TWM581592U - Microchannel chip having curved flowing path, and microchannel structure - Google Patents

Abstract

This creation is a microfluidic channel structure with curved flow channels, including: a first end and a second end detection section, where the first end is used to receive the microfluid sample, and the second end is used to discharge the tested Or a processed microfluid sample; a slow-flow section having a third end and a fourth end, wherein the third end is connected to the second end and is used to receive the microfluid sample that has been tested or processed, and the fourth end is used to The inspected or processed microfluidic sample is discharged to the recovery area; and the slow flow main channel is located between the third end and the fourth end to reduce the speed of receiving the inspected or processed microfluidic sample at the third end.

Description

Micro-flow channel wafer with curved flow channel and micro-flow channel structure

This creation is about a micro-channel chip and a micro-channel structure that increases the capture rate of biological material, especially a micro-channel chip and a micro-channel structure with a curved channel.

Cancer arises from genetic mutations that cause abnormal cell proliferation and has long been a serious medical problem. Cells that mutate will fall off from the tumor's primary site and enter the blood circulation system in the early or advanced stages of cancer definition. Circulating tumor cells (CTC) are considered. CTC is considered to cause tumors. The necessary prerequisite for distant metastasis, because tumors are mostly localized diseases of the organs, but they will almost always spread to the distant organs through the bloodstream, forming metastases. Such distant metastases are the main cause of death of tumor patients. The accurate counting of CTC and molecular markers are important indicators for the post-healing judgment and efficacy evaluation of tumor patients.

The severity of the tumor itself is related to the dynamic change in the number of CTCs, so it can be used for early in vitro diagnosis, rapid evaluation of drug selection, and personalized treatment. However, CTCs are rare cells that are difficult to collect. There is only one CTC per ¹⁰⁹ blood cells, making it difficult to detect and isolate CTCs technically. Therefore, a centralized collection method must be used to effectively detect and isolate CTCs.

One example of the current centralized collection method is the use of highly overexpressing cell surface biomarkers, such as epithelial cell adhesion molecules (EpCAM), that are highly specific and sensitive to CTC. Nagrath et al. (Nature 2007, 450: 1235-9) developed anti-EpCAM antibody-coated microfluidic wafers for CTC detection and collection. However, the drawback of the above technique is the low detection rate of pure CTC, which is attributed to the non-specific binding of blood cells to anti-EpCAM antibodies.

Despite advances in the technology for detecting and isolating CTCs, more specific and effective methods are needed to detect, purify, and release CTCs and other biological substances for further cultivation and characterization.

The reason for this is that the applicant, in view of the lack of known technology, has carefully studied and researched, and has persevered in his spirit, and finally created this case "Microchannel Chips and Microchannel Structures with Curved Channels", In order to improve the lack of the above-mentioned conventional techniques.

This creation is a new type of microfluidic system, which includes a microfluidic wafer and beads located in the microfluidic wafer and capable of grasping circulating tumor cells to separate circulating tumor cells from blood cells. In addition, the created microfluidic wafer includes a curved slow-flow section, which can increase the fluid resistance in the microfluidic channel to slow down the flow velocity of the microfluidic sample in the microfluidic structure and increase the grasping rate of the beads.

The principle of the created microfluidic system is to use the characteristics of surface antigens of circulating tumor cells and antibodies implanted on the surface of beads to capture. The largest contact area in the bit volume is followed by the fluid resistance of the microchannel structure and the curved structure that causes turbulence, which causes the circulating tumor cells to rotate or roll and increases the chance of contact with the beads to enhance the grasping effect. The special design of the microchannel structure reduces the non-specific binding of blood cells to anti-EpCAM antibodies.

One aspect of this creation is to provide a microfluidic wafer including: a substrate; a body having a first surface and a second surface, wherein the second surface is closely covered on the substrate; and a microfluidic channel The structure is embedded in the second surface, so that the microfluidic channel structure forms a microfluidic channel between the body and the substrate for a blood sample to flow in the microfluidic channel structure. The microfluidic channel structure includes: A slow-flow section has a slow-flow main channel, and the slow-flow main channel is a labyrinth structure for reducing the flow velocity of the blood sample in the micro-flow channel structure.

