TWI611313B - Material management system and method for supplying liquid stored in liquid storage vessels to substrate - Google Patents

Material management system and method for supplying liquid stored in liquid storage vessels to substrate Download PDF

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Publication number
TWI611313B
TWI611313B TW104114481A TW104114481A TWI611313B TW I611313 B TWI611313 B TW I611313B TW 104114481 A TW104114481 A TW 104114481A TW 104114481 A TW104114481 A TW 104114481A TW I611313 B TWI611313 B TW I611313B
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TW
Taiwan
Prior art keywords
material
container
electronic information
storage
information
Prior art date
Application number
TW104114481A
Other languages
Chinese (zh)
Other versions
TW201530334A (en
Inventor
艾夫斯壯史考特
漢森凱薩琳L
豪莫森史帝文E
強森湯瑪斯D
諾雷克拉里
史米頓威廉
Original Assignee
美商恩特葛瑞斯股份有限公司
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Priority to US81968106P priority Critical
Priority to US60/819,681 priority
Application filed by 美商恩特葛瑞斯股份有限公司 filed Critical 美商恩特葛瑞斯股份有限公司
Publication of TW201530334A publication Critical patent/TW201530334A/en
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Publication of TWI611313B publication Critical patent/TWI611313B/en

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Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06QDATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/06Resources, workflows, human or project management, e.g. organising, planning, scheduling or allocating time, human or machine resources; Enterprise planning; Organisational models
    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B67OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67DDISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D1/00Apparatus or devices for dispensing beverages on draught
    • B67D1/08Details
    • B67D1/12Flow or pressure control devices or systems, e.g. valves, gas pressure control, level control in storage containers
    • B67D1/1247Means for detecting the presence or absence of liquid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00Subject matter not provided for in other groups of this subclass
    • GPHYSICS
    • G07CHECKING-DEVICES
    • G07CTIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C9/00Individual entry or exit registers
    • G07C9/00007Access-control involving the use of a pass
    • G07C9/00111Access-control involving the use of a pass the pass performing a presence indicating function, e.g. identification tag or transponder
    • G07C9/28
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00Climate change mitigation technologies for sector-wide applications
    • Y02P80/40Minimising material used in manufacturing processes

Abstract

The material management system and method of the present invention comprises a material storage container having information (i.e., electronic information) storage means. Information can be transferred from a storage device to a processing tool controller and used to set or adjust a processing tool operating parameter. The material information can be determined by remote analysis and subsequently transmitted to an electronic information storage component of a container containing the material. Material location information can be automatically tracked to track the location and movement of the material storage container within a customer facility. Product information can be stored in association with material specific information that is used in the manufacture of the product.

Description

Material management system and method for supplying liquid stored in a liquid storage container to a substrate

The present invention is in various aspects related to the use of information storage systems and methods, and in particular electronic information storage (i.e., radio frequency identification information), to manage and utilize materials storage and dispensing containers and their contents. Moreover, the present invention is directed, in terms of various features, to implement and use such systems to set or adjust operating parameters of processing tools that utilize materials dispensed from such containers.

Material storage and dispensing containers are used in a wide variety of industrial processes as well as commercial and personal applications. Various types of liquids and gases can be placed in containers such as storage drums for transport and ultimately dispensing. An industrial field that requires the application of material storage and dispensing containers is the semiconductor device manufacturing industry.

In the fabrication of semiconductor devices, materials of various types and purposes are deposited on a semiconductor substrate that typically contains a single crystal material such as hafnium oxide. The deposited material may comprise copper, aluminum, and other metals to form metal lines or other circuit characteristics within the trenches of the semiconductor substrate. Additional circuit characteristics and materials can be formed on the semiconductor substrate through a manufacturing process Floor.

To form the trenches as described above, a photoresist material is first deposited over the semiconductor substrate. The manner in which the photoresist material is transported and delivered to the semiconductor substrate is critical to the manufacturing process. For example, the cost of applying a faulty type of photoresist can be extremely expensive in terms of a destroyed high value semiconductor substrate, a high purity chemical consumed, and a manufacturing process interruption required to correct for this error. Even with this fact, the photoresist supply chain is often managed by artificial systems, which have implicit inefficiencies and high risk of error, because a typical supply chain involves multiple parties, each with its own Material tracking platforms cannot communicate with each other.

The aforementioned photoresist material is typically transported and delivered to the surface of the semiconductor substrate in liquid form. A spin-on process is typically employed to apply and spread a thin layer of photoresist across the entire surface of the semiconductor substrate. The parameters of the spin-on process are selected to ensure that the photoresist is distributed extremely evenly and sparsely on the semiconductor substrate. Typically after the material application step is a step of heating the semiconductor substrate to cure the photonic layer.

The solid photoresist layer described above can be patterned by conventional etching techniques to form trenches thereunder. However, proper trench formation and uniformity are determined in part by the uniformity of the photoresist layer defining the trenches. Indeed, proper transport and delivery of photoresist materials to the semiconductor substrate is critical to the manufacture of reliable semiconductor devices. In fact, as semiconductor wafer design and processing technology advances, the characteristics of metal lines become smaller and smaller, and the negative effects of photoresist non-uniformity on a device's characteristics are amplified.

In order to achieve a uniform and thin photoresist layer, it may be necessary to apply a spin. Or other processes that utilize parameters that are based on the particular physical and functional characteristics of the photoresist material. Unfortunately, the characteristics of the type of photoresist material may vary from batch to batch or as a result of environmental or time factors in the transport and storage of such materials from a starting point to the point of use. For example, photoresist viscosity can vary from batch to batch or container by container, and photoresist properties can degrade with environmental conditions (ie, high temperatures) and/or lifetime. In view of the variability of batches and/or containers of different photoresists, it may be extremely difficult to establish preset fixed parameters for forming a suitable uniform photoresist layer on a semiconductor substrate. Thus, proper transport and application of the photoresist material to the semiconductor substrate involves not only providing the appropriate type of photoresist material, but also the application parameters relating to the application of the precise characteristics of the particular photoresist material that is suitable for providing. In production facilities, it is impractical to sample and individualize the contents of each container prior to end use, especially in high-volume production lines for high throughput throughput. In addition, due to limited photoresist storage life, limited storage capacity, and the time required for material analysis, for a material (ie, chemical) supplier, the entire batch is stored prior to shipment by the customer. The material while waiting for the results of the material analysis is not efficient.

A number of challenges associated with the use of photoresist materials have been described in the foregoing, and there are similar or year-over-year difficulties associated with a variety of materials used in semiconductor processes and various other industrial processes. Thus, the invention is not limited to applications on photoresist or semiconductor materials. The limitations associated with handling various materials include the considerable difficulty of managing a large number of containers with different content. For example, in a manufacturing process using various chemical reactants or precursor materials stored in containers of similar type, it may be difficult to perform any of the following tasks. Work: Ensure in each instance the use of process parameters appropriate to the particular material placed in a particular container; prevent supply chain interruptions; prevent material from overstocking; use materials that are first received in time while avoiding use Deteriorating or unduly obsolete ("overdue") materials; tracking of contained material containers sent to customers for potential safety or quality recovery issues; compliance with statutory storage and/or unloading restrictions, and compliance with statutory discharge restrictions. In particular, it would be desirable to be able to track and retrieve not only containers into a material transport (receiving) area but also between various operating areas in an end-use facility. It is determined to be material that is emitted from contaminated production lots or batches and/or contributes to supply chain management. The intended person is to provide a system and method that can solve these and other problems. Traditional material management tools (such as bar code systems) are not well suited to solve such problems due to the lack of dynamic update functionality, the need for line-of-sight scanning, relying on other manual actions, and providing container identification. Information is often limited.

In order to improve the handling and application of materials, enhance processing efficiency and analysis, and reduce the functionality of material container misconnection errors, it would be desirable to automate the supply of information from a material storage container to a material handling tool. This automated job will best address not only the communication hardware and related interfaces, but also the communication patterns, as well as the protocol format and specific material content.

In sensitive and chemically intensive processing processes such as semiconductor manufacturing, it may be desirable to be able to associate a manufactured product with information about the materials used in its manufacturing operations. This correlation is highly available for process optimization and ongoing quality assurance and quality control. For example, it may not be manufactured After rigorous testing, the product will detect product defects or performance problems due to specific source materials - whether it is within the material specifications. The ability to correlate device performance to source materials can help optimize process and improve material specifications without necessarily requiring an overall quality assurance test for all products. However, such benefits have not been achieved so far, as product information has not been uniformly and reliably associated with information about the materials used in the manufacture of the product.

The foregoing background discussion presents a need for improved material management systems and methods.

The present invention is in various aspects related to the use of information storage systems and methods, such as electronic information storage, to manage and utilize material storage/dispensing containers and their contents.

In a first individual feature, the present invention is directed to a method comprising the steps of: indicating any one of the operational parameters of a supply of a trademark, and a processing tool operating command, and a storage container for the contained material The associated information storage device is passed to a control device associated with a processing tool; and the transmitted information is used to set or adjust an operational parameter of the processing tool.

In a second individual feature, the present invention is directed to a method comprising the steps of receiving information indicative of any one of the application parameters of a supply of a trademark from an information storage device associated with a material storage container and a processing tool operation instruction; and using the received information to set or adjust an operation parameter of a processing tool.

In a third individual feature, the invention is directed to a method, The method comprises the following steps: in the process of transporting a material storage container having the contents of an associated information storage device to an end use facility, or recording any one of the following to the information storage device: (i) indicating a Information on the nature of a particular material in a batch, (ii) information indicating the nature of a particular material in a container, and (iii) the identification of a record of a batch of specific or container specific material properties.

In a fourth individual feature, the present invention is directed to a method of managing a plurality of material storage containers having associated electronic information using a plurality of wireless information reading devices, the method comprising the steps of: treating a first material storage container The material entering a terminal use facility is transported into the functional area for detection; it is associated with the first material storage container and represents a batch of specific material properties, a container specific material property, a processing tool operating command, and a material Information about any of the specific operational parameters is automatically transmitted to a data repository; any location and movement of the first material storage container between the plurality of functional areas within the terminal use facility is monitored; and the container location and Information about any of the container movements is automatically transferred to the data repository.

In a fifth individual feature, the invention relates to a method comprising the steps of: [I] from a information storage device associated with a material storage container containing material to a control associated with a processing tool The device receives information indicative of: (a) identification of the material, (b) component of the material, (c) source of the material, (d) quantity of the material, (e) the material Batch, (f) batch-specific properties of the material, (g) container-specific properties of the material, and (h) container identification data; [II] in a material received from the material storage container The processing tool manufactures or processes a product; and [III] stores the received information in association with product information indicating any of the following, ie (i) product identification Information, (ii) product batch identification data, and (iii) the date or time of manufacture or processing of the product.

Another additional feature of the invention is the system for implementing the aforementioned method including an automated system. In still another feature of the invention, any of the features disclosed above may be combined for additional advantages.

These and other features and advantages of the present invention will be apparent from the description and appended claims.

10‧‧‧Material storage container

10A-C‧‧‧ Container

11‧‧‧ aperture defined neck

15‧‧‧Storage and dispensing assembly

20‧‧‧ Cap

22‧‧‧ Probe aperture

23‧‧‧ Film

25‧‧‧Electronic information storage component

25A-C‧‧‧First electronic information storage component

40‧‧‧ probe connector

42‧‧‧ probe connector

43‧‧‧ dispense probe

45‧‧‧Antenna

46‧‧‧ Adapter Coupling

48‧‧‧Modified antenna line

50‧‧‧Electronic information storage component

50A-C‧‧‧Second electronic information storage component

100‧‧‧ system

102‧‧‧Material supply platform

104‧‧‧Programming interface

106‧‧‧Common controller

115‧‧‧ Surrounding sensor

120‧‧‧Material storage container monitoring system

121‧‧‧second antenna

122‧‧‧RFID read/write device

123‧‧‧room/cabinet/body

125‧‧‧Communication network

126‧‧‧Data storage/capture component (data repository)

128‧‧‧Monitor terminal

200‧‧‧Material Management System

201A-Q‧‧‧ material storage container

202‧‧‧Network

204‧‧‧ office or review unit

206‧‧‧Remote access device

210‧‧‧Supplier facilities

213‧‧‧ Fill in the platform

215‧‧‧data communication platform

216‧‧‧Sensor components

217‧‧‧analytical components/station

219‧‧‧Electronic Information (RFID) Communication Platform

220‧‧‧Distribution facilities

221‧‧‧The first electronic information communication platform

225‧‧‧data communication platform

226‧‧‧Sensor components

229‧‧‧Second Electronic Information Communication Platform

230‧‧‧End-use facilities

232‧‧‧Communication network

233A-B‧‧‧Firewall

234‧‧‧Data storage/capture device

235‧‧‧Monitoring components

236‧‧‧Central controller

238‧‧‧User interface

240‧‧‧Material receiving/importing area

241‧‧‧The first electronic information communication platform

245‧‧‧Data communication components

246‧‧‧Environment sensor components

249‧‧‧Second Electronic Information Communication Platform

250‧‧‧ cold storage area

251‧‧‧The first electronic information communication platform

255‧‧‧data communication components

256‧‧‧Environment sensor components

259‧‧‧Second Electronic Information Communication Platform

260‧‧‧

261‧‧‧The first electronic information communication platform

265‧‧‧data communication components

266‧‧‧Environment sensor components

269‧‧‧Second Electronic Information Communication Platform

270‧‧Manufacture area

271‧‧‧The first electronic information communication platform

272A-B‧‧‧Processing tools

273A-B‧‧‧Material body/storage box

275‧‧‧Data communication components

276A-B‧‧‧Local Control Components

278A-B‧‧‧Local Control Components

279‧‧‧Second Electronic Information Communication Platform

280‧‧‧Freight/Waste Management Area

281‧‧‧The first electronic information communication platform

285‧‧‧Data communication components

289‧‧‧Second Electronic Information Communication Platform

290‧‧‧Disposition/recycling facility

291‧‧‧Electronic information communication platform

295‧‧‧data communication components

320A‧‧‧Key ring part

325‧‧‧RFID tags

350‧‧‧ recessed

350A‧‧‧Top part

351‧‧‧Ring washer retainer

352‧‧‧Insulated gasket

355‧‧‧Upper target cap

360‧‧‧Mechanical key probe interface

360A-D‧‧ ‧ probe interface recess

365‧‧ visual indicator

The present invention and its advantages will be more fully understood from the following description with reference to the accompanying drawings in which: FIG. 1 is an assembled view of a material storage container having an electronic information storage member Placed in a cap that has an associated probe connector with a connector tab and a probe extending therefrom.

2A is a partial assembled view of a key ring for a cap of a fluid storage and dispensing container, the key ring portion being adapted to receive an electronic information storage member (ie, an RFID tag) and having a mechanical The button is set to the probe connector interface.

Figure 2B is a partial view of the key ring of Figure 2A, and the electronic information storage member with associated retention elements, lifted and partially cut away from the assembled view.

Figure 3 is a schematic view of a filling system for a material storage container having at least one associated electronic information storage member.

Figure 4 is a schematic view of a material storage container monitoring system.

Figure 5 is a schematic view of a material management system showing the The direction of material transport, as well as the interconnection of various components within a terminal use facility and between multiple external facilities.

Figure 6 is a logic diagram depicting the steps of the first material storage container management method.

Figure 7 is a logic diagram depicting the steps of a second material storage container management method.

Figure 8 is a logic diagram depicting the steps of a third material storage container management method.

The disclosures of the following U.S. patents and patent applications are hereby incorporated herein by reference in its entirety herein in its entirety in its entirety in its entirety in Published in U.S. Patent Application Publication No. 2004/0172160, in the name of Kevin T. O'Dougherty, Robert E. Andrews, Tripunithura V. Jayaraman, Joseph P. Menning, and Chris A. Baye-Wallace, entitled " SECURE READER SYSTEM, US Patent Application No. 10/742,125; filed on May 3, 2002, in the name of Kevin O'Dougherty and Robert E. Andrews, entitled "LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE" US Patent Application No. 10/139,104; filed on August 22, 2005, in the name of James V. McManus, Jerrold D. Sameth, and Frank DiMeo, Jr., US Patent Application entitled "MATERIAL CONTAINMENT SYSTEM" Case 60/710,216; Approved on June 6, 2005, by John Kingery, Dennis Brestovansky, Kevin O'Dougherty, Glenn US Patent entitled "MATERIAL STORAGE AND DISPENSING SYSTEMS AND PROCESSES" in the name of M.Tom, Kirk Mikkelsen, Matthew Smith, Don Ware, Greg Nelson, Bob Haapala, Russ Oberg, Tim Hoyt, Jason Gerold, Kevin Nesdahl, and John Jancsek Application No. 60/687,896; issued on December 17, 2002, in the name of James V. McManus, Michael Wodjenski and Edward E. Jones, entitled "MATERIAL STORAGE AND DISPENSING SYSTEM FEATURING EX-SITU STRAIN GAUGE PRESSURE MONITORING ASSEMBLY U.S. Patent No. 6,494,343.

The present invention relates to systems and methods for utilizing information storage (preferably electronic information storage) components associated with material storage and dispensing containers, wherein the stored information can be manipulated and used to manage and facilitate efficient use of materials. Storage container and its contents.

The term "material" broadly refers to any solid (ie, in the form of a powder or granules), liquid, gas, plasma, solution, mixture, slurry or suspension in the context of storage and dispensing of the container and its contents. Liquid, and may refer to any material that is critical in the manufacturing or experimental processing procedures, including, but not limited to, precursors and consumables for semiconductor, medical, pharmaceutical, biological, nuclear, and nanotechnology applications. .

The term "fluid" as used herein refers to any liquid, gas, plasma, solution, mixture, slurry, and suspension. Thus, the "fluid" can contain significant solid content and can be further provided with solids as a absorbing medium in a material storage container. In a preferred embodiment, a material The storage container contains a substantially pure fluid.

