•M356742 八、新型說明： 【新型所屬之技術領域】 本創作係提供-種㈣之快拆結構，特職指—種應用於真空錢 鍵其腔體内，傳輸用框架之快拆式組裝結構。 【先前技術】 按，真空麟技術是真空_製程巾翻層廣泛的一項重 要技術，近年來己逐漸取代喷導電漆或電解電鑛等方式，大量應用在 籲光電、通信及半導體等產業，成為相當重要的表面處理技術。 請參閱第-圖所示’-般真空濺鑛技術，係利用磁控雜陰極板 (1 1) ’將離子化的氣體分子（13)以高速轟擊激發鑛材（工8) ，使錢膜分子（12)均勻散佈在真空腔體（i Q)内各個角落，再 藉由電位差高速義在髓物（i 9)絲上，進而制舰的目的 〇 而因應真空濺鑛製程應用層面日廣，為增加相關鑛膜產品的產掌 籲競爭力，目前習知大部分濺鍍設備為連續式多腔體型式，以取代傳統 批次式或晶圓式生產方式。如第二_示，連續式傳輸作業流程如可 概分為進顏、濺舰及出料區三個區域。每—個區域都至少由一真 工腔體（1〇 )組成’再利用傳輸機構將被鑛物（19)輸送至不同 區域之真空腔體（i Q)内進行各項程序作業。而—般連續式真空機 鑛設備其自動化傳輸機構皆_極限_及縣原理來完成不同腔體 之間傳輸順序。 請再參閱第三圖，每個腔髀八叫 卵㈣相具有—部伺服馬達（1 3 )帶動 5 M356742 真空腔體（1 Ο)庇立 )帶動德本、 端的第一個輪袖（1 4 )，再藉由鏈條（1 7 。、輪軸（1 4 )，托盤（1 2 )則置於輪軸（1 4 ) 的作動下，將托盤^^動盤⑽與州⑻之間摩擦力 進行真空靜社 個衫雜（1 Q ) 1能連續 仃具工麟的各項作業程序。 I構中’轉輪轴（i 4 )二端偏組固定於二輪轴固定座 > (1 w 而—般輪細定座（15)的長度，係對應真空腔體 )μ、上間大小為—體式之結構。當傳輸之構件如輪軸（工4 ]、9 t( 1 7 )或輪轴固定座（1 5 )等物件表面殘留有鍍臈分子（ 養，拆:Γ:夺’為維持鍍臈高品質要求，濺鍍設備必須定時停機保 ” //、工腔體（1 0)内部零件，刮除其表面鍍膜分子（i 2) 、’儿積物後’方可重新組合真空腔體（工0)再次使用。 然而’隨著濺鍍設備機型、款兩 構強度μ nw "大 而求的不同’或為增加結 * 一矣又真工腔體（10)外層機殼的置入口上方中間適處’合 _板的存在當真空腔體(1 〇)内部之輪軸: 後5二15)等構件欲取出時’則必須將該腔體外殼折卸• M356742 VIII. New description: [New technical field] The creative department provides a quick-release structure of (4), special-purpose finger-type, which is applied to the cavity of the vacuum key, and the quick-disassembly assembly structure of the transmission frame . [Prior Art] Press, vacuum lining technology is an important technology for vacuum _ process towel lining. In recent years, it has gradually replaced the way of spraying conductive paint or electrolytic electric ore, and it is widely used in the industries of optoelectronics, communication and semiconductor. Become a very important surface treatment technology. Please refer to the figure-----the vacuum sputtering technique, which uses the magnetically controlled heterocalytic plate (1 1) to excite the ionized gas molecules (13) with high-speed bombardment to excite the mineral material (gong 8), so that the money film The molecules (12) are evenly distributed in all corners of the vacuum chamber (i Q), and then the potential difference is high-speed on the core (i 9) wire, and then the purpose of the ship is to meet the requirements of the vacuum sputtering process. In order to increase the competitiveness of related mineral film products, it is known that most of the sputtering equipment is a continuous multi-cavity type to replace the traditional batch or wafer production method. As shown in the second figure, the continuous transmission operation process can be divided into three areas: the entrance, the splashing, and the discharge area. Each area is composed of at least one real cavity (1〇). The recycling mechanism transports the minerals (19) to vacuum chambers (i Q) in different areas for various procedures. And the continuous continuous vacuum machine mining equipment has its automatic transmission mechanism _ limit _ and county principle to complete the transmission sequence between different chambers. Please refer to the third figure. Each cavity is called the egg. The four-phase servo motor (1 3 ) drives the 5 M356742 vacuum chamber (1 Ο). The first wheel sleeve is driven by Deben. 