Another aspect of this creation is to provide a structural body for passing a microfluid sample through the microfluidic structure to be inspected or processed. The structural body includes a detection section with a first end. And a second end, wherein the first end is used to receive the microfluid sample, and the second end is used to discharge the microfluid sample that has been tested or processed; a slow-flow section having a third end and a A fourth end, wherein the third end is connected to the second end and is used to receive the microfluid sample that is inspected or processed, and the fourth end is used to discharge the microfluid sample that is inspected or processed to a recovery area And a slow-flow main channel located between the third end and the fourth end to reduce a speed at which the third end receives the microfluidic sample that has been examined or processed.

In order to make the above and other purposes, features, and advantages of this creation more obvious and easy to understand, the preferred embodiments are described below in conjunction with the accompanying drawings for a detailed description. Bright.

10‧‧‧Micro channel chip

100‧‧‧ substrate

200‧‧‧ Ontology

210‧‧‧first surface

220‧‧‧ second surface

300‧‧‧Micro channel structure

310‧‧‧ Blood sample entrance

320‧‧‧ Expansion Section

330‧‧‧Resistance section

340‧‧‧ Detection section

341‧‧‧ the first end

343‧‧‧second end

350‧‧‧ Slow stream section

351‧‧‧ the first end

352‧‧‧ Mainstream

353‧‧‧second end

360‧‧‧ blood sample export

40‧‧‧ beads

50‧‧‧Micro channel structure

500‧‧‧ structure ontology

510‧‧‧Microfluid sample inlet

520‧‧‧Increase resistance section

530‧‧‧ Detection section

540‧‧‧ Slow section

541‧‧‧ Slow Mainstream

550‧‧‧Microfluidic sample outlet

60‧‧‧ Beads

Figure 1 (A) is a schematic top view of the creative microfluidic wafer; Figure 1 (B) is a schematic top view of another embodiment of the creative microfluidic wafer; Figure 2 (A) is the first (A) A schematic diagram of the vertical section of AA 'in the picture; Figure 2 (B) is a schematic diagram of the vertical section of A-A' in Figure 1 (B); Figure 3 (A) is the micro-picture of the creative work Schematic diagram of setting up beads in the detection section of the flow channel chip; Figure 3 (B) is a schematic diagram of setting up beads in the detection section of another embodiment of the creative micro flow chip; Figure 4 is the creation The schematic diagram of the microchannel structure in another embodiment of the invention; FIG. 5 is a result chart of the recovery efficiency and detection limit of the microfluid-free system; Result chart; Figures 7 (A) -7 (C) are the image results of the separation results of the blood sample through the microchannel wafer of this creation.

The following describes the embodiments of the "microchannel chip and microchannel structure with curved channel" in this case. Please refer to the drawings, but the actual configuration and the method adopted do not have to completely conform to the described Content, those skilled in the art can make various changes and modifications without departing from the actual spirit and scope of the case.

An example of this creation is the separation of circulating tumor cells from the blood. The microfluidic chip has a plurality of transparent beads inside. When the beads capture the circulating tumor cells, the circulating tumor cells will be separated from the blood and positioned in the detection section, and the remaining normal blood cells will flow out from the outlet. Instead, it flows into the waste storage tank. In order to capture and isolate circulating tumor cells in the blood, the substance coated on the surface of the beads is preferably an antibody against epithelial cell adhesion molecules (Epithelial Cell Adhesion Molecule, EpCAM).

Please refer to Figures 1 (A), 1 (B), 2 (A), 2 (B), 3 (A), and 3 (B), which are schematic top views of the microfluidic wafer and the extension A- A 'is a schematic longitudinal sectional view. The created microfluidic wafer 10 includes a bead 40, a substrate 100, a body 200, and a microfluidic structure 300. The body 200 has a first surface 210 and a second surface 220 opposite to the first surface 210. The microchannel structure 300 is embedded in the second surface 220 of the body 200, and the second surface 220 is closely covered on the substrate 100. The microfluidic channel structure 300 is formed between the body 200 and the substrate 100.

