US20050190429A1 - Micromirrors with lower driving voltages - Google Patents

Micromirrors with lower driving voltages Download PDF

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Publication number
US20050190429A1
US20050190429A1 US11121543 US12154305A US2005190429A1 US 20050190429 A1 US20050190429 A1 US 20050190429A1 US 11121543 US11121543 US 11121543 US 12154305 A US12154305 A US 12154305A US 2005190429 A1 US2005190429 A1 US 2005190429A1
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Prior art keywords
micromirror
reflecting
element
light
control
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Granted
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US11121543
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US7268932B2 (en )
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Fusao Ishii
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Ignite Inc
Silicon Quest KK
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Silicon Quest KK
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Other optical systems; Other optical apparatus
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/005Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2007Display of intermediate tones
    • G09G3/2011Display of intermediate tones by amplitude modulation
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/74Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/3111Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources
    • H04N9/3114Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources by using a sequential colour filter producing one colour at a time
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141Constructional details thereof
    • H04N9/315Modulator illumination systems
    • H04N9/3155Modulator illumination systems for controlling the light source

Abstract

A micromirror device with a lower driving voltage is disclosed. The lower driving voltage is achieved by projecting a partial light for image display during a micromirror is oscillating from fully on state to a fully off state. The micromirror device includes a reflective element supported on a hinge for oscillating and positioning at least three states. These three states are a fully on state, a fully off state, and a partially ON angular positions in responding to a digital control signal. The oscillation of the micromirrors is controlled by a two bits signal inputted to two electrodes for controlling the voltage of these electrodes respectively. The micromirrors are further controlled to change the oscillation direction at an angular position between the fully on and fully off positions at a fraction of an oscillation cycle. With these inventive features, the micromirrors are controllable to provide higher ranges of gray scales without increasing the driving voltage.

Description

  • [0001]
    This application is a Continuation in Part (CIP) Application of pending U.S. patent application Ser. Nos. 10/698,620 filed on Nov. 1, 2003, 10/699,140 filed on Nov. 1, 2003, and 10/699,143 filed on Nov. 1, 2003 by the Applicant of this Patent Applications. The disclosures made in these Patent Applications are hereby incorporated by reference in this Patent Application.
  • TECHNICAL FIELD
  • [0002]
    This invention relates to micromirror arrays and control circuits to control the micromirrors. More particularly, this invention relates to control circuits for controlling the micromirrors to oscillate through multiple angular positions for providing intermediate states to implement the micromirror array as spatial light modulators (SLMs) thus enabling more accurately controllable gray scales while operated with substantially lower driving voltages.
  • BACKGROUND ART
  • [0003]
    Even though there are significant advances made in recent years on the technologies of implementing electromechanical micromirror devices as spatial light modulator, there are still limitations and difficulties when employed to provide high quality images display. Specifically, when the display images are digitally controlled, the image qualities are adversely affected due to the fact that the image is not displayed with sufficient number of gray scales.
  • [0004]
    Electromechanical micromirror devices have drawn considerable interest because of their application as spatial light modulators (SLMs). A spatial light modulator requires an array of a relatively large number of micromirror devices. In general, the number of devices required ranges from 60,000 to several million for each SLM. Referring to FIG. 1A for a digital video system 1 disclosed in a relevant U.S. Pat. No. 5,214,420 that includes a display screen 2. A light source 10 is used to generate light energy for ultimate illumination of display screen 2. Light 9 generated is further concentrated and directed toward lens 12 by mirror 11. Lens 12, 13 and 14 form a beam columnator to operative to columnate light 9 into a column of light 8. A spatial light modulator 15 is controlled by a computer through data transmitted over data cable 18 to selectively redirect a portion of the light from path 7 toward lens 5 to display on screen 2. The SLM 15 has a surface 16 that includes an array of switchable reflective elements, e.g., micromirror devices 32, such as elements 17, 27, 37, and 47 as reflective elements attached to a hinge 30 that shown in FIG. 1B. When element 17 is in one position, a portion of the light from path 7 is redirected along path 6 to lens 5 where it is enlarged or spread along path 4 to impinge the display screen 2 so as to form an illuminated pixel 3. When element 17 is in another position, light is not redirected toward display screen 2 and hence pixel 3 would be dark.
