US20020055253A1 - Method for producing a micromechanical structure and a micromechanical structure - Google Patents

Method for producing a micromechanical structure and a micromechanical structure Download PDF

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US20020055253A1
US20020055253A1 US09/992,939 US99293901A US2002055253A1 US 20020055253 A1 US20020055253 A1 US 20020055253A1 US 99293901 A US99293901 A US 99293901A US 2002055253 A1 US2002055253 A1 US 2002055253A1
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layer
silicon
structure
metal
movable
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US6436821B1 (en
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Joachim Rudhard
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0228Inertial sensors
    • B81B2201/0235Accelerometers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/11Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts

Abstract

A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.

Description

    BACKGROUND INFORMATION
  • Methods for producing a micromechanical structure or micromechanical structures are already known, in which a movable silicon structure and a stationary silicon structure are provided which are movable relative to one another. [0001]
  • SUMMARY OF THE INVENTION
  • The method according to the present invention for producing a micromechanical structure, and the micromechanical structure of the present invention have the advantage that superficial, conductive metal-silicide layers are provided. Electrostatic surface charges on the micromechanical structures can be prevented by these conductive metal-silicide layers. Adhesion of the micromechanical structures to one another is thereby also reduced. [0002]
  • The metals indicated are especially suitable for forming metal-silicide layers. Both polycrystalline and monocrystalline silicon is suitable as material for the structures. The method can be used particularly easily in connection with producing silicon structures on sacrificial layers, particularly on a support.[0003]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 shows a first method step for producing a micromechanical structure. [0004]
  • FIG. 2 shows a second method step for producing a micromechanical structure. [0005]
  • FIG. 3 shows a third method step for producing a micromechanical structure. [0006]
  • FIG. 4 shows a fourth method step for producing a micromechanical structure. [0007]
  • FIG. 5 shows a fifth method step for producing a micromechanical structure. [0008]
  • FIG. 6 shows a sixth method step for producing a micromechanical structure. [0009]
  • FIG. 7 shows a top view of a micromechanical structure.[0010]
  • DETAILED DESCRIPTION
  • FIG. 1 shows a cross-section through a silicon layer [0011] 1 that is arranged by way of a sacrificial layer 2 on a support 3. The layer thicknesses shown here are not true to scale. Typically, silicon layer 1 is between 2 and approximately 30 μm thick. Layer thicknesses on the order of magnitude of a few micrometers are usually used for sacrificial layer 2. For support 3, usually boards (plates) having a thickness of more than 500 μm are used, since only in this way is a sufficient mechanical stability of the entire construction provided.
  • Silicon layer [0012] 1 can be made both of polycrystalline silicon and of monocrystalline silicon. For sacrificial layer 2, any material is suitable which can be etched selectively with respect to the silicon of layer 1. A typical material for a sacrificial layer 2 is, for example, silicon oxide or phosphorus silicate glass. Support 3 should, above all, ensure a stable mechanical construction. Customary materials for support 3 are, for example, silicon, silicon oxide or ceramic materials.
  • A preferred construction is made of a silicon wafer for support [0013] 3, a sacrificial layer of silicon oxide and a polycrystalline silicon layer 1.
  • Applied on the top side of silicon layer [0014] 1 is a masking 4 which, in FIG. 1, is already patterned. Patterned masking 4 is used to introduce a structure into silicon layer 4 in an etching step. Metals, silicon oxide, silicon nitride, photo-resist or a multilayer build-up of these materials are suitable as materials for masking 4. In the following etching step, an etch attack of silicon layer 1 takes place only where it is not covered by masking 4.
  • FIG. 2 shows the result of such an etching step used on the layer construction according to FIG. 1. By etching in using an anisotropic etching process, which in particular forms vertical etching flanks, trenches [0015] 5 have been introduced into silicon layer 1. Trenches 5 subdivide silicon layer 1 into individual structures 6.
  • Anistropic plasma etching methods based on fluorine-containing gas mixtures are particularly suitable for structuring silicon layer [0016] 1. Such methods are capable of producing vertical etching flanks for trenches 5.
  • In a further processing step, a metal layer [0017] 7 is now deposited. This is shown in cross-section in FIG. 3. As FIG. 3 shows, metal layer 7 is deposited in such a way that a more or less uniform deposition results on the entire surface of structures 6 and in trenches 5. In this context, metals are used for metal layer 7 which, by way of a thermal treatment, are able to form a metal silicide with the silicon of silicon layer 1. For example, the metals titanium, zirconium, hafnium, vanadium, chromium, niobium, tantalum, molybdenum, tungsten, cobalt, nickel, palladium and platinum are suitable. These metals are able to form metal silicides which exhibit good electrical conductivity. For example, a particularly suitable material is platinum.
