TWI508792B - - Google Patents

Info

Publication number
TWI508792B
TWI508792B TW102132015A TW102132015A TWI508792B TW I508792 B TWI508792 B TW I508792B TW 102132015 A TW102132015 A TW 102132015A TW 102132015 A TW102132015 A TW 102132015A TW I508792 B TWI508792 B TW I508792B
Authority
TW
Taiwan
Application number
TW102132015A
Other versions
TW201509544A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW102132015A priority Critical patent/TW201509544A/zh
Priority to CN201310451376.XA priority patent/CN104415892A/zh
Priority to CN201320604178.8U priority patent/CN203648808U/zh
Publication of TW201509544A publication Critical patent/TW201509544A/zh
Application granted granted Critical
Publication of TWI508792B publication Critical patent/TWI508792B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
TW102132015A 2013-09-05 2013-09-05 基板塗佈裝置及塗佈方法 TW201509544A (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW102132015A TW201509544A (zh) 2013-09-05 2013-09-05 基板塗佈裝置及塗佈方法
CN201310451376.XA CN104415892A (zh) 2013-09-05 2013-09-27 基板涂布装置及涂布方法
CN201320604178.8U CN203648808U (zh) 2013-09-05 2013-09-27 基板涂布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102132015A TW201509544A (zh) 2013-09-05 2013-09-05 基板塗佈裝置及塗佈方法

Publications (2)

Publication Number Publication Date
TW201509544A TW201509544A (zh) 2015-03-16
TWI508792B true TWI508792B (zh) 2015-11-21

Family

ID=50915249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102132015A TW201509544A (zh) 2013-09-05 2013-09-05 基板塗佈裝置及塗佈方法

Country Status (2)

Country Link
CN (2) CN104415892A (zh)
TW (1) TW201509544A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201509544A (zh) * 2013-09-05 2015-03-16 Rich Chen Automatically Controlled Co Ltd 基板塗佈裝置及塗佈方法
CN108307587B (zh) * 2016-03-08 2019-12-06 苏州市相城区黄桥工业园经济发展有限公司 一种bga基板的涂布吸附装置的工作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6496350B2 (en) * 2000-06-20 2002-12-17 Nikon Corporation Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same
CN1508296A (zh) * 2002-12-19 2004-06-30 大日本网目版制造株式会社 电镀装置以及电镀方法
TW201335996A (zh) * 2011-11-09 2013-09-01 Japan Science & Tech Agency 功能性元件之製造方法及功能性元件之製造裝置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4443353B2 (ja) * 2004-08-31 2010-03-31 東京応化工業株式会社 基板載置ステージ及び基板の吸着・剥離方法
JP4771893B2 (ja) * 2006-08-24 2011-09-14 東京応化工業株式会社 基板保持装置
JP5186161B2 (ja) * 2007-09-06 2013-04-17 東京応化工業株式会社 塗布装置及び塗布装置のクリーニング方法
JP2009130008A (ja) * 2007-11-21 2009-06-11 Toray Eng Co Ltd 塗布装置及びその基板保持方法
TW201509544A (zh) * 2013-09-05 2015-03-16 Rich Chen Automatically Controlled Co Ltd 基板塗佈裝置及塗佈方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6496350B2 (en) * 2000-06-20 2002-12-17 Nikon Corporation Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same
CN1508296A (zh) * 2002-12-19 2004-06-30 大日本网目版制造株式会社 电镀装置以及电镀方法
TW201335996A (zh) * 2011-11-09 2013-09-01 Japan Science & Tech Agency 功能性元件之製造方法及功能性元件之製造裝置

Also Published As

Publication number Publication date
CN203648808U (zh) 2014-06-18
CN104415892A (zh) 2015-03-18
TW201509544A (zh) 2015-03-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees