TWM401792U - Frame device of photo-mask protection film - Google Patents

Frame device of photo-mask protection film

Info

Publication number
TWM401792U
TWM401792U TW099218171U TW99218171U TWM401792U TW M401792 U TWM401792 U TW M401792U TW 099218171 U TW099218171 U TW 099218171U TW 99218171 U TW99218171 U TW 99218171U TW M401792 U TWM401792 U TW M401792U
Authority
TW
Taiwan
Prior art keywords
photo
protection film
frame device
mask protection
mask
Prior art date
Application number
TW099218171U
Other languages
Chinese (zh)
Inventor
Tian-Xing Huang
Original Assignee
He zhong-shan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by He zhong-shan filed Critical He zhong-shan
Priority to TW099218171U priority Critical patent/TWM401792U/en
Publication of TWM401792U publication Critical patent/TWM401792U/en

Links

TW099218171U 2010-09-20 2010-09-20 Frame device of photo-mask protection film TWM401792U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099218171U TWM401792U (en) 2010-09-20 2010-09-20 Frame device of photo-mask protection film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099218171U TWM401792U (en) 2010-09-20 2010-09-20 Frame device of photo-mask protection film

Publications (1)

Publication Number Publication Date
TWM401792U true TWM401792U (en) 2011-04-11

Family

ID=60592610

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099218171U TWM401792U (en) 2010-09-20 2010-09-20 Frame device of photo-mask protection film

Country Status (1)

Country Link
TW (1) TWM401792U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI758378B (en) * 2016-12-22 2022-03-21 日商信越化學工業股份有限公司 Dust-proof film module frame and dust-proof film module using the same
TWI787522B (en) * 2018-06-12 2022-12-21 日商三井化學股份有限公司 Support frame for pellicle, manufacturing method of pellicle and support frame for pellicle, exposure master plate using pellicle, and exposure apparatus
TWI808827B (en) * 2022-07-08 2023-07-11 美商微相科技股份有限公司 Photomask protection component structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI758378B (en) * 2016-12-22 2022-03-21 日商信越化學工業股份有限公司 Dust-proof film module frame and dust-proof film module using the same
TWI787522B (en) * 2018-06-12 2022-12-21 日商三井化學股份有限公司 Support frame for pellicle, manufacturing method of pellicle and support frame for pellicle, exposure master plate using pellicle, and exposure apparatus
TWI808827B (en) * 2022-07-08 2023-07-11 美商微相科技股份有限公司 Photomask protection component structure

Similar Documents

Publication Publication Date Title
HK1207694A1 (en) Substrate support device and exposure device
IL229323B (en) Radiation protection device and methods thereof
EP2554376A4 (en) Surface protection film
EP2789319A4 (en) Wound protecting and fixing device
EP2530111A4 (en) Film
TWM390458U (en) Photographic lens and photographic device
TWM391102U (en) Photographic lens and photographic device
GB2513051B (en) Protection device
TWM390459U (en) Photographic lens and photographic device
EP2930203A4 (en) Light-blocking film
EP2628690A4 (en) Cover film
GB201004856D0 (en) Film packing device
EP2749948A4 (en) Interference exposure device and method
IL230952A0 (en) Protection device
SG11201501950XA (en) Substance exposure apparatus
EP2542939A4 (en) Formable photographic device
EP2592474A4 (en) Pellicle film
EP2645404A4 (en) Exposure apparatus
HK1167522A1 (en) Protection device
EP2608755A4 (en) Device for hearing protection
EP2611611A4 (en) Patterned protective film
HK1167521A1 (en) Protection device
TWM401290U (en) For fixed apparatus of frame module
TWM401792U (en) Frame device of photo-mask protection film
EP2716558A4 (en) Film label-fitting device

Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees