TWI621504B - 硏磨液ｐｐ過濾裝置之預濕方法 - Google Patents

硏磨液ｐｐ過濾裝置之預濕方法 Download PDF

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TWI621504B
TWI621504B TW103117476A TW103117476A TWI621504B TW I621504 B TWI621504 B TW I621504B TW 103117476 A TW103117476 A TW 103117476A TW 103117476 A TW103117476 A TW 103117476A TW I621504 B TWI621504 B TW I621504B
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wet
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王新錦
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密科博股份有限公司
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Priority to US14/714,827 priority patent/US20150329263A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/22—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient in moist conditions or immersed in liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/0093—Making filtering elements not provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B01D29/014—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements with curved filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B01D29/016—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements with corrugated, folded or wound filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
    • B01D29/56—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection
    • B01D29/58—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection arranged concentrically or coaxially
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/02—Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B5/00—Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
    • B65B5/04—Packaging single articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
    • B65D65/38—Packaging materials of special type or form
    • B65D65/40—Applications of laminates for particular packaging purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2201/00—Details relating to filtering apparatus
    • B01D2201/04—Supports for the filtering elements
    • B01D2201/0415—Details of supporting structures
    • B01D2201/0423—Details of supporting structures not in the inner side of the cylindrical filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B55/00—Preserving, protecting or purifying packages or package contents in association with packaging
    • B65B55/22—Immersing contents in protective liquids

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

本發明關於一種研磨液PP過濾裝置之預濕方法及研磨液PP過濾裝置包裝單元，該研磨液PP過濾裝置之預濕方法之步驟包含將一PP過濾裝置之PP材質過濾媒介預濕，及將經預濕之該PP過濾裝置密封於一包裝件中；該研磨液PP過濾裝置包裝單元係包含一匣件、一PP材質過濾媒介及一包裝件，該PP材質過濾媒介設於該匣件以構成一PP過濾裝置，該PP材質過濾媒介係經預濕，該PP過濾裝置並密封於該包裝件中。

