TWM585430U - Defoaming oven system - Google Patents

Abstract

A defoaming oven system includes a chamber, a heating unit, a fan and a driving device. The chamber includes an inner space, wherein fluid is adapted to enter/exit the inner space. The heating unit and the fan are disposed in the chamber. The driving device includes a stator module, a rotor module and a stress resistant resin. The rotor module is disposed in the stator module, and adapted to rotate relative to the stator module. The rotor module includes a rotating rod having an extended portion. The driving device except the extended portion is disposed out of the chamber and is under atmospheric pressure. The extended portion of the rotating rod is extended to the chamber and connected to the fan. The stress resistant resin covers at least a portion of the stator module. A space surrounded by the stator module and the stress resistant resin communicate with the inner space.

Description

Defoaming oven system

The novel creation relates to an oven system, and more particularly to a defoaming oven system.

During the manufacturing process of the semiconductor packaging structure, the packaging colloid may generate bubbles, and the bubbles in the packaging colloid may affect the reliability and quality of the product. At present, the semiconductor packaging structure can remove air bubbles in the packaging colloid in a high temperature and high pressure manner through a pressure oven.

A heating unit and a fan are usually provided in the conventional pressure oven. The heating unit is used to heat the pressure oven, and the fan is used to make the temperature in the pressure oven uniform. The fan can be driven by a motor provided outside the pressure oven. The rotating shaft of the motor will extend into the cavity of the pressure oven to be connected to the fan, and the shaft seal will be provided at the position where the rotating shaft of the motor passes through the cavity to isolate the high pressure difference inside and outside the cavity. However, the shaft seal can easily wear out due to the long-term temperature and pressure difference.

The novel creation provides a defoaming oven system. A shaft seal is not required between the motor shaft and the cavity.

The invention discloses a defoaming oven system including a cavity, a heating unit, a fan and a driving device. The cavity has an internal space in which fluid is adapted to enter and exit the internal space. The heating unit is disposed in the cavity. The fan is disposed in the cavity. The driving device includes a stator module, a rotor module, and a pressure-resistant gel. The rotor module is arranged in the stator module and is adapted to rotate relative to the stator module. The rotor module includes a rotating shaft, and the rotating shaft includes an extension section. The driving device is located outside the cavity outside the extension section and is located at normal pressure. The extension section of the rotating shaft extends into the cavity to be connected to the fan. The pressure-resistant gel covers at least a part of the stator module, wherein the space surrounded by the stator module and the pressure-resistant gel together communicates with the internal space of the cavity.

In an embodiment of the present invention, the driving device further includes an upper cover, a lower cover, and two bearing parts. The upper cover is disposed on the upper side of the pressure-resistant gel, and the rotating shaft of the rotor module passes through the upper cover. The lower cover is disposed below the pressure-resistant gel. The two bearing parts are sleeved on the rotating shaft and interposed between the rotating shaft and the upper cover and between the rotating shaft and the lower cover, wherein the outer surface of the pressure-resistant colloid, the outer surface of the upper cover and the outer surface of the lower cover are under normal pressure.

In an embodiment of the present invention, the above-mentioned driving device includes a side case, and the upper cover and the lower cover are respectively fixed to the side case, a pressure-resistant gel is filled between the stator module and the side case, and the side case is located under normal pressure.

In an embodiment of the novel creation, the outer surface of the entire pressure-resistant colloid is exposed, and the outer surface of the pressure-resistant colloid is located at normal pressure.

In an embodiment of the present invention, the above-mentioned defoaming oven system further includes a side shell, including a hole groove, the side shell covers a part of the outer surface of the pressure-resistant gel, and the pressure-resistant gel exposed on the side of the hole and groove. The shell is located at atmospheric pressure.

In an embodiment of the present invention, the above-mentioned defoaming oven system further includes a side shell, a part surrounding the stator module, a pressure-resistant gel covering another part of the stator module, and an outer surface of the pressure-resistant gel and the side shell. The outer surface is under atmospheric pressure.

