TWI561659B - Pvd rf dc open/closed loop selectable magnetron - Google Patents
Pvd rf dc open/closed loop selectable magnetronInfo
- Publication number
- TWI561659B TWI561659B TW103103239A TW103103239A TWI561659B TW I561659 B TWI561659 B TW I561659B TW 103103239 A TW103103239 A TW 103103239A TW 103103239 A TW103103239 A TW 103103239A TW I561659 B TWI561659 B TW I561659B
- Authority
- TW
- Taiwan
- Prior art keywords
- magnetron
- pvd
- selectable
- open
- closed loop
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32669—Particular magnets or magnet arrangements for controlling the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
- H01J37/3452—Magnet distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
- H01J37/3455—Movable magnets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/761,267 US9249500B2 (en) | 2013-02-07 | 2013-02-07 | PVD RF DC open/closed loop selectable magnetron |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201432079A TW201432079A (zh) | 2014-08-16 |
TWI561659B true TWI561659B (en) | 2016-12-11 |
Family
ID=51258378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103103239A TWI561659B (en) | 2013-02-07 | 2014-01-28 | Pvd rf dc open/closed loop selectable magnetron |
Country Status (5)
Country | Link |
---|---|
US (1) | US9249500B2 (zh) |
KR (1) | KR101725431B1 (zh) |
CN (1) | CN104969331B (zh) |
TW (1) | TWI561659B (zh) |
WO (1) | WO2014123662A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9178077B2 (en) | 2012-11-13 | 2015-11-03 | Micron Technology, Inc. | Semiconductor constructions |
JP6359118B2 (ja) * | 2014-12-03 | 2018-07-18 | 株式会社アルバック | ターゲットアッセンブリ |
TWI670749B (zh) | 2015-03-13 | 2019-09-01 | 美商應用材料股份有限公司 | 耦接至工藝腔室的電漿源 |
WO2017005291A1 (en) * | 2015-07-06 | 2017-01-12 | Applied Materials, Inc. | Deposition source for sputter deposition, deposition apparatus and method of assembling the source |
US10312065B2 (en) * | 2016-07-20 | 2019-06-04 | Applied Materials, Inc. | Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control |
US11189472B2 (en) * | 2017-07-17 | 2021-11-30 | Applied Materials, Inc. | Cathode assembly having a dual position magnetron and centrally fed coolant |
US11462394B2 (en) * | 2018-09-28 | 2022-10-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Physical vapor deposition apparatus and method thereof |
TWI692538B (zh) * | 2018-11-27 | 2020-05-01 | 財團法人金屬工業研究發展中心 | 超高頻反應式電漿薄膜製造設備及薄膜沉積方法 |
US11295938B2 (en) * | 2020-06-30 | 2022-04-05 | Applied Materials, Inc. | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof |
CN111809157B (zh) * | 2020-07-17 | 2022-11-25 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及其磁控管机构 |
KR102220854B1 (ko) * | 2020-08-10 | 2021-02-26 | 이상신 | 물리적 기상 증착 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102439697A (zh) * | 2009-04-03 | 2012-05-02 | 应用材料公司 | 高压rf-dc溅射及改善此工艺的膜均匀性和阶梯覆盖率的方法 |
CN102459565A (zh) * | 2009-06-02 | 2012-05-16 | 尹特根埃克斯有限公司 | 具有隔膜阀的流控设备 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6440282B1 (en) * | 1999-07-06 | 2002-08-27 | Applied Materials, Inc. | Sputtering reactor and method of using an unbalanced magnetron |
US6896775B2 (en) | 2002-10-29 | 2005-05-24 | Zond, Inc. | High-power pulsed magnetically enhanced plasma processing |
US20050040030A1 (en) | 2003-08-20 | 2005-02-24 | Mcdonald Peter H. | Method of treating sputtering target to reduce burn-in time and sputtering target thereof and apparatus thereof |
US7674360B2 (en) | 2003-12-12 | 2010-03-09 | Applied Materials, Inc. | Mechanism for varying the spacing between sputter magnetron and target |
US7018515B2 (en) * | 2004-03-24 | 2006-03-28 | Applied Materials, Inc. | Selectable dual position magnetron |
US8597479B2 (en) * | 2005-02-08 | 2013-12-03 | Tohoku Seiki Industries, Ltd. | Sputtering system |
US8097133B2 (en) | 2005-07-19 | 2012-01-17 | Applied Materials, Inc. | Evacuable magnetron chamber |
US8021527B2 (en) | 2005-09-14 | 2011-09-20 | Applied Materials, Inc. | Coaxial shafts for radial positioning of rotating magnetron |
US7517437B2 (en) * | 2006-03-29 | 2009-04-14 | Applied Materials, Inc. | RF powered target for increasing deposition uniformity in sputtering systems |
KR20110027909A (ko) | 2009-09-11 | 2011-03-17 | (주)울텍 | 회전식 원통형 복수 배열 자석단을 가지고 있는 스퍼터링 마그네트론 |
US8580094B2 (en) | 2010-06-21 | 2013-11-12 | Applied Materials, Inc. | Magnetron design for RF/DC physical vapor deposition |
-
2013
- 2013-02-07 US US13/761,267 patent/US9249500B2/en active Active
-
2014
- 2014-01-13 WO PCT/US2014/011304 patent/WO2014123662A1/en active Application Filing
- 2014-01-13 KR KR1020157023677A patent/KR101725431B1/ko active IP Right Grant
- 2014-01-13 CN CN201480007630.XA patent/CN104969331B/zh active Active
- 2014-01-28 TW TW103103239A patent/TWI561659B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102439697A (zh) * | 2009-04-03 | 2012-05-02 | 应用材料公司 | 高压rf-dc溅射及改善此工艺的膜均匀性和阶梯覆盖率的方法 |
CN102459565A (zh) * | 2009-06-02 | 2012-05-16 | 尹特根埃克斯有限公司 | 具有隔膜阀的流控设备 |
Also Published As
Publication number | Publication date |
---|---|
TW201432079A (zh) | 2014-08-16 |
CN104969331B (zh) | 2017-11-03 |
US20140216923A1 (en) | 2014-08-07 |
CN104969331A (zh) | 2015-10-07 |
KR20150114986A (ko) | 2015-10-13 |
KR101725431B1 (ko) | 2017-04-11 |
WO2014123662A1 (en) | 2014-08-14 |
US9249500B2 (en) | 2016-02-02 |
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