TWI590725B - Detecting device and detecting method of appearance of printed circuit board - Google Patents

Detecting device and detecting method of appearance of printed circuit board Download PDF

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Publication number
TWI590725B
TWI590725B TW103144886A TW103144886A TWI590725B TW I590725 B TWI590725 B TW I590725B TW 103144886 A TW103144886 A TW 103144886A TW 103144886 A TW103144886 A TW 103144886A TW I590725 B TWI590725 B TW I590725B
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Taiwan
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color
printed circuit
circuit board
image
defect
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TW103144886A
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Chinese (zh)
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TW201531180A (en
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塩見順一
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斯克林集團公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00General purpose image data processing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis

Description

印刷電路板外觀的檢查裝置及檢查方法 Inspection device and inspection method for printed circuit board appearance

本發明是關於一種檢查印刷電路板的外觀的技術。 The present invention relates to a technique for inspecting the appearance of a printed circuit board.

一直以來,要對印刷電路板的外觀進行檢查。在印刷電路板設有表面存在阻焊劑的阻焊部、及鍍有金或銅的鍍敷部等。由於阻焊部及鍍敷部等彼此顏色不同,檢查印刷電路板時,大多使用彩色圖像。 The appearance of printed circuit boards has always been checked. The printed circuit board is provided with a solder resist portion having a solder resist on its surface, and a plating portion plated with gold or copper. Since the solder resist portion and the plating portion are different in color from each other, a color image is often used when inspecting a printed circuit board.

另外,在國際公開第2007/074770號中提出了一種方法:檢查矽晶片時,取得檢查對象的彩色圖像信號,基於構成該彩色圖像信號的多個信號成分獲得多個分析圖像,並對每個分析圖像檢測缺陷候補。在日本專利特開平8-318619號公報中公開了一種方法:檢查印刷物時,針對從紅綠藍(red green blue,RGB)彩色照相機輸入的彩色圖像,在各RGB值上乘以規定係數,進行加算後將所述彩色圖像轉換成黑白圖像,並對該黑白圖像進行檢查。 In addition, a method is proposed in International Publication No. 2007/074770, in which a color image signal of an inspection object is obtained when a wafer is inspected, and a plurality of analysis images are obtained based on a plurality of signal components constituting the color image signal, and A defect candidate is detected for each analysis image. Japanese Laid-Open Patent Publication No. Hei 8-318619 discloses a method of multiplying a RGB value by a predetermined coefficient for a color image input from a red green blue (RGB) color camera when inspecting a printed matter. After the addition, the color image is converted into a black and white image, and the black and white image is inspected.

但有時在拍攝印刷電路板所得的彩色圖像中,例如阻焊 部中的對比度變低,檢查印刷電路板時難以檢測存在於阻焊劑之下的缺陷。 But sometimes in the color image obtained by shooting a printed circuit board, such as solder mask The contrast in the portion becomes low, and it is difficult to detect defects existing under the solder resist when inspecting the printed circuit board.

本發明適於檢查印刷電路板的外觀的檢查裝置,目的在於精度良好地檢測印刷電路板上的缺陷。 The present invention is suitable for an inspection apparatus for inspecting the appearance of a printed circuit board, and aims to accurately detect defects on the printed circuit board.

本發明的檢查裝置包括:彩色圖像攝像部,取得印刷電路板的多種顏色成分的圖像作為彩色攝像圖像;黑白圖像攝像部,取得所述印刷電路板的黑白灰階圖像作為黑白攝像圖像;及缺陷檢測部,使用所述彩色攝像圖像對所述印刷電路板上的第一區域檢測缺陷,並使用所述黑白攝像圖像對所述印刷電路板上的第二區域檢測缺陷。 The inspection apparatus according to the present invention includes: a color image capturing unit that acquires an image of a plurality of color components of the printed circuit board as a color captured image; and a monochrome image capturing unit that obtains a black and white grayscale image of the printed circuit board as black and white a captured image; and a defect detecting unit that detects a defect on the first area on the printed circuit board using the color captured image, and detects a second area on the printed circuit board using the black-and-white captured image defect.

根據本發明,可以精度良好地檢測印刷電路板上的缺陷。 According to the present invention, it is possible to accurately detect defects on a printed circuit board.

在本發明的一較佳實施方式中,設有一個受光單元作為所述彩色圖像攝像部及所述黑白圖像攝像部,所述受光單元排列有所述彩色圖像攝像部的多個受光元件及所述黑白圖像攝像部的多個受光元件,且利用所述受光單元,對所述印刷電路板上的一個區域同時取得所述彩色攝像圖像及所述黑白攝像圖像。 In a preferred embodiment of the present invention, a light receiving unit is provided as the color image capturing unit and the black and white image capturing unit, and the light receiving unit is arranged with a plurality of light receiving units of the color image capturing unit. The element and the plurality of light receiving elements of the black and white image capturing unit, wherein the color captured image and the black and white captured image are simultaneously acquired on one area of the printed circuit board by the light receiving unit.

這種情況下,較佳為,檢查裝置還包括:光學系統,具有物鏡,所述印刷電路板與所述物鏡之間的光軸垂直於所述印刷電路板,且所述光學系統朝所述受光單元引導沿著所述光軸從所述印刷電路板射入所述物鏡的光;及斜光照明部,從與所述光軸 傾斜的方向對所述印刷電路板進行照明。 In this case, preferably, the inspection apparatus further includes: an optical system having an objective lens, an optical axis between the printed circuit board and the objective lens being perpendicular to the printed circuit board, and the optical system facing a light receiving unit guides light incident from the printed circuit board into the objective lens along the optical axis; and a slanting illumination portion from the optical axis The direction of the tilt illuminates the printed circuit board.

在本發明的另一較佳實施方式中,所述第二區域包含阻焊部。這種情況下,較佳為,所述缺陷檢測部基於所述彩色攝像圖像表現的所述缺陷的顏色,對在所述第二區域所含的所述阻焊部檢測出的缺陷的種類進行分類。更佳為,檢查裝置還包括記憶部,所述記憶部記憶錯誤資訊表,該錯誤資訊表在由所述多種顏色成分所規定的色空間中,將假缺陷的顏色的範圍表示為假缺陷顏色範圍,且所述缺陷檢測部將在所述阻焊部檢測出的缺陷中,所述色空間的存在範圍與所述假缺陷顏色範圍重疊的部分分類為假缺陷。 In another preferred embodiment of the present invention, the second region includes a solder resist. In this case, it is preferable that the defect detecting unit detects the type of the defect detected by the solder resist portion included in the second region based on the color of the defect expressed by the color imaged image. sort. More preferably, the inspection device further includes a memory portion that memorizes an error information table that indicates a range of color of the false defect as a false defect color in a color space defined by the plurality of color components In the range, the defect detecting unit classifies, in the defect detected by the solder resist portion, a portion in which the color space exists and the false defect color range overlap as a false defect.

在本發明的一實施方式中,所述第二區域包含焊料部。 In an embodiment of the invention, the second region includes a solder portion.

在本發明的另一實施方式中,所述第二區域包含鍍敷部。 In another embodiment of the invention, the second region comprises a plating portion.

本發明也適於檢查印刷電路板的外觀的檢查方法,包括:a)步驟,利用彩色圖像攝像部,取得所述印刷電路板的多種顏色成分的圖像作為彩色攝像圖像;b)步驟,利用黑白圖像攝像部,取得所述印刷電路板的黑白灰階圖像作為黑白攝像圖像;及c)步驟,使用所述彩色攝像圖像對所述印刷電路板上的第一區域檢測缺陷,並使用所述黑白攝像圖像對所述印刷電路板上的第二區域檢測缺陷。 The present invention is also applicable to an inspection method for inspecting the appearance of a printed circuit board, comprising: a) a step of obtaining an image of a plurality of color components of the printed circuit board as a color image by using a color image capturing unit; b) And obtaining a black-and-white gray-scale image of the printed circuit board as a black-and-white captured image by using a black-and-white image capturing unit; and c) detecting the first region on the printed circuit board using the color captured image Defects and detecting defects in the second region on the printed circuit board using the black and white camera image.

參照附圖,藉由以下進行的本發明的詳細說明,進一步明確上述目的及其他目的、特徵、實施方式及優點。 The above object and other objects, features, embodiments and advantages will be apparent from the accompanying drawings.

