conventional valve CV 1 and open sieve valve SV 1 .
  • the suspension solution flows through closed sieve valve SV 2 and open conventional valve CV 2 to flow channel 3 (column outlet) while the beads are retained by closed sieve valves SV 2 - 5 .
  • Conventional valves CV 2 , and CV 4 - 6 are also closed.
  • Flow channels 1 - 3 are segment of the same channel in this example.
  • sieve channel SV 1 can be closed to retain the beads.
  • a sample mixture may be flowed through the column, in either direction, with all valves except CV 1 and CV 3 closed. Additional reagents, eluants or the like may be introduced thorough flow channel 4 through open valve CV 2 and closed valve SV 2 with valves SV 1 - 5 , valves CV 4 and CV 5 closed and either or both of CV 1 and CV 3 open.
  • Sieve valves may be used in a column module to circulate a solution thought the column (either to increase the efficiency of loading of a sample or of elution into a small volume).
  • a solution can be circulated through closed path formed by flow channels 1 and 5 A-C when valves CV 1 - 3 , CV 6 and SV 1 - 5 closed, and CV 4 and 5 are open.
  • the solution can then be removed through any of flow channels 2 - 4 or 5 D.
  • the solution can be displaced by introducing another solution through a different flow channel.
  • sieve valves are often paired with a conventional valve to separately control flow of particles and liquid.
  • the invention provides a device having at least one sieve valve paired with a conventional valve.
  • valves are paired when they are proximal to each other. For example, in some embodiments, no more than 200 microns (alternatively, not more than 150 microns, or 100 microns) separates the region of a flow channel blocked by the conventional valve (when actuated) and the region blocked by the sieve valve (when actuated), measured valve edge to valve edge. In one embodiment many (i.e., at least 20%) or most (i.e. at least 50%) functioning sieve valves in a device are paired with a conventional valve.
  • the invention provides a method of making a microfluidic column in a microfluidic device by providing a suspension of chromatography beads in the flow channel ante to a closed sieve valve (where beads are of a size that is retained by the closed sieve valve); flowing the suspension through the flow channel so that the movement of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel.
  • providing a suspension means introducing the suspension ante to the sieve valve by flowing the suspension in a flow channel in the microfluidic device.
  • the suspension may be introduced from an external reservoir, or from another part of the device, for example.
  • a second sieve valve can be closed to trap the beads (or other particles) between two sieve valves.
  • a device of the invention may have multiple chromatography modules which may be function in the purification, concentration, or separation of a variety of compounds including biomolecules (e.g., nucleic acids, proteins, sugars), products and reactants of chemical reactions, and the like.
  • biomolecules e.g., nucleic acids, proteins, sugars
  • a device will have a combination of sieve valves and conventional (fully closable) valves.
  • the ratio of conventional valves to sieve valves will be greater than or equal to 2:1, 3:1, 4:1, 5:1, 6:1, 10:1 or higher.
  • the device has flow channels with a rectangular profile throughout the length of the channel and also has non-rectangular flow channels.
  • the device has flow channels that have a rectangular profile in certain regions of the channel and a non-rectangular profile in other regions.
  • a device of the invention may have one column or more than one column (e.g., 1-5 columns, 5-10 columns, 10 to 1000 columns or more than 1000 columns).
  • FIG. 4 shows schematic of a device with 20 columns arranged in parallel. The microfluidic device can be used to conduct separations in a multiplexing format, thus allowing multiple analyses to be conducted simultaneously.
  • beads e.g., paramagnetic beads derivatized with oligo(dT) 25 sequence (Dynal Biotech) can be distributed serially (1 to 4 at a time) into 20 columns (rectangular box) and held in place with sieve valves.
  • Reagent(s) can be directed over each of the columns and a target molecule (e.g., RNA from an individual cell) can be captured by the affinity beads.
  • Waste loading solution, wash buffers, etc.
  • Waste ports small wagon wheels
  • the sieve valves can be opened and the beads allowed to flow to ports (large wagon wheels) for collection.
  • the target molecules can be eluted from the beads and collected.
  • the target molecules can be manipulated on column.
  • bound RNA can be reverse transcribed on column by, for example, flushing the columns with reverse transcriptase and dNTPs in a first strand reaction buffer for 45 minutes, and bringing the chips to 40 degrees C. in a thermal microscope stage to activate the polymerase. Oligo(dT) sequences on the beads act as primers. When cDNA synthesis is complete, the bead:cDNA complexes are sent to the output ports in PCR buffer and collected for analysis.
  • the sieve valves of the invention and microfluidic devices containing have a wide variety of uses.
  • the uses of sieve valves are not limited to conventional chromatography modules.
  • a sieve valve can be used to collect any sort of particle and hold them in place.
  • the particle is a chromatography separation medium such as, for example, a polymeric bead coupled to a ligand.
  • Such beads can be used to capture the corresponding anti-ligand in a sample.
  • the beads are derivatized to bind a nucleic acid (e.g., coupled to a complementary RNA, DNA, PNA, or the like).
  • the beads are coupled to an antibody, an antigen, a protein, protein A, biotin, steptavidin, a receptor, a probe, or any other molecule with an affinity for the desired target.
  • Useful polymeric beads are available from commercial suppliers. For example, DYNABEADS (Invitrogen Corp., Carlsbad, Calif.) may be used.
  • beads coated with an anti-ligand can be circulated through flow channels of a device and captured in a sieve valve; a solution carrying the ligand can be flowed through the captured beads and the ligand bound to the surface via the anti-ligand.
  • the trapped particles may be processed in place without opening the valves and/or they may be released by opening the sieve valve(s). For example, at a desired time the sieve valve may be opened and the beads allowed to flow to other locations on or off the chip, thereby delivering the ligand to the new locations.
  • cells may be captured by a sieve valve.
  • a lysis solution flowed through the collected cells and cell components may then flow through the sieve valve while unlysed cells or debris are retained.
  • cells may be captured by a sieve valve and then a chemical or immunological stain is flowed through the collected cells, staining all or some of the captured cells. The sieve valves can then be released and the cells transported to other locations.
  • a solution containing cells or other particles may be flowed through a sieve valve and the cells or particles retained, thus concentrating the cells or particles.
  • a more concentrated solution of cells or particles may be captured by opening the sieve valve or reversing the direction of flow (so that solution flows through the sieve valve towards the cells or particles. Numerous other applications will be apparent upon review of the disclosure.
  • microfluidic devices both elastomeric and nonelastomeric, are well known, and the ordinarily skilled artisan will be familiar with such devices, their components and features, and methods of fabrication.
  • the device is fabricated using elastomeric materials. Methods of fabrication using elastomeric materials, and devices made using such materials, have been described in detail (see, e.g., Unger et al., 2000, Science 288:113-116; US 2004/0115838; and PCT publications WO 01/01025; WO 2005/030822 and WO 2005/084191) and will only be briefly described here.
  • Sieve valves can be constructed using standard optical lithography processes followed by multilayer soft lithography (MSL) methods (Unger et al., Science 2000, 288:113-16).
  • MSL multilayer soft lithography
  • a device with sieve valves, designed for the purpose of capturing mRNA from single cells has been constructed of three layers of the silicone elastomer polydimethylsiloxane (PDMS) (General Electric) bonded to a RCA cleaned #1.5 glass coverslip.
  • PDMS silicone elastomer polydimethylsiloxane
  • the device was fabricated as described in Fu et al., Nat Biotechnol 1999, 17:1109-11 with slight modifications (Studer et al., J. Appl. Phys. 2004, 95:393-98).
  • Negative master molds were fabricated out of photoresist by standard optical lithography and patterned with 20,000 dpi transparency masks (CAD/Art Services) drafted with AutoCAD software (Autodesk).
  • the flow layer masks (column portion and channel portion) were sized to 101.5% of the control layer masks to compensate for shrinking of features during the first elastomer curing step.
  • the flow master molds were fabricated out of 40 ⁇ m AZ-100XT/13 ⁇ m SU8-2015 photoresists (Clariant/Microchem) and the control molds were cast from 24 ⁇ m SU8-2025 (Microchem).
  • the flow channel portion where columns are to be constructed has a rectangular profile in cross section. Therefore, in one embodiment, a multistep lithography process is used for microfluidic devices composed of both sieve valves and conventional valves (Unger et al., 2000, Science 288:113-116).
  • the column resist is spun onto a silicon wafer and processed, followed by processing the resist for the conventional fluid channels.
  • the fabrication of molds having a rounded flow structure is achieved by thermal re-flow of the patterned photoresist.
  • Negative photo-resists such as SU8 rely on thermal polymerization of UV-exposed regions, and therefore can not be reflowed.
  • flow channel sections are defined using a positive photoresist such as AZ-50 (Clariant Corp. Charlotte, N.C.).
  • the two layer mold is heated (e.g., baked on a hot plate of 200 degrees C. for 2 hours) so that the photoresist can reflow and form a rounded shape, which is important for complete valve closure (see Unger, supra).
  • a hard bake step is also implemented between resist steps, in order to make the column resist mechanically robust for downstream processing.
  • Most devices that have sieve valves also have conventional valves, and have both rounded and non-rounded (e.g., rectangular) flow channels.
  • Elastomers in general are polymers existing at a temperature between their glass transition temperature and liquefaction temperature. See Allcock et al., Contemporary Polymer Chemistry, 2nd Ed. For illustration, a brief description of the most common classes of elastomers is presented here:
  • Silicone polymers have great structural variety, and a large number of commercially available formulations.
  • the present systems are fabricated from an elastomeric polymer such as GE RTV 615 (formulation), a vinyl-silane crosslinked (type) silicone elastomer (family).
  • the vinyl-to-(Si—H) crosslinking of RTV 615 allows both heterogeneous multilayer soft lithography and photoresist encapsulation.
  • this is only one of several crosslinking methods used in silicone polymer chemistry and suitable for use in the present invention.
  • the silicone polymer is polydimethylsiloxane (PDMS).
  • Perfluoropolyethers Functionalized photocurable perfluoropolyether (PFPE) is particularly useful as a material for fabricating solvent-resistant microfluidic devices for use with certain organic solvents. These PFPEs have material properties and fabrication capabilities similar to PDMS but with compatibility with a broader range of solvents. See, e.g., PCT Patent Publications WO 2005030822 and WO 2005084191 and Rolland et al., 2004, “Solvent-resistant photocurable “liquid Teflon” for microfluidic device fabrication” J. Amer. Chem. Soc. 126:2322-2323.
  • suitable materials include polyisoprenes, polybutadienes, polychloroprenes, polyisobutylenes, poly(styrene-butadiene-styrene)s, polyurethanes, poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F), poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene) (nitrile rubber), poly(1-butene), poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F), poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidene fluoride-hexafluoropropylene) copolymer (Viton), elastomeric compositions of polyvinylchloride (PVC), polysulfone, polycarbonate, polymethylmethacrylate (PMMA), and polytertra
  • microfluidic devices can be fabricated in a variety of nonelastomeric materials including silicon, glass, metal, ceramic and nonelastomeric polymers in which an elastomeric segment is deflected into a nonelastomeric channel.
  • Composite structures are described in, for example, US 20020127736.

