TWM401792U - Frame device of photo-mask protection film - Google Patents
Frame device of photo-mask protection filmInfo
- Publication number
- TWM401792U TWM401792U TW099218171U TW99218171U TWM401792U TW M401792 U TWM401792 U TW M401792U TW 099218171 U TW099218171 U TW 099218171U TW 99218171 U TW99218171 U TW 99218171U TW M401792 U TWM401792 U TW M401792U
- Authority
- TW
- Taiwan
- Prior art keywords
- photo
- protection film
- frame device
- mask protection
- mask
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099218171U TWM401792U (en) | 2010-09-20 | 2010-09-20 | Frame device of photo-mask protection film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW099218171U TWM401792U (en) | 2010-09-20 | 2010-09-20 | Frame device of photo-mask protection film |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM401792U true TWM401792U (en) | 2011-04-11 |
Family
ID=60592610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099218171U TWM401792U (en) | 2010-09-20 | 2010-09-20 | Frame device of photo-mask protection film |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWM401792U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI758378B (en) * | 2016-12-22 | 2022-03-21 | 日商信越化學工業股份有限公司 | Dust-proof film module frame and dust-proof film module using the same |
TWI787522B (en) * | 2018-06-12 | 2022-12-21 | 日商三井化學股份有限公司 | Support frame for pellicle, manufacturing method of pellicle and support frame for pellicle, exposure master plate using pellicle, and exposure apparatus |
TWI808827B (en) * | 2022-07-08 | 2023-07-11 | 美商微相科技股份有限公司 | Photomask protection component structure |
-
2010
- 2010-09-20 TW TW099218171U patent/TWM401792U/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI758378B (en) * | 2016-12-22 | 2022-03-21 | 日商信越化學工業股份有限公司 | Dust-proof film module frame and dust-proof film module using the same |
TWI787522B (en) * | 2018-06-12 | 2022-12-21 | 日商三井化學股份有限公司 | Support frame for pellicle, manufacturing method of pellicle and support frame for pellicle, exposure master plate using pellicle, and exposure apparatus |
TWI808827B (en) * | 2022-07-08 | 2023-07-11 | 美商微相科技股份有限公司 | Photomask protection component structure |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4K | Annulment or lapse of a utility model due to non-payment of fees |