1‧‧‧檢查裝置 1‧‧‧Checking device

2‧‧‧裝置主體 2‧‧‧Device body

3‧‧‧攝像元件 3‧‧‧Photographic components

5‧‧‧電腦 5‧‧‧ computer

8‧‧‧記錄介質 8‧‧‧ Recording media

9‧‧‧印刷電路板 9‧‧‧Printed circuit board

22‧‧‧載置台 22‧‧‧ mounting table

23‧‧‧載置台驅動部 23‧‧‧Station drive department

31‧‧‧落射照明部 31‧‧‧Attacking Lighting Department

32‧‧‧斜光照明部 32‧‧‧ oblique lighting department

33‧‧‧光學系統 33‧‧‧Optical system

34‧‧‧受光單元 34‧‧‧Light receiving unit

41‧‧‧運算部 41‧‧‧ Computing Department

42‧‧‧表格更新部 42‧‧‧Form Update Department

43‧‧‧缺陷檢測部 43‧‧‧Defect Detection Department

44‧‧‧顯示控制部 44‧‧‧Display Control Department

49‧‧‧記憶部 49‧‧‧Memory Department

51‧‧‧中央處理器 51‧‧‧Central Processing Unit

52‧‧‧唯讀記憶體 52‧‧‧Read-only memory

53‧‧‧隨機存取記憶體 53‧‧‧ Random access memory

54‧‧‧固定磁碟 54‧‧‧Fixed Disk

55‧‧‧顯示器 55‧‧‧ display

56‧‧‧輸入部 56‧‧‧ Input Department

56a‧‧‧鍵盤 56a‧‧‧ keyboard

56b‧‧‧滑鼠 56b‧‧‧mouse

57‧‧‧讀取裝置 57‧‧‧Reading device

58‧‧‧通信部 58‧‧‧Communication Department

80‧‧‧程式 80‧‧‧ program

91‧‧‧阻焊部 91‧‧‧Resistance welding department

92‧‧‧鍍敷部 92‧‧‧Plating Department

93‧‧‧絲網部 93‧‧‧Wire section

94‧‧‧焊料部 94‧‧‧ solder department

321‧‧‧光源 321‧‧‧Light source

331‧‧‧物鏡 331‧‧‧ Objective lens

332‧‧‧半反射鏡 332‧‧‧half mirror

341‧‧‧彩色圖像攝像部 341‧‧‧Color Image Camera

342‧‧‧黑白圖像攝像部 342‧‧‧Black and White Image Camera Department

431‧‧‧缺陷區域指定部 431‧‧‧Defective Area Designation Department

432‧‧‧缺陷種類分類部 432‧‧‧Defect Category Classification Department

491‧‧‧錯誤資訊表 491‧‧‧Error Information Sheet

911‧‧‧配線部 911‧‧‧Wiring Department

J1‧‧‧光軸 J1‧‧‧ optical axis

K‧‧‧缺陷區域 K‧‧‧ Defective area

L‧‧‧線 L‧‧‧ line

S11~S17‧‧‧步驟 S11~S17‧‧‧Steps

圖1是表示檢查裝置的構成的圖。 Fig. 1 is a view showing the configuration of an inspection apparatus.

圖2是表示電腦的構成的圖。 Fig. 2 is a view showing the configuration of a computer.

圖3是表示檢查裝置中的功能構成的框圖。 Fig. 3 is a block diagram showing a functional configuration of an inspection apparatus.

圖4是表示檢查印刷電路板的處理流程的圖。 4 is a view showing a processing flow of inspecting a printed circuit board.

圖5是表示形成於印刷電路板的圖案、以及彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。 5 is a view showing changes in pixel values of a pattern formed on a printed circuit board, and a color captured image and a black-and-white captured image.

圖6是表示彩色攝像圖像及黑白攝像圖像的照片。 Fig. 6 is a photograph showing a color captured image and a black-and-white captured image.

圖7是表示彩色攝像圖像及黑白攝像圖像的照片。 Fig. 7 is a photograph showing a color captured image and a black-and-white captured image.

圖8是表示彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。 8 is a view showing changes in pixel values of a color captured image and a black-and-white captured image.

圖9是表示彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。 FIG. 9 is a view showing changes in pixel values of a color captured image and a black-and-white captured image.

圖10是表示彩色攝像圖像的圖。 Fig. 10 is a view showing a color captured image.

圖11是表示彩色攝像圖像的像素值的變化的圖。 FIG. 11 is a view showing a change in pixel values of a color captured image.

圖12是表示彩色攝像圖像的圖。 Fig. 12 is a view showing a color captured image.

圖13是表示彩色攝像圖像的像素值的變化的圖。 FIG. 13 is a view showing a change in pixel values of a color captured image.

圖14是表示彩色攝像圖像、黑白產生圖像及黑白攝像圖像的照片。 Fig. 14 is a photograph showing a color captured image, a black-and-white generated image, and a black-and-white captured image.

圖15是表示彩色攝像圖像、黑白產生圖像及黑白攝像圖像的像素值的變化的圖。 15 is a view showing changes in pixel values of a color captured image, a black-and-white generated image, and a black-and-white captured image.

圖16是表示彩色圖像攝像部的光譜靈敏度特性的圖。 Fig. 16 is a view showing spectral sensitivity characteristics of a color image capturing unit;

圖17是表示黑白圖像攝像部的光譜靈敏度特性的圖。 Fig. 17 is a view showing spectral sensitivity characteristics of a monochrome image capturing unit;

圖18是表示形成於印刷電路板的圖案、以及彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。 18 is a view showing changes in pixel values of a pattern formed on a printed circuit board, and a color captured image and a black-and-white captured image.

圖1是表示本發明的一實施方式的檢查裝置1的構成的圖。檢查裝置1是檢查例如安裝電子構件之前的印刷電路板9(也稱為印刷配線基板)的外觀的裝置。 FIG. 1 is a view showing a configuration of an inspection apparatus 1 according to an embodiment of the present invention. The inspection device 1 is a device that inspects, for example, the appearance of a printed circuit board 9 (also referred to as a printed wiring substrate) before mounting an electronic component.

檢查裝置1包括:裝置主體2,對印刷電路板9進行攝像;及電腦5,控制檢查裝置1的整體動作,並且實現下述運算部。裝置主體2具有:攝像元件3,對印刷電路板9上的各檢查對象區域進行攝像而取得攝像圖像(的數據(data));載置台(stage)22,保持印刷電路板9;及載置台驅動部23,使載置台22與攝像元件3相對移動。載置台驅動部23是由滾珠螺杆(ball screw)、導軌(guide rail)、馬達(motor)等構成。 The inspection apparatus 1 includes an apparatus main body 2 for imaging the printed circuit board 9, and a computer 5 for controlling the overall operation of the inspection apparatus 1, and realizing the following calculation unit. The apparatus main body 2 includes an image pickup device 3 that captures an image of each inspection target area on the printed circuit board 9 to obtain a captured image (data); a stage 22 holds the printed circuit board 9; The stage driving unit 23 moves the stage 22 and the imaging element 3 relative to each other. The stage driving unit 23 is constituted by a ball screw, a guide rail, a motor, or the like.

攝像元件3包括第一照明部31、第二照明部32、光學系統33及受光單元34。第一照明部31及第二照明部32射出白色光作為照明光。光學系統33具有物鏡331、半反射鏡(half mirror)332及其他透鏡(省略圖示)。從第一照明部31射出的照明光被半反射鏡332反射,經過物鏡331等之後被照射至印刷電路板9。在光學系統33中,物鏡331與印刷電路板9之間的光軸J1垂直於 印刷電路板9的主面,來自第一照明部31的照明光被垂直地照射至印刷電路板9。沿著光軸J1從印刷電路板9射入物鏡331的光,藉由半反射鏡332等之後被引導至受光單元34。如上所述,來自第一照明部31的照明光被利用於所謂的落射照明(同軸落射照明),即,經過物鏡331後對印刷電路板9照射光,以下說明中,將第一照明部31稱為“落射照明部31”。 The imaging element 3 includes a first illumination unit 31, a second illumination unit 32, an optical system 33, and a light receiving unit 34. The first illumination unit 31 and the second illumination unit 32 emit white light as illumination light. The optical system 33 has an objective lens 331, a half mirror 332, and other lenses (not shown). The illumination light emitted from the first illumination unit 31 is reflected by the half mirror 332, passes through the objective lens 331 or the like, and is then irradiated onto the printed circuit board 9. In the optical system 33, the optical axis J1 between the objective lens 331 and the printed circuit board 9 is perpendicular to The main surface of the printed circuit board 9 is illuminated by the illumination light from the first illumination portion 31 to the printed circuit board 9. The light incident on the objective lens 331 from the printed circuit board 9 along the optical axis J1 is guided to the light receiving unit 34 by the half mirror 332 or the like. As described above, the illumination light from the first illumination unit 31 is utilized for so-called epi-illumination (coaxial epi-illumination), that is, the illumination of the printed circuit board 9 after passing through the objective lens 331, and in the following description, the first illumination portion 31 is used. It is called "emission illumination unit 31".

第二照明部32具有多個光源321。多個光源321被固定於光學系統33的鏡筒,且配置於該鏡筒的側方。多個光源321從與物鏡331和印刷電路板9之間的光軸J1傾斜的方向對印刷電路板9進行照明。也就是說,來自第二照明部32的照明光被利用於所謂的斜光照明,即,從與光軸J1傾斜的方向照射光,以下說明中將第二照明部32稱為“斜光照明部32”。來自斜光照明部32的照明光在印刷電路板9上的照射區域包含來自落射照明部31的照明光在印刷電路板9上的照射區域、及利用受光單元34的攝像區域。在本處理例中,來自落射照明部31的照明光的強度與來自斜光照明部32的照明光的強度大體上相同。 The second illumination unit 32 has a plurality of light sources 321. The plurality of light sources 321 are fixed to the lens barrel of the optical system 33 and disposed on the side of the lens barrel. The plurality of light sources 321 illuminate the printed circuit board 9 from a direction oblique to the optical axis J1 between the objective lens 331 and the printed circuit board 9. That is, the illumination light from the second illumination unit 32 is used for so-called oblique illumination, that is, light is irradiated from a direction oblique to the optical axis J1, and in the following description, the second illumination portion 32 is referred to as "the oblique illumination portion 32. ". The irradiation area of the illumination light from the oblique illumination unit 32 on the printed circuit board 9 includes an irradiation area of the illumination light from the epi-illumination part 31 on the printed circuit board 9, and an imaging area by the light receiving unit 34. In the present processing example, the intensity of the illumination light from the epi-illumination unit 31 is substantially the same as the intensity of the illumination light from the oblique illumination unit 32.

受光單元34將利用光學系統33成像於受光面的印刷電路板9的影像轉換成電信號。詳細來說,受光單元34包括設有R(紅)濾光片(filter)的多個受光元件、設有G(綠)濾光片的多個受光元件、設有B(藍)濾光片的多個受光元件、及未設置彩色濾光片的多個受光元件。受光元件例如為電荷耦合元件(Charge Couple Device,CCD)。在受光單元34的受光面上,這 些受光元件混合存在並被二維地排列,取得利用了R濾光片的R圖像、利用了G濾光片的G圖像、利用了B濾光片的B圖像、及未利用彩色濾光片的圖像。 The light receiving unit 34 converts an image of the printed circuit board 9 imaged on the light receiving surface by the optical system 33 into an electric signal. In detail, the light receiving unit 34 includes a plurality of light receiving elements provided with an R (red) filter, a plurality of light receiving elements provided with a G (green) filter, and a B (blue) filter. a plurality of light receiving elements and a plurality of light receiving elements not provided with a color filter. The light receiving element is, for example, a charge coupled device (CCD). On the light receiving surface of the light receiving unit 34, this Some light-receiving elements are mixed and arranged two-dimensionally, and an R image using an R filter, a G image using a G filter, a B image using a B filter, and an unused color are obtained. The image of the filter.

未利用彩色濾光片的圖像是表示印刷電路板9上的攝像區域的各位置上的亮度的黑白灰階圖像。在以下說明中,將未利用彩色濾光片的圖像稱為“黑白攝像圖像”,並將取得黑白攝像圖像的多個受光元件的集合稱為“黑白圖像攝像部”。此外,將R、G、B的圖像集合、即各像素具有R、G、B的值(像素值)的圖像稱為“彩色攝像圖像”,並將取得彩色攝像圖像的多個受光元件的集合稱為“彩色圖像攝像部”。在受光單元34中,對印刷電路板9上的同一個區域(攝像區域)同時取得彩色攝像圖像及黑白攝像圖像。 The image in which the color filter is not used is a black-and-white gray-scale image indicating the brightness at each position of the imaging region on the printed circuit board 9. In the following description, an image in which a color filter is not used is referred to as a "black and white image", and a set of a plurality of light receiving elements that obtain a black and white image is referred to as a "black and white image capturing unit". Further, an image set of R, G, and B, that is, an image in which each pixel has a value (pixel value) of R, G, and B is referred to as a "color captured image", and a plurality of color captured images are obtained. The set of light receiving elements is referred to as a "color image capturing unit". In the light receiving unit 34, a color captured image and a black and white captured image are simultaneously acquired for the same region (imaging region) on the printed circuit board 9.

圖2是表示電腦5的構成的圖。電腦5為普通的電腦系統的構成,包含:中央處理器(central process unit,CPU)51,進行各種運算處理;唯讀記憶體(read-only memory,ROM)52,記憶基本程式;及隨機存取記憶體(random access memory,RAM)53,記憶各種資訊。電腦5還包含:固定磁碟(fixed disk)54,記憶資訊;顯示器55,顯示圖像等各種資訊;鍵盤56a及滑鼠56b,受理來自操作人員的輸入(以下總稱為“輸入部56”);讀取裝置57,從光盤、磁碟、磁光碟等電腦可讀取的記錄介質8讀取資訊;以及通信部58,與檢查裝置1的其他構成之間收發信號。 FIG. 2 is a view showing the configuration of the computer 5. The computer 5 is a common computer system, and includes a central processing unit (CPU) 51 for performing various arithmetic processing, a read-only memory (ROM) 52, a memory basic program, and a random memory. Take memory (random access memory, RAM) 53, and remember various information. The computer 5 further includes: a fixed disk 54 for storing information; a display 55 for displaying various information such as an image; and a keyboard 56a and a mouse 56b for accepting input from an operator (hereinafter collectively referred to as "input portion 56") The reading device 57 reads information from a computer-readable recording medium 8 such as an optical disk, a magnetic disk, or a magneto-optical disk; and the communication unit 58 transmits and receives signals to and from other configurations of the inspection device 1.

在電腦5中,事前經由讀取裝置57從記錄介質8讀出程 式80,並將所述程式80記憶至固定磁碟54。CPU51按照程式80,一邊利用RAM53或固定磁碟54一邊執行運算處理。 In the computer 5, the reading process is read from the recording medium 8 via the reading device 57 in advance. Equation 80, and the program 80 is memorized to the fixed disk 54. The CPU 51 executes arithmetic processing while using the RAM 53 or the fixed disk 54 in accordance with the program 80.

圖3是表示檢查裝置1中的功能構成的框圖,在圖3中,用標註符號5的虛線矩形包圍由電腦5的CPU51、ROM52、RAM53、固定磁碟54等實現的功能構成。電腦5具有運算部41、記憶部49、輸入部56及顯示器55。運算部41具有表格更新部42、缺陷檢測部43及顯示控制部44,缺陷檢測部43具有缺陷區域指定部431及缺陷種類分類部432。關於這些構成實現的功能的詳細情況於下文進行敍述。而且,這些功能可以由專用的電路構築,也可以局部利用專用的電路。 3 is a block diagram showing a functional configuration of the inspection apparatus 1. In FIG. 3, a functional configuration realized by the CPU 51, the ROM 52, the RAM 53, the fixed disk 54, and the like of the computer 5 is surrounded by a dotted rectangle of the reference numeral 5. The computer 5 has a calculation unit 41, a storage unit 49, an input unit 56, and a display 55. The calculation unit 41 includes a table update unit 42, a defect detection unit 43, and a display control unit 44. The defect detection unit 43 includes a defect area designation unit 431 and a defect type classification unit 432. Details of the functions realized by these configurations will be described below. Moreover, these functions can be constructed by dedicated circuits, or dedicated circuits can be partially utilized.

圖4是表示檢查裝置1檢查印刷電路板9的處理流程的圖。在圖4中,用虛線矩形表示的步驟S17在下述另一處理例中進行,圖3中的表格更新部42用於所述另一處理例。 FIG. 4 is a view showing a processing flow of the inspection apparatus 1 inspecting the printed circuit board 9. In Fig. 4, step S17 indicated by a broken line rectangle is performed in another processing example described below, and the table updating portion 42 in Fig. 3 is used for the other processing example.

在圖1的檢查裝置1中,檢查對象的印刷電路板9被載置於載置台22上,利用載置台驅動部23,將印刷電路板9上的規定的檢查對象區域配置於利用受光單元34的攝像區域。接著,利用圖3的受光單元34的彩色圖像攝像部341取得彩色攝像圖像,並且利用黑白圖像攝像部342取得黑白攝像圖像(步驟S11、步驟S12)。如上所述,同時取得彩色攝像圖像及黑白攝像圖像,並將所述彩色攝像圖像及黑白攝像圖像輸出至運算部41的缺陷檢測部43。 In the inspection apparatus 1 of FIG. 1, the printed circuit board 9 to be inspected is placed on the mounting table 22, and the predetermined inspection target area on the printed circuit board 9 is placed on the light receiving unit 34 by the mounting table driving unit 23. The camera area. Then, the color image capturing unit 341 of the light receiving unit 34 of FIG. 3 acquires the color image, and the black and white image capturing unit 342 acquires the black and white image (steps S11 and S12). As described above, the color captured image and the black-and-white captured image are simultaneously acquired, and the color captured image and the black-and-white captured image are output to the defect detecting unit 43 of the computing unit 41.

圖5是表示形成於印刷電路板9的圖案、以及彩色攝像 圖像及黑白攝像圖像的像素值的變化的圖。圖5的上段表示形成於印刷電路板9的圖案的一部分,圖5的中段表示上段中的線L上的彩色攝像圖像的一種顏色成分的像素值的變化,圖5的下段表示上段中的線L上的黑白攝像圖像的像素值的變化。在圖5的中段及下段中,縱軸表示像素值,橫軸表示線L上的位置(在下述的圖8、圖9、圖11、圖13、圖15及圖18中為相同)。此處,彩色攝像圖像及黑白攝像圖像分別是由0~255的256灰度表現。當然,彩色攝像圖像及黑白攝像圖像的灰度範圍並不限定於0~255。 FIG. 5 shows a pattern formed on the printed circuit board 9, and a color image. A graph of changes in pixel values of images and black and white captured images. The upper part of Fig. 5 shows a part of the pattern formed on the printed circuit board 9, and the middle part of Fig. 5 shows the change of the pixel value of one color component of the color imaged image on the line L in the upper stage, and the lower part of Fig. 5 shows the upper part of Fig. 5 The change in the pixel value of the black and white captured image on line L. In the middle and lower sections of FIG. 5, the vertical axis represents the pixel value, and the horizontal axis represents the position on the line L (the same in FIGS. 8, 9, 11, 13, 15, and 18 to be described later). Here, the color captured image and the black and white captured image are represented by 256 gradations of 0 to 255, respectively. Of course, the gray scale range of the color image and the black and white image is not limited to 0 to 255.

在本實施方式的印刷電路板9中,如圖5的上段所示,將由銅等形成的電路圖案即配線部911設置於主面上,且配線部911被阻焊劑覆蓋。也就是說,在印刷電路板9的主面上,於表面存在阻焊劑的區域91(在圖5的上段中標註間隔狹窄的平行斜線的區域,以下稱為“阻焊部91”)包含配線部911。在印刷電路板9的主面上,進一步設置利用鍍金或鍍銅等形成且未被阻焊劑覆蓋的區域92(以下稱為“鍍敷部92”)、及在阻焊劑的表面利用絲網印刷(silk screen printing)等而形成的文字等的區域(以下稱為“絲網部93”)。此種印刷電路板9也稱為鍍敷基板。關於印刷電路板9的表面上的光的反射,在鍍敷部92上漫反射及鏡面反射的比例為相同程度,在阻焊部91及絲網部93上漫反射的比例較高。在以下說明中,分別在黑白攝像圖像及彩色攝像圖像中,將表示印刷電路板9上的阻焊部91、鍍敷部92及絲網部93的區 域同樣稱為“阻焊部91”、“鍍敷部92”及“絲網部93”。 In the printed circuit board 9 of the present embodiment, as shown in the upper part of FIG. 5, the wiring portion 911 which is a circuit pattern formed of copper or the like is provided on the main surface, and the wiring portion 911 is covered with the solder resist. That is, on the main surface of the printed circuit board 9, a region 91 in which a solder resist is present on the surface (a region in which a parallel oblique line is narrowed in the upper portion of FIG. 5, hereinafter referred to as "resistance portion 91") includes wiring. Department 911. On the main surface of the printed circuit board 9, a region 92 formed by gold plating or copper plating or the like which is not covered with a solder resist (hereinafter referred to as "plating portion 92"), and screen printing on the surface of the solder resist are further provided. A region such as a character formed by (silk screen printing) or the like (hereinafter referred to as "screen portion 93"). Such a printed circuit board 9 is also referred to as a plated substrate. Regarding the reflection of light on the surface of the printed circuit board 9, the ratio of diffuse reflection and specular reflection on the plating portion 92 is the same, and the ratio of diffuse reflection on the solder resist portion 91 and the screen portion 93 is high. In the following description, the areas of the solder resist 91, the plating portion 92, and the screen portion 93 on the printed circuit board 9 are respectively shown in the black-and-white captured image and the color captured image. The field is also referred to as "soldering portion 91", "plating portion 92", and "wire portion 93".

