US20050207068A1 - Method and apparatus for connecting a micro-actuator to driver arm suspension - Google Patents

Method and apparatus for connecting a micro-actuator to driver arm suspension Download PDF

Info

Publication number
US20050207068A1
US20050207068A1 US11/125,589 US12558905A US2005207068A1 US 20050207068 A1 US20050207068 A1 US 20050207068A1 US 12558905 A US12558905 A US 12558905A US 2005207068 A1 US2005207068 A1 US 2005207068A1
Authority
US
United States
Prior art keywords
actuator
method
element
micro
further
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/125,589
Inventor
Ming Yao
Masashi Shiraishi
Original Assignee
Yao Ming G
Masashi Shiraishi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to WOPCT/CN02/00826 priority Critical
Priority to PCT/CN2002/000826 priority patent/WO2004047086A1/en
Priority to US10/645,259 priority patent/US7199978B2/en
Application filed by Yao Ming G, Masashi Shiraishi filed Critical Yao Ming G
Priority to US11/125,589 priority patent/US20050207068A1/en
Publication of US20050207068A1 publication Critical patent/US20050207068A1/en
Application status is Abandoned legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4853Constructional details of the electrical connection between head and arm
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55Track change, selection or acquisition by displacement of the head
    • G11B5/5521Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5552Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means

Abstract

A system and method for connecting an actuator to a suspension element is disclosed. The actuator is electrically coupled using a silver paste. The silver paste is further covered by a coating application to provide structural support. A step, attached to either the actuator base or the suspension tongue, provides further structural support and maintains a gap between the actuator and the suspension element.

Description

    BACKGROUND INFORMATION
  • The present invention relates to magnetic hard disk drives. More specifically, the present invention relates to a method of connecting the micro-actuator to the driver arm suspension.
  • In the art today, different methods are utilized to improve recording density of hard disk drives. FIG. 1 provides an illustration of a typical drive arm configured to read from and write to a magnetic hard disk. Typically, voice-coil motors (VCM) 102 are used for controlling a hard drive's arm 104 motion across a magnetic hard disk 106. Because of the inherent tolerance (dynamic play) that exists in the placement of a recording head 108 by a VCM 102 alone, micro-actuators 110 are now being utilized to ‘fine-tune’ head 108 placement. A VCM 102 is utilized for course adjustment and the micro-actuator then corrects the placement on a much smaller scale to compensate for the VCM's 102 (with the arm 104) tolerance. This enables a smaller recordable track width, increasing the ‘tracks per inch’ (TPI) value of the hard drive (increased drive density).
  • FIG. 2 provides an illustration of a micro-actuator as used in the art. Typically, a slider 202 (containing a read/write magnetic head; not shown) is utilized for maintaining a prescribed flying height above the disk surface 106 (See FIG. 1). Micro-actuators may have flexible beams 204 connecting a support device 206 to a slider containment unit 208 enabling slider 202 motion independent of the drive arm 104 (See FIG. 1). An electromagnetic assembly or an electromagnetic/ferromagnetic assembly (not shown) may be utilized to provide minute adjustments in orientation/location of the slider/head 202 with respect to the arm 104 (See FIG. 1).
  • The physical and electrical coupling of a hard disk micro-actuator and magnetic head to a drive arm suspension can be difficult due to the environment within which it must operate. Using silver paste (high mercury-content epoxy) for physical/electrical attachment has drawbacks due to the viscous nature of epoxy under changing temperature and humidity. Under certain temperature and humidity conditions, the epoxy can deform, affecting the position of the slider and micro-actuator in relation to the suspension arm. Additionally, silver ions or silver atoms in the silver paste may begin to migrate from the epoxy to the micro-actuator, affecting the performance of the micro-actuator. While other options for bonding the actuator to the suspension arm exist, such as gold ball bonding (GBB) and solder bump bonding (SBB), the rigidity of these options can lead to greater damage. In particular, the thinness of the piezoelectric transducer (PZT) surface layer of the micro-actuator can reduce the peel strength between the PZT layer and the bonding pad, causing the connection to crack and create an electrical short between the two. It is therefore desirable to support the micro-actuator and connect it to the suspension arm using a method that can create strong a connection without the risks of deformation.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 provides an illustration of a drive arm configured to read from and write to a magnetic hard disk as used in the art.
  • FIG. 2 provides an illustration of a micro-actuator as used in the art.
  • FIG. 3 describes a hard disk drive head gimbal assembly (HGA) with a ‘U’-shaped micro-actuator according to an embodiment of the present invention.
  • FIG. 4 provides an illustration of a U shape micro-actuator design according to an embodiment of the present invention.
  • FIG. 5 provides an illustration of the configuration of the coating application according to an embodiment of the present invention.
  • FIG. 6 provides an illustration of a step suspension according to an embodiment of the present invention.
  • FIG. 7 provides an illustration of step actuator according to an embodiment of the present invention.
  • DETAILED DESCRIPTION
  • A system and method for connecting an actuator to a suspension element is disclosed. The actuator is electrically coupled using a silver paste. The silver paste is further covered by a coating application to provide structural support. A step, attached to either the actuator base or the suspension tongue, provides further structural support and maintains a gap between the actuator and the suspension element.
  • Illustrated in an upside-down orientation, FIG. 3 describes one embodiment of a hard disk drive head gimbal assembly (HGA) with a ‘U’-shaped micro-actuator. In this embodiment, a slider 302 is bonded at two points 304 to a ‘U’-shaped micro-actuator 306. In a further embodiment, the ‘U’-shaped micro-actuator has a piezoelectric Lead Zirconate Titanate (PZT) beam (arm) 308 on each side of a ceramic support frame (actuator base) 310. The micro-actuator 306 is coupled to a suspension 312.
  • FIG. 4 illustrates one embodiment of the ‘U’shaped micro-actuator 306. A support frame 310 supports two piezoelectric Lead Zirconate Titanate (PZT) beams 308. In one embodiment, the support frame is ceramic. The ‘U’ shaped micro-actuator 306 is connected to the slider element 302. In one embodiment, the micro-actuator may be a piezoelectric micro-actuator, an electromagnetic micro-actuator, an electrostatic micro-actuator, a capacitive micro-actuator, a fluidic micro-actuator, or a thermal micro-actuator.
  • FIG. 5 illustrates the coupling of the ‘U’ shaped micro-actuator 306 to the suspension element 312. In one embodiment, the ‘U’ shaped micro-actuator 306 is electrically coupled 502 to the suspension bonding pads 504 using a silver epoxy paste or resin. In a further embodiment, the slider 302 is electrically coupled 506 to the suspension bonding pads 508 using a silver epoxy paste or resin. In one embodiment, a coating application 510 covering the electric couplings for the micro-actuator 502 and the slider 506 provides physical support for these electric couplings. In particular, the coating application provides physical support for these electric couplings for the actuator element that can have movement independent of the movement of the HGA. In one embodiment, the coating application has a high glass transition temperature (Tg) (e.g., Tg>120 degree Celsius), the temperature at which glassy solids transition to more flexible rubbery solids. In a further embodiment, the coating application has a high Young's modulus (E) (e.g., E>0.6 G Pa), the measure of the stiffness of a material. In one embodiment, the coating application is an epoxy or a resin. The epoxy coating application can contain a filler material, such as metal, glass or a fiber material. The coating application protects the electric coupling from deformations caused by changes in humidity and temperature, as well as physical strain over time. The coating application can also prevent the migration of silver ions or atoms from the electric coupling into the electric layer of the PZT of the micro-actuator.
  • In a further embodiment of the present invention, a step configuration is implemented to further support the micro-actuator. The step configuration further reduces the amount of contact between the slider and the suspension during movement of the actuator. In one embodiment, the step configuration is implemented using a metal step 602 in the suspension tongue 312, as shown in FIG. 6. In one embodiment, the step 602 is molded into the suspension tongue 312 at formation. In an alternate embodiment, a separate step piece 602 is coupled to the suspension tongue 312 before coupling the micro-actuator 306 to the suspension element 312. In one embodiment, the material for the step 602 is made of polyester, polyethylene, polymer, or ceramic. In a further embodiment, the step 602 is coupled to the suspension tongue 312 by epoxy, resin, anisotropic conductor film, or anisotropic conductive adhesive.
  • In one embodiment, the base of the micro-actuator 306 is thickened to create a step 702, as shown in FIG. 7. The base step 702 of the micro-actuator 306 separates the micro-actuator 306 from the suspension 312 and maintains a parallel gap even during changes of temperature and humidity. In an alternate embodiment, the step 702 is created by attaching a separate step plate to the base of the micro-actuator 306. In one embodiment, the step configuration includes a first step element coupled to the micro-actuator and a second step element coupled to the suspension element. In an alternate embodiment, the step configuration includes a first step element created by thickening the base of the micro-actuator and a second step element is molded into the suspension tongue. In a further embodiment, the step 602 is coupled to the micro-actuator element 312 by epoxy, resin, anisotropic conductor film, or anisotropic conductive adhesive.
  • Although several embodiments are specifically illustrated and described herein, it will be appreciated that modifications and variations of the present invention are covered by the above teachings and within the purview of the appended claims without departing from the spirit and intended scope of the invention.

