UA87880C2

UA87880C2 - Vacuum-arc source of plasma

Info

Publication number: UA87880C2
Application number: UAA200706629A
Authority: UA
Inventors: Дмитро Сергійович Аксьонов; Іван Іванович Аксьонов; Володимир Євгенійович Стрельницький; Володимир Васильович Васильєв
Original assignee: Национальный Научный Центр "Харьковский Физико-Технический Институт"
Priority date: 2007-06-13
Filing date: 2007-06-13
Publication date: 2009-08-25

Abstract

The invention relates to metallurgy, namely to construction of vacuum-arc source of plasma. A vacuum-arc source of plasma comprises a generator of plasma and filter for its cleaning from particulates. The plasma generator comprises cathode, anode and stabilizing and focusing electromagnetic coils, accordingly. The filter comprises rectilineal plasma inlet, external transport electromagnetic coil and internal rejecting electromagnetic coil. Inside of axial channel of this coil the partition is placed. The distance from entering aperture of axial channel of this coil to said partition is not less than one half of diameter of its channel, and diameter of said channel is not less than one third of external diameter of this coil. The invention provides for the reduction of plasma consumption at its transportation through the filter.

Claims

(51) IPC (2009) Koch p23s 14/00 M Sat23S 14/35 Sat23S 14/56 NOBN 1/00 NOBN 11/26 NOV 7/00 nO1 37/08

NO1. 37/30 МІНІСТЕРСТВО ОСВІТИ Ї НАУКИ УКРАЇНИ ДЕРЖАВНИЙ ДЕПАРТАМЕНТ о п И С ІНТЕЛЕКТУАЛЬНОЇ ДО ПАТЕНТУ НА ВИНАХІД ВЛАСНОСТІ ишиГлРОІОТЛМЛИЬЛЬЛИТЬЛЬЛЬЛИЛДИТЬТЬТЬЬТИЬНЬ6ИЬТЬШИЬИЬТЬТЬТНИТЬТНШЬЬИТСИТИТИОИООТИТИТОИОИИТИИЬЬИИИОИИИИОВЛЛЄОЄИЄЄИБИТНТЦИЖИЄ6ЦООЦТНИИТЛ ОІаІНШШШООЛІТОООЛЇИОООЛООЛЛЛТОООХТОЛИОІЕВПОВШ?ИЙЦТЬНТНТИТИТЬТЬТЬЬЬЬШЬОХОИТЬИЬТИТОИИОСХИХДТИОВИТХИХННЙКЙИХИТИИИИНИТТЯ (54) ВАКУУМНО-ДУГОВЕ ДЖЕРЕЛО ПЛАЗМИ 1 2 (21) а200706629 підключення транспортуючої котушки, яке відріз- (22) 13.06. 2007 is due to the fact that the axial channel of the internal (24) 08.25.2009 tilting coil is open at least from the side of the (46) 08.25.2009, Byul.Mo 16, 2009, and inside this channel is placed (72) AKSONOV DMYTRO SERGIYOVYCH, AKSYO - a partition covering the cross-section NOV IVAN IVANOVYCH, STRELNYTSKY VOLO- of this canal. DYMYR EVGENIYOVYCH, VASILYEV VOLODYMYR 2. Vacuum-arc plasma source according to claim 1, which VASILYOVYCH is distinguished by the fact that the diameter of the indicated axis (73) NATIONAL SCIENTIFIC CENTER "KHAR" channel is not less than a third of the external KIEV PHYSICAL AND TECHNICAL INSTITUTE of the diameter of the internal deflecting coil, or (56) 5), 1 040 631, А, 07.09.1983 of the outer diameter of the casing of this coil, if OA, 44 842, С2, 15.03.2002 it is present, and the specified partition is shifted inward with OA, 46 887, С2, 17.06.2002 of the axial channel relative to its opening on the side of the ero- (о) ОА, 84 675, С2, 25.11.2008 blowing cathode at a distance not less than half of its diameter. miy MO, 92/16959, A1, 01.10.1992 3. Vacuum-arc plasma source according to claims 1 or 2, SA, 1 176 599, A1, 23.10.1984, which differs in that the specified partition and, 4 551 221, A , 05.11.1985 electrically isolated from structural elements! and, 4 512 867, А, 04/23/1985 of this source. co UR, 2007-046144, A, 22.02.2007 4. Vacuum-arc plasma source according to any co Aksenov I.Y., Belous V.A. and others. The device for claims 1-3, which differs in that the coils that clean the plasma of the vacuum arc from microtimes form an internal deflecting coil, high-speed//Prybor i tekhnika zksperimenta, 1978, Mo 5. conductive tube with the possibility of pro-

P.236-237 coolant flowing through it. in. (57) 1. A vacuum-arc plasma source that 5. A vacuum-arc plasma source according to any one includes an eroding cathode, an anode, covered elect- from claims 1-4, which differs in that the external romagnetic focusing coil, rectilinear- the transporting coil consists of at least one plasma conductor covered by an external electromagnet of two coaxial sections. "pressing conveying coil, inside b. A vacuum-arc plasma source according to any one in which the internal electromagnetic of claims 1-5 is located, which is characterized by the fact that the internal 87 deflection coil with an axial channel and the connecting deflection coil consists of at least two by connecting it to the electric current source opposite to the coaxial sections The invention relates to the technique of forming used in ion-plasma processing of materials. currents of metal and gas-metal plasma for the invention. The invention can be used for the deposition of high-quality coatings for various purposes - from 1984). This is a vacuum-arc plasma source of inclusion-resistant, anti-friction, decorative, electrically erosive cathode, anode, covered with electrically and thermally conductive, electrically and thermally insulating, etc. pressure coil, rectilinear plasma conductor, covering

etc., as well as for the surface modification of the painted external transport material by irradiation with ion streams and/or an electro-electromagnetic coil, inside of which there are electrons. wrapped internal deflecting electromagnetic The complete realization of the extraordinary possibilities of the coil with an axial channel, with the possibility of connecting a vacuum arc as a tool for forming its connection to the source of electric current against high-quality coatings depends on the extent of the transporting coil. The deflecting coil will successfully solve the problem of the so-called placed in the casing, which provides the possibility of macro particles - droplets and solid fragments of the coolant channel. The axial channel of this coil is the material of the eroding cathode. Getting on the surface of the product, on which the coating is formed, is closed with end walls from both ends. Rectilinear plasma conductor with external such particles deteriorate its quality, lower the transport coil, internal deviates its service characteristics. with a coil and a casing covering it, form a well-known vacuum-arc plasma source GI. They use a filter to prevent the ingress of macrocha- Aksenov, V.A. Belous, V.G. Padalka, V.M. Good walls at the output of the vacuum-arc source. "Plasma cleaning device! of a vacuum arc Transporting and deflecting coils are included in macroparticles", PTZ, Mo5, 1978, p. 236-237), which counter and generate a tubular magnetic flux in includes an eroding cathode and an anode covered by an electric gap between the casing of the deflecting coil and the platomagnetic coil. For the formation of streams with a conspiracy. Along this flow, the plasma is transported to the plasma in this source by the deflector, which is cleaned of macroparticles from the vacuum-arc coil with a casing, and exits from the plasma pipe to the surface of the product. External filter. It contains a pipe-shaped shear diameter of the deflecting coil chosen as such, a plasma conductor bent in the form of a quarter of a torus, and a system in which there is no direct visibility between the working surface of the cathode and the output of the magnetic coils placed along the plasma opening of the plasma conductor.