In an embodiment of the present invention, the above-mentioned defoaming oven system further includes a pressure supply module, which is connected to the internal space to provide fluid to the cavity.

In an embodiment of the present invention, the above-mentioned defoaming oven system further includes a cooling module, which is arranged outside the cavity and communicates with the internal space. The fluid in the internal space is suitable for flowing to the cooling module and then cooling. Back to the interior space.

In an embodiment of the present invention, the above-mentioned defoaming oven system further includes a fluid content sensor, which is disposed outside the cavity and communicates with the internal space.

Based on the above, the space surrounded by the stator module and the pressure-resistant gel of the drive device of the novel defoaming oven system created by the present invention communicates with the internal space of the cavity. Since the pressure-resistant gel can withstand negative pressure, high pressure, and / or pressure Poor, there is no need to set a shaft seal to block between the rotating shaft and the cavity, and the driving device can be located outside the cavity and directly under normal pressure. In addition, the stator module is at least partially covered by the pressure-resistant gel, and can be protected by the pressure-resistant gel.

In order to make the above-mentioned features and advantages of the novel creation more comprehensible, embodiments are described below in detail with the accompanying drawings as follows.

FIG. 1 is a schematic diagram of a defoaming oven system according to an embodiment of the present invention. Referring to FIG. 1, the defoaming oven system 1 of this embodiment includes a cavity 20, a heating unit 24, a fan 26, a driving device 100, and a pressure supply module. The cavity 20 has an internal space 22. In this embodiment, the pressure supply module is connected to the internal space 22, and the pressure supply module can be used to evacuate the internal space 22 of the cavity 20 and provide gas to return the internal space 22 of the cavity 20 to normal pressure, Or / and provide a high-pressure fluid to the inner space 22 of the cavity 20 so that the pressure of the inner space 22 is greater than 1 atmosphere. More specifically, in this embodiment, the pressure supply module includes a fluid supply source 90, a regulating valve 80, a solenoid valve 70, and a booster cylinder 60 (or a proportional valve), but the pressure supply module is not limited thereto. . In addition, in this embodiment, the pressure of the internal space 22 when the defoaming oven system 1 operates is, for example, 0 atmospheres or more and less than 100 atmospheres, but the pressure of the internal space 22 when the defoaming oven system 1 operates is not limited thereto.

In addition, in this embodiment, the heating unit 24 is disposed in the cavity 20 to increase the temperature of the fluid in the internal space 22. In this embodiment, the heating unit 24 is, for example, an electric heating tube, but the type of the heating unit 24 is not limited thereto. The fan 26 is disposed in the cavity 20 to make the temperature of the fluid in the internal space 22 uniform.

As can be seen from FIG. 1, the driving device 100 includes a rotating shaft 122, wherein the rotating shaft 122 includes an inwardly extending section. The extension section refers to a section in which the rotating shaft 122 extends into the cavity 20. The rotating shaft 122 extends into the cavity 20 through the extension section to connect to the fan 26, and then drives the fan 26 to rotate, so that the temperature of the fluid in the internal space 22 is uniform. The rotating shaft 122 has a slight gap 23 between a portion penetrating the cavity 20 and the wall surface of the cavity 20 so that the rotating shaft 122 can rotate relative to the cavity 20 without interference, and the internal space 22 of the cavity 20 can pass through the slit 23 It communicates with the inside of the driving device 100. In this embodiment, the driving device 100 is, for example, a motor, but the type of the driving device 100 is not limited thereto.

In addition, in this embodiment, the bubble oven system 1 may further include a cooling module, which is disposed outside the cavity 20 and communicates with the internal space 22. In detail, in this embodiment, the cooling module includes a heat exchanger 30 and a pump 40, and the heat exchanger 30 is used to cool the fluid. The pump 40 is used to make a circulation of the fluid flowing out of the cavity 20, passing through the heat exchanger 30, and then flowing back to the cavity 20. The fluid located in the internal space 22 is suitable for flowing to the cooling module to cool down before returning to the internal space 22. Of course, in other embodiments, the cooling module can also achieve the effect of fluid circulation through a fan.

