M330979 八、新型說明： 【新型所屬之技術領域】 本創作有關於利用壓力差吸著加工物的真空吸盤，尤 其有關於一種可以偵測真空吸盤是否具有足夠吸力吸著加 工物的真空保持器。 【先前技術】 真空吸盤為利用氣體壓力差產生吸著力，其可以用於 吸附加工物，且不會對加工物的表面造成損傷，其常用於 半導體、面板、絲元料精密元件的輸送移動。 真空吸盤在長久使用之下，容易因為老化失去彈性， 造成真㈣盤無法與加卫物的表面完全密合而產生縫隙， 空氣會由此縫隙進人該真空讀内，造成誠空吸盤益法 提供足夠的吸力以吸著該加工物，目此該加场在藉由真 空吸盤吸__過程巾’會有掉落的可能，其不但造成 相當的危險，亦會降低生產良率，提高製造成本。 【新型内容】 爰此’本創作之主要目的在於揭露一種真空保持器， 八可偵測真纽盤是否保持真空㈣，_ 以提供足夠的吸力。 古為達上34目的’本創作為-種真空保持ϋ，用於連接 -真空源亚吸著-加卫物’其包含—真空健、一腔體、 一離鋼珠與—磁簧_，其中該真空健接觸吸著該加 工物’該腔體具有-流道，該流道具有_上開口與一下開 口 ’該下開口連接該真空吸盤，並讓該真空吸盤與該流道 5 M330979 相通’該上開口則連接該真空源，又該磁性鋼珠設於該流 這内’該磁#開關設於靠近該流道的上開口處，該磁菁開 關文上升至該流道的上開σ處的雖鋼珠賴發而產生一 通知訊號。 據此當該真空吸盤吸著—加工物且漏氣而無法保持真 二度化’漏氣的氣流會沿著該流道祕該磁性鋼珠上升至 該流道的上開σ處’該磁性鋼轉會觸發該磁簧開關，讓 該磁簀關產生-通知訊號，據而依據該通知訊號，使用 者即可即時維修該真空吸盤。 【實施方式】 為使貴委員對本創作之特徵、目的及功效，有更加 深入之瞭贿綱，_舉難實_並配合目式說明如 后： 請參閱「第1圖」與「第2圖」所示，本創作為一種 真空保持器，其包含-真空吸盤1Q、—腔體2()、一磁性鋼 珠30與-磁簀開關40，其中該真空吸盤1〇可以具有一吸 嘴11，該腔體20具有-流道2卜該流道21具有一上開口 211與下開口 212,該腔體2〇可以包含一塞頭22與一本 體23 ’遠本體23為中空且内徑稍大於該磁性鋼珠3〇的管 體以形成雛道2卜該本體23的-敍翻縮形成該下 開口 212 ’該本體23的另一端塞入該塞頭22，該塞頭22 ^有一内通孔221而形成該上開口 211，且該内通孔221 罪近該本體23處可以為圓錐狀，又絲頭22可以直接與 該本體23螺合固定在一起。 〃 6 M330979 該下開口 212連接該真空吸盤10，其可以直接螺合固 定在一起，並讓該吸嘴11與該流道21相通，該上開口 211 亦可螺合連接該真空源50，又該磁性鋼珠3〇設於該流道 21内，該磁簧開關40設於靠近該流道21的上開口 211處， 該磁簧開關4〇受上升至該流道21的上開口 211處的磁性 鋼珠30的觸發而產生一通知訊號。M330979 VIII. New Description: [New Technology Field] This work is about vacuum suction cups that use the pressure difference to suck the workpiece, especially a vacuum holder that can detect whether the vacuum chuck has enough suction to suck the workpiece. [Prior Art] The vacuum chuck is used to generate a suction force by using a gas pressure difference, which can be used for adsorbing a processed object without causing damage to the surface of the workpiece, and is often used for conveying movement of semiconductor, panel, and silk element precision components. Under the long-term use of the vacuum suction cup, it is easy to lose the elasticity due to aging, which causes the true (four) disc to be completely in close contact with the surface of the garrison to create a gap, and the air will enter the vacuum reading by the gap, resulting in a safe suction method. Providing sufficient suction to suck the workpiece, so that the field can be dropped by the vacuum suction cup, which not only causes considerable danger, but also reduces production yield and improves manufacturing. cost. [New Content] The main purpose of this creation is to expose a vacuum holder that can detect whether the true disk is kept vacuum (4), _ to provide sufficient suction. The ancient is up to 34 goals 'this creation is a vacuum holding ϋ, used for connection - vacuum source sub-suction-enhancement' contains - vacuum, a cavity, a steel ball and - reed _, which The vacuum contact absorbs the workpiece. The cavity has a flow passage having an upper opening and a lower opening. The lower opening connects the vacuum chuck and allows the vacuum chuck to communicate with the flow passage 5 M330979. The upper opening is connected to the vacuum source, and the magnetic steel ball is disposed in the flow. The magnetic switch is disposed near the upper opening of the flow channel, and the magnetic switch switch rises to the upper opening σ of the flow channel. Although the steel ball is on the rise, it generates a notification signal. According to this, when the vacuum chuck sucks the processed material and leaks and