US20040159647A1 - Melting and vaporizing apparatus and method - Google Patents

Melting and vaporizing apparatus and method Download PDF

Info

Publication number
US20040159647A1
US20040159647A1 US10/751,946 US75194604A US2004159647A1 US 20040159647 A1 US20040159647 A1 US 20040159647A1 US 75194604 A US75194604 A US 75194604A US 2004159647 A1 US2004159647 A1 US 2004159647A1
Authority
US
United States
Prior art keywords
substance
envelope
temperature
preset pressure
oven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US10/751,946
Other versions
US7161110B2 (en
US20060011603A2 (en
Inventor
Susana Curatolo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sandbridge Technologies Inc
CZT Inc
Original Assignee
Sandbridge Technologies Inc
CZT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/480,042 external-priority patent/US7067006B2/en
Application filed by Sandbridge Technologies Inc, CZT Inc filed Critical Sandbridge Technologies Inc
Priority to US10/751,946 priority Critical patent/US7161110B2/en
Publication of US20040159647A1 publication Critical patent/US20040159647A1/en
Priority to EP04796263A priority patent/EP1704265A2/en
Priority to PCT/US2004/035244 priority patent/WO2005068680A2/en
Priority to JP2006549240A priority patent/JP2007517658A/en
Priority to CN2004800399800A priority patent/CN1902335B/en
Priority to US11/284,819 priority patent/US7214903B2/en
Publication of US20060011603A2 publication Critical patent/US20060011603A2/en
Publication of US7161110B2 publication Critical patent/US7161110B2/en
Application granted granted Critical
Adjusted expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01BBOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/04Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere

Definitions

  • the present disclosure relates generally to heating materials and, more specifically, to heating materials with respect to their melting and vaporization points or temperatures.
  • Solid materials or substances must be heated in many processes to create liquids or gases. These are used to create compounds of the materials and/or to create vapors for depositions.
  • the cost related to the process is an initial function of the equipment necessary to perform the heating and, secondly, the amount of energy that must be used to convert a solid into a liquid or a solid or liquid into a vapor.
  • the temperature to convert a solid to a liquid or a vapor or the temperature to convert a liquid to a vapor can be reduced. There will be significant savings if this temperature can be reduced substantially below the melting point for melting or a vaporization point for vaporizing.
  • the present disclosure is directed to an apparatus and method for heating materials or substances in an oven at an oven temperature below their melting and/or vaporization points to either melt and/or vaporize the substance.
  • Substances are inserted into a substantially spherical envelope.
  • the envelope is sealed at a preset pressure.
  • the solid is heated in an oven at an oven temperature substantially below the melting or vaporization temperature of the substance at the preset pressure for a time sufficient to either melt or vaporize the substance.
  • the envelope is shaped so as to create an electron vortex of electrons or a plasma flow of electrons emitted from the substance.
  • the heating at the oven temperature generates electron emissions from the substance and creates the electron vortex or the plasma flow, which allows melting or vaporization of the substance at the oven temperature below the melting or vaporization temperature at the preset pressure.
  • the electron vortex or plasma flow creates a magnetic confinement field without external excitement.
  • the electron vortex or plasma flow also accelerates the emission of electrons in the substance, which increases the heat of the substance above that of the oven temperature.
  • the substantially spherical envelope structure can also be used in a coating method wherein the substance and a substrate to be coated are inserted into the substantially spherical envelope.
  • the envelope is sealed at a preset pressure and heated in the oven at an oven temperature below the vaporization temperature of the substance at the preset pressure and for a time sufficient to vaporize the substance.
  • the heat in the oven is reduced to deposit the vapors on the substrate.
  • the substrate may be one of metal and ceramic.
  • the substantially spherical envelope may be tear-, ovoid- or elliptically-shaped.
  • FIGS. 1 A- 1 C show the process of enclosing the material in an envelope according to the present disclosure.
  • FIG. 2 shows a dual enclosure according to the present disclosure.
  • FIG. 3 shows a triple enclosure device according to the present disclosure.
  • FIG. 4 shows a flow chart of a process according to the present disclosure.
  • FIG. 5 is a diagram illustrating electron vortex or plasma flow according to the present disclosure.
  • FIG. 6 is a top view showing a dipole produced according to the present disclosure.
  • FIG. 7 is a sealed enclosure for a vapor deposition process according to the present disclosure.
  • the presently disclosed process and apparatus effectively melts or vaporizes a material or substance using substantially less energy than before.
  • the material is melted and/or vaporized at an oven temperature below the melting and/or vaporization temperature of the substance.
  • the vaporized material may be used for vapor deposition processes.
  • An example of the apparatus is illustrated in FIGS. 1 - 3 .
  • a material 10 is placed in an envelope 20 , as illustrated in FIG. 1A.
  • the envelope 20 is neck down at 22 and receives a tube 24 , as shown in FIG. 1B.
  • the interior of the envelope 20 is evacuated.
  • the tube 24 is removed from the envelope 20 , and it is sealed at 26 , as shown in FIG. 1C.
  • the resulting structure is a generally spherical shape which resembles a tear drop, an ovoid or an ellipse.
  • the processing of the envelope 20 to form the neck down 22 and closing it at 26 is performed with heat in a two-step method and sufficiently slow as not to preheat or affect the material 10 in the envelope 20 .
  • the envelope 20 may be quartz, for example.
  • a spherical crucible 30 having an opening 32 to receive the material or substance 10 is placed within the envelope 20 .
  • the crucible 30 may be a ball or sphere having a diameter Dc of approximately 12 millimeters.
  • the resulting envelope 20 may have a diameter De of approximately 22 millimeters and a height of 50.8 millimeters.
  • the thickness of the envelope 20 may be approximately 1 millimeter.
  • FIG. 3 A triple enclosure device is illustrated in FIG. 3.