Claims (20)

1-33. (canceled)
34. A method, comprising:
coupling an actuator element to a suspension element using at least one application site of a bonding agent; and
covering the bonding agent with a coating application.
35. The method of claim 34, further comprising:
coupling a magnetic head element to the suspension element using at least one application site of the bonding agent; and
covering the bonding agent with the coating application.
36. The method of claim 34, wherein the actuator element is a micro-actuator.
37. The method of claim 36, wherein the micro-actuator is selected from a group consisting of a piezoelectric micro-actuator, an electromagnetic micro-actuator, an electrostatic micro-actuator, a capacitive micro-actuator, a fluidic micro-actuator, or a thermal micro-actuator.
38. The method of claim 34, wherein the bonding agent is a silver paste.
39. The method of claim 34, wherein the coating application has a glass transition temperature greater than 120 degrees Celsius.
40. The method of claim 34, wherein the coating application has a Young's modulus greater than 0.6 G Pa.
41. The method of claim 34, wherein the coating application is an epoxy agent.
42. The method of claim 41, wherein the epoxy agent contains a filler ingredient.
43. The method of claim 42, wherein the filler ingredient is selected from a group consisting of metal, glass, or a fiber material.
44. The method of claim 34, further comprising maintaining a parallel spatial relationship between the actuator element and the suspension element using a first step element.
45. The method of claim 44, further comprising creating the first step element by thickening a portion of the actuator element.
46. The method of claim 45, further comprising molding a second step element into the suspension element.
47. The method of claim 44, further comprising coupling the first step element to a portion of the actuator element.
48. The method of claim 47, further comprising coupling a second step element to a portion of the suspension element.
49. The method of claim 44, further comprising molding the first step element into the suspension element.
50. The method of claim 44, further comprising coupling the first step element to a portion of the suspension element.
51. The method of claim 44, further comprising coupling the first step element to a portion of the suspension element using one of a group of materials comprising epoxy, resin, anisotropic conductive film, and anisotropic conductive adhesive.
52. The method of claim 44, further comprising coupling the first step element to a portion of the micro-actuator element using one of a group of materials comprising epoxy, resin, anisotropic conductive film, and anisotropic conductive adhesive.
US11/125,589 2002-11-19 2005-05-09 Method and apparatus for connecting a micro-actuator to driver arm suspension Abandoned US20050207068A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
WOPCT/CN02/00826 2002-11-19
PCT/CN2002/000826 WO2004047086A1 (en) 2002-11-19 2002-11-19 Method and apparatus for connecting a micro-actuator to driver arm suspension
US10/645,259 US7199978B2 (en) 2002-11-19 2003-08-20 Method and apparatus for connecting a micro-actuator to driver arm suspension
US11/125,589 US20050207068A1 (en) 2002-11-19 2005-05-09 Method and apparatus for connecting a micro-actuator to driver arm suspension

