US20010004125A1 - Ultra-thin piezoelectric resonator - Google Patents

Ultra-thin piezoelectric resonator Download PDF

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Publication number
US20010004125A1
US20010004125A1 US09/734,681 US73468100A US2001004125A1 US 20010004125 A1 US20010004125 A1 US 20010004125A1 US 73468100 A US73468100 A US 73468100A US 2001004125 A1 US2001004125 A1 US 2001004125A1
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US
United States
Prior art keywords
frame
plate
top
bottom
resonator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US09/734,681
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US6426537B2 (en
Inventor
Kurt Schulthess
Thomas Luthi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA Manufacture Horlogere Suisse SA
Original Assignee
ETA Manufacture Horlogere Suisse SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CH233799 priority Critical
Priority to CH2337/99 priority
Application filed by ETA Manufacture Horlogere Suisse SA filed Critical ETA Manufacture Horlogere Suisse SA
Assigned to ETA SA FABRIQUES D'EBAUCHES reassignment ETA SA FABRIQUES D'EBAUCHES ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LUTHI, THOMAS, SCHULTHESS, KURT
Publication of US20010004125A1 publication Critical patent/US20010004125A1/en
Application granted granted Critical
Publication of US6426537B2 publication Critical patent/US6426537B2/en
Application status is Active legal-status Critical
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/33Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0595Holders; Supports the holder support and resonator being formed in one body
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12042LASER

Abstract

Encapsulated piezoelectric resonator including on the one hand a central plate (5) made of a piezoelectric material cut to form a frame (6) and a central resonant element (9) connected to said frame (6), the top and bottom faces having a metal coating, on the other hand bottom (11) and top (16) covers, each being formed by a spacing frame (12, 17) made of metal or a metal alloy and a closing plate (14, 19), characterized in that at least one of the elements (12, 14, 17, 19) forming the covers (11, 16) is electrically connected to the frame (6) of the central plate (5) and has an extension (10, 13, 18, 20) bent into a Z shape to bring its distal portion (10 a, 13 a, 18 a, 20 a) in line with a covering plate (14, 19) and to form electrical and mechanical connection means situated in a same plane.

