TWI719055B - Transport mechanism of processing device - Google Patents

Abstract

The subject of the present invention is to provide a transport mechanism suitable for a space-saving processing device.

The solution is to be installed in the processing device (2). The processing device (2) includes: a fixture table (10); a processing means (12); the processing area of the processed object (10) and the moving in and out of the processed object The processing and conveying means that move the fixture table toward the processing and conveying direction between the moving in and out of the area; and the indexing conveying means (16) that moves the processing means in the indexing conveying direction perpendicular to the processing and conveying direction to unload the processed objects The transport mechanism of the processing device inserted in the fixture table is provided with: a loading platform (42) that supports the workpiece before processing in an area adjacent to the processing transport means adjacent to the carry-out area; and the processing transport adjacent to the carry-out area The area on the other side of the means supports the unloading table (44) of the processed object after processing; and the conveying means (46, 48, 52) that transports the processed object between the fixture table and the loading or unloading table.

Description

Transport mechanism of processing device

The present invention relates to a conveying mechanism of a processing device for processing a plate-shaped to-be-processed object.

When dividing a plate-shaped workpiece represented by a semiconductor wafer or a package substrate into a plurality of wafers, for example, a processing device such as a cutting device or a laser processing device is used. In recent years, in order to reduce the cost required for the construction and maintenance of the green energy house, the space saving of the above-mentioned processing equipment has been accelerated (for example, see Patent Documents 1, 2, etc.).

The space saving of the processing device can be realized by, for example, omitting the conveying mechanism of the workpiece from the processing device. When the handling mechanism of the workpiece is omitted, the workpiece to be moved into or out of the fixture table is completed by the operator's hand.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2010-272842 A

[Patent Document 2] JP 2013-254834 A

However, as described above, in the case where the workpiece is transported by the operator's hand, more operations are necessary than in the case of automatic transport by the transport mechanism, which on the contrary leads to an increase in the processing cost.

The present invention is developed in view of the above-mentioned problems, and its purpose is to provide a transport mechanism suitable for a space-saving processing device.

According to the present invention, there is provided a conveying mechanism of a processing device, which is provided in a processing device, and the processing device includes: a jig table holding a workpiece; a processing means for processing the workpiece held on the jig table; The processing and conveying means that moves the fixture table in the processing and conveying direction between the processing area of the object processing and the unloading and in-out area of the processed object; and the processing means moves in the indexing conveying direction perpendicular to the processing and conveying direction The indexing conveying means for transporting the workpiece into and out of the processing device of the fixture table is characterized in that it is provided with: an area configured on one side of the processing conveying means adjacent to the carry-out area can support processing The loading platform of the previous workpiece; the unloading platform configured to support the processed workpiece in the area on the other side of the processing and conveying means adjacent to the carry-out area; and between the fixture platform and the loading platform or the A conveying means for conveying workpieces between unloading stations. The conveying means includes: a loading area adjacent to the carry-out area on one side of the processing and transport means and a loading area positioned directly above the clamp table in the carry-out area The loading platform moving means to move the loading platform between the upper areas; on the other side of the processing and transporting means Unloading table moving means for moving the unloading table between the unloading area adjacent to the moving-in area and the area directly above; moving in the vertical direction by a direct-acting mechanism, and positioning the clamp table in the moving-in area; and The loading platform or the unloading platform in the area above the loading platform or the unloading platform transfers the workpiece, the loading platform and the unloading platform are moved separately by the loading platform moving means and the unloading platform moving means.

In the present invention, it is preferable to position the unloading table in the unloading area when the workpiece is carried into the clamp table, and to position the loading table in the loading area when the workpiece is carried out from the clamp table. The loading platform moving means is preferably provided with a guide rail, and the loading platform is preferably moved along the guide rail. The moving means of the unloading table is preferably provided with a guide rail, so that the unloading table moves along the guide rail.

In addition, in the present invention, it is further provided with a drying means which is provided on the moving path of the unloading table and sprays air toward the exposed surface of the workpiece supported by the unloading table to remove the working fluid adhering during processing from the workpiece Better.

The conveying mechanism of the processing apparatus of the present invention includes: a loading platform for supporting the workpiece before processing in an area on one side of the processing conveying means adjacent to the carry-in area; and a loading platform on the other side of the processing conveying means adjacent to the carrying-out area The area supports the unloading table of the processed object after processing; and the means of transporting the processed object between the fixture table and the loading table or the unloading table, which can effectively use the remaining areas existing on both sides of the moving-in area.

Therefore, it is possible to maintain the space-saving state and the automatic conveyance is For processed objects, the cost required for transportation can be reduced. That is, according to the present invention, it is possible to provide a transport mechanism suitable for a space-saving processing device.

2‧‧‧Cutting device (processing device)

4‧‧‧Abutment

4a‧‧‧Opening

6‧‧‧X axis moving table

8‧‧‧Dust-proof and drip-proof cover

10‧‧‧Fixture Table

10a‧‧‧Keep the surface

12‧‧‧Cutting unit (processing means)

14‧‧‧Support structure

16‧‧‧Cutting unit moving mechanism (indexing transmission means)

18‧‧‧Y axis guide

20‧‧‧Y-axis moving plate

22‧‧‧Y-axis ball screw

24‧‧‧Y-axis pulse motor

26‧‧‧Z axis guide

28‧‧‧Z axis moving plate

30‧‧‧Z axis ball screw

32‧‧‧Z axis pulse motor

34‧‧‧Cutting edge

36‧‧‧Camera

42‧‧‧Loading table

42a‧‧‧Keep the surface

44‧‧‧Unloading station

44a‧‧‧Keep the surface

46‧‧‧Loading and moving mechanism (loading and moving means, conveying means)

48‧‧‧Unloading moving mechanism (unloading moving means, handling means)

50‧‧‧Guide

52‧‧‧Reprinting mechanism (reprinting means, conveying means)

54‧‧‧Attraction Department

56‧‧‧Nozzle (drying means)

11‧‧‧Processed objects

13‧‧‧Tape

15‧‧‧Frame

Fig. 1 is a perspective view schematically showing a configuration example of the cutting device, etc.

Figure 2(A) is a top view schematically showing how the workpiece is held in the transfer mechanism, and Figure 2(B) is a schematic diagram showing the case where the ring frame is fixed on the outer part of the tape, and the workpiece is held in the transfer mechanism Top view of what looks like.

Fig. 3(A), Fig. 3(B), Fig. 3(C), and Fig. 3(D) are side views (front views) schematically showing one continuous step when the workpiece is carried into the fixture table.

Fig. 4(A), Fig. 4(B), and Fig. 4(C) are side views (front views) schematically showing one of the successive steps when the workpiece is carried out from the fixture table.

Fig. 5 is a top view schematically showing a configuration example of a transport mechanism related to a modification.

Please refer to the attached drawings for the description of the embodiments of the present invention. Fig. 1 is a diagram schematically showing a configuration example and the like of a cutting device provided with a conveying mechanism related to the present embodiment. In addition, in the present embodiment, although the description is given of a cutting device for cutting a plate-shaped workpiece, the processing device of the present invention may also be a laser processing device or the like that performs processing of the workpiece with laser light.

As shown in Figure 1, the cutting device (processing device) 2 has Support the base 4 of each structure. In the center of the base 4, a rectangular opening 4a long in the X-axis direction (front-rear direction, processing and conveying direction) is formed. Inside the opening 4a, there are provided: an X-axis moving table 6; an X-axis moving mechanism (processing conveying means) (not shown) that moves the X-axis moving table 6 in the X-axis direction; and dustproof covering the X-axis moving mechanism Anti-drip cover 8.

Above the X-axis moving table 6, a clamp table 10 that holds the workpiece 11 is provided. As shown in FIG. 1, the workpiece 11 is, for example, a rectangular semiconductor wafer, a package substrate, a ceramic substrate, a glass substrate, etc., and an adhesive tape (film) 13 is attached to the lower surface. However, the shape, material, etc. of the workpiece are not limited. In addition, the ring frame may be fixed to the outer portion of the tape 13.

The clamp table 10 is moved in the X-axis direction together with the X-axis moving table 6 by the above-mentioned X-axis moving mechanism. In detail, the clamp table 10 is moved in the X-axis direction between the processing area at the center of the processing of the workpiece 11 and the carry-out area before the workpiece 11 is carried in and out. In addition, when the workpiece 11 is processed, the jig table 10 is also processed and transported in the X-axis direction in the processing area.

In addition, the clamp table 10 is a rotation drive source (not shown) connected to a motor or the like, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). The upper surface of the clamp table 10 serves as a holding surface 10a for sucking and holding the workpiece 11. The holding surface 10a is connected to a suction source (not shown) through a suction channel (not shown) or the like formed inside the clamp table 10.

Two sets of supports across the opening 4a are arranged on the top of the base 4 The gate-shaped support structure 14 of the cutting unit (processing means) 12. On the upper part of the front surface of the support structure 14, two sets of cutting unit moving mechanisms (indexing conveying means) 16 that move each cutting unit 12 in the Y-axis direction (left-right direction, indexing conveying direction) and Z-axis direction are provided.

Each cutting unit moving mechanism 16 is provided with a pair of Y-axis guide rails 18 that are arranged on the front surface of the support structure 14 in parallel to the Y-axis direction. The Y-axis guide 18 is slidably mounted with a Y-axis moving plate 20 constituting each cutting unit moving mechanism 16.

A nut portion (not shown) is provided on the back side (rear side) of each Y-axis moving plate 20, and Y-axis ball screws 22 parallel to the Y-axis guide 18 are respectively latched to the nut portions.

A Y-axis pulse motor 24 is connected to one end of each Y-axis ball screw 22. When the Y-axis ball screw 22 is rotated by the Y-axis pulse motor 24, the Y-axis moving plate 20 moves in the Y-axis direction along the Y-axis guide 18.

A pair of Z-axis guide rails 26 parallel to the Z-axis direction are provided on the surface (front surface) of each Y-axis moving plate 20. A Z-axis moving plate 28 is slidably attached to the Z-axis guide 26.

A nut portion (not shown) is provided on the back side (rear side) of each Z-axis moving plate 28, and a Z-axis ball screw 30 parallel to the Z-axis guide 26 is latched to the nut portion.

A Z-axis pulse motor 32 is connected to one end of each Z-axis ball screw 30. When the Z-axis ball screw 30 is rotated by the Z-axis pulse motor 32, the Z-axis moving plate 28 moves in the Z-axis direction along the Z-axis guide 26.

A cutting unit 12 is provided at the lower part of each Z-axis moving plate 28. The cutting unit 12 includes a circular cutting edge 34 attached to one end of a spindle (not shown) that becomes a rotating shaft. At a position adjacent to the cutting edge 34, a nozzle for supplying a cutting fluid (working fluid) such as pure water during cutting (processing) of the workpiece 11 is arranged. In addition, a camera 36 for photographing the workpiece 11 and the like is provided adjacent to the cutting unit 12.

When each cutting unit moving mechanism 16 moves the Y-axis moving plate 20 in the Y-axis direction, the cutting unit 12 and the camera 36 are indexed and transported in the Y-axis direction. In addition, when the Z-axis moving plate 28 is moved in the Z-axis direction by each cutting unit moving mechanism 16, the cutting unit 12 and the camera 36 are raised and lowered.

On the front side of the base 4, a loading table 42 and an unloading table 44 constituting the transport mechanism according to the present embodiment are arranged. The loading table 42 is, for example, arranged in an area adjacent to the carry-in area on one side of the X-axis movement mechanism (opening 4a), and supports the workpiece 11 before processing.

On the other hand, the unloading table 44 is, for example, arranged in an area adjacent to the carry-in area on the other side of the X-axis movement mechanism (opening 4a), and supports the processed object 11 after processing. That is, the loading table 42 and the unloading table 44 are arranged at positions sandwiching the opening 4a from the side (Y-axis direction).

Below the loading platform 42, a loading platform moving mechanism (loading platform moving means, conveying means) 46 for moving the loading platform 42 is provided. And below the unloading table 44, an unloading table moving mechanism (unloading table moving means, conveying means) 48 for moving the unloading table 44 is provided.

The loading platform moving mechanism 46 and the unloading platform moving mechanism 48 are For example, a pair of guide rails 50 parallel to the Y-axis direction are provided in common, and the loading table moving mechanism 46 and the unloading table moving mechanism 48 are moved along the guide rail 50 by force generated by a cylinder or the like.

With this loading table moving mechanism 46, the loading table 42 moves between the loading area adjacent to the unloading area by one side of the X-axis moving mechanism and the area directly above the clamp table 10 positioned in the loading/unloading area. In addition, by the unloading table moving mechanism 48, the unloading table 44 moves between the unloading area adjacent to the unloading area on the other side of the X-axis moving mechanism and the area directly above.

