TWI791917B - 階梯式結構光學濾波器 - Google Patents

階梯式結構光學濾波器 Download PDF

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Publication number
TWI791917B
TWI791917B TW108139486A TW108139486A TWI791917B TW I791917 B TWI791917 B TW I791917B TW 108139486 A TW108139486 A TW 108139486A TW 108139486 A TW108139486 A TW 108139486A TW I791917 B TWI791917 B TW I791917B
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TW
Taiwan
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mirror
spacer
stepped
filter
medium
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TW108139486A
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English (en)
Chinese (zh)
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TW202024680A (zh
Inventor
威廉 Ｄ 浩克
史蒂芬 瑟希
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美商菲爾薇解析公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW108139486A 2018-11-02 2019-10-31 階梯式結構光學濾波器 TWI791917B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/179,480 2018-11-02
US16/179,480 US10962694B2 (en) 2018-11-02 2018-11-02 Stepped structure optical filter

Publications (2)

Publication Number Publication Date
TW202024680A TW202024680A (zh) 2020-07-01
TWI791917B true TWI791917B (zh) 2023-02-11

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Family Applications (2)

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TW108139486A TWI791917B (zh) 2018-11-02 2019-10-31 階梯式結構光學濾波器
TW111149950A TWI907760B (zh) 2018-11-02 2019-10-31 階梯式結構光學濾波器

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW111149950A TWI907760B (zh) 2018-11-02 2019-10-31 階梯式結構光學濾波器

Country Status (7)

Country Link
US (3) US10962694B2 (https=)
EP (1) EP3647839B1 (https=)
JP (3) JP7210417B2 (https=)
KR (2) KR102565869B1 (https=)
CN (2) CN111142179B (https=)
CA (1) CA3060740A1 (https=)
TW (2) TWI791917B (https=)

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US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter
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CN111579067B (zh) * 2020-05-22 2023-03-03 中国科学院上海技术物理研究所 一种具有超宽带外截止的集成窄带分光器件
WO2021237567A1 (zh) * 2020-05-28 2021-12-02 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件和光谱成像系统
EP3943988B1 (en) 2020-07-20 2023-12-27 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including the spectral filter
WO2022147920A1 (zh) * 2021-01-11 2022-07-14 苏州联讯仪器有限公司 用于光通信的光波长测量系统
CN113503978A (zh) * 2021-08-16 2021-10-15 苏州联讯仪器有限公司 光通信用光波长测量系统
WO2023027523A1 (ko) * 2021-08-27 2023-03-02 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
KR102727382B1 (ko) * 2021-08-27 2024-11-07 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
CN114236663B (zh) * 2021-12-15 2025-07-25 浙江大学 大面积单片集成的平坦化多通道滤光片阵列及制备方法
CN114551489A (zh) * 2022-02-11 2022-05-27 中国科学院上海技术物理研究所 一种分光与探测一体化的短波红外光谱探测器
CN115831041B (zh) * 2023-01-09 2023-04-18 北京数字光芯集成电路设计有限公司 一种阶梯式线阵MicroLED、扫描装置及扫描方法
CN119779483A (zh) * 2025-01-23 2025-04-08 星遥光宇(常州)科技有限公司 多光谱成像系统的焦面补偿方法、焦面补偿系统

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EP3284612A1 (de) * 2016-08-18 2018-02-21 Giesecke+Devrient Currency Technology GmbH Optisch variables sicherheitselement mit dünnschichtelement

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US20020191299A1 (en) * 2001-06-19 2002-12-19 Jain Ajaykumar R. Optical device for dispersion compensation
US20090302407A1 (en) * 2006-07-25 2009-12-10 Commissariat A L'energie Atomique Optical filtering matrix structure and associated image sensor
WO2008017490A2 (de) * 2006-08-09 2008-02-14 Opsolution Nanophotonics Gmbh Optisches filter und verfahren zur herstellung desselben, sowie vorrichtung zur untersuchung elektromagnetischer strahlung
US20120326430A1 (en) * 2011-06-23 2012-12-27 Jds Uniphase Corporation Multi color-shifting devices
US8980675B2 (en) * 2011-10-04 2015-03-17 Hamamatsu Photonics K.K. Production method for spectroscopic sensor
CN105093376A (zh) * 2015-09-07 2015-11-25 西安工业大学 中心波长渐变的带通滤光片制备方法
EP3284612A1 (de) * 2016-08-18 2018-02-21 Giesecke+Devrient Currency Technology GmbH Optisch variables sicherheitselement mit dünnschichtelement

Also Published As

Publication number Publication date
US12436328B2 (en) 2025-10-07
JP2024174959A (ja) 2024-12-17
US10962694B2 (en) 2021-03-30
US20200142111A1 (en) 2020-05-07
JP7210417B2 (ja) 2023-01-23
KR102951105B1 (ko) 2026-04-09
TW202024680A (zh) 2020-07-01
EP3647839A3 (en) 2020-07-29
KR20230118795A (ko) 2023-08-14
US20210199866A1 (en) 2021-07-01
CA3060740A1 (en) 2020-05-02
US11892664B2 (en) 2024-02-06
JP7822974B2 (ja) 2026-03-03
EP3647839A2 (en) 2020-05-06
KR102565869B1 (ko) 2023-08-10
KR20200050882A (ko) 2020-05-12
JP2020071488A (ja) 2020-05-07
CN117031607A (zh) 2023-11-10
EP3647839B1 (en) 2024-10-30
JP2023052306A (ja) 2023-04-11
TWI907760B (zh) 2025-12-11
CN111142179A (zh) 2020-05-12
US20240094450A1 (en) 2024-03-21
TW202316146A (zh) 2023-04-16
CN111142179B (zh) 2023-09-08

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