  • the crucible 30 is enclosed in an enclosure 40 having an opening 42 .
  • the enclosure 40 is inserted in the envelope 20 and sealed therein.
  • the openings 32 , 42 allow vapors from the material 10 in the crucible 30 to flow into the envelope 20 during the process.
  • the crucible 30 will have a diameter Dc of approximately 12 millimeters
  • the enclosure 40 will have a diameter Df of approximately 22 millimeters
  • the envelope 20 will have a diameter De of approximately 44 millimeters.
  • the general process is described in FIG. 4.
  • the substance 10 is inserted into the envelope 20 at step 50 .
  • the envelope 20 is sealed at step 52 , and the envelope 20 is heated in an oven at step 54 .
  • the envelope 20 is then cooled at 56 .
  • More than one substance is provided in the envelope 20 .
  • a compound is created of the two substances. If a substrate is inserted in the envelope 20 and the substrate is not vaporized by the process, the vaporization of the substance will then deposit on the substrate upon cooling.
  • the sample was cooked for one hour at 945° C. for one hour and then set for 1150° C. The other times listed are the elapse time from the change of setting and the observed results. It should be noted that some material (for example, fused quartz gauze) was used in the envelope 20 and in the opening 32 of crucible 30 to maintain the material or substance 10 in place during assembly and handling.
  • some material for example, fused quartz gauze
  • the pyrometer of the oven registered temperature spikes or overshoots.
  • the temperature increase was measured at 80° C. above the setting of the oven.
  • the spike or overshoot was 300° C.
  • Electrons are emitted from solid through the known Einstein Photo-electric Effect. These electrons are illustrated at 60 in FIG. 5. Due to the shape of the envelope 20 , these electrons create a vortex flow within the envelope 20 . This electron vortex is also considered a plasma flow. This motion of the electrons or plasma generates a magnetic field of energy. This magnetic field creates a magnetic enforcement field at the interior surface of the envelope 20 without external excitation. The energy of the magnetic field accelerates the release of electrons from the solid, thereby increasing the solid body temperature beyond its melting point. Thus, the solid may pass into a liquid stage below its melting point.
  • the electron vortex or plasma flow and the resulting electromagnetic field also causes the liquid to vaporize into a gas substantially below its vaporization temperature.
  • the vaporization is at an oven temperature below the melting point of the material 10 .
  • the additional heating within the substance results from the increased lattice vibrations experienced by the inter-atomic and intra-atomic bonds.
  • the electron vortex is a product of the electrons trying to come into equilibrium with the fixed volume of the envelope 20 .
  • This volume in combination with the magnetic field, forms the magnetic confinement field.
  • the magnetic field is parallel to the axis 61 of the vortex and the envelope 20 .
  • the magnetic field penetrates all that is contained in the volume including the material 10 at the bottom. Due to Lorentz forces on each of the emitted electrons moving in the vortex, additional energy is generated greater than that generated by the heat flow.
  • FIG. 6 illustrates a dipole field 66 observed looking down the axis 64 of the magnetic field.
  • the present structure and process may be used for vapor deposition.
  • a substrate 70 may be placed in the envelope 20 with the material 10 .
  • some material 72 for example, fused quartz gauze
  • the envelope 20 is then vacuumed and sealed.
  • the envelope 20 with the material 10 and the substrate 70 are then heated at a temperature substantially below the vaporization temperature of the material 10 .
  • the oven is shut off, and the vapors are allowed to deposit upon the substrate.
  • the substance 10 may be two or more substances which, in a vapor state, form a combined compound as the coating.
  • a substrate 70 may be coated with a compound formed from silicon and tellurium.
  • a compound formed from silicon and tellurium For example, 21 grams of a metal substrate and 2 grams of the silicon/tellurium compound may be provided in the envelope 20 .
  • the envelope 20 with the material 10 and the substrate 70 are then heated at 999° C. for 5 hours and then cooled.
  • the resulting product forms a coating of SiO 2 Te x , where x is in the range of 1 ⁇ 3 to ⁇ fraction (5/3) ⁇ .
  • this single crystalline structure of silicon dioxide and tellurium is hydroxyl ion and hydrogen resistant. This is beneficial, as described therein, for making, doping and coating optical fibers. It is also found to substantially resist acid corrosion of metal since all acids include or will react in an environment to produce hydroxyl ions.