  • [0005]
    The on-and-off states of micromirror control scheme as that implemented in the U.S. Pat. No. 5,214,420 and by most of the conventional display system imposes a limitation on the quality of the display. Specifically, when applying conventional configuration of control circuit has a limitation that the gray scale of conventional system (PWM between ON and OFF states) is limited by the LSB (least significant bit, or the least pulse width). Due to the On-Off states implemented in the conventional systems, there is no way to provide shorter pulse width than LSB. The least brightness, which determines gray scale, is the light reflected during the least pulse width. The limited gray scales lead to degradations of image display.
  • [0006]
    Specifically, in FIG. 1C an exemplary circuit diagram of a prior art control circuit for a micromirror according to U.S. Pat. No. 5,285,407. The control circuit includes memory cell 32. Various transistors are referred to as “M*” where * designates a transistor number and each transistor is an insulated gate field effect transistor. Transistors M5, and M7 are p-channel transistors; transistors, M6, M8, and M9 are n-channel transistors. The capacitances, C1 and C2, represent the capacitive loads presented to memory cell 32. Memory cell 32 includes an access switch transistor M9 and a latch 32 a, which is the basis of the static random access switch memory (SRAM) design. All access transistors M9 in a row receive a DATA signal from a different bit-line 31 a. The particular memory cell 32 to be written is accessed by turning on the appropriate row select transistor M9, using the ROW signal functioning as a wordline. Latch 32 a is formed from two cross-coupled inverters, M5/M6 and M7/M8, which permit two stable states. state 1 is Node A high and Node B low and state 2 is Node A low and Node B high.
  • [0007]
    The dual states switching as illustrated by the control circuit controls the micromirrors to position either at an ON of an OFF angular orientation as that shown in FIG. 1A. The brightness, i.e., the gray scales of display for a digitally control image system is determined by the length of time the micromirror stays at an ON position. The length of time a micromirror is controlled at an ON position is in turned controlled by a multiple bit word. For simplicity of illustration, FIG. 1D shows the “binary time intervals” when control by a four-bit word. As that shown in FIG. 1D, the time durations have relative values of 1, 2, 4, 8 that in turn define the relative brightness for each of the four bits where 1 is for the least significant bit and 8 is for the most significant bit. According to the control mechanism as shown, the minimum controllable differences between gray scales for showing different brightness is a brightness represented by a “least significant bit” that maintaining the micromirror at an ON position.
  • [0008]
    When adjacent image pixels are shown with great degree of different gray scales due to a very coarse scale of controllable gray scale, artifacts are shown between these adjacent image pixels. That leads to image degradations. The image degradations are specially pronounced in bright areas of display when there are “bigger gaps” of gray scales between adjacent image pixels. It was observed in an image of a female model that there were artifacts shown on the forehead, the sides of the nose and the upper arm. The artifacts are generated due to a technical limitation that the digital controlled display does not provide sufficient gray scales. At the bright spots of display, e.g., the forehead, the sides of the nose and the upper arm, the adjacent pixels are displayed with visible gaps of light intensities.
  • [0009]
    As the micromirrors are controlled to have a fully on and fully off position, the light intensity is determined by the length of time the micromirror is at the fully on position. In order to increase the number of gray scales of display, the speed of the micromirror must be increased such that the digital control signals can be increased to a higher number of bits. However, when the speed of the micromirrors is increased, a strong hinge is necessary for the micromirror to sustain a required number of operational cycles for a designated lifetime of operation, In order to drive the micromirrors supported on a further strengthened hinge, a higher voltage is required. The higher voltage may exceed twenty volts and may even be as high as thirty volts. The micromirrors manufacture by applying the CMOS technologies probably would not be suitable for operation at such higher range of voltages and therefore the DMOS micromirror devices may be required. In order to achieve higher degree of gray scale control, a more complicate manufacturing process and larger device areas are necessary when DMOS micromirror is implemented. Conventional modes of micromirror control are therefore facing a technical challenge that the gray scale accuracy has to be sacrificed for the benefits of smaller and more cost effective micromirror display due to the operational voltage limitations.