The bead created here is especially a large bead with a particle size of 100-200 μm. When the microfluid sample flows through the bead, the bead can capture the biological material in the microfluid sample that can react with the reactive material on the bead surface, Can release the captured biological material for further research and testing. The reaction substance coated on the surface of the beads contains (1) a releasable composition that releases or removes non-specific blood cells and other blood components such as proteins; (2) a biologically active composition that captures biological substances; or (3) a linker Linking molecules to releasable and biologically active components.

The created microfluidic structure 300 includes blood sample inlet 310, expansion section 320, resistance increasing section 330, detection section 340, and Flow section 350 and blood sample outlet 360.

The original blood sample inlet 310 extends from the first surface 210 to the second surface 220 of the body 200 for blood samples to enter the flow channel. The blood sample inlet 310 may be a circular hole or a polygonal hole, preferably a circular hole. The diameter of the blood sample inlet 310 of this creation is between 0.8-1.2mm, and it can accommodate a syringe with an 18-21G needle (about 0.7-0.9mm).

One end of the creative expansion section 320 is connected to the blood sample inlet 310 and the other end is connected to the resistance increasing section 330. The aperture of the expansion section 320 may be circular or polygonal, preferably square. The width of this creative expansion section 320 is between 0.8-1.5mm, and the depth is 1mm.

One end of the creative resistance increasing section 330 is connected to the second end 322 of the expansion section 320, and the other end is connected to the detection section 340. The aperture of the resistance increasing section 330 may be circular or polygonal, preferably square. The width of the resistance-increasing section 330 is 250-500 μm, and the depth is 1 mm.

The creative detection section 340 includes a first end 341 and a second end 343. The first end 341 is connected to the resistance increasing section 330, and the second end 343 is connected to the slow flow section 350, which can adsorb circulating tumor cells in the blood. The bead 40 is disposed in the detection section 340 (as shown in Figs. 3 (A) and 3 (B)). The aperture of the detection section 340 may be circular or polygonal, preferably square. In the embodiment of the present invention, the aperture of the detection section 340 is square. The depth of the detection section 340 is the particle size of the bead 40 plus 20-50 μm, so the depth of the detection section 340 is between 120-250 μm. The width of the detection section 340 is only required to allow the bead 40 to pass through, so it is between 250 μm and 1.5 mm.

The creative slow-flow section 350 includes a first end 351, a slow-flow main channel 352, and a second end 353. The first end 351 of the slow-flow section 350 is connected to the second end 343 of the detection section 340. The slow-flow area The second end 353 of the segment 350 is connected to the blood sample outlet 360, and the slow-flow main channel 352 is located between the first end 351 and the second end 353. The slow-flow main channel 352 may be a straight-line structure (not shown) or a labyrinth (as shown in Figures 1 (A) and 3 (A)), preferably a repeatedly-bent structure. Runner. The aperture of the slow-flow section 350 may be circular or polygonal, preferably square. In the present creative embodiment, the aperture of the slow-flow section 350 is square. The width of the first end 351 and the slow-flow main channel 352 of the slow-flow section 350 may be equal to or smaller than the width of the second end 343 of the detection section 340, and the first end 351 and the slow-flow main channel of the slow-flow section 350 The depth of 352 is smaller than the depth of the detection section 340. In order to accelerate the blood sample passing through the slow-flow main channel 352 to leave the micro-flow channel structure 300, the pore diameter of the second end 353 of the slow-flow section 350 is larger than the pore diameter of the slow-flow main channel 352 (such as the first (A), 2 (A) And 3 (A)). In another embodiment, the aperture of the second end 353 of the slow-flow section 350 may also be equal to the aperture of the slow-flow main channel 352 (as shown in Figures 1 (B), 2 (B), and 3 (B)). . The width of the slow-flow section 350 of this creation is between 150-250 μm, and the depth of the first end 351 of the slow-flow section 350 and the slow-flow main channel 352 is between 50-100 μm.

