TWI637923B - Scoring wheel - Google Patents
Scoring wheel Download PDFInfo
- Publication number
- TWI637923B TWI637923B TW105122679A TW105122679A TWI637923B TW I637923 B TWI637923 B TW I637923B TW 105122679 A TW105122679 A TW 105122679A TW 105122679 A TW105122679 A TW 105122679A TW I637923 B TWI637923 B TW I637923B
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- Prior art keywords
- wheel
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- 239000010432 diamond Substances 0.000 claims abstract description 22
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 abstract description 33
- 239000000463 material Substances 0.000 abstract description 25
- 239000011521 glass Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N Tungsten carbide Chemical compound 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[W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt Chemical compound 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[Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052803 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium Chemical compound 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Abstract
本發明提供一種對高硬度脆性材料基板之「侵入」特性佳，且能自開始刻劃之位置立即使垂直裂紋產生的刻劃輪。
於刻劃輪之外周形成剖面V字形之由單結晶鑽石或多結晶鑽石構成之傾斜面，傾斜面之算術平均粗糙度Ra設為0.01μm以下。在傾斜面14a、14b相交之稜線13的部分，形成未達8μm之固定間距之槽15a、15b。藉此，以鑽石作為素材之刻劃輪，能夠使「侵入」特性提高。
Description
本發明係關於一種適合於刻劃高硬度脆性材料基板的刻劃輪。
以往，在液晶顯示器面板或太陽電池等之製程中，設有脆性材料基板之分斷步驟。於分斷步驟，一邊對由超硬合金或多結晶燒結鑽石(PCD)等構成之刻劃輪施加視脆性材料基板之材質或厚度等諸多條件而定之負載、一邊使刻劃輪於脆性材料基板之表面上滾動以形成刻劃線，以形成從刻劃線往脆性材料基板之厚度方向延伸之垂直裂紋。然後，藉由沿脆性材料基板之刻劃線施加既定的力將脆性材料基板加以分斷，以製造出各個面板或玻璃板。
玻璃素材製造商，在進行了基板材料的改良、熱處理加工的各種改良後的結果，出現了以下現象：在使用具備有習知的刃前端(普通刃前端)的刻劃輪(以下，亦稱普通輪)進行刻劃時，呈現「侵入不佳」的狀態，亦即在刻劃輪滾動後，刃前端於基板表面打滑而無法形成刻劃線。
專利文獻1中揭示了具有高浸透效果的刻劃輪。該刻劃輪，具有沿剖面V字形之圓周稜線於圓周方向交互形成之多個缺口與突起。當使用此刻劃輪時，能夠形成從玻璃基板表面往垂直方向、相對玻璃基板之板厚較深之垂直裂紋。
上述高浸透刃前端之刻劃輪，被廣泛認知為係一種「侵入性」較普通刃前端之刻劃輪佳的刃前端。
專利文獻1：日本特許第3074143號公報
