TWM560019U - IC inspection machine with temporarily fixed function - Google Patents

IC inspection machine with temporarily fixed function Download PDF

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Publication number
TWM560019U
TWM560019U TW106218877U TW106218877U TWM560019U TW M560019 U TWM560019 U TW M560019U TW 106218877 U TW106218877 U TW 106218877U TW 106218877 U TW106218877 U TW 106218877U TW M560019 U TWM560019 U TW M560019U
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TW
Taiwan
Prior art keywords
lens
disposed
platform
axis
tube
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TW106218877U
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Chinese (zh)
Inventor
Rui-Feng Zheng
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Yayatech Co Ltd
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Priority to TW106218877U priority Critical patent/TWM560019U/en
Publication of TWM560019U publication Critical patent/TWM560019U/en

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Abstract

一種具有暫固定效果的IC檢查機,包含有:一安裝台;一微調Z軸平台,設於該安裝台;一攝影單元,設於該微調Z軸平台,該攝影單元主要具有一相機、一光源、一光學模組以及一鏡頭,該鏡頭設於該光學模組頂端且朝上,該相機及該光源設於該光學模組;以及一承座,設於該安裝台,該承座具有一鏤空部以及複數氣孔,該複數氣孔位於該鏤空部旁,該鏤空部係位於該鏡頭上方,該鏡頭係由下往上通過該鏤空部來取像。An IC inspection machine having a temporary fixing effect comprises: a mounting platform; a fine-tuning Z-axis platform disposed on the mounting platform; and a photographing unit disposed on the fine-tuning Z-axis platform, the photographing unit mainly having a camera and a camera a light source, an optical module, and a lens, the lens is disposed at a top end of the optical module and facing upward, the camera and the light source are disposed on the optical module; and a socket is disposed on the mounting platform, the socket has a hollow portion and a plurality of air holes, the plurality of air holes are located beside the hollow portion, the hollow portion is located above the lens, and the lens is taken up from the bottom portion through the hollow portion.

Description

具有暫固定效果的IC檢查機IC inspection machine with temporary fixing effect

本發明係與積體電路(IC)之檢查技術有關,特別是指一種具有暫固定效果的IC檢查機。The present invention relates to an inspection technique of an integrated circuit (IC), and more particularly to an IC inspection machine having a temporary fixing effect.

目前已知的IC檢查技術,大多是進行電性導通來量測電阻值或使其運作以判斷功能是否正常,例如中華民國第I 364832號專利,即揭露了以電性導通來量測電阻值的技術。這樣的技術可以確認IC的功能是否正常。Most of the currently known IC inspection techniques are electrically conducted to measure the resistance value or operate it to determine whether the function is normal. For example, Patent No. I 364832 of the Republic of China discloses that the electrical resistance is measured by electrical conduction. Technology. Such a technique can confirm whether the function of the IC is normal.

上述的檢測技術主要是針對已經完成製造的IC來進行檢測,藉以確認其是否能正常工作,然而,在IC尚未完成製造之前,若能有一個檢測技術能先確認IC的打線狀況是否正常,則可以預先將打線不良的產品過濾出來,以免持續對不良品持在製程中進行不必要的加工,形成不必要的浪費。此外,後續產品製作良率也可以進一步的提高。The above detection technology mainly detects the IC that has been manufactured to confirm whether it can work normally. However, if there is a detection technology to confirm whether the IC is in the normal state before the IC is completed, It is possible to filter out products with poor wire punching in advance, so as to avoid unnecessary processing of defective products in the process, resulting in unnecessary waste. In addition, the yield of subsequent products can be further improved.

本創作之主要目的乃在於提供一種具有暫固定效果的IC檢查機,其可以檢查IC的打線狀況是否良好。The main purpose of the present invention is to provide an IC inspection machine having a temporary fixing effect, which can check whether the wiring condition of the IC is good.

本創作之再一目的乃在於提供一種具有暫固定效果的IC檢查機,其可以在檢查IC時,對IC載帶進行真空吸引而將之暫時固定,藉以提高檢查的品質。A further object of the present invention is to provide an IC inspection machine having a temporary fixing effect, which can temporarily vacuum the IC carrier tape when the IC is inspected, thereby improving the quality of the inspection.

