US20070210533A1 - Interface seal - Google Patents

Interface seal Download PDF

Info

Publication number
US20070210533A1
US20070210533A1 US11675901 US67590107A US2007210533A1 US 20070210533 A1 US20070210533 A1 US 20070210533A1 US 11675901 US11675901 US 11675901 US 67590107 A US67590107 A US 67590107A US 2007210533 A1 US2007210533 A1 US 2007210533A1
Authority
US
Grant status
Application
Patent type
Prior art keywords
portion
main body
seal member
peripheral lip
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11675901
Inventor
Tsutomu Okabe
Toshihiko Miyajima
Hitoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/46Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/002Sealings comprising at least two sealings in succession
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/021Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F16J15/025Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip

Abstract

A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably sealing, when communicating a plurality of spaces separated from an external space, these spaces from an external environment, is thereby provided.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • The present invention relates generally to a member employed corresponding to a product storage container used for storing an object such as a semiconductor, a panel for a flat panel display and an optical disc in a process of manufacturing the object undergoing a process under a high-purity environment, i.e., corresponding to the container retained in a state where an internal pressure thereof is different from an ambient pressure. The present invention relates to more particularly to a so-called interface seal (which will hereinafter be referred to as a seal member) used when connecting the container, which is a so-called FOUP (Front-Opening Unified Pod) employed to store 300 mm semiconductor wafers each having a diameter of 300 mm mainly in a processing step of the 300 mm semiconductor wafers, to a gas replacement system for replacing a gas sealed in an interior of the container.
  • 2. Related Background Art
  • A connecting portion between the FOUP and the gas replacement system connected to the FOUP is, as described above, exemplified by way of a specific example using the seal member according to the present invention. In such a usage example, especially a stable sealing characteristic with respect to an ambient environment is required of the seal member. Accordingly, on the occasion of describing the present invention, particularly technologies related to the FOUP will be described as exemplifications of the prior arts.
  • In the semiconductor device manufacturing process, high purification required in the process has hitherto involved attaining cleanliness of rooms in the whole factory for conducting a variety of processes for the wafers. With a larger diameter of the wafer, this type of measure leads to a problem of cost for acquiring the (high-purity) environment in terms of the construction. Over the recent years, there have been adopted means for ensuring mini-environment spaces kept in a high degree of purity for each of the processing apparatuses.
  • To be specific, a scheme is not to enhance the degree of purity of the whole factor but to keep in the high degree of purity only an interior of each processing apparatus in the manufacturing process and an interior of a storage container (which will hereinafter be called a pod) while being carried. This pod is, as described above, generically referred to as the FOUP. Thus, the same effect as by attaining the cleanliness of the rooms of the whole factory, is acquired by adopting a so-called mini-environment system that highly purifies only slight amounts of spaces, thereby actualizing an efficient production process in a way that reduces an investment for equipment and a maintenance cost as well.
  • A semiconductor processing apparatus etc corresponding to the so-called mini-environment system will hereinafter be briefly described. The semiconductor wafer processing apparatus mainly includes a Loadport portion in which to perform operations of placing a pod for inserting and removing the wafer and opening/closing a cover of the pod, a carrier chamber in which a robot is disposed inside and carries the wafer, and a processing chamber in which the wafer is received from the robot and subjected to a variety of processes. The respective joined portions are sectioned respectively by corresponding pieces of partitions and covers. In the carrier chamber of the semiconductor wafer processing apparatus, an air flow is generated by a fan provided at an upper portion of the carrier chamber toward a lower part from an upper part of the carrier chamber in order to keep the high degree of purity by purging the carrier chamber of dusts. The existence of the air flow causes the dusts to be discharged toward the lower side at all times.
  • Above the Loadport portion, the pod defined as the storage container for a stored product such as a silicon wafer (which will hereinafter simply be termed a wafer) is secured onto a predetermined mounting plate. As described earlier, the interior of the carrier chamber is kept in the high degree of purity for processing the wafer, and the robot is disposed inside the carrier chamber. The wafer is carried by the robot arm between the interior of the pod and the interior of the processing chamber. The processing chamber normally includes a variety of mechanisms for executing the processes such as forming a thin film on the wafer surface and processing the thin film, however, descriptions of the constructions thereof, which are not related directly to the present invention, are therefore omitted herein.
  • The pod has a space for internally accommodating the wafer defined as an object to be processed. The pod includes a box-shaped main body portion having an opening portion on any one of surfaces, and a cover for airtightly closing the opening portion. A multi-staged rack for stacking the wafers in one direction is disposed in an interior of the main body portion. The pod internally accommodates the wafers placed at a fixed interval in the rack. Note that the direction of stacking the wafers is set in a perpendicular direction in the FOUP exemplified herein. An opening portion is provided on the side of the Loadport portion of the carrier chamber. The opening portion is disposed in a position having a face-to-face relationship with the opening portion of the pod when the pod is disposed above the Loadport portion so as to get close to the opening portion. An opener is provided in the vicinity of the opening portion inwardly of the carrier chamber. After the opener has taken the cover out of the pod, the wafer is carried in or carried out by the robot arm.
  • Normally, a recessed portion, an intake port and an exhaust port are provided at the lower portion of the pod. The plate surface is provided with a positioning pin that regulates a pod mounting position by fitting in the recessed portion, a plate-side intake port abutting on the pod-side intake port, and a plate-side exhaust port abutting on the pod-side exhaust port. Seal members for enhancing air-tightness of abutting portions at which the plate-side intake/exhaust ports abut on the pod-side ports, are disposed in the opening portions of the plate-side intake/exhaust ports. Filter members are disposed in the vicinities of the opening portions of the pod-side intake/exhaust ports, thereby preventing dusts etc from entering the interior of the pod via the ports. The intake port and the exhaust port on the plate side are connected via respective check valves and flow meters to a replacement gas supply source and to a replacement gas discharge source as external devices.
  • For instance, Japanese Patent Application Laid-Open No. 2002-531934 or Japanese Patent Application Laid-Open No. 8-203993 discusses outlines of the constructions described above. Normally, the wafer restrained from adhesion of the dusts is brought into the pod for accommodating the products, and an internal atmosphere of the pod is replaced by an inert gas such as clean nitrogen, thus restraining occurrence a chemical change caused by natural oxidation or organic contamination over the wafer surface in an accommodated state. Such an internal atmosphere replacing operation is conducted via a gas flow path formed extending from the intake/exhaust ports provided in the pod and the plate in the state where the pod is mounted on the plate. Accordingly, the gas flow path is required to have a size enabling a sufficient amount of replacement gas or internal atmosphere to flow, and is required to ensure sufficient tightness for preventing the replacement gas or the internal atmosphere from being contaminated. The seal members used at these intake/exhaust ports are therefore demanded to ensure the sufficient sealing characteristic that meet these requirements.