The container contemplated by the present invention comprises a wide variety of material storage and dispensing equipment. In general, the container described in this disclosure may be any container suitable for material use, except as limited or otherwise provided. The containers may comprise a pneumatic container, an ultra-pressure container or a sub-atmospheric container, as described in the text of any of the following U.S. patents: 5,518,528, 5,704,965, 5,704,967, 5,935,305, 6,406,519, 6,204,180, 5,837,027, 6,743,278, 6,089,027, 6,101,816, 6,343,476, 6,660,063, 6,592,653, 6,132, 492, 5, 851, 270, 5, 916, 245, 5, 761, 910, 6, 083, 298, 6, 592, 653, and 5, 707, 424, all of which are incorporated herein by reference in their entirety.

The material storage container of the present disclosure further comprises a container body containing a solid absorbent medium that can be used to absorb a retained gas and to store and subsequently dispense the gas under conditions of desorption and dispensing. To this feature, an absorbent medium can comprise a solid, solvent, fluid, semi-solid or other material having functionality as a storage medium. For example, a material storage medium can comprise a reversible counter-reactive liquid medium, such as an ionic liquid medium, capable of reacting to absorb fluid in a first step and reacting to release previously absorbed fluid in a second step, wherein The first and second steps are inverse reactions associated with each other to define a reversible reaction. In another embodiment, a container utilizes a liquid absorbent as disclosed in U.S. Patent Application Publication No. 2004/0206241, which is incorporated herein by reference.

The material management container as described in the present disclosure further comprises a removable The container body of the pipeline enables the outer vessel to act as a selectively pressurized outer casing to facilitate storage control and controllable content dispensing processing. Such a container can be incorporated into the present application as a whole, as disclosed in U.

An example of a material storage and dispensing assembly can be as shown in Figure 1. Broadly speaking, the assembly includes a material storage container 10, a cap 20, and a probe connector 40 having a dispensing probe 43. The material storage container 10 includes an aperture defining neck portion 11. The cap 20 can be secured to the container 10 by conventional means such as threading, snap fit, vacuum encapsulation or solvent fusion and other conventional methods. That is, the cap 20 includes an electronic information storage member 25 as shown. An example of such a component is an RFID tag (preferably containing a writable RFID tag) having a passive RF transmitter, an antenna, and a programmable memory (ie, a wipeable programmable only) Read memory (EEPROM), Programmable Read Only Memory (PROM), Flash Memory, or Non-Volatile Random Access Memory (RAM) for storing any desired information. Preferably, the memory is dynamically updated for writing information when it is deployed for use in a material storage container. A magnetic storage member can be further used. The stored information may, for example, represent any of the following items: a batch specific and/or container specific material properties, a container specific current and/or historical environmental condition, and material specific application parameters, such as for a processing tool Set value or instruction. More specific examples of information that can be stored in the memory include, but are not limited to, material composition, material density, material viscosity, material pressure, material temperature, material volume, material quality, batch identification data, Manufacturer identification data, fill-in date, material overdue date, a vendor-specific identification number, a customer-specific identification number, analytical certification (ie, as specific to batch-specific or container-specific material properties), Analytical certification or information about similarly recorded identification codes, and other similarly available information.

Various types of electronic information storage components 25 can be considered, including short and long range RFID tags, EEPROMs, and similar storage devices. At least some of the information can be stored in the Electronic Product Code (EPC) data format. In one embodiment, a unique identification code is stored in an electronic information storage component associated with a particular container, while other container or material specific information is stored remotely in a data repository. Within (ie, a dynamic database), the unique identification code can be used for inquiry to obtain the desired information about the container. In a further embodiment, an electronic information storage component for a particular container includes a limited size of local memory and further includes a link to an external data repository (preferably a two-way link) And for both reading and writing of the electronic information storage component, the reservoir has a much larger amount of memory for storing historical and other information about the container and/or its material content. An electronic information storage component can contain one or more stored identification codes that are accessible to corresponding records stored within the data repository, such as batch specifics that are specified within the analysis certificate. Or a record of the material-specific material properties. A plurality of electronic information storage members 25 of various types may be combined as needed, or for a particular end use application project.

An electronic information storage component 25 can further include a processor, which can be a general purpose or application specific integrated circuit, and preferably contains a phase The A/D converter is turned off to receive an input signal like from a sensor. The processor is preferably adapted for arithmetic and other conventional processing operations.

In a specific embodiment, a non-electronic information storage component, such as a conventional barcode, can be associated with a material storage container. In another embodiment, electronic and non-electronic information storage can be combined. For example, a portion of the information may be stored in a non-electronic medium in a read-only format and associated with a material storage container, and the container may further comprise at least one electronic information storage component, preferably capable of providing read and write Both functions as a further storage component. In a specific embodiment, a non-electronic information storage component contains information, and the information is a backup of at least part of the information stored in an electronic information storage component associated with the same container, and the non-electronic information storage component can As a source of primary or backup data, for example, to enhance the reliability in the event of failure or damage to the electronic information storage component.

As shown, the container 10 and the cap 20 are adapted to match a probe connector 40 having a dispensing probe 43 to form a storage and dispensing assembly 15. The cap 20 includes a probe aperture 22 for receiving an additional dispensing probe 43 in addition to the electronic information storage member 25 as described above. The connector 40 includes an antenna 45 (i.e., a radio frequency (RF) antenna), a modular antenna line 48, an adapter connector 46, and a probe 43. In a preferred embodiment, the cap 20 is threaded to the neck of the container 10. After the container 10 and the cap 20 are transported to the desired position, the film 23 can be exposed. The connector 40 is configured to interconnect to the cap 20.

To assemble the assembly 15, the probe connector 40 is interconnected to a cap 20 that is joined to the container 10. The probe tip 42 can be broken through the scribe The film 23 projects through the probe aperture 22 into the interior volume of the container 10. Next, the continuous pressure on the connector 40 allows the connector 40 to move immediately adjacent to the cap 20. The probe 43 is then connected to the interior of the container 10. The connector 40 can be placed on the container 10 by this. The adapter tube 46 provides a fluid passage from the interior of the vessel 10 to an external pump (not shown). In this manner, the probe 43, the adapter connector 46, and the pump can be supplied from the container 10 to a manufacturing process tool, such as a semiconductor wafer processing tool. A typical material handling system can contain a plurality of containers 10 and dependencies, although only a single container 10 is depicted for simplicity.

Preferably, the material dispensing operation from the container 10 is initiated, controlled or otherwise adjusted by an external controller (not shown) that utilizes information retrieved from a first electronic information storage member 25. For example, a control unit may compare information received from the first electronic information storage component 25 with information about a processing procedure to be executed (ie, identification data and quantity of required materials), and accordingly Start the material transfer job. If the container 10 contains undesired or unexpected materials, the barrier material can be transported. In this regard, the electronic information storage component 25 can be utilized to prevent misconnections in an information-based manner and/or to prohibit further delivery of a material that has expired or deteriorated (ie, as exposed to the environment). Conversely, if the container 10 contains a material required for the process, the flow can be initiated and the information received from the first electronic information storage member 25 can be utilized to monitor the flow data.

That is, as shown, the close proximity between the cap 20 and the connector 40 is consistent with the short signal receiving range of the first electronic information storage member 25 and Weak signal strength. This may be to prevent crosstalk problems or may be desirable to, for example, involve applications that place a plurality of containers 10 adjacent to each other, thereby providing positive kit-to-connector/probe signal correlation and event management. An electronic information storage component having a larger receiving range may also be provided to supplement or make up for this short range device. The long range electronic information storage component can simplify general package management by sensing multiple containers with fewer or more remote antennas or reading devices. In one embodiment, a material storage includes both a short range and a long range of electronic information storage components, the former (short range) electronic information storage component being adapted to prevent misconnections and to provide a frontal container-to-tool correlation. The distribution service is provided, and the latter (long-range) electronic information storage component is suitable for other container management tasks, including interfacing with external reading devices, storing and transmitting sensors (ie, environmental) data, storage and transmission analysis. Certification (material-specific) information and more.

In a specific embodiment, the cap and the connector include a mechanical key member adapted to prevent misconnection, such as U.S. Patent No. 6,015,068, entitled "Liquid chemical dispensing system with a key code ring for connecting the The case of the proper chemical to the proper attachment is hereby incorporated by reference. For example, the cap 20 may include a key code ring portion (ie, including at least one protrusion, recess, engrave, groove, etc.), and the connector 40 may include a key pattern (ie, at least one Projections, recesses, engraves, grooves, etc., which are configured to match the portion of the key ring of the cap 20. Different materials stored in a container may be assigned a cap 20 configured with a specific key code, while different materials have distinct key codes. When trying to join a cap to a key In the case of connectors of different materials, the incompatible bond pattern can be used to prevent seating between the components; only the caps that are keyed to correspond to the other can be properly engaged with the connector. This configuration can be used to prevent misconnections with containers that have materials that are incompatible with a particular processing tool. Although the mechanical keying method is known, and the information from the information storage component mounted by the container as provided by the present invention can be retrieved and manipulated to facilitate misconnection prevention function, in some cases, It may be desirable to provide both mechanical and electronic misconnection prevention facilities, and may choose to jointly or alternatively deploy such misconnection prevention techniques.

