TWI506076B - Organic and inorganic composite particles, conductive particles, conductive materials and connecting structures - Google Patents

Organic and inorganic composite particles, conductive particles, conductive materials and connecting structures Download PDF

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TWI506076B
TWI506076B TW102144678A TW102144678A TWI506076B TW I506076 B TWI506076 B TW I506076B TW 102144678 A TW102144678 A TW 102144678A TW 102144678 A TW102144678 A TW 102144678A TW I506076 B TWI506076 B TW I506076B
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particles
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inorganic composite
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TW201434898A (en
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Yasuyuki Yamada
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Sekisui Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/14Polysiloxanes containing silicon bound to oxygen-containing groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/14Polysiloxanes containing silicon bound to oxygen-containing groups
    • C08G77/18Polysiloxanes containing silicon bound to oxygen-containing groups to alkoxy or aryloxy groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/20Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0221Insulating particles having an electrically conductive coating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0278Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Conductive Materials (AREA)
  • Non-Insulated Conductors (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Description

有機無機複合粒子、導電性粒子、導電材料及連接構造體Organic-inorganic composite particles, conductive particles, conductive materials, and bonded structures

本發明係關於一種作為複數個無機粒子之集合體之有機無機複合粒子。又,本發明係關於一種使用上述有機無機複合粒子之導電性粒子、導電材料及連接構造體。The present invention relates to an organic-inorganic composite particle which is an aggregate of a plurality of inorganic particles. Further, the present invention relates to a conductive particle, a conductive material, and a bonded structure using the above-described organic-inorganic composite particles.

眾所周知有各向異性導電膏及各向異性導電膜等各向異性導電材料。上述各向異性導電材料中,於黏合劑樹脂中分散有導電性粒子。上述各向異性導電材料係用以將撓性印刷基板(FPC)、玻璃基板及半導體晶片等各種連接對象構件之電極間電性連接而獲得連接構造體。又,作為上述導電性粒子,有使用具有樹脂粒子、與配置於該樹脂粒子之表面上之導電層之導電性粒子之情況。An anisotropic conductive material such as an anisotropic conductive paste or an anisotropic conductive film is known. In the anisotropic conductive material, conductive particles are dispersed in the binder resin. The anisotropic conductive material is used to electrically connect electrodes of various connection target members such as a flexible printed circuit board (FPC), a glass substrate, and a semiconductor wafer to obtain a connection structure. Further, as the conductive particles, conductive particles having resin particles and a conductive layer disposed on the surface of the resin particles may be used.

作為上述導電性粒子中所使用之樹脂粒子之一例,下述專利文獻1中揭示有破裂點荷重為9.8mN以下之聚合物粒子。專利文獻1中,作為上述聚合物粒子之較佳態樣,列舉有:(a)由二氧化矽、氧化鋁、氧化鈦等金屬氧化物、金屬氮化物、金屬硫化物、金屬碳化物等所形成之無機質粒子分散於有機質中之態樣;(b)(有機)聚矽氧烷、聚鈦氧烷等金屬烷鏈(含有「金屬-氧-金屬」鍵之分子鏈)與有機分子以分子等級進行複合之態樣;及(c)含有乙烯系聚合物骨架與聚矽氧烷骨架之有機無機聚合物粒子之態樣等。As an example of the resin particles used in the above-mentioned conductive particles, Patent Document 1 listed below discloses polymer particles having a breaking point load of 9.8 mN or less. In Patent Document 1, preferred examples of the polymer particles include (a) a metal oxide such as cerium oxide, aluminum oxide or titanium oxide, a metal nitride, a metal sulfide or a metal carbide. a state in which the formed inorganic particles are dispersed in an organic substance; (b) a metal such as an (organic) polysiloxane or a polytitanium alkane An alkyl chain (a molecular chain containing a "metal-oxygen-metal" bond) and a molecular molecule compounded at a molecular level; and (c) an organic inorganic polymer particle containing a vinyl polymer skeleton and a polyoxyalkylene skeleton The situation and so on.

