US20040061220A1 - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof Download PDF

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Publication number
US20040061220A1
US20040061220A1 US10/374,997 US37499703A US2004061220A1 US 20040061220 A1 US20040061220 A1 US 20040061220A1 US 37499703 A US37499703 A US 37499703A US 2004061220 A1 US2004061220 A1 US 2004061220A1
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United States
Prior art keywords
semiconductor chip
semiconductor
plurality
embodiment
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/374,997
Inventor
Chuichi Miyazaki
Yukiharu Akiyama
Masnori Shibamoto
Tomoaki Kudaishi
Ichiro Anjoh
Kunihiko Nishi
Asao Nishimura
Hideki Tanaka
Ryosuke Kimoto
Kunihiro Tsubosaki
Akio Hasebe
Takehiro Ohnishi
Noriou Shimada
Shuji Eguchi
Hiroshi Koyama
Akira Nagai
Masahiko Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Akita Electronics Systems Co Ltd
Hitachi ULSI Systems Co Ltd
Original Assignee
Hitachi Ltd
Akita Electronics Systems Co Ltd
Hitachi ULSI Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
Priority to JP8-66637 priority Critical
Priority to JP8066637A priority patent/JP2891665B2/en
Priority to US82293397A priority
Priority to JP9-185621 priority
Priority to JP18562197 priority
Priority to JP9230906A priority patent/JP2843315B1/en
Priority to JP9-230906 priority
Priority to US09/113,500 priority patent/US6307269B1/en
Priority to US09/449,834 priority patent/US6342726B2/en
Priority to US09/768,288 priority patent/US20010008304A1/en
Priority to US09/771,985 priority patent/US20010007781A1/en
Priority to US09/983,286 priority patent/US6639323B2/en
Application filed by Hitachi Ltd, Akita Electronics Systems Co Ltd, Hitachi ULSI Systems Co Ltd filed Critical Hitachi Ltd
Priority to US10/374,997 priority patent/US20040061220A1/en
Assigned to HITACHI ULSI SYSTEMS CO., LTD., HITACHI, LTD., AKITA ELECTRONICS SYSTEMS CO., LTD. reassignment HITACHI ULSI SYSTEMS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TSUBOSAKI, KUNIHIRO, EGUCHI, SHUJI, NAGAI, AKIRA, OGINO, MASAHIKO, SHIMADA, NORIOU, ANJOH, ICHIRO, NISHI, KUNIHIKO, SHIBAMOTO, MASANORI, KUDAISHI, TOMOAKI, MIYAZAKI, CHUICHI, AKIYAMA, YUKIHARU, HASEBE, AKIO, TANAKA, HIDEKI, KIMOTO, RYOSUKE, KOYAMA, HIROSHI, OHNISHI, TAKEHIRO, NISHIMURA, ASAO
Publication of US20040061220A1 publication Critical patent/US20040061220A1/en
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32034555&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=US20040061220(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application status is Abandoned legal-status Critical

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