Description

研磨液PP過濾裝置之預濕方法
本發明係與過濾裝置有關，特別是有關於一種研磨液PP過濾裝置之預濕方法及研磨液PP過濾裝置包裝單元。
按，一般半導體製造之良率提升經常是透過改變材料和製程來加以改善，半導體製造商必須考慮到所有改善良率的選項，其中包括CMP(Chemical Mechanical Polishing)研磨液過濾效率的改善方案，CMP製程係為將晶片表面高低起伏不一的輪廓一併加以磨平的平坦化技術，在CMP製程中使用的研磨液含有研磨用的研磨粉粒及其他化學物質，在加工時高速旋轉的加工頭與被加工工件表面之間加上含有細微研磨粉粒的研磨液，並配合施加在加工頭上的一預定壓力，使研磨粉粒與工件表面之材料產生摩擦力而去除工件表面之材料，達到材料表面的平坦化。然而若研磨液的研磨粉粒顆粒過大，在研磨時會造成晶片刮傷，因此需要透過過濾的方式將大小過大的顆粒過濾去除，但仍然能使適當的研磨粉粒被保留下來，一般業界係常使用孔徑為10μm至0.1μm以下之高純度PP材質作為過濾裝置，且其PP材質過濾膜之材料結構係包括熔噴(melt blown)、不織編織(non-woven)或編織(woven)等結構。
然而，一般研磨液PP材質過濾器係採用傳統製作方法(無預濕)，過濾裝置在使用前需先進行預濕，故一般研磨液過濾器係缺乏新穎、有創意及有經濟效益的解決方案。先進半導體研磨製程使用的PP材質之孔徑係為0.5μm以下，該孔徑為0.5μm以下之PP材質之疏水性強，使得化學物質無法完全通過濾材，因此該過濾裝置無法直接使用，故必須先進行預濕，以改變過濾裝置之過濾膜之表面張力以具有親水性，以便於過濾作業之使用。一般過濾裝置係於使用前進行預濕之程序，而若預濕程序之時間過長便可能導致機台懸宕停機無法作業，或預濕程序之品質不佳也會影響機台過濾之效果而影響生產，以上幾種狀況導致時間成本增加，且無形中也增加了生產的風險。如US4727705和US20020060179所揭露之方法，在其方法中係舉例說明使用不同方法處理PTFE疏水薄膜過濾器的除菌、預濕、包裝以便提供半導體強酸液過濾使用，然而卻不包含PP材質及研磨液之過濾使用。
因此，有必要提供一種新穎且具有進步性之研磨液PP過濾裝置之預濕方法及研磨液PP過濾裝置包裝單元，以解決上述之問題。
本發明之主要目的在於提供一種研磨液PP過濾裝置之預濕方法及研磨液PP過濾裝置包裝單元，可在過濾裝置於包裝密封前先進行預濕之程序，使得過濾裝置在使用者拆封使用前能保持浸濕之狀態，使用者係可直接使用已預濕之過濾裝置而減少預濕之程序所需的時間，減少時間成本之花費，經預濕之過濾裝置並且可降低流體在經過濾後之壓降，維持一穩定之流體之濃度和流速，提升生產品質。
為達成上述目的，本發明提供一種研磨液PP過濾裝置之預 濕方法，該研磨液PP過濾裝置之預濕方法之步驟包含將一PP過濾裝置之PP材質過濾媒介預濕，及將經預濕之該PP過濾裝置密封於一包裝件中。
為達成上述目的，本發明另提供一種該研磨液PP過濾裝置 包裝單元，其包含一匣件、一PP材質過濾媒介及一包裝件，該PP材質過濾媒介設於該匣件以構成一PP過濾裝置，該PP材質過濾媒介係經預濕，該PP過濾裝置並密封於該包裝件中。
10‧‧‧PP過濾裝置
11‧‧‧輸入端
12‧‧‧排氣口
13‧‧‧排氣口
14‧‧‧輸出端
20‧‧‧PP材質過濾媒介
21‧‧‧內層
22‧‧‧外層
23‧‧‧卷繞層
24‧‧‧折疊層
30‧‧‧預濕液體
40‧‧‧連接頭
50‧‧‧閥組
60‧‧‧包裝件
70‧‧‧液體水
80‧‧‧匣件
圖1為本發明一較佳實施例之示意圖。
圖2為本發明一較佳實施例之另一示意圖。
圖3為本發明一實施例之剖面示意圖。
以下僅以實施例說明本發明可能之實施態樣，然並非用以限制本發明所欲保護之範疇，合先敘明。
請參考圖1-3，其顯示本發明之實施例，本發明之一種研磨液PP過濾裝置之預濕方法之步驟係包含：以一預濕液體30濕化該PP過濾裝置10之PP材質過濾媒介20，並以去離子水(Deionized Water)沖洗經濕化之該PP材質過濾媒介20。在本實施例中，該PP過濾裝置10例如可包含一輸入端11，該輸入端11係可供輸入一具親水性之預濕液體30，該預濕液體30例如可為可燃性液體、乙醇或異丙醇(Isopropanol Alcohol,IPA)，較佳地，該預濕液體30係透過一具密封裝置之連接頭40輸入該輸入端11，更 進一步地說，該連接頭40係可配置一密封環，當該連接頭40組裝於該輸入端11，該預濕液體30不與外界接觸地輸入該PP過濾裝置10，可避免外界之灰塵微粒汙染該PP過濾裝置10之內部。該PP過濾裝置10可另具有二排氣口12,13，二該排氣口12,13分別地位於上下兩端，當該預濕液體30輸入該PP過濾裝置10，受擠壓之空氣透過二該排氣口12,13排出至外界，較佳地，可控制該預濕液體30以一緩慢之預定流速輸入該PP過濾裝置10以減少氣泡之產生，並將該PP過濾裝置10內原本的空氣完全排出使該預濕液體30充滿該PP過濾裝置10並完全浸濕該PP材質過濾媒介20，使該PP材質過濾媒介20具親水性，較佳地，使該PP材質過濾媒介20完全浸濕一預定時間後，可使該PP材質過濾媒介20達到最佳之親水性。