  • Metal layer [0018] 7 must be deposited in such a way that as good a covering as possible results both on the edges and on the vertical side walls of structures 6. In this context, a suitable thickness of metal layer 7 can lie between a few nanometers to several 100 nanometers. Suitable deposition methods are, for example, physical methods such as sputtering or vapor deposition of metal layers. Furthermore, metal layer 7 can also be implemented by chemical methods such as the CVD (chemical vapor deposition) method.
  • In a next process step, a metal silicide is now formed. This is shown in FIG. 4. The metal silicide is formed by a thermal treatment, in that the layer construction according to FIG. 3 is exposed to a temperature between, for example, 400° C. and 800° C. Naturally, the selection of the temperature also depends upon the metal used for metal layer [0019] 7. For platinum, a temperature between 400° C. and 800° C. is sufficient. This thermal process can be carried out for a few minutes or a few hours depending upon the temperature and the material for the metal. As can be seen in FIG. 4, a superficial metal-silicide layer 8 forms where the metal of metal layer 7 is in direct contact with the silicon of structures 6. In this context, a part of superficial metal layer 7 is used up, or, if metal layer 7 is very thin, this metal layer is completely converted into metal silicide. Since the top side of silicon structures 6 is still covered with masking layer 4, no metal-silicide layer forms in this region. Since in the lower region of trenches 5, metal layer 7 lies on sacrificial layer 2, no metal silicide forms there either.
  • As a next processing step, metal layer [0020] 7 is now etched selectively with respect to metal-silicide layer 8. The chemical properties of metals and metal silicides differ markedly. It is therefore possible, by suitable chemicals, to dissolve metal layer 7 in an etching medium, while the metal-silicide layer is not dissolved by the etching medium. For example, when using platinum for metal layer 7, this platinum layer can be etched by hot aqua regia (nitrohydrochloric acid), while at the same time, the corresponding metal silicide (platinum silicide) is not attacked by this etching medium. By dipping the layer construction according to FIG. 4 into hot aqua regia, metal layer 7 can thus be selectively removed, and metal-silicide layers 8 remain on the surface of silicon structures 6. The result of this etching process is shown in cross-section in FIG. 5. As can be seen there, silicon structures 6 now have vertical side walls which are provided with a metal-silicide layer 8. Masking layers 4, which likewise were not attacked by the etching medium, are still arranged on the top side. For example, in the case of platinum, silicon oxide is a correspondingly suitable masking material for masking 4. It can also be seen in FIG. 5 that no metal layer 7 whatsoever has remained on the structure.
  • FIG. 6 shows the result of a further processing step, the etching of sacrificial layer [0021] 2; the etching is carried out in such a way that only middle silicon structure 6 is undercut, that is to say, sacrificial layer 2 is completely removed underneath this structure. However, sacrificial layer 2 remains in both silicon structures 6 situated to the right and to the left. Thus, a central, movable silicon structure 10 is produced which is arranged between two stationary silicon structures 11. Silicon structures 10 and 11 have vertical side walls whose surfaces are provided with a metal-silicide layer 8.
  • FIG. 7 shows, by way of example, a top view of a micromechanical element which has such a movable silicon structure [0022] 10 between two stationary silicon structures 11. Also shown schematically is a line of intersection VI-VI which corresponds roughly to FIG. 6. FIG. 6 corresponds only approximately to line of intersection VI-VI, since in FIG. 6, stationary structures 11 to the right and to the left are not shown completely, but are only shown cut off. The reason for this is that the extension of stationary structures 11 to the right and to the left in FIG. 6 would have to be shown considerably larger, which can no longer be reasonably depicted graphically.
  • FIG. 7 shows here a top view of a micromechanical element, in which a movable structure [0023] 10 is arranged between two stationary structures 11. As can be seen, movable structure 10 is joined to a bearing block 12. Stationary structures 11 and bearing block 12 are joined to an underlying support 3 by remnants of a sacrificial layer 2 (which cannot be seen in the top view of FIG. 7). However, movable structure 10 is not joined to underlying support 3. Because of its geometrical dimension, here especially as a long, thin tongue, movable structure 10 is so designed that it is movable relative to substrate 3, and thus also relative to stationary structures 11, by a force influence. Such structures are usable, for instance, as acceleration sensors.
  • In the case of such micromechanical structures having movable elements and stationary elements, the use of the material silicon is not completely without its problems, since the material silicon is a semi-conductive material. When working with such semi-conductive materials, superficial electrostatic charges cannot be completely ruled out. Such electrostatic surface charges generate forces between the micromechanical structures, particularly when the distances between the structures are small. Because of the poor conductivity of silicon, such electrostatic surface charges can only poorly equalize. Furthermore, when working with micromechanical structures, adhesion of the structures to one another again is always observed. By using a superficial metal-silicide layer, the conductivity of the silicon structures is reduced at least in the area on the surface. The surface charges can be reduced more easily, since they can now move easily both on the surface and into the depth of the silicon. Surface charges are thus reduced by this measure. In addition, this measure has proven to be capable of reducing adhesion of the micromechanical structures to one another. [0024]

