TWI819687B - Under-screen biometric identification module and under-screen biometric identification device - Google Patents
Under-screen biometric identification module and under-screen biometric identification device Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000010409 thin film Substances 0.000 claims abstract description 50
- 239000010408 film Substances 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 28
- 239000010410 layer Substances 0.000 claims description 47
- 239000011521 glass Substances 0.000 claims description 20
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 3
- OWOMRZKBDFBMHP-UHFFFAOYSA-N zinc antimony(3+) oxygen(2-) Chemical compound [O--].[Zn++].[Sb+3] OWOMRZKBDFBMHP-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 20
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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Abstract
Description
本發明係有關於一種生物辨識模組,尤其係指一種螢幕下生物辨識模組及螢幕下生物辨識裝置。The present invention relates to a biometric recognition module, and in particular, to an under-screen biometric recognition module and an under-screen biometric recognition device.
圖1係繪示現有技術之指紋辨識模組的示意圖。如圖1所示,指紋辨識模組100包含:一薄膜電晶體陣列基板10、一壓電材料層12、一銀電極14以及一覆蓋層(capping layer)16。薄膜電晶體陣列基板10的電路區包含複數個薄膜電晶體10a、10b。壓電材料層12配置於薄膜電晶體陣列基板10上,完全覆蓋所述電路區。銀電極14配置於壓電材料層12上,完全覆蓋所述電路區。覆蓋層(capping layer)16配置於銀電極14上,完全覆蓋所述電路區。FIG. 1 is a schematic diagram of a fingerprint recognition module in the prior art. As shown in FIG. 1 , the
一般而言,薄膜電晶體10a、10b外無金屬走線的地方為可透光區,但是再蓋上銀電極14後則成為不透光區。Generally speaking, the area without metal traces outside the
因此,如何提供一個能解決上述問題的螢幕下生物辨識模組,乃是業界所需思考的重要課題。Therefore, how to provide an under-screen biometric module that can solve the above problems is an important issue that the industry needs to think about.
鑒於上述內容,本揭露之一態樣係提供一種螢幕下生物辨識模組,包含:一薄膜電晶體陣列基板、一壓電材料層、一透明導電薄膜以及一覆蓋層(capping layer)。薄膜電晶體陣列基板具有一顯示區及一電路區,而該電路區包含複數個薄膜電晶體。壓電材料層配置於該薄膜電晶體陣列基板上,完全覆蓋該電路區。透明導電薄膜配置於該壓電材料層上,完全覆蓋該電路區。覆蓋層(capping layer)配置於該透明導電薄膜上,完全覆蓋該電路區。其中該覆蓋層內部具有一觸控電極陣列,而該觸控電極陣列由複數個觸控電極組成。其中,各該觸控電極相對應地配置於各該薄膜電晶體的上方。In view of the above, one aspect of the present disclosure provides an under-screen biometric recognition module, including: a thin film transistor array substrate, a piezoelectric material layer, a transparent conductive film and a capping layer. The thin film transistor array substrate has a display area and a circuit area, and the circuit area includes a plurality of thin film transistors. The piezoelectric material layer is disposed on the thin film transistor array substrate and completely covers the circuit area. The transparent conductive film is disposed on the piezoelectric material layer and completely covers the circuit area. A capping layer is disposed on the transparent conductive film to completely cover the circuit area. There is a touch electrode array inside the covering layer, and the touch electrode array is composed of a plurality of touch electrodes. Wherein, each of the touch electrodes is correspondingly arranged above each of the thin film transistors.
一種螢幕下生物辨識模組,包含:一薄膜電晶體陣列基板、一壓電材料層、一透明導電薄膜以及一覆蓋層(capping layer)。薄膜電晶體陣列基板,具有一顯示區及一電路區,而該電路區包含複數個薄膜電晶體。壓電材料層,配置於該薄膜電晶體陣列基板上,完全覆蓋該電路區。透明導電薄膜,配置於該壓電材料層上,完全覆蓋該電路區,其中該透明導電薄膜內部具有一觸控電極陣列,而該觸控電極陣列由複數個觸控電極組成。覆蓋層(capping layer),配置於該透明導電薄膜上,完全覆蓋該電路區。其中,各該觸控電極相對應地配置於各該薄膜電晶體的上方。An under-screen biometric identification module includes: a thin film transistor array substrate, a piezoelectric material layer, a transparent conductive film and a capping layer. The thin film transistor array substrate has a display area and a circuit area, and the circuit area includes a plurality of thin film transistors. The piezoelectric material layer is disposed on the thin film transistor array substrate and completely covers the circuit area. The transparent conductive film is disposed on the piezoelectric material layer and completely covers the circuit area. There is a touch electrode array inside the transparent conductive film, and the touch electrode array is composed of a plurality of touch electrodes. A capping layer is disposed on the transparent conductive film and completely covers the circuit area. Wherein, each of the touch electrodes is correspondingly arranged above each of the thin film transistors.
