US20040063212A1 - Conditioning chamber for metallurgical surface science - Google Patents
Conditioning chamber for metallurgical surface science Download PDFInfo
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- US20040063212A1 US20040063212A1 US10/259,747 US25974702A US2004063212A1 US 20040063212 A1 US20040063212 A1 US 20040063212A1 US 25974702 A US25974702 A US 25974702A US 2004063212 A1 US2004063212 A1 US 2004063212A1
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- sample
- conditioning chamber
- means comprises
- chamber device
- fracturing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
- G01N2001/2873—Cutting or cleaving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/20—Metals
Definitions
- This invention relates to conditioning chambers for preparation of metallurgical samples for examination and analysis.
- Metallurgical processing for surface science research typically involves the examination of a sample in a vacuum chamber of an examination instrument, generally in an ultra high vacuum (UHV) condition, which can be defined as a pressure which is below 10 Torr.
- UHV ultra high vacuum
- samples are prepared for such research in separate instruments, before an appropriate sample is introduced to a UHV examination chamber.
- Such preparation involves up to two stages, comprising (1) drying or (2) fracturing or both, each of which presents problems.
- metallurgical samples which are generally wet, can be dried for analysis by various known methods, which include drying in an inert gas environment in a suitable container.
- Another known method is drying in a forechamber which is available as an attachment to known examination instruments. This method, developed at the Ian Wark Institute in Sydney, Australia, is described in the text Minerals Engineering, 1991, Smart, R. St.C., vol. 4, pp. 891-909.
- the methods currently in use also raise problems.
- these methods involve a high energy impact, for example impact by the use of a hammer and chisel in a UHV chamber, after freezing of the sample to an extremely low temperature, generally below 75 K.
- this method is used for a brittle material, the entire sample can be destroyed.
- fracturing is performed in an inert gas in a location which is remote from the examination instrument, there is a serious risk of contamination during transfer to that instrument, the risk being increased by the more reactive nature of the surfaces which have been exposed by fracture. Further limiting factors at this stage include the shape and size of samples.
- a conditioning chamber can be provided which can be attached to, and directly connected with, a UHV examination chamber; and in which a sample can be prepared by drying and fracturing for subsequent transfer into the examination chamber, thereby avoiding the problems associated with the extended drying time which may be required, and with the risks presented by transfer from a remote drying location to the examination chamber.
- the invention seeks to provide a conditioning chamber which includes an improved environment for drying metallurgical samples for analysis in UHV instruments, and in which the surface preparation by fracturing can also be performed, thus minimizing the risks of contamination from exposure to air or other changed conditions during transfer.
- the invention further seeks to provide improved sample retaining and fracturing means which reduce the risk of destruction of or damage to samples during the fracturing process.
- the present invention provides a conditioning chamber device for metallurgical samples, adapted to be attached to an instrument having an examination chamber operable in an ultra high vacuum condition, and to be brought to an ultra high vacuum condition while attached to the instrument; and comprises
- an enclosed conditioning chamber which is attachable to a commercially available examination instrument having an ultra high vacuum instrument chamber.
- a metallurgical sample can be retained by a suitable means, while the conditioning chamber is gradually reduced to the desired vacuum condition, by the use of at least one vacuum pump.
- Preferably more than one type of pump is used, and more preferably the pumping is performed in sequence by a rotary vane pump, a turbomolecular pump and a triode ion pump.
- the retaining means is a gripper which is designed to retain a standard sample platen holder in the desired position throughout the conditioning process.
- a transporter rod is provided, which is securely attached, and preferably permanently affixed, to the gripper or other retaining means.
- the transporter rod is contained within a tube, attached to the outside of the housing of the conditioning chamber.
- a magnetic sleeve surrounding the tube along part of its length is magnetically coupled with the transporter rod, such that movement of the sleeve will direct the rod along the axial direction of the tube.
- Such movement of the rod thus effects the desired movement of the sample retaining means, and thus the sample on the platen, in particular for transporting the sample out of the conditioning chamber to the examination chamber of an examination instrument, as described below.
- the conditioning chamber After the conditioning chamber has been reduced to the desired vacuum condition, and the sample has been dried to the required state, it can be fractured by chisels, preferably a pair of chisels operating in opposed directions in relation to each other.