Claims (7)

What is claimed is:
1. A method for producing a micromechanical structure, comprising:
introducing trenches into a silicon layer for forming at least one movable structure and at least one stationary structure from the silicon layer, the movable structure being movable relative to the stationary structure;
after introducing the trenches, depositing a metal layer on side walls of the trenches;
after depositing the metal layer, carrying out a thermal treatment by which metal of the metal layer forms a metal silicide with silicon of the silicon layer; and
subsequently carrying out an etching process which removes the metal of the metal layer and does not remove the metal silicide.
2. The method according to claim 1, wherein the metal layer is composed of one of titanium, zirconium, hafnium, vanadium, chromium, niobium, tantalum, molybdenum, tungsten, cobalt, nickel, palladium and platinum.
3. The method according to claim 1, wherein the silicon layer is composed of one of polycrystalline silicon and monocrystalline silicon.
4. The method according to claim 1, wherein the silicon layer is arranged on a sacrificial layer.
5. The method according to claim 4, wherein the sacrificial layer is arranged on a support, the support being composed of one of silicon and glass.
6. The method according to claim 1, wherein the thermal treatment is carried out at a temperature between 400° and 800° C.
7. A micromechanical structure comprising:
at least one stationary structure; and
a movable structure movable relative to the stationary structure,
wherein the movable structure and the stationary structure are composed substantially of silicon, and
wherein at least one of the movable structure and the stationary structure has a superficial metal-silicide layer.
US09/992,939 2000-11-09 2001-11-05 Method for producing a micromechanical structure and a micromechanical structure Expired - Fee Related US6436821B1 (en)

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Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050078348A1 (en) * 2003-09-30 2005-04-14 Wen-Jian Lin Structure of a micro electro mechanical system and the manufacturing method thereof
WO2006036385A1 (en) * 2004-09-27 2006-04-06 Idc, Llc Mems device fabricated on a pre-patterned substrate
US20070269748A1 (en) * 2003-04-15 2007-11-22 Idc, Llc. Method for manufacturing an array of interferometric modulators
US20080025849A1 (en) * 2006-07-31 2008-01-31 Hitachi, Ltd. High-Pressure Fuel Pump Control Apparatus for an Internal Combustion Engine
US20080284021A1 (en) * 2007-05-17 2008-11-20 International Business Machines Corporation Method for FEOL and BEOL Wiring
US20080310008A1 (en) * 2007-06-14 2008-12-18 Qualcomm Incorporated Method of patterning mechanical layer for mems structures
US20080314866A1 (en) * 2004-09-27 2008-12-25 Idc, Llc. Mirror and mirror layer for optical modulator and method
US20080318344A1 (en) * 2007-06-22 2008-12-25 Qualcomm Incorporated INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
US20090022884A1 (en) * 2004-07-29 2009-01-22 Idc,Llc System and method for micro-electromechanical operation of an interferometric modulator
US7561321B2 (en) 2006-06-01 2009-07-14 Qualcomm Mems Technologies, Inc. Process and structure for fabrication of MEMS device having isolated edge posts
US20090323168A1 (en) * 2002-09-20 2009-12-31 Idc, Llc Electromechanical devices and methods of fabricating same
US7660031B2 (en) 2004-09-27 2010-02-09 Qualcomm Mems Technologies, Inc. Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7706044B2 (en) 2003-05-26 2010-04-27 Qualcomm Mems Technologies, Inc. Optical interference display cell and method of making the same
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US20100149627A1 (en) * 2005-07-22 2010-06-17 Qualcomm Mems Technologies, Inc. Support structure for mems device and methods therefor
US20100165442A1 (en) * 2006-03-02 2010-07-01 Qualcomm Mems Technologies, Inc. Mems devices with multi-component sacrificial layers
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US20100200938A1 (en) * 2005-08-19 2010-08-12 Qualcomm Mems Technologies, Inc. Methods for forming layers within a mems device using liftoff processes
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US20100243603A1 (en) * 2007-11-16 2010-09-30 Nivarox-Far S.A. Silicon-metal composite micromechanical component and method of manufacturing the same
US20100245977A1 (en) * 2009-03-27 2010-09-30 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US20110051224A1 (en) * 2008-06-05 2011-03-03 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in mems devices
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
CN102491253A (en) * 2011-11-29 2012-06-13 北京大学 Processing method of different-height silicon structures
CN102583225A (en) * 2012-03-09 2012-07-18 上海先进半导体制造股份有限公司 Fabricating method for one-dimensional large-scale multistage-step structure
WO2013020080A1 (en) * 2011-08-04 2013-02-07 Robert Bosch Gmbh Coated capacitive sensor
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
GB2521990A (en) * 2013-03-22 2015-07-15 Schrader Electronics Ltd A microelectromechanical switch and related fabrication method