  • So-called packing taking a ring-like shape has hitherto been utilized as the seal member. FIGS. 8A and 8B illustrate schematic sectional views of the pod-side exhaust (intake) port and the plate-side exhaust (intake) port in the case of using the packing. FIG. 8A illustrates a case of using a seal member 18 a taking a so-called domed shape having a curved internal surface shape of which an inside diameter gets smaller as it gets closer to an upper opening. FIG. 8B illustrates a case of using a seal member 18 b taking a so-called funnel-like shape having a curved internal surface shape of which an inside diameter gets larger as it gets closer to the upper opening.
  • If a pressure within the packing, i.e., a pressure on the side of the gas flow path is larger than a pressure outside the packing, a pressure causing the domed shape to deform outside is applied to the seal member 18 a illustrated in FIG. 8A. A case of using the seal member 18 a on the side of the intake port is considered as this situation. In this case, a deforming pressure is applied to the sealing surface of the seal member 18 a so as to tightly fit to a port edge portion on the pod side, whereby the sealing characteristic is more strengthened and stabilized. Whereas if the internal pressure of the packing is smaller than the outside pressure, namely in the case of employing the seal member 18 a on the side of the exhaust port, the deforming pressure causing the domed shape to deform inside as indicated by an arrowhead in FIG. 8A, is applied due to this pressure difference. As a result, the tight fitting characteristic between the sealing surface of the seal member 18 a and the pod-side port edge portion decreases, and it is also considered that a gap etc occurs in an extreme case.
  • If the internal pressure of the packing is smaller than the external pressure of the packing, a pressure causing the funnel-like shape to deform inside is applied to the seal member 18 b illustrated in FIG. 8B. A case of using the seal member 18 b on the side of the exhaust port is considered as this situation. In this case, a deforming pressure is applied to the sealing surface of the seal member 18 b so as to tightly fit to the port edge portion on the side of the pod 2, whereby the sealing characteristic is more strengthened and stabilized. Whereas if the internal pressure of the packing is larger than the outside pressure, namely in the case of employing the seal member 18 a on the side of the intake port, the deforming pressure causing the funnel-like shape to deform outside as indicated by an arrowhead in FIG. 8B, is applied due to this pressure difference. As a result, the tight fitting characteristic between the sealing surface of the seal member 18 b and the pod-side port edge portion decreases, and it is also considered that the gap etc occurs in the extreme case.
  • It is therefore difficult to share the dome-shaped seal member and the funnel-shaped seal member with each other. The dome-shaped seal member and the funnel-shaped seal member are required to be used separately depending on a positive pressure or a negative pressure taken by a should-be-sealed environment (which will hereinafter be termed an intra-seal environment). The environment in which the seal member should be provided generally changes in pressure, and hence the individual sealing characteristic changes as the environment pressure changes. It is therefore necessary for the seal member to deform at a fixed or larger level in a way that applies a load large enough to crush the seal member in order to ensure the fixed sealing characteristic. In this case, though required to apply the large load, such a problem arises that the seal member gets into plastic deformation as the seal member repeatedly gets deformed, resulting in a high frequency of exchanging the seal member. At the same time, what is demanded for ensuring the preferable sealing characteristics by uniform deformations of the seal members is to always keep pod-side surface accuracy, plate-side surface accuracy and further accuracy of the sealing surface of the seal member. This brought about a rise in cost for processing these members.
  • Japanese Patent Application Laid-Open No. 2002-510150, U.S. Pat. No. 6,164,664 or U.S. Pat. No. 5,988,233 discuss a curved domed grommet or a bellow type seal member for the purpose of preventing the plastic deformation caused by repeatedly applying the load. These configurations seem to exhibit the preferable effects in terms of preventing the plastic deformation. It is, however, considered that none of particular effects are exhibited to cope with such a problem to be solved by the present invention that the sealing characteristic changes due to the change in pressure of the intra-seal environment.
  • SUMMARY OF THE INVENTION
  • It is an object of the present invention, which was devised in view of the problems described above, to provide a seal member capable of exhibiting a preferable sealing characteristic irrespective of a change in pressure, positive pressure or negative pressure, of an intra-seal environment.
  • It is another object of the present invention to provide a seal member capable of exhibiting the preferable sealing characteristic without applying a load large enough to cause excessive deformation of the seal member and attaining strict accuracy of a sealing surface.
  • To accomplish the above objects, according to one aspect of the present invention, a seal member is disposed between an opening portion forming surface of a first space and an opening portion forming surface of a second space to separate the first and second spaces from the ambiance when connecting together the first space and the second space each having an opening portion that are capable of keeping an internal pressure at a pressure different from an ambient pressure while being each separated from the ambiance, the seal member comprising a main body portion taking a ring-shape and fixed along an outer periphery of the opening portion in any one of the opening portion forming surface of the first space and the opening portion forming surface of the second space; an inner peripheral lip portion extending from an inner peripheral portion of a ring-shaped upper surface of the main body portion substantially in a direction of another opening portion forming surface different from the opening portion forming surface on the side where the main body portion is fixed, and an outer peripheral lip portion extending from an outer peripheral portion of the ring-shaped upper surface of the main body portion substantially in the direction of another opening portion forming surface different from the opening portion forming surface on the side where the main body portion is fixed, wherein the inner peripheral lip portion takes an O-ring shape connected to the inner peripheral portion in the main body portion and can deform in a direction vertical to the ring-shaped upper surface of the main body portion, and the outer peripheral lip portion can deform in a direction substantially parallel with the ring-shaped upper surface of the main body portion.
  • It should be noted that the main body portion has, it is preferable, a hole penetrating from the ring-shaped upper surface down to a ring-shaped undersurface formed with neither the inner peripheral lip portion nor the outer peripheral lip portion between the inner peripheral lip portion and the outer peripheral lip portion. In the seal member, it is more preferable that the outer peripheral lip portion takes substantially a funnel-like shape of which an inside diameter gets larger as it gets farther away from the main body portion.
  • As compared with the grommet or the bellow type seal member described above, it is considered to employ a simple so-called O-ring shaped seal member. The O-ring shaped seal member exhibits a sufficient sealing characteristic without the large deformation and has an advantage of having high durability against a change in pressure of an intra-seal environment. When used actually, however, on the occasion of holding the O-ring between two ports, the sealing surface (which will hereinafter be described as an opposite surface) having a face-to-face relationship with the O-ring on a pod undersurface or a plate upper surface is tightly fitted to the entire peripheral area of the O-ring, and, if possible, the O-ring is required to get deformed by applying a load having a predetermined or larger value. In this point, the pod is, it is considered, hard to meet the conditions such as the tight fitting to the entire periphery and the applied load in terms of being manufactured from a resin etc. The present invention provides the lip portion taking the shape that is easy to tightly fit to the opposite surface at the outer peripheral portion, specifically the shape that is thin and extends toward the opposite surface. A certain degree of air-tightness is ensured by tightly fitting the lip portion to the opposite surface. The O-ring shaped lip portion is provided at the inner peripheral portion. The stable sealing characteristic is obtained by the O-ring shaped lip portion even in such a case that the pressure of the intra-seal environment largely changes or changes under a condition that the outer peripheral lip portion is hard to follow. Hence, it is possible to acquire preferentiality of the O-ring shaped seal member and availability of the seal member (which will hereinafter be referred to as a conventional lip) described in the prior art in a way that establishes compatibility between the preferentiality and the availability by use of the seal member according to the present invention.