- the conditioning chamber device is attachable to a commercially available examination instrument having an ultra high vacuum examination chamber, the attachment being in such manner as to enable the device to operate without interference with the instrument itself or its operation, or with a forechamber or other attachments to the examination instrument.
- the device is provided with a connecting means through which, after completion of the conditioning process, and fracturing to provide a suitable surface for analysis, the prepared sample can be transferred into the examination chamber without loss of vacuum or any risk of contamination from contact with outside air. Once the sample is in the examination chamber of the instrument, it can be subjected to the desired analysis.
- FIG. 1 is a plan view of an embodiment of the invention
- FIG. 2 is a side elevation view of the embodiment shown in FIG. 1;
- FIG. 3 is an isometric view of the retaining, fracturing and transporting means of the embodiment shown in FIG. 1;
- FIG. 4 is an enlarged view of the retaining and fracturing means of the embodiment shown in FIG. 3.
- a conditioning chamber device 2 comprises a housing 4 , enclosing a chamber 6 which can be brought to an ultra high vacuum (UHV) condition, at or below 10 Torr.
- UHV ultra high vacuum
- a rotary vane pump 8 a turbomolecular pump 10 and a triode ion pump 12 are provided which are operable in sequence.
- the pumps 8 , 10 and 12 are connected to the chamber 6 by suitable known linkage components (not specifically identified).
- the first two pumps 8 and 10 are located so as to be connected to the chamber 6 by a first gate valve 22
- the third pump 12 is located so as to be connected to the chamber 6 at a second location, shown in FIG.
- a cylindrical tube 24 Attached to the housing 4 , at a suitable location selected to avoid interference with the connection of the pumps 8 , 10 and 12 , is a cylindrical tube 24 , supported at a free end 25 .
- a cylindrical magnetic sleeve 26 surrounds the tube 24 along part of its length, and is movable along the length of the tube 24 such that the magnetic force can move a transporter rod 28 , (shown in FIG. 3) which is magnetically coupled with the magnetic sleeve 26 , and contained within the tube 24 , the direction of movement being along the axial direction of the tube 24 .
- the chamber 6 at a location opposed to the connection of the tube 24 with the chamber 6 , is provided with connection means for attachment to an examination instrument 30 .
- the chamber 6 is provided with a second gate valve 32 , having suitable controls including vacuum gauge 34 . Adjacent to the second gate valve 32 , the conditioning chamber device 2 can be attached by suitable further connection means (not shown) to the examination instrument 30 , such that in an open position the interior of the chamber 6 can be directly connected to the examination chamber 31 of the examination instrument 30 .
- Horizontal linear motion feeders 36 are provided at each side of the housing 4 to effect horizontal movement within the chamber 6
- vertical linear motion feeder 37 (shown in FIG. 2) is provided below the housing 4 to effect vertical movement within the chamber 6 .
- a sealable access flange 38 is provided at the upper region of the housing 4 to enable the placement of a sample (not shown in FIGS. 1 and 2) within the chamber 6 .
- a sample 42 is supported by a sample platen 40 , the vertical position being regulated by vertical linear motion feeder 37 .
- the sample platen 40 is retained in a desired position by a retaining means, such as gripper 44 , which is securely or preferably permanently fixed to the transporter rod 28 , within tube 24 , and controlled by magnetic sleeve 26 .
- a sample 42 can be fixed to the sample platen 40 .
- chisels 48 Located on each side of the sample platen 40 , and regulated by horizontal linear motion feeders 36 , are chisels 48 , which can be brought into contact with the sample 42 .
- the sample 42 is introduced to the chamber through access flange 38 , and fixed by suitable known means to the sample platen 40 which is retained in position by the gripper 44 .
- the access flange 38 is secured and capped.
- the second gate valve 32 is in a closed position.
- the chamber 6 can thus be brought to the desired UHV condition by means of the three pumps 8 , 10 and 12 in sequence.
- the rotary vane pump 8 can be used to reduce the pressure to 10 Torr
- the turbomolecular pump 10 can be used to reduce the pressure further to 10 Torr.
