TWI650830B - 脆性材料基板的搬送方法及搬送裝置 - Google Patents
脆性材料基板的搬送方法及搬送裝置 Download PDFInfo
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- TWI650830B TWI650830B TW104103594A TW104103594A TWI650830B TW I650830 B TWI650830 B TW I650830B TW 104103594 A TW104103594 A TW 104103594A TW 104103594 A TW104103594 A TW 104103594A TW I650830 B TWI650830 B TW I650830B
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- 239000000758 substrate Substances 0.000 title claims abstract description 103
- 239000000463 material Substances 0.000 title claims description 51
- 229920005989 resin Polymers 0.000 claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 11
- 230000000875 corresponding Effects 0.000 claims description 14
- 238000000926 separation method Methods 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 10
- 229920002050 silicone resin Polymers 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004642 transportation engineering Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000000717 retained Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-092494 | 2014-04-28 | ||
| JP2014092494A JP6331656B2 (ja) | 2014-04-28 | 2014-04-28 | 脆性材料基板の搬送方法及び搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201541549A TW201541549A (zh) | 2015-11-01 |
| TWI650830B true TWI650830B (zh) | 2019-02-11 |
Family
ID=54442835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104103594A TWI650830B (zh) | 2014-04-28 | 2015-02-03 | 脆性材料基板的搬送方法及搬送裝置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6331656B2 (ja) |
| KR (1) | KR20150124379A (ja) |
| CN (1) | CN105035761B (ja) |
| TW (1) | TWI650830B (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6282176B2 (ja) * | 2014-05-29 | 2018-02-21 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の端材分離装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005225603A (ja) * | 2004-02-12 | 2005-08-25 | Toyota Industries Corp | パネル搬送装置 |
| JP2007256017A (ja) * | 2006-03-22 | 2007-10-04 | Mega Trade:Kk | 外観検査装置 |
| JP2008251653A (ja) * | 2007-03-29 | 2008-10-16 | Sharp Corp | 低負荷搬送装置 |
| JP2011181936A (ja) * | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |
| TW201331009A (zh) * | 2012-01-16 | 2013-08-01 | Mitsuboshi Diamond Ind Co Ltd | 脆性材料基板之裂斷方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4646467B2 (ja) * | 2001-09-04 | 2011-03-09 | 旭化成せんい株式会社 | 紡績糸 |
| JP3779237B2 (ja) * | 2002-07-04 | 2006-05-24 | 住友電気工業株式会社 | 基板切断方法及び基板切断装置 |
| JP4139368B2 (ja) * | 2004-09-15 | 2008-08-27 | 京元電子股▲ふん▼有限公司 | 電子装置試験用ピックアップ装置 |
| CN2839170Y (zh) * | 2005-09-30 | 2006-11-22 | 富士迈半导体精密工业（上海）有限公司 | 基板载具 |
| JP2010118424A (ja) * | 2008-11-12 | 2010-05-27 | Disco Abrasive Syst Ltd | 薄板状ワークの搬送装置 |
| CN201540830U (zh) * | 2009-10-30 | 2010-08-04 | 天津三星电机有限公司 | 贴片电容基板切断设备中用于基板投入的装置 |
| JP2011114070A (ja) * | 2009-11-25 | 2011-06-09 | Disco Abrasive Syst Ltd | 加工装置 |
| JP2013078810A (ja) * | 2011-10-03 | 2013-05-02 | Smc Corp | 真空吸着装置 |
| CN102381554B (zh) * | 2011-11-01 | 2013-03-13 | 武汉人天包装技术有限公司 | 一种取盘机 |
| CN202414765U (zh) * | 2011-12-31 | 2012-09-05 | 无锡市奥曼特科技有限公司 | 一种板式pecvd设备自动上下料系统的硅片搬运机构 |
| CN203143683U (zh) * | 2013-03-13 | 2013-08-21 | 龙口市埃迪克自动化设备有限公司 | 小型定向多点位搬送机械装置 |
| JP5744109B2 (ja) * | 2013-06-05 | 2015-07-01 | 三星ダイヤモンド工業株式会社 | 脆性基板搬送ユニット |
-
2014
- 2014-04-28 JP JP2014092494A patent/JP6331656B2/ja active Active
-
2015
- 2015-02-03 TW TW104103594A patent/TWI650830B/zh active
- 2015-02-03 KR KR1020150016704A patent/KR20150124379A/ko not_active Application Discontinuation
- 2015-03-27 CN CN201510138030.3A patent/CN105035761B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005225603A (ja) * | 2004-02-12 | 2005-08-25 | Toyota Industries Corp | パネル搬送装置 |
| JP2007256017A (ja) * | 2006-03-22 | 2007-10-04 | Mega Trade:Kk | 外観検査装置 |
| JP2008251653A (ja) * | 2007-03-29 | 2008-10-16 | Sharp Corp | 低負荷搬送装置 |
| JP2011181936A (ja) * | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |
| TW201331009A (zh) * | 2012-01-16 | 2013-08-01 | Mitsuboshi Diamond Ind Co Ltd | 脆性材料基板之裂斷方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201541549A (zh) | 2015-11-01 |
| JP2015208938A (ja) | 2015-11-24 |
| CN105035761B (zh) | 2019-01-04 |
| JP6331656B2 (ja) | 2018-05-30 |
| CN105035761A (zh) | 2015-11-11 |
| KR20150124379A (ko) | 2015-11-05 |
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