  • For example, an effect in the case of using the seal member according to the present invention at the port on the gas supplying side, will hereinafter be described. In a normal purging operation, the pressure of the intra-seal environment is higher than a pressure (normally, the atmospheric pressure) of an ambient environment. In this case, even when the entire periphery of the O-ring shape defined as the inner peripheral lip portion is not tightly fitted to the opposite surface, there is basically no occurrence of a gas inflow from the ambient environment in terms of a pressure difference. Because of the existence of the outer peripheral lip portion, a conductance of a route leading from the intra-seal environment to the ambient environment is extremely small, and an inflow of a purge gas is restrained at a slight level. Accordingly, the purge gas is introduced into the interior of the pod efficiently and effectively.
  • Note that abrupt introduction of the purge gas into the interior of the pod might vibrate the wafer and might generate dusts etc by causing a turbulent flow within the pod. Hence, there exists a case where the purging operation be, it is preferable, conducted while slightly keeping an amount of introduction of the purge gas. With micronization of a line width of the semiconductor, it is also considered that there will be increasingly such a demand from now into the future. In this instance, if taking the shape given in the U.S. Pat. No. Publication 6,164,664 or Japanese Patent Application Laid-Open Publication No. 2004-349619 in which the sealing action is exhibited, e.g., when the inner peripheral lip portion is formed in a thin shape and when the pressure of the intra-seal environment is higher than the pressure of the ambient environment, the pressure difference between these two environments is slight, and there is also considered a case of being unable to obtain the sufficient sealing action. Namely, because of the pressure difference being slight, the thin lip portion, which is to get deformed by the pressure of the intra-seal environment, does not deform, and such a case might occur that the sufficiently fitted state to the opposite surface is not acquired. As in the present invention, the inner peripheral lip portion is given the O-ring shape, whereby even when the pressure difference between the intra-seal environment and the ambient environment is slight, the preferable sealing action is acquired at al times.
  • There is also considered a case in which when performing the purging operation, a gas existing in the interior of the pod is forcibly exhausted from the exhaust port via a vacuum pump etc. In this case, if the amount of introduction of the purge gas is set slight, with a supply-to-discharge balance, there is a possibility in which the pressure of the intra-seal environment becomes lower than the pressure of the ambient environment. In this case, the inner peripheral lip portion taking the O-ring shape can provide only the sealing characteristic corresponding to a degree of the tight fitting of the lip portion to the opposite surface when mounting the pod. The outer peripheral lip portion is, however, formed in a shape that enhances a tight fitting characteristic to the opposite surface by flexure toward the interior of the seal if the pressure of the ambient environment is high, specifically in a horn-like shape of which an inside diameter becomes larger as it gets closer to the opposite surface. This shape enables the sufficient sealing characteristic to be obtained owing to the outer peripheral lip portion. In the case of controlling the amount of introduction when introducing the purge gas, a generally employed method is a method of controlling a flow rate of the gas led from a gas supply source by use of a so-called massflow controller. If an abnormal state occurs in the gas supply source or in the massflow controller, it is considered that the gas stagnates for supply and the pressure of the intra-seal environment becomes lower than the pressure of the ambient environment. The use of the seal member according to the present invention enables the gas inflow into the intra-seal environment from the ambient environment to be prevented owing to the outer peripheral lip portion even in such a case.
  • For example, in the case of using the seal member according to the present invention at the port on the gas exhaust side, the pressure of the intra-seal environment is always lower than the pressure of the ambient environment. In this instance, the primary sealing effect is acquired by the O-ring shaped inner peripheral lip portion. Even if the inner peripheral lip portion and the opposite surface are not in the preferable tight-fitted state, as described above, the sealing effect can be surely acquired owing to the deformation of the outer peripheral lip portion. Therefore, the use of the seal member according to the present invention enables the intra-seal environment and the ambient environment to be surely spatially separated from each other.
  • The seal member according to the present invention has a structure including the main body portion, the inner peripheral lip portion, the outer peripheral lip portion and the space formed with respect to the sealing surface (opposite surface) of the member having the face-to-face relationship with these components. The seal member also has the suction hole via which the interior of the space is exhausted. With this construction being taken, the seal member is more firmly tightly fitted to the sealing surface that faces the seal member by exhausting the interior of the space, thereby enabling the excellent sealing characteristic to be obtained. Thus, the sealing surface of the seal member is tightly fitted to the sealing surface of the member that faces the seal member by dint of physical adsorptive action. Hence, even when the surface accuracy demanded of these sealing surfaces is at a level lower than the surface accuracy demanded of the conventional sealing surfaces, this level is allowable. The sealing state can be checked by monitoring the internal pressure of the space described above.
  • In this case, both of the inner peripheral lip portion and the outer peripheral lip portion are forcibly tightly fitted to the opposite surfaces by the physical adsorptive action, and a certain or larger degree of sealing effect can be surely obtained. As described above, in the case of introducing the purge gas at a slight flow rate into the pod, however, the spatial pressure within the seal also decreases, and such a case is also considered that a sufficient pressure difference between the space and the intra-seal space is not obtained. In the case of the structure of the lip portion discussed in the Patent document 2 or Patent document 6, the sealing effect is obtained by the lip portion only in the state where the pressure difference comes to a predetermined or larger value. Accordingly, there might be a possibility in which the sufficient sealing effect is not acquired from the seal member having this structure. Note that there occurs the sufficient difference between the internal pressure of the space and the pressure of the ambient environment, and hence the outer peripheral lip portion provides the stable sealing effect. The inner peripheral lip portion does not exhibit the sealing effect, and the inflow of the purge gas into the space from within the seal sufficiently might occur. If such a situation arises, the sealing action of the outer peripheral lip portion might be reduced due to the decrease in the purging effect and the decrease in the pressure difference. As to the seal member according to the present invention, the inner peripheral lip portion involves using the O-ring shaped lip portion. Hence, even when there is almost no difference between the internal pressure of the space and the pressure of the intra-seal environment, the sealing effect approximate to a desired level can be always stably acquired. It is therefore possible to prevent the situations such as the decrease in the purging effect described above and the decrease in the sealing effect of the seal member.