為了達成上述目的,本創作提供一種具有暫固定效果的IC檢查機,包含有:一安裝台;一微調Z軸平台,設於該安裝台;一攝影單元,設於該微調Z軸平台,該攝影單元主要具有一相機、一光源、一光學模組以及一鏡頭,該鏡頭設於該光學模組頂端且朝上,該相機及該光源設於該光學模組;以及一承座,設於該安裝台,該承座具有一鏤空部以及複數氣孔,該複數氣孔位於該鏤空部旁,該鏤空部係位於該鏡頭上方,該鏡頭係由下往上通過該鏤空部來取像。In order to achieve the above object, the present invention provides an IC inspection machine having a temporary fixing effect, comprising: a mounting platform; a fine-tuning Z-axis platform disposed on the mounting platform; and a photographing unit disposed on the fine-tuning Z-axis platform, The photographing unit mainly has a camera, a light source, an optical module and a lens, the lens is disposed at the top of the optical module and faces upward, the camera and the light source are disposed on the optical module; and a socket is disposed on the The mounting base has a hollow portion and a plurality of air holes, the plurality of air holes are located beside the hollow portion, the hollow portion is located above the lens, and the lens is taken up from the bottom portion through the hollow portion.

藉此,本創作不僅可以檢查IC的打線狀況是否良好,還能夠配合連續進給的方式來對大量的IC進行檢查。此外,本創作還可以在檢查時藉由該複數氣孔來對IC載帶進行真空吸引而將之暫時固定,藉以提高檢查的品質。In this way, the creation can not only check whether the IC is in good condition, but also can check a large number of ICs in accordance with the continuous feeding method. In addition, the creation can temporarily fix the IC carrier tape by vacuum suction at the time of inspection, thereby improving the quality of the inspection.

為了詳細說明本創作之技術特點所在,茲舉以下之較佳實施例並配合圖式說明如後,其中:In order to explain in detail the technical features of the present invention, the following preferred embodiments are described below with reference to the following:

如第1圖至第3圖所示,本創作一較佳實施例所提供之一種具有暫固定效果的IC檢查機10,主要由一安裝台11、一微調Z軸平台21、一攝影單元31以及一承座41所組成,其中:As shown in FIG. 1 to FIG. 3, an IC inspection machine 10 having a temporary fixing effect is provided by a mounting table 11, a fine adjustment Z-axis platform 21, and a photographing unit 31. And a seat 41 consisting of:

該安裝台11,可以是固定於某個基座上而不動的狀態。不過在本實施例中,則以該安裝台11設於一XYZ軸平台51為例,該XYZ軸平台51由一X軸平台52、一Y軸平台54以及一Z軸平台56聯合組合,該安裝台11設於該XYZ軸平台51,該XYZ軸平台51則固定於一基座58,可供操作而使該安裝台11產生X軸方向、Y軸方向及Z軸方向的移動。The mounting table 11 may be in a state of being fixed to a certain base without being moved. However, in this embodiment, the mounting stage 11 is disposed on an XYZ axis platform 51. The XYZ axis platform 51 is combined by an X-axis platform 52, a Y-axis platform 54, and a Z-axis platform 56. The mounting table 11 is provided on the XYZ axis platform 51. The XYZ axis platform 51 is fixed to a base 58 for operation to cause the mounting table 11 to move in the X-axis direction, the Y-axis direction, and the Z-axis direction.

該微調Z軸平台21,設於該安裝台11。The fine adjustment Z-axis stage 21 is provided on the mounting table 11.

該攝影單元31,主要具有一相機32、一光源34、一光學模組36以及一鏡頭38,該鏡頭38設於該光學模組36頂端且朝上,該相機32及該光源34設於該光學模組36。該光學模組36在實際實施時,係具有一分叉管37、複數反射鏡(圖中未示)以及複數透鏡(圖中未示),該複數反射鏡及複數透鏡係位於該分叉管37內,分叉管37係由一主管371以及一支管372所組成,該支管372係以一端結合於該主管371之管身,且該支管372之末端係朝下,該鏡頭38設於該主管371頂端且朝上,該相機32設於該主管371底端,藉由該複數反射鏡及複數透鏡的導引而與該鏡頭38在光學上同軸,藉以配合取像,該光源34設於該支管372末端,所發出的光係藉由該複數反射鏡及複數透鏡的導引而與該鏡頭38的光學軸同軸,並由該鏡頭38照射出去。該攝影單元31係以該分叉管37設於該微調Z軸單元。其中,兩個分叉光軸藉由複數透鏡及反射鏡來合併為同軸的技術係為光學領域的習知技術,容不再以圖式表示透鏡與反射鏡的位置。The camera unit 31 has a camera 32, a light source 34, an optical module 36, and a lens 38. The lens 38 is disposed at the top of the optical module 36 and faces upward. The camera 32 and the light source 34 are disposed on the camera. Optical module 36. In actual implementation, the optical module 36 has a bifurcation tube 37, a plurality of mirrors (not shown), and a plurality of lenses (not shown), and the plurality of mirrors and the plurality of lenses are located in the bifurcation tube 37, the branching pipe 37 is composed of a main pipe 371 and a pipe 372 which is coupled to the pipe body of the main pipe 371 at one end, and the end of the pipe 372 is directed downward, and the lens 38 is disposed at the end. The main surface of the main pipe 371 is disposed at the bottom end of the main pipe 371. The camera 32 is disposed at the bottom end of the main pipe 371. The lens is optically coaxial with the lens 38 by the guiding of the plurality of mirrors and the plurality of lenses. At the end of the branch 372, the emitted light is coaxial with the optical axis of the lens 38 by the guiding of the complex mirror and the complex lens, and is illuminated by the lens 38. The photographing unit 31 is provided in the trimming Z-axis unit by the branching pipe 37. Among them, the technique that the two bifurcated optical axes are combined into a coaxial by a complex lens and a mirror is a conventional technique in the field of optics, and the position of the lens and the mirror is no longer represented by a figure.