The upper surfaces of the loading table 42 and the unloading table 44 serve as holding surfaces 42a and 44a for sucking and holding the workpiece 11, respectively. The holding surfaces 42a and 44a are connected to a suction source (not shown) through suction channels (not shown) or the like formed inside the loading table 42 and the unloading table 44, respectively.

In addition, in this embodiment, although the loading stand 42 and the unloading stand 44 which can suck the to-be-processed object 11 are illustrated, the loading stand and the unloading stand according to the present invention may be configured to support the processed object 11 at least. That is, the loading station and the unloading station related to the present invention may not be able to attract the workpiece 11.

Above the area directly above, there is provided a transfer mechanism (reprinting means) that transports and reproduces the workpiece 11 between the fixture table 10 positioned in the loading/unloading area and the loading table 42 or unloading table 44 positioned in the area directly above , Transportation means) 52. The transfer mechanism 52 includes a plurality of suction parts 54 (four in this embodiment) that suction and hold the workpiece 11, and move in the vertical direction by a direct-acting mechanism (not shown). Each suction part 54 It is connected to a suction source (not shown) through a pipe (not shown) or the like.

Above the moving path of the unloading table 44, a nozzle (drying means) 56 for spraying air is arranged. This nozzle 56 sprays air toward the upper surface (exposed surface) of the workpiece 11 when the unloading table 44 supporting the workpiece 11 moves from the area directly above to the unloading region. Thereby, the cutting fluid and the like adhering to the workpiece 11 are dried and removed from the workpiece 11.

FIG. 2(A) is a top view schematically showing how the workpiece 11 is held by the transfer mechanism 52 described above. As shown in FIG. 2(A), when the suction part 54 is in contact with the upper surface of the tape 13 and the negative pressure of the suction source is applied, the tape 13 is attracted by the suction part 54. Thereby, the transfer mechanism 52 can hold the to-be-processed object 11.

Furthermore, the transfer mechanism 52 can also hold the workpiece 11 when the ring frame is fixed to the outer part of the tape 13. FIG. 2(B) is a top view schematically showing the state in which the workpiece 11 is held by the transfer mechanism 52 when the ring frame is fixed to the peripheral portion of the tape 13.

At this time, as long as the suction part 54 is in contact with the upper surface of the ring frame 15 fixed to the outer part of the tape 13 and the negative pressure of the suction source acts, the frame 15 will be attracted by the suction part 54. Thereby, even if the ring frame 15 is fixed to the outer part of the tape 13, the transfer mechanism 52 can still hold the workpiece 11.

The state of conveying the workpiece 11 by the conveying mechanism of this embodiment is demonstrated. Figures 3(A), 3(B), 3(C), and 3(D) are side views (front view) schematically showing one of the successive steps when the workpiece 11 is loaded into the fixture table 10 ).

When carrying the workpiece 11 into the clamp table 10, first, as shown in FIG. 3(A), the clamp table 10 is positioned in the carry-in/out area, and the loading table 42 is positioned in the loading area. Furthermore, in this embodiment, although the unloading table 44 is pre-positioned in the unloading area, it is only necessary that the moving unloading table 44 does not interfere with the loading table 42. For example, at this stage, the unloading station 44 may be positioned in the area directly above in advance, and then, when the loading station 42 is moved, the unloading station 44 may be moved toward the unloading area.

After the loading table 42 is positioned in the loading area, the workpiece 11 and the tape 13 are placed on the loading table 42, and the negative pressure of the suction source is applied to the holding surface 42a. Next, as shown in FIG. 3(B), after the loading table 42 is moved to the area directly above, the transfer mechanism 52 is lowered, and the suction part 54 sucks the tape 13 on the loading table 42.

After the tape 13 is sucked by the suction portion 54, the suction of the holding surface 42a by the loading table 42 is released, and the transfer mechanism 52 is raised. And, as shown in FIG. 3(C), after the loading table 42 is moved out of the area directly above (for example, the loading area), the transfer mechanism 52 is lowered, and the tape 13 is brought into contact with the holding surface 10a of the clamp table 10.

Subsequently, the negative pressure of the suction source is applied to the holding surface 10a of the clamp table 10, and the suction of the tape 13 by the suction portion 54 is released. As shown in FIG. 3(D), the transfer mechanism 52 is raised. Through this one continuous step, the workpiece 11 can be carried into the fixture table 10.

Fig. 4(A), Fig. 4(B), and Fig. 4(C) are side views (front views) schematically showing one of the successive steps when the workpiece 11 is carried out from the clamp table 10. When carrying out the workpiece 11 from the fixture table 10, First, as shown in FIG. 4(A), the clamp table 10 is positioned in the carry-in/out area, and the unloading table 44 is positioned outside the area directly above (for example, the unloading area).

In addition, it is sufficient to position the loading platform 42 outside the area directly above, but in the present embodiment, the loading platform 42 is positioned in the loading area in advance. After the unloading table 44 is positioned outside the area directly above, the transfer mechanism 52 is lowered to suck the tape 13 on the clamp table 10 by the suction part 54.

After the tape 13 is sucked by the suction portion 54, the suction of the holding surface 10a by the clamp table 10 is released, and the transfer mechanism 52 is raised. And, as shown in FIG. 4(B), after the unloading table 44 moves to the area directly above, the transfer mechanism 52 is lowered so that the tape 13 is in contact with the holding surface 44a of the unloading table 44.

Subsequently, the negative pressure of the suction source is applied to the holding surface 44a of the unloading table 44, and the suction of the tape 13 by the suction portion 54 is released. As shown in Fig. 3(C), the unloading table 44 is moved after the transfer mechanism 52 is raised. To the unloading area. Through this one continuous step, the workpiece 11 can be carried out from the fixture table 10.

As described above, the conveying mechanism of the processing device of this embodiment includes: a loading table 42 that supports the workpiece 11 before processing in an area on the side of the X-axis movement mechanism (processing conveying means) adjacent to the carry-in area; The area on the other side of the X-axis movement mechanism adjacent to the carry-in area supports the unloading table 44 of the processed object 11 after processing; and the loading table that transports the processed object between the fixture table 10 and the loading table 42 or the unloading table 44 Moving mechanism (loading platform moving means, conveying means) 46, unloading platform moving The moving mechanism (unloading platform moving means, conveying means) 48 and the reprinting moving mechanism (loading means, conveying means) 52 effectively utilize the remaining areas existing on both sides of the moving-in area.

Therefore, the workpiece 11 can be automatically conveyed while maintaining the space-saving state. That is, the number of operators required for transportation can be reduced, and the cost can be reduced.

In addition, in the transport mechanism of the processing apparatus according to the present embodiment, when the workpiece 11 is loaded into the fixture table 10, the unloading table 44 can be pre-positioned in the unloading area. Therefore, for example, the unloading table can be unloaded at a relatively free timing. 44 to be processed 11 after processing.

Similarly, in the transport mechanism of the processing apparatus according to this embodiment, when the workpiece 11 is unloaded from the fixture table 10, the loading table 42 can be positioned in the loading area in advance. Therefore, for example, it is possible to move the workpiece before processing at a relatively free timing. The processed object 11 is placed on the loading table 42.

That is, compared with the case where the work piece 11 is carried in and out of the clamp table 10 by the operator's hand, the work of replacing the work piece 11 has a longer time, and therefore, it is possible to prevent the processing process from being delayed due to a delay in carrying out. In addition, since the replacement operation of the workpiece 11 has a relatively long time, the number of operators can be further reduced.

In addition, in the conveying mechanism of the processing apparatus according to the present embodiment, the loading table 42 or the unloading table 44 holds the whole surface of the workpiece 11 for a long time, so the workpiece 11 being conveyed is not easily bent. Therefore, it is possible to prevent the to-be-processed object 11 from being damaged due to bending during transportation.

In addition, the present invention is not limited to the description of the above-mentioned embodiment. Make various changes and implement them. For example, in the above-mentioned embodiment, the loading table 42 and the unloading table 44 are moved in a direction parallel to the Y-axis direction, but the loading table 42 and the unloading table 44 may be moved in an inclined direction with respect to the Y-axis direction.

Fig. 5 is a top view schematically showing a configuration example of a transport mechanism related to a modification. For example, when there are obstacles that hinder movement, as shown in Figure 5, the loading table 42 and the unloading table 44 are moved in a direction inclined with respect to the Y-axis direction to avoid the obstacles and carry out the workpiece 11 Handling.