又,液晶顯示元件係於兩片玻璃基板間配置液晶而構成。該液晶顯示元件中,為了均勻且固定地保持兩片玻璃基板之間隔(間隙), 使用間隔物作為間隙控制材料。作為該間隔物,通常使用樹脂粒子。Further, the liquid crystal display element is configured by disposing a liquid crystal between two glass substrates. In the liquid crystal display device, in order to uniformly and fixedly maintain the interval (gap) between the two glass substrates, A spacer is used as the gap control material. As the spacer, resin particles are usually used.

作為上述導電性粒子或上述液晶顯示元件用間隔物中所使用之樹脂粒子之一例,下述專利文獻2中揭示有藉由使具有聚合性不飽和基之多官能性矽烷化合物於界面活性劑之存在下進行水解及聚縮合而獲得之有機無機複合粒子。專利文獻2中,上述多官能性矽烷化合物係選自下述式(X)所表示之化合物及其衍生物之至少1種含自由基聚合性基之第1矽化合物。As an example of the conductive particles or the resin particles used in the spacer for a liquid crystal display device, Patent Document 2 discloses that a polyfunctional decane compound having a polymerizable unsaturated group is used as a surfactant. The organic-inorganic composite particles obtained by performing hydrolysis and polycondensation in the presence. In the patent document 2, the polyfunctional decane compound is a first fluorene-containing compound containing at least one radical-polymerizable group selected from the compounds represented by the following formula (X) and derivatives thereof.

上述式(X)中,R1表示氫原子或甲基,R2表示可具有取代基之碳數1~20之二價有機基,R3表示碳數1~5之烷基或苯基,R4表示選自由氫原子、碳數1~5之烷基、以及碳數2~5之醯基所組成之群中之至少1種一價基。In the above formula (X), R1 represents a hydrogen atom or a methyl group, R2 represents a divalent organic group having 1 to 20 carbon atoms which may have a substituent, R3 represents an alkyl group having 1 to 5 carbon atoms or a phenyl group, and R4 represents an election. At least one monovalent group of a group consisting of a free hydrogen atom, an alkyl group having 1 to 5 carbon atoms, and a fluorenyl group having 2 to 5 carbon atoms.

[先前技術文獻][Previous Technical Literature] [專利文獻][Patent Literature]

[專利文獻1]WO2012/020799A1[Patent Document 1] WO2012/020799A1

[專利文獻2]日本專利特開2000-204119號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-204119

關於如專利文獻1、2中記載之先前之有機無機複合粒子,有壓縮時之破裂荷重較低之情況。Regarding the conventional organic-inorganic composite particles described in Patent Documents 1 and 2, there is a case where the breaking load at the time of compression is low.

因此,於將上述有機無機複合粒子用作液晶顯示元件用間隔物而配置於基板間、或於表面形成導電層而用作導電性粒子而將電極間 電性連接之情形時,對使用上述液晶顯示元件用間隔物之液晶顯示元件及使用上述導電性粒子之連接構造體施加衝擊時,有液晶顯示元件用間隔物或導電性粒子產生破裂或損傷之情況。Therefore, the organic-inorganic composite particles are disposed between the substrates as spacers for liquid crystal display elements, or a conductive layer is formed on the surface to serve as conductive particles, and between the electrodes In the case of electrical connection, when a liquid crystal display element using the spacer for a liquid crystal display element and a connection structure using the conductive particles are applied, the spacer for the liquid crystal display element or the conductive particles may be broken or damaged. Happening.

本發明之目的在於提供一種壓縮時之破裂荷重較高、具有良好之壓縮變形特性之有機無機複合粒子、及使用該有機無機複合粒子之導電性粒子、導電材料及連接構造體。An object of the present invention is to provide an organic-inorganic composite particle having a high breaking load at the time of compression and having excellent compression deformation characteristics, and conductive particles, a conductive material and a bonded structure using the organic-inorganic composite particles.

根據本發明之廣泛態樣,提供一種有機無機複合粒子,其係使用表面具有第1反應性官能基之複數個無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷而獲得,且為上述無機粒子之集合體。According to a broad aspect of the present invention, there is provided an organic-inorganic composite particle comprising a plurality of inorganic particles having a first reactive functional group on a surface thereof and a second reactive group capable of reacting with the first reactive functional group It is obtained by using an alkoxy group-containing organic polyoxyalkylene having a functional group, and is an aggregate of the above inorganic particles.

