TWI730129B - 半導體裝置之製造方法 - Google Patents
半導體裝置之製造方法 Download PDFInfo
- Publication number
- TWI730129B TWI730129B TW106121451A TW106121451A TWI730129B TW I730129 B TWI730129 B TW I730129B TW 106121451 A TW106121451 A TW 106121451A TW 106121451 A TW106121451 A TW 106121451A TW I730129 B TWI730129 B TW I730129B
- Authority
- TW
- Taiwan
- Prior art keywords
- sheet
- semiconductor
- accommodating
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- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016128012 | 2016-06-28 | ||
JP2016-128012 | 2016-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201810507A TW201810507A (zh) | 2018-03-16 |
TWI730129B true TWI730129B (zh) | 2021-06-11 |
Family
ID=60785211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106121451A TWI730129B (zh) | 2016-06-28 | 2017-06-27 | 半導體裝置之製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6983775B2 (fr) |
KR (1) | KR102413733B1 (fr) |
CN (1) | CN109417045B (fr) |
TW (1) | TWI730129B (fr) |
WO (1) | WO2018003602A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7250468B6 (ja) * | 2018-10-12 | 2023-04-25 | 三井化学株式会社 | 電子装置の製造方法および粘着性フィルム |
JP7154962B2 (ja) * | 2018-11-09 | 2022-10-18 | 株式会社ディスコ | 板状物加工方法 |
JP7519917B2 (ja) | 2019-01-31 | 2024-07-22 | リンテック株式会社 | エキスパンド方法及び半導体装置の製造方法 |
TW202135276A (zh) * | 2019-10-29 | 2021-09-16 | 日商東京威力科創股份有限公司 | 附有晶片之基板的製造方法及基板處理裝置 |
KR102601746B1 (ko) * | 2020-08-31 | 2023-11-13 | 연세대학교 산학협력단 | Led 디스플레이 제조 방법 |
US11942352B2 (en) | 2020-08-31 | 2024-03-26 | Industry-Academic Cooperation Foundation, Yonsei University | Manufacturing method of LED display |
US20240128304A1 (en) * | 2021-02-25 | 2024-04-18 | Dongwoo Fine-Chem Co., Ltd. | Led lighting device and method for manufacturing the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0794535A (ja) * | 1993-09-20 | 1995-04-07 | Nec Corp | 半導体ペレット位置決め装置 |
JP2011096961A (ja) * | 2009-11-02 | 2011-05-12 | Citizen Electronics Co Ltd | Led素子の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6461033A (en) * | 1987-09-01 | 1989-03-08 | Sumitomo Electric Industries | Device for mounting chip |
JPH03177030A (ja) * | 1989-12-05 | 1991-08-01 | Matsushita Electron Corp | チップ位置決め装置 |
JP2003179125A (ja) * | 2001-12-10 | 2003-06-27 | Hitachi Ltd | 半導体装置の製造方法および分離整列治具 |
JP2005203695A (ja) * | 2004-01-19 | 2005-07-28 | Casio Micronics Co Ltd | 半導体装置およびその製造方法 |
JP4566626B2 (ja) * | 2004-06-09 | 2010-10-20 | 株式会社石川製作所 | 半導体基板の分断方法および半導体チップの選択転写方法 |
WO2010058646A1 (fr) | 2008-11-21 | 2010-05-27 | インターナショナル・ビジネス・マシーンズ・コーポレーション | Boîtier de semi-conducteur et son procédé de fabrication |
JP5912274B2 (ja) | 2011-03-28 | 2016-04-27 | 株式会社東京精密 | チップ分割離間装置、及びチップ分割離間方法 |
JP5472275B2 (ja) * | 2011-12-14 | 2014-04-16 | 株式会社村田製作所 | エキスパンド装置及び部品の製造方法 |
US9082940B2 (en) * | 2012-06-29 | 2015-07-14 | Nitto Denko Corporation | Encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device |
JP6371641B2 (ja) * | 2014-09-02 | 2018-08-08 | リンテック株式会社 | 整列装置および整列方法 |
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2017
- 2017-06-20 WO PCT/JP2017/022686 patent/WO2018003602A1/fr active Application Filing
- 2017-06-20 CN CN201780039795.9A patent/CN109417045B/zh active Active
- 2017-06-20 JP JP2018525080A patent/JP6983775B2/ja active Active
- 2017-06-20 KR KR1020187035156A patent/KR102413733B1/ko active IP Right Grant
- 2017-06-27 TW TW106121451A patent/TWI730129B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0794535A (ja) * | 1993-09-20 | 1995-04-07 | Nec Corp | 半導体ペレット位置決め装置 |
JP2011096961A (ja) * | 2009-11-02 | 2011-05-12 | Citizen Electronics Co Ltd | Led素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN109417045B (zh) | 2023-06-23 |
CN109417045A (zh) | 2019-03-01 |
WO2018003602A1 (fr) | 2018-01-04 |
KR102413733B1 (ko) | 2022-06-27 |
TW201810507A (zh) | 2018-03-16 |
JPWO2018003602A1 (ja) | 2019-04-11 |
JP6983775B2 (ja) | 2021-12-17 |
KR20190021223A (ko) | 2019-03-05 |
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