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/125,589 US20050207068A1 (en) 2002-11-19 2005-05-09 Method and apparatus for connecting a micro-actuator to driver arm suspension

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US10/645,259 Division US7199978B2 (en) 2002-11-19 2003-08-20 Method and apparatus for connecting a micro-actuator to driver arm suspension

Publications (1)

Publication Number Publication Date
US20050207068A1 true US20050207068A1 (en) 2005-09-22

Family

ID=32304060

Family Applications (3)

Application Number Title Priority Date Filing Date
US10/645,259 Expired - Fee Related US7199978B2 (en) 2002-11-19 2003-08-20 Method and apparatus for connecting a micro-actuator to driver arm suspension
US11/125,589 Abandoned US20050207068A1 (en) 2002-11-19 2005-05-09 Method and apparatus for connecting a micro-actuator to driver arm suspension
US11/696,146 Expired - Fee Related US7359154B2 (en) 2002-11-19 2007-04-03 Method and apparatus for connecting a micro-actuator to driver arm suspension

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US10/645,259 Expired - Fee Related US7199978B2 (en) 2002-11-19 2003-08-20 Method and apparatus for connecting a micro-actuator to driver arm suspension

Family Applications After (1)

Application Number Title Priority Date Filing Date
US11/696,146 Expired - Fee Related US7359154B2 (en) 2002-11-19 2007-04-03 Method and apparatus for connecting a micro-actuator to driver arm suspension

Country Status (3)

Country Link
US (3) US7199978B2 (en)
CN (1) CN100359567C (en)
WO (1) WO2004047086A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080151426A1 (en) * 2006-12-20 2008-06-26 Fu-Ying Huang System and method for compliant, adaptive hard drive sliders
US20080158734A1 (en) * 2007-01-03 2008-07-03 Sae Magnetics (H.K.) Ltd. Micro-actuator for use in small platform disk drive devices, and method of making the same
US20080180856A1 (en) * 2007-01-31 2008-07-31 Toshiki Hirano Method and apparatus for a microactuator bonding pad structure for solder ball placement and reflow joint
US8638975B2 (en) 2011-08-17 2014-01-28 Bose Corporation Wiper seal for passive radiator