Description

  • The present invention concerns an ultra-thin piezoelectric resonator, and more particularly, a resonator of very small dimensions intended to be secured flat onto the substrate of a printed circuit. [0001]
  • By reducing the dimensions, the thickness of the piezoelectric element can be as small as several tenths of a millimeter and must thus be protected from any external attack or contamination by being hermetically encapsulated in an enclosure, which may be placed in a protective atmosphere or a vacuum. [0002]
  • It is clear that this enclosure must nonetheless include external electric connection means for the excitation electrodes arranged on either side of the piezoelectric element, these connection means usually also forming means for securing the resonator to the substrate. [0003]
  • Since enclosures formed by glass bulbs provided with through connection pins, the metal capsules provided with ceramic pearls for the connection pins or assemblies of the metal-ceramic type have long since been abandoned, the most recent construction principle to which the present invention refers corresponds for example to the device described in U.S. Pat. No. 4,451,754. This device includes a rectangular plate of piezoelectric material cut out to form a frame-support to which is attached the resonant element situated at the centre, the two faces being metallised to form both the excitation electrodes and, for the frame, means for securing two symmetrical covers formed to leave a space free above the resonant element. [0004]
  • When they are made in a single part, the covers are stamped and each have a connection lug extending parallel to the piezoelectric plate, on either side of it. When they are made in two parts, each cover is formed of a metal frame and a rectangular closing plate, the connection lugs then being able to be formed with the same arrangements as before by extensions of the metal frame. [0005]
  • When the resonator which has just been briefly described, is arranged flat on a substrate, it can be seen that the connection lugs are in parallel planes which are different from the plane of said substrate, which has the drawback of preventing mounting the resonator on the substrate solely by means of these connection lugs. It is well known that a non negligible part of the vibrator power is transmitted to the substrate, which may over the long term have a detrimental effect on the quality and longevity of the resonator if it is not designed with efficient and preferably simple mounting onto the substrate. [0006]
  • The object of the present invention is to overcome the drawbacks of the aforecited prior art by providing an ultra-thin resonator whose electric connection means are in a same plane and are also used as means for mounting it on a printed circuit substrate. [0007]
  • The invention therefore concerns an encapsulated piezoelectric resonator including on the one hand a central plate made of a piezoelectric material cut to form a frame and a central resonant element connected to said frame, the top and bottom faces having a metal coating, on the other hand bottom and top covers, each being formed by a spacing frame made of metal or a metal alloy and a closing plate, characterised in that at least one of the elements forming the covers is electrically connected to the frame of the central plate and has an extension bent into a Z shape to bring its distal portion in line with a covering plate and to form electrical and mechanical connection means situated in a same plane. [0008]
  • The preferred embodiment is that in which all the portions constituting the covers are metal, the covering plate of the top cover then being the only one to have an extension bent into a Z shape. According to a variant, the bottom plate can also have a planar extension beyond the central plate, and thus allows the securing of the connecting lugs onto a printed circuit to be made easier for example by means of a laser beam. [0009]
  • According to another embodiment, the Z-shaped bent extensions are formed from at least one spacing frame. In the event that each spacing frame is provided with a Z extension, which will evidently be at different places on the periphery of the frame, the top and bottom covering plates could then be formed of an insulating material, such as a thin glass plate. [0010]
  • When the external parts of the covers are made of metal and have to be insulated, it is of course possible to apply an insulating varnish in accordance with known techniques. [0011]
  • Other features and advantages of the invention will appear more clearly upon reading the detailed description of the examples which follow, with reference to the annexed drawings, in which: [0012]
  • FIG. 1 is the perspective diagram of a resonator according to the invention, assembled and blown up; and [0013]
  • FIGS. [0014] 2 to 6 are side views of different embodiments.
  • FIG. 1 shows in perspective an ultra-thin piezoelectric resonator [0015] 1, dismantled so as to be better understood, in a blown up view showing its different constituent parts. FIG. 2 shows the same resonator in a side view. It includes in a known manner a central plate 5 made of a piezoelectric material of very small dimensions. By way of example, the plate has a rectangular surface of 5×1.8 mm and a thickness of 0.15 mm, and it has a central cut out portion allowing a frame 6 to be formed, to which is attached, by one of its small sides, a resonant element 9 represented here by a tuning fork. It is clear that the invention is not limited to a resonant element in the shape of a tuning fork, and that any other configuration of resonant elements would also be able to be used within the scope of the present invention. The bottom and top faces of frame 6 and resonant element 9 have a thin conductive coating 7, obtained by known techniques, such as vacuum deposition. The outer surfaces 8 (only one of which is visible in FIG. 1) of frame 6 constitute the support and sealing surfaces for the other constituent elements of the resonator. Bottom cover 11, i.e. the one which will be applied onto the substrate of a printed circuit is formed of two metal parts: a spacing frame 12 having the same dimensions as surfaces 8 of central plate 5 and a covering plate 14. The top cover, also formed of two metal parts, includes a spacing frame 17 which is identical to frame 12 and a covering plate 19 having an extension 20 bent into a Z shape. As is seen more clearly in a side view in FIG. 2, in which the thickness of the assembled elements has been greatly exaggerated, the first bend arranges an electrically insulating space with the stack of elements and the end of extension 20 forms a clamp 20 a whose bottom surface is in the same plane as outer face 14 a of bottom covering plate 14. Surfaces 14 a and 20 situated in a same plane constitute both the electrical connection means for the electrodes and the means for mounting on the substrate of a printed circuit while assuring great stability of the ultra-thin resonator. According to a variant shown in FIG. 3, it can be seen that the bottom covering plate 14 also has a Z shaped bent extension, said extension being asymmetrical to extension 20 of top covering plate 19 with respect to the median plane of the resonator. This construction has the advantage of providing resonators the direction of which will never have to be discriminated in an assembly chain. The mechanical and electrical mounting onto the substrate of a printed circuit could then be effected by any of surfaces 20 a, 14 a, extension 10 then not being used, or by surfaces 10 a, 19 a, extension 20 then not being used.
  • The assembly of the various elements which have just been described to each other is effected by the known means of welding or soldering or by applying a glue or a conductive cement. [0016]
  • According to a variant which is not shown, spacing frames [0017] 12, 17 can be made of an alloy allowing covering plates 14, 19 to be soldered to the frame while arranging a space sufficient for the motion space of resonant element 9. Frames 12, 17 are for example cut of a thin plate of a hotmelt material, such as the alloy Au-Sn (80/20) by stamping. In a similar manner, it is possible to electroshape frames 12, 17 with such an alloy directly either onto covering plates 14, 19, or onto surfaces 8 of the frame of the central piezoelectric element or onto both at the same time. Likewise, it is possible to apply an insulating varnish to all the outer surfaces, with the exception of the securing and connecting zones.
  • According to a variant shown in FIG. 4, the bottom covering plate [0018] 14 may also have a planar extension 15 able to make it easier to secure the resonator onto the substrate. According to another embodiment shown in FIG. 5, the means for connecting the top excitation electrode is formed by a Z shaped extension 18 of spacing frame 17, according to the same principles as those defined hereinbefore. In this case, covering plate 19 has the same contour as that of frame 17 and can be made of an insulating material.
  • FIG. 6 shows a variant wherein the top and bottom spacing frames [0019] 17 and 12 each have a Z shaped bent extension 18 and 13. This embodiment also allows bottom covering plate 14 to be made of an insulating material.
  • In the examples which have just been described, the Z shaped bent extension or extensions are provided in the width of the resonator. It is clear that they could also be made in all or part of the length of the resonator. [0020]

Claims (8)