In addition, the defoaming oven system 1 may optionally include a fluid content sensor 50 disposed outside the cavity 20 and communicated with the internal space 22. In this embodiment, the fluid content sensor 50 may sense the content of a specific fluid in the internal space 22, and the fluid content sensor 50 may have an adjustment unit (not shown). Prior to the specific fluid content, the fluid is adjusted to a state suitable for being sensed. For example, the adjustment unit is, for example, a valve for passing a proper flow of fluid to be sensed, or the adjustment unit is, for example, a temperature adjustment unit for increasing or decreasing the temperature to adjust the fluid to a temperature suitable for being sensed Interval. In this embodiment, the fluid content sensor 50 is, for example, an oxygen content analyzer. Of course, the type of the fluid content sensor 50, the unit it comprises, and the type of the measured gas are not limited thereto.

In this embodiment, the driving device 100 can eliminate the need for a shaft seal between the rotating shaft 122 and the cavity 20. In the following, various driving devices applicable to the defoaming oven system 1 will be described. In the following embodiments, the same or similar elements are represented by the same or similar symbols.

2 to 5 are schematic diagrams of driving devices of various defoaming oven systems according to various embodiments of the present invention. Please refer to FIG. 2. In this embodiment, the driving device 100 'includes a stator module 130, a rotor module 120, a pressure-resistant gel 140, and a casing 110'. The rotor module 120 is disposed in the stator module 130 and is adapted to rotate relative to the stator module 130. The rotor module 120 includes a rotation shaft 122. The rotor module 120 is located outside the rotating shaft 122 and the stator module 130 is located inside the housing 110 ', and the housing 110' is under normal pressure. In this embodiment, the casing 110 'includes an upper cover 112', a lower cover 114 ', and a side casing 116', and the rotating shaft 122 protrudes from the upper cover 112 'of the casing.

In this embodiment, the pressure-resistant gel 140 is filled between the stator module 130 and the side case 116 'of the housing 110', and the pressure-resistant gel 140 covers at least a part of the stator module 130. In this embodiment, the pressure-resistant gel 140 covers the entire outside of the stator module 130, so that only the inner surface of the stator module 130 is not covered by the pressure-resistant gel 140, and the inner surface of the stator module 130 is flush with The inner surface of the pressure-resistant colloid 140. Of course, in one embodiment, the pressure-resistant gel 140 may only cover a part of the stator module 130, or the inner surface of the stator module 130 may be higher or lower than the inner surface of the pressure-resistant gel 140.

In this embodiment, the upper cover 112 'is disposed on the upper side of the pressure-resistant gel 140 and the side case 116', and has a through hole, and the rotating shaft 122 of the rotor module 120 passes through the through hole. The lower cover 114 'is disposed below the pressure-resistant gel 140 and the side case 116'. The two bearing members 124 are sleeved on the rotating shaft 122 and are interposed between the rotating shaft 122 and the upper cover 112 'and between the rotating shaft 122 and the lower cover 114'. The upper cover 112 'and the lower cover 114' are fixed to the side case 116 'by, for example, locking, engaging or bonding, but the manner in which the upper cover 112' and the lower cover 114 'are fixed to the side case 116' is not limited thereto. The material of the upper cover 112 ', the lower cover 114', and the side case 116 'is, for example, metal, but it is not limited thereto.

It is worth mentioning that, in this embodiment, for example, the flame-resistant thermally conductive epoxy resin can be used for the pressure-resistant gel 140. The flame-resistant thermally conductive epoxy resin has a tensile strength of about 9850 psi and a compressive strength. ) Is about 15000 psi and can withstand negative or high pressure. Therefore, in this embodiment, the pressure-resistant colloid 140 and the covered stator module 130 can form a pressure-resistant cavity together, and the pressure-resistant cavity is suitable for withstanding a pressure greater than or equal to 0 atmospheres and less than 100 atmospheres. In other words, the pressure-resistant cavity can withstand a pressure greater than the pressure in the cavity 20 (FIG. 1). Since the space surrounded by the stator module 130 and the pressure-resistant gel 140 of the driving device 100 'will communicate with the internal space 22 of the cavity 20, a part of the gas in the cavity 20 will pass through the gap 23 (Fig. 1) and enter the pressure-resistant gel. The space surrounded by 140 and the covered stator module 130 makes the space surrounded by the pressure-resistant gel 140 and the covered stator module 130 equal pressure with the internal space 22.