Referring now to Figures 2A-2B, a dual interlock design for a material storage and dispense assembly provides two independent misconnection prevention devices - in other words, an electronic information storage member and a mechanical key probe interface - These may be used individually or collectively depending on the preferences of the end user. The description of Fig. 2A-2B should be interpreted in conjunction with the assembly 15 as previously described in connection with Fig. 1, but partially replace one of the caps 20 of Fig. 1 with the portion of the key ring illustrated in Fig. 2A-2B. 320A.

The key ring portion 320A is adapted to accept an RFID tag 325 at a recess 350 having a portion 350A above the abduction. In detail, an annular gasket retainer 351 is first inserted into the recess 350, followed by an insulating washer 352, followed by the RFID tag 325, and finally an upper target cap 355. These elements 351, 352, 325, 355 can be held at the recess 350 by press fitting, gluing or any other suitable means.

The key ring portion 320A further includes a mechanically keyed probe interface 360 (including recesses 360A-360D defined along the upper boundary). The matching probe connector 40 has a corresponding matching structure (not shown), which is Adapted to match the mechanical keying probe interface 360. For example, the interface 360 can include a probe interface recess (360A-360D) and/or a probe interface protrusion, and the cap interface structure can include a capping interface with a corresponding size, shape and position. / or the capping interface is recessed such that if the probe connector 40 and the key ring portion 320A of the cap 20 are properly keyed to the other, the components can only be coupled to the other .

In a preferred embodiment, the mechanical keying probe interface 360 has a corresponding alphanumeric key code, and the capping cap 20 includes a visual indicator 365 to indicate the alphanumeric key code. That is, as shown in FIG. 2A, numerals "3-12" and "14-23" are placed on the key ring portion 320A as visual indicators 365 for the key code. This visual representation allows a user to visually confirm the key code relative to the position of the visual indicator 365, for example by looking at any of the probe interface recesses (360A-360D) and/or a probe interface protrusion. . In the example shown in Fig. 2A, the key code is "4-10-16-22", which corresponds to the number closest to the recesses 360A-360D in the position along the periphery of the key portion 320A. .

The presence of the mechanical keying probe interface 360 and the RFID tag 325 in a single fluid storage container can provide backup misconnection prevention - one of which is mechanical and the other electronic, ie Associated with the RFID tag. Both can be used by a particular end user or a single misconnection prevention device can be used by the other end user. This flexibility assists the manufacturer in reducing the number of parts that are produced and stocked, and provides an alternative or collateral misconnection prevention device that can be used by the end user to assist the end user. This flexibility is particularly suitable for misinterpreting one end user facility from one type Preventing the system from being transferred to another type is due to the fact that a set of liquid storage containers can be used interchangeably with both the new and legacy management devices. In addition, the misconnection prevention system can be deployed during the trial of a recent system at the end user facility of a material.

Referring now to Figure 1, the electronic information storage construct can be secured to, or otherwise associated with, a material storage container in a variety of manners and configurations. Although the first, and preferably short range, electronic information storage member 25 has been described in the foregoing, the container 10 further includes a second, and preferably a long range, electronic information storage member 50, along which The outer surface is set. The second electronic information storage component 50 can include a built-in RFID tag. The electronic information storage member 50 can be integrally formed by the same container body (ie, by molding), fixed to the outside of a container body, and fixed or attached to the same container. Or it can be supplied in any other convenient configuration. The long range electronic information storage member is preferably disposed along an outer surface whereby signal attenuation through the intervening material (i.e., a side wall of the container) is minimized.

A material storage container having an electronic information storage member can be used to utilize various sensors and slave components, whether the sensors are shipped with the container (ie, as affixed thereto), or In a fixed time period, the environment shared by the containers is used in a static manner. In a preferred embodiment, one or more sensors are integrated or otherwise coupled to one (ie, second) electronic information storage member 50 and may be disposed along an exterior surface of a container 10. . Preferably, the signals generated by the sensors are transmitted to an electronic information storage component (ie, the second electronic information storage component 50) associated with a material storage container, either directly or in a relay manner. Transfer to an external letter No. Receiver. The sensor can be used, for example, to sense the environmental conditions experienced by a material storage container between a supplier facility and a material end use facility, or even within a facility end use facility, thereby Before using the painting, first evaluate whether the specific material targeted has deteriorated. If a material has violated some of the environmental restrictions, such as life, temperature, impact, etc., it can prevent the fluid from being transferred to a processing tool, or detect that the violation is in use, then stop further Material transfer operations.

The type of sensor required includes: temperature, pressure, strain (ie, generating a pressure response signal), chemicals (eg, amine sensors, oxygen sensors, and other materials suitable for detecting a particular container). The chemical sensor that leaks content, humidity, acceleration, and material level (ie, by optical or acoustic devices). That is, as in the case of electronic information storage components 25, 50, the sensor can be unpowered, self powered (ie, by means of batteries, capacitors, photovoltaic cells or other charge generating or storage components), or remotely powered ( That is, by trimming a high frequency RF signal to generate an available charge). The remote power supply unit can use ISO 14444 (-A, -B or -C) or ISO 15693 communication. Various sensors can be integrated into the other, and/or electronic information storage component(s) as desired. Traditional scale or MEMS sensors can be used.

Various types of pressure sensors can be used, but prefer not to require direct contact with the sensor of the material to be sensed. In one embodiment, a strain response sensor is disposed on an exterior surface of the container and adapted to generate a pressure indicating signal associated with when the container is responsive to a side wall of the container The pressure of the material in the container as the pressure differential changes and expands and contracts, as described in U.S. Patent No. 6,494,343. Pressure signals can be utilized to sense spills or empty containers (ie, characterized by tilt or low pressure) or to sense dangerous underpressure conditions. Comparing the output signal from the pressure sensor with a preset or user defined threshold value, and in a specific embodiment, preferably storing the high or low voltage status signal in the memory of the electronic information storage component .

Various types of temperature sensors can be provided to sense the temperature of the material within a container, the surface of a container, or the environment in which the container is located. The temperature sensor can be further used to compensate for the pressure representative signal in terms of temperature. Examples of suitable temperature sensor types include thermocouples, thermistors, and resistance temperature devices. Temperature signals can be used in many situations. High temperatures can cause deterioration of sensitive materials like photoresist, while some materials subjected to cold storage need to be returned to a precisely controlled higher temperature range before being dispensed to a processing tool. Comparing the output signal from the temperature sensor with a preset or user defined threshold value, and in a specific embodiment, preferably storing the high or low temperature status signal in the memory of the electronic information storage component .

One or more acceleration response sensors can be provided to measure the impact or acceleration experienced by a material storage container. The collision or acceleration of a material storage container can be monitored for various reasons, such as identifying potentially damaging impacts or impacts on the container, and/or detecting conditions that may alter the state of the contents of a container. For example, if a container contains a slurry, a suspension with entrained solids, or a material containing a surfactant, impact or other high acceleration events may cause unwanted shaking, separation, and foaming. Or cause non-uniform conditions that are unpleasant. Multiple sensors may be provided to measure collisions or accelerations in complementary directions, and/or to provide backup or acceleration measurement operations in the event of a single impact or acceleration sensor failure. An example of an acceleration sensor includes the model ADXL320 manufactured by Analog Devices, Inc. (Norwood, MA), and the US Patent Application Publication No. 2003/0153116 entitled "Encapsulation of MEMS devices using pillar-supported caps" The design disclosed in the text (incorporated into the case by reference). The output signal from the acceleration sensor is compared to a preset or user defined threshold, and in a particular embodiment, the high acceleration status signal is preferably stored in the memory of the electronic information storage component.

Various types of material (chemical) sensors can be provided, such as to identify the presence of one or more specific materials (eg, in liquid or gaseous form) outside of a container, and to deliver one or more output signals Up to an electronic information storage component and/or a remote monitor. A warning or a response action is initiated by comparing the output signal from the material sensor with a preset or user-defined threshold value. The comparison operation can be performed locally in an electronic information storage component having an integrated processor, assuming that a suitable processor is present, and a predetermined or user-defined threshold value is resident in the memory of the electronic information storage component. (ie, if it is transmitted from an external source and stored locally); or alternatively, the information representing the sensor signal can be transmitted to an industrial controller or computer periodically or as needed. The processor (i.e., control member 236 as shown in Figure 5) performs this comparison operation in an external manner. The chemical detection facility can be adapted, for example, to identify spills emanating from a storage container or other source. Materials of a particular type to be sensed include oxygen, amines, and other types of materials that may be present in a storage container. An example of one of the useful material sensors 172 includes a KAMINA gradient microarray wafer developed by Karlsruhe Research Center or Forschungszentrum Karlsruhe GmbH (Karlsruhe, Germany). Further examples of useful material sensors 172 are disclosed in U.S. Patent Application Publication No. 2004/0163444, entitled "Nickel-Coated Free-Standing Silicon Carbide Structure for Sensing Fluoro or Halogen Species in Semiconductor Processing Systems, and Processes of Making and Fluorine and halogen sensors disclosed in the text of Using Same, the case is hereby incorporated by reference.