In addition, in the above-mentioned embodiment, although the transfer mechanism (transfer means, conveying means) 52 holding the workpiece 11 with the negative pressure of the suction source is exemplified, for example, a transfer mechanism that holds the workpiece 11 or the frame 15 with a magnetic force may also be used. Institutions (reprinting means, handling means). However, in this case, it is necessary to use the to-be-processed object 11 or the frame 15 formed of a material that generates magnetic force.

In addition, the structure, method, etc. related to the above-mentioned embodiment can be suitably changed and implemented as long as it does not deviate from the purpose of the present invention.

2: Cutting device (processing device)

4: Abutment

4a: opening

6: X axis moving stage

8: Dust-proof and drip-proof cover

10: Fixture table

10a: Keep the face

11: processed objects

12: Cutting unit (processing means)

13: tape

14: Support structure

16: Cutting unit moving mechanism (indexing transmission means)

18: Y-axis guide

20: Y-axis moving plate

22: Y-axis ball screw

24: Y-axis pulse motor

26: Z axis guide

28: Z-axis moving plate

30: Z axis ball screw

32: Z-axis pulse motor

34: cutting edge

36: Camera

42: loading platform

42a: Keep the face

44: Unloading station

44a: Keep the face

46: Loading and moving mechanism (loading and moving means, handling means)

48: Unloading moving mechanism (unloading moving means, handling means)

50: Rail

52: Reprinting mechanism (reprinting means, handling means)

54: Attraction Department

56: Nozzle (drying means)

Claims (7)

A conveying mechanism of a processing device is provided in a processing device. The processing device is provided with: a fixture table holding a workpiece; a processing means for processing the workpiece held on the fixture table; and a processing area where the workpiece is processed Processing and conveying means that move the fixture table in the processing and conveying direction between the load-out and in-out areas where the workpiece is conveyed in and out; and an indexing conveying means that moves the processing means in the indexing conveying direction perpendicular to the processing and conveying direction , The conveying mechanism of the processing device that carries the workpiece into and out of the fixture table is characterized by comprising: an area formed on one side of the processing conveying means adjacent to the carry-out area can support the workpiece before processing Loading platform; an unloading platform configured to support the processed objects in the area on the other side of the processing and conveying means adjacent to the carry-in area; and transporting the processed objects between the fixture platform and the loading platform or the unloading platform Means for conveying processed objects, the conveying means includes: moving the loading area between a loading area adjacent to the carry-in area on one side of the processing and transporting means and an area directly above the clamp table positioned in the carry-out area Loading platform moving means for the loading platform; unloading platform moving means for moving the unloading platform between the unloading area adjacent to the carry-in/out area on the other side of the processing and transporting means and the area directly above the unloading platform; and by means of a direct-acting mechanism Moving in the vertical direction, the fixture table positioned in the carry-out area, and the loading table or the unloading table positioned in the area directly above A transfer means for conveying the processed objects between the stages, and the load stage and the unload stage are moved separately by the load stage moving means and the unload stage moving means. For example, the transport mechanism of the processing device described in the first item of the scope of patent application, wherein when the workpiece is carried into the fixture table, the unloading table is positioned in the unloading area, and when the workpiece is carried out from the fixture table, Position the loading platform in the loading area. For example, in the transport mechanism of the processing device described in the first item of the scope of patent application, the loading platform moving means is provided with a guide rail to move the loading platform along the guide rail. For example, in the transport mechanism of the processing device described in the second item of the scope of patent application, the loading platform moving means is provided with a guide rail to move the loading platform along the guide rail. For example, the conveying mechanism of a processing device described in any one of items 1 to 4 of the scope of patent application, wherein the unloading table moving means is provided with a guide rail to move the unloading table along the guide rail. For example, the conveying mechanism of the processing device described in any one of items 1 to 4 of the scope of the patent application, which further includes an exposed surface of the workpiece provided on the moving path of the unloading table and facing the unloading table It is a drying means that sprays air to remove the working fluid adhering during processing from the workpiece. For example, the conveying mechanism of the processing device described in the 5th item of the scope of patent application, which is further provided with the moving path of the unloading table, and spraying air toward the exposed surface of the workpiece supported by the unloading table to reduce the processing time. Drying means for removing the attached machining fluid from the workpiece.

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