4), and then the chain (1 7 , the axle (1 4 ), the tray (1 2 ) is placed under the action of the axle (1 4 ), and the friction between the tray (10) and the state (8) is carried out. Vacuum static company (1 Q) 1 can continuously operate the various working procedures of the machine. In the I structure, the 'rotator shaft (i 4) two-end partial set is fixed to the two-wheel fixed seat> (1 w The length of the fine wheel fixing seat (15) is corresponding to the vacuum chamber) μ and the upper part is the structure of the body. When the transmission member is such as the axle (work 4), 9 t (17) or the axle fixed The surface of the object (1 5 ) and other objects are left with rhodium-plated molecules (nurturing, dismantling: Γ: '' to maintain the high quality requirements of ruthenium plating, the sputtering equipment must be stopped regularly) //, the internal part of the working chamber (10) , scrape off the surface coating molecules (i 2), 'after the accumulation of children' can be re-combined with the vacuum chamber (work 0). However, 'with the type of sputtering equipment, the strength of the two structures μ nw " The big difference is 'or to increase the knot* and the true working chamber (10) is placed on the upper part of the outer casing. The middle part fits the 'plate' when the inner part of the vacuum chamber (1 〇): 5 2 15) When the component is to be removed, the cavity must be detached
-零組件取出，不僅不纽費時費力，《進—步加I -改善。 Λ 有鑑於此，本創作人乃針對前述f用創作問題深入探討，並藉 t從事相關產業之研發與製造經驗，積極尋求解決之道，經過長期努 之研九與發展，終於成功的開發出本創作『快拆式内傳輸框架社構 6 M356742 題 改良』，以改善習用創作之問 【新型内容】 ❻要㈣’在於解決上述明題而提供-種快拆式内傳 =之:其係令真空濺鍍設備之框架，能具有分段快速拆卸 及，、且裝之特點，以提昇零件維修或清潔效率。 緣以達成上述之功效目的，本創作『快拆式 丨2由,爛___御轉叫 =之矩形構件’其底部特定之四角隅位置凸設有鎖置座，可： _勝崎_細购組成，各 匡架一側底邊形成有若干螺紋孔，而相組 接板，各騎接缸顧#奸^ ㈣各叹有-對 利用螺絲_件鎖置於二相對接㈣’可 ;此利職框架呈分段式之快拆結構設計，不僅能二二 逮於__組裝編卩之健。同日__定_整單元以 四點定位綱方式’技增加轉斜便性婦固性。 有關本創侧採狀猶、手奴其魏，雜—紐實施例並 由己1式詳細說明於後’相信本創作上述之目的、構造及特徵，當可 由之得一深入而具體的瞭解。 M356742 【實施方式】 茲為使其能進一步瞭解本創作之結構設計及技術，謹配合圖式再 予說明於後： 參閱第四〜六圖所示’本創作『快拆式内傳輸框架結構改良』係 由應用於真空濺鍍作業之腔體（2 〇 )、框架（3 〇 )，以及若干定位 調整單元（4 0)等構件組成，其中： 雜體（2 0 )内緣中空，其底部特定之四角隅位置凸設有鎖置座 (2 1 )’用以供該等定位調整單元（4 〇)鎖固該框架（3 〇 )。緣 於此腔體（2 0)乃一般習知結構，不再贅述。 該框架（3 0)為一對應該腔體（2 0)之矩形框架，由若干副 框架（31、3Γ )組成，本創作係以二副框架（3i'3i，j 為實施例說明。各闕轉（3 1、3 Γ )係為岭雜體，复二 側底邊形成有若干螺紋孔（3 2 )，而相組接之外酬各設有―對 (33)，並於各該對接板（33)上形翁奸定位部（331)。 在本創作之實關，各較位部（3 3 m 架（31、3Γ )之對接板（33)相 位件（51)鎖设一相對接之定位部（^ (31、3Γ )結合為-體。（331)内處，將該二副框架 遠等定位調整單元（4 〇 )伽以_並調整框 定位調整單元（4 u 、）’各該 (A 〇λ , 1 )螺帽（4 2)及定位 累、、、糸（4 3 ) 4組成。該調整螺絲（4 i )内緣呈 成有六角孔（4 1 1)，係可螺組於該框架 、口 &形 永C 3 0 )之螺紋孔（3 2) M356742 處。該螺酬在調整螺絲（4 i )作完框架（3 〇 )的水平調整後， _於該調整螺絲（41)上，使該框架（3 Q)保持穩定之水平狀 ‘悲。而該定位獅（4 3 )則係在螺帽（4 2 )鎖緊後，由該調整螺 絲（41)内緣往外穿出，使其螺組於該腔體（2 〇)之鎖置座（2 1)内，用以固定該框架（3 〇)。 據此’藉上述之構件組成，利用該框架（3 〇)呈分段式之快拆結 構設計’可方便且魏於該賴（2 Q )内作喊或拆卸之作業。同 φ時利用δ亥等疋位調整單元（4〇)以四點定位鎖固方式，更能增加框 架水平調整的簡便性與穩固性。 ‘上所述’本創作在_產品中實有其極佳之進步制性，同時 遍查國内外_此騎構之技術·、文獻巾絲發現有相同的構造 存在在先，是以，本創作實已具傷新型專利要件，爰依法提出申請。 —上述只知例’僅用以舉例說明本創作，據以在不離本創作精神之 範圍’熟習此項技藝者憑之而作之各種變形、修飾與應用，均應包括 籲於本創作之範轉者。 【圖式簡單說明】 第一圖：係真空濺鍍原理示意圖。 