Various types of sensors can be provided to identify material levels and/or identify material types within the container. For example, optical and/or acoustic transceivers or sensors can be used. Acoustic measurements may be better suited for liquid media than gases. In one embodiment, the transmitter of an audio transceiver partially transmits an initial acoustic signal to the outer side wall of the container, and a receiver thereof locally detects the dissipation of the transmitted signal. A portion of the acoustic energy is dissipated within the container and the material contained therein, and the amount of acoustic energy dissipated within the material is based on the amount and/or type of material present. Different material types provide different acoustic dissipation characteristics, such as those associated with poor material density. Through laboratory tests, acoustic dissipative experimental data of various container types containing different levels of materials and/or various types of materials can be generated and stored in a memory such as an electronic information storage member memory. As a checklist. Then, the sound received by a transceiver can be received The signal is transmitted to a processor (i.e., within an electronic information storage component) and compared to the stored dissipated signal to identify any material levels and material types that are present within the container. In another embodiment, an acoustic signature of a particular container may be generated at one or more points in a process of filling a container with a particular material and stored in an electronic information storage component. , by which it relates to the particular container and material.

In one embodiment, the sensor preferably communicates at least intermittently with an electronic information storage component associated with a material storage container or with another data repository that may be remotely located. This communication can be performed at different frequencies or sampling rates, as appropriate, for the sensed parameters, available power, or any other considerations. The signal sampling rate can be dynamically changed in response to a trigger or threshold event. For example, if the pressure or strain is initially sampled at a rate of twice per hour, a reading that is significantly above or below a cumulative average reading or other threshold will trigger a more frequent signal. Sampling or data transfer to a memory or data repository of an electronic information storage component.

FIG. 3 depicts a filling system 100 for a material storage container such as the container 10. This system 100 can be utilized by a material supplier. The container 10 can include a first electronic information storage member 25, and a second electronic information storage member 50, and preferably includes any one or more of the sensors as previously described. Material is supplied to the container 10 through a material supply station 102. During or after the filling step, information can be written to an electronic information storage component 25 and/or 50 using a programming interface 104 (e.g., based on an RFID). This information can be limited to a unique identification code, such as pressing "electronic product code" The format is encoded; or may contain any of the various types of information described above, such as material type, material level, material batch identification data, batch specific or container specific material properties, material specific application parameters for processing tools, Handle tool operation instructions and more. The material supply station 102 and the programming interface 104 are preferably controlled by a common controller 106, preferably accessible to information storage, and networked to any of a variety of conventional storage and communication devices.

Figure 4 depicts a material storage container monitoring system 120 for monitoring one or more containers 10A-10C. Each container may contain first electronic information storage members 25A-25C, and second electronic information storage members 50A-50C. The containers 10A-10C are placed within a common chamber, cabinet or other enclosure 123. A plurality of peripheral sensors 115 can be placed to monitor the condition within the enclosure 123. At least one electronic information reading and/or writing device 122, such as an RFID read/write device, is disposed within the signal transmission and reception range of the containers 10A-10C in the package 123. A second antenna 121 can be further placed within the signal transmission and/or reception range of the containers 10A-10C. In one embodiment, a second antenna is placed on one or more of the containers 10A-10C to provide a "daisy chain" or similar communication between the plurality of containers, thereby extending for a read The signal transmission/reception range of device 122. The second antenna 121 can be used, for example, to extend the range of the electronic information reading device 122, and/or to transmit an electronic information storage member and/or sensors 25A-25C, 50A-50C. Powered high frequency RF signal. The electronic information reading device 122 can be either a location or a hand-held device and is preferably in communication with a communication network 125 that can access the Internet. A data storage/capture component or data repository 126 can be accessed via the network Connected to the reading device 122, and a monitoring terminal 128 provides remote access to information obtained from the material storage containers 10A-10C. A plurality of packages 123, reading device 122, and second antenna 121 may be provided in an amplified monitoring system. For example, at a material supplier facility (i.e., to track containers 10A-10C after programming in fill system 100), in a shipping container adapted to accommodate multiple containers 10A-10C These monitoring systems 120 are installed in an end-use facility and/or in a post-processing facility (i.e., recycling or waste disposal). Partial use of long-range communication and electronic information storage components, such as long-range RFID tags associated with material storage containers, can contribute to this continuous tracking.

Figure 5 depicts a material management system 200 showing the interconnection of various components within an end use facility 230 and between external facilities 210, 220, 290, and showing the direction of material transport within the system 200. . The system 200 includes a plurality of material storage containers 201A-201Q, each container 201A-201Q having at least one associated electronic information storage component (ie, a short-range RFID tag that is placed over the cap, and placed on the container side) The long range RFID built-in signatures at the wall are preferably dynamically updateable to periodically receive and store information. Within the terminal usage facility 230, a network 232 and a plurality of data communication components 245, 255, 265, 275, 285 are available to communicate with the other and communicate to various network devices, such as a central control. The device 236, a monitoring component 235, a data storage/capture member 234, a selective remote access device 206, and a user interface 238, each of which utilizes a hardware and a software. Visual convenience or need to use additional software platforms and / or modules (ie, as commercial processing Dynamic software, manufacturing execution systems, enterprise resource planning systems, etc., to achieve any variety of material management, process management, process optimization, return processing and monitoring functions. One or more firewalls 233A, 233B may be further provided to provide secure external communication.

Starting at the upper left of Figure 5, the material can be supplied to the container (i.e., as containers 201A, 201B) through a filling station 213 disposed within the supplier facility 210. One or more sensor components 216 can be disposed within the supplier facility 210 to sense environmental conditions. An analysis component or station 217 adapted to analyze the material and produce any batch-specific material-specific material property information can be further provided. This information may, for example, include parameters such as material identification data, material density, material viscosity, and molecular weight. In order to minimize the waiting process for the results of the analysis before the container is shipped, the analysis of the material samples from the batch or individual containers may be performed after the containers have left the supplier facility 210, and then The network 202 transmits the results (i.e., in transit mode or within the terminal usage facility 230), i.e., records the information in a container-related electronic information storage component after shipment. An electronic information (i.e., RFID) communication station 219 is adapted to write information to the electronic information storage components of each of the containers 201A, 201B, and preferably to the fill station 213, the analysis member 217, and the sensor components. 216 each is connected. Although the term "station" is used herein, any electronic information communication station may be portable and/or hand-held, as appropriate. In this manner, information from any of the fill station 213, the analysis member 217, and the sensor member 216 can be dated from the same container (ie, container 201B) away from the supplier facility 210 and / or time stamp, passed to the container electronic information storage value Set it up and store it in it. Since the analysis results may take a significant amount of time to obtain, in order to prevent inappropriate transmission delays, the material storage container may be shipped from the supplier facility without analysis information, and the load is stored in the relevant electronic information storage component. Sufficient information whereby the containers are capable of transmitting and receiving analysis results when present at the delivery facility 220 or the terminal usage facility 230. Preferably, a data communication station 215 is provided within the supplier facility 210 for data transfer and/or reception to the supplier facility 210. The data communication station 215 can also be used to facilitate communication and reporting to an external office or review unit 204 via the network 202. In a preferred application, the terminal usage facility 230 can establish communication with the vendor facility 210 over one or more networks (i.e., multiple networks 202), thereby obtaining and/or identifying information about the The terminal uses the information of the particular material storage container received by the facility 230.

Material storage containers (i.e., containers 201C, 201D) may be shipped from the supplier facility 210 to a distribution or warehouse facility 220. A first electronic information communication station 221 can communicate with each of the incoming containers (ie, containers 201C, 201D) so that when the container enters the delivery facility 220, information can be retrieved from the container and/or information can be written The container. This communication function can be used, for example, to automatically post the container to the delivery facility 220 with an electronic time and/or time stamp. By writing information to an electronic information storage component associated with a container, the container can retain its own shipping records. A sensor component 226 is disposed within the dispensing facility 220 to sense environmental conditions therein, and preferably is provided with a second electronic information communication station 229 to exit the dispensing facility with each of the outgoing containers Communication at 220 o'clock. If appropriate and necessary, the first and second electronic information communication stations 221, 229 can be integrated into one single One stop. Further provided is a data communication station 225 for transmitting information between the receiving (or material transporting) area 240 and a data storage/capturing device 234 via a communication network 232 (ie, maintaining one or more Dynamically updated database). It should be understood that the various hardware devices within the system operate in accordance with appropriate machine readable software.

The material storage container is shipped from the dispensing facility 220 to the end use facility 230 and is typically received at a receiving area 240. The receiving area 240 preferably includes first and second electronic information communication stations 241, 249 that are adapted to be associated with respective material storage containers (ie, containers 201E, 201F). Sensor component 246, and preferably in communication with a data communication component 245. Preferably, the information is stored by storing the information in an electronic information storage component associated with a container, and through a data communication component 245 and a communication network 232 (which is preferably located inside the terminal usage facility 230). The same information is selectively stored to a data storage/crawling device 234 that communicates with the receiving area 240, and the first and second electronic information communication stations 241, 249 perform the container in and out of the electronic time. Stamp processing. Communication between the receiving area 240 and the supplier facility 210 can be provided via an (internal) network 232, a firewall 233A or 233B, and an external network 202, ie, if material analysis and/or authentication can be transmitted from the supplier The electronic information storage component stored in the appropriate material storage container is recorded, and the information can be simultaneously stored to the data storage/capture member 234.