根據本揭露之一個或多個實施方式,其中該觸控電極陣列的該些觸控電極由銀製成。According to one or more embodiments of the present disclosure, the touch electrodes of the touch electrode array are made of silver.
根據本揭露之一個或多個實施方式,其中該透明導電薄膜包含一透明導電氧化物(TCO),其中該透明導電氧化物(TCO)包含氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銻鋅(AZO)。According to one or more embodiments of the present disclosure, the transparent conductive film includes a transparent conductive oxide (TCO), wherein the transparent conductive oxide (TCO) includes indium tin oxide (ITO), indium zinc oxide (IZO) or Antimony zinc oxide (AZO).
根據本揭露之一個或多個實施方式,其中該觸控電極陣列的該些觸控電極的形狀包含網狀或條狀。According to one or more embodiments of the present disclosure, the shape of the touch electrodes of the touch electrode array includes a mesh shape or a strip shape.
根據本揭露之一個或多個實施方式,其中該透明導電薄膜的厚度小於10奈米,穿透率大於90%,表面電阻小於10Ω/平方。According to one or more embodiments of the present disclosure, the thickness of the transparent conductive film is less than 10 nanometers, the transmittance is greater than 90%, and the surface resistance is less than 10Ω/square.
根據本揭露之一個或多個實施方式,其中該薄膜電晶體陣列基板的上表面更包含一保護層(Primer C),以鄰接該壓電材料層。According to one or more embodiments of the present disclosure, the upper surface of the thin film transistor array substrate further includes a protective layer (Primer C) adjacent to the piezoelectric material layer.
另外,本揭露之另一態樣係提供一種螢幕下生物辨識裝置,包含:一玻璃基板;以及前述螢幕下生物辨識模組,配置於該玻璃基板的一上表面或一下表面。In addition, another aspect of the present disclosure provides an under-screen biometric device, including: a glass substrate; and the aforementioned under-screen biometric module, which is disposed on an upper surface or a lower surface of the glass substrate.
另外,本揭露之另一態樣係提供一種螢幕下生物辨識裝置,包含:一玻璃基板;一顯示模組;以及前述螢幕下生物辨識模組,配置於該玻璃基板與該顯示模組之間。In addition, another aspect of the present disclosure provides an under-screen biometric device, including: a glass substrate; a display module; and the aforementioned under-screen biometric module, disposed between the glass substrate and the display module .
另外,本揭露之另一態樣係提供一種螢幕下生物辨識裝置,包含:一顯示模組;一玻璃基板,配置於該顯示模組上;以及前述螢幕下生物辨識模組,配置以嵌入該玻璃基板內。In addition, another aspect of the present disclosure provides an under-screen biometric recognition device, including: a display module; a glass substrate configured on the display module; and the aforementioned under-screen biometric recognition module configured to be embedded in the display module. inside the glass substrate.
為便貴審查委員能對本發明之目的、形狀、構造裝置特徵及其功效,做更進一步之認識與瞭解,茲舉實施例配合圖式,詳細說明如下。In order to facilitate the review committee to have a further understanding of the purpose, shape, structural device characteristics and functions of the present invention, the detailed description is as follows with reference to the embodiments and drawings.
以下揭露提供不同的實施例或示例,以建置所提供之標的物的不同特徵。以下敘述之成分以及排列方式的特定示例是為了簡化本公開,目的不在於構成限制;元件的尺寸和形狀亦不被揭露之範圍或數值所限制,但可以取決於元件之製程條件或所需的特性。例如,利用剖面圖描述本發明的技術特徵,這些剖面圖是理想化的實施例示意圖。因而,由於製造工藝和/公差而導致圖示之形狀不同是可以預見的,不應為此而限定。The following disclosure provides different embodiments or examples to achieve different features of the provided subject matter. The specific examples of components and arrangements described below are for simplifying the present disclosure and are not intended to be limiting; the size and shape of the components are not limited by the disclosed range or numerical value, but may depend on the process conditions of the components or the required requirements. characteristic. For example, cross-sectional views are used to describe the technical features of the present invention, and these cross-sectional views are schematic diagrams of idealized embodiments. Therefore, variations in the shapes shown in the illustrations due to manufacturing processes and/or tolerances are to be expected and should not be limited thereby.