In order to stabilize the flow velocity of the blood sample in the microchannel chip 10, this creation is specially designed: (1) the depth of the slow-flow section 350 is smaller than the depth of the second end 343 of the detection section 340 (such as section 2 (A) And 2 (B)); and (2) the structure of the slow-flow main channel 352 is a repeatedly bent structure (as shown in FIGS. 1 (A) and 1 (B)). The above-mentioned special design can increase the fluid resistance in the micro-channel wafer 10, so that the blood sample is in the micro-channel wafer 10 The flow velocity in the medium is reduced, so that the blood sample will not have uneven flow rate due to the increased pressure or unstable force when injected from the blood sample inlet 310, which can ensure that the circulating tumor cells always have the same flow rate when passing through the main area 342. , Thereby increasing the probability of circulating tumor cells adsorbing to the beads 40.

The slower the flow rate of the blood sample, the higher the adsorption efficiency of the beads 40. Table 1 shows the effect of the depth of the slow flow section 350 on the adsorption of biological substances in the blood sample by the beads 40.

It can be known from Table 1 that when the depth of the slow-flow section 350 is 100 μm, the adsorption efficiency of the beads 40 is 10-20%, and when the depth of the slow-flow section 350 is 50 μm, the The adsorption efficiency is 88%. Therefore, the smaller the depth of the slow-flow section, the smaller the cross-sectional area of the slow-flow section 350, and the lower the flow velocity and the flow rate of the blood sample in the micro-channel structure 300, which can increase the adsorption efficiency of the beads 40.

One end of the creative blood sample outlet 360 is connected to the second end 353 of the slow flow section 350, and the other end extends from the second surface 220 to the first surface 210 of the body 200. Blood cells not captured by the bead 40 will flow to the waste liquid recovery area (not shown) through the blood sample outlet 360. The blood sample outlet 360 may be a round hole or a square hole, preferably a round hole, and its diameter is between 0.8-1.2 mm.

The following table 2 is a preferred embodiment of the particle diameter of the bead 40 and the pore diameter of each section in the microchannel structure 300.

The material of the substrate 100 can be acrylic (polymethylmethacrylate, PMMA), polyethylene terephthalate (PET), polycarbonate (PC), or polydimethylsiloxane ( polydimethylsilicon (PDMS), silicone, rubber, plastic or glass. The material of the body 200 may be acrylic (polymethylmethacrylate (PMMA)), polyethylene terephthalate (PET), polycarbonate (PC), polydimethylsilicon (PDMS), silicone, rubber or plastic. When selecting materials for the substrate 100 and the body 200, the material characteristics between the substrate 100 and the body 200 must be considered. In the embodiment of the present invention, the substrate 100 is glass, and the body 200 is polydimethylsiloxane.

The material of the bead body 40 is transparent plastic or transparent resin. The microfluidic sample may be a body fluid or a bacterial fluid, and the body fluid includes blood, cerebrospinal fluid, various digestive fluids, semen, saliva, sweat, urine, vaginal fluid, or a solution containing biological substances. Biological substances include CTC, CTC circulating stem cells (such as tumor stem cells, liver stem cells, and bone marrow stem cells), fetal cells, bacteria, viruses, epithelial cells, endothelial cells, or other biological substances. Therefore, depending on the object to be grasped, the substance coated on the bead surface is also different.

