US20020167049A1 - Field-effect transistor and manufacture thereof - Google Patents

Field-effect transistor and manufacture thereof Download PDF

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Publication number
US20020167049A1
US20020167049A1 US10/185,574 US18557402A US2002167049A1 US 20020167049 A1 US20020167049 A1 US 20020167049A1 US 18557402 A US18557402 A US 18557402A US 2002167049 A1 US2002167049 A1 US 2002167049A1
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Prior art keywords
gate
insulating layer
support substrate
effect transistor
field
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Abandoned
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US10/185,574
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Tatsuro Maeda
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National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
    • H01L29/78648—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate arranged on opposing sides of the channel

Definitions

  • the present invention relates to a method for forming an embedded gate to realize a high-performance transistor, and particularly to a double-gate field-effect transistor that is obtained by forming fine gates, and a method for manufacturing the same.
  • the present invention was devised with intent to solve the above-mentioned problem, and the object of the present invention is to provide a double-gate field-effect transistor with aligned upper and lower gates, and an industrial method for manufacturing the same.
  • a first invention as included by the present invention has a transistor structure comprising: a first gate embedded in an insulator on a support substrate and being in contact with an insulating layer on the insulator; a source and a drain formed in a semiconductor layer on the insulating layer; and a second gate formed in an embedded insulating layer that is formed on the semiconductor layer, and is characterized in that the first gate and the second gate are opposite to each other through the intermediaries therebetween consisting of the insulating layer, the semiconductor layer, and the embedded insulating layer.
  • a second invention as included by the present invention is characterized in that wiring of four electrodes that are to be connected to the source, the drain, the first gate, and the second gate, respectively, is formed in the first invention.
  • a third invention as included by the present invention is characterized in that an adjustment hole that reaches as deep as the support substrate is provided in a depressed manner to position the first gate and the second gate to each other in the first invention.
  • a fourth invention as included by the present invention is characterized by comprising the steps of: forming a semiconductor layer on a first support substrate through the intermediary of an embedded insulating layer; forming an adjustment hole that penetrates the embedded insulating layer and the semiconductor layer in a depressed manner on the first support substrate; providing further an insulating layer on the semiconductor layer and forming a first gate at a predetermined position set apart from the adjustment hole on the insulating layer; forming the insulator on the insulating layer and further gluing a second support substrate onto the insulator; removing the first support substrate and forming a second gate at a predetermined position set apart from the adjustment hole on the embedded insulating layer; and providing a source and a drain on the embedded insulating layer side and forming wiring of electrodes that connects to the source, the drain, the first gate, and the second gate, respectively.
  • FIG. 1 is a structural drawing showing an example of an SOI substrate
  • FIG. 2 is a structural drawing showing an example of a procedure for isolating regions in the method for manufacturing a field-effect transistor according to the present invention
  • FIG. 3 is a structural drawing showing an example of a first support substrate on which an adjustment mark is formed in the method for manufacturing the field-effect transistor according to the present invention
  • FIG. 4 is a structural drawing showing one example of a procedure for making a lower gate in the method for manufacturing the field-effect transistor according to the present invention
  • FIG. 5 is a structural drawing showing how a lamination agent is formed in the method for manufacturing the field-effect transistor according to the present invention
  • FIG. 6 is a structural drawing showing a situation where a second support substrate is glued to the first support substrate in the method for manufacturing the field-effect transistor according to the present invention
  • FIG. 7 is a structural drawing showing a situation where the first support substrate is removed in the method for manufacturing the field-effect transistor according to the present invention.
  • FIG. 8 is a structural drawing showing one example of a procedure for making an upper gate in the method for manufacturing the field-effect transistor according to the present invention.
  • FIG. 9 is a structural drawing showing one example of a procedure for making electrodes in the method for manufacturing the field-effect transistor according to the present invention.