然而，在對較玻璃基板更硬之陶瓷等高硬度之脆性材料基板進行刻劃時，由於超硬合金或PCD製之刻劃輪係以碳化鎢或鑽石粒子與鈷等結合材構成，因此存在有因刃前端缺損或磨耗等而無法形成長距離裂紋的情況。因此，在對較硬的脆性材料基板進行刻劃時，較佳係使用較超硬合金或燒結鑽石更硬、且為均質材料的單結晶等之鑽石製刻劃輪。鑽石素材之刻劃輪中，刃前端為鏡面狀、且傾斜面之表面粗糙度小。因此被認為更容易在基板上打滑，使「侵入」變差，而難以從刻劃開始後便使垂直裂紋產生。
本發明係有鑑於上述鑽石素材之刻劃輪之問題而完成，其目的在提供一種即便是使用鑽石素材之刻劃輪對脆性材料基板進行刻劃的情形，「侵入」亦佳且垂直裂紋亦容易產生之刻劃輪。
為了解決此課題，本發明之刻劃輪，於圓板周圍具有由以鑽石構成之稜線與一對傾斜面所構成之剖面V字形之刃前端，該一對傾斜面之算術平均粗糙度設為0.01μm以下，在該刃前端之至少一方之傾斜面之稜線部分遍及全周具有間距未達8μm之槽。
此處亦可為：該刻劃輪之槽，形成為與該刻劃輪之圓板之中心軸平行。
此處亦可為：該刻劃輪由單結晶鑽石構成。
亦可為：對該刻劃輪之稜線部分實施之槽之深度設為0.3μm以下。
亦可為：對該刻劃輪之稜線部分實施之槽之間距設為1μm以下。
此外，為解決該課題，本發明之刻劃輪，於圓板周圍具有由以鑽石構成之稜線與一對傾斜面所構成之剖面V字形之刃前端，該一對傾斜面之算術平均粗糙度設為0.01μm以下，在該刃前端之至少一方之傾斜面之包含稜線之寬度為10μm以內之範圍，遍及全周實施間距未達12μm、深度未達0.7μm之圖案加工。
此處亦可為：該圖案加工之進行，係在該稜線設置側視觀察下曲率半徑為8~12μm之凸部。
根據具有上述特徵之本發明，在刻劃輪之傾斜面之刃前端之全圓周部分實施槽加工，該刃前端之槽之間距形成為8μm以下之小間距。因此，可獲得侵入性良好、能夠在刻劃開始後立即以深的裂紋對硬度高之基板進行刻劃。
10‧‧‧刻劃輪
11‧‧‧中心軸
12‧‧‧貫通孔
13‧‧‧稜線
14a、14b‧‧‧傾斜面
15a、15b、15‧‧‧槽
16‧‧‧凸部
圖1，係本發明之第1實施形態之刻劃輪的側視圖及前視圖。
圖2，係放大顯示本實施形態之刻劃輪之刃前端部分的側視圖及前視圖。
圖3，係本實施形態之刻劃輪之刃前端之稜線部分的立體圖及其側視圖。
圖4，係本實施形態之刻劃輪之變形例之刃前端之稜線部分的側視圖。
圖5，係放大顯示本發明之第2實施形態之刻劃輪之刃前端部分的側視圖及前視圖。
圖6，係放大顯示本發明之第3實施形態之刻劃輪之刃前端部分的側視圖及前視圖。
以下，針對本發明之實施形態之刻劃輪，使用圖式詳細地進行說明。本實施形態中作為加工對象之脆性材料基板，雖為硬度高之SiC基板，但並不限定於此，亦可為液晶顯示器面板、電漿顯示器面板等之玻璃基板、單結晶矽基板、陶瓷基板、藍寶石基板等之脆性材料基板。此外，本說明書中所使用之「算術平均粗糙度Ra」，係表示JISB0601規定之工業製品之表面粗糙度的參數之一。
說明本發明之第1實施形態之刻劃輪形狀。圖1(a)係本實施形態之刻劃輪從其中心軸方向觀察時的前視圖，圖1(b)係該刻劃輪之側視圖。又，圖2(a)係放大顯示稜線部分的側視圖，圖2(b)係其前視圖。
第1實施形態之刻劃輪10，係以單結晶鑽石形成之圓板狀之輪，如圖1及圖2所示，於中心軸11之中心具有供用於軸支刻劃輪10之未圖示之銷貫通之貫通孔12。該刻劃輪10之外周面切削成剖面V字形，於其中心形成稜線13，於左右如圖示般具有傾斜面14a、14b。傾斜面14a、14b，形成為具有收斂角度(α)。傾斜面14a、14b，被加工成傾斜面之算術平均粗糙度Ra例如為0.01μm以下。如上所述，藉由將傾斜面之算術平均粗糙度設得小，能夠使刻劃時施加於基板之負載集中，且能夠使垂直裂紋
之深度固定。此外，能減少刻劃輪之稜線之缺損或對基板之破壞。
本實施形態之刻劃輪，如圖1所示，對在中心包含刃前端之稜線13的傾斜面14a、14b分別於既定寬度w之範圍內遍及全周實施固定的線距(間距)P之圖案加工。此處，圖案加工較佳為至少形成在刻劃時與基板接觸之部分，本實施形態中，寬度w例如設為10~20μm。此圖案加工，如圖2及圖3之放大圖所示，以與圓板之中心軸11平行之方式以固定的間距P形成有多個槽15a、15b。將該圖案加工之槽15a、15b之間距P設為0.5μm以上未達12μm，較佳為未達8μm，更佳為1μm以下，並將刻劃輪10之槽15a、15b之深度d設為0.05μm以上未達0.7μm，較佳為0.3μm以下。
藉由在稜線13兩側形成上述之微細圖案加工，即便是對高硬度之SiC基板等之基板亦能夠確保一定的摩擦係數，而能夠謀求侵入性的改善。此外，藉由將槽之深度設得小，能夠充分減少對刻劃品質之影響。