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)

Abstract

Sieve valves for use in micorfluidic device are provided. The valves are useful for impeding the flow of particles, such as chromatography beads or cells, in a microfluidic channel while allowing liquid solution to pass through the valve. The valves find particular use in making microfluidic chromatography modules.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application claims benefit of U.S. Provisional Application No. 60/633,121, filed Dec. 3, 2004, the entire contents of which are incorporated herein by reference.
  • STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH
  • Work described herein has been supported, in part, by National Institutes of Health (NIH) grant NIH IRO1 HG002644-01A1. The United States government may have certain rights in the invention.
  • FIELD OF THE INVENTION
  • The present invention relates to microfabricated devices and microchromatography.
  • BACKGROUND OF THE INVENTION
  • Microfluidic devices may be used in a variety of biomedical and pharmaceutical applications, including analysis, preparation and synthesis of chemical compounds and analysis and manipulation of cells, proteins and nucleic acids. In many applications, the ability to concentrate or chromatographically separate compounds in a microfluidic environment enhances the utility of microfluidic devices. Thus, a rapid, inexpensive and effective method for performing chromatography and for microfluidic chromatography columns would be of great benefit. The present invention meets these and many other needs.
  • BRIEF SUMMARY
  • In one aspect the invention provides a microfabricated sieve valve structure having an elastomeric membrane that separates a first channel lumen and a second channel lumen, where pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 50% of the cross-sectional area when the membrane is not deflected. In certain embodiments the cross-sectional profile of the second channel is rectangular. In certain embodiments pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 75% of the cross-sectional area when the membrane is not deflected. In certain embodiments the range of pressures is a range of at least 7 psi, optionally at least 10 psi, optionally at least 15 psi or encompasses a range of 22-26 psi, optionally 20-28 psi, and optionally 18-30 psi. In certain embodiments the sieve valve has a retention size of from 1 micron to 20 microns.
  • In a related aspect the invention provides a microfluidic device having two or more sieve valves. In an embodiment, a chromatographic separation medium is disposed between two sieve valves thereby forming a separation column. In an embodiment the device has more than 20 separation columns.
  • In a related aspect the invention provides a microfluidic device comprising a microfluidic chromatography column, the column comprising a chromatographic separation medium disposed behind a sieve valve, and optionally disposed between two sieve valves. In an embodiment the chromatographic separation medium comprises a polymeric bead coupled to a ligand. For example, in certain embodiments beads have been derivatized to bind a nucleic acid (e.g., oligo(dT)) or a protein (e.g., an antibody).
  • In a related aspect the invention provides a microfluidic device with two or more sieve valves paired with conventional valves. In a related aspect the invention provides a microfluidic device that contains five or more sieve valves paired with conventional valves.
  • In a related aspect the invention provides a method of making a microfluidic column in a microfluidic device, wherein the device comprises a flow channel and a sieve valve positioned to reduce the cross-sectional area of the lumen of the flow channel when closed. The method involves providing a suspension of chromatography beads in the flow channel ante to the sieve valve, where the valve is closed and the beads are of a size that is retained by the closed sieve valve; flowing the suspension through the flow channel, whereby the movement of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel.
  • In one embodiment, the device has two or more sieve valves each positioned to reduce the cross-sectional area of the lumen of the flow channel when closed, and the method of making a microfluidic column in a microfluidic device includes providing the suspension of chromatography beads ante to a second sieve valve, wherein the second sieve valve is open and is ante to the closed sieve valve, and wherein the beads are of a size that is retained by the second sieve valve; flowing the suspension of chromatographic beads through the flow channel through and past the second sieve valve, wherein the flow of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel; and, closing the second sieve valve, thereby trapping the beads betwixt the sieve valves.
  • In a related aspect the invention provides a method for trapping particles in a microfluidic flow channel of a microfluidic device, by providing a suspension of the particles in a flow channel ante to a closed sieve valve, wherein the particles are of a size that is retained by the closed sieve valve; flowing the suspension through the flow channel, whereby the movement of the particles is impeded by the closed sieve valve and the solution in which the particles are suspended flows through the flow channel, thereby trapping the particles in the flow channel. In one embodiment the particles are living cells.
  • BRIEF DESCRIPTION OF THE FIGURES
  • FIG. 1. Schematic representations illustrate the operation mechanisms of (A) a regular valve having a round-profiled fluidic channel and (B) a sieve valve having a rectangular-profiled fluidic channel. When pressure is introduced into the control channels, the elastic membranes expand into the fluidic channels. In a regular valve, the fluidic channel is completely sealed because of the perfect fit between the expended membranes and the round profile of the fluidic channel. In a sieve valve, the square-profiled fluidic channel is only partially closed, which allows fluid to flow through the two edges. Sieve valves can be used to confine solid objects within the fluidic channel, but allow liquid to flow through it. (C) Schematic illustration of the loading of anion exchange beads into a column module incorporating one fluidic channel and five sieve and five regular valves. [□], open valve; [X], closed valve. A suspended solution of anion exchange beads is introduced into the column modules where five sieve valves and five regular valves operate cooperatively to trap anion exchange beads inside the fluidic channel (total volume: 10 nL). A miniaturized anion exchange column for fluoride concentration is achieved when the fluidic channel is fully loaded. (D) A snapshot of the bead-loading process in action.
  • FIG. 2. A schematic representation corresponding to the column module of FIG. 1.
  • FIG. 3. Microfluidic filter valve. a. Sampling of parameter space sufficient to build functional bead columns. Triangles represent the filter valve method (200×200 um valve, 13 um tall) and circles (100×100 um valve, 13 um tall) represent the previous approach using slightly opened valves (Hong et al., 2004, Nat Biotechnol. 22:435-9). The flow channel pressure is the pressure applied to the bead inlet and the column pressure is the pressure applied to the column valve's inlet. Parameter space is measured by if the beads escape to waste. b.-d. Optical micrographs of the filter valve. Scale bars are 100 μm. b. Top-down view of an actuated filter valve. c. Cross section of the valve and open channel above it. d. Cross section of the actuated filter valve and pinched off channel.
  • FIG. 4. A microfluidic device with 20 columns (yellow) in multiplex format. Flow channels are shown in white and control channels in purple. Scale bars are 800 μm.
  • DETAILED DESCRIPTION
  • In one aspect the present invention provides a microfluidic device having at least one “sieve valve.” In a related aspect the invention provides a microfluidic device having at least one chromatography module comprising a chromatographic separation medium held in place in a microfluidic channel by one or more “sieve valves,” or a method for making such a module. In another related aspect, the invention provides a device adapted for forming a chromatography module as described. Other aspects of the invention will be apparent upon review of the disclosure. The sieve valves of the invention have an elastomeric component and, in a preferred embodiment, the microfluidic channel is fabricated from an elastomeric material.
  • Microfluidic devices, both elastomeric and nonelastomeric, are widely known. Thus, the ordinarily skilled artisan will be familiar with such devices, their components and features, and methods of fabrication. For purposes of the following discussion it is assumed the reader is familiar with microfluidic devices generally, and in particular is familiar with elastomeric devices fabricated using multilayer soft lithography (MSL) methods and comprising flow channels, control channels, valves, pumps and other microfluidic and auxiliary components. There is ample additional guidance in the scientific and patent literature (see Unger et al., 2000, Science 288:113-116 and references below).
  • Fundamental components of the elastomeric devices of the invention are flow channels, control channels and valves, each of which will be described briefly to facilitate the discussion of aspects of the invention.
  • The term “flow channel” refers to a microfluidic channel through which a solution can flow. The dimensions of flow channels can vary widely but typically include at least one cross-sectional dimension (e.g., height, width, or diameter) less than 1 mm, preferably less than 0.5 mm, and often less than 0.3 mm. Different flow channels in a particular microfluidic device may have different dimensions, depending on the function of the particular channel. In some embodiments of the invention the flow channel has a low aspect ratio (e.g., a height to width ratio of less than 1:5, preferably less than 1:10; sometimes less than 1:15). For example, in one embodiment, the height of the rectangular channel in which a sieve valve is positioned is about 10 microns, with a width of 200 microns. In some embodiments of the invention, the height of the (rectangular) channel in which a sieve valve is positioned is less than about 30 microns, often less than about 20 microns, and very often less than about 15 microns.
  • A “control channel” is a channel separated from a flow channel by an elastomeric membrane that can be deflected into or retracted from the flow channel in response to an actuation force. The dimensions of control channels can vary widely but typically include at least one cross-sectional dimension (e.g., height, width, or diameter) less than 1 mm, preferably less than 0.5 mm, and often less than 0.3 mm. For example, in one embodiment, a control channel has dimensions of 250 micrometers wide by 250 micrometers high. In another embodiment, a control channel has dimensions of 300 micrometers wide by 50 micrometers high.
  • Elastomeric valves (e.g., pressure-actuated elastomeric valves) consist of a configuration in which two microchannels are separated by an elastomeric segment that can be deflected into or retracted from one of the channels (a flow channel) in response to an actuation force applied to the other channel (a control channel). In one embodiment the elastomeric segment has a substantially constant thickness (i.e., the thickness does not vary more than 25%, preferably not more than 5%). The elastomeric segment is usually between 1 micron and 50 microns in thickness, preferably between 5 microns and 20 microns in thickness. Examples of elastomeric valves include, without limitation, upwardly-deflecting valves (see, e.g., US 20050072946), downwardly deflecting valves (see, e.g., U.S. Pat. No. 6,408,878), side actuated valves (see, e.g., US 20020127736). The elastomeric segment may be substantially In one embodiment the valve is a push-down valve and the elastomeric segment has a convex shaped membrane (thin in the center [e.g., 10 μm] and thicker at the edges [e.g., 46 μm]. In one embodiment the valve is a push-up valve and the elastomeric segment has a uniform thickness (e.g., 5-15 microns). In conventional valves the flow channel has a rounded surface opposite the elastomeric segment, so that the deflected membrane can form a tight seal with the inner surface of the channel. For example, in one embodiment, the flow channel section is bounded by a circular arc 300 μm in width and 50 μm in height.
  • Valves can be actuated by injecting gases (e.g., air, nitrogen, and argon), liquids (e.g., water, silicon oils and other oils), solutions containing salts and/or polymers (including but not limited to polyethylene glycol, glycerol and carbohydrates) and the like into the control channel, a process referred to as “pressurizing” the control channel. In addition to elastomeric valves actuated by pressure-based actuation systems, monolithic valves with an elastomeric component and electrostatic, magnetic, electrolytic and electrokinetic actuation systems may be used. See, e.g., US 20020109114; US 20020127736, and U.S. Pat. No. 6,767,706.
  • Sieve Valves
  • A sieve valve (also called a “filter valve”) is a type of elastomeric valve. Like a conventional valve, the sieve valve consists of a configuration in which a control channel and a flow channel are separated by an elastomeric segment that can be deflected into the flow channel in response to an actuation force applied to the control channel. However, in the sieve valve, small gap(s) between the elastomeric segment and the flow channel walls permit fluid to flow through the channel even with the elastomeric segment is maximally deflected into the flow channel.
  • Sieve valves are represented schematically in FIG. 1. The figure illustrates the operation mechanisms of (A) a regular valve having a round-profiled fluidic channel and (B) a sieve valve having a rectangular-profiled fluidic channel. When pressure is introduced into the control channel to actuate the regular valve or sieve valve, the elastic membranes deflect into the fluidic channels. In general, when valves operate, the valve membranes deflect in an elliptic shape. In the case of normal valve (FIG. 1A), the deflected membrane is fully compliant to the round-profile fluidic channel lead to complete close of the valve. For a sieve valve (FIG. 1B), a deflected membrane partially closes the valve, for example generating two small gaps the two channel edges of a rectangular-profile channel through which fluid can flow.
  • This property of sieve valves renders them useful in making on-chip microchromatographic columns. Since the sieve valves can be used to confine solid objects within the fluidic channel, but allow liquid to flow through it, when a suspension of a particulate chromatographic separation material (“beads” or “chromatography beads”) is introduced into the flow channel the beads are trapped by the closed sieve valve and while the solution is allowed to pass through. By using this design, a variety of miniaturized columns filled with different type of beads (e.g., ion exchange resin, affinity resin, size exclusion, etc.) can be produced for applications such as ion extraction, filtration, purification, concentration and separation, and chromatography. In some embodiments the chromatography beads are roughly spherical and have diameters of between about 1 micron and 15 microns, such as approximately 1, approximately 2, approximately 3, approximately 4, approximately 5, approximately 6, approximately 7, approximately 8, approximately 9, approximately 10, approximately 11, approximately 12, approximately 13, or approximately 14 microns.
  • In a preferred embodiment, the elastomeric segment of the sieve valve is upwardly deflecting, as shown in FIG. 1. However, downward and sideways deflecting channels, for example, can also be used.
  • In a sieve valve is comprised of an elastomeric segment that can be deflected into a channel true “rectangular-profiled” fluidic channel. In general, in a cross-sectional profile of the portion of the channel opposite the elastomeric segment does not have the shape of a section (arc) of a circle or ellipse or other conical section (assuming an orientation in which the elastomeric segment is located at the concave face of the circle or ellipse). In one common embodiment, as illustrated in FIG. 1B, a sieve valve is comprised of an elastomeric segment that can be deflected into a true “rectangular-profiled” fluidic channel. “Rectangular-profiled” means the cross-section has the profile of a rectangle, and comprises first and second sides, which are opposite each other and of approximately equal length, and a third side (floor) at right angles to the first and second sides. It will be appreciated that deflection of the elastomeric segment onto channels with somewhat different profiles will also achieve the desired result of allowing liquid to flow through will retaining particles. Thus, in alternative embodiments the cross-sectional profile of the channel is not truly rectangular but has a different shape that precludes the elastomeric segment from entirely blocking the channel into which it is deflected. For example, in one embodiment, the cross-section has the profile of one-half of a rounded rectangle. A rounded rectangle is the shape obtained by taking the convex hull of four equal circles of radius (r) and placing their centers at the four corners of a rectangle with side lengths a and b. The rounded rectangle has area (A) and perimeter (p) as follows: A=ab+2r(a+b)+πr2 and p=2(a+b+πr). In a preferred embodiment the profile of the flow channel is rectangular. In one embodiment, sieve valves are present on a portion of the flow channel that is 200 microns wide, 13 microns high, and has a rectangular profile.