- the triode ion pump 12 is used to reduce the pressure to the desired level below 10 Torr., which will correspond to the level at which the examination chamber 31 will have been prepared prior to movement of the sample 42 into the examination chamber 31 .
- the timing of the pressure reduction process can be selected as desired, according to the properties of the sample.
- the conditioning chamber device 2 is already attached to the examination instrument 30 , but the chamber 6 is not internally connected with the examination chamber 31 .
- the examination chamber 31 can thus be used for any other purposes during this time period, avoiding any unnecessary down-time for the examination chamber 31 during the sample conditioning process.
- the sample 42 can be fractured using the chisels 48 , which are preferably made of tempered steel.
- the chisels 48 are brought to the sample 42 , and a suitable surface can be prepared to allow for the desired analysis.
- the chamber 6 can be internally connected to the examination chamber 31 , by the opening of the second gate valve 32 .
- the examination chamber will have been prepared to the desired UHV condition.
- the magnetically coupled transporter rod 28 is moved in a direction along the axis of the tube 24 .
- the sample 42 on the sample platen 40 still retained by the gripper 44 , can be moved from the chamber 6 to the examination chamber 31 , for the desired analysis process.
- Each of the components of the conditioning chamber device 2 of the invention can be constructed of any suitable materials which are, or can be determined to be, compatible for operation within UHV conditions.
Abstract
The present invention provides a conditioning chamber device for metallurgical samples, adapted to be attached to an instrument having an examination chamber operable in an ultra high vacuum condition, and to be brought to an ultra high vacuum condition while attached to the instrument; and comprises (i) at least one vacuum pump means; (ii) a sample retaining means; (iii) at least one fracturing means adapted to prepare on a sample a surface suitable for metallurgical analysis; (iv) a drying means adapted for slow drying of a sample in an ultra high vacuum condition; and (v) a transporting means to transport the sample after surface preparation through a connecting means into the examination chamber.
Description
- This invention relates to conditioning chambers for preparation of metallurgical samples for examination and analysis.
- Metallurgical processing for surface science research typically involves the examination of a sample in a vacuum chamber of an examination instrument, generally in an ultra high vacuum (UHV) condition, which can be defined as a pressure which is below 10 Torr. Typically, samples are prepared for such research in separate instruments, before an appropriate sample is introduced to a UHV examination chamber.
- Such preparation involves up to two stages, comprising (1) drying or (2) fracturing or both, each of which presents problems.
- In the drying stage, metallurgical samples, which are generally wet, can be dried for analysis by various known methods, which include drying in an inert gas environment in a suitable container. Another known method is drying in a forechamber which is available as an attachment to known examination instruments. This method, developed at the Ian Wark Institute in Adelaide, Australia, is described in the text Minerals Engineering, 1991, Smart, R. St.C., vol. 4, pp. 891-909.
- There are problems arising from the use of either of these two principal known methods of drying samples for analysis. Firstly, where a sample is dried in an inert atmosphere not directly connected to the examination instrument, there are risks of adverse effects during transport to the instrument, including from air exposure. Secondly, where a sample is dried in a forechamber to the instrument, although the air exposure risk is reduced or removed, there is a risk of adverse effect on the UHV conditions of the examination chamber when the sample is moved into that chamber.
- Further, there is the problem that arises from the length of time required for preparation of such samples in the forechamber. Although a typical forechamber is designed to be pumped down to the desired vacuum condition in a relatively short period, of approximately twenty minutes, the process is of necessity substantially longer, often many hours, for proper preparation of metallurgical samples. While such samples are in the forechamber, the examination chamber cannot be accessed for other work, and valuable instrument time is thus lost.
- In the second stage, the fracturing of the sample to obtain a suitable surface for analysis, the methods currently in use also raise problems. Typically, these methods involve a high energy impact, for example impact by the use of a hammer and chisel in a UHV chamber, after freezing of the sample to an extremely low temperature, generally below 75 K. However, if this method is used for a brittle material, the entire sample can be destroyed. If instead fracturing is performed in an inert gas in a location which is remote from the examination instrument, there is a serious risk of contamination during transfer to that instrument, the risk being increased by the more reactive nature of the surfaces which have been exposed by fracture. Further limiting factors at this stage include the shape and size of samples.