  • [0010]
    There are many patents related to spatial light modulation that includes U.S. Pat. Nos. 2,025,143, 2,682,010, 2,681,423, 4,087,810, 4,292,732, 4,405,209, 4,454,541, 4,592,628, 4,767,192, 4,842,396, 4,907,862, 5,214,420, 5,287,096, 5,506,597, and 5,489,952. However, these inventions have not addressed and provided direct resolutions for a person of ordinary skill in the art to overcome the above-discussed limitations and difficulties.
  • [0011]
    Therefore, a need still exists in the art of image display systems applying digital control of a micromirror array as a spatial light modulator to provide new and improved systems such that the above discussed difficulties can be resolved.
  • SUMMARY OF THE INVENTION
  • [0012]
    The present invention relates to control circuits for micromirror devices and arrays of micromirror devices. The purpose of controlling the arrays is to apply such array as spatial light modulators (SLMs). In one aspect, the present invention provides a micromirror device in which the reflecting element is controlled to reflect light for image display at multiple intermediate positions for providing more flexibly controllable gray scales of display without requiring a higher speed of micromirror oscillation thus maintaining a low operational voltage.
  • [0013]
    In another aspect, the present invention provides a micromirror device operated with an ON state, an OFF state and an intermediate Oscillating state.
  • [0014]
    In yet another aspect, the present invention provides a micromirror device comprising an array of micromirrors that are controlled to operate with intermediate oscillating states to provide a least brightness that is a fraction, e.g., approximately 37%, of the fully ON state. The gray scale for display is now controllable to project finer scale of brightness differences between adjacent pixels with an additional controllable state to provide a fraction of brightness of the fully-on state for display. The annoying artifacts shown on a display caused by adjacent pixels having huge gray scale gaps can be significantly reduced.
  • [0015]
    In yet another aspect, the present invention provides a method of control the oscillation an array of micromirror devices wherein the micromirrors are enabled to oscillate in a reverse direction or stop before the micromirror completes a full oscillation cycle. Aided by such control flexibility and the fractional brightness for image display during an intermediate oscillation state, additional flexibilities are now provided to fine tune the gray scale for each image pixel especially for the high brightness display area where a gray scale difference are proportionally amplified due to the high intensity of light projections.
  • [0016]
    These and other objects and advantages of the present invention will no doubt become obvious to those of ordinary skill in the art after having read the following detailed description of the preferred embodiment, which is illustrated in the various drawing figures.
  • BRIEF DESCRIPTION OF FIGURES
  • [0017]
    The present invention is described in detail below with reference to the following Figures.
  • [0018]
    FIGS. 1A and 1B are functional block diagram and a top view of a portion of a micromirror array implemented as a spatial light modulator for a digital video display system of a conventional display system disclosed in a prior art patent.
  • [0019]
    FIG. 1C is a circuit diagram for showing a prior art circuit for controlling a micromirror to position at an ON and OFF states of a spatial light modulator.
  • [0020]
    FIG. 1D is diagram for showing the binary time intervals for a four bit gray scale.
  • [0021]
    FIG. 2 is a side cross sectional diagram of a micromirror device of this invention wherein the micromirror is oscillating between an ON-OFF position for providing at least an intermediate state.
  • [0022]
    FIG. 3 is a diagram for showing the micromirror angle versus time for computing an illumination to display an image with different light intensities wherein one-oscillating cycle provides approximately 37% light intensity of the fully-on state.
  • [0023]
    FIG. 4 is a circuit diagram for controlling a micromirror of this invention.
  • [0024]
    FIG. 5A is a diagram for showing the change of micromirror states over time wherein the micromirror may be controlled to position at three different states.
  • [0025]
    FIG. 5B is a diagram for showing the micromirror oscillation from one position to a different positions according to the different states shown in FIG. 5A.
  • [0026]
    FIG. 5C is a diagram for showing the brightness as the micromirror oscillating between different states according to that shown in FIGS. 5A and 5B.