Abstract

An apparatus and method for heating materials or substances in an oven at an oven temperature below their melting and/or vaporization points to either melt and/or vaporize the substance. Substances are inserted into a substantially spherical envelope. The envelope is sealed at a preset pressure. The solid is heated in an oven at an oven temperature substantially below the melting or vaporization temperature of the substance at the preset pressure for a time sufficient to either melt or vaporize the substance.

Description

    CROSS-REFERENCE
  • This application is a continuation-in-part of U.S. patent application Ser. No. 10/480,042, filed Dec. 9, 2003, which is a nationalization of PCT/US02/32003, filed Oct. 8, 2002, which claims priority and benefit of U.S. [0001] Provisional Application 60/393,829 filed Jul. 8, 2002. The provisional application and the national PCT application are incorporated herein by reference.
  • BACKGROUND AND SUMMARY OF THE DISCLOSURE
  • The present disclosure relates generally to heating materials and, more specifically, to heating materials with respect to their melting and vaporization points or temperatures. [0002]
  • Solid materials or substances must be heated in many processes to create liquids or gases. These are used to create compounds of the materials and/or to create vapors for depositions. The cost related to the process is an initial function of the equipment necessary to perform the heating and, secondly, the amount of energy that must be used to convert a solid into a liquid or a solid or liquid into a vapor. After the initial cost of the equipment, continued savings can be achieved if the temperature to convert a solid to a liquid or a vapor or the temperature to convert a liquid to a vapor can be reduced. There will be significant savings if this temperature can be reduced substantially below the melting point for melting or a vaporization point for vaporizing. [0003]
  • The present disclosure is directed to an apparatus and method for heating materials or substances in an oven at an oven temperature below their melting and/or vaporization points to either melt and/or vaporize the substance. Substances are inserted into a substantially spherical envelope. The envelope is sealed at a preset pressure. The solid is heated in an oven at an oven temperature substantially below the melting or vaporization temperature of the substance at the preset pressure for a time sufficient to either melt or vaporize the substance. [0004]
  • The envelope is shaped so as to create an electron vortex of electrons or a plasma flow of electrons emitted from the substance. The heating at the oven temperature generates electron emissions from the substance and creates the electron vortex or the plasma flow, which allows melting or vaporization of the substance at the oven temperature below the melting or vaporization temperature at the preset pressure. The electron vortex or plasma flow creates a magnetic confinement field without external excitement. The electron vortex or plasma flow also accelerates the emission of electrons in the substance, which increases the heat of the substance above that of the oven temperature. [0005]
  • The substantially spherical envelope structure can also be used in a coating method wherein the substance and a substrate to be coated are inserted into the substantially spherical envelope. The envelope is sealed at a preset pressure and heated in the oven at an oven temperature below the vaporization temperature of the substance at the preset pressure and for a time sufficient to vaporize the substance. The heat in the oven is reduced to deposit the vapors on the substrate. The substrate may be one of metal and ceramic. The substantially spherical envelope may be tear-, ovoid- or elliptically-shaped. [0006]
  • These and other aspects of the present disclosure will become apparent from the following detailed description of the disclosure, when considered in conjunction with accompanying drawings.[0007]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIGS. [0008] 1A-1C show the process of enclosing the material in an envelope according to the present disclosure.
  • FIG. 2 shows a dual enclosure according to the present disclosure. [0009]
  • FIG. 3 shows a triple enclosure device according to the present disclosure. [0010]
  • FIG. 4 shows a flow chart of a process according to the present disclosure. [0011]
  • FIG. 5 is a diagram illustrating electron vortex or plasma flow according to the present disclosure. [0012]
  • FIG. 6 is a top view showing a dipole produced according to the present disclosure. [0013]
  • FIG. 7 is a sealed enclosure for a vapor deposition process according to the present disclosure.[0014]
  • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • The presently disclosed process and apparatus effectively melts or vaporizes a material or substance using substantially less energy than before. The material is melted and/or vaporized at an oven temperature below the melting and/or vaporization temperature of the substance. Thus, substantial energy savings are produced. The vaporized material may be used for vapor deposition processes. An example of the apparatus is illustrated in FIGS. [0015] 1-3.
  • A [0016] material 10 is placed in an envelope 20, as illustrated in FIG. 1A. The envelope 20 is neck down at 22 and receives a tube 24, as shown in FIG. 1B. The interior of the envelope 20 is evacuated. The tube 24 is removed from the envelope 20, and it is sealed at 26, as shown in FIG. 1C. The resulting structure is a generally spherical shape which resembles a tear drop, an ovoid or an ellipse. The processing of the envelope 20 to form the neck down 22 and closing it at 26 is performed with heat in a two-step method and sufficiently slow as not to preheat or affect the material 10 in the envelope 20. The envelope 20 may be quartz, for example.
  • Although the results to be described below have been achieved with a [0017] single envelope 20, the results can be further improved by using multiple enclosures. As illustrated in FIG. 2, a spherical crucible 30 having an opening 32 to receive the material or substance 10 is placed within the envelope 20. As an example, the crucible 30 may be a ball or sphere having a diameter Dc of approximately 12 millimeters. The resulting envelope 20 may have a diameter De of approximately 22 millimeters and a height of 50.8 millimeters. The thickness of the envelope 20 may be approximately 1 millimeter.
  • A triple enclosure device is illustrated in FIG. 3. The [0018] crucible 30 is enclosed in an enclosure 40 having an opening 42. The enclosure 40 is inserted in the envelope 20 and sealed therein. The openings 32, 42 allow vapors from the material 10 in the crucible 30 to flow into the envelope 20 during the process. As an example, the crucible 30 will have a diameter Dc of approximately 12 millimeters, the enclosure 40 will have a diameter Df of approximately 22 millimeters, and the envelope 20 will have a diameter De of approximately 44 millimeters.
  • [0019] Envelope 20 with substance 10 by itself or with a crucible 30, or crucible 30 and enclosure 40, is then inserted into an oven. It is heated at an oven temperature and time sufficient to melt or vaporize the substance 10. The oven temperatures to melt and/or vaporize are below the melt and/or vaporization temperature of the material. The general process is described in FIG. 4. The substance 10 is inserted into the envelope 20 at step 50. The envelope 20 is sealed at step 52, and the envelope 20 is heated in an oven at step 54. The envelope 20 is then cooled at 56.