- Typically also, a single chisel is used, which is generally effective in many situations. However, it has been found that for metallurgical samples, greater effectiveness and precision can be achieved, without high impact and without any manifest disadvantages, by the use of a pair of chisels, preferably in opposed directions in relation to each other.
- It has been found that a conditioning chamber can be provided which can be attached to, and directly connected with, a UHV examination chamber; and in which a sample can be prepared by drying and fracturing for subsequent transfer into the examination chamber, thereby avoiding the problems associated with the extended drying time which may be required, and with the risks presented by transfer from a remote drying location to the examination chamber.
- It has also been found that the use of vacuum pumps of more than one type can improve the attainment of the desired UHV condition. It has further been found that the use of appropriate retaining means within the chamber can enable the use of dual chisels for fracturing, with consequent improved quality and reduced risk of damage to the sample during fracturing. Further, it has been found that the retaining means for the sample within the conditioning chamber can be combined with suitable transporting means to move the prepared sample into the examination chamber of an instrument through a connecting means.
- The invention seeks to provide a conditioning chamber which includes an improved environment for drying metallurgical samples for analysis in UHV instruments, and in which the surface preparation by fracturing can also be performed, thus minimizing the risks of contamination from exposure to air or other changed conditions during transfer.
- The invention further seeks to provide improved sample retaining and fracturing means which reduce the risk of destruction of or damage to samples during the fracturing process.
- The present invention provides a conditioning chamber device for metallurgical samples, adapted to be attached to an instrument having an examination chamber operable in an ultra high vacuum condition, and to be brought to an ultra high vacuum condition while attached to the instrument; and comprises
- (i) at least one vacuum pump means;
- (ii) a sample retaining means;
- (iii) at least one fracturing means adapted to prepare on a sample a surface suitable for metallurgical analysis;
- (iv) a drying means adapted for slow drying of a sample in an ultra high vacuum condition; and
- (v) a transporting means to transport the sample after surface preparation through a connecting means into the examination chamber.
- In the conditioning chamber device of the invention, an enclosed conditioning chamber is provided which is attachable to a commercially available examination instrument having an ultra high vacuum instrument chamber. Within the conditioning chamber, a metallurgical sample can be retained by a suitable means, while the conditioning chamber is gradually reduced to the desired vacuum condition, by the use of at least one vacuum pump. Preferably more than one type of pump is used, and more preferably the pumping is performed in sequence by a rotary vane pump, a turbomolecular pump and a triode ion pump.
- Preferably, the retaining means is a gripper which is designed to retain a standard sample platen holder in the desired position throughout the conditioning process. To facilitate movement of the sample after the conditioning process is complete, a transporter rod is provided, which is securely attached, and preferably permanently affixed, to the gripper or other retaining means. The transporter rod is contained within a tube, attached to the outside of the housing of the conditioning chamber. A magnetic sleeve surrounding the tube along part of its length is magnetically coupled with the transporter rod, such that movement of the sleeve will direct the rod along the axial direction of the tube. Such movement of the rod thus effects the desired movement of the sample retaining means, and thus the sample on the platen, in particular for transporting the sample out of the conditioning chamber to the examination chamber of an examination instrument, as described below.
- After the conditioning chamber has been reduced to the desired vacuum condition, and the sample has been dried to the required state, it can be fractured by chisels, preferably a pair of chisels operating in opposed directions in relation to each other.
- The conditioning chamber device is attachable to a commercially available examination instrument having an ultra high vacuum examination chamber, the attachment being in such manner as to enable the device to operate without interference with the instrument itself or its operation, or with a forechamber or other attachments to the examination instrument. The device is provided with a connecting means through which, after completion of the conditioning process, and fracturing to provide a suitable surface for analysis, the prepared sample can be transferred into the examination chamber without loss of vacuum or any risk of contamination from contact with outside air. Once the sample is in the examination chamber of the instrument, it can be subjected to the desired analysis.
- The invention will now be described by way of reference to the drawings, in which
- FIG. 1 is a plan view of an embodiment of the invention;
- FIG. 2 is a side elevation view of the embodiment shown in FIG. 1;
- FIG. 3 is an isometric view of the retaining, fracturing and transporting means of the embodiment shown in FIG. 1; and
- FIG. 4 is an enlarged view of the retaining and fracturing means of the embodiment shown in FIG. 3.
