TWI898241B - 編碼器用反射型光學尺、反射型光學式編碼器、編碼器用反射型光學尺的製造方法、及編碼器用反射型光學尺多面排版體 - Google Patents

編碼器用反射型光學尺、反射型光學式編碼器、編碼器用反射型光學尺的製造方法、及編碼器用反射型光學尺多面排版體

Info

Publication number
TWI898241B
TWI898241B TW112128762A TW112128762A TWI898241B TW I898241 B TWI898241 B TW I898241B TW 112128762 A TW112128762 A TW 112128762A TW 112128762 A TW112128762 A TW 112128762A TW I898241 B TWI898241 B TW I898241B
Authority
TW
Taiwan
Prior art keywords
metal substrate
encoder
reflective optical
low
reflection layer
Prior art date
Application number
TW112128762A
Other languages
English (en)
Chinese (zh)
Other versions
TW202422012A (zh
Inventor
今井剛
Original Assignee
日商大日本印刷股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大日本印刷股份有限公司 filed Critical 日商大日本印刷股份有限公司
Publication of TW202422012A publication Critical patent/TW202422012A/zh
Application granted granted Critical
Publication of TWI898241B publication Critical patent/TWI898241B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
TW112128762A 2022-08-02 2023-08-01 編碼器用反射型光學尺、反射型光學式編碼器、編碼器用反射型光學尺的製造方法、及編碼器用反射型光學尺多面排版體 TWI898241B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-123423 2022-08-02
JP2022123423 2022-08-02

Publications (2)

Publication Number Publication Date
TW202422012A TW202422012A (zh) 2024-06-01
TWI898241B true TWI898241B (zh) 2025-09-21

Family

ID=89849327

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112128762A TWI898241B (zh) 2022-08-02 2023-08-01 編碼器用反射型光學尺、反射型光學式編碼器、編碼器用反射型光學尺的製造方法、及編碼器用反射型光學尺多面排版體

Country Status (6)

Country Link
US (1) US20260043677A1 (https=)
EP (1) EP4575414A1 (https=)
JP (2) JP7548470B2 (https=)
CN (1) CN119790285A (https=)
TW (1) TWI898241B (https=)
WO (1) WO2024029490A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197510U (https=) * 1985-05-31 1986-12-10
JP2002316222A (ja) * 2001-04-18 2002-10-29 Tanaka Kikinzoku Kogyo Kk プレス加工方法
JP2004045063A (ja) * 2002-07-09 2004-02-12 Topcon Corp 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板
CN101382442A (zh) * 2007-09-03 2009-03-11 赖云龙 胶质码盘/码尺的制作方法
CN113587960A (zh) * 2021-08-04 2021-11-02 纳诺科斯电子(北京)有限公司 反射式编码器标志板及该标志板上图案形成方法
TW202142837A (zh) * 2020-03-31 2021-11-16 日商大日本印刷股份有限公司 編碼器用反射型光學尺及反射型光學式編碼器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153710A (ja) * 1985-12-27 1987-07-08 Furukawa Alum Co Ltd ロ−タリエンコ−ダ用反射基板の製造方法
JPH07311055A (ja) * 1994-05-18 1995-11-28 Japan Servo Co Ltd 絶対値エンコーダ
JP2005241248A (ja) 2004-01-30 2005-09-08 Aronshiya:Kk 光学式エンコーダに用いられる反射板及びその製造方法
JP5985014B1 (ja) * 2015-07-07 2016-09-06 株式会社メルテック 粘着剤付部品の製造方法および粘着剤付部品
JP7156687B2 (ja) * 2018-11-09 2022-10-19 帝国通信工業株式会社 光学式エンコーダ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197510U (https=) * 1985-05-31 1986-12-10
JP2002316222A (ja) * 2001-04-18 2002-10-29 Tanaka Kikinzoku Kogyo Kk プレス加工方法
JP2004045063A (ja) * 2002-07-09 2004-02-12 Topcon Corp 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板
CN101382442A (zh) * 2007-09-03 2009-03-11 赖云龙 胶质码盘/码尺的制作方法
TW202142837A (zh) * 2020-03-31 2021-11-16 日商大日本印刷股份有限公司 編碼器用反射型光學尺及反射型光學式編碼器
CN113587960A (zh) * 2021-08-04 2021-11-02 纳诺科斯电子(北京)有限公司 反射式编码器标志板及该标志板上图案形成方法

Also Published As

Publication number Publication date
JP7548470B2 (ja) 2024-09-10
WO2024029490A1 (ja) 2024-02-08
JPWO2024029490A1 (https=) 2024-02-08
TW202422012A (zh) 2024-06-01
JP7810202B2 (ja) 2026-02-03
JP2024113155A (ja) 2024-08-21
EP4575414A1 (en) 2025-06-25
US20260043677A1 (en) 2026-02-12
CN119790285A (zh) 2025-04-08

Similar Documents

Publication Publication Date Title
US8427639B2 (en) Surfaced enhanced Raman spectroscopy substrates
TWI856594B (zh) 編碼器用反射型光學尺及反射型光學式編碼器
KR101663842B1 (ko) 다층 반사막을 가진 기판 및 반사형 마스크 블랭크 및 반사형 마스크의 제조 방법
US20230350120A1 (en) Low cost dispersive optical elements
KR102285098B1 (ko) 극자외선용 반사형 블랭크 마스크 및 그 제조방법
TWI898241B (zh) 編碼器用反射型光學尺、反射型光學式編碼器、編碼器用反射型光學尺的製造方法、及編碼器用反射型光學尺多面排版體
JP2013181964A (ja) エンコーダのスリット盤およびそのスリット盤を使用したエンコーダ
WO2024195754A1 (ja) エンコーダ用反射型光学式スケールおよび反射型光学式エンコーダ
TWI895801B (zh) 反射型光學式編碼器及編碼器用反射型光學尺用積層體
JP5789409B2 (ja) 光学スケール
KR102814293B1 (ko) 필름 마스크, 필름 마스크의 제조 방법 및 필름 마스크를 이용한 패턴의 제조 방법
JP5567960B2 (ja) 光学スケールの製造方法
TW202526271A (zh) 編碼器用光學尺、編碼器用光學尺多面排版體及光學式編碼器
JPS6220310A (ja) X線マスク