  • For instance, in the case of employing the seal member according to the present invention enabling the space to be exhausted at the port on the gas exhaust side, the pressure of the intra-seal environment is always lower than the pressure of the ambient environment. In this case, the primary sealing effect is obtained by the O-ring shaped inner peripheral lip portion, and the seal member is preferably tightly fitted to the opposite surface, whereby the sealing effect can be further enhanced. If the tight-fitted state between the inner peripheral lip portion and the opposite surface is not preferable, as described above, the sure sealing effect can be acquired owing to the deformation of the outer peripheral lip portion. Therefore, the use of the seal member according to the present invention enables the intra-seal environment and the ambient environment to be surely spatially separated from each other.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a view illustrating a state of a seal member and a partial section of this seal member according to one embodiment as viewed from an oblique side;
  • FIG. 2 is a view illustrating a sectional shape of the seal member illustrated in FIG. 1;
  • FIG. 3 is a view schematically illustrating a system that preferably employs the seal member according to the present invention;
  • FIG. 4 is a whole side view illustrating an outline of a construction of a semiconductor wafer processing apparatus using the seal member according to the present invention;
  • FIG. 5 is a view illustrating an outline of a construction of a plate as viewed from an upper oblique side when installing the seal member according to the present invention on the plate at a Loadport portion for an FOUP;
  • FIG. 6 is a view illustrating a schematic section of each of the constructions in a state where the FOUP is mounted on the plate illustrated in FIG. 3;
  • FIG. 7 is a view illustrating a schematic section of each of the constructions in a state where the FOUP is disposed on the plate illustrated in FIG. 3;
  • FIG. 8A is a view illustrating a schematic section of a conventional seal member, intake/exhaust port edge portions in the plate using this seal member and opposite intake/exhaust port edge portions in the pod; and
  • FIG. 8B is a view illustrating a schematic section of the conventional seal member, the intake/exhaust port edge portions in the plate using this seal member and the opposite intake/exhaust port edge portions in the pod.
  • DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • One embodiment of the present invention will hereinafter be described with reference to the drawings. FIG. 1 is a perspective view including a partial sectional view of a seal member according to the present invention. FIG. 2 illustrates a sectional view of the seal member taken along the line 2-2 in FIG. 1. A seal member 20 according to the present invention has a dual seal structure. The seal member 20 includes a main body portion 20 a taking substantially a ring-shape, an inner peripheral lip portion 20 b formed along an inner periphery on an upper surface side of the main body portion 20 a, and an outer peripheral lip portion 20 c formed further along an outer periphery on the surface side formed with the inner peripheral lip portion 20 b in the main body portion 20 a. A plurality of suction holes 20 d penetrating through a lower surface from the upper surface of the main body portion 20 a is provided between the inner peripheral lip portion 20 b and the outer peripheral lip portion 20 c in the main body portion 20 a. In the present embodiment, protruded portions 20 f are formed along the ring-shaped inner periphery and along the ring-shaped outer periphery of the main body portion 20 a. In the case of fixing the seal member 20 onto, e.g., the surface on the plate side, a ring-shaped lower area of the main body portion 20 a of the seal member 20 is embedded in a groove formed in the plate, and the protruded portions 20 f are utilized, thereby attaining fixation to the plate of the seal member 20.
  • The inner peripheral lip portion 20 b takes a cylindrical shape erecting up to a predetermined height from the upper surface of the main body portion 20 a substantially in a vertical direction. In the present embodiment, at the upper edge of the cylindrical shape, when cutting the cylindrical shape in a lengthwise direction, the upper portion shall take a semi-circular shape. In the present specification, the description is simplified in a way that treats this shape as an O-ring shape. Namely, the inner peripheral lip portion 20 b has the O-ring shape formed in continuation from the ring-shaped portion of the main body portion 20 a, and is enabled to deform in a direction vertical to the ring-shaped upper surface. The outer peripheral lip portion 20 c has substantially a cylindrical shape that is thin and extends upward from the upper surface of the main body portion 20 a, and an inside diameter thereof increases as extended further upwards, thus having a funnel-like shape with respect to a central axis. With these shapes being thus taken, if a pressure in an intra-seal environment is kept higher than a pressure in an ambient environment, the inner peripheral lip portion 20 b taking the O-ring shape exhibits the suitable sealing action. Further, if the pressure in the intra-seal environment is kept lower than the pressure in the ambient environment, the outer peripheral lip portion 20 c taking the funnel-like shape exhibits the suitable sealing action. Hence, the sealing characteristic can be obtained irrespectively of the pressure in the intra-seal environment. The two types of lip portions exhibit the different operations, and therefore, even if accuracy of the seal surface is low or if an amount of load applied to crush the seal member is slight, the good sealing characteristic can be obtained.
  • As described above, the seal member 20 illustrated in the present embodiment is formed with a suction hole 20 d. The suction hole 20 d penetrates, from the upper surface, down to the undersurface, the ring-shaped portion of the main body portion 20 a including the continuous portion to the lip portion. Trough this suction hole 20 d, when the inner peripheral lip portion 20 b and the outer peripheral lip portion 20 c in the seal member 20 abut respectively on a port edge portion on the pod side, air in an interior of an space formed by the inner peripheral lip portion 20 b, the outer peripheral lip portion 20 c and the port edge portion can be exhausted. This air exhaustion enables the seal member 20 to be airtightly fitted more firmly to the pod-sided port edge portion and the sealing characteristic to be further improved. The air exhaustion, even in the case of the low accuracy of the seal surface or in the case of the slight load applied to crush the seal member, the suitable sealing characteristic to be acquired by the seal member itself actively exhibiting the sealing action. It is to be noted that the seal member is formed with the suction hole, however, this suction hole may also be removed if there exists a load applied large enough to crush the seal member.
  • An actual system using the seal member according to the present invention will hereinafter be briefly described with reference to the drawings. FIG. 3 illustrates this system including a first space 31 and a second space 41 that are separated from the ambient space. A first gas introducing system 32 used for increasing the internal pressure is connected to the first space 31. A first exhaust system 33 used for decreasing the internal pressure is also connected to the first space 31. Similarly, a second gas introducing system 42 used for increasing the internal pressure is connected to the second space 41. A second exhaust system 43 used for decreasing the internal pressure is also connected to the second space 41. The first space 31 has an opening portion 35 on opening portion forming surface 31 a. The second space 41 has an opening portion 45 on an opening portion forming surface 41 a.
  • The seal member 20 according to the present invention is disposed between these two opening portions 35 and 45, and is preferably employed for separating the system from the ambiance. Note that though omitted in the drawings, a system leading to the suction hole 20 d in the seal member 20 according to the present invention may be provided separately from the gas introducing system and the exhaust system that are concomitant with the first and second spaces. The seal member according to the present invention can be preferably used in a case such as taking a construction that the first space has neither the gas introducing system nor the exhaust system while the second space has only the exhaust system and in a case where the first and second spaces get deformed.
