TWI799502B - 離子植入裝置及測定裝置 - Google Patents
離子植入裝置及測定裝置 Download PDFInfo
- Publication number
- TWI799502B TWI799502B TW108102824A TW108102824A TWI799502B TW I799502 B TWI799502 B TW I799502B TW 108102824 A TW108102824 A TW 108102824A TW 108102824 A TW108102824 A TW 108102824A TW I799502 B TWI799502 B TW I799502B
- Authority
- TW
- Taiwan
- Prior art keywords
- ion implantation
- measurement
- measurement device
- implantation device
- ion
- Prior art date
Links
- 238000005468 ion implantation Methods 0.000 title 1
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24405—Faraday cages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
- H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
- H01J2237/24528—Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
- H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
- H01J2237/24535—Beam current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018020944A JP6985951B2 (ja) | 2018-02-08 | 2018-02-08 | イオン注入装置および測定装置 |
JP2018-020944 | 2018-02-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201935532A TW201935532A (zh) | 2019-09-01 |
TWI799502B true TWI799502B (zh) | 2023-04-21 |
Family
ID=67476927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108102824A TWI799502B (zh) | 2018-02-08 | 2019-01-25 | 離子植入裝置及測定裝置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10825654B2 (zh) |
JP (1) | JP6985951B2 (zh) |
KR (1) | KR102523799B1 (zh) |
CN (1) | CN110137067B (zh) |
TW (1) | TWI799502B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6982531B2 (ja) * | 2018-03-26 | 2021-12-17 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置および測定装置 |
KR20210017275A (ko) | 2019-08-07 | 2021-02-17 | 주식회사 엘지화학 | 상부 냉각 방식 배터리 팩 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080142727A1 (en) * | 2006-10-30 | 2008-06-19 | Applied Materials, Inc. | Ion beam diagnostics |
US20140134833A1 (en) * | 2012-11-13 | 2014-05-15 | Sen Corporation | Ion implantation apparatus and ion implantation method |
TW201501166A (zh) * | 2013-06-26 | 2015-01-01 | Sen Corp | 離子束測定裝置及離子束測定方法 |
US20150064887A1 (en) * | 2013-08-29 | 2015-03-05 | Sen Corporation | Ion implantation apparatus and ion implantation method |
TW201735125A (zh) * | 2016-03-18 | 2017-10-01 | Sumitomo Heavy Industries Ion Technology Co Ltd | 離子植入裝置及測定裝置 |
TW201801155A (zh) * | 2016-03-18 | 2018-01-01 | 住友重機械離子技術有限公司 | 離子植入方法及離子植入裝置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04101399U (ja) * | 1991-02-19 | 1992-09-01 | 株式会社神戸製鋼所 | イオンビーム分析装置におけるビーム軌道モニター用スリツト |
JPH0765779A (ja) * | 1993-08-24 | 1995-03-10 | Nissin Electric Co Ltd | イオン注入装置 |
US6677598B1 (en) | 2003-04-29 | 2004-01-13 | Axcelis Technologies, Inc. | Beam uniformity and angular distribution measurement system |
JP2005063874A (ja) * | 2003-08-19 | 2005-03-10 | Nissin Electric Co Ltd | イオン注入装置 |
GB2427508B (en) * | 2004-01-06 | 2008-06-25 | Applied Materials Inc | Ion beam monitoring arrangement |
US6872953B1 (en) * | 2004-05-20 | 2005-03-29 | Axcelis Technologies, Inc. | Two dimensional stationary beam profile and angular mapping |
JP4901094B2 (ja) | 2004-11-30 | 2012-03-21 | 株式会社Sen | ビーム照射装置 |
US7202483B2 (en) | 2005-04-05 | 2007-04-10 | Olson Joseph C | Methods and apparatus for ion beam angle measurement in two dimensions |
US7394073B2 (en) | 2005-04-05 | 2008-07-01 | Varian Semiconductor Equipment Associates, Inc. | Methods and apparatus for ion beam angle measurement in two dimensions |
JP2008146863A (ja) | 2006-12-06 | 2008-06-26 | Nissin Ion Equipment Co Ltd | イオンビーム測定方法 |