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6809033B1 (en) * 2001-11-07 2004-10-26 Fasl, Llc Innovative method of hard mask removal
EP1837721A1 (en) * 2006-03-24 2007-09-26 ETA SA Manufacture Horlogère Suisse Micro-mechanical piece made from insulating material and method of manufacture therefor
TWI438588B (en) * 2006-03-24 2014-05-21 Eta Sa Mft Horlogere Suisse Micro-mechanical part made of insulating material and method of manufacturing the same
EP1837722B1 (en) * 2006-03-24 2016-02-24 ETA SA Manufacture Horlogère Suisse Micro-mechanical component in an insulating material and method of manufacture thereof
CN100595921C (en) 2006-07-25 2010-03-24 电子科技大学 High-temperature resisting one-chip integrated micro-sensor structure and system integrating method
FR2925887B1 (en) * 2007-12-27 2010-06-11 Commissariat Energie Atomique MICROMECHANICAL or nanomechanical device layer of anti-adhesive interface
US9174835B2 (en) 2010-12-27 2015-11-03 Stmicroelectronics, Inc. Microstructure and electronic device
US8470628B2 (en) * 2011-06-20 2013-06-25 International Business Machines Corporation Methods to fabricate silicide micromechanical device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5417801A (en) * 1993-06-29 1995-05-23 Xerox Corporation Process to manufacture bushings for micromechanical elements
US5837562A (en) * 1995-07-07 1998-11-17 The Charles Stark Draper Laboratory, Inc. Process for bonding a shell to a substrate for packaging a semiconductor
US6139759A (en) * 1997-07-08 2000-10-31 International Business Machines Corporation Method of manufacturing silicided silicon microtips for scanning probe microscopy
US5914521A (en) * 1997-07-30 1999-06-22 Motorola, Inc. Sensor devices having a movable structure
US5917226A (en) * 1997-10-24 1999-06-29 Stmicroelectronics, Inc. Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods
US6173612B1 (en) * 1998-11-05 2001-01-16 Alliedsignal Inc. Stable metallization for electronic and electromechanical devices
JP2001102597A (en) * 1999-09-30 2001-04-13 Fuji Electric Co Ltd Semiconductor structure and method for fabrication thereof