- Referring to FIG. 1, a
conditioning chamber device 2 comprises ahousing 4, enclosing a chamber 6 which can be brought to an ultra high vacuum (UHV) condition, at or below 10 Torr. To achieve this condition, arotary vane pump 8, aturbomolecular pump 10 and atriode ion pump 12 are provided which are operable in sequence. Thepumps pumps first gate valve 22, and thethird pump 12 is located so as to be connected to the chamber 6 at a second location, shown in FIG. 1 as adjacent to an up-to-air valve 18, and on the opposite side of the chamber 6 from the connection of the first twopumps pumps gas connection lines 20 for venting the chamber 6 are provided. - Attached to the
housing 4, at a suitable location selected to avoid interference with the connection of thepumps cylindrical tube 24, supported at afree end 25. A cylindricalmagnetic sleeve 26 surrounds thetube 24 along part of its length, and is movable along the length of thetube 24 such that the magnetic force can move atransporter rod 28, (shown in FIG. 3) which is magnetically coupled with themagnetic sleeve 26, and contained within thetube 24, the direction of movement being along the axial direction of thetube 24. - The chamber6, at a location opposed to the connection of the
tube 24 with the chamber 6, is provided with connection means for attachment to anexamination instrument 30. The chamber 6 is provided with asecond gate valve 32, having suitable controls includingvacuum gauge 34. Adjacent to thesecond gate valve 32, theconditioning chamber device 2 can be attached by suitable further connection means (not shown) to theexamination instrument 30, such that in an open position the interior of the chamber 6 can be directly connected to theexamination chamber 31 of theexamination instrument 30. - Horizontal
linear motion feeders 36 are provided at each side of thehousing 4 to effect horizontal movement within the chamber 6, and vertical linear motion feeder 37 (shown in FIG. 2) is provided below thehousing 4 to effect vertical movement within the chamber 6. - Referring to FIGS. 1 and 2, a
sealable access flange 38 is provided at the upper region of thehousing 4 to enable the placement of a sample (not shown in FIGS. 1 and 2) within the chamber 6. - Referring to FIGS. 3 and 4, a
sample 42 is supported by asample platen 40, the vertical position being regulated by verticallinear motion feeder 37. Thesample platen 40 is retained in a desired position by a retaining means, such asgripper 44, which is securely or preferably permanently fixed to thetransporter rod 28, withintube 24, and controlled bymagnetic sleeve 26. Asample 42 can be fixed to thesample platen 40. Located on each side of thesample platen 40, and regulated by horizontallinear motion feeders 36, arechisels 48, which can be brought into contact with thesample 42. - In the operation of the
conditioning chamber device 2, thesample 42 is introduced to the chamber throughaccess flange 38, and fixed by suitable known means to thesample platen 40 which is retained in position by thegripper 44. As soon as thesample 42 is secured in the desired position, theaccess flange 38 is secured and capped. At this point, thesecond gate valve 32 is in a closed position. The chamber 6 can thus be brought to the desired UHV condition by means of the threepumps rotary vane pump 8 can be used to reduce the pressure to 10 Torr, and theturbomolecular pump 10 can be used to reduce the pressure further to 10 Torr. To complete the process, thetriode ion pump 12 is used to reduce the pressure to the desired level below 10 Torr., which will correspond to the level at which theexamination chamber 31 will have been prepared prior to movement of thesample 42 into theexamination chamber 31. - The timing of the pressure reduction process can be selected as desired, according to the properties of the sample. At this stage, the
conditioning chamber device 2 is already attached to theexamination instrument 30, but the chamber 6 is not internally connected with theexamination chamber 31. Theexamination chamber 31 can thus be used for any other purposes during this time period, avoiding any unnecessary down-time for theexamination chamber 31 during the sample conditioning process. - As can be more clearly seen in FIG. 4, when fracturing is required, the
sample 42 can be fractured using thechisels 48, which are preferably made of tempered steel. Using external controls (not shown) operating on the respective elements indicated in FIG. 4, thechisels 48 are brought to thesample 42, and a suitable surface can be prepared to allow for the desired analysis. - When the fracturing of the
sample 42 is complete, the chamber 6 can be internally connected to theexamination chamber 31, by the opening of thesecond gate valve 32. The examination chamber will have been prepared to the desired UHV condition. By movement of themagnetic sleeve 26 along thetube 24, the magnetically coupledtransporter rod 28 is moved in a direction along the axis of thetube 24. Thus, thesample 42 on thesample platen 40, still retained by thegripper 44, can be moved from the chamber 6 to theexamination chamber 31, for the desired analysis process. - It can thus readily be seen that throughout the conditioning and fracturing process, there is no movement of the
sample 42 itself which could result in damage, and no exposure to the risk of contamination during a transport process from a remote location to theexamination chamber 31. - Each of the components of the
conditioning chamber device 2 of the invention can be constructed of any suitable materials which are, or can be determined to be, compatible for operation within UHV conditions.