do Charged components of the plasma of the cathode material. Therefore, macroparticles, moving in a straight line - ions and electrons - are transported along trajectories, are intercepted by the deflecting help of magnetoelectric fields along the cover in the casing and do not hit the output of the plasma conductor from the cathode to the surface. The end wall of this casing, facing the product, on which the ions condense to form a cathode, acts as a screen that intercepts the coating. Macroparticles in comparison with macroparticle ions that move in the axial direction have a very large mass, are almost uncharged, and the channel of the deflecting coil. therefore, they do not respond to either magnetic or electric fields. The disadvantage of the device is the low efficiency of the field. Moving along rectilinear trajectories of plasma passage through the filter. This is due to the fact that they come into contact (perhaps several times) with the return, so that a significant part of the primary flow of ions of the plasma conductor lands on it, but is lost, hitting the screen, that is, they almost never get to the end of the filter. on the surface of the casing of the deflection coil. Disadvantages of this device, which prevent it. The task, the solution of which is directed to the wide application of high-tech inventions in practice, is the improvement of vacuum-arc gerenology, is a complexity. Bulkiness and relatively low plasma to reduce plasma losses during its high efficiency of plasma transport through filtration from macro particles and transport-curvilinear filter. in the plasma duct. The problem must be solved. A vacuum-arc source is also known by means of structural changes, which in order to achieve the specified result, we (I. Aksenov, 05, 4 551221, 1981) must create certain cylindrical or conical cathodes with a working surface of geometrical and magnetoelectric configurations in the rhenium vaporized by the cathode spot of the arc, the plasma conductor of the vacuum-arc device. tube-shaped cylindrical anode and electromagnet. The task is solved in vacuum coils. The latter form magnetic fields for the plasma arc source, which, like the source, the retention of the cathode spot on the working surface is taken as a prototype, includes an eroding cathode, the cathode and focuses the plasma flow, which emits an anode covered by an electromagnetic focusing cathode spot. In this source, a coil, a rectilinear plasma conductor, is covered by the fact that almost all of the ionic component is directed by the outward electromagnetic transport by a focusing magnetic field at the exit of the coil, inside which the internal source is located, and the macroparticles, moving mainly electromagnetic deflecting coil with axial in radial directions, intercepted by the walls of the channel, with its connection to the source of the anode, the concentration of macroparticles in the output current opposite to the transporting coil. the plasma flow decreases, and the efficiency of transport According to the invention, the axial channel of plasma transport increases. The design of the source of the casting coil is open, at least on the cathode side. It is relatively simple, but the degree of removal of the macro-chamber, and inside this channel there is a thicket of plasma is much lower than in the front, which overlaps the cross section of this bottom device with a curvilinear filter . channel More effective removal of macroparticles from The diameter of the axial channel of the deflecting coil, plasma and a significant simplification of the design are characteristic or its casing, if it is present, in the best version of the device, which will be considered in the future as protonated to be no less than a third of its outer diameter: (I. Akhepom ei ai., Sapadiap Raiepi Meo1176599, meter (or the outer diameter of the casing), and noted