The present invention further provides another embodiment of the microchannel structure 50, as shown in FIG. The microchannel structure 50 contains beads 60 and has a structure body 500. The structure body 500 includes a microfluid sample inlet 510, a resistance increasing section 520, a detection section 530, a slow flow section 540, and The fluid sample outlet 550, wherein the bead 60 is located in the detection section 530, and the slow flow section 540 has a slow flow main channel 541 which is a repeatedly bent structure to reduce the velocity of the microfluid sample in the micro flow channel structure 50. After the microfluidic sample enters from the microfluidic sample inlet 510, it can directly enter the detection section 530 through the resistance increasing section 520, and the beads 60 in the detection section 530 capture the biological material in the microfluidic sample to After the microfluid sample is inspected or processed, The flow section 540 finally exits the microchannel structure 50 from the microfluid sample outlet 550.

The method of preparing the micro-fluidic wafer of this creation is to first use a 3D printer to print a master mold. The master mold is a light-curing resin, which is rinsed with 95% alcohol, and then cured by UV light for 2 minutes. Bake for 10 minutes. The food-grade material PDMS liquid was poured into the master mold in proportion to the curing process for 50 minutes and 80 degrees, and then bonded to the glass substrate with an oxygen plasma machine.

Experimental example

Study on the Circulating Tumor Cell Beads in Cultured Circulating Tumor Cells

1. Recovery efficiency and detection limit of large beads (200 microns in diameter) in microfluid-free systems

Put 10, 1,000, and 100,000 circulating tumor cells and beads and 1 mL of physiological saline buffer solution (simulating blood environment) into a centrifuge tube, and fully circulate the tumor cells and beads in physiological saline buffer solution. After mixing, observe the grasping efficiency of the beads. According to Figure 5, the experimental results show that only in the experimental group of 100,000 circulating tumor cells, 1.5% cells (about 1500) were captured by the beads, but the experiments with 10 and 1000 circulating tumor cells In the group, the beads did not capture any circulating tumor cells, which means that the blood environment of less than 1000 circulating tumor cells, the beads could not capture any circulating tumor cells.

2.Recycling efficiency and detection limit of large beads (200 microns in diameter) in the microchannel wafer

10, 50, 100, 500, and 1000 circulating tumors were swollen The tumor cells were mixed with 1 mL of physiological saline buffer solution, and the mixed liquid sample was passed through the beads in the microchannel wafer of this creation, and the grasping efficiency of the beads was observed. According to Figure 6, the experimental results show that using the microfluidic wafer of this creation, a liquid sample containing more than 50 circulating tumor cells can be grasped, compared to the result without microfluidic system processing (it takes 100,000 cells to (Captured, as shown in Figure 6), the detection limit is significantly reduced by 2000 times, and the recycling efficiency of the micro-fluidic wafers created by this creation is on average higher than 5%, which is about 3 times higher than the recycling efficiency of the microfluid-free system .

When an average of about 50 circulating tumor cells in the blood of a human body per 10 mL, it means that the person has a high risk of cancer. Therefore, this experiment proves that only large beads (200 micrometers in diameter) cannot distinguish the risk of human cancer. However, large beads combined with the microchannel chip created by this method can effectively and accurately capture circulating tumor cells in the blood, which can Find out faster if you have cancer.

Please refer to Figures 7 (A) -7 (C), which are the separation results of the microfluidic wafers created by the actual staining of blood samples of cancer patients, where green is circulating tumor cells and red is white blood cells. Figure 7 (A) shows that circulating tumor cells (green dots) are captured on transparent beads, and Figure 7 (B) is white blood cells (red dots). After incorrect capture, Figure 7 (C) is Figures 7 (A) and 7 (B) are synthesized to obtain the positions of all captured cells. This experiment demonstrates the results exhibited by patients with stage II cancer in the microfluidic chip of this creation. The results show that about 13 circulating tumor cells were captured, and only 3 white blood cells were captured (because of 1mL of blood in the human body) The number of white blood cells is between about 10 ⁶ and 10 ^7. According to strict definition, it is estimated by 10 ⁶ white blood cells, that is, only 3 white blood cells are captured by one million white blood cells, which is far lower than the current FDA proof. Cellsearch instrument's catch rate (10 ⁶ white blood cells caught about 3000 ~ 4000)). In addition, the results of this experiment took only 30 minutes from the blood sample acquisition to the imaging results display, compared with the previous pre-processing and circulating tumor cell separation to read the imaging results in 6-9 hours, which is much shorter in time. Therefore, using the microfluidic chip of this creation can effectively capture a small amount of circulating tumor cells in the blood, has a very low error rate, and the result can be obtained in only 30 minutes, so the microfluidic chip of this creation It can be used as a quick-screen biochip for preliminary detection of cancer.