cannot maintain the true second degree, the air leakage will rise along the flow path, and the magnetic steel ball rises to the upper opening σ of the flow path. The transfer triggers the reed switch to cause the magnetic switch to generate a notification signal, and according to the notification signal, the user can immediately repair the vacuum suction cup. [Embodiment] In order to enable your members to have a more in-depth bribery on the characteristics, purpose and efficacy of this creation, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The present invention is a vacuum holder comprising a vacuum chuck 1Q, a cavity 2 (), a magnetic steel ball 30 and a magnetic switch 40, wherein the vacuum chuck 1 can have a nozzle 11, The cavity 20 has a flow channel 2 having an upper opening 211 and a lower opening 212. The cavity 2 can include a plug 22 and a body 23. The distal body 23 is hollow and has an inner diameter slightly larger than The tubular body of the magnetic steel ball 3 is formed to form the bypass channel 2, and the lower end 212 is formed by the other end of the body 23. The other end of the body 23 is inserted into the plug head 22, and the plug head 22 has an inner through hole. The upper opening 211 is formed 221, and the inner through hole 221 can be conical to the body 23, and the wire head 22 can be screwed directly to the body 23. 〃 6 M330979 The lower opening 212 is connected to the vacuum chuck 10, which can be directly screwed together, and the nozzle 11 is connected to the flow channel 21, and the upper opening 211 can also be screwed to the vacuum source 50. The magnetic steel ball 3 is disposed in the flow path 21, and the reed switch 40 is disposed adjacent to the upper opening 211 of the flow path 21, and the reed switch 4 is raised to the upper opening 211 of the flow path 21. The triggering of the magnetic steel ball 30 generates a notification signal.
請參閱「第3圖」所示，本創作之真空保持器，用於 連接一真空源50並吸著一加工物60，其藉由該真空吸盤 10上的吸嘴11接觸該加工物⑼，並透過該真空源5〇的抽 真空，讓該真空吸盤10形成真空狀態，以藉由内外的壓力 差讓该吸嘴11吸著該加工物60，在該吸嘴11與該加工物 60保持無缝隙70的緊密接觸下（沒有漏氣現象），該吸嘴 11可以提供良好的吸著力量，此時由於真空源5〇與該真 空吸盤10皆處於良好的真空狀態，該磁性鋼珠3〇會因為 重力的影寶’掉落在該流道21的下開口 212處。 請再茶閱「第4圖」所示，若吸嘴"與加工物即具 有縫隙70，亦即吸嘴丨丨無法與該加工物卯保持緊密接觸 (曰有漏氣現象）’此時該吸嘴即無法提供良好的吸著力 篁，空氣會源源不絕的由該縫隙7〇進入該真空吸盤， 魏並經由該腔體2G的流道21被該真空源5()抽:，這時 空亂會產生-流場推壓該磁性鋼珠3〇上升直至磁性鋼珠 30被該塞肋_通孔221喷，亦㈣雜鋼珠3〇會 位於該抓道21的上開口 mi處，並堵住該上開口 2H，此 時該磁性鋼珠3G麵魏磁簀_ 4G喊生通知訊號， 7 M330979 f而讓使用者知道該真空吸盤ig無法提供無夠的吸著力 置，而需要維修。又由於該磁性鋼珠30堵住該上開口 2ΐ ι， 因=真空源5G可以維持其真空狀態，讓其他同時使用此一 真空源50的真空讀（圖未示），可以不受影響繼續提供吸 力，以確保加工物60不會掉落。 如上所述’本創作藉由該磁性鋼珠30在該流道21上 的位置’即可判斷得知該真空吸盤1〇是否有漏氣現象，因 而在該真空吸盤1〇漏氣時，可以即時轉之，讓該真空吸 盤職供足約的吸著力量，又可以藉由讓該磁性鋼珠30 堵住該上開σ 211上’因此真空源5Q不受漏氣影響而可以 轉其真幻域’讓其他同時制此—真线5()的真空吸 益（圖未示），可以不受影響繼續提供吸力，以確保加工物 60不會掉落’其不但可增加卫作場所的安全性，並可提高 生產良率。 細、上所述僅為本創作的較佳實施例而已，並非用來限 定本創作之實施範圍，即凡依本創作申請專利範圍之内容 所為的專效變化與修飾，皆應為本創作之技術範轉。 【圖式簡單說明】 第1圖，係本創作之結構分解圖。 第2圖，係本創作之結構組合圖。 第3圖，係本創作吸著加工物之示意圖一。 第4圖，係本創作吸著加工物之示意圖二。 