  • Next, a case of applying the seal member according to the present invention to a system related to the FOUP used at the present, will hereinafter be described with reference to the drawings. FIG. 4 illustrates a whole semiconductor wafer processing apparatus 50 corresponding to a mini-environment system. The semiconductor wafer processing apparatus 50 mainly includes a Loadport portion 51, a carrier chamber 52 and a processing chamber 59. Connecting portions therebetween are sectioned by a partition 55 a and a cover on the side of the Loadport and by a partition 55 b and a cover 58 b on the side of the processing chamber. In the carrier chamber 52 of the semiconductor wafer processing apparatus 50, an air flow is generated downward from above of the carrier chamber 52 by a fan (unillustrated) provided at the upper portion of the carrier chamber 52 in order to keep a high degree of purity by purging the carrier chamber 52 of dusts. The dusts are always sent downward along the air flow and thus discharged.
  • A pod 2 defined as a container for storing a product to be contained, such as a silicon wafer (which will hereinafter be simply referred to as a wafer), is installed on a plate 53. As described above, the interior of the carrier chamber 52 is kept in the high degree of purity in order to process a wafer 1. A robot 54 is provided in the interior of the carrier chamber 52. The wafer is carried by an arm of the robot 54 between an interior of the pod 2 and an interior of the processing chamber 59. The processing chamber 59 normally includes a variety of mechanisms for executing processes such as forming a thin film and working the thin film over the wafer surface. Constructions of these mechanisms are not related directly to the present invention, and hence their descriptions are herein omitted.
  • The pod 2 has a space for accommodating the wafer 1 defined as an object to be processed. The pod 2 includes a box-shaped main body portion 2 a of which any one surface is formed with an opening portion, and a cover 4 for airtightly closing the opening portion (see FIG. 6 or 7). A multi-staged rack for stacking the wafers 1 in one direction is disposed in an interior of the main body portion 2 a. The pod 2 accommodates the wafers 1 placed at a fixed interval in the rack. Note that the direction in which to stack the wafers 1 is set in a perpendicular direction in the example illustrated herein. An opening portion 10 is provided on the side of the Loadport portion 51 of the carrier chamber 52. The opening portion 10 is, when the pod 2 is disposed on the Loadport portion 51 in close proximity to the opening portion 10, situated in a position in face-to-face relationship with the opening portion of the pod 2. An unillustrated opener is provided in the vicinity of the opening portion 10 inwardly of the carrier chamber 52. After the opener has taken the cover 4 out of the pod 2, the wafer 1 is carried in or carried out by the arm of the robot 54.
  • Note that the mechanisms such as the opener for opening and closing the cover 4 of the pod 2 are not related directly to the present invention, and hence, the descriptions related to the prior arts being invoked, their in-depth descriptions are omitted. In the present applied example, it is considered that the first space corresponds to the pod, while the intake port and the exhaust port on the side of the plate correspond respectively to opening portions in the individual space corresponding to the second space.
  • FIG. 5 illustrates a schematic perspective view of the plate 53. A positioning pin 12, an intake port 14 and an exhaust port 16 are provided on the surface of the plate 53. The seal members 20 according to the present invention are disposed along the opening portions of these intake and exhaust ports 14, 16. FIGS. 6 and 7 illustrate outlines of sectional configurations of the plate 53 and the pod 2 placed on the plate 53. FIG. 6 illustrates a state just before the pod 2 is to be placed. FIG. 7 illustrates a state where the pod 2 has been placed. Note that a suction line 19 for depressurizing the space formed between the seal members 20 and edge portions of the intake/exhaust ports of the pod 2, extends inwardly of the plate 53 in the present applied example. The suction line 19 communicates with the space via the suction hole 20 d. The suction line 19 is connected to an unillustrated vacuum exhaust system serving as an external apparatus.
  • A purge operation in the FOUP system, to which the present invention is applied, will hereinafter be described with reference to the drawings. To start with, the semiconductor wafers 1 are accommodated in the interior of the pod 2, and the interior of the pod 2 is set into an airtightly closed space by the cover 4. Then, the pod 2 is carried to above the plate 53. The pod 2 is placed on the plate 53 in a state where the positioning pin 12 protruding above the plate 53 is substantially fitted in a recessed portion 5 formed in the lower portion of the pod 2. In this state, an intake port 7 and an exhaust port 9 on the pod side are abutted via the seal members 20 on the intake port 14 and the exhaust port 16 on the side of the plate 53.
  • Herein, an operation of exhausting an interior of a space 20 e formed between the seal members 20 and the intake/exhaust port edges on the side of the pod 2, is conducted by use of the suction line 19. The space 20 e is depressurized by this exhausting operation. The seal members 20 are firmly airtightly fitted to the abutting-target intake/exhaust port edges on the side of the pod 2 by dint of an effect of the depressurized space 20 e. After finishing or while continuing this operation, the purge operation of the interior of the pod 2 is performed. The purge operation involves replacing an internal atmosphere of the pod 2 by circulating a replacement gas in the sequence such as the intake port 14 on the side of the plate 53, the seal member 20, the suction port 7 on the side of the pod 2, a filter 11, the interior of the pod 2, the filter 11, the exhaust port 9 on the side of the pod 2, the seal member 20 and the exhaust port 16 on the side of the plate 53.
  • The seal members 20 according to the present invention are, as described above, employed at the Loadport, whereby the intake line and the exhaust line can maintain, irrespective of which pressure, a positive pressure or a negative pressure, these intake/exhaust lines are kept in, this state while keeping the sufficient sealing characteristic with respect to the external environment. Accordingly, the atmosphere can be replaced under such a condition as not to cause a disturbance of the air flow in the interior of the pod 2 such as enabling the replacement gas to be sent into the interior of the pod 2 at a much lower flow speed than by the prior art. The internal pressure of the depressurized space 20 e is monitored via the suction line 19, thereby enabling also the sealing state of the seal member 20 to be monitored.
  • Note that the present embodiment has exemplified the plate 53 in which the intake port and the exhaust port are formed respectively as the single systems, and the pod 2 corresponding thereto. The construction to which the present invention can be applied is not, however, limited to this construction, wherein it is preferable to increase or decrease the number of components properly in a way that takes account of a gas replacing speed required, a quantity of content of the pod 2, etc. A construction having only the intake port may also be available. In this case, the replacement gas is supplied to the interior of the pod via the port, and the internal pressure of the pod is made larger by the replacement gas etc than the atmospheric pressure of the outside, thereby decreasing the sealing strength between the cover 4 and a pod main body 2 a. Thus, the internal atmosphere of the pod 2 is flowed from between the cover 4 and the pod main body 2 a due to the decreased sealing strength, whereby the interior of the pod may be exhausted.
  • In the present applied example, the seal members according to the present invention are disposed on the side of the plate. The seal members may also, however, be disposed on the side of the pod without being limited to the plate side. In this case, the suction hole is not provided, and an exhaust system for exhausting the interior of the space may be connected to a contact portion, of the sealing surface on the plate side, with the space formed between the inner peripheral lip and the outer peripheral lip. The discussion on the present applied example is targeted at the FOUP, however, the applied example of the present invention is not limited to this system. The seal members according to the present invention can be applied to the system, which needs purging the atmosphere of the interior of the container, having the container inwardly accommodating the plurality of retained objects and the carrier chamber in which to carry the retained object from the container to the apparatus that processes the retained object.
  • This application claims priority from Japanese Patent Application No. 2006-042324 filed Feb. 20, 2006 which is hereby incorporated by reference herein.