  • DESCRIPTION OF PREFERRED EMBODIMENTS
  • [0027]
    Referring to FIG. 2 for a side cross sectional view for illustrating the oscillating motions of a micromirrors according to the control circuit of the present invention. A micromirror 100 supported on a hinge 110 formed on a substrate (not shown), is electrically controlled by two electrodes 120-1 and 120-2 to move to different positions, e.g., from +12 degrees to −12 degrees as shown. The incident light is projected along an optical path 130 and the light reflected from the micromirror 100 is projected to a projection lens 125 for further projecting to a display surface (not shown). The micromirror is controlled to move to a full-on state when the micromirror is positioned at the +12 degrees with the reflected light projected fully onto the projection lens along a 140 direction perpendicular to the projection lens 125. The micromirror 100 is controlled to move to a full-off state when the micromirror 100 is positioned at a −12 degrees with the reflected light 150 totally misses the projection lens 125. In a preferred embodiment, the micromirror 100 is controlled to move to an intermediate state when the micromirror is controlled to move to a zero degree position when the reflected light is projected along a third state direction 160. In different preferred embodiments, the micromirrors can be oscillating between a positive and negative angle relative to a perpendicular axis to the surface of the micromirror. The fully on and fully off positions as defined by these positive and negative angles can be flexibly designed depending on the system specifications for each specific application.
  • [0028]
    Referring to FIG. 3 for a waveform diagram showing the mirror angular position changes with time as the micromirror oscillates from the on state to an off state. A computation is performed to compute the light projection through the projection lens 125 for image display. During an oscillating condition, there is 37% of the light of the fully on state. For example, if 20 microseconds of an ON time provide a light output of one lumen, then the one oscillating cycle provides 0.37 lumen output of light. For the purpose of minimize oscillation decay of the micromirrors 100, the micromirror array is contained and operated in a vacuum-sealed environment. With a partial light projection of light to contribute to the image light intensity, a higher number of gray scales are achievable without requiring a high speed of mirror oscillation. The micromirror devices can be controlled at a voltage substantially lower than twenty volts, e.g., around five volts, such that the spatial light modulator (SLM) can be implemented with CMOS technologies.
  • [0029]
    Referring to FIG. 4 for a preferred embodiment showing a control circuit to control the oscillation of the micromirror 100 to position at an ON state, an OFF state and an intermediate state based on the ON-OFF states of the electrodes 120-1 and 120-2. The control circuit includes a wordline 160 and two bit-lines 170-1 and 170-2 to alternate turn on two transistors 180-1 and 180-2, e.g., FET-1 and FET-2 respectively. Each of these transistors 180-1 and 180-2 is connected to a capacitor 185-1 and 185-2, e.g., Cap-1 and Cap-2 respectively. Each micromirror for display of one pixel is therefore control to have multiple states depending on the input to the bit-lines 170-1 and 170-2. Specifically, the control table can be represented as the followings:
    TABLE 1
    Bit #1 Bit #2 State
    1 0 ON
    0 1 OFF
    0 0 Intermediate
    1 1 Undefined
  • [0030]
    Referring to FIG. 5 for an exemplary timing diagram for illustrating the changes of control states between a first state, an intermediate state and a second state. The first state is a fully On state to provide a highest brightness. The second state is an OFF state to provide a lowest brightness. Additionally, there is an intermediate state as a third state for providing flexibility to adjust brightness thus controls the gray scale of each image pixel.
  • [0031]
    As shown in the timing diagram of FIG. 5A and FIG. 5B, the oscillating micromirror is provided with flexibility to oscillate between the first, second and third states. The micromirror is oriented at +12 degrees at a fist state. The micromirror is oriented at a −12 degrees at a second state and oriented at zero degree at an intermediate state either at the end of the oscillating cycles or in an intermediate points that may be a fraction of an oscillating cycle.
  • [0032]
    As shown in the timing diagram of FIG. 5C, the brightness of an image pixel as projected from a micromirror is a function of the length of the time the micromirror stays at a certain states and also is a function of the fraction of light when the mirror oscillates and stays at an intermediate state. FIG. 5C clearly shows that the gray scale can be flexibly controlled with much greater degree of accuracy since the gray scale is no longer limited by the least significant bit of the control word.