The partition should be moved inside this version of the deflection coil so that it does not cross its channel relative to its opening on the cathode side to the removed casing in which the coolant circulates. become at least half its diameter. Deflecting and/or conveying coils The specified partition can be electrically isolated from the structural elements of the source. sections to ensure fine-tuning of the arrangement In order for the deflecting coil to be able to use magnetic fields in the plasma conductor in order to optimize the conditions of plasma transportation, it can be used without a casing, turns, which it forms. can be made from an electrically conductive tube The essence of the invention is explained by graphical mate- with the possibility of a coolant flow through it. rials The conveying coil can consist of at least two coaxial sections. of my device in one of the versions of its design. The deflecting coil can also be assembled without the casing of the deflecting coil. from at least two coaxial sections. Fig. 2 shows a longitudinal section of the deflecting coil in the housing according to the device, unlike the prototype device, in which the entrance to the accepted as a prototype. the axial channel of the deflecting coil is blocked. Fig. 3 shows a diagram of a variant of the plasma screen (the end wall of the casing), on which the plasma filter of the proposed device with sectioned zma, coming from the source, is lost in the electromagnetic coils. device according to the present invention, this part of the plasma is shown in Fig. 4 is a diagram of the proposed variant - passes through an open hole inside the axial device with a plasma conductor, which performs the function of the coil channel. Here it interacts with the magnetic anode of the plasma source and with the partition, the alternating field, which increases towards the center of the coil. Such a field is a so-called "magnetic mirror of a deflecting coil", which even at small values of magnetic induction effectively reflects the electronic component of a device with three generators. plasma no plasma. This is enough for the longitudinal cross-section of the filter shown in Fig. 6 to follow the electrons moving in a reverse direction with a deflecting coil, the turns of which produce a straight line and ions as a result of electrostatic attraction from the tubular conductor. modi with a negative space charge of electrons. Figs. 7 and 8 show diagrams of lines of force reflected from a magnetic mirror. Such magnetic fields in the proposed device with two ways, the principle of plasma quasi-neutrality with four sections of the transporting coil is therefore preserved. So, part of the plasma, which is one thing. enters the deflecting coil, does not lose - Fig. 9 shows the graph of the dependence of the ion radia. It is reflected by the magnetic mirror that the current at the output of the proposed device from inside this coil and, mixed with the main distance between the inlet opening of the axial channel and the plasma flow, is directed to the exit by the partition inside the deflecting coil (aligned with the help of a magnetic field between plasma relative values). water and a deflecting coil. Let's consider options for practical implementation of the proposed device. meter of the axial channel of the deflecting coil and the vacuum-arc plasma source, the scheme of which is the displacement of the partition inside this channel is shown in Fig. 1, consists of a planar generator that provides an optimal process of reflection of the beam and a plasma filter. The composition of the plasma generator with a deflecting coil and, as a result, sub-plasma includes an eroding cathode 1, made of material that increases the efficiency of plasma passage to (metal, alloy or graphite) for the formation of the device's discharge. one plasma, the anode 2, and the stabilizing and focusing It should also be noted that the plasma that drives the electromagnetic coils C and 4. The filter is contained exactly along the axis of the device, is not reflected by the rectilinear plasma conductor 5, external transport- by the above-mentioned magnetic mirror and the non-interrupting electromagnetic coil b and the inner repulsively enters the partition inside the channel, the flowing electromagnetic coil 7. Inside the axis, the coil i is deposited on this partition. If a partition 9 is placed in channel 8 of coil 7, this partition is electrically isolated, then, subsequently, the distance from the entrance hole of the axial channel of the code of higher mobility, electrons in the larger carcass 7 to this partition is not less than half the number of ions, get on her. It will acquire a diameter of its channel 8, and this diameter is not smaller than the negative floating potential, which is a third of the outer diameter of the coil 7. The device makes it difficult for further "outflow" of electrons (and ions are also docked through the output hole 10 of the plasma conductor) from the plasma before deflecting coil - to the working chamber of the technological installation (on which, therefore, the loss of plasma due to its "leaking" is not shown in Fig. 1), inside which the product 11 is placed against the specified - along the axis inside the deflecting coil of the variable outlet opening 10, are sewn. the surface of which is processed. If the coils of the deflecting coil are made from a no-arc discharge between the cathode Z and the anode 4 of a conductive tube with the provision of a vacuum, the power supply is carried out from the current source 12. The igniting axis of the flow through it is a cooler, then it can be a device (not shown in Fig. 1) any known will be forcibly cooled by a liquid or gas of the type placed near the cathode 3. With the help of what will make it possible to increase the electric current of the voltage source 13, an opportunity is provided in the coil to strengthen the magnetic field and, when applied to the plasma conductor 5, a forced positive its reflective effect on the plasma. At this displacement potential. Coils 3, 4, 6, and 7 are powered by current sources 15, 16, and 14. The outer diameter of coil 7 is chosen such that the output is р-М /о-М ts/98. The opening 10 of the plasma pipe 5 is out of line of sight from the working surface of the cathode 1. In Fig. 1, here M. is the component of the particle velocity, the perpendicular zone of the absence of direct line of sight from the specified dicular direction of the magnetic field with induction B. The surface of the cathode is between two If the magnetic field is chosen such that the conducting lines to the right of the coil 7. The left part of the inequality (1) is transported, then the electrons of the emitting and deflecting coils 6 and 7 can move independently along the magnetic field lines to power sources 16 and 14 in the opposite direction, that is, with a longitudinal speed of M/, on the walls of the plasma conductor 5 so that the currents in the turns of these coils flow in and the coils 7 cannot get there, because they are transverse in opposite directions. directed movement in the magnetic field turned into The described device works as follows. circular with a Larmor radius re significantly At a given pressure of the residual atmosphere or less than the distance to the specified walls.

In such working gas (usually in the range from 10 to 10" Pa) cases, it is said that the plasma electrons are magnetized and, when the power sources 12-16 are turned on, are vacuumed. intelligent arc discharge and coils with the help of As for the positively charged ions of the incendiary node in the plasma generator between the metal anode, which consists of the ionic component plasma 2 and the cathode 1, an arc discharge is ignited. the mass of an electron in 88,000 times) is generated by coil 3, the magnetic field is kept at work in the gap between the plasma conductor 5 and the surface of the cathode 1. This cathode spot emits by the coil 7 almost do not react to the fact that their alarm current consisting of electrons, the positron radius ri is greater than the width 4 of this external ions and macroparticles of the cathode material gap, and therefore the ions with a speed M should move through the magnetic field of the coil 4 across the magnetic field to the walls is indicated in the direction of the plasma conductor 5. Due to the action of the field in the gap.

But this does not happen, because the ions move through coils 4 and 6, the plasma flow enters the plasma conductor held by the negative electrostatic field.