第二圖：係習知連續式濺渡作業流程示意圖。 第三圖：係習知真空腔體立體分解圖。 第四圖：係本創作框架之立體分解圖。 第五圖：係本創作之另—立體分解圖。 第六圖：係本創作之組合剖面圖。 9 M356742 【主要元件符號說明】 腔體：（2 0 ) 框架：（3 0 ) 螺紋孔：（3 2 ) 定位部：（3 3 1 ) 調整螺絲：（4 1 ) 螺帽：（4 2 ) φ 定位件：（5 1 ) 鎖置座：（2 1 ) 副框架：（3 1、3 Γ ) 對接板：（3 3 ) 定位調整單元：（4 0 ) 六角孔：（4 1 1 ) 定位螺絲：（4 3 )- The removal of the components is not only time-consuming and laborious, "Improve. Λ In view of this, the creator has in-depth discussion on the above-mentioned f-use creation issues, and has been actively seeking solutions through the experience of R&D and manufacturing of related industries. After a long period of research and development, it has finally been successfully developed. This creation "Quick-opening internal transmission framework community 6 M356742 improvement" to improve the use of custom creation [new content] Summary (four) 'in the solution to the above-mentioned questions to provide - a quick-release type of internal transmission = its system The frame of the vacuum sputtering equipment can be segmented and quickly disassembled and assembled to improve the maintenance or cleaning efficiency of parts. In order to achieve the above-mentioned effects, the creation of the "quick-breaking 丨 2, rotten ___ 御 叫 = = rectangular member" at the bottom of the four corners of the position of the convex position with a lock seat, can be: _ 胜崎_细The composition of the purchase, the bottom side of each truss is formed with a number of threaded holes, and the phase sets of the board, each riding the cylinder Gu # 奸 ^ (four) each sigh - the use of screws _ locks placed in two opposite (four) 'can; This profit-making framework is designed in a segmented quick-release structure, which can not only be caught in the __ assembly and compilation. On the same day, the __ fixed _ whole unit was added to the slanting feminine solidity by the four-point positioning method. The details of the above-mentioned purpose, structure and characteristics of this creation can be obtained from the ingenious and specific understanding of the above-mentioned purpose, structure and characteristics of the creation. M356742 [Embodiment] In order to make it possible to further understand the structural design and technology of this creation, I would like to explain it later with the following diagram: Refer to the fourth to sixth figure, 'This creation' is a quick-removal internal transmission frame structure improvement. The system consists of a cavity (2 〇) applied to the vacuum sputtering operation, a frame (3 〇), and a plurality of positioning adjustment units (40), wherein: the inner edge of the hybrid (20) is hollow, and the bottom is The specific four corners are convexly provided with a locking seat (2 1 ) for the positioning adjustment unit (4 〇) to lock the frame (3 〇). The cavity (20) is a general structure and will not be described again. The frame (30) is a pair of rectangular frames corresponding to the cavity (20), and is composed of a plurality of sub-frames (31, 3Γ). The creation is described by two sub-frames (3i'3i, j). The twist (3 1 , 3 Γ ) is a ridge body, and a plurality of threaded holes (3 2 ) are formed at the bottom side of the second side, and the pair is provided with a pair (33), and each of them The docking plate (33) is shaped by the locating part (331). In the actual creation of this creation, the phase parts (51) of the butt joints (33) of the 3 3 m frame (31, 3 Γ) are locked. The opposite positioning portions (^ (31, 3Γ) are combined into a body. (331), the two sub-frames are positioned with the positioning adjustment unit (4 〇) _ and the frame positioning adjustment unit (4 u , ) '( each ,λ , 1 ) nut (4 2) and positioning tired, ,, 糸 (4 3 ) 4. The inner edge of the adjusting screw (4 i ) is formed with a hexagonal hole (4 1 1) , the snail can be set in the threaded hole (3 2) M356742 of the frame, the mouth and the shape of the C 3 0. The screw is adjusted after the adjustment screw (4 i ) is finished with the frame (3 〇). _ on the adjustment screw (41) to keep the frame (3 Q) steady The horizontal shape is 'sorrow.' The lion (4 3 ) is locked by the inner edge of the adjusting screw (41) after the nut (4 2 ) is locked, so that the screw is set in the cavity (2) 〇) The lock seat (2 1) is used to fix the frame (3 〇). According to this, it is convenient to use the frame (3 〇) in a segmented quick release structure design. And Wei used the work of shouting or disassembling in the Lai (2 Q). With the φ, using the δ海 and other position adjustment unit (4〇) to fix the frame level by using the four-point positioning locking method, Stability. 'On the above' This creation has its excellent progressive system in the _ product, while at the same time rumoring the domestic and foreign _ this riding technology, the paper towel found that the same structure exists first, is Therefore, this creation has already injured the new patent requirements, and has applied for it according to law. The above-mentioned only examples are only used to illustrate the creation of the creation, so that those skilled in the art can do it without departing from the spirit of the creation. All kinds of deformations, modifications and applications should include a call for this creation. [Simplified description] Fig.: Schematic diagram of the principle of vacuum sputtering. The second diagram is a schematic diagram of the flow of the conventional continuous splashing operation. The third figure: the stereoscopic exploded view of the vacuum chamber. The fourth figure: the exploded view of the creative framework. The fifth picture: the other three-dimensional exploded view of the creation. The sixth picture: the combined sectional view of the creation. 9 M356742 [Main component symbol description] Cavity: (2 0 ) Frame: (3 0 ) Threaded hole :(3 2 ) Positioning section: (3 3 1 ) Adjustment screw: (4 1 ) Nut: (4 2 ) φ Positioning member: (5 1 ) Locking seat: (2 1 ) Sub frame: (3 1. 3 Γ ) Docking plate: (3 3 ) Positioning adjustment unit: (4 0 ) Hexagon hole: (4 1 1 ) Set screw: (4 3 )
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