  • [0033]
    Therefore, in this invention, the gray scales can be controlled by controlling the durations of the micromirror positioned at three different states. Furthermore, oscillation of the micromirrors is controllable to swing from one state to another state at a mid-point of an oscillation cycle. The gray scale GS is therefore functional depends on Ts1, Ts2, and Ts3 that represent lengths of time the micromirror is positioned at different three states, and also depends on the lengths of time for the micromirror to change from one state to another since there will be partial projection of the light to the image pixel from as the micromirror swing through at least one intermediate state.
  • [0034]
    According to above descriptions of the preferred embodiments this invention discloses a micromirror device that includes a reflecting element supported on a hinge for oscillating between two states wherein the reflecting elements is projecting a partial light for contributing to a display light intensity during oscillating between either of the two states. In a preferred embodiment, the partial light for contributing to a display light intensity is further applied for controlling a gray scale of an image display using a light projected from the reflecting element. The reflecting element is further provided to oscillate between the two states as a fully on, a fully off states respectively in responding to a digital control signal. In another preferred embodiment, the digital control signal is a two-bit digital control signal. In another preferred embodiment, the micromirror device further includes two electrodes and the reflecting element is further provided for oscillating to different positions in responding to a digital control signal for changing voltages of the two electrodes. The digital control signals are two digital bits applied to each of the two electrodes. The reflecting element is further digitally controllable to change an oscillation direction in an intermediate angular position between the fully on and fully off angular positions. In another preferred embodiment, the micromirror device further includes a lens for receiving an incident light projection from the reflecting element for projecting an image display light wherein the lens is further disposed for projecting a portion of the image display light as the reflecting element oscillating between a fully on and fully off angular positions. In a different preferred embodiment, the micromirror device further includes a vacuum seal package for enclosing the reflecting element and the hinge in a sealed vacuum space. In another preferred embodiment, the micromirror device further includes two separate independently controllable electrodes for controlling the reflecting element to oscillate to different positions. These two separate independently controllable electrodes disposed on two opposite sides of the hinge wherein each of the electrodes is connected to a control circuit for independently applying a control voltage thereon to control the reflecting element to oscillate to different positions. In another preferred embodiment, the micromirror further includes a control circuit operated at a voltage substantially about five volts for controlling the reflecting element to oscillate to different positions. In another preferred embodiment, the control circuit for receiving a digital control word of at least ten bits for operating at a voltage substantially about five volts for controlling the reflecting element to oscillate to different positions. In a preferred embodiment, the micromirror device is a CMOS micromirror device.
  • [0035]
    In a preferred embodiment, this invention further discloses a method for controlling a micromirror that includes a step of controlling a reflecting element supported on a hinge to oscillate between two states and enabling said reflecting elements to project a partial light for contributing to a display light intensity during oscillating between either of said two states.
  • [0036]
    Although the present invention has been described in terms of the presently preferred embodiment, it is to be understood that such disclosure is not to be interpreted as limiting. Various alternations and modifications will no doubt become apparent to those skilled in the art after reading the above disclosure. Accordingly, it is intended that the appended claims be interpreted as covering all alternations and modifications as fall within the true spirit and scope of the invention.

Claims (49)

  1. 1. A micromirror device comprising:
    a reflecting element supported on a hinge for oscillating and positioning at least three states.
  2. 2. The device of claim 1, wherein:
    said reflecting element is further provided for oscillating to a fully on, a fully off and an partially ON angular positions in responding to a digital control signal.
  3. 3. The device of claim 1, wherein:
    said reflecting element is further provided for oscillating to different positions in responding to a two-bit digital control signal.
  4. 4. The device of claim 1, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal for changing voltages of said two electrodes.
  5. 5. The device of claim 1, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal representing by two digital bits with one bit applied to each of said two electrodes for changing voltages of said two electrodes.