Claims (3)

  1. 1. A seal member disposed between an opening portion forming surface of a first space and an opening portion forming surface of a second space to separate said first and second spaces from the ambiance when connecting together said first space and said second space each having an opening portion that are capable of keeping an internal pressure at a pressure different from an ambient pressure while being each separated from the ambiance, said seal member comprising:
    a main body portion taking a ring-shape and fixed along an outer periphery of said opening portion in any one of the opening portion forming surface of said first space and the opening portion forming surface of said second space;
    an inner peripheral lip portion extending from an inner peripheral portion of a ring-shaped upper surface of said main body portion substantially in a direction of another opening portion forming surface different from the opening portion forming surface on the side where said main body portion is fixed; and
    an outer peripheral lip portion extending from an outer peripheral portion of the ring-shaped upper surface of said main body portion substantially in the direction of another opening portion forming surface different from the opening portion forming surface on the side where said main body portion is fixed,
    wherein said inner peripheral lip portion takes an O-ring shape connected to the inner peripheral portion in said main body portion and can deform in a direction vertical to the ring-shaped upper surface of said main body portion, and
    said outer peripheral lip portion can deform in a direction substantially parallel with the ring-shaped upper surface of said main body portion.
  2. 2. A seal member according to claim 1, wherein said main body portion has a hole penetrating from the ring-shaped upper surface down to a ring-shaped undersurface formed with neither said inner peripheral lip portion nor said outer peripheral lip portion between said inner peripheral lip portion and said outer peripheral lip portion.
  3. 3. A seal member according to claim 2, wherein said outer peripheral lip portion takes substantially a funnel-like shape of which an inside diameter gets larger as it gets farther away from said main body portion.
US11675901 2006-02-20 2007-02-16 Interface seal Abandoned US20070210533A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006-042324 2006-02-20
JP2006042324A JP2007221042A (en) 2006-02-20 2006-02-20 Interface seal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12466952 US8061738B2 (en) 2006-02-20 2009-05-15 Gas replacement system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12466952 Division US8061738B2 (en) 2006-02-20 2009-05-15 Gas replacement system