本發明之有機無機複合粒子之某特定態樣中,上述第1反應性官能基為羥基。In a specific aspect of the organic-inorganic composite particles of the present invention, the first reactive functional group is a hydroxyl group.

本發明之有機無機複合粒子之某特定態樣中,上述含烷氧基之有機聚矽氧烷具有環氧基或(甲基)丙烯醯基作為上述第2反應性官能基。In a specific aspect of the organic-inorganic composite particles of the present invention, the alkoxy-containing organic polyoxyalkylene has an epoxy group or a (meth) acrylonitrile group as the second reactive functional group.

本發明之有機無機複合粒子之某特定態樣中,上述含烷氧基之有機聚矽氧烷具有環氧基作為上述第2反應性官能基。In a specific aspect of the organic-inorganic composite particles of the present invention, the alkoxy-containing organopolyoxane has an epoxy group as the second reactive functional group.

本發明之有機無機複合粒子之某特定態樣中,複數個上述無機粒子可經由來自上述含烷氧基之有機聚矽氧烷之構造而一體化,獲得上述無機粒子之集合體。In a specific aspect of the organic-inorganic composite particles of the present invention, a plurality of the inorganic particles may be integrated via a structure derived from the alkoxy-containing organic polyoxyalkylene to obtain an aggregate of the inorganic particles.

本發明之有機無機複合粒子之某特定態樣中,上述含烷氧基之有機聚矽氧烷具有甲氧基作為上述第2反應性官能基。In a specific aspect of the organic-inorganic composite particles of the present invention, the alkoxy-containing organopolysiloxane has a methoxy group as the second reactive functional group.

本發明之有機無機複合粒子之某特定態樣中,上述含烷氧基之有機聚矽氧烷具有直接鍵結於矽原子之烷基。In a specific aspect of the organic-inorganic composite particles of the present invention, the alkoxy-containing organopolyoxane has an alkyl group directly bonded to a ruthenium atom.

本發明之有機無機複合粒子較佳為用以於表面上形成導電層而 獲得具有上述導電層之導電性粒子,或用作液晶顯示元件用間隔物。The organic-inorganic composite particles of the present invention are preferably used to form a conductive layer on the surface. Conductive particles having the above conductive layer are obtained or used as spacers for liquid crystal display elements.

根據本發明之廣泛態樣,提供一種具備上述有機無機複合粒子、與配置於上述有機無機複合粒子之表面上之導電層的導電性粒子。According to a broad aspect of the present invention, there is provided a conductive particle comprising the above-described organic-inorganic composite particles and a conductive layer disposed on a surface of the organic-inorganic composite particles.

根據本發明之廣泛態樣,提供一種包含導電性粒子與黏合劑樹脂、且上述導電性粒子具備上述有機無機複合粒子、與配置於上述有機無機複合粒子之表面上之導電層的導電材料。According to a broad aspect of the present invention, a conductive material comprising conductive particles and a binder resin, and the conductive particles include the organic-inorganic composite particles and a conductive layer disposed on a surface of the organic-inorganic composite particles.

根據本發明之廣泛態樣,提供一種連接構造體,其具備:第1連接對象構件,其表面具有第1電極;第2連接對象構件,其表面具有第2電極;以及連接部,其連接上述第1連接對象構件與上述第2連接對象構件;並且上述連接部由導電性粒子形成,或由包含上述導電性粒子與黏合劑樹脂之導電材料形成;上述導電性粒子具備:上述有機無機複合粒子、與配置於上述有機無機複合粒子之表面上之導電層;且上述第1電極與上述第2電極由上述導電性粒子而電性連接。According to a broad aspect of the present invention, a connection structure includes: a first connection target member having a first electrode on a surface thereof; a second connection target member having a second electrode on a surface thereof; and a connection portion connecting the above a first connection target member and the second connection target member; and the connection portion is formed of conductive particles or a conductive material including the conductive particles and a binder resin; and the conductive particles include the organic-inorganic composite particles And a conductive layer disposed on a surface of the organic-inorganic composite particle; and the first electrode and the second electrode are electrically connected by the conductive particles.