Other embodiments

A microfluidic wafer comprising: a substrate; a body having a first surface and a second surface, wherein the second surface is closely covered on the substrate; and a microfluidic structure is embedded in the microfluidic channel. A second surface, so that the microchannel structure forms a microchannel between the body and the substrate for a blood sample to flow in the microchannel structure, wherein the microchannel structure includes a slow flow section It has a slow-flow main channel, which is a labyrinth structure that is used to reduce the flow velocity of the blood sample in the micro-flow channel structure.

2. The micro-flow channel wafer according to embodiment 1, further comprising a detection section, and the slow-flow section further includes a first end and a second end, wherein the first of the slow-flow section is The detecting end is connected to the detecting section, wherein the detecting section is used to test or process the blood sample, and the tested or processed blood sample is discharged, and the first end of the slow-flow section is used to receive the tested section. Or process the blood sample.

3. The micro-flow channel wafer according to embodiment 2, wherein the detection section has a first depth, the slow-flow section has a second depth, and the first depth is greater than the A second depth to reduce the flow velocity of the blood sample in the microchannel structure.

4. The microchannel wafer according to embodiment 3, further comprising a blood sample outlet having a diameter, connected to the second end of the slow-flow section, and extending from the second surface of the body to the The first surface is used to discharge the blood sample that has been tested or processed out of the microchannel structure, wherein the diameter is 0.8-1.2mm, the first depth is 120-250 μm, and the second depth is 50-100 μm.

5. The micro-channel wafer according to embodiment 1, wherein the material of the substrate is polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), and polycarbonate (polycarbonate, PC), polydimethylsilicon (PDMS), silicone, rubber, plastic or glass, and the material of the body is polymethylmethacrylate (PMMA), polyethylene terephthalate , PET), polycarbonate (PC), polydimethylsilicon (PDMS), silicone, rubber or plastic.

6. The micro-channel wafer according to embodiment 1, wherein the first surface is disposed opposite to the second surface.

7. A microfluidic channel structure including a structural body for passing a microfluid sample through the microfluidic channel structure to be inspected or processed, wherein the structural body includes: a detection section having a first And a second end, wherein the first end is used to receive the microfluid sample, and the second end is used to discharge the microfluid sample that has been examined or processed; a slow-flow section having a third end and A fourth end, wherein the third end is connected to the second end and is used to receive the microfluid sample that has been tested or processed, and the The fourth end is used to discharge the microfluid sample that has been tested or processed to a recovery area; and a slow-flow main channel is located between the third end and the fourth end to reduce the acceptance of the third end by the third end. A velocity of the microfluidic sample to be examined or processed.

8. The microchannel structure according to embodiment 7, wherein the slow-flow main channel is a labyrinth structure, and the microfluid sample is a body fluid or a bacterial fluid.

9. The microfluidic channel structure according to embodiment 7, further comprising a microfluid sample outlet connected to the fourth end of the slow-flow section, wherein the fourth end is used to connect the microfluids that have been inspected or processed. A fluid sample is discharged to the recovery area via the microfluidic sample outlet.

10. The micro-channel structure according to embodiment 9, wherein: the width of the first end is 250 μm-1.5 mm and the depth is 220-250 μm; the width of the second end is 150-250 μm and the depth is 220-250 μm; The third end has a width of 150-250 μm and a depth of 50-100 μm; and a diameter of the micro-fluid sample outlet is 0.8-1.2 mm.