Since the pressure-resistant gel 140 can withstand high pressure, it will not be deformed or damaged due to pressure, and the space between the pressure-resistant gel 140, the upper cover 112 ', and the lower cover 114' can be maintained at a high pressure. Therefore, there is no need to provide a shaft seal between the rotating shaft 122 and the cavity of the driving device 100 'in this embodiment, which is quite convenient. The high-pressure resistance of the pressure-resistant colloid 140 allows the driving device 100 'to maintain normal operation under high pressure. Of course, the pressure-resistant cavity 140 can also be used under normal pressure or negative pressure. That is, when the internal space 22 of the cavity 20 is under a negative pressure or normal pressure, the pressure-resistant gel 140 can also be correspondingly under a negative pressure or normal pressure, while still maintaining good structural strength.

It is to be noted that, in this embodiment, the upper cover 112 'of the housing 110' of the driving device 100 'and the cavity 20 can be sealed through, for example, an O-ring, so that the inside of the cavity 20 The high-pressure fluid will not leak or the external pressure will not flow into the cavity 20 showing negative pressure.

In addition, in the present embodiment, the driving device 100 'is disposed outside the cavity 20 at a position outside the cavity 20 and is located in an environment of normal pressure (generally, atmospheric pressure) and normal temperature. More specifically, the outer surface of the pressure-resistant colloid 140, the outer surface of the side shell 116 ', the upper cover 112', and the outer surface of the lower cover 114 'are located under normal pressure. Since the pressure-resistant colloid 140 can withstand negative pressure, high pressure, and / or pressure difference, the inner surface of the pressure-resistant colloid 140 is subjected to negative pressure or high pressure, and the outer surface of the pressure-resistant colloid 140 is normal pressure. The pressure-resistant colloid 140 can still have sufficient It is rigid and can protect the covered stator module 130.

In addition, in this embodiment, the heat distortion temperature of the flame retardant and thermally conductive epoxy resin is about 155 ° C, and the operating temperature may be between -60 ° C and 200 ° C. The above characteristics can withstand the high temperature of the driving device 100 ′ during operation or the temperature transmitted from the cavity 20 (FIG. 1). In addition, the thermal conductivity of the flame-resistant thermally conductive epoxy resin is, for example, 15 btu * in / hr * ft ² * ° F, so that the heat generated by the driving device 100 ′ during operation or transmitted from the cavity 20 The heat can be quickly discharged to the outside world.

Furthermore, since the substance baked in the cavity 20 of the defoaming oven system 1 (FIG. 1) may have chemical volatiles, under such heating conditions and various factors (such as volatilization) in the environment of the defoaming oven system 1 Particles, seaside environment, etc.) may cause adverse effects on the driving device, making the driving device unable to operate stably for a long time. In this embodiment, the material selected for the pressure-resistant colloid 140 of the driving device 100 'can be corrosion-resistant, waterproof, and dust-proof, and can be applied to the above-mentioned severe use environment. In addition, the flame-retardant and thermally-conductive epoxy resin used in this embodiment passed the test of UL94 V-0. The flame retardancy is good, and the insulation constant at 60 Hz is about 5.6, which is good for circuit confidentiality.

In addition, the Shore D hardness of the flame-retardant and heat-conductive epoxy resin used in this embodiment is about 90, and the hardness of the pressure-resistant gel 140 is large, which can protect the stator module 130 and the stator module. 130 的 轮 模 120。 130 within the rotor module 120. In other words, in addition to the housing 110 'of the driving device 100', the pressure-resistant gel 140 can also provide good protection for internal components. Of course, the material of the pressure-resistant colloid 140 is not limited to this, as long as a colloidal curing material that can have a high thermal conductivity, high hardness, and pressure resistance can be used as the material of the pressure-resistant colloid 140.