  • As illustrated in FIG. 1A, when the sieve valve is closed, the deflected elastomeric membrane contacts a wall of the flow channel that lies opposite the membrane. This generates two small gaps the two channel edges of a rectangular-profile channel, through which fluid can flow (“flow gaps”). Both of the gaps are considered in determining the cross-sectional area of the lumen when the valve is closed. A particular advantage of the present invention is the ability of sieve valves to function over a wide range of actuation pressures. This represents a significant advance over previous designs in which a “slightly opened” valve present on a flow channel with a semicircular profile allowed fluid, but not particles, to pass through (see Hong et al., 2004, Nat Biotechnol. 22:435-9; see US 2005/0053952). The flow gap generated by the “slightly opened” valves varies continuously with changes in actuation pressure (i.e., an “analog” filter valve that may be more open or less open) while the sieve valve creates flow gaps of more-or-less constant size over a broad range of actuation pressures (i.e., an “digital valve” that is open or closed, with gaps).
  • A sampling of parameter space sufficient to build functional bead columns by the two methods is shown in FIG. 3. The experiment either applied 1.5 psi pneumatic pressure to the bead inlet while varying the valve's pressure, or kept the column valve's pressure constant while varying the pressure applied to the flow inlet. Using the sieve valves, flow pressure can be varied by an order of magnitude more than the “slightly opened” valves, measured by whether or not beads escape to waste (FIG. 3). Similarly, when applying constant pressure to the bead inlet, the pressure applied to the sieve valve used to stack the beads can be varied seven-fold more than the “slightly opened” valves.
  • The proportion of the cross-sectional area of the channel that remains open when the sieve valve is closed is another characteristic feature of the valve, and can be adjusted by varying the height and width of the flow chamber profile, the pressure applied to the sieve valve, the length, width, and thickness of the membrane, the flexibility of the membrane (Young's modulus), and the applied actuation force. See US Pat. App. 2005/0053952 for a discussion. When the membrane is fully deflected into the flow channel lumen the cross-sectional area of the lumen is reduced but is not fully blocked. Usually the cross-sectional area of the lumen is reduced by at least 30%, more often at least 40% and preferably by at least 50%. Preferably, when the membrane is fully deflected into the flow channel lumen the cross-sectional area of the lumen is reduced to from 5% to 50% (more often 10% to 50%, and very often from 10% to 25%) of the cross-sectional area of the lumen when the membrane is not deflected. That is, in some embodiments fully actuating the sieve valve results in a reduction in the lumen size by 50% to 90%, preferably from 75 to 90%. In the case in which two small gaps are maintained at the two channel edges of a rectangular-profile channel, both of the gaps are considered in determining the cross-sectional area of the lumen when the valve is closed.
  • As noted above, in general, a sieve valve of the present invention will remain closed with gaps over a wide range of actuation pressures and flow channel pressures. Thus, the present invention provides a valve that remains deflected into the flow channel lumen sufficient to reducing the cross-sectional area of the lumen by from 50% to 90%, preferably by from 75 to 90% over a wide range of flow pressures and/or actuation pressures. In this context, “a wide range” means a range of at least 7 psi (e.g., from 16-23 psi, or 18 to 25 psi) and preferably a range of at least 10 psi (e.g., from 16-26 psi, or 20 to 30 psi), and most preferably a range of at least 14 psi (e.g., from 16-30 psi, or 18 to 32 psi). In other particular embodiments, the wide range is at least 7, at least 8, at least 9, at least 11, least 12, at least 13, at least 15, or at least 16 psi. In particular embodiments, the range of pressures encompasses a range of 22-26 psi, alternatively 20-28 psi, alternatively 18-30 psi, alternatively 16-20 psi. In certain embodiments the sieve valve having these properties has a width of from 50 to 300 microns, a length of from 50 to 300 microns, and is deflected into a channel depth of 5 to 30 microns. Preferably the sieve valve membrane has a width of from 100 to 300 microns, a length of from 100 to 300 microns, and is deflected into a channel with a depth of 10 to 20 microns. Preferably the sieve valve has a width of from 100 to 200 microns, a length of from 100 to 200 microns, and is deflected into a channel with a of 10 to 20 microns. In one embodiment the sieve valve membrane is approximately square and has width and length dimensions of 100 to 300 microns (e.g., 100×100, 150×150, 200×200, and 250×250 microns) and has a channel depth of 5 to 30 microns, preferably 10 to 20 microns.
  • It will be apparent that in normal operation, the flow channel lumen is not completely blocked by the membrane when the sieve valve is fully actuated, e.g., when the control channel is maximally pressurized. “Maximally pressurized” refers to the maximum pressure applied to the control channel in the normal functioning of the valve, or alternatively refers to the pressure above which the device will fail (e.g., delaminate).
  • In particular embodiments valves (including valves with dimensions as described above) do not completely block the flow channel lumen with the membrane is fully actuated by a control channel pressure of 30, 32, 34, 35, 38 or 40 psi.
  • “Retention size” is another characteristic feature of a sieve valve. “Retention size” refers to the diameter of a spherical particle, i.e., bead, that is retained by the sieve valve when actuated. Accordingly, in preferred embodiments the retention size of a sieve valve is about 1 micron, about 2 microns, about 3 microns, about 4 microns, about 5 microns, about 6 microns, about 7 microns, about 8 microns, about 9 microns, about 10 microns, about 11 microns, about 12 microns, about 13 microns, about 14 microns, about 15 microns, or larger than about 15 microns. (It will be apparent that a sieve valve with a retention size of 1 micron will also trap larger beads). In general, the optimal diameters of beads for use in chromatography are in the range of 2 μm to as 50 μm, depending on the specific geometry to the channels and valves. Retention size can be calculated or measured. One way to measure retention size is to use a roughly spherical polymeric bead of known diameter (e.g., 3 microns) and determining whether or not the bead is retained by the valve. Beads that may be used include polystyrene beads. In one embodiment, the beads are monosized polymer particles known as DYNABEADS (Invitrogen Corp. Carlsbad, Calif.).
  • Microfluidic Column Module
  • A microfluidic column module of the invention has one or more sieve valves, and a chromatographic separation medium disposed adjacent to a sieve valve or between a pair of sieve valves. For clarity, the terms “ante” or “ante-valve,” “post” or “post-valve,” and “betwixt” can be used to describe a position in a flow channel relative to a sieve-valve and the direction of fluid flow in the channel. “Ante” refers to a position upstream of valve. For example, to produce a chromatography column, chromatographic separation material is introduced ante (see FIG. 1C). “Post” refers to a position downstream of valve. “Betwixt” refers to the region of a microfluidic flow channel between two sieve valves (e.g., the separation material-containing region of the flow channel in FIG. 1).
  • As described above, a microfluidic chromatography column can be prepared by introducing a suspension (e.g., an aqueous suspension) of a particulate chromatographic separation material (“beads”) ante to a closed sieve valve, allowing the beads to be trapped. In a preferred embodiment a second sieve valve ante to the first is then closed to confine the separation material. Thus, the chromatography beads lie between the two valves. The second sieve valve is useful to contain the beads and permits fluid to be flowed through the column in either direction. It will be immediately recognized that the ability to flow solution in both directions through a column has a number of applications, including applications in chromatography.
  • A variety of different chromatography beads may used in the column module. For example and without limitation, chromatographic separation material can include a bead material (e.g., cross-lined agarose or dextran beads, functionalized silica, polymer-coated silica, or porous silica particles, resins such as copolymers of styrene and divinylbenzen, and divinylbenzene and acrylic or methacrylic acid, metal and other materials) which may be derivatized, bound to or coated with a compound(s) that specifically interacts with a compound in solution as it passes through the column. For example and without limitation, chromatographic separation material can be adapted for many types of chromatography including gel filtration, anion exchange, cation exchange, hydrophobic interaction, size exclusion, reverse phase, metal ion affinity chromatography, IMAC, immunoaffinity chromatography, and adsorption chromatography. For example and not limitation chromatographic separation material that can be used in the column module can be HEI X8 (BioRad Corp.).
  • In some embodiments, the region of the flow channel in which the chromatographic material is disposed (betwixt two sieve valves) is in fluidic communication with one, two, three or more than three branch flow channels for which there are additional sieve valves and/or conventional valves situated near the junction of the main flow channel and branch flow channels, as shown in FIGS. 1 and 2. This arrangement facilitates the use of the column for separations, concentrations and the like.
  • In certain embodiments, a number of sieve valves are used. As illustrated in the Figures, sieve valves and conventional valves can work in concert in the construction and use of a microfluidic column. FIG. 1C is a schematic illustration of the loading of anion exchange beads into a column module incorporating one fluidic channel and five sieve and five regular valves. [□], open valve; [X], closed valve. A suspended solution of anion exchange beads is introduced into the column modules where five sieve valves and five regular valves operate cooperatively to trap anion exchange beads inside the fluidic channel (total volume: 10 nL). A miniaturized anion exchange column for fluoride concentration is achieved when the fluidic channel is fully loaded (See FIG. 1D).
  • With reference to FIG. 2, for example, to generate a microfluidic column in flow channel 1, a suspension of chromatographic beads introduced though flow channel 2 (column inlet) through open conventional valve CV1 and open sieve valve SV1. The suspension solution flows through closed sieve valve SV2 and open conventional valve CV2 to flow channel 3 (column outlet) while the beads are retained by closed sieve valves SV2-5. Conventional valves CV2, and CV4-6 are also closed. Flow channels 1-3 are segment of the same channel in this example. After loading the beads, sieve channel SV1 can be closed to retain the beads. A sample mixture may be flowed through the column, in either direction, with all valves except CV1 and CV3 closed. Additional reagents, eluants or the like may be introduced thorough flow channel 4 through open valve CV2 and closed valve SV2 with valves SV1-5, valves CV4 and CV5 closed and either or both of CV1 and CV3 open.
  • Sieve valves may be used in a column module to circulate a solution thought the column (either to increase the efficiency of loading of a sample or of elution into a small volume). With reference to FIG. 2, by the action of peristaltic pump 10 a solution can be circulated through closed path formed by flow channels 1 and 5A-C when valves CV1-3, CV6 and SV1-5 closed, and CV4 and 5 are open. The solution can then be removed through any of flow channels 2-4 or 5D. Optionally the solution can be displaced by introducing another solution through a different flow channel.
  • As illustrated in the figures and discussion above, sieve valves are often paired with a conventional valve to separately control flow of particles and liquid. In one embodiment the invention provides a device having at least one sieve valve paired with a conventional valve. As used in this context, valves are paired when they are proximal to each other. For example, in some embodiments, no more than 200 microns (alternatively, not more than 150 microns, or 100 microns) separates the region of a flow channel blocked by the conventional valve (when actuated) and the region blocked by the sieve valve (when actuated), measured valve edge to valve edge. In one embodiment many (i.e., at least 20%) or most (i.e. at least 50%) functioning sieve valves in a device are paired with a conventional valve.
  • In one aspect the invention provides a method of making a microfluidic column in a microfluidic device by providing a suspension of chromatography beads in the flow channel ante to a closed sieve valve (where beads are of a size that is retained by the closed sieve valve); flowing the suspension through the flow channel so that the movement of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel. In this context “providing a suspension” means introducing the suspension ante to the sieve valve by flowing the suspension in a flow channel in the microfluidic device. The suspension may be introduced from an external reservoir, or from another part of the device, for example. After the beads are trapped, a second sieve valve can be closed to trap the beads (or other particles) between two sieve valves.
  • Microfluidic Device
  • A device of the invention may have multiple chromatography modules which may be function in the purification, concentration, or separation of a variety of compounds including biomolecules (e.g., nucleic acids, proteins, sugars), products and reactants of chemical reactions, and the like.
  • Usually a device will have a combination of sieve valves and conventional (fully closable) valves. In one embodiment the ratio of conventional valves to sieve valves will be greater than or equal to 2:1, 3:1, 4:1, 5:1, 6:1, 10:1 or higher. In one embodiment the device has flow channels with a rectangular profile throughout the length of the channel and also has non-rectangular flow channels. In one embodiment the device has flow channels that have a rectangular profile in certain regions of the channel and a non-rectangular profile in other regions.
  • A device of the invention may have one column or more than one column (e.g., 1-5 columns, 5-10 columns, 10 to 1000 columns or more than 1000 columns). FIG. 4 shows schematic of a device with 20 columns arranged in parallel. The microfluidic device can be used to conduct separations in a multiplexing format, thus allowing multiple analyses to be conducted simultaneously. In the device illustrated in FIG. 4, beads (e.g., paramagnetic beads derivatized with oligo(dT)25 sequence (Dynal Biotech) can be distributed serially (1 to 4 at a time) into 20 columns (rectangular box) and held in place with sieve valves. Reagent(s) can be directed over each of the columns and a target molecule (e.g., RNA from an individual cell) can be captured by the affinity beads. Waste (loading solution, wash buffers, etc.) can flow through the column to waste ports (small wagon wheels) for removal. Once the target molecules have bound to beads in each column, the sieve valves can be opened and the beads allowed to flow to ports (large wagon wheels) for collection. Alternatively, the target molecules can be eluted from the beads and collected. In still another approach, the target molecules can be manipulated on column. For example, bound RNA can be reverse transcribed on column by, for example, flushing the columns with reverse transcriptase and dNTPs in a first strand reaction buffer for 45 minutes, and bringing the chips to 40 degrees C. in a thermal microscope stage to activate the polymerase. Oligo(dT) sequences on the beads act as primers. When cDNA synthesis is complete, the bead:cDNA complexes are sent to the output ports in PCR buffer and collected for analysis.