What is claimed is
1. An encapsulated piezoelectric resonator including on the one hand a central plate made of a piezoelectric material cut to form a frame and a central resonant element connected to said frame, the top and bottom faces having a metal coating, on the other hand bottom and top covers, each being formed by a spacing frame made of metal or a metal alloy and a closing plate, wherein at least one of the elements forming the covers is electrically connected to the frame of the central plate and has an extension bent into a Z shape to bring its distal portion in line with a covering plate and to form electrical and mechanical connection means situated in a same plane.
2. A resonator according to
claim 1
, wherein the extension bent into a Z is formed from the top covering plate.
3. A resonator according to
claim 1
, wherein the top and bottom covering plates each have an extension bent into an Z which is asymmetrical with respect to the median plane of the resonator.
4. A resonator according to
claim 2
, wherein the covering plate of the bottom cover also has a planar extension beyond the central plate.
5. A resonator according to any of
claims 1
to
4
, wherein the spacing frames are made of a hotmelt material cut by stamping a sheet or electroformed on the covering plates or on the frame of the central plate, or on both.
6. A resonator according to
claim 1
, wherein the extension bent into a Z is formed from at least one of the spacing frames.
7. A resonator according to
claim 6
, wherein the two spacing frames each have an extension bent into a Z.
8. A resonator according to
claim 7
, wherein the covering plates of the bottom and top covers are electrically insulated.
US09/734,681 1999-12-21 2000-12-13 Ultra-thin piezoelectric resonator Active US6426537B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH233799 1999-12-21
CH2337/99 1999-12-21

Publications (2)

Publication Number Publication Date
US20010004125A1 true US20010004125A1 (en) 2001-06-21
US6426537B2 US6426537B2 (en) 2002-07-30

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US (1) US6426537B2 (en)
JP (1) JP4671498B2 (en)
KR (1) KR100667608B1 (en)
CN (1) CN1252919C (en)
CA (1) CA2327734A1 (en)
HK (1) HK1038838A1 (en)
TW (1) TW564560B (en)

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US20100328242A1 (en) * 2009-06-24 2010-12-30 Research In Motion Limited Piezoelectric assembly
US20110163637A1 (en) * 2010-01-05 2011-07-07 Seiko Epson Corporation Piezoelectric device and piezoelectric device manufacturing method
US20180066359A1 (en) * 2013-11-06 2018-03-08 Asm Ip Holding B.V. Method of depositing thin film

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US9130810B2 (en) 2000-09-13 2015-09-08 Qualcomm Incorporated OFDM communications methods and apparatus
US9137822B2 (en) 2004-07-21 2015-09-15 Qualcomm Incorporated Efficient signaling over access channel
US9148256B2 (en) 2004-07-21 2015-09-29 Qualcomm Incorporated Performance based rank prediction for MIMO design
US8611284B2 (en) 2005-05-31 2013-12-17 Qualcomm Incorporated Use of supplemental assignments to decrement resources
US9246560B2 (en) 2005-03-10 2016-01-26 Qualcomm Incorporated Systems and methods for beamforming and rate control in a multi-input multi-output communication systems
US9154211B2 (en) 2005-03-11 2015-10-06 Qualcomm Incorporated Systems and methods for beamforming feedback in multi antenna communication systems
US8446892B2 (en) 2005-03-16 2013-05-21 Qualcomm Incorporated Channel structures for a quasi-orthogonal multiple-access communication system
US9520972B2 (en) 2005-03-17 2016-12-13 Qualcomm Incorporated Pilot signal transmission for an orthogonal frequency division wireless communication system
US9143305B2 (en) 2005-03-17 2015-09-22 Qualcomm Incorporated Pilot signal transmission for an orthogonal frequency division wireless communication system
US9461859B2 (en) 2005-03-17 2016-10-04 Qualcomm Incorporated Pilot signal transmission for an orthogonal frequency division wireless communication system
US9184870B2 (en) 2005-04-01 2015-11-10 Qualcomm Incorporated Systems and methods for control channel signaling
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US8885628B2 (en) 2005-08-08 2014-11-11 Qualcomm Incorporated Code division multiplexing in a single-carrier frequency division multiple access system
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US9225488B2 (en) 2005-10-27 2015-12-29 Qualcomm Incorporated Shared signaling channel
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US20100328242A1 (en) * 2009-06-24 2010-12-30 Research In Motion Limited Piezoelectric assembly
US8446076B2 (en) * 2009-06-24 2013-05-21 Research In Motion Limited Piezoelectric assembly
US20110163637A1 (en) * 2010-01-05 2011-07-07 Seiko Epson Corporation Piezoelectric device and piezoelectric device manufacturing method
US8476810B2 (en) * 2010-01-05 2013-07-02 Seiko Epson Corporation Piezoelectric device and piezoelectric device manufacturing method
US20180066359A1 (en) * 2013-11-06 2018-03-08 Asm Ip Holding B.V. Method of depositing thin film

Also Published As

Publication number Publication date
JP2001223553A (en) 2001-08-17
HK1038838A1 (en) 2006-11-24
KR100667608B1 (en) 2007-01-11
US6426537B2 (en) 2002-07-30
CA2327734A1 (en) 2001-06-21
JP4671498B2 (en) 2011-04-20
TW564560B (en) 2003-12-01
CN1252919C (en) 2006-04-19
KR20010067421A (en) 2001-07-12
CN1304212A (en) 2001-07-18

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