In summary, the new model can indeed use a novel concept to match the microfluidic chip and large beads created by this invention, which can effectively capture a small amount of circulating tumor cells in the blood and reduce the rate of error. To determine the occurrence of cancer at an early stage. In addition, the created microfluidic wafer includes a curved slow-flow section, which can increase the fluid resistance in the microfluidic channel to slow down the flow velocity of the microfluidic sample in the microfluidic structure and ensure the biological material to be grasped. The same flow rate is always passed through the bead area to increase the grasp rate of the bead to grasp the biological material. Therefore, those who are familiar with this technique can be modified by various techniques, but they are not inferior to those who want to protect the scope of patent application.

Claims (10)

A microfluidic wafer includes: a substrate; a body having a first surface and a second surface, wherein the second surface is closely covered on the substrate; and a microfluidic structure is embedded in the second On the surface, the microchannel structure is formed between the body and the substrate to form a microchannel for a blood sample to flow in the microchannel structure, wherein the microchannel structure includes a slow-flow section having A slow-flow main channel is a labyrinth structure, which is used to reduce the flow velocity of the blood sample in the micro-flow channel structure. The micro-flow channel chip described in item 1 of the patent application scope further includes a detection section, and the slow-flow section further includes a first end and a second end, wherein the first One end is connected to the detection section, wherein the detection section is used to test or process the blood sample, and the blood sample that is tested or processed is discharged, and the first end of the slow-flow section is used to receive the test section. Test or process the blood sample. The micro-channel chip as described in the second item of the patent application scope, wherein the detection section has a first depth, the slow-flow section has a second depth, and the first depth is greater than the second depth to reduce The flow velocity of the blood sample in the microchannel structure. The micro-fluidic wafer as described in item 3 of the scope of patent application, further comprising a blood sample outlet having a diameter, connected to the second end of the slow-flow section, and extending from the second surface of the body to The first surface is used to discharge the blood sample that has been tested or processed out of the microchannel structure, wherein the diameter is 0.8-1.2mm, the first depth is 120-250 μm, and the second depth is 50-100 μm . The micro-fluidic wafer as described in item 1 of the patent application scope, wherein the material of the substrate is polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), and polycarbonate (PC), polydimethylsilicon (PDMS), silicone, rubber, plastic or glass, and the material of the body is polymethylmethacrylate (PMMA), polyethylene terephthalate (polyethylene terephthalate (PET), polycarbonate (PC), polydimethylsilicon (PDMS), silicone, rubber or plastic. The micro-flow channel wafer according to item 1 of the patent application scope, wherein the first surface is disposed opposite to the second surface. A microfluidic channel structure includes a structural body for passing a microfluid sample through the microfluidic channel structure to be inspected or processed, wherein the structural body includes: a detection section having a first end and A second end, wherein the first end is used to receive the microfluid sample, and the second end is used to discharge the microfluid sample that has been tested or processed; a slow-flow section having a third end and a first end Four ends, wherein the third end is connected to the second end and is used to receive the microfluid sample that is tested or processed, and the fourth end is used to discharge the microfluid sample that is tested or processed to a recovery area; A slow-flow main channel is located between the third end and the fourth end, and is used to reduce a speed at which the third end receives the microfluid sample that has been tested or processed. The microfluidic channel structure described in item 7 of the scope of the patent application, wherein the slow flow main channel is a labyrinth structure, and the microfluid sample is a body fluid or a bacterial fluid. The micro-channel structure described in item 7 of the scope of patent application, further comprising a micro-fluid sample outlet connected to the fourth end of the slow-flow section, wherein the fourth end is used to connect the inspected or processed The microfluidic sample is discharged to the recovery area via the microfluidic sample outlet. The micro-channel structure according to item 9 of the scope of patent application, wherein: the width of the first end is 250 μm-1.5 mm and the depth is 220-250 μm; the width of the second end is 150-250 μm and the depth is 220-250 μm The width of the third end is 150-250 μm and the depth is 50-100 μm; and the diameter of the microfluid sample outlet is 0.8-1.2 mm.