Claims (18)
1. A conditioning chamber device for metallurgical samples, adapted to be attachable to an instrument having an examination chamber operable in an ultra high vacuum condition, and to be brought to an ultra high vacuum condition while attached to the instrument; and comprises
(i) at least one vacuum pump means;
(ii) a sample retaining means;
(iii) at least one fracturing means adapted to prepare on a sample a surface suitable for metallurgical analysis;
(iv) a drying means adapted for slow drying of a sample in an ultra high vacuum condition; and
(v) a transporting means to transport the sample after surface preparation through a connecting means into the examination chamber.
2. A conditioning chamber device as claimed in claim 1 wherein the sample retaining means and fracturing means are each adapted to accommodate samples of different sizes within a preselected range and to accommodate samples having irregular configurations.
3. A conditioning chamber device as claimed in claim 1 , further comprising means to accommodate samples which are in a slurry condition.
4. A conditioning chamber device as claimed in claim 1 wherein the vacuum pump means comprises a rotary vane pump, a turbomolecular pump and a triode ion pump.
5. A conditioning chamber device as claimed in claim 1 wherein the sample retaining means comprises at least one gripping means adapted to retain a sample supporting means in at least one preselected position.
6. A conditioning chamber device as claimed in claim 5 wherein the sample supporting means comprises a pedestal adapted to support a sample platen.
7. A conditioning chamber device as claimed in claim 1 wherein the fracturing means comprises a pair of chisels operable from substantially opposed directions in relation to each other.
8. A conditioning chamber device as claimed in claim 7 wherein each of the chisels has a cutting edge of tempered steel.
9. A conditioning chamber device as claimed in claim 1 or claim 6 wherein the transporting means comprises a transporter rod attached to the sample retaining means, wherein movement of the transporter rod is regulated by an external control means.
10. A conditioning chamber device as claimed in claim 9 wherein the sample retaining means comprises a gripping means permanently attached to the transporter rod.
11. A conditioning chamber device as claimed in claim 9 or claim 10 wherein the external control means comprises magnetic coupling.
12. A method of conditioning a metallurgical sample for surface analysis by the steps of
(i) securing the sample by a sample retaining means within a conditioning chamber capable of being reduced to an ultra high vacuum condition, and attachable to an instrument having an examination chamber operable in an ultra high vacuum condition;
(ii) reducing the conditioning chamber to an ultra high vacuum condition by a vacuum pump means;
(iii) drying the sample;
(iv) fracturing the sample by a fracturing means to prepare a surface suitable for metallurgical analysis; and
(v) subsequently transporting the sample by a transportation means from the conditioning chamber into the examination chamber.
13. A method as claimed in claim 12 , wherein the sample retaining means comprises at least one gripping means adapted to retain a sample supporting means in at least one preselected position.
14. A method as claimed in claim 12 , wherein the vacuum pump means comprises a rotary vane pump, a turbomolecular pump and a triode ion pump.
15. A method as claimed in claim 12 , wherein the fracturing means comprises a pair of chisels operable from substantially opposed directions in relation to each other.
16. A method as claimed in claim 12 , wherein the transporting means comprises a transporter rod attached to the sample retaining means, wherein movement of the transporter rod is regulated by an external control means.