  • Uses of Sieve Valves
  • The sieve valves of the invention and microfluidic devices containing have a wide variety of uses. In particular, the uses of sieve valves are not limited to conventional chromatography modules.
  • In one aspect, a sieve valve can be used to collect any sort of particle and hold them in place. In one embodiment, the particle is a chromatography separation medium such as, for example, a polymeric bead coupled to a ligand. Such beads can be used to capture the corresponding anti-ligand in a sample. In some embodiments, the beads are derivatized to bind a nucleic acid (e.g., coupled to a complementary RNA, DNA, PNA, or the like). In some embodiments, the beads are coupled to an antibody, an antigen, a protein, protein A, biotin, steptavidin, a receptor, a probe, or any other molecule with an affinity for the desired target. Useful polymeric beads are available from commercial suppliers. For example, DYNABEADS (Invitrogen Corp., Carlsbad, Calif.) may be used.
  • For example, beads coated with an anti-ligand (e.g., antibody) can be circulated through flow channels of a device and captured in a sieve valve; a solution carrying the ligand can be flowed through the captured beads and the ligand bound to the surface via the anti-ligand. The trapped particles may be processed in place without opening the valves and/or they may be released by opening the sieve valve(s). For example, at a desired time the sieve valve may be opened and the beads allowed to flow to other locations on or off the chip, thereby delivering the ligand to the new locations.
  • In another example, cells may be captured by a sieve valve. In one example, a lysis solution flowed through the collected cells and cell components (e.g., small soluble molecules) may then flow through the sieve valve while unlysed cells or debris are retained. In another example, cells may be captured by a sieve valve and then a chemical or immunological stain is flowed through the collected cells, staining all or some of the captured cells. The sieve valves can then be released and the cells transported to other locations. In another example, a solution containing cells or other particles may be flowed through a sieve valve and the cells or particles retained, thus concentrating the cells or particles. A more concentrated solution of cells or particles may be captured by opening the sieve valve or reversing the direction of flow (so that solution flows through the sieve valve towards the cells or particles. Numerous other applications will be apparent upon review of the disclosure.
  • Elastomeric Fabrication
  • As noted above, microfluidic devices, both elastomeric and nonelastomeric, are well known, and the ordinarily skilled artisan will be familiar with such devices, their components and features, and methods of fabrication. In preferred embodiments, the device is fabricated using elastomeric materials. Methods of fabrication using elastomeric materials, and devices made using such materials, have been described in detail (see, e.g., Unger et al., 2000, Science 288:113-116; US 2004/0115838; and PCT publications WO 01/01025; WO 2005/030822 and WO 2005/084191) and will only be briefly described here.
  • Sieve valves can be constructed using standard optical lithography processes followed by multilayer soft lithography (MSL) methods (Unger et al., Science 2000, 288:113-16). For example, a device with sieve valves, designed for the purpose of capturing mRNA from single cells, has been constructed of three layers of the silicone elastomer polydimethylsiloxane (PDMS) (General Electric) bonded to a RCA cleaned #1.5 glass coverslip. The device was fabricated as described in Fu et al., Nat Biotechnol 1999, 17:1109-11 with slight modifications (Studer et al., J. Appl. Phys. 2004, 95:393-98). Negative master molds were fabricated out of photoresist by standard optical lithography and patterned with 20,000 dpi transparency masks (CAD/Art Services) drafted with AutoCAD software (Autodesk). The flow layer masks (column portion and channel portion) were sized to 101.5% of the control layer masks to compensate for shrinking of features during the first elastomer curing step. The flow master molds were fabricated out of 40 μm AZ-100XT/13 μm SU8-2015 photoresists (Clariant/Microchem) and the control molds were cast from 24 μm SU8-2025 (Microchem).
  • In order to implement sieve valves, the flow channel portion where columns are to be constructed has a rectangular profile in cross section. Therefore, in one embodiment, a multistep lithography process is used for microfluidic devices composed of both sieve valves and conventional valves (Unger et al., 2000, Science 288:113-116). In one approach, for example, the column resist is spun onto a silicon wafer and processed, followed by processing the resist for the conventional fluid channels. The fabrication of molds having a rounded flow structure is achieved by thermal re-flow of the patterned photoresist. Negative photo-resists such as SU8 rely on thermal polymerization of UV-exposed regions, and therefore can not be reflowed. In order to be compatible with membrane valves, flow channel sections are defined using a positive photoresist such as AZ-50 (Clariant Corp. Charlotte, N.C.).
  • Once the fluid channels are processed, the two layer mold is heated (e.g., baked on a hot plate of 200 degrees C. for 2 hours) so that the photoresist can reflow and form a rounded shape, which is important for complete valve closure (see Unger, supra). A hard bake step is also implemented between resist steps, in order to make the column resist mechanically robust for downstream processing. Most devices that have sieve valves also have conventional valves, and have both rounded and non-rounded (e.g., rectangular) flow channels.
  • A large variety of elastomeric materials may be used in fabrication of the devices of the invention. Elastomers in general are polymers existing at a temperature between their glass transition temperature and liquefaction temperature. See Allcock et al., Contemporary Polymer Chemistry, 2nd Ed. For illustration, a brief description of the most common classes of elastomers is presented here:
  • Silicones: Silicone polymers have great structural variety, and a large number of commercially available formulations. In an exemplary aspect of the present invention, the present systems are fabricated from an elastomeric polymer such as GE RTV 615 (formulation), a vinyl-silane crosslinked (type) silicone elastomer (family). The vinyl-to-(Si—H) crosslinking of RTV 615 allows both heterogeneous multilayer soft lithography and photoresist encapsulation. However, this is only one of several crosslinking methods used in silicone polymer chemistry and suitable for use in the present invention. In one embodiment, the silicone polymer is polydimethylsiloxane (PDMS).
  • Perfluoropolyethers: Functionalized photocurable perfluoropolyether (PFPE) is particularly useful as a material for fabricating solvent-resistant microfluidic devices for use with certain organic solvents. These PFPEs have material properties and fabrication capabilities similar to PDMS but with compatibility with a broader range of solvents. See, e.g., PCT Patent Publications WO 2005030822 and WO 2005084191 and Rolland et al., 2004, “Solvent-resistant photocurable “liquid Teflon” for microfluidic device fabrication” J. Amer. Chem. Soc. 126:2322-2323.
  • Other suitable materials include polyisoprenes, polybutadienes, polychloroprenes, polyisobutylenes, poly(styrene-butadiene-styrene)s, polyurethanes, poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F), poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene) (nitrile rubber), poly(1-butene), poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F), poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidene fluoride-hexafluoropropylene) copolymer (Viton), elastomeric compositions of polyvinylchloride (PVC), polysulfone, polycarbonate, polymethylmethacrylate (PMMA), and polytertrafluoroethylene (Teflon).
  • In an alternative embodiment, microfluidic devices can be fabricated in a variety of nonelastomeric materials including silicon, glass, metal, ceramic and nonelastomeric polymers in which an elastomeric segment is deflected into a nonelastomeric channel. Composite structures are described in, for example, US 20020127736.
  • Additional guidance can be found in the scientific and patent literature including, but not limited to the following: Unger et al., 2000, Science 288:113-116; Quake & Scherer, 2000, “From micro to nanofabrication with soft materials” Science 290: 1536-40; Xia et al., 1998, “Soft lithography” Angewandte Chemie-International Edition 37:551-575; Unger et al., 2000, “Monolithic microfabricated valves and pumps by multilayer soft lithography” Science 288:113-116; Thorsen et al., 2002, “Microfluidic large-scale integration” Science 298:580-584; Chou et al., 2000, “Microfabricated Rotary Pump” Biomedical Microdevices 3:323-330; Liu et al., 2003, “Solving the “world-to-chip” interface problem with a microfluidic matrix “Analytical Chemistry 75, 4718-23,” Hong et al, 2004, “A nanoliter-scale nucleic acid processor with parallel architecture” Nature Biotechnology 22:435-39; Fiorini and Chiu, 2005, “Disposable microfluidic devices: fabrication, function, and application” Biotechniques 38:429-46; Beebe et al., 2000, “Microfluidic tectonics: a comprehensive construction platform for microfluidic systems.” Proc. Natl. Acad. Sci. USA 97:13488-13493; Rolland et al., 2004, “Solvent-resistant photocurable “liquid Teflon” for microfluidic device fabrication” J. Amer. Chem. Soc. 126:2322-2323; Rossier et al., 2002, “Plasma etched polymer microelectrochemical systems” Lab Chip 2:145-150; Becker et al., 2002, “Polymer microfluidic devices” Talanta 56:267-287; Becker et al., 2000, “Polymer microfabrication methods for microfluidic analytical applications” Electrophoresis 21:12-26; Terry et al., 1979, A Gas Chromatography Air Analyzer Fabricated on a Silicon Wafer, IEEE Trans. on Electron Devices, v. ED-26, pp. 1880-1886; Berg et al., 1994, Micro Total Analysis Systems, New York, Kluwer; Webster et al., 1996, Monolithic Capillary Gel Electrophoresis Stage with On-Chip Detector in International Conference On Micro Electromechanical Systems, MEMS 96, pp. 491-496; and Mastrangelo et al., 1989, Vacuum-Sealed Silicon Micromachined Incandescent Light Source, in Intl. Electron Devices Meeting, IDEM 89, pp. 503-506; U.S. Pat. Nos. U.S. Pat. No. 6,960,437 (Nucleic acid amplification utilizing microfluidic devices); U.S. Pat. No. 6,899,137 (Microfabricated elastomeric valve and pump systems); U.S. Pat. No. 6,767,706 B2 (Integrated active flux microfluidic devices and methods); U.S. Pat. No. 6,752,922 (Microfluidic chromatography); U.S. Pat. No. 6,408,878 (Microfabricated elastomeric valve and pump systems); U.S. Patent Application publication Nos. 20050072946; 20050000900; 20020127736; 20020109114; 20040115838; 20030138829; 20020164816; 20020127736; 20040229349; 20040224380; 20040072278 and 20020109114; and PCT patent publications WO 2005/084191; WO05030822A2; and WO 01/01025.
  • EXAMPLE Protocols for Making Device With Microfluidic Sieve Valve
  • Making Su8-2010 10 μm/Spr220-7 15 μm/AZ-50 40 μm flow molds &*&
    • 1. Spin Su8-2025 at 3000 rpm for 45 s. with an acceleration of 10.
    • 2. Soft bake mold for 1 min./3 min. at 65° C./95° C.
    • 3. Expose mold 50 s. real time on MJB mask aligner (7 mW/cm2).
    • 4. Bake mold post-exposure for 1 min./3 min. at 65° C./95° C.
    • 5. Develop in Su8 nano developer. Rinse in fresh Su8 nano developer and determine if developed by looking at mold under microscope.
    • 6. Once developed, hard bake mold at 150° C. for 2 hr.
    • 7. Expose mold to HMDS vapor for 90 s.
    • 8. Spin Spr220-7 (cold, straight from refrigerator) at 1500 rpm for 1 min. with an acceleration of 15.
    • 9. Soft bake mold for 90 s. at 105° C.
    • 10. Expose mold under a 20,000 dpi positive transparency mask (CAD/Art Services) for 3.2 min. real time on MJB mask aligner (POWER).
    • 11. Develop mold in MF-319 developer and rinse under a stream of H 20. Determine if developed by looking at mold under microscope. Spr develops rather quickly, except for areas around the Su8 layer. Therefore, some areas may get overdeveloped when trying to remove residual resist around Su8 portions.
    • 12. Hard bake 2 hr. at 200° C.
    • 13. Expose mold to HMDS vapor for 90 s.
    • 14. Spin AZ-50 (cold, straight from refrigerator) at 1600 rpm for 1 min. with an acceleration of 15.
    • 15. Soft bake mold for 1 min./5 min./1 min. at 65° C./115° C./65° C.
    • 16. Expose mold under a 20,000 dpi positive transparency mask (CAD/Art Services) for 4 min. real time on MJB mask aligner (7 mW/cm2).
    • 17. Develop mold in 3:1 H20:2401 developer. Rinse mold under a stream of H 20.
    • 18. Once developed (determine by visualization under microscope), reflow/hard bake 3 hr. at 200° C. Note: Temperatures for hard bakes are ramped up and down from room temperature by either turning on or off the hot plate. This will prevent resist cracking.
  • Making Su8-2025 23 μm control molds
    • 1. Spin Su8-2025 @ 3000 rpm for 45 s. with an acceleration of 10.
    • 2. Soft bake mold for 2 min./5 min. at 65° C./95° C.
    • 3. Expose mold under a 20,000 dpi negative transparency mask (CAD/Art Services) 1.2 min. real time on MJB mask aligner (7 mW/cm2).
    • 4. Bake mold post-exposure for 2 min./5 min. at 65° C./95° C.
    • 5. Develop in Su8 nano developer. Rinse in fresh Su8 nano developer and determine if developed by looking at mold under microscope.
    • 6. Once developed, bake mold at 95° C. for 45 s to evaporate excess solvent.
  • Fabrication of 3-layer RTV device with push-up valves
    • 1. Prepare 5:1 GE RTV A:RTV B (mix 1 min., de-foam 5 min.).
    • 2. Expose flow mold to TMCS vapor for 2 min.
    • 3. Pour 30 g 5:1 GE RTV A:RTV B on respective flow mold.
    • 4. De-gas flow mold under vacuum.
    • 5. Bake flow mold 45 min. at 80° C.
    • 6. While flow mold is de-gassing, prepare 20:1 GE RTV A:RTV B (mix 1 min., de-foam 5 min.).
    • 7. Expose control mold to TMCS vapor for 2 min.
    • 8. Spin 20:1 RTV mix at 2000 rpm for 60 s. with a 15 s. ramp.
    • 9. Let RTV settle on control mold for 30 min. before baking 30 min. at 80
    • 10. Bake control mold 30 min. at 80° C.
    • 11. Cut devices out of flow mold and punch holes with 650 μm diameter punch tool (Technical Innovations #CR0350255N20R4).
    • 12. Clean flow device with transparent tape and align to control mold.
    • 13. Bake 2-layer device for 45 min. at 80° C.
    • 14. While 2-layer device is baking, prepare 20:1 GE RTV A:RTV B (mix 1 min., de-foam 5 min.) to spin on blank silicon wafer.
    • 15. Expose blank(s) to TMCS vapor for 2 min.
    • 16. Spin 20:1 RTV mix on blank wafer(s) at 1600 rpm for 60 s. with a 15 s. ramp.
    • 17. Bake blank wafer for 30 min. at 80° C.
    • 18. Cut out 2-layer device(s) from control mold(s), clean with tape and mount on blank wafer(s). Check for debris and collapsed valves. Collapsed valves can be fixed by applying pneumatic pressure with a syringe to the respective control channel(s). This should overcome valves sticking to channels. Once pressure is applied and released, peel device back from blank wafer and re-mount.
    • 19. Bake 3-layer RTV device(s) for 6-18 hr. Less is best (devices can still handle 30 psi without delaminating).
    • 20. If output holes need to be punched, do so with technical innovation titanium nitride coated punch (#CR0830655N14R4).
    • 21. Cut 3-layer device(s) out, clean with tape and mount on RCA cleaned glass slide(s). Check for collapse as in (18).
    • 22. Bake finished devices overnight at 80° C.
  • Although the present invention has been described in detail with reference to specific embodiments, those of skill in the art will recognize that modifications and improvements are within the scope and spirit of the invention, as set forth in the claims which follow. All publications and patent documents (patents, published patent applications, and unpublished patent applications) cited herein are incorporated herein by reference as if each such publication or document was specifically and individually indicated to be incorporated herein by reference. Citation of publications and patent documents is not intended as an admission that any such document is pertinent prior art, nor does it constitute any admission as to the contents or date of publication of the same. The invention having now been described by way of written description and example, those of skill in the art will recognize that the invention can be practiced in a variety of embodiments and that the foregoing description and examples are for purposes of illustration and not limitation of the following claims.