在缺陷檢測部43的缺陷區域指定部431中,使用黑白攝像圖像及彩色攝像圖像檢測印刷電路板9上的檢查對象區域中的缺陷(步驟S13)。此處,如上所述,彩色圖像攝像部341中,在受光元件設有彩色濾光片,相對於此,黑白圖像攝像部342中,在受光元件未設有彩色濾光片。因此,黑白圖像攝像部342的各受光元件上的靈敏度(單位時間內射入規定強度的光時獲得的輸出值)高於彩色圖像攝像部341的各受光元件上的靈敏度。受光單元34中,彩色圖像攝像部341及黑白圖像攝像部342在相同照明條件下進行攝像,所以,如圖5的中段及下段所示,對於阻焊部91來說,黑白攝像圖像中的對比度(此處為最亮的部分與最暗的部分的像素的值的差)變得高於彩色攝像圖像中的對比度。因此,如圖5的上段中標註符號K的虛線圓所示,當印刷電路板9的主面上在阻焊劑之下(基板主體與阻焊劑之間)存在缺陷時等,與彩色攝像圖像相比,黑白攝像圖像中表示該缺陷的缺陷區域更容易被指定。 The defect area specifying unit 431 of the defect detecting unit 43 detects a defect in the inspection target region on the printed circuit board 9 using the black-and-white captured image and the color captured image (step S13). Here, as described above, in the color image capturing unit 341, the color receiving element is provided with the color filter. In contrast, in the monochrome image capturing unit 342, the color filter is not provided with the color filter. Therefore, the sensitivity (the output value obtained when light of a predetermined intensity is incident per unit time) on each light receiving element of the monochrome image capturing unit 342 is higher than the sensitivity of each light receiving element of the color image capturing unit 341. In the light receiving unit 34, the color image capturing unit 341 and the monochrome image capturing unit 342 perform imaging under the same illumination conditions. Therefore, as shown in the middle and lower sections of FIG. 5, the blackout image is displayed for the solder resist 91. The contrast in the middle (here, the difference between the value of the brightest portion and the pixel of the darkest portion) becomes higher than the contrast in the color captured image. Therefore, as shown by the dotted circle marked with the symbol K in the upper stage of FIG. 5, when the main surface of the printed circuit board 9 is under the solder resist (between the substrate main body and the solder resist), there is a defect, and the color image In contrast, a defective area indicating the defect in a black-and-white captured image is more easily specified.

圖6及圖7是表示彩色攝像圖像及黑白攝像圖像的一例的照片,圖6及圖7的上段表示彩色攝像圖像(其中,利用灰度(gray scale)表現),下段表示黑白攝像圖像。圖6及圖7中,在表示存在於阻焊劑之下的缺陷的缺陷區域標註符號K。另外,圖8及圖9是表示彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。圖8及圖9的上段表示將圖6及圖7的上段中的缺陷區域K 橫截的線L上的彩色攝像圖像的像素值的變化,圖8及圖9的下段表示將圖6及圖7的下段中的缺陷區域K橫截的線L上的黑白攝像圖像的像素值的變化。在圖8及圖9的上段中,對表示R、G、B的值的變化的線分別標註符號R、G、B(在下述的圖11、圖13及圖15的上段中為相同)。根據圖6至圖9判斷出,在黑白攝像圖像中,缺陷區域K與背景即阻焊部91的其他區域的像素值(或亮度)的差大於彩色攝像圖像中的該差。 6 and 7 are photographs showing an example of a color captured image and a black-and-white captured image, and the upper part of FIGS. 6 and 7 shows a color captured image (in which a gray scale image is expressed), and the lower part shows a black and white image. image. In FIGS. 6 and 7, a symbol K is indicated in a defect region indicating a defect existing under the solder resist. 8 and 9 are diagrams showing changes in pixel values of a color captured image and a black-and-white captured image. The upper part of FIGS. 8 and 9 shows the defect area K in the upper stage of FIGS. 6 and 7. The change in the pixel value of the color captured image on the line L of the cross section, the lower part of FIGS. 8 and 9 shows the black and white image on the line L which is the cross section of the defect area K in the lower stage of FIGS. 6 and 7. The change in pixel value. In the upper stages of FIGS. 8 and 9, the lines indicating the changes in the values of R, G, and B are denoted by the symbols R, G, and B, respectively (the same in the upper stages of FIGS. 11, 13, and 15 below). It is judged from FIGS. 6 to 9 that in the black-and-white captured image, the difference between the pixel value (or luminance) of the defective region K and the other region of the background, that is, the solder resist portion 91 is larger than the difference in the color captured image.

因此,在缺陷區域指定部431中,使用黑白攝像圖像對印刷電路板9上的阻焊部91檢測缺陷。例如,將表示不存在缺陷的印刷電路板9的黑白灰階圖像即參照圖像的阻焊部91、與由步驟S12取得的黑白攝像圖像的阻焊部91進行比較。由此,指定黑白攝像圖像中的阻焊部91的缺陷區域,檢測印刷電路板9上的阻焊部91的缺陷。一個缺陷區域是例如將表示缺陷的像素連續而成的像素群作為缺陷像素群,在規定距離內彼此靠近的缺陷像素群的集合。如下所述,在本實施方式中,因為由缺陷區域指定部431檢測出的缺陷被分類為真缺陷或假缺陷,所以可以將該缺陷理解為缺陷候補。 Therefore, in the defective area specifying portion 431, the defect is detected on the solder resist portion 91 on the printed circuit board 9 using the black-and-white captured image. For example, the black-and-grey gray-scale image of the printed circuit board 9 in which no defect is present, that is, the solder resist portion 91 of the reference image, and the solder resist portion 91 of the black-and-white captured image obtained in step S12 are compared. Thereby, the defective region of the solder resist portion 91 in the black-and-white captured image is specified, and the defect of the solder resist portion 91 on the printed circuit board 9 is detected. One defective area is, for example, a set of defective pixel groups that are close to each other within a predetermined distance, by using a pixel group in which pixels representing defects are consecutive. As described below, in the present embodiment, since the defect detected by the defective area specifying unit 431 is classified into a true defect or a false defect, the defect can be understood as a defect candidate.

另一方面,對於鍍敷部92來說,如圖5所示,在黑白攝像圖像中的像素的值為最大像素值(255)(即為飽和),相對於此,在彩色攝像圖像中的像素的值低於最大像素值。另外,對於絲網部93來說,在彩色攝像圖像及黑白攝像圖像雙方中,像素的值為最大像素值。因此,當存在絲網部93的材料附著於鍍敷部92的 表面的缺陷時等,可以在彩色攝像圖像中,指定表示該缺陷的缺陷區域。當然,也可以指定絲網部93的缺漏等缺陷區域。因而,在缺陷區域指定部431中,使用彩色攝像圖像對印刷電路板9上的鍍敷部92及絲網部93檢測缺陷。例如將表示不存在缺陷的印刷電路板9的彩色參照圖像的鍍敷部92及絲網部93、與由步驟S11取得的彩色攝像圖像的鍍敷部92及絲網部93進行比較。由此,指定彩色攝像圖像中的鍍敷部92及絲網部93的缺陷區域,檢測印刷電路板9上的鍍敷部92及絲網部93的缺陷。 On the other hand, as for the plating portion 92, as shown in FIG. 5, the value of the pixel in the black-and-white captured image is the maximum pixel value (255) (that is, saturated), whereas in the color captured image The value of the pixel in is lower than the maximum pixel value. Further, in the screen portion 93, in both of the color captured image and the black-and-white captured image, the value of the pixel is the maximum pixel value. Therefore, when the material having the wire mesh portion 93 is attached to the plating portion 92 In the case of a defect on the surface, a defective area indicating the defect can be specified in the color captured image. Of course, it is also possible to specify a defective area such as a missing portion of the screen portion 93. Therefore, in the defective area specifying unit 431, the defects are detected on the plating portion 92 and the screen portion 93 on the printed circuit board 9 using the color image pickup image. For example, the plating portion 92 and the screen portion 93 of the color reference image of the printed circuit board 9 in which the defect is not present are compared with the plating portion 92 and the screen portion 93 of the color image captured in step S11. Thereby, the defective portions of the plating portion 92 and the screen portion 93 in the color imaged image are designated, and the defects of the plating portion 92 and the screen portion 93 on the printed circuit board 9 are detected.

當由缺陷區域指定部431檢測缺陷時,缺陷種類分類部432對各缺陷的種類進行分類(步驟S14)。此處,阻焊部91上被檢測出的缺陷的種類是基於彩色攝像圖像表示的該缺陷的顏色(缺陷區域的顏色)而被分類。在以下說明中,缺陷的種類為假缺陷或真缺陷,但是缺陷的種類可以被細分為真缺陷的多個種類等。 When the defect is detected by the defect area specifying unit 431, the defect type classifying unit 432 classifies the type of each defect (step S14). Here, the type of the defect detected on the solder resist portion 91 is classified based on the color of the defect (the color of the defect region) indicated by the color imaged image. In the following description, the type of the defect is a false defect or a true defect, but the kind of the defect may be subdivided into a plurality of types of true defects and the like.

圖10是表示彩色攝像圖像的圖,圖11是表示將圖10的彩色攝像圖像中的阻焊部91的缺陷區域K橫截的線L上的像素值的變化的圖。圖10的缺陷區域K表示印刷電路板9的阻焊劑上的微小的汙物即缺陷(可以理解為對印刷電路板9的功能不產生影響的外觀不良),如圖11所示,在R、G、B所有顏色成分中,缺陷區域K的像素的值變得高於背景(變亮)。 FIG. 10 is a view showing a color captured image, and FIG. 11 is a view showing a change in pixel value on a line L in which the defect region K of the solder resist portion 91 in the color captured image of FIG. 10 is cross-sectional. The defect area K of FIG. 10 indicates a minute dirt on the solder resist of the printed circuit board 9, that is, a defect (it can be understood as a poor appearance which does not affect the function of the printed circuit board 9), as shown in FIG. Among all the color components of G and B, the value of the pixel of the defective area K becomes higher than the background (lightening).

圖12是表示彩色攝像圖像的圖,圖13是表示將圖12的彩色攝像圖像中的阻焊部91的缺陷區域K橫截的線L上的像素值 的變化的圖。圖12的缺陷區域K表示存在於阻焊劑之下的銅的氧化部分即缺陷(可以理解為功能不良),如圖13所示,缺陷區域K中的像素的G的值(G的像素值)變得低於背景。 12 is a view showing a color captured image, and FIG. 13 is a view showing a pixel value on a line L in which the defect region K of the solder resist portion 91 in the color captured image of FIG. 12 is cross-sectional. The picture of the change. The defect region K of FIG. 12 indicates an oxidized portion of copper existing under the solder resist, that is, a defect (which can be understood as a malfunction), as shown in FIG. 13, the value of G of the pixel in the defective region K (the pixel value of G) Become below the background.

因此,在缺陷種類分類部432中,將彩色攝像圖像中的阻焊部91的各缺陷區域K的G的像素值、與彩色參照圖像中的相對應的區域的G的像素值進行比較。接著,當彩色攝像圖像的G的像素值高於參照圖像的G的像素值時,將缺陷區域K(表示的印刷電路板9上的缺陷)分類為假缺陷,當彩色攝像圖像的G的像素值小於等於參照圖像的G的像素值時,將缺陷區域K分類為真缺陷。在缺陷種類分類部432中,印刷電路板9上的各缺陷(包含鍍敷部92及絲網部93中的缺陷)也可以基於所述缺陷的尺寸等被分類為假缺陷或真缺陷。 Therefore, in the defect type classification unit 432, the pixel value of G of each defect region K of the solder resist 91 in the color captured image is compared with the pixel value of G of the corresponding region in the color reference image. . Next, when the pixel value of G of the color imaged image is higher than the pixel value of G of the reference image, the defect area K (defect on the printed circuit board 9 indicated) is classified as a false defect, when the color image is captured When the pixel value of G is less than or equal to the pixel value of G of the reference image, the defect area K is classified into a true defect. In the defect type classification unit 432, each defect (including the defects in the plating portion 92 and the screen portion 93) on the printed circuit board 9 may be classified as a false defect or a true defect based on the size of the defect or the like.

當以上述方式將缺陷分類為假缺陷或真缺陷時,利用顯示控制部44,將由缺陷區域指定部431檢測出的缺陷中、被分類為真缺陷的缺陷的圖像顯示於顯示器55(步驟S15)。例如將彩色攝像圖像中包含該缺陷的矩形區域的部分(以下稱為“彩色缺陷圖像”)顯示於顯示器55。於顯示器55中,也可以將黑白攝像圖像中包含該缺陷的區域與彩色缺陷圖像一起顯示。 When the defect is classified into a false defect or a true defect in the above-described manner, the display control unit 44 displays an image of the defect classified as a true defect among the defects detected by the defective area specifying unit 431 on the display 55 (step S15). ). For example, a portion of the color captured image including the rectangular region of the defect (hereinafter referred to as "color defect image") is displayed on the display 55. In the display 55, an area including the defect in the black-and-white captured image may be displayed together with the color defect image.

操作人員藉由參照各彩色缺陷圖像,決定該彩色缺陷圖像表示的缺陷的最終種類(此處為假缺陷或真缺陷的種類),並經由輸入部56將該最終種類輸入至運算部41(步驟S16)。由此,結束印刷電路板9上的檢查對象區域的檢查。實際上,對印刷電 路板9上的多個檢查對象區域,是局部地同時進行所述步驟S11~S16的處理。 The operator determines the final type of defect (here, the type of the false defect or the true defect) indicated by the color defect image by referring to each color defect image, and inputs the final type to the arithmetic unit 41 via the input unit 56. (Step S16). Thereby, the inspection of the inspection target area on the printed circuit board 9 is completed. In fact, for printing electricity The plurality of inspection target areas on the road board 9 are locally subjected to the processing of the steps S11 to S16 at the same time.

如上所述,在檢查裝置1中,設有取得彩色攝像圖像的彩色圖像攝像部341及取得黑白攝像圖像的黑白圖像攝像部342。接著,在缺陷檢測部43中,使用彩色攝像圖像對印刷電路板9上的鍍敷部92及絲網部93檢測缺陷,並使用黑白攝像圖像對印刷電路板9上的阻焊部91檢測缺陷。由此,可分別於印刷電路板9上的阻焊部91、鍍敷部92及絲網部93中,精度良好地檢測缺陷。 As described above, the inspection apparatus 1 is provided with a color image capturing unit 341 that acquires a color captured image and a monochrome image capturing unit 342 that acquires a black-and-white captured image. Next, the defect detecting unit 43 detects a defect on the plating portion 92 and the screen portion 93 on the printed circuit board 9 using the color image, and uses the black-and-white image to the solder resist portion 91 on the printed circuit board 9. Detect defects. Thereby, defects can be accurately detected in the solder resist portion 91, the plating portion 92, and the screen portion 93 on the printed circuit board 9, respectively.

但是,也要考慮使用由彩色攝像圖像產生的黑白圖像(以下稱為“黑白產生圖像”)檢測阻焊部91中的缺陷的情況。圖14是表示彩色攝像圖像、黑白產生圖像及黑白攝像圖像的一例的照片。圖14的上段表示彩色攝像圖像(其中,利用灰度表現),中段表示黑白產生圖像,下段表示黑白攝像圖像。黑白產生圖像中的各像素的值是由彩色攝像圖像中的相對應的像素的R、G、B的值引導。圖15是表示彩色攝像圖像、黑白產生圖像及黑白攝像圖像的像素值的變化的圖。圖15的上段、中段及下段分別表示將圖14的上段、中段及下段中的缺陷區域K橫截的線L上的像素值的變化。由圖14及圖15可知,即使從彩色攝像圖像產生黑白產生圖像,也難以像黑白攝像圖像那樣增大缺陷區域K與背景的亮度的差。因此,藉由在阻焊部91中使用黑白攝像圖像檢測缺陷,與使用黑白產生圖像的情況相比,可以精度良好且容易地檢測缺陷。 However, it is also considered to detect a defect in the solder resist 91 using a black and white image (hereinafter referred to as "black and white image") generated from a color image. FIG. 14 is a photograph showing an example of a color captured image, a black-and-white generated image, and a black-and-white captured image. The upper part of Fig. 14 shows a color captured image (in which gradation is expressed), the middle portion indicates a black-and-white image, and the lower portion indicates a black-and-white image. The value of each pixel in the black-and-white generated image is guided by the values of R, G, and B of the corresponding pixels in the color captured image. 15 is a view showing changes in pixel values of a color captured image, a black-and-white generated image, and a black-and-white captured image. The upper, middle, and lower sections of Fig. 15 respectively show changes in pixel values on the line L in which the defect regions K in the upper, middle, and lower stages of Fig. 14 are cross-sectional. As can be seen from FIG. 14 and FIG. 15, even if a black-and-white generated image is generated from the color captured image, it is difficult to increase the difference in luminance between the defective region K and the background as in the black-and-white captured image. Therefore, by detecting a defect using the black-and-white captured image in the solder resist portion 91, the defect can be detected accurately and easily as compared with the case where the image is generated using black and white.

在缺陷檢測部43中,阻焊部91上檢測出的缺陷的種類是基於彩色攝像圖像表示的該缺陷的顏色而被分類。由此,可以精度良好地對缺陷的種類進行分類。另外,在步驟S15的處理中,藉由在顯示器55只顯示被分類為真缺陷的缺陷的圖像,可以減少虛假,可以提高作業人員的確認作業效率。而且,當由缺陷區域指定部431檢測出的缺陷的個數少時等,在步驟S15的處理中,也可以將被分類為假缺陷的缺陷的彩色缺陷圖像顯示於顯示器55。此時,較佳為將彩色缺陷圖像與分類結果一起顯示,在步驟S16的處理中,由操作人員決定各缺陷的最終種類。 In the defect detecting unit 43, the type of the defect detected on the solder resist 91 is classified based on the color of the defect indicated by the color captured image. Thereby, the types of defects can be classified with high precision. Further, in the process of step S15, by displaying only the image of the defect classified as the true defect on the display 55, the falseness can be reduced, and the work efficiency of the confirmation work by the worker can be improved. Further, when the number of defects detected by the defective area specifying unit 431 is small, etc., in the process of step S15, a color defect image classified as a defective defect may be displayed on the display 55. At this time, it is preferable to display the color defect image together with the classification result, and in the process of step S16, the operator determines the final type of each defect.