  • More than one substance is provided in the [0020] envelope 20. A compound is created of the two substances. If a substrate is inserted in the envelope 20 and the substrate is not vaporized by the process, the vaporization of the substance will then deposit on the substrate upon cooling.
  • Experiments were run using the single enclosure of FIG. 1 and the triple enclosure of FIG. 3. In the case of tellurium, silicon and gold, 0.1 grams of each were used. The results are shown in Table 1 below. For each of the substances or materials, the oven temperature was substantially below the vaporization point temperature for the material and below the melting point temperature. The oven temperature was set and/or the temperatures measured were between 30 and 40 percent of the vaporization temperature. For the tellurium, the 325° C. represents about 32.8 percent of the vaporization temperature, the 1080° C. for silicon represents about 33 percent of the vaporization temperature, the 965° C. for copper represents about 37.6 percent of the vaporization temperature and the 1025° C. for gold represents about 35.3 percent of the vaporization temperature. [0021]
    TABLE 1
    No. of Melting Vaporization Oven
    Material Encls. Point Point Temp. Duration Results
    TE
    3  450° C.  990° C. 325° C. 5 hours Total vapor @
    42 min.
    TE 1  450° C.  990° C. 325° C. 5 hours Partial vapor
    CU
    3 1083° C. 2566° C. 930° C. Partial vapor
    965° C. 5 hours Total vapor
    SI
    3 1414° C. 3265° C. 945° C. 1 hour
    1050° C.  ½ hour Partial vapor
    1080° C.  hours Total vapor
    AU 1 1064° C. 2900° C. 1025° C.  5 hours Total vapor
  • For the silicon, the sample was cooked for one hour at 945° C. for one hour and then set for 1150° C. The other times listed are the elapse time from the change of setting and the observed results. It should be noted that some material (for example, fused quartz gauze) was used in the [0022] envelope 20 and in the opening 32 of crucible 30 to maintain the material or substance 10 in place during assembly and handling.
  • It should be noted that at various temperatures during ramp up to the final oven temperature for tellurium and gold using a single enclosure, the pyrometer of the oven registered temperature spikes or overshoots. For example, for the tellurium, the temperature increase was measured at 80° C. above the setting of the oven. For the gold, the spike or overshoot was 300° C. [0023]
  • The tapered shape of the enclosures, envelopes and/or crucibles produce the improved results. Experiments conducted with more spherical enclosures produces just partial vaporization and then only at the outermost enclosure at its very small end taper where it was closed. [0024]
  • The [0025] solids 10 inserted into the uniquely-shaped envelope 20, whether by itself or with additional crucibles or enclosures, produced results at oven temperatures below that of the melting and vaporization temperature for the material. To achieve this result, there is an additional energy source within the envelope 20. No charges or any other magnetic field were introduced into the envelope 20 from external the envelope 20. From the observed behavior and results, the source of this additional energy is electrons emitted from the solid.
  • Electrons are emitted from solid through the known Einstein Photo-electric Effect. These electrons are illustrated at [0026] 60 in FIG. 5. Due to the shape of the envelope 20, these electrons create a vortex flow within the envelope 20. This electron vortex is also considered a plasma flow. This motion of the electrons or plasma generates a magnetic field of energy. This magnetic field creates a magnetic enforcement field at the interior surface of the envelope 20 without external excitation. The energy of the magnetic field accelerates the release of electrons from the solid, thereby increasing the solid body temperature beyond its melting point. Thus, the solid may pass into a liquid stage below its melting point. Once in the liquid stage, the electron vortex or plasma flow and the resulting electromagnetic field also causes the liquid to vaporize into a gas substantially below its vaporization temperature. As noted in Table 1 above, the vaporization is at an oven temperature below the melting point of the material 10.
  • The additional heating within the substance results from the increased lattice vibrations experienced by the inter-atomic and intra-atomic bonds. The electron vortex is a product of the electrons trying to come into equilibrium with the fixed volume of the [0027] envelope 20. This volume, in combination with the magnetic field, forms the magnetic confinement field. The magnetic field is parallel to the axis 61 of the vortex and the envelope 20. The magnetic field penetrates all that is contained in the volume including the material 10 at the bottom. Due to Lorentz forces on each of the emitted electrons moving in the vortex, additional energy is generated greater than that generated by the heat flow. FIG. 6 illustrates a dipole field 66 observed looking down the axis 64 of the magnetic field.
  • Based on observations, the above explanation is an interpretation of what produces the additional energy. There may be other effects which produce the energy by themselves or in addition to the above explanation. The present process is not to be limited by the supposition of where the additional energy is coming from other than that it is not coming from outside of the [0028] envelope 20 other than the heat from the oven.
  • The present structure and process may be used for vapor deposition. As illustrated in FIG. 7, a [0029] substrate 70 may be placed in the envelope 20 with the material 10. It should be noted that some material 72 (for example, fused quartz gauze) was used in the envelope 20 to maintain the material 10 and substance 70 in place during assembly and handling. The envelope 20 is then vacuumed and sealed. The envelope 20 with the material 10 and the substrate 70 are then heated at a temperature substantially below the vaporization temperature of the material 10. Once the material 10 is totally vaporized, the oven is shut off, and the vapors are allowed to deposit upon the substrate. Although a single substance 10 is shown, the substance 10 may be two or more substances which, in a vapor state, form a combined compound as the coating.
  • For example, a [0030] substrate 70 may be coated with a compound formed from silicon and tellurium. For example, 21 grams of a metal substrate and 2 grams of the silicon/tellurium compound may be provided in the envelope 20. The envelope 20 with the material 10 and the substrate 70 are then heated at 999° C. for 5 hours and then cooled. The resulting product forms a coating of SiO2Tex, where x is in the range of ⅓ to {fraction (5/3)}. As described in the parent application, this single crystalline structure of silicon dioxide and tellurium is hydroxyl ion and hydrogen resistant. This is beneficial, as described therein, for making, doping and coating optical fibers. It is also found to substantially resist acid corrosion of metal since all acids include or will react in an environment to produce hydroxyl ions.
  • Although the present disclosure has been described and illustrated in detail, it is to be clearly understood that this is done by way of illustration and example only and is not to be taken by way of limitation. The scope of the present disclosure is to be limited only by the terms of the appended claims. [0031]