Claims (20)

1. A microfabricated sieve valve structure comprising an elastomeric membrane that separates a first channel lumen and a second channel lumen,
wherein pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 50% of the cross-sectional area when the membrane is not deflected.
2. The structure of claim 1 wherein the cross-sectional profile of the second channel is rectangular.
3. The structure of claim 1 wherein pressurizing the first channel over a wide range of pressures causes the membrane to be deflected into the second channel lumen and reduce the cross-sectional area of the second channel lumen by not more than 90% and not less than 75% of the cross-sectional area when the membrane is not deflected.
4. The structure of claim 1 wherein the range of pressures is a range of at least 7 psi.
5. The structure of claim 3 wherein the range of pressures encompasses a range of 18-30 psi.
6. The structure of claim 1 wherein the sieve valve has a retention size of from 1 micron to 20 microns.
7. A microfluidic device comprising two or more sieve valves.
8. The device of claim 7 wherein a chromatographic separation medium is disposed between two sieve valves thereby forming a separation column.
9. The device of claim 7 that comprises more than 20 separation columns.
10. A microfluidic device comprising a microfluidic chromatography column, said column comprising a chromatographic separation medium disposed behind a sieve valve, and optionally disposed between two sieve valves.
11. The device of claim 10 wherein the chromatographic separation medium comprises a polymeric bead coupled to a ligand.
12. The device of claim 11 wherein the beads have been derivatized to bind a nucleic acid.
13. The device of claim 12 wherein the beads have been derivatized with oligo(dT).
14. The device of claim 10 wherein the beads have been derivatized with a protein, optionally an antibody.
15. The device of claim 7 that contains five or more sieve valves paired with conventional valves.
16. A microfluidic device comprising two or more sieve valves paired with conventional valves.
17. A method of making a microfluidic column in a microfluidic device, wherein the device comprises a flow channel and a sieve valve positioned to reduce the cross-sectional area of the lumen of the flow channel when closed, the method comprising
providing a suspension of chromatography beads in the flow channel ante to the sieve valve, wherein the valve is closed and the beads are of a size that is retained by the closed sieve valve;
flowing the suspension through the flow channel, whereby the movement of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel.
18. The method of claim 17 wherein the device comprises two or more sieve valves each positioned to reduce the cross-sectional area of the lumen of the flow channel when closed, said method comprising:
providing the suspension of chromatography beads ante to a second sieve valve, wherein said second sieve valve is open and is ante to the closed sieve valve, and wherein the beads are of a size that is retained by the second sieve valve;
flowing the suspension of chromatographic beads through the flow channel through and past the second sieve valve, wherein the flow of the beads is impeded by the closed sieve valve and the solution in which the beads are suspended flows through the flow channel, thereby producing a column of beads in the flow channel; and,
closing the second sieve valve, thereby trapping the beads betwixt the sieve valves.
19. A method for trapping particles in a microfluidic flow channel of a microfluidic device, the method comprising:
providing a suspension of the particles in a flow channel ante to a closed sieve valve, wherein the particles are of a size that is retained by the closed sieve valve;
flowing the suspension through the flow channel, whereby the movement of the particles is impeded by the closed sieve valve and the solution in which the particles are suspended flows through the flow channel, thereby trapping the particles in the flow channel.
20. The method of claim 19 wherein the particles are living cells.
US11/792,170 2004-12-03 2005-12-05 Microfluidic Sieve Valves Abandoned US20080264863A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/792,170 US20080264863A1 (en) 2004-12-03 2005-12-05 Microfluidic Sieve Valves

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US63312104P 2004-12-03 2004-12-03
US11/792,170 US20080264863A1 (en) 2004-12-03 2005-12-05 Microfluidic Sieve Valves
PCT/US2005/043833 WO2006060748A2 (en) 2004-12-03 2005-12-05 Microfluidic sieve valves

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/043833 A-371-Of-International WO2006060748A2 (en) 2004-12-03 2005-12-05 Microfluidic sieve valves

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/171,329 Division US8932461B2 (en) 2004-12-03 2011-06-28 Microfluidic sieve valves

Publications (1)

Publication Number Publication Date
US20080264863A1 true US20080264863A1 (en) 2008-10-30

Family

ID=36565825

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/792,170 Abandoned US20080264863A1 (en) 2004-12-03 2005-12-05 Microfluidic Sieve Valves
US13/171,329 Expired - Fee Related US8932461B2 (en) 2004-12-03 2011-06-28 Microfluidic sieve valves

Family Applications After (1)

Application Number Title Priority Date Filing Date
US13/171,329 Expired - Fee Related US8932461B2 (en) 2004-12-03 2011-06-28 Microfluidic sieve valves

Country Status (2)

Country Link
US (2) US20080264863A1 (en)
WO (1) WO2006060748A2 (en)

Cited By (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070131615A1 (en) * 2005-12-07 2007-06-14 Moran Michael G Disposable chromatography valves and system
US20080108063A1 (en) * 2006-04-24 2008-05-08 Fluidigm Corporation Assay Methods
US20080129736A1 (en) * 2006-11-30 2008-06-05 Fluidigm Corporation Method and apparatus for biological sample analysis
US20080223721A1 (en) * 2007-01-19 2008-09-18 Fluidigm Corporation High Efficiency and High Precision Microfluidic Devices and Methods
US20080281090A1 (en) * 2004-12-03 2008-11-13 California Institute Of Technology Microfluidic Chemical Reaction Circuits
US20090069194A1 (en) * 2007-09-07 2009-03-12 Fluidigm Corporation Copy number variation determination, methods and systems
US20100175767A1 (en) * 1999-06-28 2010-07-15 California Institute Of Technology Microfabricated Elastomeric Valve and Pump Systems
US20100197522A1 (en) * 2005-08-30 2010-08-05 California Institute Of Technology Microfluidic Chaotic Mixing Systems And Methods
US20100230613A1 (en) * 2009-01-16 2010-09-16 Fluidigm Corporation Microfluidic devices and methods
US20110020918A1 (en) * 2005-09-13 2011-01-27 Fluidigm Corporation Microfluidic Assay Devices And Methods
US8021480B2 (en) 2001-04-06 2011-09-20 California Institute Of Technology Microfluidic free interface diffusion techniques
US8048378B2 (en) 2004-06-07 2011-11-01 Fluidigm Corporation Optical lens system and method for microfluidic devices
US8052792B2 (en) 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US8105824B2 (en) 2004-01-25 2012-01-31 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US8105550B2 (en) 2003-05-20 2012-01-31 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US8124218B2 (en) 1999-06-28 2012-02-28 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8163492B2 (en) 2001-11-30 2012-04-24 Fluidign Corporation Microfluidic device and methods of using same
US8220494B2 (en) 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
WO2012097450A1 (en) * 2011-01-19 2012-07-26 The University Of British Columbia Apparatus and method for particle separation
US8247178B2 (en) 2003-04-03 2012-08-21 Fluidigm Corporation Thermal reaction device and method for using the same
US8257666B2 (en) 2000-06-05 2012-09-04 California Institute Of Technology Integrated active flux microfluidic devices and methods
US8273574B2 (en) 2000-11-16 2012-09-25 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US8282896B2 (en) 2003-11-26 2012-10-09 Fluidigm Corporation Devices and methods for holding microfluidic devices
US8343442B2 (en) 2001-11-30 2013-01-01 Fluidigm Corporation Microfluidic device and methods of using same
US8388822B2 (en) 1996-09-25 2013-03-05 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
US8420017B2 (en) 2006-02-28 2013-04-16 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US8426159B2 (en) 2004-01-16 2013-04-23 California Institute Of Technology Microfluidic chemostat
US8445210B2 (en) 2000-09-15 2013-05-21 California Institute Of Technology Microfabricated crossflow devices and methods
US8475743B2 (en) 2008-04-11 2013-07-02 Fluidigm Corporation Multilevel microfluidic systems and methods
US8551787B2 (en) 2009-07-23 2013-10-08 Fluidigm Corporation Microfluidic devices and methods for binary mixing
US8600168B2 (en) 2006-09-13 2013-12-03 Fluidigm Corporation Methods and systems for image processing of microfluidic devices
US8617488B2 (en) 2008-08-07 2013-12-31 Fluidigm Corporation Microfluidic mixing and reaction systems for high efficiency screening
US8658418B2 (en) 2002-04-01 2014-02-25 Fluidigm Corporation Microfluidic particle-analysis systems
US8691010B2 (en) 1999-06-28 2014-04-08 California Institute Of Technology Microfluidic protein crystallography
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US8809238B2 (en) 2011-05-09 2014-08-19 Fluidigm Corporation Probe based nucleic acid detection
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
WO2014144789A2 (en) 2013-03-15 2014-09-18 Fluidigm Corporation Methods and devices for analysis of defined multicellular combinations
WO2014153651A1 (en) 2013-03-28 2014-10-02 The University Of British Columbia Microfluidic devices and methods for use thereof in multicellular assays of secretion
US8871446B2 (en) 2002-10-02 2014-10-28 California Institute Of Technology Microfluidic nucleic acid analysis
US8874273B2 (en) 2005-04-20 2014-10-28 Fluidigm Corporation Analysis engine and database for manipulating parameters for fluidic systems on a chip
US8932461B2 (en) 2004-12-03 2015-01-13 California Institute Of Technology Microfluidic sieve valves
US9039997B2 (en) 2009-10-02 2015-05-26 Fluidigm Corporation Microfluidic devices with removable cover and methods of fabrication and application
US9157116B2 (en) 2008-02-08 2015-10-13 Fluidigm Corporation Combinatorial amplification and detection of nucleic acids
US9168531B2 (en) 2011-03-24 2015-10-27 Fluidigm Corporation Method for thermal cycling of microfluidic samples
US20150346167A1 (en) * 2014-05-27 2015-12-03 Shimadzu Corporation Flow rate control mechanism and gas chromatograph including flow rate control mechanism
US9205468B2 (en) 2009-11-30 2015-12-08 Fluidigm Corporation Microfluidic device regeneration
US20160084805A1 (en) * 2010-09-23 2016-03-24 Battelle Memorial Institute System and method of preconcentrating analytes in a microfluidic device
US9353406B2 (en) 2010-10-22 2016-05-31 Fluidigm Corporation Universal probe assay methods
KR20160103347A (en) * 2015-02-24 2016-09-01 인제대학교 산학협력단 Micro Valve device and the fabricating method thereof
US9579830B2 (en) 2008-07-25 2017-02-28 Fluidigm Corporation Method and system for manufacturing integrated fluidic chips
US9644231B2 (en) 2011-05-09 2017-05-09 Fluidigm Corporation Nucleic acid detection using probes
US9714443B2 (en) 2002-09-25 2017-07-25 California Institute Of Technology Microfabricated structure having parallel and orthogonal flow channels controlled by row and column multiplexors
WO2018001767A1 (en) * 2016-06-29 2018-01-04 Miltenyi Biotec Gmbh Multilevel disposable cartridge for biological specimens
US20180209562A1 (en) * 2017-01-23 2018-07-26 Oculus Vr, Llc Fluidic switching devices
US10422362B2 (en) 2017-09-05 2019-09-24 Facebook Technologies, Llc Fluidic pump and latch gate
KR102033385B1 (en) * 2018-04-11 2019-10-18 인제대학교 산학협력단 Micro Particle Concentrator of Pneumatically Driven
US10502327B1 (en) 2016-09-23 2019-12-10 Facebook Technologies, Llc Co-casted fluidic devices
US10591933B1 (en) 2017-11-10 2020-03-17 Facebook Technologies, Llc Composable PFET fluidic device
US10648573B2 (en) 2017-08-23 2020-05-12 Facebook Technologies, Llc Fluidic switching devices
US11098737B1 (en) 2019-06-27 2021-08-24 Facebook Technologies, Llc Analog fluidic devices and systems
US11231055B1 (en) 2019-06-05 2022-01-25 Facebook Technologies, Llc Apparatus and methods for fluidic amplification
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
US11371619B2 (en) 2019-07-19 2022-06-28 Facebook Technologies, Llc Membraneless fluid-controlled valve