在檢查裝置1中,設有一個受光單元34作為彩色圖像攝像部341及黑白圖像攝像部342,所述一個受光單元34排列有彩色圖像攝像部341的多個受光元件及黑白圖像攝像部342的多個受光元件,且利用受光單元34,對印刷電路板9上的一個區域同時取得彩色攝像圖像及黑白攝像圖像。由此,與將彩色圖像攝像部341及黑白圖像攝像部342分開設置的情況相比,可以在短時間內取得彩色攝像圖像及黑白攝像圖像。 In the inspection apparatus 1, a light receiving unit 34 is provided as a color image capturing unit 341 and a monochrome image capturing unit 342, and the plurality of light receiving units 34 are arranged with a plurality of light receiving elements of the color image capturing unit 341 and black and white images. The plurality of light receiving elements of the imaging unit 342 and the light receiving unit 34 simultaneously acquire a color captured image and a black and white captured image on one area on the printed circuit board 9. Thereby, compared with the case where the color image imaging unit 341 and the monochrome image capturing unit 342 are separately provided, the color captured image and the black-and-white captured image can be obtained in a short time.

在缺陷種類分類部432中,也可以用與所述方法不同的方法(或對所述方法進行追加)將阻焊部91中的缺陷分類為假缺陷或真缺陷。此時,預先準備錯誤資訊表491(參照圖3),該錯誤資訊表491在由R、G、B規定的色空間內,將假缺陷的顏色的範圍表示為假缺陷顏色範圍,並利用記憶部49進行記憶。在缺陷種類分類部432中,取得彩色攝像圖像中各缺陷區域的各位置中 的像素的R、G、B的值。接著,當色空間內、由該R、G、B的值指定的位置包含於假缺陷顏色範圍時,將缺陷區域的該位置(表示的印刷電路板9上的缺陷部分)分類為假缺陷,當色空間內被指定的位置不包含於假缺陷顏色範圍時,將缺陷區域的該位置分類為真缺陷(圖4:步驟S14)。這樣一來,將阻焊部91中被檢測出的缺陷中、在色空間內的存在範圍與錯誤資訊表491表示的假缺陷顏色範圍重疊的部分分類為假缺陷。 In the defect type classification unit 432, the defect in the solder resist 91 may be classified into a dummy defect or a true defect by a method different from the above method (or addition of the method). At this time, an error information table 491 (see FIG. 3) is prepared in advance, and the error information table 491 indicates the range of the color of the false defect as the false defect color range in the color space defined by R, G, and B, and uses the memory. The part 49 performs the memory. In the defect type classification unit 432, each position of each defective area in the color captured image is obtained. The values of R, G, and B of the pixel. Next, when the position specified by the values of R, G, and B in the color space is included in the false defect color range, the position of the defective area (the defective portion on the printed circuit board 9 indicated) is classified as a false defect. When the designated position in the color space is not included in the false defect color range, the position of the defective area is classified as a true defect (FIG. 4: step S14). In this way, among the defects detected in the solder resist 91, the portion overlapping in the color space and the false defect color range indicated by the error information table 491 are classified as false defects.

接著,將表示包含被分類為真缺陷的部分的缺陷的彩色缺陷圖像顯示於顯示器55(步驟S15)。此外,由操作人員決定各彩色缺陷圖像表示的缺陷的最終種類(步驟S16)。而且,當一個彩色缺陷圖像表示的缺陷的最終種類為假缺陷時,藉由操作人員進行規定的輸入,利用表格更新部42,指定該彩色缺陷圖像中的缺陷區域的所有位置的顏色,並將這些顏色在色空間內的存在範圍作為假缺陷顏色範圍追加(登記)至錯誤資訊表491。即,更新錯誤資訊表491(步驟S17)。追加假缺陷顏色範圍可以藉由以下操作容易地進行:例如在顯示器55上的該彩色缺陷圖像上,多次移動滑鼠指針,藉由右擊滑鼠顯示菜單,選擇“登記假缺陷顏色範圍”。更新後的錯誤資訊表491被利用於下一步驟S14的處理中的缺陷分類。 Next, a color defect image indicating a defect including a portion classified as a true defect is displayed on the display 55 (step S15). Further, the operator determines the final type of the defect indicated by each color defect image (step S16). Further, when the final type of the defect indicated by one color defect image is a false defect, the operator updates the color of all the positions of the defective area in the color defect image by the table updating unit 42 by performing predetermined input. The existence range of these colors in the color space is added (registered) as a false defect color range to the error information table 491. That is, the error information table 491 is updated (step S17). The additional false defect color range can be easily performed by, for example, moving the mouse pointer a plurality of times on the color defect image on the display 55, and selecting "register the false defect color range by right clicking on the mouse to display the menu. ". The updated error information table 491 is utilized for the defect classification in the processing of the next step S14.

如上所述,在檢查裝置1中,預先準備錯誤資訊表491,該錯誤資訊表491在由多種顏色成分所規定的色空間內將假缺陷的顏色的範圍表示為假缺陷顏色範圍,並將阻焊部91上檢測出的 缺陷中、在該色空間內的存在範圍與假缺陷顏色範圍重疊的部分分類為假缺陷。由此,能實現容易地區分假缺陷。 As described above, in the inspection apparatus 1, an error information table 491 is prepared in advance, which indicates a range of color of a false defect as a false defect color range in a color space defined by a plurality of color components, and will block Detected on the welded portion 91 Among the defects, a portion in which the range of existence in the color space overlaps with the color range of the false defect is classified as a false defect. Thereby, it is possible to easily distinguish false defects.

此外,在檢查印刷電路板9時,存在要求嚴格檢查鍍敷部92中的缺陷的情況。在此種情況下,檢查裝置1將來自圖1的落射照明部31的照明光的強度設定為比來自斜光照明部32的照明光的強度低的值。此外,黑白圖像攝像部342中的增益也降低。因此,在由黑白圖像攝像部342取得的黑白攝像圖像中,鍍敷部92中的像素的值遠低於最大像素值(255)。 Further, when the printed circuit board 9 is inspected, there is a case where it is required to strictly check for defects in the plating portion 92. In this case, the inspection device 1 sets the intensity of the illumination light from the epi-illumination unit 31 of FIG. 1 to a value lower than the intensity of the illumination light from the oblique illumination unit 32. Further, the gain in the monochrome image capturing unit 342 is also lowered. Therefore, in the black-and-white captured image acquired by the monochrome image capturing unit 342, the value of the pixel in the plating portion 92 is much lower than the maximum pixel value (255).

圖16是表示彩色圖像攝像部341的光譜靈敏度特性(spectral sensitivity characteristic)的圖,圖17是表示黑白圖像攝像部342的光譜靈敏度特性的圖。圖16及圖17的縱軸表示相對靈敏度,橫軸表示入射光的波長。相對靈敏度是入射光的各波長的靈敏度除以最大靈敏度獲得的值。在圖16中,對表示R的受光元件、G的受光元件、B的受光元件的光譜靈敏度特性的線分別標註符號R、G、B。在黑白圖像攝像部342中,如圖17所示,在可見光的波長範圍400~700nm的整體中,相對靈敏度比較高。另一方面,如圖16所示,彩色圖像攝像部341中的R的受光元件、G的受光元件、B的受光元件的相對靈敏度的波峰(peak)分別處於波長650nm附近、波長550nm附近、波長450nm附近,在500nm附近及600nm附近的波長中,彩色圖像攝像部341的相對靈敏度低於黑白圖像攝像部342的相對靈敏度。 FIG. 16 is a view showing spectral sensitivity characteristics of the color image capturing unit 341, and FIG. 17 is a view showing spectral sensitivity characteristics of the monochrome image capturing unit 342. 16 and 17, the vertical axis represents the relative sensitivity, and the horizontal axis represents the wavelength of the incident light. The relative sensitivity is the value obtained by dividing the sensitivity of each wavelength of incident light by the maximum sensitivity. In FIG. 16, the lines of the spectral sensitivity characteristics of the light receiving element of R, the light receiving element of G, and the light receiving element of B are denoted by symbols R, G, and B, respectively. In the monochrome image capturing unit 342, as shown in FIG. 17, the relative sensitivity is relatively high in the entire wavelength range of visible light of 400 to 700 nm. On the other hand, as shown in FIG. 16 , the peaks of the relative sensitivities of the light receiving elements of R, the light receiving elements of G, and the light receiving elements of B in the color image capturing unit 341 are in the vicinity of a wavelength of 650 nm and a wavelength of 550 nm, respectively. The relative sensitivity of the color image capturing unit 341 is lower than the relative sensitivity of the monochrome image capturing unit 342 at a wavelength of around 450 nm and at a wavelength of around 500 nm and around 600 nm.

在缺陷檢測部43中,使用黑白攝像圖像對鍍敷部92檢 測缺陷。由此,在鍍敷部92中,也可以精度良好地檢測彩色攝像圖像中難以檢測的波長的顏色的缺陷。使用彩色攝像圖像對阻焊部91及絲網部93檢測缺陷。 In the defect detecting unit 43, the plating portion 92 is inspected using a black-and-white captured image. Measure defects. Thereby, in the plating unit 92, it is possible to accurately detect a defect of a color of a wavelength that is difficult to detect in the color captured image. The solder mask 91 and the screen portion 93 are detected for defects using a color image.

接著,對代替鍍敷部92而形成有焊料部的印刷電路板9的檢查進行敍述。圖18是表示形成於印刷電路板9的圖案、以及彩色攝像圖像及黑白攝像圖像的像素值的變化的圖。圖18的上段表示形成於印刷電路板9的圖案的一部分,圖18的中段表示上段中的線L上的彩色攝像圖像的一種顏色成分的像素值的變化,圖18的下段表示上段中的線L上的黑白攝像圖像的像素值的變化。 Next, an inspection of the printed circuit board 9 in which the solder portion is formed instead of the plating portion 92 will be described. FIG. 18 is a view showing changes in pixel values of a pattern formed on the printed circuit board 9, and a color captured image and a black-and-white captured image. The upper part of Fig. 18 shows a part of the pattern formed on the printed circuit board 9, and the middle part of Fig. 18 shows the change of the pixel value of one color component of the color imaged image on the line L in the upper stage, and the lower part of Fig. 18 shows the upper part of Fig. 18 The change in the pixel value of the black and white captured image on line L.