JP4784544B2 (ja) | 2007-04-03 | 2011-10-05 | 日新イオン機器株式会社 | イオンビームのビーム幅、発散角の測定方法およびイオン注入装置 |
JP5311140B2 (ja) | 2009-12-01 | 2013-10-09 | 日新イオン機器株式会社 | イオンビーム測定方法 |
JP6253524B2 (ja) | 2014-06-13 | 2017-12-27 | 住友重機械イオンテクノロジー株式会社 | ビーム照射装置及びビーム照射方法 |
JP6403485B2 (ja) | 2014-08-08 | 2018-10-10 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置及びイオン注入方法 |
JP2017199554A (ja) * | 2016-04-27 | 2017-11-02 | 日新電機株式会社 | イオンビーム照射装置及びイオンビーム照射方法 |
-
2018
- 2018-02-08 JP JP2018020944A patent/JP6985951B2/ja active Active
-
2019
- 2019-01-25 TW TW108102824A patent/TWI799502B/zh active
- 2019-01-31 KR KR1020190012684A patent/KR102523799B1/ko active IP Right Grant
- 2019-02-01 CN CN201910102055.6A patent/CN110137067B/zh active Active
- 2019-02-07 US US16/270,236 patent/US10825654B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080142727A1 (en) * | 2006-10-30 | 2008-06-19 | Applied Materials, Inc. | Ion beam diagnostics |
US20140134833A1 (en) * | 2012-11-13 | 2014-05-15 | Sen Corporation | Ion implantation apparatus and ion implantation method |
TW201501166A (zh) * | 2013-06-26 | 2015-01-01 | Sen Corp | 離子束測定裝置及離子束測定方法 |
US20150001418A1 (en) * | 2013-06-26 | 2015-01-01 | Sen Corporation | Ion beam measuring device and method of measuring ion beam |
US20150064887A1 (en) * | 2013-08-29 | 2015-03-05 | Sen Corporation | Ion implantation apparatus and ion implantation method |
TW201735125A (zh) * | 2016-03-18 | 2017-10-01 | Sumitomo Heavy Industries Ion Technology Co Ltd | 離子植入裝置及測定裝置 |
TW201801155A (zh) * | 2016-03-18 | 2018-01-01 | 住友重機械離子技術有限公司 | 離子植入方法及離子植入裝置 |
Also Published As
Publication number | Publication date |
---|---|
CN110137067B (zh) | 2022-12-02 |
JP2019139908A (ja) | 2019-08-22 |
CN110137067A (zh) | 2019-08-16 |
US20190244785A1 (en) | 2019-08-08 |
TW201935532A (zh) | 2019-09-01 |
US10825654B2 (en) | 2020-11-03 |
JP6985951B2 (ja) | 2021-12-22 |
KR20190096284A (ko) | 2019-08-19 |
KR102523799B1 (ko) | 2023-04-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK3910714T3 (da) | Elektrolyt og elektrokemisk indretning | |
CL2018003623S1 (es) | Dispositivo vaporizador | |
DK3705106T3 (da) | Indførbar stimuleringsanordning | |
DK3775478T3 (da) | Ankerindretning | |
DK3491846T3 (da) | Hørehjælpeapparat og hørehjælpeindretning | |
IT201700064268A1 (it) | Dispositivo e procedimento di rilevazione | |
DK3497339T3 (da) | Fjederindretning og forbindelsesindretning | |
MA49905A (fr) | Polyesteramines et polyesterquats | |
DK3343954T3 (da) | Høreanordning indbefattende en udvendig antennedel og en indvendig antennedel | |
DE112019000883T8 (de) | Erfassungsvorrichtung | |
DK3746678T3 (da) | Fastspændingsindretning | |
DK3324182T3 (da) | Fugtighedsmåleapparat | |
TWI799502B (zh) | 離子植入裝置及測定裝置 | |
DK3611747T3 (da) | Spændingsbegrænsningsanordning | |
EP3667298A4 (en) | MEASURING DEVICE AND IRRADIATION DEVICE | |
ES2818990A8 (es) | Dispositivo de salida de datos indicadores y procedimiento de salida de datos indicadores | |
DK3578949T3 (da) | Analytisk opbevaringsanordning | |
DK3875923T3 (da) | Understøtningslegeme og genstandfastholdelsesindretning | |
TWI799652B (zh) | 醫療裝置及其製造方法 | |
DE112019005380A5 (de) | Sensorvorrichtung | |
DK3594490T3 (da) | Krøjningslejeindretning | |
DK3645984T3 (da) | Vejeindretning | |
GB2574767B (en) | Measurement device and program | |
ES1196087Y (es) | Dispositivo de introduccion de cateter | |
DE112019004249A5 (de) | Lagekompensierte Strommesseinrichtung |