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8075851B2 (en) 2005-09-29 2011-12-13 Siemens Medical Solutions Usa, Inc. Microfluidic chip capable of synthesizing radioactively labeled molecules on a scale suitable for human imaging with positron emission tomography
WO2008091694A2 (en) 2007-01-23 2008-07-31 Siemens Medical Solutions Usa, Inc. Fully-automated microfluidic system for the synthesis of radiolabeled biomarkers for positron emission tomography
US8071035B2 (en) 2007-04-12 2011-12-06 Siemens Medical Solutions Usa, Inc. Microfluidic radiosynthesis system for positron emission tomography biomarkers
US8016260B2 (en) 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
CA2705213C (en) 2007-11-07 2016-10-04 The University Of British Columbia Microfluidic device and method of using same
CN105344389B (en) 2008-05-16 2018-01-02 哈佛大学 Microfluid system, method and apparatus
US8100293B2 (en) 2009-01-23 2012-01-24 Formulatrix, Inc. Microfluidic dispensing assembly
DE102011080527A1 (en) * 2011-08-05 2013-02-07 Robert Bosch Gmbh Lateral chromatographic element
WO2014138203A2 (en) 2013-03-05 2014-09-12 Board Of Regents, The University Of Texas System Microfluidic devices for the rapid and automated processing of sample populations
WO2015050998A2 (en) 2013-10-01 2015-04-09 The Broad Institute, Inc. Sieve valves, microfluidic circuits, microfluidic devices, kits, and methods for isolating an analyte
US10739338B2 (en) 2014-03-24 2020-08-11 Qt Holdings Corp Shaped articles including hydrogels and methods of manufacture and use thereof
WO2016207320A1 (en) 2015-06-26 2016-12-29 Universiteit Twente Microfluidic device and method for batch adsorption
JP7038676B2 (en) * 2016-03-18 2022-03-18 キューティー ホールディングス コーポレーション Compositions, Devices, and Methods for Cell Separation
US20200353469A1 (en) 2016-04-20 2020-11-12 University Of Virginia Patent Foundation Systems for isolating and transplanting pancreatic islets
US11110456B2 (en) 2016-07-12 2021-09-07 Hewlett-Packard Development Company, L.P. Bead packing in microfluidic channels
USD919833S1 (en) 2019-03-06 2021-05-18 Princeton Biochemicals, Inc Micro valve for controlling path of fluids in miniaturized capillary connections

Citations (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010054778A1 (en) * 1999-06-28 2001-12-27 Unger Marc A. Microfabricated elastomeric valve and pump systems
US20020005354A1 (en) * 1997-09-23 2002-01-17 California Institute Of Technology Microfabricated cell sorter
US20020012926A1 (en) * 2000-03-03 2002-01-31 Mycometrix, Inc. Combinatorial array for nucleic acid analysis
US20020058332A1 (en) * 2000-09-15 2002-05-16 California Institute Of Technology Microfabricated crossflow devices and methods
US20020109114A1 (en) * 2000-11-06 2002-08-15 California Institute Of Technology Electrostatic valves for microfluidic devices
US20020127736A1 (en) * 2000-10-03 2002-09-12 California Institute Of Technology Microfluidic devices and methods of use
US20020158022A1 (en) * 2001-04-06 2002-10-31 Fluidigm Corporation Microfluidic chromatography
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
US20030008308A1 (en) * 2001-04-06 2003-01-09 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US20030008411A1 (en) * 2000-10-03 2003-01-09 California Institute Of Technology Combinatorial synthesis system
US20030134129A1 (en) * 2001-10-11 2003-07-17 Lammertink Rob G.H. Devices utilizing self-assembled gel and method of manufacture
US20030210997A1 (en) * 2000-02-25 2003-11-13 Lopez Gabriel P. Stimuli-responsive hybrid materials containing molecular actuators and their applications
US20030217923A1 (en) * 2002-05-24 2003-11-27 Harrison D. Jed Apparatus and method for trapping bead based reagents within microfluidic analysis systems
US20040072278A1 (en) * 2002-04-01 2004-04-15 Fluidigm Corporation Microfluidic particle-analysis systems
US20040115838A1 (en) * 2000-11-16 2004-06-17 Quake Stephen R. Apparatus and methods for conducting assays and high throughput screening
US20040115731A1 (en) * 2001-04-06 2004-06-17 California Institute Of Technology Microfluidic protein crystallography
US6767706B2 (en) * 2000-06-05 2004-07-27 California Institute Of Technology Integrated active flux microfluidic devices and methods
US20040209354A1 (en) * 2002-12-30 2004-10-21 The Regents Of The University Of California Fluid control structures in microfluidic devices
US6814859B2 (en) * 2002-02-13 2004-11-09 Nanostream, Inc. Frit material and bonding method for microfluidic separation devices
US20040229349A1 (en) * 2002-04-01 2004-11-18 Fluidigm Corporation Microfluidic particle-analysis systems
US20050037471A1 (en) * 2003-08-11 2005-02-17 California Institute Of Technology Microfluidic rotary flow reactor matrix
US20050053952A1 (en) * 2002-10-02 2005-03-10 California Institute Of Technology Microfluidic nucleic acid analysis
US20050062196A1 (en) * 2001-04-06 2005-03-24 California Institute Of Technology Microfluidic protein crystallography techniques
US20050072946A1 (en) * 2002-09-25 2005-04-07 California Institute Of Technology Microfluidic large scale integration
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US20050164376A1 (en) * 2004-01-16 2005-07-28 California Institute Of Technology Microfluidic chemostat
US20060019267A1 (en) * 2004-02-19 2006-01-26 Stephen Quake Methods and kits for analyzing polynucleotide sequences
US20060196409A1 (en) * 2001-04-06 2006-09-07 California Institute Of Technology High throughput screening of crystallization materials
US20070134807A1 (en) * 2005-10-28 2007-06-14 Bao Xiaoyan R Method and device for regulating fluid flow in microfluidic devices
US20070224617A1 (en) * 2006-01-26 2007-09-27 California Institute Of Technology Mechanically induced trapping of molecular interactions
US20070248971A1 (en) * 2006-01-26 2007-10-25 California Institute Of Technology Programming microfluidic devices with molecular information
US20070254278A1 (en) * 2003-09-23 2007-11-01 Desimone Joseph M Photocurable Perfluoropolyethers for Use as Novel Materials in Microfluidic Devices
US20080138829A1 (en) * 2004-10-13 2008-06-12 Micronas Gmbh Method For Detecting and/or Determining the Concentration of at Least One Ligand
US20080281090A1 (en) * 2004-12-03 2008-11-13 California Institute Of Technology Microfluidic Chemical Reaction Circuits
US20100154890A1 (en) * 2002-09-25 2010-06-24 California Institute Of Technology Microfluidic Large Scale Integration
US20100196892A1 (en) * 1997-09-23 2010-08-05 California Institute Of Technology Methods and Systems for Molecular Fingerprinting
US20100197522A1 (en) * 2005-08-30 2010-08-05 California Institute Of Technology Microfluidic Chaotic Mixing Systems And Methods

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6221654B1 (en) 1996-09-25 2001-04-24 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
US6540895B1 (en) 1997-09-23 2003-04-01 California Institute Of Technology Microfabricated cell sorter for chemical and biological materials
US6958865B1 (en) 1998-11-12 2005-10-25 California Institute Of Technology Microlicensing particles and applications
US7459022B2 (en) 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US7306672B2 (en) 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US7144616B1 (en) 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US20050118073A1 (en) 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US6885982B2 (en) 2000-06-27 2005-04-26 Fluidigm Corporation Object oriented microfluidic design method and system
US7062418B2 (en) 2000-06-27 2006-06-13 Fluidigm Corporation Computer aided design method and system for developing a microfluidic system
US6301055B1 (en) 2000-08-16 2001-10-09 California Institute Of Technology Solid immersion lens structures and methods for producing solid immersion lens structures
US7678547B2 (en) 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
WO2002030486A2 (en) 2000-10-13 2002-04-18 Fluidigm Corporation Microfluidic device based sample injection system for analytical devices
US6951632B2 (en) 2000-11-16 2005-10-04 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
JP5162074B2 (en) 2001-04-06 2013-03-13 フルイディグム コーポレイション Polymer surface modification
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US7075162B2 (en) 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
WO2003031163A2 (en) 2001-10-08 2003-04-17 California Institute Of Technology Microfabricated lenses, methods of manufacture thereof, and applications therefor
EP1463796B1 (en) 2001-11-30 2013-01-09 Fluidigm Corporation Microfluidic device and methods of using same
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
US7059348B2 (en) 2002-05-13 2006-06-13 Fluidigm Corporation Drug delivery system
JP2005531001A (en) 2002-06-24 2005-10-13 フルイディグム コーポレイション Recirculating fluid network and use thereof
GB0302302D0 (en) 2003-01-31 2003-03-05 Glaxo Group Ltd Microfluidic apparatus and method
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7666361B2 (en) 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
WO2004094020A2 (en) 2003-04-17 2004-11-04 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
AU2004240944A1 (en) 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
EP1667829A4 (en) 2003-07-28 2008-12-10 Fluidigm Corp Image processing method and system for microfluidic devices
US7042649B2 (en) 2003-08-11 2006-05-09 California Institute Of Technology Microfabricated rubber microscope using soft solid immersion lenses
WO2005054441A2 (en) 2003-12-01 2005-06-16 California Institute Of Technology Device for immobilizing chemical and biomedical species and methods of using same
CN101189271A (en) 2004-02-13 2008-05-28 北卡罗来纳大学查珀尔希尔分校 Functional materials and novel methods for the fabrication of microfluidic devices
CN102680440A (en) 2004-06-07 2012-09-19 先锋生物科技股份有限公司 Optical lens system and method for microfluidic devices
WO2006060748A2 (en) 2004-12-03 2006-06-08 California Institute Of Technology Microfluidic sieve valves
EP1882189A2 (en) 2005-04-20 2008-01-30 Fluidigm Corporation Analysis engine and database for manipulating parameters for fluidic systems on a chip
US20090317798A1 (en) 2005-06-02 2009-12-24 Heid Christian A Analysis using microfluidic partitioning devices
WO2007033385A2 (en) 2005-09-13 2007-03-22 Fluidigm Corporation Microfluidic assay devices and methods
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US8828661B2 (en) 2006-04-24 2014-09-09 Fluidigm Corporation Methods for detection and quantification of nucleic acid or protein targets in a sample
US8055034B2 (en) 2006-09-13 2011-11-08 Fluidigm Corporation Methods and systems for image processing of microfluidic devices
EP2074341A4 (en) 2006-10-04 2013-04-10 Fluidigm Corp Microfluidic check valves
WO2008067552A2 (en) 2006-11-30 2008-06-05 Fluidigm Corporation Method and apparatus for biological sample analysis
EP2125219B1 (en) 2007-01-19 2016-08-10 Fluidigm Corporation High precision microfluidic devices and methods
US7974380B2 (en) 2007-05-09 2011-07-05 Fluidigm Corporation Method and system for crystallization and X-ray diffraction screening
CA2698545C (en) 2007-09-07 2014-07-08 Fluidigm Corporation Copy number variation determination, methods and systems
US9157116B2 (en) 2008-02-08 2015-10-13 Fluidigm Corporation Combinatorial amplification and detection of nucleic acids
US9487822B2 (en) 2008-03-19 2016-11-08 Fluidigm Corporation Method and apparatus for determining copy number variation using digital PCR
CN104043490A (en) 2008-07-25 2014-09-17 弗卢丁公司 Method and system for manufacturing integrated fluidic chips
WO2010017210A1 (en) 2008-08-07 2010-02-11 Fluidigm Corporation Microfluidic mixing and reaction systems for high efficiency screening
CN102281950B (en) 2008-12-08 2015-05-06 富鲁达公司 Programmable microfluidic digital array
US8058630B2 (en) 2009-01-16 2011-11-15 Fluidigm Corporation Microfluidic devices and methods
WO2011053790A2 (en) 2009-10-30 2011-05-05 Fluidigm Corporation Assay of closely linked targets in fetal diagnosis and coincidence detection assay for genetic analysis