【主要元件符號說明】 10 :真空吸盤 8 M330979 11 :吸嘴 20 :腔體 21 :流道 211 :上開口 212 :下開口 22 :塞頭 221 :内通孔 23 :本體 30 :磁性鋼珠 40 :磁簣開關 50 :真空源 60 :加工物 70 :縫隙Referring to FIG. 3, the vacuum holder of the present invention is used for connecting a vacuum source 50 and sucking a workpiece 60 which contacts the workpiece (9) by the suction nozzle 11 on the vacuum chuck 10. And the vacuum suction cup 10 is vacuumed by the vacuum of the vacuum source 5, so that the suction nozzle 11 sucks the workpiece 60 by the pressure difference between the inside and the outside, and the nozzle 11 and the workpiece 60 are maintained. Under the close contact of the seamless gap 70 (no air leakage), the suction nozzle 11 can provide a good absorbing force. At this time, since the vacuum source 5 〇 and the vacuum chuck 10 are in a good vacuum state, the magnetic steel ball 3 〇 It will fall at the lower opening 212 of the flow path 21 because of the shadow of gravity. Please read the "Fig. 4" again, if the nozzle has a gap 70 with the workpiece, that is, the nozzle cannot be in close contact with the workpiece (there is a leak). The suction nozzle cannot provide a good suction force, and the air will enter the vacuum suction cup through the slit 7〇, and the vacuum source 5() is pumped through the flow passage 21 of the cavity 2G: Time-space chaos will occur - the flow field pushes the magnetic steel ball 3 〇 up until the magnetic steel ball 30 is sprayed by the rib _ through hole 221, and (4) the miscellaneous steel ball 3 〇 will be located at the upper opening mi of the gripping path 21, and blocked The upper opening 2H, at this time, the magnetic steel ball 3G surface Wei magnetic 箦 4G shouts the notification signal, 7 M330979 f and lets the user know that the vacuum suction cup ig cannot provide insufficient suction force and needs to be repaired. Moreover, since the magnetic steel ball 30 blocks the upper opening 2 ,, since the vacuum source 5G can maintain its vacuum state, other vacuum readings (not shown) using the vacuum source 50 at the same time can continue to provide suction without being affected. To ensure that the workpiece 60 does not fall. As described above, the position of the magnetic steel ball 30 on the flow path 21 can be judged whether or not the vacuum suction cup 1 is leaking, so that when the vacuum suction cup 1 leaks, it can be immediately In turn, let the vacuum suction cup serve the suction force of the foot, and the magnetic steel ball 30 can block the upper opening σ 211. Therefore, the vacuum source 5Q can be turned into the true magic field without being affected by the air leakage. 'Let other people make this at the same time - the vacuum of the true line 5 () (not shown), can continue to provide suction without affecting to ensure that the workpiece 60 will not fall 'not only can increase the safety of the workplace And can increase production yield. The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of implementation of the present invention, that is, the special effects change and modification according to the content of the patent application scope of the present creation should be the creation of the present invention. Technical paradigm. [Simple description of the diagram] Figure 1 is an exploded view of the structure of the creation. Figure 2 is a structural combination diagram of the creation. Figure 3 is a schematic diagram of the creation of a processed object. Figure 4 is a schematic diagram 2 of the creation of the processed material. [Main component symbol description] 10 : Vacuum chuck 8 M330979 11 : Nozzle 20 : Cavity 21 : Flow path 211 : Upper opening 212 : Lower opening 22 : Plug 221 : Inner through hole 23 : Body 30 : Magnetic steel ball 40 : Magnetic switch 50: vacuum source 60: workpiece 70: gap