該PP過濾裝置10係可另包括一輸出端14，可供該預濕液體30之排放，較佳地，該輸出端14可與一閥組50連接，該閥組50可供控制該預濕液體30之排放狀態，當該預濕液體30完全浸濕該PP材質過濾媒介20，並經過一預定時間後，可打開該閥組50供該預濕液體30之排放，該閥組50另外亦可與另一PP過濾裝置之輸入端連接亦無不可，較佳地，該排放之預濕液體30可重覆循環地被利用以浸濕其他PP材質過濾媒介，達到原料成本節省之目的。該預濕液體30完全排出該PP過濾裝置10後，透過該輸入端11輸入去離子水(Deionized Water)以沖洗經濕化之該PP材質過濾媒介20且預濕該PP材質過濾媒介20，並透過該輸出端14排放沖洗後之去離子水(Deionized Water)。
值得一提的是，該PP過濾裝置10之輸入端11、二該排氣口12,13及該輸出端14不設亦可，係可透過直接將該PP材質過濾媒介20 浸泡在例如一可盛裝該預濕液體30之容器中並使其完全浸濕，以濕化該PP材質過濾媒介20，經過一預定時間後自該盛裝該預濕液體30之容器中取出該PP材質過濾媒介20，並將經濕化之該PP材質過濾媒介20另外以去離子水(Deionized Water)以同樣方式浸泡，同樣地可達到預濕該PP材質過濾媒介20之目的。
將經預濕之該PP過濾裝置10密封於一包裝件60中，在將 該PP過濾裝置10密封於該包裝件60之前，另包括一對該PP過濾裝置10進行殺菌之步驟，更進一步地說，經預濕之該PP過濾裝置10係可裝置於一例如為雙層塑膠之包裝件中，該雙層塑膠袋例如內層可為聚丙烯而外層可為密拉，較佳地，在該包裝件60中另填充有液體水70，係用以保持經預濕之該PP材質過濾媒介20之濕潤，該PP過濾裝置10係可透過例如高溫蒸汽之殺菌步驟減少經預濕之該PP過濾裝置10可能因細菌殘留造成的汙染而影響該PP過濾裝置10之品質，最後透過例如為熱熔密封之方式密封該包裝件60，該PP過濾裝置10在拆封使用前仍然能保持濕潤之狀態，故使用者係可直接使用經預濕之該PP過濾裝置10於機台上，而減少預濕之程序所需的待機時間，減少時間成本之花費，並且經預濕之過濾裝置可降低一流體在經過過濾之後的壓降，使例如研磨液之流體可維持一預定之濃度和流速於機台上使用。
在如圖3所示之一實施例中，一種經預濕之研磨液PP過濾 裝置包裝單元，包含一匣件80及一PP材質過濾媒介20，該PP材質過濾媒介20設於該匣件80以構成一PP過濾裝置，該PP材質過濾媒介20係經預濕，舉例而言，該匣件80例如可為一長筒式匣件，其中該PP材質過濾媒 介20係為筒狀，包括一內層21、一外層22、一鄰接該內層之卷繞層23、及一鄰接該外層之折疊層24，該卷繞層23係繞筒狀之該PP材質過濾媒介20之一軸線多層繞置，該折疊層24係以徑向來回撓折而沿一周向連續疊設，該內層21與外層22係為二導流層，該折疊層24係用以過濾較大顆粒之雜質，該卷繞層23係為主要用來篩選一預定大小之研磨微粒，較佳地，在預濕狀態下，該PP材質過濾媒介之孔隙係小於0.5μm，以使過濾後之研磨微粒之大小能符合半導體製程使用，且多層之過濾系統係能提高過濾之效果，該研磨液PP過濾單元係可透過上述之方法進行預濕以及包裝(密封之包裝件中亦可填充有液體水)，以使經預濕之該PP過濾裝置在拆封使用前仍然能保持濕潤之狀態。
綜上，本發明之研磨液PP過濾裝置之預濕方法可在過濾裝 置於包裝密封前先進行預濕之程序，使得過濾裝置在使用者拆封使用前仍然能保持濕潤之狀態，使用者係可直接使用已預濕之過濾裝置於機台上，而減少預濕之程序所需的待機時間，減少時間成本之花費，並且經預濕之過濾裝置可降低流體在機台上經過濾後之壓降，維持一穩定之流體之濃度和流速，提升生產品質。
綜上所述，本發明之整體結構設計、實用性及效益上，確實 是完全符合產業上發展所需，且所揭露之結構發明亦是具有前所未有的創新構造，所以其具有「新穎性」應無疑慮，又本發明可較之習知結構更具功效之增進，因此亦具有「進步性」，其完全符合我國專利法有關發明專利之申請要件的規定，乃依法提起專利申請，並敬請 鈞局早日審查，並給予肯定。

Claims (4)

  1. 一種研磨液PP過濾裝置之預濕方法，包含以下步驟：將一PP過濾裝置之PP材質過濾媒介預濕；對該PP過濾裝置以高溫蒸氣進行殺菌；將經預濕之該PP過濾裝置密封於一包裝件中。
  2. 如請求項1所述的研磨液PP過濾裝置之預濕方法，其中預濕該PP材質過濾媒介之步驟包括：以可燃性液體、乙醇或異丙醇(Isopropanol Alcohol,IPA)濕化該PP材質過濾媒介；以去離子水(Deionized Water)沖洗經濕化之該PP材質過濾媒介且預濕該PP材質過濾媒介。
  3. 如請求項1所述的研磨液PP過濾裝置之預濕方法，其中在預濕狀態下，該PP材質過濾媒介之孔隙係小於0.5μm。
  4. 如請求項1所述的研磨液PP過濾裝置之預濕方法，其中在該包裝件中另填充有液體水。
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