  6. 6. The device of claim 1, wherein:
    said reflecting element is further provided for oscillating to a fully on, a fully off and an partially ON angular positions in responding to a digital control signal wherein said reflecting element is further controlled to change an oscillation direction in an intermediate angular position between said fully on and fully off angular positions.
  7. 7. The device of claim 1, further comprising:
    a lens for receiving an incident light projection from said reflecting element for projecting an image display light wherein said lens is further disposed for projecting a portion of said image display light as said reflecting element oscillating between a fully on and fully off angular positions.
  8. 8. The micromirror device further comprising:
    a vacuum seal package for enclosing said reflecting element and said hinge in a sealed vacuum space.
  9. 9. The device of claim 1, further comprising:
    two separate independently controllable electrodes for controlling said reflecting element to oscillate to different positions.
  10. 10. The device of claim 1, further comprising:
    two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions.
  11. 11. The device of claim 10, wherein:
    each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions.
  12. 12. The device of claim 11, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for independently controlling said reflecting element to oscillate to different positions.
  13. 13. The device of claim 11, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to three different positions.
  14. 14. The device of claim 11, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0° relative to a perpendicular axis to said reflecting element.
  15. 15. A micromirror device comprising:
    a reflecting element supported on a hinge for oscillating between two states wherein said reflecting elements is further controlled to stop or oscillate in a reverse direction before reaching either of said two states.
  16. 16. The device of claim 15, wherein:
    said reflecting element is further controlled to stop at a third intermediate state between said two states.
  17. 17. The device of claim 15, wherein:
    said reflecting element is further provided to oscillate to said two states as a fully on, a fully off states respectively and further stoppable at an intermediate partially ON angular positions in responding to a digital control signal.
  18. 18. The device of claim 15, wherein:
    said reflecting element is further provided for oscillating to different positions in responding to a two-bit digital control signal.
  19. 19. The device of claim 15, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal for changing voltages of said two electrodes.
  20. 20. The device of claim 15, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal representing by two digital bits with one bit applied to each of said two electrodes for changing voltages of said two electrodes.
  21. 21. The device of claim 15, wherein:
    said reflecting element is further provided to oscillate said two states as a fully on, a fully off states respectively in responding to a digital control signal wherein said reflecting element is further digitally controllable to change an oscillation direction in an intermediate angular position between said fully on and fully off angular positions
  22. 22. The device of claim 15, further comprising:
    a lens for receiving an incident light projection from said reflecting element for projecting an image display light wherein said lens is further disposed for projecting a portion of said image display light as said reflecting element oscillating between a fully on and fully off angular positions.
  23. 23. The micromirror device of claim 15 further comprising:
    a vacuum seal package for enclosing said reflecting element and said hinge in a sealed vacuum space.
  24. 24. The device of claim 15, further comprising:
    two separate independently controllable electrodes for controlling said reflecting element to oscillate to different positions.
  25. 25. The device of claim 15, further comprising:
    two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions.
  26. 26. The device of claim 25, wherein:
    each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions.
  27. 27. The device of claim 26, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for independently controlling said reflecting element to oscillate to different positions.
  28. 28. The device of claim 26, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to three different positions.
  29. 29. The device of claim 26, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0° relative to a perpendicular axis to said reflecting element.
  30. 30. A micromirror device comprising:
    a reflecting element supported on a hinge for oscillating between two states wherein said reflecting elements is projecting a partial light for contributing to a display light intensity during oscillating between either of said two states.
  31. 31. The device of claim 30, wherein:
    said partial light for contributing to a display light intensity is further applied for controlling a gray scale of an image display using a light projected from said reflecting element.
  32. 32. The device of claim 30, wherein:
    said reflecting element is further provided to oscillate between said two states as a fully on, a fully off states respectively in responding to a digital control signal.
  33. 33. The device of claim 30, wherein:
    said reflecting element is further provided for oscillating to different positions in responding to a two-bit digital control signal.
  34. 34. The device of claim 30, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal for changing voltages of said two electrodes.
  35. 35. The device of claim 30, further comprising:
    two electrodes and said reflecting element is further provided for oscillating to different positions in responding to a digital control signal representing by two digital bits with one bit applied to each of said two electrodes for changing voltages of said two electrodes.