再者,空間相對性用語,例如「下方」、「在…之下」、「低於」、「在…之上」以及「高於」等,是為了易於描述圖式中所繪示的元素或特徵之間的關係;此外,空間相對用語除了圖示中所描繪的方向,還包含元件在使用或操作時的不同方向。Furthermore, spatially relative terms such as "below", "below", "below", "above" and "above" are used to easily describe the elements depicted in the diagram. or the relationship between features; in addition, spatially relative terms include the orientation depicted in the illustrations, but also encompass the different orientations of components in use or operation.
首先,請參考圖2,圖2係繪示本發明一實施例之螢幕下生物辨識模組的示意圖。First, please refer to FIG. 2 , which is a schematic diagram of an under-screen biometric recognition module according to an embodiment of the present invention.
如圖2所示,本發明一實施例中之螢幕下生物辨識模組200包含:一薄膜電晶體陣列基板210、一壓電材料層212、一透明導電薄膜214以及一覆蓋層(capping layer)216。薄膜電晶體陣列基板210具有一顯示區及一電路區,而該電路區包含複數個薄膜電晶體210a、210b。壓電材料層212配置於該薄膜電晶體陣列基板210上,完全覆蓋該電路區。透明導電薄膜214配置於該壓電材料層212上,完全覆蓋該電路區。覆蓋層(capping layer)216配置於該透明導電薄膜214上,完全覆蓋該電路區。其中該覆蓋層216內部具有一觸控電極陣列,而該觸控電極陣列由複數個觸控電極218組成。其中,由該薄膜電晶體陣列基板210的側視圖觀之,各該觸控電極218相對應地配置於各該薄膜電晶體210a、210b的上方。As shown in Figure 2, the under-screen
另外,請參考圖3,圖3係繪示本發明另一實施例之螢幕下生物辨識模組的示意圖。In addition, please refer to FIG. 3 , which is a schematic diagram of an under-screen biometric recognition module according to another embodiment of the present invention.
如圖3所示,本發明另一實施例中之螢幕下生物辨識模組300包含:一薄膜電晶體陣列基板310、一壓電材料層312、一透明導電薄膜314以及一覆蓋層(capping layer)316。薄膜電晶體陣列基板310,具有一顯示區及一電路區,而該電路區包含複數個薄膜電晶體310a、310b。壓電材料層312,配置於該薄膜電晶體陣列基板310上,完全覆蓋該電路區。透明導電薄膜314,配置於該壓電材料層312上,完全覆蓋該電路區,其中該透明導電薄膜314內部具有一觸控電極陣列,而該觸控電極陣列由複數個觸控電極318組成。覆蓋層(capping layer)316,配置於該透明導電薄膜314上,完全覆蓋該電路區。其中,由該薄膜電晶體陣列基板310的側視圖觀之,各該觸控電極318相對應地配置於各該薄膜電晶體310a、310b的上方。As shown in Figure 3, an under-screen
在此要特別說明的是,圖2之該些觸控電極218是配置於該覆蓋層216內部;而圖3之該些觸控電極318是配置於該透明導電薄膜314內部;其餘部件原則上相同。It should be noted here that the
另外要特別說明的是,在本發明的實施例的螢幕下生物辨識模組200、300中,由於各該觸控電極218、318相對應地配置於各該薄膜電晶體210a、210b 、310a、310b的上方,因此透光區增加了,使得光線220、320可以穿透這些新增的透光區。另外,本發明的實施例的螢幕下生物辨識模組200、300增設了透明導電薄膜214、314,除了可以維持導電功能還可讓原本不透光的區域成為透光區。In addition, it should be noted that in the under-screen
在本發明一實施例中,其中該觸控電極陣列的該些觸控電極218由銀製成。In an embodiment of the present invention, the
在本發明一實施例中,其中該透明導電薄膜214包含一透明導電氧化物(TCO),其中該透明導電氧化物(TCO)包含氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銻鋅(AZO)。In one embodiment of the present invention, the transparent
在本發明一實施例中,其中該觸控電極陣列的該些觸控電極218、318的形狀包含網狀或條狀。In an embodiment of the present invention, the shape of the
另外,請一併參考圖4與圖5,圖4係繪示本發明一實施例之螢幕下生物辨識模組的部份元件示意圖。圖5係繪示本發明另一實施例之螢幕下生物辨識模組的部份元件示意圖。In addition, please refer to FIG. 4 and FIG. 5 together. FIG. 4 is a schematic diagram of some components of an under-screen biometric module according to an embodiment of the present invention. FIG. 5 is a schematic diagram of some components of an under-screen biometric recognition module according to another embodiment of the present invention.