第1實施形態之對以鑽石形成之稜線及傾斜面的圖案加工，可使用飛秒雷射之表面加工裝置來進行。飛秒雷射係在飛秒(femtosecond)單位之極短的時間壓縮功率而成之光源，能夠對各種材料形成周期性的構造之槽或圖案。此處，如圖2、圖3所示，係對包含稜線之傾斜面14a、14b進行與中心軸平行之槽加工。而且，可藉由適當選擇該飛秒雷射之光源或脈衝寬以進行所欲之間距P及深度d之槽加工。
另外，圖案加工，可如本實施形態般包含在槽與槽之間殘留有稜線之未加工部分，此外，作為變形例如圖4所示，亦可以設置側視觀察下具有既定之曲率半徑之凸部16及其間之槽15。凸部16之曲率半徑R較佳為8~12μm左右。
又，本發明之第1實施形態中，如圖2、圖3所示，雖於傾斜面14a、14b配置相對於稜線13對稱且相同長度之槽15a、15b，但槽之長度亦可為在傾斜面14a、14b彼此不同。
接下來，針對本發明之第2實施形態之刻劃輪進行說明。本實施形態中與第1實施形態相同的部分標記相同符號並省略詳細的說明。如圖5所示，第2實施形態之刻劃輪，在傾斜面14a、14b之全周形成有彼此不同之槽15a、15b。除此之外之構成，與第1實施形態相同。此時之槽之間距P與上述第1實施形態相同，又，槽15a、15b之深度d亦與第1實施形態相同。據此可減小相對於稜線或傾斜面之圖案角度而獲得大致相同效果。
接下來，針對本發明之第3實施形態之刻劃輪進行說明。本實施形態中與第1實施形態相同的部分標記相同符號並省略詳細的說明。如圖6所示，第3實施形態之刻劃輪，係在其中一方之傾斜面，此處僅在傾斜面14a之全周形成槽15a。除此之外之構成，與第1實施形態相同。此槽之間距P與上述之第1實施形態相同，又，槽15a之深度d亦與第1實施形態相同。據此可減小相對於稜線或傾斜面之圖案角度而獲得大致相同效果。另外，此實施形態中，亦可僅在另一方之傾斜面14b之全周形成槽15b。
本發明之各實施形態之刻劃輪，侵入性良好，且即便是對高硬度之基板亦不會打滑，能夠自刻劃開始後立即產生垂直裂紋。因此可獲得即便是對高硬度之基板亦能夠進行內切刻劃之優異的效果。此外，由於不會產生打滑，因此刻劃輪稜線會均勻地磨耗，能夠進一步延長刻劃輪之壽命。
又，上述各實施形態中，雖將刻劃輪之素材設為單結晶鑽石，但亦可使用多結晶鑽石作為素材。此時，能夠藉由對刻劃輪之稜線部分實施相同之槽加工而構成具有同樣效果之刻劃輪。
又，上述各實施形態中，雖示出了刻劃輪整體係由單結晶鑽石構成，但例如對在以超硬合金等構成之輪本體部藉由黏貼或成膜固定以單結晶或多結晶鑽石構成之刃前端部分而成之刻劃輪，本發明亦可適用。若是上述構成的刻劃輪，則能減少高價鑽石之使用，提供價格便宜之刻劃輪。
本發明可適用於對高硬度之脆性材料基板進行刻劃之刻劃裝置。
Claims (8)
- 一種刻劃輪，於圓板周圍具有由以鑽石構成之稜線與一對傾斜面所構成之剖面V字形之刃前端，該一對傾斜面之算術平均粗糙度設為0.01μm以下，在該刃前端之至少一方之傾斜面之稜線部分遍及全周具有間距未達8μm之槽。
- 如申請專利範圍第1項之刻劃輪，其中，該刻劃輪之槽，形成為與該刻劃輪之圓板之中心軸平行。
- 如申請專利範圍第1項之刻劃輪，其中，該刻劃輪由單結晶鑽石構成。
- 如申請專利範圍第1至3項中任一項之刻劃輪，其中，對該刻劃輪之稜線部分實施之槽之深度，為0.3μm以下。
- 如申請專利範圍第1至3項中任一項之刻劃輪，其中，對該刻劃輪之稜線部分實施之槽之間距，為1μm以下。
- 如申請專利範圍第4項之刻劃輪，其中，對該刻劃輪之稜線部分實施之槽之間距，為1μm以下。
- 一種刻劃輪，於圓板周圍具有由以鑽石構成之稜線與一對傾斜面所構成之剖面V字形之刃前端，該一對傾斜面之算術平均粗糙度設為0.01μm以下，在該刃前端之至少一方之傾斜面之包含稜線之寬度為10μm以內之範圍，遍及全周實施間距未達12μm、深度未達0.7μm之圖案加工。
- 如申請專利範圍第7項之刻劃輪，其中，該圖案加工之進行，係在該稜線設置側視觀察下曲率半徑為8~12μm之凸部。
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| JP3074143B2 (ja) * | 1995-11-06 | 2000-08-07 | 三星ダイヤモンド工業株式会社 | ガラスカッターホイール |
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