Any of a variety of data verification checks may be performed on a material storage container received into the receiving area 240, or a material storage container transported to any area within the end use facility 230 for this item. Come The data from each container electronic information storage component is automatically transmitted to a data storage/capture component 234 via the data communication component 245 and the network 232. The current and/or historical representation in the cold storage area (i.e., as a time period in which a container appears in the receiving area 240) may be expressed in a substantially continuous manner, or when the container exits the receiving area 240. Information on environmental conditions is written to the electronic information storage component of each container. Various user-defined rules for material acceptance and removal may be applied to the containers and materials placed therein, and typically there will be analysis results that should be provided from the analytical service to the end user facility. Certification (ie, including batch or container specific material properties information). An analytical authentication, a unique identification code that can be accessed to an analytical certification, a result of an acceptable or acceptable decision, etc. can be passed to an information storage component associated with a container of contained material and stored. That is, information stored in a container-related information storage member can be communicated to a processing tool control member, preferably when a container enters a material end use facility. In addition, information indicating a chemical use template or other processing tool operating instructions may be stored in an information storage device when a particular event occurs, such as an operator of a material end using the facility accepting the container or material, or It can be derived from it. The desire is to automate the aforementioned information transfer steps to eliminate delays in container transport because the material contained within the container may be sensitive to environmental factors such as temperature, pressure, impact, radiation exposure, and the like.

The material storage container can be transported from the receiving area 240 to a cold storage area 250. For materials such as photoresist, this cold storage operation can be advantageously employed to prevent deterioration and prolong storage life. The cold storage area 250 is preferably Is comprised of first and second electronic information communication stations 251, 259, which are adapted to be associated with respective material storage containers (ie, containers 201G, 201H), an electronic information storage component, an environmental sensor component 256, and A data communication station 255 is connected. The current and/or historical representation in the receiving area (i.e., as a container appears in the cold storage area 250) may be displayed in a substantially continuous manner, or when the container leaves the cold storage area 250. The information of the environmental conditions is written to the electronic information storage means of each container.

The material storage container can be transported from the cold storage area 250 to a thawed or pre-manufactured material (chemical) step area 260. Preferably, the step area 260 includes first and second electronic information communication stations 261, 269 adapted to be associated with electronic data storage components associated with respective data storage containers (ie, containers 201I, 201J), An environmental sensor component 266 and a data communication station 265 communicate. The current and/or historical representation in the receiving area (i.e., as a container appears in the staged area 260) may be displayed in a substantially continuous manner, or when the container leaves the staged area 260. The information of the environmental conditions is written to at least one electronic information storage component of each container (ie, such as a long-range RFID built-in signature). If not previously stored in an electronic information storage component associated with a material storage container (ie, when filling in at the supplier facility 210 or at any other point in the supply chain of the container) The processing tool operating parameters, set values or operating commands, or other information affecting the processing of the processing tool material may be stored in the routing area 260 to an electronic information storage component of a material storage container.

Material storage containers can be utilized from the preparation area 260 to a manufacturing area 270. The manufacturing area 270 preferably includes first and second electronic information communication Stations 271, 279 are adapted to communicate with electronic information storage components associated with respective material storage containers (i.e., containers 201K, 201N) when transported to and from the manufacturing area 270. The manufacturing area 270 further includes at least one processing tool 272A, 272B. Examples of such tools include coating tracking tools for applying photoresist and other semiconductor wafer processing tools; however, other processing tools suitable for medical, pharmaceutical, biological, nuclear, and/or nanotechnology can be used. Each of the processing tools 272A, 272B has a related material (i.e., chemical) inclusion or reservoir 273A, 273B whereby the material storage containers (i.e., containers 201L, 201M) coupled in the dispensing relationship are stored to the Processing tools 272A, 272B. Each of the tanks 273A, 273B preferably contains a plurality of material storage containers to provide significant uninterrupted operating periods of the processing tools 272A, 272B, and the electronic information storage components of the various material storage containers (i.e., such as a short range RFID tag) are preferably Sensing communication can be performed with an associated local control component 278A, 278B via appropriate communication hardware. The communication hardware can include an RFID reader (or read/write device) that is affixed to a probe connector, and the connector is adapted to closely fit to a container that is mounted in a container A short range RFID tag within the cap (ie as shown in Figures 2A-2B). One type of probe connector can be in wired communication with a control member (e.g., an industrial controller or computer) that is operatively coupled to a processing tool.

Each of the processing tools 272A, 272B can be provided with a local control member 276A, 276B, and each of the local control members 276A, 276B is preferably associated with a central controller 236, a monitoring component 235, a data storage/capturing component 234, a selection The remote remote access device 206 and a user interface 238 communicate, all through a data communication station 275 and a communication network 232. Preferably, it is located at the local location of the terminal usage facility 230. Each of the process tool control members 272A, 272B is preferably adapted to access and/or modify any stored batch-specific and/or container-specific material properties, container-specific current and/or historical environmental conditions, and material-specific Parameters are used as input variables to examine the effects of these variables on any processing performance, tool performance, product performance, and product yield. Each processing tool 272A, 272B further includes a sensor member 276A, 276B (ie, a temperature sensor member) to monitor environmental conditions experienced by a material storage container, and the condition can be returned to the (etc.) Local and/or central control members 276A, 276B, 236, and preferably electronic information storage components stored to the material container. When the material storage containers (i.e., containers 201L, 201M) are exhausted, other containers (i.e., containers 201K) may be supplied to the tanks 273A, 273B to restore operation of the processing tools 272A, 272B.

It would be desirable to be able to perform mass, level or volume sensing of the material contained in the material storage container at any point in time, where material may be consumed or released to provide representation of the remaining material and/or to track the consumption of the material. Happening. It would be desirable to pass this information through the network 232, along with the container location and material conditions (i.e., if environmental conditions can be used to determine whether some of the materials are still usable for their intended use), to the controller 236 (or It is the other component that is used to track the inventory of materials within the facility 230 used in the terminal. If the inventory of any particular material is consumed below a predetermined or user-determined threshold, an order for additional material may be automatically generated and sent to an external supplier 210 via network link 202. This includes material acceptability, container location, material quality/volume/level, material consumption, and container/material environmental conditions. The way information is integrated provides unprecedented efficiency in determining and predicting future material needs. Automated material ordering to meet these needs minimizes the possibility of an experimental or industrial process being interrupted by the lack of appropriate or acceptable materials.

After the material from the material storage container (i.e., container 201N) in the manufacturing area 270 is used up, it is preferable to record a signal indicating an empty or exhausted condition to the information storage member associated with each material storage container (ie, For example, to prevent accidental misconnection of an empty container to a processing tool), and to empty the container (ie, such as container 201O, 201P) to the supplier for refilling or recycling, or to provide a waste service supply Dealing with waste disposal. The shipping area/waste management area 280 preferably includes first and second electronic information communication stations 281, 289 that are adapted to be associated with electronic information associated with each material storage container (ie, containers 201O, 201P). The storage member communicates with a data communication station 285. In this manner, containers from and to the shipping area/waste management area 280 can be automatically tracked, logged in, and/or monitored. Preferably, a data communication station 285 is provided to provide the shipping area/waste management area and other connections to the internal network 232, and/or such as the disposal/recycling facility 290, the supplier facility 210, and the tracking office. Or review the external facilities or entities of the unit 204, the communication between the devices.

The exhausted container can be transported from the shipping area/waste management area 280 to a location or recycling facility 290, preferably having an electronic information communication station 291 and a data communication component 295 for communication with external facilities or entities . A material storage container (i.e., container 201Q) may be remanufactured or readjusted, as appropriate.

In view of the foregoing, the system 200 provides a highly automated material storage container and its content "live to extinction" tracking and management operations, thus giving significant advantages, such as: by directly material-specific attribute data directly Delivered to the processing tool point of use, eliminating wafer residue, wafer rework and process downtime due to misuse or ineffective materials, and enhanced tool and process performance and new data analysis functionality, as well as advanced processes Control and optimization. Other features and benefits of the system 200 can be as described below.

The unique information about each material storage container and its contents can be automatically added to a dynamically updateable electronic information storage component at any number of points during the supply, use and/or disposal of the chain. An electronic record is provided at each point of the chain without the need to request and process an individual (i.e., paper) record. This greatly reduces the manpower and error probability in material tracking and management operations.

The material storage container can be immediately shipped from a supplier facility 210 without waiting for the analysis of the material content, as the results can be communicated to either the distribution facility 220 and the end use facility 230, and then "Incorporated" into a dynamically updateable electronic information storage component associated with the material storage container. This reduces shipping delays and reduces the chances of a supply chain disruption.

The system 200 allows the end user to easily define, modify, and provide rules for the acceptance, removal, and proper use of each material storage container and its contents.