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7218482B2 (en) * 2004-01-26 2007-05-15 Sae Magnetics (H.K.) Ltd. Micro-actuator, head gimbal assembly and manufacturing method thereof
US7612968B1 (en) * 2004-12-02 2009-11-03 Maxtor Corporation Disk drive microactuator frame with epoxy overflow reservoir
US7433159B2 (en) * 2005-01-27 2008-10-07 Sae Magnetics (H.K.) Ltd. Micro-actuator unit, head gimbal assembly, and disk drive unit with vibration canceller
US7535680B2 (en) * 2005-06-29 2009-05-19 Sae Magnetics (H.K.) Ltd. Micro-actuator with integrated trace and bonding pad support
US8085508B2 (en) 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
US8144435B2 (en) * 2008-10-20 2012-03-27 Seagate Technology Llc Cost reduced microactuator suspension
JP5478331B2 (en) * 2010-03-31 2014-04-23 日本発條株式会社 And the electronic device, a disk drive suspension
JP2011248960A (en) * 2010-05-26 2011-12-08 Hitachi Ltd The magnetic disk device
US8760812B1 (en) 2011-12-20 2014-06-24 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a jumper in a flexible printed circuit overlap region
US8325446B1 (en) 2010-10-29 2012-12-04 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with features to facilitate bonding
US8320084B1 (en) 2010-10-29 2012-11-27 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with features to facilitate bonding
US8477459B1 (en) 2010-10-29 2013-07-02 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with dual conductive layers and features to facilitate bonding
US8467153B1 (en) 2010-10-29 2013-06-18 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with folded bond pads
US8295013B1 (en) 2010-10-29 2012-10-23 Western Digital Technologies, Inc. Disk drive head stack assembly having a flexible printed circuit with heat transfer limiting features
US8295014B1 (en) 2010-10-29 2012-10-23 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with transverse flying leads
US9633680B2 (en) 2010-10-29 2017-04-25 Western Digital Technologies, Inc. Head suspension having a flexure tail with a covered conductive layer and structural layer bond pads
US8665566B1 (en) 2011-12-20 2014-03-04 Western Digital Technologies, Inc. Suspension tail design for a head gimbal assembly of a hard disk drive
US9335950B2 (en) 2013-03-15 2016-05-10 Western Digital Technologies, Inc. Multiple stream compression and formatting of data for data storage systems
US9448738B2 (en) 2013-03-15 2016-09-20 Western Digital Technologies, Inc. Compression and formatting of data for data storage systems
US9274978B2 (en) 2013-06-10 2016-03-01 Western Digital Technologies, Inc. Migration of encrypted data for data storage systems
US9330695B1 (en) 2013-12-10 2016-05-03 Western Digital Technologies, Inc. Disk drive head suspension tail with a noble metal layer disposed on a plurality of structural backing islands
US8934199B1 (en) 2014-03-31 2015-01-13 Western Digital Technologies, Inc. Disk drive head suspension tail with bond pad edge alignment features
US9449623B2 (en) 2014-06-03 2016-09-20 HGST Netherlands B.V. Reducing ion migration in a hard disk drive microactuator flexure assembly
US9524738B1 (en) 2015-06-25 2016-12-20 Western Digital Technologies, Inc. Disk drive head gimbal assembly having a flexure tail with a dielectric layer that has regions of lesser thickness

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622813A (en) * 1969-10-18 1971-11-23 Sumitomo Electric Industries Terminal device for piezoelectric ceramic transformer
US4413061A (en) * 1978-02-06 1983-11-01 International Business Machines Corporation Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper
US4434384A (en) * 1980-12-08 1984-02-28 Raytheon Company Ultrasonic transducer and its method of manufacture
US5691581A (en) * 1995-01-06 1997-11-25 Hitachi Metals, Ltd. Arm assembly and voice coil motor
US5711063A (en) * 1996-06-11 1998-01-27 Seagate Technology, Inc. Method of forming a suspension fabricated from silicon
US6098270A (en) * 1993-10-29 2000-08-08 Commissariat A L'energie Atomique Process for producing a slider having composite welding studs
US6198606B1 (en) * 1999-07-28 2001-03-06 Seagate Technology Llc Disc drive actuation system having an injection molded magnetic micro-actuator with metal beam inserts and its method of fabrication
US6341415B2 (en) * 1992-08-31 2002-01-29 Fujitsu Limited Method for assembling a magnetic head assembly and magnetic disk drive using bonding balls connecting magnetic head terminals to wiring terminals
US6349017B1 (en) * 1997-02-21 2002-02-19 Read-Rite Corporation Magnetic head suspension assembly using bonding pads of a slider to an attachment surface of a flexure
US6366431B1 (en) * 1998-12-25 2002-04-02 International Business Machines Corporation Head supporting arm having laser beam exposing aperture
US20020074902A1 (en) * 2000-11-02 2002-06-20 Fujitsu Limited Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
US6467141B2 (en) * 2000-11-22 2002-10-22 Fujitsu Limited Method of assembling micro-actuator
US6584708B2 (en) * 1999-07-13 2003-07-01 Samsung Electro-Mechanics Co., Ltd. Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof
US20030196315A1 (en) * 2002-04-22 2003-10-23 Ming Gao Yao Method and apparatus for electrically and physically coupling a micro-actuator and slider to a hard drive arm suspension for component replacement after detachment from the suspension
US6653761B2 (en) * 2000-11-02 2003-11-25 Fujitsu Limited Micro-actuator and method of producing the same
US20030231434A1 (en) * 2002-06-18 2003-12-18 Fujitsu Limited Head assembly having microactuator
US6735055B1 (en) * 1998-05-07 2004-05-11 Seagate Technology Llc Microactuator structure with vibration attenuation properties