Publications (1)

Publication Number Publication Date
US20070210533A1 true true US20070210533A1 (en) 2007-09-13

Family

ID=38478167

Family Applications (2)

Application Number Title Priority Date Filing Date
US11675901 Abandoned US20070210533A1 (en) 2006-02-20 2007-02-16 Interface seal
US12466952 Active 2028-03-08 US8061738B2 (en) 2006-02-20 2009-05-15 Gas replacement system

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12466952 Active 2028-03-08 US8061738B2 (en) 2006-02-20 2009-05-15 Gas replacement system

Country Status (2)

Country Link
US (2) US20070210533A1 (en)
JP (1) JP2007221042A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100143082A1 (en) * 2008-12-08 2010-06-10 Taiwan Semiconductor Manufacturing Co., Ltd. Portable stocker and method of using same
US20130001895A1 (en) * 2011-06-28 2013-01-03 Son Jung Moo Methods and devices for sealing storage devices
US20130192756A1 (en) * 2008-11-13 2013-08-01 Applied Materials, Inc. Sealing apparatus for a process chamber
GB2520154A (en) * 2013-09-20 2015-05-13 Micromass Ltd Chamber seal for mass spectrometer
US9105673B2 (en) 2007-05-09 2015-08-11 Brooks Automation, Inc. Side opening unified pod
US20160230889A1 (en) * 2013-09-20 2016-08-11 Micromass Uk Limited Chamber Seal for Mass Spectrometer
US20170025296A1 (en) * 2015-03-31 2017-01-26 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
US20170025298A1 (en) * 2015-03-31 2017-01-26 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101613836B1 (en) * 2007-05-17 2016-04-21 브룩스 오토메이션 인코퍼레이티드 Side opening substrate carrier and load port
EP2449304B1 (en) * 2009-06-30 2017-03-01 Roylan Developments Limited Apparatus for purging containers for storing sensitive materials
JP6206126B2 (en) * 2012-12-04 2017-10-04 Tdk株式会社 A substrate processing method using the cover opening and closing system and the system of the sealed container
JP6098737B2 (en) * 2014-02-07 2017-03-22 村田機械株式会社 Gas injection device and the auxiliary member
JP5776828B1 (en) * 2014-08-08 2015-09-09 Tdk株式会社 Gas purge unit, the installation base of the load port apparatus and be purged vessel
KR101593386B1 (en) * 2014-09-01 2016-02-15 로체 시스템즈(주) Purge module and load port having the same
JP2016225410A (en) * 2015-05-28 2016-12-28 Tdk株式会社 Gas purge unit, the installation base of the load port apparatus and be purged vessel

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1246620A (en) * 1915-12-20 1917-11-13 Lionel F Levy Pneumatic printing-frame.
US2773366A (en) * 1952-12-31 1956-12-11 Cleveland Steel Products Corp Sealed universal coupling trunnion bearings
US3327429A (en) * 1964-09-03 1967-06-27 Crane & Breed Casket Company Casket seal
US3334774A (en) * 1964-11-27 1967-08-08 Johns Manville Fluid seal
US4469335A (en) * 1982-07-22 1984-09-04 American Sterilizer Company Sealing apparatus with sealing device operable under pressure differential established thereacross
US4758004A (en) * 1986-10-02 1988-07-19 Casket Shells, Inc. Casket sealing gasket having sealing ridges of different heights
US5090713A (en) * 1990-12-24 1992-02-25 Johnson Roy E Elastomeric gasket for sealing a glass fiber reinforced cover to a vault
US5613691A (en) * 1994-02-04 1997-03-25 Unisia Jecs Corporation Sealing device for universal joint with integral sealing lips and cover portion
US5653447A (en) * 1995-07-26 1997-08-05 Cress; Steven B. Vacuum/pressure seal method and apparatus
US5676373A (en) * 1995-09-07 1997-10-14 Yazaki Corporation Packing with sealing chambers
US5988233A (en) * 1998-03-27 1999-11-23 Asyst Technologies, Inc. Evacuation-driven SMIF pod purge system
US6164664A (en) * 1998-03-27 2000-12-26 Asyst Technologies, Inc. Kinematic coupling compatible passive interface seal
US6186152B1 (en) * 1997-10-24 2001-02-13 L'oreal Makeup box having a sealing member held by a support piece
US6354601B1 (en) * 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
US6364152B1 (en) * 2000-04-12 2002-04-02 Dart Industries Inc. Food storage container
US20040237244A1 (en) * 2003-05-26 2004-12-02 Tdk Corporation Purge system for product container and interface seal used in the system
US6832444B1 (en) * 2002-05-17 2004-12-21 Macneil David F. Vehicle license plate cover with decorative insert
US7063327B2 (en) * 2002-10-11 2006-06-20 Federal Mogul Sealing Systems Bretten Gmbh & Co.Kg Sealing element
US7282097B2 (en) * 2004-06-14 2007-10-16 Applied Materials, Inc. Slit valve door seal
US7413099B2 (en) * 2001-06-08 2008-08-19 Shin-Etsu Polymer Co., Ltd. Sealing element with a protruding part approximately obliquely outward and a hermetic container using the same

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1332686A (en) * 1919-01-16 1920-03-02 Henry S Reynolds Sput for metallic receptacles
US2062780A (en) * 1934-10-05 1936-12-01 Thomas Connors Method of attaching plug receiving members to metal containers
US2384360A (en) * 1942-02-09 1945-09-04 All Flex Corp Swivel pipe coupling
US3145035A (en) * 1958-09-10 1964-08-18 Weatherhead Co Pipe coupling having a flexible sealing lip
US3098662A (en) * 1959-10-07 1963-07-23 Weatherhead Co Metal joint or seal
US3948315A (en) * 1974-08-13 1976-04-06 Brown Fintube Company Closure for heat exchanger
JPS5969570A (en) * 1982-10-13 1984-04-19 American Sterilizer Co Fluid seal
JPS63130653A (en) 1986-11-20 1988-06-02 Nippon Zeon Co Ltd Shape-restoring elastomer composition
JPH051638Y2 (en) * 1987-02-18 1993-01-18
JPH0534373Y2 (en) * 1987-02-23 1993-08-31
JPH0740125Y2 (en) * 1990-06-27 1995-09-13 エヌオーケー株式会社 X ring
US5338075A (en) * 1993-06-03 1994-08-16 Albrecht David E Combination fluid flow ports
JP3617681B2 (en) 1995-01-24 2005-02-09 アシスト シンコー株式会社 Gas supply system of the portable sealed container
US6056026A (en) 1998-12-01 2000-05-02 Asyst Technologies, Inc. Passively activated valve for carrier purging
JP2004349619A (en) * 2003-05-26 2004-12-09 Tdk Corp Interface seal
JP2004345715A (en) * 2003-05-26 2004-12-09 Tdk Corp Purge system for product storing container