本發明之有機無機複合粒子係使用表面具有第1反應性官能基之複數個無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷而獲得,其為上述無機粒子之集合體,故而壓縮時之破裂荷重較高,且有機無機複合粒子具有良好之壓縮變形特性。The organic-inorganic composite particles of the present invention are a plurality of inorganic particles having a first reactive functional group on the surface and an alkoxy-containing organic having a second reactive functional group reactive with the first reactive functional group. It is obtained by polyaluminoxane, which is an aggregate of the above inorganic particles, so that the fracture load at the time of compression is high, and the organic-inorganic composite particles have good compression deformation characteristics.

1‧‧‧有機無機複合粒子1‧‧‧Organic and inorganic composite particles

11‧‧‧無機粒子11‧‧‧Inorganic particles

12‧‧‧來自含烷氧基之有機聚矽氧烷之構造部12‧‧‧From the structure of the alkoxy-containing organopolyoxane

21、22‧‧‧導電性粒子21, 22‧‧‧ conductive particles

31A、31B‧‧‧導電層31A, 31B‧‧‧ conductive layer

31Ba‧‧‧第1導電層31Ba‧‧‧1st conductive layer

31Bb‧‧‧第2導電層31Bb‧‧‧2nd conductive layer

32‧‧‧芯物質32‧‧‧ core material

33‧‧‧絕緣性物質33‧‧‧Insulating substances

51‧‧‧連接構造體51‧‧‧Connection structure

52‧‧‧第1連接對象構件52‧‧‧1st connection object component

52a‧‧‧第1電極52a‧‧‧1st electrode

53‧‧‧第2連接對象構件53‧‧‧2nd connection object component

53a‧‧‧第2電極53a‧‧‧2nd electrode

54‧‧‧連接部54‧‧‧Connecting Department

81‧‧‧液晶顯示元件81‧‧‧Liquid display components

82‧‧‧透明玻璃基板82‧‧‧Transparent glass substrate

83‧‧‧透明電極83‧‧‧Transparent electrode

84‧‧‧配向膜84‧‧‧Alignment film

85‧‧‧液晶85‧‧‧LCD

86‧‧‧密封劑86‧‧‧Sealant

圖1係模式性地表示本發明之第1實施形態之有機無機複合粒子之剖面圖。Fig. 1 is a cross-sectional view schematically showing an organic-inorganic composite particle according to a first embodiment of the present invention.

圖2係模式性地表示使用圖1所示之有機無機複合粒子之導電性粒子之剖面圖。Fig. 2 is a cross-sectional view schematically showing conductive particles using the organic-inorganic composite particles shown in Fig. 1.

圖3係模式性地表示使用圖1所示之有機無機複合粒子之導電性 粒子之變化例之剖面圖。Figure 3 is a schematic representation of the conductivity of the organic-inorganic composite particles shown in Figure 1. A cross-sectional view of a variation of particles.

圖4係模式性地表示使用圖2所示之導電性粒子之連接構造體之剖面圖。Fig. 4 is a cross-sectional view schematically showing a connection structure using the conductive particles shown in Fig. 2 .

圖5係模式性地表示將圖1所示之有機無機複合粒子用作液晶顯示元件用間隔物之液晶顯示元件之剖面圖。Fig. 5 is a cross-sectional view schematically showing a liquid crystal display device in which the organic-inorganic composite particles shown in Fig. 1 are used as spacers for liquid crystal display elements.

以下,詳細地說明本發明。Hereinafter, the present invention will be described in detail.

(有機無機複合粒子)(organic-inorganic composite particles)

本發明之有機無機複合粒子係使用表面具有第1反應性官能基之複數個無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷而獲得。本發明之有機無機複合粒子係上述無機粒子之集合體。The organic-inorganic composite particles of the present invention are a plurality of inorganic particles having a first reactive functional group on the surface and an alkoxy-containing organic having a second reactive functional group reactive with the first reactive functional group. Obtained by polyoxyalkylene. The organic-inorganic composite particles of the present invention are an aggregate of the above inorganic particles.