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3918405A1 (en) 1989-06-06 1990-12-13 Bayer Ag Polymer blends for flexible films
US5086966A (en) * 1990-11-05 1992-02-11 Motorola Inc. Palladium-coated solder ball
JPH11232811A (en) * 1998-02-17 1999-08-27 Alps Electric Co Ltd Magnetic head
SG90075A1 (en) * 1998-11-11 2002-07-23 Tdk Corp Magnetic head device
JP2000215428A (en) * 1999-01-27 2000-08-04 Tdk Corp Head slider support and head device and their manufacturing method
CN1270293C (en) * 1999-12-28 2006-08-16 阿尔卑斯电气株式会社 Magnetic head slider having protrusions provided on the medium-facing surface and manufacturing method therefor
WO2002013189A1 (en) * 2000-08-09 2002-02-14 Sae Magnetics (H.K.) Ltd. Bonding pad of suspension circuit
JP3675315B2 (en) * 2000-08-24 2005-07-27 Tdk株式会社 Disk apparatus having a head gimbal assembly and the head gimbal assembly with precise positioning actuator for a head element
US6985326B2 (en) * 2003-11-17 2006-01-10 Seagate Technology Llc Multi-layer electrode device on slider for electrostatic fly height adjustment

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622813A (en) * 1969-10-18 1971-11-23 Sumitomo Electric Industries Terminal device for piezoelectric ceramic transformer
US4413061A (en) * 1978-02-06 1983-11-01 International Business Machines Corporation Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper
US4434384A (en) * 1980-12-08 1984-02-28 Raytheon Company Ultrasonic transducer and its method of manufacture
US6341415B2 (en) * 1992-08-31 2002-01-29 Fujitsu Limited Method for assembling a magnetic head assembly and magnetic disk drive using bonding balls connecting magnetic head terminals to wiring terminals
US6098270A (en) * 1993-10-29 2000-08-08 Commissariat A L'energie Atomique Process for producing a slider having composite welding studs
US5691581A (en) * 1995-01-06 1997-11-25 Hitachi Metals, Ltd. Arm assembly and voice coil motor
US5711063A (en) * 1996-06-11 1998-01-27 Seagate Technology, Inc. Method of forming a suspension fabricated from silicon
US6349017B1 (en) * 1997-02-21 2002-02-19 Read-Rite Corporation Magnetic head suspension assembly using bonding pads of a slider to an attachment surface of a flexure
US6735055B1 (en) * 1998-05-07 2004-05-11 Seagate Technology Llc Microactuator structure with vibration attenuation properties
US6366431B1 (en) * 1998-12-25 2002-04-02 International Business Machines Corporation Head supporting arm having laser beam exposing aperture
US6584708B2 (en) * 1999-07-13 2003-07-01 Samsung Electro-Mechanics Co., Ltd. Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof
US6198606B1 (en) * 1999-07-28 2001-03-06 Seagate Technology Llc Disc drive actuation system having an injection molded magnetic micro-actuator with metal beam inserts and its method of fabrication
US6848154B2 (en) * 2000-11-02 2005-02-01 Fujitsu Limited Method of producing a micro-actuator
US6653761B2 (en) * 2000-11-02 2003-11-25 Fujitsu Limited Micro-actuator and method of producing the same
US20020074902A1 (en) * 2000-11-02 2002-06-20 Fujitsu Limited Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
US20050104477A1 (en) * 2000-11-02 2005-05-19 Fujitsu Limited Micro-actuator and method of producing the same
US6467141B2 (en) * 2000-11-22 2002-10-22 Fujitsu Limited Method of assembling micro-actuator
US20030196315A1 (en) * 2002-04-22 2003-10-23 Ming Gao Yao Method and apparatus for electrically and physically coupling a micro-actuator and slider to a hard drive arm suspension for component replacement after detachment from the suspension
US20030231434A1 (en) * 2002-06-18 2003-12-18 Fujitsu Limited Head assembly having microactuator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080151426A1 (en) * 2006-12-20 2008-06-26 Fu-Ying Huang System and method for compliant, adaptive hard drive sliders
US20080158734A1 (en) * 2007-01-03 2008-07-03 Sae Magnetics (H.K.) Ltd. Micro-actuator for use in small platform disk drive devices, and method of making the same
US7821743B2 (en) * 2007-01-03 2010-10-26 Sae Magnetics (H.K.) Ltd. Micro-actuator for use in small platform disk drive devices, and method of making the same
US20080180856A1 (en) * 2007-01-31 2008-07-31 Toshiki Hirano Method and apparatus for a microactuator bonding pad structure for solder ball placement and reflow joint
US8638975B2 (en) 2011-08-17 2014-01-28 Bose Corporation Wiper seal for passive radiator