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US8278726B2 (en) 2002-09-20 2012-10-02 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US8368124B2 (en) 2002-09-20 2013-02-05 Qualcomm Mems Technologies, Inc. Electromechanical devices having etch barrier layers
US20090323168A1 (en) * 2002-09-20 2009-12-31 Idc, Llc Electromechanical devices and methods of fabricating same
US7723015B2 (en) 2003-04-15 2010-05-25 Qualcomm Mems Technologies, Inc. Method for manufacturing an array of interferometeric modulators
US7556917B2 (en) 2003-04-15 2009-07-07 Idc, Llc Method for manufacturing an array of interferometric modulators
US20070269748A1 (en) * 2003-04-15 2007-11-22 Idc, Llc. Method for manufacturing an array of interferometric modulators
US7706044B2 (en) 2003-05-26 2010-04-27 Qualcomm Mems Technologies, Inc. Optical interference display cell and method of making the same
US20050078348A1 (en) * 2003-09-30 2005-04-14 Wen-Jian Lin Structure of a micro electro mechanical system and the manufacturing method thereof
US8115988B2 (en) 2004-07-29 2012-02-14 Qualcomm Mems Technologies, Inc. System and method for micro-electromechanical operation of an interferometric modulator
US20090022884A1 (en) * 2004-07-29 2009-01-22 Idc,Llc System and method for micro-electromechanical operation of an interferometric modulator
US7587104B2 (en) 2004-09-27 2009-09-08 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US8285089B2 (en) 2004-09-27 2012-10-09 Qualcomm Mems Technologies, Inc. MEMS device fabricated on a pre-patterned substrate
US8126297B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. MEMS device fabricated on a pre-patterned substrate
US7660031B2 (en) 2004-09-27 2010-02-09 Qualcomm Mems Technologies, Inc. Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7664345B2 (en) 2004-09-27 2010-02-16 Qualcomm Mems Technologies, Inc. MEMS device fabricated on a pre-patterned substrate
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US20080192329A1 (en) * 2004-09-27 2008-08-14 Idc, Llc Mems device fabricated on a pre-patterned substrate
US8226836B2 (en) 2004-09-27 2012-07-24 Qualcomm Mems Technologies, Inc. Mirror and mirror layer for optical modulator and method
US20080314866A1 (en) * 2004-09-27 2008-12-25 Idc, Llc. Mirror and mirror layer for optical modulator and method
US20100129025A1 (en) * 2004-09-27 2010-05-27 Qualcomm Mems Technologies, Inc. Mems device fabricated on a pre-patterned substrate
WO2006036385A1 (en) * 2004-09-27 2006-04-06 Idc, Llc Mems device fabricated on a pre-patterned substrate
US8149497B2 (en) 2005-07-22 2012-04-03 Qualcomm Mems Technologies, Inc. Support structure for MEMS device and methods therefor
US8218229B2 (en) 2005-07-22 2012-07-10 Qualcomm Mems Technologies, Inc. Support structure for MEMS device and methods therefor
US20100149627A1 (en) * 2005-07-22 2010-06-17 Qualcomm Mems Technologies, Inc. Support structure for mems device and methods therefor
US7835093B2 (en) 2005-08-19 2010-11-16 Qualcomm Mems Technologies, Inc. Methods for forming layers within a MEMS device using liftoff processes
US8298847B2 (en) 2005-08-19 2012-10-30 Qualcomm Mems Technologies, Inc. MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
US20100200938A1 (en) * 2005-08-19 2010-08-12 Qualcomm Mems Technologies, Inc. Methods for forming layers within a mems device using liftoff processes
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US8394656B2 (en) 2005-12-29 2013-03-12 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US20100165442A1 (en) * 2006-03-02 2010-07-01 Qualcomm Mems Technologies, Inc. Mems devices with multi-component sacrificial layers
US7952789B2 (en) 2006-03-02 2011-05-31 Qualcomm Mems Technologies, Inc. MEMS devices with multi-component sacrificial layers
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7561321B2 (en) 2006-06-01 2009-07-14 Qualcomm Mems Technologies, Inc. Process and structure for fabrication of MEMS device having isolated edge posts
US20080025849A1 (en) * 2006-07-31 2008-01-31 Hitachi, Ltd. High-Pressure Fuel Pump Control Apparatus for an Internal Combustion Engine
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US8164815B2 (en) 2007-03-21 2012-04-24 Qualcomm Mems Technologies, Inc. MEMS cavity-coating layers and methods
US8830557B2 (en) 2007-05-11 2014-09-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same
US8284475B2 (en) 2007-05-11 2012-10-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7790611B2 (en) * 2007-05-17 2010-09-07 International Business Machines Corporation Method for FEOL and BEOL wiring
US20080284021A1 (en) * 2007-05-17 2008-11-20 International Business Machines Corporation Method for FEOL and BEOL Wiring
US20080310008A1 (en) * 2007-06-14 2008-12-18 Qualcomm Incorporated Method of patterning mechanical layer for mems structures
US20080318344A1 (en) * 2007-06-22 2008-12-25 Qualcomm Incorporated INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US8486279B2 (en) * 2007-11-16 2013-07-16 Nivarox-Far S.A. Silicon-metal composite micromechanical component and method of manufacturing the same
US20100243603A1 (en) * 2007-11-16 2010-09-30 Nivarox-Far S.A. Silicon-metal composite micromechanical component and method of manufacturing the same
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US20110051224A1 (en) * 2008-06-05 2011-03-03 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in mems devices
US8358458B2 (en) 2008-06-05 2013-01-22 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US20100245977A1 (en) * 2009-03-27 2010-09-30 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
WO2013020080A1 (en) * 2011-08-04 2013-02-07 Robert Bosch Gmbh Coated capacitive sensor
CN103813974A (en) * 2011-08-04 2014-05-21 罗伯特·博世有限公司 Coated capacitive sensor
CN102491253A (en) * 2011-11-29 2012-06-13 北京大学 Processing method of different-height silicon structures
CN102583225A (en) * 2012-03-09 2012-07-18 上海先进半导体制造股份有限公司 Fabricating method for one-dimensional large-scale multistage-step structure
GB2521990A (en) * 2013-03-22 2015-07-15 Schrader Electronics Ltd A microelectromechanical switch and related fabrication method

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