Please refer to FIG. 3. The main difference between the driving device 100 of FIG. 3 and the driving device 100 ′ of FIG. 2 is that at least part of the pressure-resistant gel 140 of the driving device 100 of FIG. 3 is exposed. More specifically, in this embodiment, the entire outer surface of the pressure-resistant colloid 140 is exposed. That is, the casing 110 of the driving device 100 does not have a side casing 116 ′ (FIG. 2), and the pressure-resistant colloid 140 has sufficient strength to be used as a part of the casing 110 to protect the outside of the stator module 130 and the rotor module 120, and It has the advantages of small weight and low cost.

It is worth mentioning that, in this embodiment, since the outer surface of the entire pressure-resistant colloid 140 is exposed, the outer surface of the pressure-resistant colloid 140 is located at normal temperature and pressure. When the defoaming oven system 1 is operating, the pressure-resistant gel 140 can not only withstand the pressure difference between the inside and the outside, the heat of the driving device 100 during operation can be transmitted to the outside very quickly, and the user can easily test the pressure-resistant gel 140 or even The temperature of the stator module 130 is convenient for monitoring.

Please refer to FIG. 4. The main difference between the driving device 100 a of FIG. 4 and the driving device 100 ′ of FIG. 2 is that, in this embodiment, the side case 116 includes a hole groove 118, and the pressure-resistant gel 140 is exposed outside the hole groove 118. The side shell 116 covers the outer surface of the partial pressure-resistant colloid 140 only because it has holes and grooves 118. Therefore, compared with a complete metal side shell, the driving device 100a of this embodiment can have a smaller weight and a lower cost. In addition, the outer surface of the partial pressure-resistant gel 140 is exposed, so that heat can be directly transmitted.

In addition, in the present embodiment, the driving device 100 a further optionally includes a temperature sensor 150 and a transmission line 152. The temperature sensor 150 can be attached to the pressure-resistant gel 140 or embedded in the pressure-resistant gel 140 to be thermally coupled to the pressure-resistant gel 140. The transmission line 152 is connected to the temperature sensor 150 and passes through the hole groove 118 to be connected to the outside. In other words, the hole groove 118 of the side case 116 can also be used for the transmission line 152 of the sensor (for example, the temperature sensor 150, but not limited) to pass through, so that the configuration of the sensor is more convenient.

Please refer to FIG. 5. The main difference between the driving device 100 b in FIG. 5 and the driving device 100 a in FIG. 4 is that, in this embodiment, a part of the side shell 116 b surrounding the stator module 130, and the pressure-resistant gel 140 b covering the stator module 130 Another part. The outer surface of the pressure-resistant colloid 140b and the outer surface of the side shell 116b are located under normal pressure. More specifically, the side case 116b surrounds the central portion of the stator module 130, and the pressure-resistant gel 140b covers both ends of the stator module 130. Generally, the coil 132 is exposed at both ends of the stator module 130, and it is hot during operation. The designer can also cover the two parts with a pressure-resistant gel 140b and directly expose it. Of course, the relative position of the side shell 116b and the pressure-resistant gel 140b is not limited thereto.

To sum up, the space between the stator module and the pressure-resistant colloid of the driving device of the defoaming oven system created by the new creation is connected to the internal space of the cavity. Because the pressure-resistant gel can withstand negative pressure, high pressure and pressure Poor, there is no need to set a shaft seal to block between the rotating shaft and the cavity, and the driving device can be located outside the cavity and directly under normal pressure. In addition, the stator module is at least partially covered by the pressure-resistant gel, and can be protected by the pressure-resistant gel.

Although this new type of creation has been disclosed in the above examples, it is not intended to limit the new type of creation. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of this new type of creation. Retouching, so the protection scope of this new type of creation shall be determined by the scope of the attached patent application.