Claims (18)

What is claimed:
1. A method of melting a solid at temperature below the melting temperature of the solid at a preset pressure, the method comprising:
inserting the solid into a substantially spherical envelope;
sealing the envelope at the preset pressure; and
heating the solid in an oven at an oven temperature substantially below the melting temperature of the solid at the preset pressure and for a time sufficient to melt the solid.
2. A method of vaporizing a substance at temperature below the vaporizing temperature of the substance at a preset pressure, the method comprising:
inserting the substance into a substantially spherical envelope;
sealing the envelope at the preset pressure; and
heating the substance in an oven at an oven temperature below the vaporizing temperature of the substance at the preset pressure and for a time sufficient to vaporize the substance.
3. A method of vaporizing a substance at temperature below the vaporizing temperature of the substance at a preset pressure, the method comprising:
inserting the substance into an envelope shaped to create an electron vortex of electrons emitted from the substance;
sealing the envelope at the preset pressure; and
heating the substance in an oven at an oven temperature below the vaporizing temperature of the substance at the preset pressure and for a time sufficient to generate electron emissions from the substance and create the electron vortex which allows vaporization of the substance at an oven temperature below the vaporizing temperature of the substance at the preset pressure.
4. The method of claim 3, wherein the electron vortex creates a magnetic confinement field without external excitement.
5. The method of claim 3, wherein the electron vortex accelerates the emission of electrons in the substance which increases the heat of the substance above that of the oven temperature.
6. A method of vaporizing a substance at temperature below the vaporizing temperature of the substance at a preset pressure, the method comprising:
inserting the substance into an envelope shaped to create a plasma flow from electrons emitted from the substance;
sealing the envelope at the preset pressure; and
heating the substance in an oven at an oven temperature below the vaporizing temperature of the substance at the preset pressure and for a time sufficient to generate electron emissions from the substance and create the plasma flow which allows vaporization of the substance at an oven temperature below the vaporizing temperature of the substance at the preset pressure.
7. The method of claim 6, wherein the plasma flow creates a magnetic confinement field without external excitement.
8. The method of claim 6, wherein the plasma flow accelerates the emission of electrons in the substance which increases the heat of the substance above that of the oven temperature.
9. A method of coating a substrate with a substance at temperature below the vaporizing temperature of the substance at a preset pressure, the method comprising:
inserting the substance and the substrate into a substantially spherical envelope;
sealing the envelope at the preset pressure;
heating the substance in an oven at an oven temperature below the vaporizing temperature of the substance at the preset pressure and for a time sufficient to vaporize the substance; and
reducing the heat in the oven to deposit the vapors on the substrate.
10. The method according to claim 9, wherein the substrate is one of metal and ceramic.
11. The methods of claims 2, 3, 5 and 9, wherein the oven temperature is below the melting temperature of the substance at the preset pressure.
12. The methods of claims 2, 3, 5 and 9, wherein the oven temperature is between 30% and 40% of the vaporizing temperature of the substance at the preset pressure.
13. The methods of claims 1, 2, 3, 5 and 9, wherein the preset pressure is substantially a vacuum.
14. The methods of claims 1, 2, 3, 5 and 9, wherein the envelope is tear-shaped.
15. The methods of claims 1, 2, 3, 5 and 9, wherein the envelope is ovoid-shaped.
16. The methods of claims 1, 2, 3, 5 and 9, wherein the envelope is elliptically-shaped.
17. The methods of claims 1, 2 and 3, wherein the substance is inserted in a substantially spherical crucible, and the crucible is placed in the envelope.
18. The methods of claims 1, 2, 3 and 5, wherein the substance is inserted in a substantially spherical crucible, the crucible is placed in a substantially spherical enclosure and the enclosure is placed in the envelope.
US10/751,946 2002-07-08 2004-01-07 Melting and vaporizing apparatus and method Expired - Fee Related US7161110B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US10/751,946 US7161110B2 (en) 2002-07-08 2004-01-07 Melting and vaporizing apparatus and method
CN2004800399800A CN1902335B (en) 2004-01-07 2004-10-25 Melting and vaporizing apparatus and method
JP2006549240A JP2007517658A (en) 2004-01-07 2004-10-25 Melting and evaporation apparatus and method
PCT/US2004/035244 WO2005068680A2 (en) 2004-01-07 2004-10-25 Melting and vaporizing apparatus and method
EP04796263A EP1704265A2 (en) 2004-01-07 2004-10-25 Melting and vaporizing apparatus and method
US11/284,819 US7214903B2 (en) 2002-07-08 2005-11-23 Melting and vaporizing apparatus and method