  • FIGS. 1 to 9 A form of implementing a field-effect transistor according to the present invention is described referring to the drawings based on one embodiment.
  • the method for manufacturing a double-gate field-effect transistor with aligned upper and lower gates according to the present invention will be explained step by step in FIGS. 1 to 9 .
  • FIG. 1 shows one example of an SOI (SILICON ON INSULATOR) substrate.
  • SOI SOICON ON INSULATOR
  • the SOI substrate is such that an embedded insulating layer 11 is formed on the first support substrate 10 and further a semiconductor layer 12 (for example, a thin silicon film) is formed thereon.
  • FIG. 2 shows one example of a procedure of region isolation.
  • a part of both of the embedded insulating layer 11 and the semiconductor layer 12 on the first support substrate 10 is removed using a lithography technique and an etching technique and an insulating layer 21 is formed on this region.
  • a region of the insulating layer 21 is named as an adjustment mark region B and an adjustment mark is formed in this region.
  • a device region A and the adjustment mark region B are formed on the support substrate.
  • FIG. 3 shows one example of the first support substrate on which the adjustment mark was formed.
  • An adjustment mark C is formed by digging a groove in the adjustment mark region B by etching. The depth of the groove goes down to reach the first support substrate 10 and this depth is such a depth that enables to recognize the adjustment mark C from the back side when the first support substrate 10 is removed in a subsequent process.
  • FIG. 4 shows one example of a procedure for making a lower gate.
  • a gate layer is formed on an insulating film 40 on the semiconductor layer 12 in the device region A.
  • the gate layer is processed by etching to form a lower gate 41 which is a first gate so as to fulfill a specified physical relationship to the adjustment mark C.
  • FIG. 5 shows a situation where a lamination agent is formed.
  • lamination agents (insulators) 50 a to 50 d for gluing the second support substrate to this structure on the first support substrate are formed. Therefore, the lower gate 41 is embedded in the lamination agent (insulator) 50 a.
  • FIG. 6 shows a situation where the second support substrate is glued to the first support substrate.
  • the first support substrate 10 and the structure constructed thereon in which the lower gate 41 was formed are reversed upside down and glued to a second support substrate 60 that was prepared separately.
  • FIG. 7 shows a situation where the first support substrate is removed.
  • the first support substrate 10 is removed by etching, using the embedded insulating layer 11 as a removal stop layer.
  • the lamination agent insulator) 50 c that was formed inside the adjustment mark C is exposed.
  • FIG. 8 shows one example of a procedure for making an upper gate.
  • the embedded insulating layer 11 is selectively removed by etching, and subsequently a gate layer is formed.
  • the gate layer is processed by etching and an upper gate 81 which is the second gate is formed.
  • the formation of the upper gate 81 is fabricated by etching the gate layer while a position of the upper gate 81 is aligned to the lower gate 41 through the use of the adjustment mark C that was exposed. Through these steps, the upper gate 81 (the second gate) and the lower gate 41 (the first gate) can be aligned to each other.
  • FIG. 9 shows one example of a procedure for making electrodes.
  • Interlayer insulating films 90 a to 90 c are formed at the side of the removed first support substrate 10 and subsequently a source electrode 91 and a drain electrode 92 are formed.
  • an upper gate electrode 93 connecting to the upper gate 81 and a lower gate electrode connecting to the lower gate 41 are formed.
  • the lower gate electrode connecting to the lower gate 41 is not shown in the figure.
  • the lower gate electrode is connected to the lower gate 41 by digging a hole for contact through the interlayer insulating film in a region other than the device region A, either in a region located in the backward region or in a region located in the frontward region.
  • the double-gate field-effect transistor with aligned upper and lower gates having four electrodes wherein the source electrode 91 , the drain electrode 92 , the upper gate electrode 93 , and the lower gate electrode are positioned on the side of the first support substrate 10 that has been removed.
  • the double-gate field-effect transistor formed by the above-described manufacturing method includes the second support substrate, the lower gate embedded in the insulator formed on the second support substrate, the insulating layer formed on the lower gate, the semiconductor layer formed on the insulating layer, a source and a drain formed in the semiconductor layer, the insulating layer formed on the semiconductor layer, the upper gate formed on the insulating layer, as well as the source electrode, the drain electrode, the upper gate electrode, and the lower gate electrode.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)