  36. 36. The device of claim 30, wherein:
    said reflecting element is further provided to oscillate said two states as a fully on, a fully off states respectively in responding to a digital control signal wherein said reflecting element is further digitally controllable to change an oscillation direction in an intermediate angular position between said fully on and fully off angular positions
  37. 37. The device of claim 30, further comprising:
    a lens for receiving an incident light projection from said reflecting element for projecting an image display light wherein said lens is further disposed for projecting a portion of said image display light as said reflecting element oscillating between a fully on and fully off angular positions.
  38. 38. The micromirror device of claim 30 further comprising:
    a vacuum seal package for enclosing said reflecting element and said hinge in a sealed vacuum space.
  39. 39. The micromirror device of claim 30, further comprising:
    two separate independently controllable electrodes for controlling said reflecting element to oscillate to different positions.
  40. 40. The micromirror device of claim 30, further comprising:
    two separate independently controllable electrodes disposed on two opposite sides of said hinge wherein each of said electrodes is connected to a control circuit for independently applying a control voltage thereon to control said reflecting element to oscillate to different positions.
  41. 41. The micromirror device of claim 40, wherein:
    each of said electrodes is connected to a transistor having a gate connected to a common wordline and each transistor having a source connected to an independently controllable bitline for independently controlling said reflecting element to oscillate to different positions.
  42. 42. The micromirror device of claim 40, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for independently controlling said reflecting element to oscillate to different positions.
  43. 43. The micromirror device of claim 40, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to three different positions.
  44. 44. The micromirror device of claim 41, wherein:
    each bitline connected to said source of said transistor is provided for receiving a binary bit represented by zero and one for applying a voltage to said electrodes for applying one of three digital signals represented by (1,0), (0,1) and (0,0) for controlling said reflecting element to oscillate to angular positions oriented substantially at a positive angle, a negative angle and 0° relative to a perpendicular axis to said reflecting element.
  45. 45. The micromirror device of claim 30, further comprising:
    a control circuit operated at a voltage substantially about five volts for controlling said reflecting element to oscillate to different positions.
  46. 46. The micromirror device of claim 30, further comprising:
    a control circuit for receiving a digital control word of at least ten bits for operating at a voltage substantially about twenty volts for controlling said reflecting element to oscillate to different positions.
  47. 47. The micromirror device of claim 30, further comprising:
    a CMOS micromirror device.
  48. 48. A method for controlling a micromirror device comprising:
    controlling a reflecting element supported on a hinge to oscillate between two states and enabling said reflecting elements to project a partial light for contributing to a display light intensity during oscillating between either of said two states.
  49. 49. The method of claim 48, further comprising:
    applying a CMOS integrate circuit manufacturing process for manufacturing said micromirror device.
US11121543 2003-11-01 2005-05-04 Micromirrors with lower driving voltages Expired - Fee Related US7268932B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10698620 US20050094241A1 (en) 2003-11-01 2003-11-01 Electromechanical micromirror devices and methods of manufacturing the same
US10699140 US6862127B1 (en) 2003-11-01 2003-11-01 High performance micromirror arrays and methods of manufacturing the same
US10699143 US6903860B2 (en) 2003-11-01 2003-11-01 Vacuum packaged micromirror arrays and methods of manufacturing the same
US11121543 US7268932B2 (en) 2003-11-01 2005-05-04 Micromirrors with lower driving voltages

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US10698620 Continuation-In-Part US20050094241A1 (en) 2003-11-01 2003-11-01 Electromechanical micromirror devices and methods of manufacturing the same

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US11728553 Continuation-In-Part US7646527B2 (en) 2003-11-01 2007-03-18 Intensity distribution of incident light flux
US11894248 Continuation-In-Part US7835062B2 (en) 2006-08-30 2007-08-18 Mircromirror device having a vertical hinge
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US20070171507A1 (en) 2007-07-26 application
US7268932B2 (en) 2007-09-11 grant
US8064125B2 (en) 2011-11-22 grant
US20090128704A1 (en) 2009-05-21 application
US7646527B2 (en) 2010-01-12 grant

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