US20080188162A1 - Electrochemical mechanical polishing apparatus conditioning method, and conditioning solution - Google Patents

Electrochemical mechanical polishing apparatus conditioning method, and conditioning solution Download PDF

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Publication number
US20080188162A1
US20080188162A1 US12/068,300 US6830008A US2008188162A1 US 20080188162 A1 US20080188162 A1 US 20080188162A1 US 6830008 A US6830008 A US 6830008A US 2008188162 A1 US2008188162 A1 US 2008188162A1
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US
United States
Prior art keywords
polishing
surface
polishing pad
substrate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/068,300
Inventor
Itsuki Kobata
Yasushi Toma
Akira Kodera
Tsukuru Suzuki
Yuji Makita
Takayuki Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007026900A priority Critical patent/JP2008192908A/en
Priority to JP2007-026900 priority
Priority to JP2007-029898 priority
Priority to JP2007029898A priority patent/JP2008198673A/en
Priority to JP2007058601A priority patent/JP2008221346A/en
Priority to JP2007-058261 priority
Priority to JP2007058261A priority patent/JP2008221344A/en
Priority to JP2007-058601 priority
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOBATA, ITSUKI, KODERA, AKIRA, MAKITA, YUJI, SAITO, TAKAYUKI, SUZUKI, TSUKURU, TOMA, YASUSHI
Publication of US20080188162A1 publication Critical patent/US20080188162A1/en
Application status is Abandoned legal-status Critical

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