17. A method as claimed in claim 16 , wherein the sample retaining means comprises a gripping means permanently attached to the transporter rod.
18. A method as claimed in claim 16 or claim 17 , wherein the external control means comprises magnetic coupling.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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US10/259,747 US20040063212A1 (en) | 2002-09-30 | 2002-09-30 | Conditioning chamber for metallurgical surface science |
CA002437404A CA2437404C (en) | 2002-09-30 | 2003-08-14 | Conditioning chamber for metallurgical surface science |
US11/115,274 US7461565B2 (en) | 2002-09-30 | 2005-04-27 | Conditioning chamber for metallurgical surface science |
US11/979,461 US8001853B2 (en) | 2002-09-30 | 2007-11-02 | Conditioning chamber for metallurgical surface science |
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US10/259,747 US20040063212A1 (en) | 2002-09-30 | 2002-09-30 | Conditioning chamber for metallurgical surface science |
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US11/115,274 Expired - Fee Related US7461565B2 (en) | 2002-09-30 | 2005-04-27 | Conditioning chamber for metallurgical surface science |
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Cited By (1)
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CN112678500A (en) * | 2020-12-17 | 2021-04-20 | 西南交通大学 | Sample transmission device applied between vacuum or atmosphere environment cavities |
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US7644637B2 (en) * | 2006-09-25 | 2010-01-12 | Omniprobe, Inc. | Method and apparatus for transfer of samples in a controlled environment |
CN102809661B (en) * | 2011-05-30 | 2013-11-06 | 中国科学院电子学研究所 | Sample feeding apparatus for ultra-high vacuum test |
CN107490704B (en) * | 2017-09-06 | 2019-06-18 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
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US5200136A (en) * | 1990-02-02 | 1993-04-06 | Voest-Alpine Industrieanlagenbau G.M.B.H | Arrangement for installing and removing a lance into and from a metallurgical vessel |
US5518595A (en) * | 1990-09-28 | 1996-05-21 | Shimadzu Corporation | Focused ion beam etching apparatus |
US5954489A (en) * | 1996-08-14 | 1999-09-21 | Mitsubishi Denki Kabushiki Kaisha | Vane type vacuum pump having a pin drive coupling |
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US5518593A (en) | 1994-04-29 | 1996-05-21 | Applied Komatsu Technology, Inc. | Shield configuration for vacuum chamber |
-
2002
- 2002-09-30 US US10/259,747 patent/US20040063212A1/en not_active Abandoned
-
2003
- 2003-08-14 CA CA002437404A patent/CA2437404C/en not_active Expired - Fee Related
-
2005
- 2005-04-27 US US11/115,274 patent/US7461565B2/en not_active Expired - Fee Related
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US3720829A (en) * | 1972-02-28 | 1973-03-13 | Physical Electronics Ind Inc | Sample fracturing apparatus |
US4904141A (en) * | 1987-10-28 | 1990-02-27 | Mdc Vacuum Products Corporation | Manipulating device for high vacuum chamber |
US5033720A (en) * | 1988-06-28 | 1991-07-23 | China Steel Corporation | Apparatus for determining metal properties |
US5200136A (en) * | 1990-02-02 | 1993-04-06 | Voest-Alpine Industrieanlagenbau G.M.B.H | Arrangement for installing and removing a lance into and from a metallurgical vessel |
US5518595A (en) * | 1990-09-28 | 1996-05-21 | Shimadzu Corporation | Focused ion beam etching apparatus |
US5139383A (en) * | 1991-07-23 | 1992-08-18 | Huntington Mechanical Laboratories, Inc. | Device for positioning objects within a sealed chamber |
US5954489A (en) * | 1996-08-14 | 1999-09-21 | Mitsubishi Denki Kabushiki Kaisha | Vane type vacuum pump having a pin drive coupling |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112678500A (en) * | 2020-12-17 | 2021-04-20 | 西南交通大学 | Sample transmission device applied between vacuum or atmosphere environment cavities |
Also Published As
Publication number | Publication date |
---|---|
US20050193837A1 (en) | 2005-09-08 |
US7461565B2 (en) | 2008-12-09 |
CA2437404A1 (en) | 2004-03-30 |
CA2437404C (en) | 2009-12-29 |
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