Abstract

A source and a drain of a field-effect transistor are formed so as to fulfill a specified physical relationship to upper and lower gates thereof and thereby parasitic capacitance that hampers its high-speed operation is minimized. The filed-effect transistor includes a second support substrate, a lower gate that is embedded in an insulator formed on the second support substrate, an insulating layer formed on the lower gate, a semiconductor layer formed on the insulating layer, an insulating layer formed on the semiconductor layer, an upper gate formed on the insulating layer, as well as a source electrode, a drain electrode, an upper gate electrode, and a lower gate electrode all of which are isolated from one another by the insulating layer.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is divisional of U.S. patent application Ser. No. 09/750,441, filed Dec. 28, 2000, which claims priority to Japanese Patent Application No. 2000-020045, filed Jan. 28, 2000, the content of which are incorporated hereinto by reference.[0001]
    • BACKGROUND OF THE INVENTION
  • 1. The Field of the Invention [0002]
  • The present invention relates to a method for forming an embedded gate to realize a high-performance transistor, and particularly to a double-gate field-effect transistor that is obtained by forming fine gates, and a method for manufacturing the same. [0003]
  • 2. The Relevant Technology [0004]
  • In connection with a progress of transistors toward miniaturization, a short channel effect that the threshold voltage of the transistor varies due to variation in the gate length of the transistor becomes significant. To prevent the short channel effect and increase driving capability of the transistor, it is known that the use of the double gate structure in the transistor (refer to Japanese Patent Application Laid-open No. 62-1270 (1987)) is the most suitable method. [0005]
  • However, up to the present, there has not been known an industrial method for manufacturing the double gate structure practically. Especially, a method for manufacturing the double gate in such a way that a source and a drain are formed so as to fulfill a specified physical relationship to the upper and lower gates for minimizing parasitic capacitance that hampers a high-speed operation thereof is not yet in sight in every way. [0006]
    • BRIEF SUMMARY OF THE INVENTION
  • The present invention was devised with intent to solve the above-mentioned problem, and the object of the present invention is to provide a double-gate field-effect transistor with aligned upper and lower gates, and an industrial method for manufacturing the same. [0007]
  • The present invention is devised to achieve such objects as mentioned above, and a first invention as included by the present invention has a transistor structure comprising: a first gate embedded in an insulator on a support substrate and being in contact with an insulating layer on the insulator; a source and a drain formed in a semiconductor layer on the insulating layer; and a second gate formed in an embedded insulating layer that is formed on the semiconductor layer, and is characterized in that the first gate and the second gate are opposite to each other through the intermediaries therebetween consisting of the insulating layer, the semiconductor layer, and the embedded insulating layer. [0008]
  • Furthermore, a second invention as included by the present invention is characterized in that wiring of four electrodes that are to be connected to the source, the drain, the first gate, and the second gate, respectively, is formed in the first invention. [0009]
  • Moreover, a third invention as included by the present invention is characterized in that an adjustment hole that reaches as deep as the support substrate is provided in a depressed manner to position the first gate and the second gate to each other in the first invention. [0010]
  • Furthermore, a fourth invention as included by the present invention is characterized by comprising the steps of: forming a semiconductor layer on a first support substrate through the intermediary of an embedded insulating layer; forming an adjustment hole that penetrates the embedded insulating layer and the semiconductor layer in a depressed manner on the first support substrate; providing further an insulating layer on the semiconductor layer and forming a first gate at a predetermined position set apart from the adjustment hole on the insulating layer; forming the insulator on the insulating layer and further gluing a second support substrate onto the insulator; removing the first support substrate and forming a second gate at a predetermined position set apart from the adjustment hole on the embedded insulating layer; and providing a source and a drain on the embedded insulating layer side and forming wiring of electrodes that connects to the source, the drain, the first gate, and the second gate, respectively. [0011]
  • According to the present invention that specifies such configuration as this, a method for manufacturing easily a double-gate filed-effect transistor with aligned upper and lower gates of a fine structure capable of high-speed operation can be provided. [0012]
  • The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments thereof taken in conjunction with the accompanying drawings. [0013]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a structural drawing showing an example of an SOI substrate; [0014]
  • FIG. 2 is a structural drawing showing an example of a procedure for isolating regions in the method for manufacturing a field-effect transistor according to the present invention; [0015]
  • FIG. 3 is a structural drawing showing an example of a first support substrate on which an adjustment mark is formed in the method for manufacturing the field-effect transistor according to the present invention; [0016]
  • FIG. 4 is a structural drawing showing one example of a procedure for making a lower gate in the method for manufacturing the field-effect transistor according to the present invention; [0017]
  • FIG. 5 is a structural drawing showing how a lamination agent is formed in the method for manufacturing the field-effect transistor according to the present invention; [0018]
  • FIG. 6 is a structural drawing showing a situation where a second support substrate is glued to the first support substrate in the method for manufacturing the field-effect transistor according to the present invention; [0019]
  • FIG. 7 is a structural drawing showing a situation where the first support substrate is removed in the method for manufacturing the field-effect transistor according to the present invention; [0020]
  • FIG. 8 is a structural drawing showing one example of a procedure for making an upper gate in the method for manufacturing the field-effect transistor according to the present invention; and [0021]
  • FIG. 9 is a structural drawing showing one example of a procedure for making electrodes in the method for manufacturing the field-effect transistor according to the present invention. [0022]
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • A form of implementing a field-effect transistor according to the present invention is described referring to the drawings based on one embodiment. The method for manufacturing a double-gate field-effect transistor with aligned upper and lower gates according to the present invention will be explained step by step in FIGS. [0023] 1 to 9.
  • First, explained is one example of a manufacturing process of a first support substrate in the method for manufacturing a field-effect transistor according to the present invention. FIG. 1 shows one example of an SOI (SILICON ON INSULATOR) substrate. The SOI substrate is such that an embedded [0024] insulating layer 11 is formed on the first support substrate 10 and further a semiconductor layer 12 (for example, a thin silicon film) is formed thereon.
  • FIG. 2 shows one example of a procedure of region isolation. A part of both of the embedded [0025] insulating layer 11 and the semiconductor layer 12 on the first support substrate 10 is removed using a lithography technique and an etching technique and an insulating layer 21 is formed on this region. A region of the insulating layer 21 is named as an adjustment mark region B and an adjustment mark is formed in this region. Thus, a device region A and the adjustment mark region B are formed on the support substrate.
  • FIG. 3 shows one example of the first support substrate on which the adjustment mark was formed. An adjustment mark C is formed by digging a groove in the adjustment mark region B by etching. The depth of the groove goes down to reach the [0026] first support substrate 10 and this depth is such a depth that enables to recognize the adjustment mark C from the back side when the first support substrate 10 is removed in a subsequent process.
  • Next, explained is one example of a process of gluing the first support substrate and the second support substrate together in the method for manufacturing the field-effect transistor according to the present invention. FIG. 4 shows one example of a procedure for making a lower gate. A gate layer is formed on an [0027] insulating film 40 on the semiconductor layer 12 in the device region A. Next, the gate layer is processed by etching to form a lower gate 41 which is a first gate so as to fulfill a specified physical relationship to the adjustment mark C.
  • FIG. 5 shows a situation where a lamination agent is formed. After the formation of the [0028] lower gate 41, lamination agents (insulators) 50 a to 50 d for gluing the second support substrate to this structure on the first support substrate are formed. Therefore, the lower gate 41 is embedded in the lamination agent (insulator) 50 a.
  • FIG. 6 shows a situation where the second support substrate is glued to the first support substrate. The [0029] first support substrate 10 and the structure constructed thereon in which the lower gate 41 was formed are reversed upside down and glued to a second support substrate 60 that was prepared separately.
  • Next, explained is one example of the manufacturing process of the second support substrate in the method for manufacturing the field-effect transistor according to the present invention. FIG. 7 shows a situation where the first support substrate is removed. The [0030] first support substrate 10 is removed by etching, using the embedded insulating layer 11 as a removal stop layer. On this occasion, the lamination agent insulator) 50 c that was formed inside the adjustment mark C is exposed.
  • FIG. 8 shows one example of a procedure for making an upper gate. The embedded [0031] insulating layer 11 is selectively removed by etching, and subsequently a gate layer is formed. The gate layer is processed by etching and an upper gate 81 which is the second gate is formed. The formation of the upper gate 81 is fabricated by etching the gate layer while a position of the upper gate 81 is aligned to the lower gate 41 through the use of the adjustment mark C that was exposed. Through these steps, the upper gate 81 (the second gate) and the lower gate 41 (the first gate) can be aligned to each other.
  • FIG. 9 shows one example of a procedure for making electrodes. [0032] Interlayer insulating films 90 a to 90 c are formed at the side of the removed first support substrate 10 and subsequently a source electrode 91 and a drain electrode 92 are formed. Moreover, an upper gate electrode 93 connecting to the upper gate 81 and a lower gate electrode connecting to the lower gate 41 are formed. Incidentally, the lower gate electrode connecting to the lower gate 41 is not shown in the figure. The lower gate electrode is connected to the lower gate 41 by digging a hole for contact through the interlayer insulating film in a region other than the device region A, either in a region located in the backward region or in a region located in the frontward region. In this way, there can be obtained the double-gate field-effect transistor with aligned upper and lower gates having four electrodes wherein the source electrode 91, the drain electrode 92, the upper gate electrode 93, and the lower gate electrode are positioned on the side of the first support substrate 10 that has been removed.
  • The double-gate field-effect transistor formed by the above-described manufacturing method includes the second support substrate, the lower gate embedded in the insulator formed on the second support substrate, the insulating layer formed on the lower gate, the semiconductor layer formed on the insulating layer, a source and a drain formed in the semiconductor layer, the insulating layer formed on the semiconductor layer, the upper gate formed on the insulating layer, as well as the source electrode, the drain electrode, the upper gate electrode, and the lower gate electrode. [0033]
  • The present invention has been described in detail with respect to preferred embodiments, and it will now be apparent from the foregoing to those skilled in the art that changes and modifications may be made without departing from the invention in its broader aspect, and it is the intention, therefore, in the apparent claims to cover all such changes and modifications as fall within the true spirit of the invention. [0034]