1‧‧‧ defoaming oven system
20‧‧‧ Cavity
22‧‧‧Internal space
23‧‧‧ Gap
24‧‧‧Heating unit
26‧‧‧fan
30‧‧‧Heat exchanger
40‧‧‧Pu
50‧‧‧ fluid content sensor
60‧‧‧ booster cylinder
70‧‧‧solenoid valve
80‧‧‧ Regulating valve
90‧‧‧ fluid supply source
100, 100a, 100b, 100'‧‧‧ drive
110, 110a, 110b, 110'‧‧‧ shell
112, 112a, 112'‧‧‧ Upper cover
114, 114a, 114'‧‧‧ lower cover
116, 116b, 116'‧‧‧ side shells
118‧‧‧ hole slot
120‧‧‧rotor module
122‧‧‧Shaft
124‧‧‧ pieces
130‧‧‧Stator module
132‧‧‧coil
134‧‧‧Electronic core
140, 140b ‧ ‧ ‧ pressure colloid
150‧‧‧Temperature sensor
152‧‧‧Transmission line

FIG. 1 is a schematic diagram of a defoaming oven system according to an embodiment of the present invention.
2 to 5 are schematic diagrams of driving devices of various defoaming oven systems according to various embodiments of the present invention.

Claims (9)

A defoaming oven system includes:
A cavity having an internal space, wherein a fluid is adapted to enter and exit the internal space;
A heating unit configured in the cavity;
A fan configured in the cavity; and a driving device including:
Stator module
A rotor module is disposed in the stator module and is adapted to rotate relative to the stator module. The rotor module includes a rotating shaft, the rotating shaft includes an extension section, and the driving device is in the extension section. The other parts are arranged outside the cavity and under normal pressure, and the extension section of the rotating shaft extends into the cavity to be connected to the fan; and a pressure-resistant gel covering at least part of the space. The stator module, wherein a space surrounded by the stator module and the pressure-resistant gel is connected to the internal space of the cavity. The defoaming oven system according to item 1 of the patent application scope, wherein the driving device further includes:
An upper cover is disposed on the upper side of the pressure-resistant gel, and the rotating shaft of the rotor module passes through the upper cover;
A lower cover is disposed on the lower side of the pressure-resistant colloid; and two bearing parts are sleeved on the rotating shaft and interposed between the rotating shaft and the upper cover and between the rotating shaft and the lower cover , Wherein the outer surface of the pressure-resistant gel, the outer surface of the upper cover and the outer surface of the lower cover are located under normal pressure. The defoaming oven system according to item 2 of the patent application scope, wherein the driving device further includes:
A side case, the upper cover and the lower cover are respectively fixed to the side case, the pressure-resistant gel is filled between the stator module and the side case, and the side case is located under normal pressure. The defoaming oven system according to item 1 of the patent application scope, wherein the entire outer surface of the pressure-resistant colloid is exposed, and the outer surface of the pressure-resistant colloid is located under normal pressure. The defoaming oven system according to item 1 of the patent application scope, wherein the driving device further includes:
The side shell includes a hole and a groove, the side shell covers a part of the outer surface of the pressure-resistant gel, a part of the pressure-resistant gel exposed outside the hole and the groove, and the side shell is located under normal pressure. The defoaming oven system according to item 1 of the patent application scope, wherein the driving device further includes:
The side shell surrounds a part of the stator module, the pressure-resistant gel body covers another part of the stator module, and the outer surface of the pressure-resistant gel body and the outer surface of the side shell are located under normal pressure. The defoaming oven system described in item 1 of the patent application scope further includes:
A pressure supply module is connected to the internal space to provide the fluid to and from the cavity. The defoaming oven system described in item 1 of the patent application scope further includes:
The cooling module is disposed outside the cavity and communicates with the internal space. The fluid in the internal space is suitable for flowing to the cooling module to cool down before flowing back to the internal space. The defoaming oven system described in item 1 of the patent application scope further includes:
The fluid content sensor is disposed outside the cavity and communicates with the internal space.