Also Published As

Publication number Publication date
WO2004047086A1 (en) 2004-06-03
US20040095684A1 (en) 2004-05-20
US7359154B2 (en) 2008-04-15
CN1695179A (en) 2005-11-09
US20070183097A1 (en) 2007-08-09
CN100359567C (en) 2008-01-02
US7199978B2 (en) 2007-04-03

Similar Documents

Publication Publication Date Title
CN1237514C (en) Actuator, universal magnetic head assembly and their manufacture and disc drive
US7342750B2 (en) Method for providing electrical crossover in a laminated structure
USRE40975E1 (en) Head suspension with resonance feedback transducer
US8488281B1 (en) Disk drive suspension assembly having a flexure bond pad shelf separate from a tongue
CN1209746C (en) Magnetic head actuator and related gimbal assembly, making method thereof and related magnetic disk drive
US6614627B1 (en) Magnetic disk apparatus
JP4298911B2 (en) Disk drive suspension
US6262868B1 (en) Method and structures used for connecting recording head signal wires in a microactuator
US7403357B1 (en) Disk drive flexure assembly with a plurality of support bond pad apertures with a bond pad disposed over a bond pad support and part of each support bond pad aperture
US7057857B1 (en) Dimple pivot post for a rotary co-located microactuator
US4374402A (en) Piezoelectric transducer mounting structure and associated techniques
CN1275230C (en) Head gimbal assembly with precise positioning actuator for head element, disk drive apparatus with head assembly, and manufacturing method for the head gimbal assembly
US20160329066A1 (en) Suspension assembly having a microactuator grounded to a flexure
JP4790410B2 (en) Microactuator, head gimbal assembly, and disk drive using the same
US7177119B1 (en) Microactuated head suspension with ring springs
US8144435B2 (en) Cost reduced microactuator suspension
US20040125510A1 (en) Method and apparatus for PZT actuation device for hard disk drives
CN1685400B (en) Integrated method and device for dual stage micro ectuator and suspension design for hard disc driver
US7064928B2 (en) Method and apparatus for providing an additional ground pad and electrical connection for grounding a magnetic recording head
US7551386B2 (en) Head gimbal assembly with flying height controller, disk drive unit using the same, and flying height adjusting method and system thereof
US6246552B1 (en) Read/write head including displacement generating means that elongates and contracts by inverse piezoelectric effect of electrostrictive effect
US5856896A (en) Gimbal suspension for supporting a head in a disc drive assembly
US8339748B2 (en) Suspension assembly having a microactuator bonded to a flexure
US7023667B2 (en) Dual stage suspension with PZT actuators arranged to improve actuation in suspensions of short length
US5943189A (en) Piezoelectric engageable slider and slider microactuator