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1246620A (en) * 1915-12-20 1917-11-13 Lionel F Levy Pneumatic printing-frame.
US2773366A (en) * 1952-12-31 1956-12-11 Cleveland Steel Products Corp Sealed universal coupling trunnion bearings
US3327429A (en) * 1964-09-03 1967-06-27 Crane & Breed Casket Company Casket seal
US3334774A (en) * 1964-11-27 1967-08-08 Johns Manville Fluid seal
US4469335A (en) * 1982-07-22 1984-09-04 American Sterilizer Company Sealing apparatus with sealing device operable under pressure differential established thereacross
US4758004A (en) * 1986-10-02 1988-07-19 Casket Shells, Inc. Casket sealing gasket having sealing ridges of different heights
US5090713A (en) * 1990-12-24 1992-02-25 Johnson Roy E Elastomeric gasket for sealing a glass fiber reinforced cover to a vault
US5613691A (en) * 1994-02-04 1997-03-25 Unisia Jecs Corporation Sealing device for universal joint with integral sealing lips and cover portion
US5653447A (en) * 1995-07-26 1997-08-05 Cress; Steven B. Vacuum/pressure seal method and apparatus
US5676373A (en) * 1995-09-07 1997-10-14 Yazaki Corporation Packing with sealing chambers
US6186152B1 (en) * 1997-10-24 2001-02-13 L'oreal Makeup box having a sealing member held by a support piece
US6164664A (en) * 1998-03-27 2000-12-26 Asyst Technologies, Inc. Kinematic coupling compatible passive interface seal
US5988233A (en) * 1998-03-27 1999-11-23 Asyst Technologies, Inc. Evacuation-driven SMIF pod purge system
US6354601B1 (en) * 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
US6364152B1 (en) * 2000-04-12 2002-04-02 Dart Industries Inc. Food storage container
US7413099B2 (en) * 2001-06-08 2008-08-19 Shin-Etsu Polymer Co., Ltd. Sealing element with a protruding part approximately obliquely outward and a hermetic container using the same
US6832444B1 (en) * 2002-05-17 2004-12-21 Macneil David F. Vehicle license plate cover with decorative insert
US7063327B2 (en) * 2002-10-11 2006-06-20 Federal Mogul Sealing Systems Bretten Gmbh & Co.Kg Sealing element
US20040237244A1 (en) * 2003-05-26 2004-12-02 Tdk Corporation Purge system for product container and interface seal used in the system
US7282097B2 (en) * 2004-06-14 2007-10-16 Applied Materials, Inc. Slit valve door seal

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9105673B2 (en) 2007-05-09 2015-08-11 Brooks Automation, Inc. Side opening unified pod
US9978623B2 (en) 2007-05-09 2018-05-22 Brooks Automation, Inc. Side opening unified pod
US20130192756A1 (en) * 2008-11-13 2013-08-01 Applied Materials, Inc. Sealing apparatus for a process chamber
US9261193B2 (en) * 2008-11-13 2016-02-16 Applied Materials, Inc. Sealing apparatus for a process chamber
US9048274B2 (en) * 2008-12-08 2015-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Portable stocker and method of using same
US20100143082A1 (en) * 2008-12-08 2010-06-10 Taiwan Semiconductor Manufacturing Co., Ltd. Portable stocker and method of using same
US20130001895A1 (en) * 2011-06-28 2013-01-03 Son Jung Moo Methods and devices for sealing storage devices
GB2520154A (en) * 2013-09-20 2015-05-13 Micromass Ltd Chamber seal for mass spectrometer
GB2520154B (en) * 2013-09-20 2018-05-02 Micromass Ltd Chamber seal for mass spectrometer
US20160230889A1 (en) * 2013-09-20 2016-08-11 Micromass Uk Limited Chamber Seal for Mass Spectrometer
US20170025296A1 (en) * 2015-03-31 2017-01-26 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
US20170025298A1 (en) * 2015-03-31 2017-01-26 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
US9895723B2 (en) * 2015-03-31 2018-02-20 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
US9929033B2 (en) * 2015-03-31 2018-03-27 Tdk Corporation Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method

Also Published As

Publication number Publication date Type
JP2007221042A (en) 2007-08-30 application
US8061738B2 (en) 2011-11-22 grant
US20090218773A1 (en) 2009-09-03 application

Similar Documents

Publication Publication Date Title
US6883539B2 (en) Wafer container
US20050022737A1 (en) Semiconductor-processing apparatus provided with susceptor and placing block
US7021881B2 (en) Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
US20050077204A1 (en) Substrate storage container
US20070158026A1 (en) Processing apparatus
JP2003168728A (en) Precision substrate container
JP2004146676A (en) Storing container
US6896304B2 (en) Automatic sensing wafer blade and method for using
US7335277B2 (en) Vacuum processing apparatus
US20060288664A1 (en) Purge system for a product container and table for use in the purge system
US7276122B2 (en) Multi-workpiece processing chamber
US20040237244A1 (en) Purge system for product container and interface seal used in the system
US20090017637A1 (en) Method and apparatus for batch processing in a vertical reactor
JPH06302679A (en) Material-to-be-treated conveying box and treating apparatus
JP2006170373A (en) Gate valve device, treatment system and seal member replacing method
US6283175B1 (en) Enveloping device and vertical heat-treating apparatus for semiconductor process system
US20090110518A1 (en) Sealed substrate carriers and systems and methods for transporting
US20090317214A1 (en) Novel wafer's ambiance control
US20110210042A1 (en) Substrate storage pod and lid member thereof, and processing apparatus for a substrate
US20050252827A1 (en) Substrate container with fluid-sealing flow passageway
US8171964B2 (en) Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
US20100111650A1 (en) Automatic substrate loading station
US20070266944A1 (en) Film Forming Apparatus and Vaporizer
US20120309286A1 (en) Purge apparatus and load port
US20100022093A1 (en) Vacuum processing apparatus, method of operating same and storage medium

Legal Events

Date Code Title Description
AS Assignment

Owner name: TDK CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:OKABE, TSUTOMU;MIYAJIMA, TOSHIHIKO;SUZUKI, HITOSHI;REEL/FRAME:019281/0948

Effective date: 20070315