在圖18的上段表示的印刷電路板9上,形成阻焊部91、焊料部94及絲網部93。焊料部94是印刷電路板9的主面上由焊料形成且未被阻焊劑覆蓋的區域。阻焊部91及絲網部93與圖5的上段相同。此種印刷電路板9也被稱為焊料基板。關於印刷電路板9的表面上的光反射,在阻焊部91及絲網部93上漫反射的比例高,在焊料部94上鏡面反射的比例高。 On the printed circuit board 9 shown in the upper stage of Fig. 18, a solder resist portion 91, a solder portion 94, and a screen portion 93 are formed. The solder portion 94 is a region where the main surface of the printed circuit board 9 is formed of solder and is not covered by the solder resist. The solder resist portion 91 and the screen portion 93 are the same as the upper portion of Fig. 5 . Such a printed circuit board 9 is also referred to as a solder substrate. Regarding the light reflection on the surface of the printed circuit board 9, the ratio of diffuse reflection on the solder resist portion 91 and the screen portion 93 is high, and the ratio of specular reflection on the solder portion 94 is high.

在檢查具有焊料部94的印刷電路板9時,將來自落射照明部31的照明光的強度設定為比來自斜光照明部32的照明光的強度低的值。另外,黑白圖像攝像部342中的增益也下降。藉由在此種條件下對印刷電路板9進行攝像,在彩色圖像攝像部341中,取得表示圖18的中段的像素值的變化的彩色攝像圖像,在黑白圖像攝像部342中,取得表示圖18的下段的像素值的變化的黑白攝像圖像。 When the printed circuit board 9 having the solder portion 94 is inspected, the intensity of the illumination light from the epi-illumination portion 31 is set to a value lower than the intensity of the illumination light from the oblique illumination portion 32. Further, the gain in the monochrome image capturing unit 342 also decreases. By imaging the printed circuit board 9 under such conditions, the color image capturing unit 341 acquires a color captured image indicating a change in the pixel value in the middle of FIG. 18, and in the monochrome image capturing unit 342, A black-and-white captured image indicating a change in the pixel value of the lower stage of FIG. 18 is acquired.

在圖18的中段表示的彩色攝像圖像中,焊料部94及絲網部93雙方的像素的值為最大像素值,相對於此,在圖18的下段表示的黑白攝像圖像中,焊料部94的像素的值低於最大像素值,與絲網部93的像素的值之間產生差。因此,在缺陷檢測部43中,藉由使用黑白攝像圖像對焊料部94及絲網部93檢測缺陷,可以精度良好地檢測例如絲網部93的材料附著於焊料部94的表面的缺陷等。而且,使用彩色攝像圖像對阻焊部91檢測缺陷。 In the color captured image shown in the middle of FIG. 18, the values of the pixels of both the solder portion 94 and the screen portion 93 are the maximum pixel values, and in the black-and-white captured image shown in the lower portion of FIG. 18, the solder portion is formed. A value of the pixel of 94 is lower than the maximum pixel value, and a difference is generated between the value of the pixel of the screen portion 93. Therefore, in the defect detecting unit 43, by detecting defects on the solder portion 94 and the screen portion 93 by using the black-and-white captured image, it is possible to accurately detect, for example, a defect in which the material of the screen portion 93 adheres to the surface of the solder portion 94. . Further, the defect is detected by the solder resist portion 91 using the color image pickup image.

所述檢查裝置1可以進行各種變形。 The inspection device 1 can be variously modified.

在印刷電路板9上,可以適當變更使用彩色攝像圖像檢測缺陷的區域、及使用黑白攝像圖像檢測缺陷的區域。在檢查裝置1中,藉由使用彩色攝像圖像對印刷電路板9上的第一區域檢測缺陷,並使用黑白攝像圖像對與第一區域不同的第二區域檢測缺陷,可以精度良好地檢測印刷電路板9上的各區域中的缺陷。 On the printed circuit board 9, an area in which a defect is detected using a color imaged image and a region in which a defect is detected using a black and white image can be appropriately changed. In the inspection apparatus 1, the defect is detected on the first region on the printed circuit board 9 by using the color captured image, and the defect is detected in the second region different from the first region using the black-and-white captured image, and can be accurately detected. Defects in various areas on the printed circuit board 9.

根據檢查裝置1的設計,可以將彩色圖像攝像部341與黑白圖像攝像部342分開設置,這種情況下,可以在不同的時點取得彩色攝像圖像及黑白攝像圖像。另外,在彩色圖像攝像部中,可以使用設有青色(cyan,C)、洋紅色(magenta,M)、黃色(yellow,Y)的顏色成分的濾光片的受光元件。 According to the design of the inspection apparatus 1, the color image capturing unit 341 and the monochrome image capturing unit 342 can be provided separately. In this case, the color captured image and the black-and-white captured image can be obtained at different timings. Further, in the color image capturing unit, a light receiving element having a filter of cyan (C), magenta (M), and yellow (yellow) color components can be used.

根據印刷電路板9中檢測出缺陷的區域的種類,可以將例如落射照明部31熄燈,只利用來自斜光照明部的照明光取得彩色攝像圖像及黑白攝像圖像。 Depending on the type of the region in which the defect is detected in the printed circuit board 9, for example, the epi-illumination unit 31 can be turned off, and the color captured image and the black-and-white captured image can be obtained using only the illumination light from the oblique illumination unit.

所述實施方式及各變形例中的構成只要相互不矛盾,便 可適當地組合。 The configurations in the above-described embodiments and the modifications are not contradictory to each other. It can be combined as appropriate.

雖然已詳細地描述並說明了發明,但所述說明為例示,並不限定本發明。因此,只要不脫離本發明的範圍,就可以存在多種變形或實施方式。 Although the invention has been described and illustrated in detail, the description is illustrative and not restrictive. Therefore, various modifications or embodiments may be made without departing from the scope of the invention.

91‧‧‧阻焊部 91‧‧‧Resistance welding department

92‧‧‧鍍敷部 92‧‧‧Plating Department

93‧‧‧絲網部 93‧‧‧Wire section

911‧‧‧配線部 911‧‧‧Wiring Department

K‧‧‧缺陷區域 K‧‧‧ Defective area

L‧‧‧線 L‧‧‧ line

Claims (16)

