TWI534424B - 圖案檢查裝置及圖案檢查方法 - Google Patents
圖案檢查裝置及圖案檢查方法 Download PDFInfo
- Publication number
- TWI534424B TWI534424B TW102147906A TW102147906A TWI534424B TW I534424 B TWI534424 B TW I534424B TW 102147906 A TW102147906 A TW 102147906A TW 102147906 A TW102147906 A TW 102147906A TW I534424 B TWI534424 B TW I534424B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- pattern
- image
- transparent substrate
- light source
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013028216A JP6085188B2 (ja) | 2013-02-15 | 2013-02-15 | パターン検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201447286A TW201447286A (zh) | 2014-12-16 |
TWI534424B true TWI534424B (zh) | 2016-05-21 |
Family
ID=51309231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102147906A TWI534424B (zh) | 2013-02-15 | 2013-12-24 | 圖案檢查裝置及圖案檢查方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6085188B2 (ja) |
KR (1) | KR101577119B1 (ja) |
CN (1) | CN103995008A (ja) |
TW (1) | TWI534424B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101712924B1 (ko) * | 2015-02-03 | 2017-03-08 | 성우테크론 주식회사 | 광학 검사장치 |
JP6496159B2 (ja) * | 2015-02-23 | 2019-04-03 | 株式会社Screenホールディングス | パターン検査装置およびパターン検査方法 |
JP6450697B2 (ja) * | 2016-03-22 | 2019-01-09 | Ckd株式会社 | 基板検査装置 |
KR101879735B1 (ko) * | 2017-03-15 | 2018-07-18 | (주)넥셀 | 자동적인 학습데이터 생성 방법 및 장치와 이를 이용하는 자가 학습 장치 및 방법 |
KR102037395B1 (ko) * | 2017-09-25 | 2019-10-28 | 동우 화인켐 주식회사 | 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법 |
JP2021096112A (ja) * | 2019-12-16 | 2021-06-24 | コニカミノルタ株式会社 | 透明体の検査装置 |
KR102267705B1 (ko) * | 2020-09-17 | 2021-06-22 | 주식회사 티에스아이코리아 | 칩 온 필름 검사장치 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53102792A (en) * | 1977-02-21 | 1978-09-07 | Hitachi Ltd | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
JP3418054B2 (ja) * | 1996-02-16 | 2003-06-16 | 三井金属鉱業株式会社 | 配線パターン線幅測定装置 |
JP3378795B2 (ja) * | 1998-03-27 | 2003-02-17 | シャープ株式会社 | 表示装置の検査装置および検査方法 |
JP4227272B2 (ja) * | 1999-08-11 | 2009-02-18 | 株式会社エヌテック | 異なる波長の光を用いた物品の検査装置 |
JP2001305074A (ja) * | 2000-04-19 | 2001-10-31 | Dainippon Printing Co Ltd | 板状ワークの検査方法及び装置 |
JP4304690B2 (ja) * | 2002-12-27 | 2009-07-29 | 国際技術開発株式会社 | テープ部材の検査装置 |
JP4403777B2 (ja) * | 2003-11-07 | 2010-01-27 | ウシオ電機株式会社 | 配線パターン検査装置及び方法 |
JP2008026212A (ja) * | 2006-07-24 | 2008-02-07 | Ushio Inc | パターン検査装置 |
CN101887030A (zh) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | 用于检测透明基板表面和/或其内部的缺陷的方法及系统 |
KR101240564B1 (ko) * | 2009-09-02 | 2013-03-14 | 아주하이텍(주) | 광학 검사 장치 및 이를 이용한 검사 방법 |
CN101806751B (zh) * | 2010-03-02 | 2012-01-11 | 清华大学 | 一种皮棉杂质的双光源透反射成像检测装置 |
JP5585301B2 (ja) | 2010-08-24 | 2014-09-10 | オムロン株式会社 | シート用の外観検査システム |
-
2013
- 2013-02-15 JP JP2013028216A patent/JP6085188B2/ja not_active Expired - Fee Related
- 2013-12-23 KR KR1020130161427A patent/KR101577119B1/ko not_active IP Right Cessation
- 2013-12-24 TW TW102147906A patent/TWI534424B/zh not_active IP Right Cessation
-
2014
- 2014-02-17 CN CN201410053709.8A patent/CN103995008A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR101577119B1 (ko) | 2015-12-11 |
KR20140103026A (ko) | 2014-08-25 |
JP2014157085A (ja) | 2014-08-28 |
CN103995008A (zh) | 2014-08-20 |
TW201447286A (zh) | 2014-12-16 |
JP6085188B2 (ja) | 2017-02-22 |
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MM4A | Annulment or lapse of patent due to non-payment of fees |