Patent Citations (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005354A1 (en) * 1997-09-23 2002-01-17 California Institute Of Technology Microfabricated cell sorter
US20100196892A1 (en) * 1997-09-23 2010-08-05 California Institute Of Technology Methods and Systems for Molecular Fingerprinting
US20010054778A1 (en) * 1999-06-28 2001-12-27 Unger Marc A. Microfabricated elastomeric valve and pump systems
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6408878B2 (en) * 1999-06-28 2002-06-25 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US20030210997A1 (en) * 2000-02-25 2003-11-13 Lopez Gabriel P. Stimuli-responsive hybrid materials containing molecular actuators and their applications
US20020012926A1 (en) * 2000-03-03 2002-01-31 Mycometrix, Inc. Combinatorial array for nucleic acid analysis
US6767706B2 (en) * 2000-06-05 2004-07-27 California Institute Of Technology Integrated active flux microfluidic devices and methods
US20100120018A1 (en) * 2000-06-05 2010-05-13 California Institute Of Technology Integrated Active Flux Microfluidic Devices and Methods
US20020058332A1 (en) * 2000-09-15 2002-05-16 California Institute Of Technology Microfabricated crossflow devices and methods
US20030008411A1 (en) * 2000-10-03 2003-01-09 California Institute Of Technology Combinatorial synthesis system
US20020127736A1 (en) * 2000-10-03 2002-09-12 California Institute Of Technology Microfluidic devices and methods of use
US20020109114A1 (en) * 2000-11-06 2002-08-15 California Institute Of Technology Electrostatic valves for microfluidic devices
US20040115838A1 (en) * 2000-11-16 2004-06-17 Quake Stephen R. Apparatus and methods for conducting assays and high throughput screening
US20040115731A1 (en) * 2001-04-06 2004-06-17 California Institute Of Technology Microfluidic protein crystallography
US20020158022A1 (en) * 2001-04-06 2002-10-31 Fluidigm Corporation Microfluidic chromatography
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
US20050062196A1 (en) * 2001-04-06 2005-03-24 California Institute Of Technology Microfluidic protein crystallography techniques
US20070169686A1 (en) * 2001-04-06 2007-07-26 California Institute Of Technology Systems and methods for mixing reactants
US7217367B2 (en) * 2001-04-06 2007-05-15 Fluidigm Corporation Microfluidic chromatography
US20060196409A1 (en) * 2001-04-06 2006-09-07 California Institute Of Technology High throughput screening of crystallization materials
US6960437B2 (en) * 2001-04-06 2005-11-01 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US20050000900A1 (en) * 2001-04-06 2005-01-06 Fluidigm Corporation Microfluidic chromatography
US20050221373A1 (en) * 2001-04-06 2005-10-06 California Institute Of Technology Nucleic acid amplification using microfluidic devices
US20030008308A1 (en) * 2001-04-06 2003-01-09 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US20030134129A1 (en) * 2001-10-11 2003-07-17 Lammertink Rob G.H. Devices utilizing self-assembled gel and method of manufacture
US6814859B2 (en) * 2002-02-13 2004-11-09 Nanostream, Inc. Frit material and bonding method for microfluidic separation devices
US20040229349A1 (en) * 2002-04-01 2004-11-18 Fluidigm Corporation Microfluidic particle-analysis systems
US20040224380A1 (en) * 2002-04-01 2004-11-11 Fluidigm Corp. Microfluidic particle-analysis systems
US20040072278A1 (en) * 2002-04-01 2004-04-15 Fluidigm Corporation Microfluidic particle-analysis systems
US20030217923A1 (en) * 2002-05-24 2003-11-27 Harrison D. Jed Apparatus and method for trapping bead based reagents within microfluidic analysis systems
US20050072946A1 (en) * 2002-09-25 2005-04-07 California Institute Of Technology Microfluidic large scale integration
US20100154890A1 (en) * 2002-09-25 2010-06-24 California Institute Of Technology Microfluidic Large Scale Integration
US20050053952A1 (en) * 2002-10-02 2005-03-10 California Institute Of Technology Microfluidic nucleic acid analysis
US20040209354A1 (en) * 2002-12-30 2004-10-21 The Regents Of The University Of California Fluid control structures in microfluidic devices
US20050037471A1 (en) * 2003-08-11 2005-02-17 California Institute Of Technology Microfluidic rotary flow reactor matrix
US20070254278A1 (en) * 2003-09-23 2007-11-01 Desimone Joseph M Photocurable Perfluoropolyethers for Use as Novel Materials in Microfluidic Devices
US20050164376A1 (en) * 2004-01-16 2005-07-28 California Institute Of Technology Microfluidic chemostat
US20060019267A1 (en) * 2004-02-19 2006-01-26 Stephen Quake Methods and kits for analyzing polynucleotide sequences
US20080138829A1 (en) * 2004-10-13 2008-06-12 Micronas Gmbh Method For Detecting and/or Determining the Concentration of at Least One Ligand
US20080281090A1 (en) * 2004-12-03 2008-11-13 California Institute Of Technology Microfluidic Chemical Reaction Circuits
US20100197522A1 (en) * 2005-08-30 2010-08-05 California Institute Of Technology Microfluidic Chaotic Mixing Systems And Methods
US20070134807A1 (en) * 2005-10-28 2007-06-14 Bao Xiaoyan R Method and device for regulating fluid flow in microfluidic devices
US20070248971A1 (en) * 2006-01-26 2007-10-25 California Institute Of Technology Programming microfluidic devices with molecular information
US20070224617A1 (en) * 2006-01-26 2007-09-27 California Institute Of Technology Mechanically induced trapping of molecular interactions