Claims (3)

What is claimed is:
1. A double-gate field-effect transistor having a structure that comprises:
a first gate that is embedded in an insulator on a support substrate and contacts with an insulating layer on said insulator;
a source and a drain formed on a semiconductor layer on said insulating layer; and
a second gate that is formed on an embedded insulating layer formed on said semiconductor layer,
wherein said first gate and said second gate are opposite to each other through the intermediaries of said insulating layer, said semiconductor layer, and said embedded insulating layer.
2. A double-gate field-effect transistor according to claim 1, wherein wiring of four electrodes that are each connected to said source, said drain, said first gate, and said second gate is formed.
3. A double-gate field-effect transistor according to claim 1, wherein an adjustment hole that reaches as deep as said support substrate is provided in a depressed manner in order to position said first gate and said second gate to each other.
US10/185,574 2000-01-28 2002-06-27 Field-effect transistor and manufacture thereof Abandoned US20020167049A1 (en)

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JP2000020045A JP3425603B2 (en) 2000-01-28 2000-01-28 Method for manufacturing field effect transistor
US09/750,441 US6423578B2 (en) 2000-01-28 2000-12-28 Field-effect transistor and manufacture thereof
US10/185,574 US20020167049A1 (en) 2000-01-28 2002-06-27 Field-effect transistor and manufacture thereof

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JP3665275B2 (en) * 2001-05-28 2005-06-29 沖電気工業株式会社 Method for forming alignment mark
KR100470832B1 (en) * 2002-08-12 2005-03-10 한국전자통신연구원 Schottky barrier tunnel transistor using thin silicon layer on insulator and method for fabricating the same
JP2004103612A (en) * 2002-09-04 2004-04-02 Toshiba Corp Semiconductor device and its manufacturing method
US7078773B2 (en) * 2002-12-23 2006-07-18 International Business Machines Corporation Nitride-encapsulated FET (NNCFET)
TWI244211B (en) * 2003-03-14 2005-11-21 Innolux Display Corp Thin film transistor and method of manufacturing the same and display apparatus using the transistor
TWI248646B (en) * 2004-03-17 2006-02-01 Imec Inter Uni Micro Electr Method to make markers for double gate SOI processing
US7364974B2 (en) * 2005-03-18 2008-04-29 Translucent Inc. Double gate FET and fabrication process
JP2007094511A (en) * 2005-09-27 2007-04-12 Nec Electronics Corp Apparatus and method for lsi design support

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US2986481A (en) * 1958-08-04 1961-05-30 Hughes Aircraft Co Method of making semiconductor devices
US3510733A (en) * 1966-05-13 1970-05-05 Gen Electric Semiconductive crystals of silicon carbide with improved chromium-containing electrical contacts
US3623219A (en) * 1969-10-22 1971-11-30 Rca Corp Method for isolating semiconductor devices from a wafer of semiconducting material
DE3688516T2 (en) 1985-03-25 1993-10-07 Nippon Electric Co Manufacturing process for a heterojunction bipolar transistor.
EP0553775B1 (en) * 1992-01-28 1998-04-08 Canon Kabushiki Kaisha Method of manufacturing a semiconductor device
US6107213A (en) * 1996-02-01 2000-08-22 Sony Corporation Method for making thin film semiconductor

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