TWI798730B - 接合體、保持裝置及靜電夾頭 - Google Patents

接合體、保持裝置及靜電夾頭 Download PDF

Info

Publication number
TWI798730B
TWI798730B TW110123298A TW110123298A TWI798730B TW I798730 B TWI798730 B TW I798730B TW 110123298 A TW110123298 A TW 110123298A TW 110123298 A TW110123298 A TW 110123298A TW I798730 B TWI798730 B TW I798730B
Authority
TW
Taiwan
Prior art keywords
metal layer
hole
metal
cylindrical member
electrostatic chuck
Prior art date
Application number
TW110123298A
Other languages
English (en)
Chinese (zh)
Other versions
TW202226438A (zh
Inventor
吉本修
荒川龍一
田中智雄
Original Assignee
日商日本特殊陶業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本特殊陶業股份有限公司 filed Critical 日商日本特殊陶業股份有限公司
Publication of TW202226438A publication Critical patent/TW202226438A/zh
Application granted granted Critical
Publication of TWI798730B publication Critical patent/TWI798730B/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/403—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C04B2237/597—Aspects relating to the structure of the interlayer whereby the interlayer is continuous but porous, e.g. containing hollow or porous particles, macro- or micropores or cracks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ceramic Products (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
TW110123298A 2020-08-21 2021-06-25 接合體、保持裝置及靜電夾頭 TWI798730B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-139760 2020-08-21
JP2020139760 2020-08-21

Publications (2)

Publication Number Publication Date
TW202226438A TW202226438A (zh) 2022-07-01
TWI798730B true TWI798730B (zh) 2023-04-11

Family

ID=80350311

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110123298A TWI798730B (zh) 2020-08-21 2021-06-25 接合體、保持裝置及靜電夾頭

Country Status (6)

Country Link
US (1) US20230303457A1 (https=)
JP (1) JP7300069B2 (https=)
KR (1) KR102814220B1 (https=)
CN (1) CN115066408B (https=)
TW (1) TWI798730B (https=)
WO (1) WO2022038898A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021261284A1 (ja) * 2020-06-26 2021-12-30 日本特殊陶業株式会社 接合体、および静電チャック
JPWO2025220065A1 (https=) * 2024-04-15 2025-10-23

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004050267A (ja) * 2002-07-23 2004-02-19 Ngk Insulators Ltd 接合体の製造方法および接合体
TW202025371A (zh) * 2018-09-28 2020-07-01 日商日本碍子股份有限公司 半導體製造裝置用構件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156976A (ja) * 1983-02-25 1984-09-06 臼井国際産業株式会社 金属部材とセラミツク部材との結合体及びその結合方法
JP3485390B2 (ja) 1995-07-28 2004-01-13 京セラ株式会社 静電チャック
US6490146B2 (en) * 1999-05-07 2002-12-03 Applied Materials Inc. Electrostatic chuck bonded to base with a bond layer and method
DE60326599D1 (de) * 2002-09-06 2009-04-23 Ork Corp Metallbalgrohr, verfahren zur herstellung desselben und flexibles rohr für hochdruckfluid
US8956459B2 (en) * 2005-02-23 2015-02-17 Kyocera Corporation Joined assembly, wafer holding assembly, attaching structure thereof and method for processing wafer
US7709099B2 (en) * 2005-07-04 2010-05-04 Kyocera Corporation Bonded body, wafer support member using the same, and wafer treatment method
JP5204958B2 (ja) * 2006-06-19 2013-06-05 日本発條株式会社 接合体
JP6525793B2 (ja) 2015-07-29 2019-06-05 京セラ株式会社 試料保持具
JP6786439B2 (ja) * 2016-06-28 2020-11-18 日本特殊陶業株式会社 保持装置および保持装置の製造方法
CN110770877B (zh) * 2017-06-13 2024-06-18 日本碍子株式会社 半导体制造装置用部件
JP7175773B2 (ja) * 2019-01-07 2022-11-21 京セラ株式会社 試料保持具

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004050267A (ja) * 2002-07-23 2004-02-19 Ngk Insulators Ltd 接合体の製造方法および接合体
TW202025371A (zh) * 2018-09-28 2020-07-01 日商日本碍子股份有限公司 半導體製造裝置用構件

Also Published As

Publication number Publication date
KR20220124252A (ko) 2022-09-13
WO2022038898A1 (ja) 2022-02-24
KR102814220B1 (ko) 2025-05-28
CN115066408A (zh) 2022-09-16
JP7300069B2 (ja) 2023-06-28
US20230303457A1 (en) 2023-09-28
JPWO2022038898A1 (https=) 2022-02-24
CN115066408B (zh) 2023-12-05
TW202226438A (zh) 2022-07-01

Similar Documents

Publication Publication Date Title
JP7558886B2 (ja) 保持装置
JP6865145B2 (ja) 保持装置
JP7472393B2 (ja) 保持装置
TWI798730B (zh) 接合體、保持裝置及靜電夾頭
JP7613848B2 (ja) 保持装置
JP7108586B2 (ja) 保持装置
CN113228496B (zh) 静电卡盘
US12528131B2 (en) Joined body and electrostatic chuck
JP6525793B2 (ja) 試料保持具
JP2024040302A (ja) 試料保持具
CN115210199A (zh) 接合体、保持装置以及静电卡盘
JP2023149720A (ja) 保持装置
JP7214868B2 (ja) ウエハ載置台
JP7710891B2 (ja) 保持装置
JP2023006679A (ja) 静電チャック
JP7717026B2 (ja) 保持装置及び静電チャック
JP7674924B2 (ja) 保持装置
KR102363647B1 (ko) 베이스 플레이트 구조체 및 그 제조방법, 기판 고정 장치
JP7518725B2 (ja) 保持装置
JP7698542B2 (ja) 保持装置
JP4662910B2 (ja) 真空チャック
JP7774113B1 (ja) 保持装置
JP7721340B2 (ja) 保持部材
JP7784470B2 (ja) 保持装置
JP7514990B1 (ja) 保持装置