Cited By (129)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8388822B2 (en) 1996-09-25 2013-03-05 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
US9383337B2 (en) 1996-09-25 2016-07-05 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US8846183B2 (en) 1999-06-28 2014-09-30 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8124218B2 (en) 1999-06-28 2012-02-28 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8695640B2 (en) 1999-06-28 2014-04-15 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US20100175767A1 (en) * 1999-06-28 2010-07-15 California Institute Of Technology Microfabricated Elastomeric Valve and Pump Systems
US8691010B2 (en) 1999-06-28 2014-04-08 California Institute Of Technology Microfluidic protein crystallography
US8220487B2 (en) 1999-06-28 2012-07-17 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8104515B2 (en) 1999-06-28 2012-01-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US9623413B2 (en) 2000-04-05 2017-04-18 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US8257666B2 (en) 2000-06-05 2012-09-04 California Institute Of Technology Integrated active flux microfluidic devices and methods
US9926521B2 (en) 2000-06-27 2018-03-27 Fluidigm Corporation Microfluidic particle-analysis systems
US8445210B2 (en) 2000-09-15 2013-05-21 California Institute Of Technology Microfabricated crossflow devices and methods
US8658368B2 (en) 2000-09-15 2014-02-25 California Institute Of Technology Microfabricated crossflow devices and methods
US8658367B2 (en) 2000-09-15 2014-02-25 California Institute Of Technology Microfabricated crossflow devices and methods
US8592215B2 (en) 2000-09-15 2013-11-26 California Institute Of Technology Microfabricated crossflow devices and methods
US8455258B2 (en) 2000-11-16 2013-06-04 California Insitute Of Technology Apparatus and methods for conducting assays and high throughput screening
US9176137B2 (en) 2000-11-16 2015-11-03 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US8673645B2 (en) 2000-11-16 2014-03-18 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US10509018B2 (en) 2000-11-16 2019-12-17 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US8273574B2 (en) 2000-11-16 2012-09-25 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US9643136B2 (en) 2001-04-06 2017-05-09 Fluidigm Corporation Microfluidic free interface diffusion techniques
US8052792B2 (en) 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US8021480B2 (en) 2001-04-06 2011-09-20 California Institute Of Technology Microfluidic free interface diffusion techniques
US8709152B2 (en) 2001-04-06 2014-04-29 California Institute Of Technology Microfluidic free interface diffusion techniques
US8343442B2 (en) 2001-11-30 2013-01-01 Fluidigm Corporation Microfluidic device and methods of using same
US8163492B2 (en) 2001-11-30 2012-04-24 Fluidign Corporation Microfluidic device and methods of using same
US9643178B2 (en) 2001-11-30 2017-05-09 Fluidigm Corporation Microfluidic device with reaction sites configured for blind filling
US8658418B2 (en) 2002-04-01 2014-02-25 Fluidigm Corporation Microfluidic particle-analysis systems
US8220494B2 (en) 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
US9714443B2 (en) 2002-09-25 2017-07-25 California Institute Of Technology Microfabricated structure having parallel and orthogonal flow channels controlled by row and column multiplexors
US8871446B2 (en) 2002-10-02 2014-10-28 California Institute Of Technology Microfluidic nucleic acid analysis
US9579650B2 (en) 2002-10-02 2017-02-28 California Institute Of Technology Microfluidic nucleic acid analysis
US10940473B2 (en) 2002-10-02 2021-03-09 California Institute Of Technology Microfluidic nucleic acid analysis
US10328428B2 (en) 2002-10-02 2019-06-25 California Institute Of Technology Apparatus for preparing cDNA libraries from single cells
US10131934B2 (en) 2003-04-03 2018-11-20 Fluidigm Corporation Thermal reaction device and method for using the same
US8247178B2 (en) 2003-04-03 2012-08-21 Fluidigm Corporation Thermal reaction device and method for using the same
US9150913B2 (en) 2003-04-03 2015-10-06 Fluidigm Corporation Thermal reaction device and method for using the same
US8367016B2 (en) 2003-05-20 2013-02-05 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US8808640B2 (en) 2003-05-20 2014-08-19 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US8105550B2 (en) 2003-05-20 2012-01-31 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US8282896B2 (en) 2003-11-26 2012-10-09 Fluidigm Corporation Devices and methods for holding microfluidic devices
US8426159B2 (en) 2004-01-16 2013-04-23 California Institute Of Technology Microfluidic chemostat
US9340765B2 (en) 2004-01-16 2016-05-17 California Institute Of Technology Microfluidic chemostat
US8105824B2 (en) 2004-01-25 2012-01-31 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US8721968B2 (en) 2004-06-07 2014-05-13 Fluidigm Corporation Optical lens system and method for microfluidic devices
US9234237B2 (en) 2004-06-07 2016-01-12 Fluidigm Corporation Optical lens system and method for microfluidic devices
US8048378B2 (en) 2004-06-07 2011-11-01 Fluidigm Corporation Optical lens system and method for microfluidic devices
US10106846B2 (en) 2004-06-07 2018-10-23 Fluidigm Corporation Optical lens system and method for microfluidic devices
US8512640B2 (en) 2004-06-07 2013-08-20 Fluidigm Corporation Optical lens system and method for microfluidic devices
US10745748B2 (en) 2004-06-07 2020-08-18 Fluidigm Corporation Optical lens system and method for microfluidic devices
US8926905B2 (en) 2004-06-07 2015-01-06 Fluidigm Corporation Optical lens system and method for microfluidic devices
US9663821B2 (en) 2004-06-07 2017-05-30 Fluidigm Corporation Optical lens system and method for microfluidic devices
US8932461B2 (en) 2004-12-03 2015-01-13 California Institute Of Technology Microfluidic sieve valves
US20080281090A1 (en) * 2004-12-03 2008-11-13 California Institute Of Technology Microfluidic Chemical Reaction Circuits
US8206593B2 (en) 2004-12-03 2012-06-26 Fluidigm Corporation Microfluidic chemical reaction circuits
US9316331B2 (en) 2005-01-25 2016-04-19 Fluidigm Corporation Multilevel microfluidic systems and methods
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US8874273B2 (en) 2005-04-20 2014-10-28 Fluidigm Corporation Analysis engine and database for manipulating parameters for fluidic systems on a chip
US20100197522A1 (en) * 2005-08-30 2010-08-05 California Institute Of Technology Microfluidic Chaotic Mixing Systems And Methods
US9103825B2 (en) 2005-09-13 2015-08-11 Fluidigm Corporation Microfluidic assay devices and methods
US20110020918A1 (en) * 2005-09-13 2011-01-27 Fluidigm Corporation Microfluidic Assay Devices And Methods
US8920645B2 (en) * 2005-12-07 2014-12-30 Tarpon Biosystems Inc. Disposable chromatography valves and system
US20070131615A1 (en) * 2005-12-07 2007-06-14 Moran Michael G Disposable chromatography valves and system
US8420017B2 (en) 2006-02-28 2013-04-16 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US9090934B2 (en) 2006-04-24 2015-07-28 Fluidigm Corporation Methods for detection and quantification of nucleic acid or protein targets in a sample
US20080108063A1 (en) * 2006-04-24 2008-05-08 Fluidigm Corporation Assay Methods
US9644235B2 (en) 2006-04-24 2017-05-09 Fluidigm Corporation Methods for detection and quantification of nucleic acid or protein targets in a sample
US8828661B2 (en) 2006-04-24 2014-09-09 Fluidigm Corporation Methods for detection and quantification of nucleic acid or protein targets in a sample
US8600168B2 (en) 2006-09-13 2013-12-03 Fluidigm Corporation Methods and systems for image processing of microfluidic devices
US8849037B2 (en) 2006-09-13 2014-09-30 Fluidigm Corporation Methods and systems for image processing of microfluidic devices
US8473216B2 (en) 2006-11-30 2013-06-25 Fluidigm Corporation Method and program for performing baseline correction of amplification curves in a PCR experiment
US20080129736A1 (en) * 2006-11-30 2008-06-05 Fluidigm Corporation Method and apparatus for biological sample analysis
US20080223721A1 (en) * 2007-01-19 2008-09-18 Fluidigm Corporation High Efficiency and High Precision Microfluidic Devices and Methods
US8591834B2 (en) 2007-01-19 2013-11-26 Fluidigm Corporation High efficiency and high precision microfluidic devices and methods
US8157434B2 (en) 2007-01-19 2012-04-17 Fluidigm Corporation High efficiency and high precision microfluidic devices and methods
US20090069194A1 (en) * 2007-09-07 2009-03-12 Fluidigm Corporation Copy number variation determination, methods and systems
US8148078B2 (en) 2007-09-07 2012-04-03 Fluidigm Corporation Copy number variation determination, methods and systems
US8450065B2 (en) 2007-09-07 2013-05-28 Fluidigm Corporation Copy number variation determination, methods and systems
US9157116B2 (en) 2008-02-08 2015-10-13 Fluidigm Corporation Combinatorial amplification and detection of nucleic acids
US8616227B1 (en) 2008-04-11 2013-12-31 Fluidigm Corporation Multilevel microfluidic systems and methods
US8475743B2 (en) 2008-04-11 2013-07-02 Fluidigm Corporation Multilevel microfluidic systems and methods
US9579830B2 (en) 2008-07-25 2017-02-28 Fluidigm Corporation Method and system for manufacturing integrated fluidic chips
US9182322B2 (en) 2008-08-07 2015-11-10 Fluidigm Corporation Microfluidic mixing and reaction systems for high efficiency screening
US8617488B2 (en) 2008-08-07 2013-12-31 Fluidigm Corporation Microfluidic mixing and reaction systems for high efficiency screening
US8389960B2 (en) 2009-01-16 2013-03-05 Fluidigm Corporation Microfluidic devices and methods
US9383295B2 (en) 2009-01-16 2016-07-05 Fluidigm Corporation Microfluidic devices and methods
US8058630B2 (en) 2009-01-16 2011-11-15 Fluidigm Corporation Microfluidic devices and methods
US20100230613A1 (en) * 2009-01-16 2010-09-16 Fluidigm Corporation Microfluidic devices and methods
US8551787B2 (en) 2009-07-23 2013-10-08 Fluidigm Corporation Microfluidic devices and methods for binary mixing
US9498776B2 (en) 2009-10-02 2016-11-22 Fluidigm Corporation Microfluidic devices with removable cover and methods of fabrication and application
US9039997B2 (en) 2009-10-02 2015-05-26 Fluidigm Corporation Microfluidic devices with removable cover and methods of fabrication and application
US9205468B2 (en) 2009-11-30 2015-12-08 Fluidigm Corporation Microfluidic device regeneration
US20160084805A1 (en) * 2010-09-23 2016-03-24 Battelle Memorial Institute System and method of preconcentrating analytes in a microfluidic device
US9353406B2 (en) 2010-10-22 2016-05-31 Fluidigm Corporation Universal probe assay methods
WO2012097450A1 (en) * 2011-01-19 2012-07-26 The University Of British Columbia Apparatus and method for particle separation
US9168531B2 (en) 2011-03-24 2015-10-27 Fluidigm Corporation Method for thermal cycling of microfluidic samples
US10226770B2 (en) 2011-03-24 2019-03-12 Fluidigm Corporation System for thermal cycling of microfluidic samples
US9644231B2 (en) 2011-05-09 2017-05-09 Fluidigm Corporation Nucleic acid detection using probes
US8809238B2 (en) 2011-05-09 2014-08-19 Fluidigm Corporation Probe based nucleic acid detection
US9587272B2 (en) 2011-05-09 2017-03-07 Fluidigm Corporation Probe based nucleic acid detection
WO2014144789A2 (en) 2013-03-15 2014-09-18 Fluidigm Corporation Methods and devices for analysis of defined multicellular combinations
EP3581641A1 (en) 2013-03-15 2019-12-18 Fluidigm Corporation Methods and devices for analysis of defined multicellular combinations
WO2014153651A1 (en) 2013-03-28 2014-10-02 The University Of British Columbia Microfluidic devices and methods for use thereof in multicellular assays of secretion
EP3865212A1 (en) 2013-03-28 2021-08-18 The University of British Columbia Microfluidic devices and methods for use thereof in multicellular assays of secretion
US9739755B2 (en) * 2014-05-27 2017-08-22 Shimadzu Corporation Flow rate control mechanism and gas chromatograph including flow rate control mechanism
US20150346167A1 (en) * 2014-05-27 2015-12-03 Shimadzu Corporation Flow rate control mechanism and gas chromatograph including flow rate control mechanism
KR101708990B1 (en) * 2015-02-24 2017-03-08 인제대학교 산학협력단 Micro Valve device and the fabricating method thereof
KR20160103347A (en) * 2015-02-24 2016-09-01 인제대학교 산학협력단 Micro Valve device and the fabricating method thereof
US11161111B2 (en) * 2016-06-29 2021-11-02 Miltenyi Biotec B. V. & Co. KG Multilevel disposable cartridge for biological specimens
CN109475864A (en) * 2016-06-29 2019-03-15 美天施生物科技有限责任公司 Multistage disposable cartridges for Biosample
WO2018001767A1 (en) * 2016-06-29 2018-01-04 Miltenyi Biotec Gmbh Multilevel disposable cartridge for biological specimens
US10502327B1 (en) 2016-09-23 2019-12-10 Facebook Technologies, Llc Co-casted fluidic devices
US11204100B1 (en) 2016-09-23 2021-12-21 Facebook Technologies, Llc Co-casted fluidic devices
US11519511B1 (en) 2016-09-23 2022-12-06 Meta Platforms Technologies, Llc Fluidic devices and related methods and wearable devices
US10514111B2 (en) * 2017-01-23 2019-12-24 Facebook Technologies, Llc Fluidic switching devices
US10989330B1 (en) 2017-01-23 2021-04-27 Facebook Technologies, Llc Fluidic switching devices
US20180209562A1 (en) * 2017-01-23 2018-07-26 Oculus Vr, Llc Fluidic switching devices
US10648573B2 (en) 2017-08-23 2020-05-12 Facebook Technologies, Llc Fluidic switching devices
US11193597B1 (en) 2017-08-23 2021-12-07 Facebook Technologies, Llc Fluidic devices, haptic systems including fluidic devices, and related methods
US10989233B2 (en) 2017-09-05 2021-04-27 Facebook Technologies, Llc Fluidic pump and latch gate
US10422362B2 (en) 2017-09-05 2019-09-24 Facebook Technologies, Llc Fluidic pump and latch gate
US10591933B1 (en) 2017-11-10 2020-03-17 Facebook Technologies, Llc Composable PFET fluidic device
KR102033385B1 (en) * 2018-04-11 2019-10-18 인제대학교 산학협력단 Micro Particle Concentrator of Pneumatically Driven
US11231055B1 (en) 2019-06-05 2022-01-25 Facebook Technologies, Llc Apparatus and methods for fluidic amplification
US11098737B1 (en) 2019-06-27 2021-08-24 Facebook Technologies, Llc Analog fluidic devices and systems
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
US11371619B2 (en) 2019-07-19 2022-06-28 Facebook Technologies, Llc Membraneless fluid-controlled valve

Also Published As

Publication number Publication date
WO2006060748A3 (en) 2006-10-12
US8932461B2 (en) 2015-01-13
US20120061305A1 (en) 2012-03-15
WO2006060748A2 (en) 2006-06-08

Similar Documents

Publication Publication Date Title
US8932461B2 (en) Microfluidic sieve valves
Wei et al. Particle sorting using a porous membrane in a microfluidic device
US8551787B2 (en) Microfluidic devices and methods for binary mixing
Irimia et al. Cell handling using microstructured membranes
US6752922B2 (en) Microfluidic chromatography
US20020164816A1 (en) Microfluidic sample separation device
US8343756B2 (en) Devices and methods for cell manipulation
Ali et al. Nanochromatography and nanocapillary electrophoresis: pharmaceutical and environmental analyses
US10053731B2 (en) Sieve valves, microfluidic circuits, microfluidic devices, kits, and methods for isolating an analyte
US8226907B2 (en) Microfluidic devices and methods of making the same
JP5124054B2 (en) Microfluidic devices and systems incorporating protective layers
Kim et al. Quantitative and qualitative analysis of a microfluidic DNA extraction system using a nanoporous AlO x membrane
JP2004093553A (en) Cascaded hydrodynamic focusing method and apparatus for microfluidic channels
Sahore et al. Droplet microfluidics in thermoplastics: device fabrication, droplet generation, and content manipulation using integrated electric and magnetic fields
Didar et al. High throughput multilayer microfluidic particle separation platform using embedded thermoplastic-based micropumping
Kendall et al. Ex situ integration of multifunctional porous polymer monoliths into thermoplastic microfluidic chips
Chen et al. Isolation of plasma from whole blood using a microfludic chip in a continuous cross-flow
Malic et al. Current state of intellectual property in microfluidic nucleic acid analysis
Behrmann et al. A microfluidic porous solid phase suitable for mass production
KR20070122415A (en) A micro-mixing device of samples and a lab-on-a-chip comprising said device
Han et al. An on-chip blood serum separator using self-assembled silica microsphere filter
Carlier et al. SU-8 technology and monolithic columns for integration in a biological lab-on-chip
Chen et al. Microdevice for continuous isolation of plasma from whole blood
Barrett Polymers in microfluidics
Chen et al. Design and fabrication of microfluidic chip with micro/nano structures

Legal Events

Date Code Title Description
AS Assignment

Owner name: CALIFORNIA INSTITUTE OF TECHNOLOGY, CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:QUAKE, STEPHEN R.;MARCUS, JOSHUA S.;HANSEN, CARL L.;REEL/FRAME:021238/0135;SIGNING DATES FROM 20080508 TO 20080709

AS Assignment

Owner name: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:CALIFORNIA INSTITUTE OF TECHNOLOGY;REEL/FRAME:022190/0163

Effective date: 20090130

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: ENERGY, UNITED STATES DEPARTMENT OF, DISTRICT OF C

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:CALIFORNIA INSTITUTE OF TECHNOLOGY;REEL/FRAME:029435/0066

Effective date: 20090130