Here, the peripheral space charge of magnetized electrons is averaged over time and part of the flow drifts unimpeded plasma along with them move along the magnetic field in the conducting path, which is formed by the gap from to the exit 10 and further - to the surface of the product 11. At the annular cross-section between the plasma this fulfills the basic condition of quasi-neidation 5 and coil 7, plasma formation along the magnetic field.

It should be noted that it is most affected by counter-switched coils 6 and 7. However, high-energy ions overcome the force of the catch line of this field in Fig. 1 schematically shows the attraction of magnetized electrons and fall in thin continuous lines.

At the same time, behind the walls of the plasma duct 5, charging them positively. the significant magnetic field prevents the charged movement. This positive charge of the walls creates an additional electrostatic field in the gap between the plasma particles and the walls of the plasma conductor 5, which obstructs the surface of the coil 7. , . drives further portions of ions to the wall of the path. The mechanism of transporting plasma from the working chamber and, thus, contributes to the reduction of these losses from the surface of the cathode 1 through the plasma-conducting path to the particles when the plasma passes through the plasma outlet 10 can be described as follows. in that way. | | For the devices according to the present invention, which have the intensity of the magnetic fields that are formed, the width of the gap between the plasma conductor and the deflecting coils З, 4, 6, and 7 is chosen so that the rolling coil from a few centimeters to ten fulfills the condition: centimeters, the ratio ( 1), which provides optimal conditions for transporting plasma through the Rekka-Ka-Keri (1) filter, is performed at magnetic fields from approximately 5 to 50 mTl. where: | | | | The peculiarities of the movement of the middle part of the plasma flow coming from the plasma source to the plasma conductor are as follows.

In a - the width of the plasma conducting path, the device, which is taken as a prototype (see

Fig. 2), Vi RK" - the inner radius of the plasma conductor 5 and the outer opening of the channel 8 of the deflecting coil 7 is covered by the inner radius of the deflecting coil 7, respectively. the screen, which is the end wall of the casing 17, which in the magnetic field with the induction B is charged and embraces the coil 7. On such a screen, the average plasma particles move along the magnetic forces of the plasma flow (in Fig. 2, it is conventionally zolini according to the Larmor lines spirals, turning brazen arrows) is lost.

In the device around these lines with the cyclotron frequency of this invention, this part of the flow passes through the open hole of the axial channel 8 of the coil 7 o-dV/te, (see

Fig. 1) in the middle of this channel.

Here, the plasma interacts with the magnetic field, which increases towards where: the center of the cavity.

Such a field is so 4 - the charge of a particle, called a "magnetic mirror". Under the conditions that consider its mass, such a mirror is even at comparatively low speed of light. large induction of the magnetic field, which satisfies the Radius of the spiral (Larmor radius) the ratio (1), reflects the electronic component of the coil: plasma.