該承座41,設於該安裝台11,該承座41具有一鏤空部42以及複數氣孔44,該複數氣孔44位於該鏤空部42旁,該鏤空部42係位於該鏡頭38上方,該鏡頭38係由下往上通過該鏤空部42來取像。The socket 41 is disposed on the mounting base 11 . The socket 41 has a hollow portion 42 and a plurality of air holes 44 . The plurality of air holes 44 are located beside the hollow portion 42 . The hollow portion 42 is located above the lens 38 . The 38 system is imaged by the hollow portion 42 from the bottom to the top.

以上說明了本創作之結構,接下來說明本創作之操作狀態。The above describes the structure of this creation, and then explains the operational status of this creation.

請參閱第1圖至第5圖,在使用前,如第4圖及第5圖所示,先將本創作10安裝於一壓制裝置90下方,該壓制裝置90可對一IC載帶91進行壓制,該IC載帶91係以串列的方式裝載複數IC 92。Please refer to FIG. 1 to FIG. 5 . Before use, as shown in FIG. 4 and FIG. 5 , the present invention 10 is first installed under a pressing device 90 , and the pressing device 90 can perform an IC carrier tape 91 . Pressing, the IC carrier tape 91 loads the complex IC 92 in a serial manner.

在使用時,將一IC載帶91以可移動的方式設置於該壓制裝置90上,該複數IC 92位於該IC載帶91上方的表面,調整該XYZ軸平台51來移動該安裝台11,藉以使承座41位於該IC載帶的正下方,而如第5圖所示。再藉由該微調Z軸平台21來調整該攝影單元31相對於該承座41的高度,藉以調整攝影的焦距。In use, an IC carrier tape 91 is movably disposed on the pressing device 90. The complex IC 92 is located on a surface above the IC carrier tape 91, and the XYZ axis platform 51 is adjusted to move the mounting table 11, Thereby the socket 41 is located directly below the IC carrier tape as shown in FIG. The height of the photographing unit 31 relative to the socket 41 is adjusted by the fine adjustment of the Z-axis platform 21, thereby adjusting the focal length of the photographing.

如第4圖至第5圖所示,在檢查時,移動該IC載帶91,使該IC載帶91上的各該IC 92一個個經過本創作之鏡頭38,當一個IC 92對正於本創作之鏡頭38時,該壓制裝置90即壓制該IC載帶91,並藉由一空氣源(圖中未示)經由該複數氣孔44吸氣而將該IC載帶91吸住而暫時固定,此時該光源34所發出的光即通過該鏡頭38照射於該IC載帶91,反射的光即經由該鏡頭38進入而由該相機32拍攝,所拍攝的影像即可供後台來對目前的IC 92進行打線狀況的判斷。在該相機32拍攝完成後,並控制該空氣源使該複數氣孔44不再吸氣而釋放該IC載帶91而呈可移動狀態,該壓制裝置90也解除其壓制動作,接著即可再移動該IC載帶91使下一個IC 92對正於本創作之鏡頭38,藉以重覆上述動作來進行檢查。須補充的一點是,在並控制該空氣源釋放該IC載帶91時,除了不吸氣之外,也可以控制該空氣源使該複數氣孔44噴氣,藉此可以使該IC載帶91受到空氣的推力而略微的浮在該承座41上方而不接觸,這可以進一步的協助該IC載帶91以更無阻力且無磨擦的方式移動。As shown in FIGS. 4 to 5, during the inspection, the IC carrier tape 91 is moved so that each of the ICs 92 on the IC carrier tape 91 passes through the lens 38 of the present creation, when an IC 92 is aligned. In the case of the lens 38 of the present invention, the pressing device 90 presses the IC carrier tape 91, and sucks the IC carrier tape 91 by the air source (not shown) through the plurality of air holes 44 to temporarily fix the lens. At this time, the light emitted by the light source 34 is irradiated onto the IC carrier tape 91 through the lens 38, and the reflected light enters through the lens 38 and is captured by the camera 32, and the captured image is available for the background. The IC 92 judges the wire condition. After the camera 32 is photographed, the air source is controlled so that the plurality of air holes 44 are no longer inhaled to release the IC carrier tape 91 to be in a movable state, and the pressing device 90 also releases the pressing action, and then can be moved again. The IC carrier tape 91 causes the next IC 92 to be aligned with the lens 38 of the present creation, thereby repeating the above actions for inspection. It should be added that, when controlling and controlling the air source to release the IC carrier tape 91, in addition to not inhaling, the air source can be controlled to make the plurality of air holes 44 to be ejected, thereby allowing the IC carrier tape 91 to be subjected to The thrust of the air floats slightly above the socket 41 without contact, which further assists the IC carrier tape 91 to move in a more dragless and frictionless manner.

由上述說明可知,本創作乃是在IC載帶91的底面對位於該IC載帶91頂面的該複數IC 92進行檢查,檢查時係使光照射於該IC載帶91底面並拍攝,進而透過該IC載帶91取得該複數IC 92的影像,而以影像處理的方式進行檢查。As can be seen from the above description, the present invention is to inspect the complex IC 92 located on the top surface of the IC carrier tape 91 on the bottom surface of the IC carrier tape 91. When inspecting, the light is applied to the bottom surface of the IC carrier tape 91 and photographed. Further, the image of the plurality of ICs 92 is obtained by the IC carrier tape 91, and is inspected by image processing.

綜上可知,本創作可檢查IC的打線狀況是否良好,此外,還能夠以連續進給的方式來對大量的IC進行檢查。並且還可以在檢查時對IC載帶進行真空吸引而將之暫時固定,藉以提高檢查的品質。In summary, this creation can check whether the IC is in good condition, and it is also possible to check a large number of ICs in a continuous feed. Moreover, the IC carrier tape can be vacuum-attracted at the time of inspection to temporarily fix it, thereby improving the quality of the inspection.

10‧‧‧具有暫固定效果的IC檢查機
11‧‧‧安裝台
21‧‧‧微調Z軸平台
31‧‧‧攝影單元
32‧‧‧相機
34‧‧‧光源
36‧‧‧光學模組
37‧‧‧分叉管
371‧‧‧主管
372‧‧‧支管
38‧‧‧鏡頭
41‧‧‧承座
42‧‧‧鏤空部
44‧‧‧氣孔
51‧‧‧XYZ軸平台
52‧‧‧X軸平台
54‧‧‧Y軸平台
56‧‧‧Z軸平台
58‧‧‧基座
90‧‧‧壓制裝置
91‧‧‧IC載帶
92‧‧‧IC
10‧‧‧IC inspection machine with temporary fixing effect
11‧‧‧Installation table
21‧‧‧ Fine-tuning Z-axis platform
31‧‧‧Photographic unit
32‧‧‧ camera
34‧‧‧Light source
36‧‧‧Optical module
37‧‧‧fork tube
371‧‧‧Supervisor
372‧‧‧ branch
38‧‧‧ lens
41‧‧‧ 承座
42‧‧‧镂空部
44‧‧‧ stomata
51‧‧‧XYZ axis platform
52‧‧‧X-axis platform
54‧‧‧Y-axis platform
56‧‧‧Z-axis platform
58‧‧‧Base
90‧‧‧Compression device
91‧‧‧IC carrier tape
92‧‧‧IC

第1圖係本創作一較佳實施例之立體圖。 第2圖係本創作一較佳實施例之另一立體圖,顯示不同視角。 第3圖係本創作一較佳實施例之前視圖。 第4圖係本創作一較佳實施例之組裝示意圖。 第5圖係本創作一較佳實施例之動作示意圖。Figure 1 is a perspective view of a preferred embodiment of the present invention. Figure 2 is another perspective view of a preferred embodiment of the present invention showing different viewing angles. Figure 3 is a front elevational view of a preferred embodiment of the present invention. Figure 4 is a schematic view of the assembly of a preferred embodiment of the present invention. Figure 5 is a schematic diagram of the action of a preferred embodiment of the present invention.

Claims (5)

一種具有暫固定效果的IC檢查機,包含有: 一安裝台; 一微調Z軸平台,設於該安裝台; 一攝影單元,設於該微調Z軸平台,該攝影單元主要具有一相機、一光源、一光學模組以及一鏡頭,該鏡頭設於該光學模組頂端且朝上,該相機及該光源設於該光學模組;以及 一承座,設於該安裝台,該承座具有一鏤空部以及複數氣孔,該複數氣孔位於該鏤空部旁,該鏤空部係位於該鏡頭上方,該鏡頭係由下往上通過該鏤空部來取像。An IC inspection machine having a temporary fixing effect, comprising: a mounting platform; a fine-tuning Z-axis platform disposed on the mounting platform; a photographing unit disposed on the fine-tuning Z-axis platform, the photographing unit mainly having a camera and a camera a light source, an optical module, and a lens, the lens is disposed at a top end of the optical module and facing upward, the camera and the light source are disposed on the optical module; and a socket is disposed on the mounting platform, the socket has a hollow portion and a plurality of air holes, the plurality of air holes are located beside the hollow portion, the hollow portion is located above the lens, and the lens is taken up from the bottom portion through the hollow portion. 依據申請專利範圍第1項之具有暫固定效果的IC檢查機,其中:該光學模組係具有一分叉管、複數反射鏡及複數透鏡,該複數反射鏡以及複數透鏡係位於該分叉管內,該鏡頭設於該分叉管頂端且朝上,該相機設於該分叉管,藉由該複數反射鏡及複數透鏡的導引而與該鏡頭在光學上同軸,藉以配合取像,該光源設於該分叉管,所發出之光係藉由該複數反射鏡及複數透鏡的導引而與該鏡頭的光學軸同軸,並由該鏡頭照射出去。An IC inspection machine having a temporary fixing effect according to the first aspect of the patent application, wherein the optical module has a furcation tube, a plurality of mirrors, and a plurality of lenses, and the plurality of mirrors and the plurality of lenses are located in the branch tube The lens is disposed at the top of the bifurcation tube and faces upwards. The camera is disposed on the bifurcation tube, and is optically coaxial with the lens by the guiding of the plurality of mirrors and the plurality of lenses, so as to cooperate with the image capturing. The light source is disposed on the branching tube, and the emitted light is coaxial with the optical axis of the lens by the guiding of the plurality of mirrors and the plurality of lenses, and is irradiated by the lens. 依據申請專利範圍第2項之具有暫固定效果的IC檢查機,其中:該攝影單元係以該分叉管設於該微調Z軸單元。An IC inspection machine having a temporary fixing effect according to the second aspect of the patent application, wherein the photographing unit is provided in the fine adjustment Z-axis unit by the branching tube. 依據申請專利範圍第2項之具有暫固定效果的IC檢查機,其中:該分叉管係由一主管以及一支管所組成,該支管係以一端結合於該主管之管身,且該支管之末端係朝下,該鏡頭位於該主管頂端,該相機位於該主管底端,該光源位於該支管末端。An IC inspection machine having a temporary fixing effect according to item 2 of the patent application scope, wherein: the branching pipe is composed of a main pipe and a pipe, and the pipe is coupled to the pipe body of the main pipe at one end, and the branch pipe is The end is down, the lens is at the top of the main tube, the camera is at the bottom of the main tube, and the light source is at the end of the tube. 依據申請專利範圍第1項之具有暫固定效果的IC檢查機,其中,更包含有:一基座以及一XYZ軸平台,該XYZ軸平台由一X軸平台、一Y軸平台以及一Z軸平台聯合組成,該安裝台設於該XYZ軸平台,該XYZ軸平台設於該基座,可供操作而使該安裝台產生X軸方向、Y軸方向及Z軸方向的移動。An IC inspection machine having a temporary fixing effect according to claim 1 of the patent application scope, further comprising: a base and an XYZ axis platform, the XYZ axis platform comprises an X-axis platform, a Y-axis platform and a Z-axis The platform is combined. The mounting platform is disposed on the XYZ axis platform. The XYZ axis platform is disposed on the base, and is operable to cause the mounting table to move in the X-axis direction, the Y-axis direction, and the Z-axis direction.
TW106218877U 2017-12-20 2017-12-20 IC inspection machine with temporarily fixed function TWM560019U (en)

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