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US39382902P 2002-07-08 2002-07-08
US10/480,042 US7067006B2 (en) 2002-07-08 2002-10-05 OH and H resistant silicon material
PCT/US2002/032003 WO2004005203A1 (en) 2002-07-08 2002-10-08 Oh and h resistant silicon material
US10/751,946 US7161110B2 (en) 2002-07-08 2004-01-07 Melting and vaporizing apparatus and method

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
US10/480,042 Continuation-In-Part US7067006B2 (en) 2002-07-08 2002-10-05 OH and H resistant silicon material
PCT/US2002/032003 Continuation-In-Part WO2004005203A1 (en) 2002-07-08 2002-10-08 Oh and h resistant silicon material
US10480042 Continuation-In-Part 2002-10-08

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/284,819 Continuation US7214903B2 (en) 2002-07-08 2005-11-23 Melting and vaporizing apparatus and method

Publications (3)

Publication Number Publication Date
US20040159647A1 true US20040159647A1 (en) 2004-08-19
US20060011603A2 US20060011603A2 (en) 2006-01-19
US7161110B2 US7161110B2 (en) 2007-01-09

Family

ID=34794689

Family Applications (2)

Application Number Title Priority Date Filing Date
US10/751,946 Expired - Fee Related US7161110B2 (en) 2002-07-08 2004-01-07 Melting and vaporizing apparatus and method
US11/284,819 Expired - Fee Related US7214903B2 (en) 2002-07-08 2005-11-23 Melting and vaporizing apparatus and method

Family Applications After (1)

Application Number Title Priority Date Filing Date
US11/284,819 Expired - Fee Related US7214903B2 (en) 2002-07-08 2005-11-23 Melting and vaporizing apparatus and method

Country Status (5)

Country Link
US (2) US7161110B2 (en)
EP (1) EP1704265A2 (en)
JP (1) JP2007517658A (en)
CN (1) CN1902335B (en)
WO (1) WO2005068680A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040165858A1 (en) * 2002-07-08 2004-08-26 Susana Curatolo Oh and h resistant silicon material