如圖4所示,在本發明一實施例中,其中該觸控電極陣列的該些觸控電極218的形狀為網狀,也就是說,該些觸控電極218在該覆蓋層216內部呈現邊長約略相等的方塊。另外,在本發明其他實施例中,該觸控電極陣列的該些觸控電極318的形狀也可以是網狀,即該些觸控電極318在該透明導電薄膜314內部呈現邊長約略相等的方塊。As shown in FIG. 4 , in one embodiment of the present invention, the shape of the
如圖5所示,在本發明一實施例中,其中該觸控電極陣列的該些觸控電極318的形狀為條狀,也就是說,該些觸控電極318在該透明導電薄膜314內部呈現邊長不相等且彼此平行的長條,而所述長條延伸的方向可依設計需求而變更。另外,在本發明其他實施例中,該觸控電極陣列的該些觸控電極218的形狀也可以是條狀,即該些觸控電極218在該覆蓋層216內部呈現邊長不相等且彼此平行的長條。As shown in FIG. 5 , in one embodiment of the present invention, the
另外,在本發明一實施例中,其中該透明導電薄膜214、314的厚度小於10奈米,穿透率大於90%,表面電阻小於10Ω/平方。In addition, in an embodiment of the present invention, the thickness of the transparent
在本發明一實施例中,其中該薄膜電晶體陣列基板210、310的上表面更包含一保護層(Primer C),以鄰接該壓電材料層212。In an embodiment of the present invention, the upper surfaces of the thin film
另外,請一併參考圖6與圖7,圖6係繪示本發明一實施例之螢幕下生物辨識裝置的示意圖。圖7係繪示本發明另一實施例之螢幕下生物辨識裝置的示意圖。如圖6與圖7所示,本發明之其他實施例係提供一種螢幕下生物辨識裝置1000、2000。螢幕下生物辨識裝置1000、2000包含一玻璃基板600、以及前述螢幕下生物辨識模組200或300。前述螢幕下生物辨識模組200或300乃配置於該玻璃基板600的一上表面(參考圖7)或一下表面(參考圖6)。In addition, please refer to FIG. 6 and FIG. 7 together. FIG. 6 is a schematic diagram of an under-screen biometric device according to an embodiment of the present invention. FIG. 7 is a schematic diagram of an under-screen biometric recognition device according to another embodiment of the present invention. As shown in FIG. 6 and FIG. 7 , other embodiments of the present invention provide an under-screen
另外,請一併參考圖8與圖9,圖8係繪示本發明又一實施例之螢幕下生物辨識裝置的示意圖。圖9係繪示本發明再一實施例之螢幕下生物辨識裝置的示意圖。In addition, please refer to FIG. 8 and FIG. 9 together. FIG. 8 is a schematic diagram of an under-screen biometric recognition device according to another embodiment of the present invention. FIG. 9 is a schematic diagram of an under-screen biometric recognition device according to yet another embodiment of the present invention.
如圖8所示,本發明之其他實施例係提供一種螢幕下生物辨識裝置3000,其包含一玻璃基板600、一顯示模組700以及前述螢幕下生物辨識模組200或300。前述螢幕下生物辨識模組200或300乃配置於該玻璃基板600與該顯示模組700之間。As shown in FIG. 8 , another embodiment of the present invention provides an under-screen
另外,如圖9所示,本發明之其他實施例係提供一種螢幕下生物辨識裝置4000,其包含一顯示模組700、一玻璃基板600以及前述螢幕下生物辨識模組200或300。玻璃基板600乃配置於該顯示模組700上,而前述螢幕下生物辨識模組200或300則配置以嵌入該玻璃基板600內。In addition, as shown in FIG. 9 , another embodiment of the present invention provides an under-screen
以上實施方式僅用以說明本發明的技術方案而非限制,儘管參照較佳實施方式對本發明進行了詳細說明,本領域的普通技術人員應當理解,可以對本發明的技術方案進行修改或等同替換,而不脫離本發明技術方案的精神和範圍。The above embodiments are only used to illustrate the technical solutions of the present invention and are not limiting. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced. without departing from the spirit and scope of the technical solution of the present invention.
10:薄膜電晶體陣列基板10
12:壓電材料層12
14:銀電極14
16:覆蓋層
100:指紋辨識模組
200、300:螢幕下生物辨識模組
210、310:薄膜電晶體陣列基板
210a、210b、310a、310b:薄膜電晶體
212、312:壓電材料層
214、314:透明導電薄膜
216、316:覆蓋層
218、318:觸控電極
220、320:光線
600:玻璃基板
700:顯示模組
1000、2000、3000、4000:螢幕下生物辨識裝置
10:Thin film
為讓本發明的上述與其他目的、特徵、優點與實施例能更淺顯易懂,所附圖式之說明如下: 圖1係繪示現有技術之指紋辨識模組的示意圖。 圖2係繪示本發明一實施例之螢幕下生物辨識模組的示意圖。 圖3係繪示本發明另一實施例之螢幕下生物辨識模組的示意圖。 圖4係繪示本發明一實施例之螢幕下生物辨識模組的部份元件示意圖。 圖5係繪示本發明另一實施例之螢幕下生物辨識模組的部份元件示意圖。 圖6係繪示本發明一實施例之螢幕下生物辨識裝置的示意圖。 圖7係繪示本發明另一實施例之螢幕下生物辨識裝置的示意圖。 圖8係繪示本發明又一實施例之螢幕下生物辨識裝置的示意圖。 圖9係繪示本發明再一實施例之螢幕下生物辨識裝置的示意圖。 In order to make the above and other objects, features, advantages and embodiments of the present invention easier to understand, the accompanying drawings are described as follows: FIG. 1 is a schematic diagram of a fingerprint recognition module in the prior art. FIG. 2 is a schematic diagram of an under-screen biometric recognition module according to an embodiment of the present invention. FIG. 3 is a schematic diagram of an under-screen biometric recognition module according to another embodiment of the present invention. FIG. 4 is a schematic diagram of some components of an under-screen biometric recognition module according to an embodiment of the present invention. FIG. 5 is a schematic diagram of some components of an under-screen biometric recognition module according to another embodiment of the present invention. FIG. 6 is a schematic diagram of an under-screen biometric recognition device according to an embodiment of the present invention. FIG. 7 is a schematic diagram of an under-screen biometric recognition device according to another embodiment of the present invention. FIG. 8 is a schematic diagram of an under-screen biometric recognition device according to another embodiment of the present invention. FIG. 9 is a schematic diagram of an under-screen biometric recognition device according to yet another embodiment of the present invention.
根據慣常的作業方式,圖中各種特徵與元件並未依實際比例繪製,其繪製方式是為了以最佳的方式呈現與本發明相關的具體特徵與元件。此外,在不同圖式間,以相同或相似的元件符號指稱相似的元件及部件。In accordance with common practice, the various features and components in the figures are not drawn to actual scale, but are drawn in a manner intended to best present the specific features and components relevant to the present invention. In addition, the same or similar element symbols are used to refer to similar elements and components between different drawings.
200:螢幕下生物辨識模組 200: Under-screen biometric module
210:薄膜電晶體陣列基板 210:Thin film transistor array substrate
210a、210b:薄膜電晶體 210a, 210b: thin film transistor
212:壓電材料層 212: Piezoelectric material layer
214:透明導電薄膜 214:Transparent conductive film
216:覆蓋層 216: Covering layer
218:觸控電極 218:Touch electrode
220:光線 220:Light
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US20210397803A1 (en) * | 2020-06-23 | 2021-12-23 | Samsung Display Co., Ltd. | Display device |
TW202210653A (en) * | 2020-09-07 | 2022-03-16 | 日商半導體能源研究所股份有限公司 | Metal oxide film, semiconductor device, and manufacturing method therefor |
TW202217545A (en) * | 2020-10-30 | 2022-05-01 | 大陸商業泓科技(成都)有限公司 | Touch recognition device, display device and manufacturing method thereof |
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US20210397803A1 (en) * | 2020-06-23 | 2021-12-23 | Samsung Display Co., Ltd. | Display device |
TW202210653A (en) * | 2020-09-07 | 2022-03-16 | 日商半導體能源研究所股份有限公司 | Metal oxide film, semiconductor device, and manufacturing method therefor |
TW202217545A (en) * | 2020-10-30 | 2022-05-01 | 大陸商業泓科技(成都)有限公司 | Touch recognition device, display device and manufacturing method thereof |
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