In Fig. 1, the trajectory of an individual electron is schematically shown by a line with arrows inside the plasma rotor to the output of the device, provided by channel 8. Following the electrons in the reverse direction, if the diameter of ХО, channel 8 is a straight line, the ions are displaced and as a result, the ions are not electrostatic. less than a third of the external diametric interaction with the space charge of the electrode O of the casing 17. These data will be the same for the waves reflected from the magnetic mirror as a result of the swaying coil without the casing. In this case, O - what preserves the principle of quasi-neutrality is the outer diameter of this coil. plasma as a whole. In this way, the incoming plasma It was also experimentally found that the effect to the coil 7 is reflected from it, and the miscible reflection of the plasma occurs under the conditions that, with the peripheral flow, the plasma moves along its longitudinal motion in the axial magnetic field through the gap between the deflecting channel 8 does not run into the barrier, overcomes the coil and the plasma conductor to the hole 10 and further - until the distance from the entrance hole of this channel to the surface of the product 11. is less than half its diameter. In contrast to the ion-electron component, Fig. 9 shows the nature of the influence of the displacement I of the plasma transported to the hole 10 of the magnetic cage 9 on the value of the IY ratio. Here, with a safe field bypassing the coil 7, macroparticles, the catorerve line corresponds to the electrically insulated front material due to their large mass of the 9U cage, and the dashed line corresponds to the partition, electrically (the smallest of them are several orders of magnitude more massive than the one connected to the casing. How it can be seen that metal ions) to neither magnetic nor electric fields, the increase in the ratio I occurs when the signi- almost do not react, move in a straight line, and therefore the G/O ratio is 0.5. It is because of this that, according to the fault, they do not fall on the surface of the product, because the entrance determines the location of the screen 9 in the cavity 8, which is in the area of the absence of direct visibility from the working surface of the cathode 1. On the way to the exit, Fig. 3 schematically shows the plasma macroparticles come across the "opaque" for the filter of another version of the device according to the invention, they have an obstacle - the coil 7, the channel 8 of which is also "somewhat, unlike the variant shown in Fig. 1, is transparent", because it is blocked by a partition 9. , the deflecting coil 7 is placed in a protective Zone of no direct visibility from the surface of the catho- jacket 17 made of non-magnetic material, for example, with and 1 (and therefore - and inaccessible to macro particles, stainless steel. The walls of the jacket are abutted by why are emitted from this surface) in Fig. 1, visually find all surfaces of the coil - both the outer and the one between the two dashed lines to the right of the inner. At the same time, the walls of the casing abutting the coil 7. However, in this zone, to the opening 10, the inner surface of the coil 7 can form macroparticles that bounced off (ricochet-axial channel 8. At the same time, the greater part of the plaster) from the walls can enter plasma conductor 5. To prevent this, we, which flies into the opening of this channel of the casing, can in a known way, by placing on the walls, falls into a space with a magnetic mirror, from which the transverse ribs of the plasma conductor, which play the role of this plasma is reflected. A magnetic mirror as a trap for macroparticles (not shown in the figures). as mentioned above, is formed by a deflecting coil 7 to deflect as much as possible from the coil 7. This coil, in order to ensure a larger wall of plasma that hits the end of this coil, and to fine-tune the distribution of the magnetic field to minimize the loss of the plasma flow on the filter in this way, consists of two sections. For the same purpose, the specified end, the diameter of the channel 8, as revealed by the conveying coil would also be sectioned. In this variant, this coil consists of three sections of the outer diameter of the coil 7, or its casing. Coolant (water) and electricity - if there is one. At the same time, most of the plasma that is supplied to the deflecting coil 7 falls on this coil, enters the axial channel and passes through the nozzle 18. The supply of the cooling channel 8 with a magnetic mirror, from which this plasma of water is carried out according to any known method - and is reflected. The efficiency of the plasma source is not shown in Fig. 3. The nozzle 18 is characterized by the passage of the plasma current through the wall of the plasma duct 5 with the help of a tube from the generator to the outlet. It can be hermetic insulator. The electrical insulation is determined by the ratio ИЙ (I - the ion current on the casing 17 allows, if necessary, to be supplied at the output of the device, I - the current of the arc discharge). These values for different ratios of Bu - diameter and displacement from a separate source (in Fig. 3, the axial channel of the deflecting coil in the casing is also shown), which contributes to the retention of ions in the plasma - outer diameter of the casing are given in the table. air space between the casing and the plasma conductor 5. For the same purpose, an additional (in addition to the floating table) positive displacement potential from the source 16 (see Fig. 1) can be applied to the plasma conductor 5. In the axial channel 8, the partition 9 is placed at a distance from (B ) " ' " the end of the casing 17 facing the cathode, which is not less than half the diameter of this axial channel. For Y , , , reduction of plasma losses moving along the axis of the channel 8 and not reflected from the magnetic mirror,

(0. for the prototype. 0//0-0 corresponds to the input partition 9, according to the invention, there can be an ele- opening of the axial channel 8, blocked by a torsec- is insulated from the casing 17. In this case, the detection of electrons (compared to ions ), from the data presented in the table, it turns out that it is negatively charged, which complicates further

the movement of electrons, as a consequence - of ions, and therefore of plasma (not shown in Fig.b), yielding at the same time as a whole, towards the partition 9. with the possibility of independently adjusting the magnetic field. Fig. A4 schematically shows another wa arc current of the plasma generator. riant of the vacuum-arc plasma source due to - As mentioned above, due to the fact that the trans- passage. In this version of the plasma source, the porting coil and deflecting coil generate, to simplify its design, the functions of the anode vacuum oppositely directed magnetic fields, the direct-arc plasma generator performs plasma removal, and both ends of the deflecting coil are formed