The system 200 provides the end user with the ability to provide each material supplier with a location of the supplier container within the end use facility 230. Detailed inventory reporting capabilities. The system 200 can generate an automated inventory "selection table" that automatically communicates inventory restocking requirements to its upstream inventory location.

The system 200 can provide data transfer functionality between the end use facility 230 and the material supplier. If desired, a communication operation can be established between the material supplier and a data repository that can be associated with an electronic information storage component associated with a particular material storage container. This communication job can exchange any container-specific, material-specific, and batch-specific information.

Information about any material characteristics, container information, current and historical environmental conditions, and material usage information is stored on an electronic information storage component associated with a material storage container and can be shared with external software and data systems. This information, and optionally other processing information, can be displayed to the user through various types of user interfaces, including a local display (ie, a touch display), placed at or above the processing tool. a local remote display (ie, user interface 238) that is removed from a processing tool while still within the processing facility hosting the processing tool; or a true remote located at the far end of the processing tool monitor. For example, for a processing tool 272A that includes a "tracking processing tool," the display can include a representation of which material is coupled to a particular dispensing nozzle and provides detailed information about each material. Any such material characteristics, container information, current and historical environmental conditions, and material usage information may be utilized by the processing tool 272A, and/or any associated or integrated control member 278A, 236 or monitoring component 235, to provide Flexible and detailed tools and production reports.

In a preferred embodiment, a communication format, such as "Semiconductor Device Communication Standard ("SECS")" or SECS-GEN, will be associated Data transfer between electronic information storage components of a material storage container (i.e., container 201M) is provided to an external device, such as a process tool controller (i.e., controller 278A). For example, when applied to a coating tracking tool having a plurality of nozzles, an electronic information storage component associated with one of its material storage containers can be assigned a data file that is uniquely mapped to one of the tools. Specific nozzles are identified as needed or in appropriate conditions along with other fields. This file can contain comma-separated data with multiple fields, such as the following list of attributes and the files provided in the sample data file: CoatModuleName, CoatModuleNumber, ResistNozzleNumber, BottleNumber

COT, 10123, 1, 1

COT, 10124, 1, 1

COT, 10125, 1, 1

COT, 10126, 1, 1

BCT, 10123, 2, 1

BCT, 10124, 2, 1

BCT, 10125, 2, 1

BCT, 10126, 2, 1

The system 200 can provide a variety of material management methods. For example, referring to FIG. 6, a material management method 400 is generally used to store information in an electronic information storage component and utilize the stored information to set or adjust operational parameters of a processing tool. Beginning at the upper end of Figure 6, a first method step 402 includes filling a container having an associated electronic information storage member material. A second method step 404 includes storing information indicative of any of: (a) a batch of material properties, (b) a container specific material property, in an electronic information storage component associated with the container, (c) a container-specific current and environmental condition, (d) a container-specific historical and environmental condition, and (e) a material-specific operational parameter (or processing tool operating parameter). Steps 402, 404 can be performed by filling the system 100 as described above.

An analysis of a material sample representation of the contents of a material storage container can be performed in a third step 408. In step 406, the analysis operation may be performed during or after the shipping of the storage container containing the material to a material processing end use facility. During shipping, the environmental conditions of the container and/or material may be monitored by any of a variety of sensors in step 405. After the material analysis operation, a material storage container can be obtained in step 410 to obtain the analysis results. Additionally or alternatively, in step 410, a material storage container can be provided with processing information for the processing tool, such as material specific operational parameters or operational parameters. This information can be provided either automatically in step 409 or in response to a network inquiry request. The information may be compared to an appropriate material storage container during the shipping step 406, when a container is received at an end facility, or as part of a communication step 418, in step 412. Information from a material storage container and/or data repository is communicated to a processing tool control device. If, in step 414, a container containing the material is moved within the end user facility, the environmental conditions experienced by the container can be monitored in step 415.

In step 418, information from an electronic information storage component (associated to a material storage container) to a processing tool control device is available at step 420. The operating parameters of a processing tool are automatically set or adjusted. Thereafter, a process can be executed in step 422 and/or a product item can be made by the process tool. This product item does not need to be specifically implemented as a finished consumer item; rather, it may comprise any suitable treated material and is embodied as a precursor material for subsequent processing steps. Preferred product items comprise a semiconductor material such as a semiconductor substrate, wafer or ingot; or alternatively, a product item may comprise a medical, pharmaceutical, biological or nuclear energy item. After the process or manufacturing step 422, an attribute of one of the product items can be analyzed at step 424. This analytical job includes any of a variety of traditional performance tests or quality assurance/quality control tests. In response to the analyzing step 424, one of the processing parameters of the processing tool can be further adjusted in step 420. The resulting method 400 is well adapted for process optimization and eliminates the need for manual processing of material specific processing parameters that are accompanied by operator error.

The various steps of another material management method can be as shown in Figure 7. In a first method step 432, a material storage container is filled with material and will have information about the person (ie, such as a unique container identification code, material quality, material type, desired recipient identification data, etc.) Stored in an associated information storage device. In a subsequent step 436, the container of contained material is shipped to an end use facility. During or after the transport step, a sample of material representing the contents of the material storage container is analyzed in step 438 (ie, at a material supplier facility or at a remote testing facility) to ascertain any various material properties. . Carrying out container shipping prior to completion of analysis step 438 prior to step 436 avoids shipping delays and maximizes material storage life.

The information generated by the analysis step 438 can be ordered in step 440. A suitable material storage container is available. For example, the results of the analysis can be communicated during the shipping step 436 and compared to the appropriate container. Alternatively, the results of the analysis may be compared to the appropriate container when the container is received at the end of the facility receiving area, or when a container is placed in an appropriate level of the end use facility. In step 444, the analysis information can be stored on an electronic information storage component associated with the appropriate container or transmitted to a network data repository located at the remote end of the container (eg, through an image) The unique identification code of the "electronic product code" is associated with the container). In a further embodiment, both local and remote storage (related to the container) of the material information is provided. With this information, a core verification step can be performed in which any of the following items can be compared to a predetermined or user-defined key criterion: (a) end-use facility acceptance of a container; (b) A container is moved to a predetermined position (i.e., as in the end use facility); and (c) the selected use of the container and its material content. Then, in step 448, the stored information is transferred to a processing tool control device, and the operational parameters of the processing tool are set or adjusted in step 450. Next, a product can be fabricated and analyzed, and the results can be used to further adjust an operating parameter for process optimization as previously described.

Further information transfer and identification steps can be used by the previous method. In a specific embodiment, a record containing material-specific or material-specific material property information (ie, included in an analytical certification) can be transmitted from an analysis service provider to A data repository that is accessed at the end of a material using the facility. And transmitting an identification code for accessing the record, or storing it separately, to an electronic information storage component associated with a container containing the material. This identification code can be used to access the stored material property information Recording, and prior to the dispensing of the material from the container to a processing tool, prior identification (i.e., by a control device associated with a processing tool) is acceptable for this information. In another embodiment, the material property information acceptance obtained from the analysis can be identified, and information indicating the acceptance identification result is recorded to an information storage device associated with a container containing the material. .

Still another step of material management method 460 can be as depicted in FIG. Starting at the upper right, a first step 461 includes providing a material specification. A second step 462 includes supplying a material to a material storage container having an associated electronic information storage member. In step 464, the electronic information storage component (or alternatively, in a remote data repository linked to an identification code on a container) stores information indicating any of the following items: (a) material identification data; (b) material composition; (c) source of material; (d) quantity of material; (e) batch of material; (f) specific material properties of a batch; (g) material properties specific to any container; ) Container identification data. In step 475, information indicative of environmental conditions experienced by the container and/or its material content can be monitored and stored in step 476 (ie, in an electronic information storage component or central repository) ). In step 478, any pre-existing information is provided to a control device associated with a processing tool, and in step 480 is used to set/adjust the processing parameters of the processing tool. In step 482, a product is produced that utilizes a material received from the material storage container. Thereafter, information specific to the material and/or container, which may optionally include environmental condition information, is associated with product information representing any of the following items: (a) product unique identification information, (b) product batch information, And/or (c) the date/time of manufacture of the product, which is stored (ie as in a searchable database) within). This storage operation associates a manufactured product with the materials used in its manufacturing operations. In step 484, one or more attributes of the product are analyzed, and the results can be used to responsively adjust the parameters of the processing tool in step 480. The product analysis can be performed immediately after the production of the product, or in some cases after this. The ability to correlate device performance to source materials facilitates process optimization and helps to quickly recall products or product lots that have been determined to have defects later, without the need for a holistic product assurance test. In response to product analysis step 484, material specifications 461 may also be adjusted as needed to improve the production process.

In step 485, a follow-up database search of the chained completed product/material database may be performed for any of a variety of reasons, and a report is generated in step 486. Automated measurement of materials used in products can substantially eliminate data entry errors, provide rigorous analysis of the impact of material specifications and materials provided by individual suppliers on product yields, and enable recycling or disposal of organizations, government units And/or the trade organization's return processing is smooth.