一種檢查裝置,對印刷電路板的外觀進行檢查,其特徵在於,包括:彩色圖像攝像部,取得檢查對象的印刷電路板的多種顏色成分的圖像作為彩色攝像圖像;黑白圖像攝像部,取得所述檢查對象的印刷電路板的黑白灰階圖像作為黑白攝像圖像;及缺陷檢測部,使用所述彩色攝像圖像對所述檢查對象的印刷電路板上的第一區域檢測缺陷,並使用所述黑白攝像圖像對所述檢查對象的印刷電路板上與所述第一區域不同的第二區域檢測缺陷。 An inspection apparatus for inspecting an appearance of a printed circuit board, comprising: a color image capturing unit that acquires an image of a plurality of color components of a printed circuit board to be inspected as a color captured image; and a monochrome image capturing unit Obtaining a black-and-white grayscale image of the printed circuit board to be inspected as a black-and-white captured image; and a defect detecting unit that detects a defect on the first region of the printed circuit board of the inspection target using the color captured image Defects are detected on the printed circuit board of the inspection object on a second area different from the first area using the black and white image. 如申請專利範圍1所述的檢查裝置,其中設有一個受光單元作為所述彩色圖像攝像部及所述黑白圖像攝像部,所述受光單元排列有所述彩色圖像攝像部的多個受光元件及所述黑白圖像攝像部的多個受光元件,且利用所述受光單元,對所述檢查對象的印刷電路板上的一個區域同時取得所述彩色攝像圖像及所述黑白攝像圖像。 The inspection apparatus according to claim 1, wherein a light receiving unit is provided as the color image capturing unit and the black and white image capturing unit, and the light receiving unit is arranged with a plurality of the color image capturing units. a light receiving element and a plurality of light receiving elements of the black and white image capturing unit, and the color receiving unit and the black and white image are simultaneously acquired on one area of the printed circuit board to be inspected by the light receiving unit image. 如申請專利範圍2所述的檢查裝置,還包括:光學系統,具有物鏡,所述檢查對象的印刷電路板與所述物鏡之間的光軸垂直於所述檢查對象的印刷電路板,且所述光學系統朝所述受光單元引導沿著所述光軸從所述檢查對象的印刷電路 板射入所述物鏡的光;及斜光照明部,從與所述光軸傾斜的方向對所述檢查對象的印刷電路板進行照明。 The inspection apparatus according to claim 2, further comprising: an optical system having an objective lens, an optical axis between the printed circuit board of the inspection object and the objective lens being perpendicular to the printed circuit board of the inspection object, and The optical system directs the printed circuit from the inspection object along the optical axis toward the light receiving unit The plate enters the light of the objective lens; and the oblique illumination unit illuminates the printed circuit board of the inspection object from a direction oblique to the optical axis. 如申請專利範圍1至3中任一項所述的檢查裝置,其中所述第二區域包含阻焊部。 The inspection apparatus according to any one of claims 1 to 3, wherein the second region comprises a solder resist. 如申請專利範圍1至3中任一項所述的檢查裝置,其中所述第二區域包含焊料部。 The inspection apparatus according to any one of claims 1 to 3, wherein the second region includes a solder portion. 如申請專利範圍1至3中任一項所述的檢查裝置,其中所述第二區域包含鍍敷部。 The inspection apparatus according to any one of claims 1 to 3, wherein the second region comprises a plating portion. 一種檢查裝置,對印刷電路板的外觀進行檢查,其特徵在於,包括:彩色圖像攝像部,取得所述印刷電路板的多種顏色成分的圖像作為彩色攝像圖像;黑白圖像攝像部,取得所述印刷電路板的黑白灰階圖像作為黑白攝像圖像;及缺陷檢測部,使用所述彩色攝像圖像對所述印刷電路板上的第一區域檢測缺陷,並使用所述黑白攝像圖像對所述印刷電路板上的第二區域檢測缺陷,其中所述第二區域包含阻焊部,其中所述缺陷檢測部基於所述彩色攝像圖像表現的所述缺陷的顏色,對在所述第二區域所含的所述阻焊部檢測出的缺陷的種類進行分類。 An inspection apparatus for inspecting an appearance of a printed circuit board, comprising: a color image capturing unit that acquires an image of a plurality of color components of the printed circuit board as a color captured image; and a monochrome image capturing unit; Obtaining a black-and-white gray-scale image of the printed circuit board as a black-and-white captured image; and a defect detecting unit that detects a defect on the first area on the printed circuit board using the color captured image, and uses the black-and-white image An image detects a defect on a second area on the printed circuit board, wherein the second area includes a solder mask, wherein the defect detecting portion is based on a color of the defect represented by the color imaged image The types of defects detected by the solder resist portion included in the second region are classified. 如申請專利範圍7所述的檢查裝置,其中還包括記憶部,記憶錯誤資訊表,所述錯誤資訊表在由所述多種顏色成分所規定的色空間中,將假缺陷的顏色的範圍表示為假缺陷顏色範圍,且所述缺陷檢測部將在所述阻焊部檢測出的缺陷中,所述色空間的存在範圍與所述假缺陷顏色範圍重疊的部分分類為假缺陷。 The inspection apparatus according to claim 7, further comprising a memory unit, a memory error information table, wherein the error information table indicates a range of color of the false defect in a color space defined by the plurality of color components A false defect color range, and the defect detecting portion classifies, in the defect detected by the solder resist portion, a portion in which the color space exists in a range overlapping with the false defect color range as a false defect. 一種檢查方法,對印刷電路板的外觀進行檢查,其特徵在於,包括:a)步驟,利用彩色圖像攝像部,取得所述印刷電路板的多種顏色成分的圖像作為彩色攝像圖像;b)步驟,利用黑白圖像攝像部,取得所述印刷電路板的黑白灰階圖像作為黑白攝像圖像;及c)步驟,使用所述彩色攝像圖像對所述印刷電路板上的第一區域檢測缺陷,並使用所述黑白攝像圖像對所述印刷電路板上的第二區域檢測缺陷。 An inspection method for inspecting an appearance of a printed circuit board, comprising: a) a step of obtaining an image of a plurality of color components of the printed circuit board as a color image by using a color image capturing unit; a step of obtaining a black-and-white gray-scale image of the printed circuit board as a black-and-white captured image by using a black-and-white image capturing unit; and c) using the color captured image for the first on the printed circuit board The area detects a defect and detects a defect on the second area on the printed circuit board using the black and white image. 如申請專利範圍9所述的檢查方法,其中設有一個受光單元作為所述彩色圖像攝像部及所述黑白圖像攝像部,所述受光單元排列有所述彩色圖像攝像部的多個受光元件及所述黑白圖像攝像部的多個受光元件,且利用所述受光單元,對所述印刷電路板上的一個區域同時取得所述彩色攝像圖像及所述黑白攝像圖像。 The inspection method according to claim 9, wherein a light receiving unit is provided as the color image capturing unit and the black and white image capturing unit, and the light receiving unit is arranged with a plurality of the color image capturing units. The light-receiving element and the plurality of light-receiving elements of the black-and-white image capturing unit simultaneously acquire the color captured image and the black-and-white captured image on one area of the printed circuit board by the light receiving unit. 如申請專利範圍10所述的檢查方法,其中 利用光學系統,朝所述受光單元引導沿著所述光軸從所述印刷電路板射入所述物鏡的光,所述光學系統具有物鏡,且所述印刷電路板與所述物鏡之間的光軸垂直於所述印刷電路板,且在所述a)步驟及b)步驟中,利用斜光照明部,從與所述光軸傾斜的方向對所述印刷電路板進行照明。 The inspection method described in claim 10, wherein Directing, by the optical system, light entering the objective lens from the printed circuit board along the optical axis toward the light receiving unit, the optical system having an objective lens, and between the printed circuit board and the objective lens The optical axis is perpendicular to the printed circuit board, and in the steps a) and b), the printed circuit board is illuminated from a direction oblique to the optical axis by a slanted illumination. 如申請專利範圍9至11中任一項所述的檢查方法,其中所述第二區域包含阻焊部。 The inspection method according to any one of claims 9 to 11, wherein the second region comprises a solder resist. 如申請專利範圍12所述的檢查方法,其中還包括d)步驟,基於所述彩色攝像圖像表現的所述缺陷的顏色,對所述c)步驟中在所述第二區域所含的所述阻焊部檢測出的缺陷的種類進行分類。 The inspection method of claim 12, further comprising the step d), based on the color of the defect represented by the color image, for the portion included in the second region in the step c) The types of defects detected by the solder mask are classified. 如申請專利範圍13所述的檢查方法,其中預先準備錯誤資訊表,所述錯誤資訊表在由所述多種顏色成分所規定的色空間中,將假缺陷的顏色的範圍表示為假缺陷顏色範圍,且在所述d)步驟中,將在所述阻焊部所檢測出的缺陷中,所述色空間的存在範圍與所述假缺陷顏色範圍重疊的部分分類為假缺陷。 The inspection method according to claim 13, wherein an error information table is prepared in advance, wherein the error information table indicates a range of color of the false defect as a false defect color range in a color space defined by the plurality of color components And in the step d), among the defects detected by the solder resist portion, a portion where the existence range of the color space overlaps with the false defect color range is classified as a false defect. 如申請專利範圍9至11中任一項所述的檢查方法,其中所述第二區域包含焊料部。 The inspection method according to any one of claims 9 to 11, wherein the second region contains a solder portion. 如申請專利範圍9至11中任一項所述的檢查方法,其中所述第二區域包含鍍敷部。 The inspection method according to any one of claims 9 to 11, wherein the second region comprises a plating portion.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI786894B (en) * 2021-10-20 2022-12-11 國立清華大學 Detection method

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107093174B (en) * 2017-04-05 2018-03-27 湖北工业大学 A kind of PCB design defect inspection method
TWI721385B (en) * 2018-07-08 2021-03-11 香港商康代影像技術方案香港有限公司 Generating synthetic color images of printed circuit boards
WO2020071002A1 (en) * 2018-10-01 2020-04-09 富山住友電工株式会社 Method and device for manufacturing plated wire
WO2020090154A1 (en) * 2018-10-29 2020-05-07 パナソニックIpマネジメント株式会社 Information presentation method, information presentation device, and information presentation system
CN111380875B (en) * 2018-12-29 2023-09-12 深圳中科飞测科技股份有限公司 Defect detection method and system
JP2020144691A (en) * 2019-03-07 2020-09-10 株式会社Screenホールディングス Model color determination method, inspection device, inspection method, and program
CN111443096B (en) * 2020-04-03 2023-05-30 联觉(深圳)科技有限公司 Method, system, electronic device and storage medium for detecting defect of printed circuit board
KR102311595B1 (en) * 2021-03-31 2021-10-13 (주)아이프리즘 Vision inspection system of date printing status for product and method thereof
CN113240673B (en) * 2021-07-09 2021-09-17 武汉Tcl集团工业研究院有限公司 Defect detection method, defect detection device, electronic equipment and storage medium
CN116223515B (en) * 2023-05-05 2023-07-11 成都中航华测科技有限公司 Conductive pattern defect detection method for circuit board test process
CN117292381B (en) * 2023-11-24 2024-02-27 杭州速腾电路科技有限公司 Method for reading serial number of printed circuit board

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194737A (en) * 1995-01-17 1996-07-30 Dainippon Printing Co Ltd Measurement device for difference in levels of minute pattern
EP0871027A3 (en) * 1997-04-07 1999-05-19 Hewlett-Packard Company Inspection of print circuit board assembly
US6084663A (en) * 1997-04-07 2000-07-04 Hewlett-Packard Company Method and an apparatus for inspection of a printed circuit board assembly
WO2000011454A1 (en) * 1998-08-18 2000-03-02 Orbotech Ltd. Inspection of printed circuit boards using color
IL132817A (en) * 1999-11-08 2003-11-23 Orbotech Schuh Gmbh & Co Illumination and image acquisition system
JP3691503B2 (en) * 2003-12-10 2005-09-07 シライ電子工業株式会社 Inspection method and inspection apparatus for printed matter
US7809180B2 (en) * 2004-07-05 2010-10-05 Panasonic Corporation Method of generating image of component
US20060262295A1 (en) * 2005-05-20 2006-11-23 Vistec Semiconductor Systems Gmbh Apparatus and method for inspecting a wafer
KR101338576B1 (en) * 2005-12-26 2013-12-06 가부시키가이샤 니콘 Defect inspection device for inspecting defect by image analysis
JP4734650B2 (en) * 2006-10-31 2011-07-27 国立大学法人 岡山大学 Defect detection method and apparatus for cream solder printing
CN101556250A (en) * 2008-04-11 2009-10-14 郭上鲲 System and method thereof for checking product quality
JPWO2009125839A1 (en) * 2008-04-11 2011-08-04 株式会社ニコン Inspection device
CN101661004B (en) * 2009-07-21 2011-05-25 湖南大学 Visible detection method of welding quality of circuit board based on support vector machine
JP2013092514A (en) * 2011-10-26 2013-05-16 Samsung Electro-Mechanics Co Ltd System and method for inspecting substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI786894B (en) * 2021-10-20 2022-12-11 國立清華大學 Detection method

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