5. Focusing coil 4 in this case will place areas in which these fields mutually compensate each other on the input part of the plasma conductor, which is connected to one. These are the so-called regions of the magnetic minimum to the positive pole of the 12-dupole power source. In Fig. 7, the results of the computer's final discharge are shown (see Fig. 1). calculations of the passage of magnetic force lines. Fig. 4A also shows one of the possible fields in the version of the device, the plasma conductor of which performs the construction of the partition 9. It also consists of the function of the anode (according to the version in two parts, attached on both sides with the help of Fig. 4). Inside each such area, the magnetic field of the insulators 20 to the holder 19, the mechanical field is almost absent and increases in the peripheral one connected to the casing 17. In such a design, it is not directly, being a magnetic trap for the electric negative floating potential of nabutrons, which mainly electrically isolated parts of the partition leave this trap. Through the channel between the sections of the transporter 6 and the section-reopening of the channel 8, necessary to prevent pitting of the deflector 7 coils. The negative space passage of macroparticles is provided by the electron charge, which is held for some time by the holder 19, and the insulators 20, placed between the specified trap, is a "potential pit" for positively charged ions. Therefore, the ionic component of the plasma flow is reliably protected from a direct hit on them, which has a plasma in it and the formation of such a potential pit on the surface of the electric path, which somewhat slows down the film. , the energy of the directional movement of ions noticeably decreases. The three-dimensional image shown in Fig. 5 still For example, the energy of titanium ions during the passage of one version of the vacuum-arc device under the plasma generator through the plasma conductor is reduced by the invention. The main difference of this option is almost twofold. The effect of reducing the energy consumption of the device is that it contains several generators of the condensing flow of extremely heavy plasma. There are three of them in Fig. 5, one of them is shown in development during the deposition of coatings on products made of materials, cutting. Each of these generators contains a cathode 1, an anode that has a low limit of permissible heat 2 and a magnetic coil 3. The plasma from these cathodes due to the load (for example, in the case of applying the anode) enters the common plasma conductor 5 from the protective coating to the active layer of magnetic rectangular cross-section, covered media - hard memory disks, or on a sectioned transport coil 6. In the surface of products made of polymer materials). plasma conductors are installed of the appropriate deflection shape. On Fig. 7, to the right of the product 11, the casting coil 7 in the casing 17 and the partition 9 are shown. For the shape of the radial distribution of the thickness of the deposition- further increase in the degree of opacity of the coating on its surface, characteristic of a filter for macroparticles ( and therefore - and the degree of the device with magnetic fields, the lines of force of which plasma cleaning) plasma conductor 5 at the output has sound- shown in this figure. The minimum distribution in the center of the section with an additional section of the transport substrate is due to the significant "shadowing" of this coil b. In order to structurally simplify the area of the deflecting coil 7 and the screen 9, the anodes of the 2 generators are connected to the plasma. The elongated output part of the plasma conductor 5 with the distributor 5 is one block, so that the inner surface of the additional sections of the coil b of the plasma conductor placed on it is an additional current receiver. (Fig. 8) provide the possibility of correcting the distribution of a small anode surface, which, as is known, contributes to the density of the plasma flow at the output of the device and the stability of the combustion of the vacuum arc discharge. therefore - and the distribution of the thickness of the coating on the surface. sheet products 11 or on roll materials with the Vacuum-arc device according to the invention in the variant of their movement across the original variant according to the scheme of Fig. 1 was made and a test of the angular opening of the filter (possible directions of movement on the installation for the vacuum-arc axis - indicated by arrows). coating The device had the following parameters. The deflecting coil 7 of the vacuum-arc je- Anode 2 had the form of a segment of a pipe with double rela plasma according to the invention can be made walls. Cooling water passes through the cavity created by it in the form of a single-layer solenoid made of metal ears. The inner diameter of the tube through which the coolant is passed (anode 2 was equal to 130 mm, length - 190 mm. Ka-

yes). The scheme of the device with this version of the deflector 1 had the shape of a truncated cone with a height of 45 mm, whose coil 7 is shown in Fig.b. Coil 7 with 60 and 4A5mm diameter re-bases. Water cooling - the cage 9 is located in the plasma pipe 5, the plasma pipe 5 with a length of 200 mm and an internal sectioned transport cat with a diameter of 210 mm also had double walls for the shell b. To feed the coil 7, made of water flow. A tube was placed on the plasma conductor 5, a separate power two-section transport coil 6 should be used. Deflecting room source. In order to simplify the power supply circuit, the two-section coil 7 was placed in the casing 17, it is advisable to include this coil in series, the dimensions of which were as follows: length - 100 mm, electric power supply circuit of the arc of the plasma source - inner and outer diameters - 40 and 110 millimeters -