The present invention has been described herein with reference to the specific features, features and exemplary embodiments of the present invention. It will be understood that the application of the invention is not limited thereby, but rather extends and encompasses numerous Other variations, modifications, and alternative embodiments, that is, those skilled in the art of the present invention, are based on the disclosure herein. Accordingly, the invention is to be construed as being broadly construed and construed as the invention

Claims (32)

  1. A material storage and dispensing assembly comprising: a material storage container having a container body adapted to receive a material for subsequent dispensing from the material storage container; a cap; and a first electron An information storage component coupled to the cap and a second electronic information storage component coupled to the container body, each of the first and second electronic information storage components comprising a processor, a memory and a link storing information about a material contained in the material storage container, and the link is for transmitting and/or receiving information, the link and the memory being communicably coupled to the processor The first electronic information storage component is a short-range electronic information storage component, and the second electronic information storage component is a long-range electronic information storage component having a larger signal reception than the first electronic information storage component. range.
  2. The material storage and dispensing assembly of claim 1, further comprising a connector configured to be associated with the cap and including a probe.
  3. The material storage and dispensing assembly of claim 1, wherein the material storage container further comprises a removable liner, and wherein the container body is provided as a selectively pressurized outer casing, Contribute to storage control and controllable dispensing of material from the material storage container.
  4. The material storage and dispensing assembly as described in item 1 of the claim, wherein The information of the material contained in the material storage container is a representation of a particular application parameter of the material.
  5. The material storage and dispensing assembly of claim 1, wherein the information about the material contained in the material storage container is an indication of a processing tool operation instruction.
  6. The material storage and dispensing assembly of claim 1, wherein the information about the material contained in the material storage container is a material property.
  7. The material storage and dispensing assembly of claim 1, wherein the information about the material contained in the material storage container is a current or historical environmental condition of a particular container.
  8. The material storage and dispensing assembly of claim 1 further storing a unique identification code for the material storage container.
  9. The material storage and dispensing assembly of claim 1 further storing information regarding material acceptability, container position, and/or material level.
  10. The material storage and dispensing assembly of claim 1 further comprising one or more sensors associated with the material storage container, the one or more sensors being selected from the group consisting of : a temperature sensor, a pressure sensing a strain sensor, a chemical sensor, a humidity sensor, an acceleration response sensor, and a material level sensor, the one or more sensors configured to transmit a content as One of the sensed parameters of the signal.
  11. The material storage and dispensing assembly of claim 10, wherein the one or more sensors are configured to signal a content to one of the sensed parameters to the first or second electronic information At least one of the storage members.
  12. The material storage and dispensing assembly of claim 10, wherein the one or more sensors are configured to signal a content to one of the sensed parameters to a remote data repository.
  13. The material storage and dispensing assembly of claim 1, wherein the first electronic information storage component comprises an RFID tag, and the second electronic information storage component comprises an RFID tag.
  14. The material storage and dispensing component of claim 1, wherein the memory of at least one of the first or second electronic information storage components is a dynamically updateable memory, the dynamically updateable memory Information about the material contained in the material storage container can be received and stored.
  15. The material storage and dispensing assembly of claim 1, wherein at least one of the first or second electronic information storage members is configured to be stored in the memory with respect to the material storage container The information of a material, Wirelessly transmitted through the link to a remote device.
  16. The material storage and dispensing assembly of claim 15 wherein the information transmitted from at least one of the first or second electronic information storage components comprises a container location and/or material level information representation .
  17. The material storage and dispensing assembly of claim 1, wherein at least one of the first or second electronic information storage components is configured to receive information from a remote device through the link, and at least partially The information stored in the memory regarding the material contained in the material storage container is updated based on the information received from the remote device.
  18. The material storage and dispensing assembly of claim 1, wherein the information received from the remote device can include a date and/or time stamp.
  19. The material storage and dispensing assembly of claim 1, wherein at least one of the first or second electronic information storage members is configured to be stored in the memory with respect to the material storage container This information of a material is wirelessly transmitted to a processing tool control component.
  20. A system for monitoring one or more material storage containers, the system comprising: a network; at least one material storage container adapted to receive for use And a material dispensed from the material storage container, the material storage container comprising a container body and a cap and a first electronic information storage member coupled to the cap and a second electron coupled to the container body The information storage component, each of the first electronic information storage component and the second electronic information storage component stores information about materials contained in the material storage container, each electronic information storage component includes a link and a dynamically updateable Memory, the link for transmitting and/or receiving information through the network into and/or out of a remote device configured to receive and update the material contained in the material storage container The information that the first electronic information storage component is a short-range electronic information storage component, and the second electronic information storage component is a long-range electronic information storage component having a larger one than the first electronic information storage component Signal receiving range; an electronic information communication station; and a data storage/capture component, wherein the electronic information communication platform and the data Storage / capture member adapted to pass through the network transmission and / or reception of information into and / or information stored the first electronic component material out of the storage container associated with the second electronic information stored or is at least one member.
  21. The system of claim 20, further comprising a central controller, the central controller communicating with the electronic information communication station and the data storage/capture component via the network.
  22. The system of claim 20, wherein the dynamically updateable memory Further configured to receive and store an information representation of the location of the material storage container.
  23. The system of claim 20, wherein the dynamically updateable memory is further configured to receive and store an information representation of a quantity of material remaining in the material storage container.
  24. The system of claim 20, further comprising at least one sensor configured to transmit information of the sensed parameter to the material storage container via the network The first electronic information storage component or the second electronic information storage component stores the information of the sensed parameter in the dynamically updateable memory of the first or second electronic information storage component.
  25. The system of claim 20, further comprising a remote user interface, the remote user interface comprising a display communicatively coupled to the network, wherein the first electronic information storage component or the second electronic At least one of the information storage components is configured to transmit the information stored in the dynamically updateable memory to the remote user interface via the network, wherein the information is displayed on the display to the user.
  26. The system of claim 20, wherein after entering a facility, at least one of the first electronic information storage component or the second electronic information storage component is configured to be stored in the dynamically updateable memory The information, through The link is automatically transferred to the storage/capture component on the network.
  27. A material storage and dispensing apparatus comprising: at least one material storage container adapted to receive a material for subsequent dispensing from the material storage container, the material storage container comprising a container body and a cap and Having a first electronic information storage member coupled to one of the caps and a second electronic information storage member coupled to the container body, each of the electronic information storage members storing information about materials contained in the material storage container, Each of the electronic information storage members includes a dynamically updateable memory capable of receiving and storing information about the material contained in the material storage container, wherein the first electronic information storage member is a short range of electrons The information storage component and the second electronic information storage component are a long-range electronic information storage component having a larger signal receiving range than the first electronic information storage component; at least one electronic information reading device is adapted to Performing at least one of the first electronic information storage component or the second electronic information storage component Take; and a processor, arranged to process the information read from the information storage means at least one, and processing information about the desired material from the storage container materials.
  28. A material management system comprising: at least one material storage container comprising a container body and a cap Each of the containers has a first electronic information storage member coupled to the cover and a second electronic information storage member coupled to the container body, each of the first electronic information storage member and the second electronic information storage member The device includes a dynamic updateable electronic information storage component capable of receiving and storing information, wherein the first electronic information storage component is a short-range electronic information storage component, and the second electronic information storage component is a long-range electronic information storage component Having a larger signal receiving range than the first electronic information storage component; and a monitoring system adapted to monitor the position of the at least one material storage container among the plurality of functional areas in an end use facility, The monitoring system includes a network configured to permit communication between one or more data communication components and one or more network devices; at least one data communication component, the at least one data communication component communicating with the network And at least one electronic information communication station, the at least one electronic information communication station is adapted to be attached to each At least one of the first electronic communication information storage member material storage container or the second storage means of the electronic information.
  29. The system of claim 28, wherein the network devices are selected from the group consisting of: a central processing unit, a monitoring component, a data storage/capturing component, a user interface, and the like One of the combinations.
  30. The system of claim 28, wherein the monitoring system is adapted to monitor the at least one material storage container among one or more of the functional areas The location, the one or more functional areas are selected from the group consisting of: a receiving area, a cold storage area, a first-order spare area, a shipping area, a waste management area, or a manufacturing area.
  31. The system of claim 28, further comprising a first electronic information communication station and a second electronic information communication station, wherein the first electronic information communication station is used to store an incoming material in a selected area The container communicates, and the second electronic information communication station communicates with an outbound material storage container.
  32. A method for managing a plurality of material storage containers using a plurality of wireless information reading devices, each of the plurality of material storage containers having associated electronic information, the method comprising the steps of: using a material of the facility at a terminal Transported into the functional area to detect entry of a first material storage container; automatically transmitted to a data repository indicating information of at least one of the materials in the material storage container and indicating associated with the first material storage container The environment of the container, and the nature of a particular batch of material, the nature of a particular container material, the current or historical environmental conditions of a particular container, a processing tool operating command, and a material-specific operational parameter; The terminal use facility monitors any position and action of the first material storage container among the plurality of functional areas; and automatically transmits an information representation of any container position and container action to the data repository.
TW104114481A 2006-07-10 2007-07-10 Material management system and method for supplying liquid stored in liquid storage vessels to substrate TWI611313B (en)

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