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8291857B2 (en) * 2008-07-03 2012-10-23 Applied Materials, Inc. Apparatuses and methods for atomic layer deposition
WO2011056569A1 (en) * 2009-10-28 2011-05-12 The Dow Chemical Investments Llc Device to dry catalyst roaster conveyor belt and method of using same
CN107029643B (en) * 2017-05-05 2020-07-07 乐山师范学院 Vacuum high-temperature ionization discharge reaction device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3243267A (en) * 1964-07-31 1966-03-29 Gen Electric Growth of single crystals
US3649192A (en) * 1968-03-22 1972-03-14 Philips Corp Method of manufacturing semiconductor compounds
US4265661A (en) * 1978-10-25 1981-05-05 Cambridge Analyzing Instruments Ltd. Direct synthesis of intermetallic compounds
US4738831A (en) * 1986-10-31 1988-04-19 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Method and apparatus for growing crystals
US4853078A (en) * 1986-04-23 1989-08-01 Sumitomo Electric Industries, Ltd. Process for growing a multi-component crystal
US4946543A (en) * 1986-06-02 1990-08-07 Kalisher Murray H Method and apparatus for growing films on a substrate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1591651A (en) 1978-04-14 1981-06-24 Craswell K B Vacuum deposition system
US7067006B2 (en) 2002-07-08 2006-06-27 Czt Inc. OH and H resistant silicon material

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3243267A (en) * 1964-07-31 1966-03-29 Gen Electric Growth of single crystals
US3649192A (en) * 1968-03-22 1972-03-14 Philips Corp Method of manufacturing semiconductor compounds
US4265661A (en) * 1978-10-25 1981-05-05 Cambridge Analyzing Instruments Ltd. Direct synthesis of intermetallic compounds
US4853078A (en) * 1986-04-23 1989-08-01 Sumitomo Electric Industries, Ltd. Process for growing a multi-component crystal
US4946543A (en) * 1986-06-02 1990-08-07 Kalisher Murray H Method and apparatus for growing films on a substrate
US4738831A (en) * 1986-10-31 1988-04-19 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Method and apparatus for growing crystals

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040165858A1 (en) * 2002-07-08 2004-08-26 Susana Curatolo Oh and h resistant silicon material
US7067006B2 (en) * 2002-07-08 2006-06-27 Czt Inc. OH and H resistant silicon material

Also Published As

Publication number Publication date
WO2005068680A3 (en) 2005-11-24
EP1704265A2 (en) 2006-09-27
CN1902335B (en) 2010-06-16
US20060076324A1 (en) 2006-04-13
CN1902335A (en) 2007-01-24
WO2005068680A2 (en) 2005-07-28
US7214903B2 (en) 2007-05-08
JP2007517658A (en) 2007-07-05
US7161110B2 (en) 2007-01-09
US20060011603A2 (en) 2006-01-19

Similar Documents

Publication Publication Date Title
US4451499A (en) Method for producing a beryllium oxide film
KR910002567B1 (en) Carrier gas cluster source for thermally conditioned clusters
US7214903B2 (en) Melting and vaporizing apparatus and method
US4759948A (en) Film formation through co-deposition with high and low energy beams
JP2017512639A (en) Controlled atomic source
US4394210A (en) Process for forming a lead film
JPH0456761A (en) Thin film forming device
WO2001008795A1 (en) Fine particle manufacturing method using laser beam
JPS63137159A (en) Formation of thin crystalline metallic film
JPH02247374A (en) Crucible for evaporation source and thin film formation using same
JPH10214787A (en) Molecular beam cell for si and molecular beam epitaxy system
JPS6260876A (en) Device for vapor-depositing thin film
JP3698680B2 (en) Deposition method
EP0305202A2 (en) Vacuum evaporation and deposition
JP4515158B2 (en) Electron beam gun and plasma equipment
JP2005211730A (en) Method for manufacturing nanoparticle and nanoparticle manufacturing apparatus
JPH01259162A (en) Equipment for producing thin film
JP2004011007A (en) Film deposition method
JPS63119220A (en) Manufacture of thin-film
US6733678B2 (en) Liquid substrate collector
CN113174572A (en) Improved carrier gas cluster source generation method and device
JP2003147515A (en) Method of depositing deposited film, and system of depositing deposited film
JPH01184272A (en) Vapor deposition equipment
JPH06122965A (en) Device for forming ion vapor-deposited film
JPS6360271A (en) Evaporating source device for aluminum

Legal Events

Date Code Title Description
AS Assignment

Owner name: CZT INC., KANSAS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CURATOLO, SUSANA;REEL/FRAME:014877/0890

Effective date: 20040107

FPAY Fee payment

Year of fee payment: 4

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20150109