關於本發明之有機無機複合粒子,其具備上述構成,故而可獲得壓縮時之破裂荷重較高之有機無機複合粒子。上述有機無機複合粒子於壓縮時之破裂荷重較高,故而上述有機無機複合粒子具有良好之壓縮變形特性。為了獲得本發明之有機無機複合粒子,藉由分別使用上述含烷氧基之有機聚矽氧烷與上述無機粒子,而破裂荷重有效地提高。因此,於將上述有機無機複合粒子用作液晶顯示元件用間隔物而配置於基板間、或於表面形成導電層而用作導電性粒子而將電極間電性連接之情形,對使用上述液晶顯示元件用間隔物之液晶顯示元件及使用上述導電性粒子之連接構造體施加衝擊時,液晶顯示元件用間隔物或導電性粒子不易產生破裂或損傷。Since the organic-inorganic composite particles of the present invention have the above-described configuration, organic-inorganic composite particles having a high breaking load at the time of compression can be obtained. The organic-inorganic composite particles have a high breaking load at the time of compression, and thus the organic-inorganic composite particles have good compression deformation characteristics. In order to obtain the organic-inorganic composite particles of the present invention, the above-mentioned inorganic particles containing the alkoxy group and the above inorganic particles are used, respectively, and the breaking load is effectively increased. Therefore, when the above-mentioned organic-inorganic composite particles are used as spacers for liquid crystal display elements, they are disposed between substrates, or a conductive layer is formed on the surface to be used as conductive particles, and electrodes are electrically connected to each other. When an impact is applied to the liquid crystal display element of the device spacer and the connection structure using the conductive particles, the spacer or the conductive particles for the liquid crystal display element are less likely to be broken or damaged.

以下,藉由一面參照圖式一面說明本發明之具體之實施形態,而明確本發明。Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.

圖1係模式性地表示本發明之第1實施形態之有機無機複合粒子之剖面圖。Fig. 1 is a cross-sectional view schematically showing an organic-inorganic composite particle according to a first embodiment of the present invention.

圖1中所示之有機無機複合粒子1具有:複數個無機粒子11、與來自含烷氧基之有機聚矽氧烷之構造部12。有機無機複合粒子1為無機粒子11之集合體。構造部12與無機粒子11為不同之物質。The organic-inorganic composite particle 1 shown in Fig. 1 has a plurality of inorganic particles 11 and a structure portion 12 derived from an alkoxy group-containing organic polyoxyalkylene. The organic-inorganic composite particles 1 are an aggregate of the inorganic particles 11. The structural portion 12 is different from the inorganic particles 11.

為了獲得無機粒子11,而使用表面具有第1反應性官能基之無機粒子。為了獲得構造部12,而使用具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷。有機無機複合粒子1係使用表面具有第1反應性官能基之無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷而獲得。In order to obtain the inorganic particles 11, inorganic particles having a first reactive functional group on the surface are used. In order to obtain the structure portion 12, an alkoxy group-containing organopolyoxane having a second reactive functional group reactive with the first reactive functional group is used. The organic-inorganic composite particles 1 are an alkoxy-containing organic polyoxyalkylene having inorganic particles having a first reactive functional group on the surface and a second reactive functional group capable of reacting with the first reactive functional group. And get.

構造部12係配置於無機粒子11之表面上。構造部12存在於複數個無機粒子11間。複數個無機粒子11較佳為經由來自含烷氧基之有機聚矽氧烷之構造(構造部12)而一體化。複數個無機粒子11較佳為經由來自含烷氧基之有機聚矽氧烷之構造(構造部12)而一體化,獲得無機粒子11之集合體。構造部12較佳為黏結複數個無機粒子11。The structure portion 12 is disposed on the surface of the inorganic particles 11. The structure portion 12 exists between the plurality of inorganic particles 11. The plurality of inorganic particles 11 are preferably integrated via a structure (structure portion 12) derived from an alkoxy group-containing organic polyoxyalkylene. The plurality of inorganic particles 11 are preferably integrated via a structure (structure portion 12) derived from an alkoxy group-containing organic polyoxyalkylene to obtain an aggregate of the inorganic particles 11. The structural portion 12 preferably has a plurality of inorganic particles 11 bonded thereto.

作為上述無機粒子,可列舉由金屬氧化物、金屬氮化物、金屬硫化物、金屬碳化物、及該等之複合物等所形成之粒子。作為上述金屬氧化物,可列舉:二氧化矽、氧化鋁及氧化鈦等。其中,較佳為上述無機粒子為二氧化矽粒子。Examples of the inorganic particles include particles formed of a metal oxide, a metal nitride, a metal sulfide, a metal carbide, and the like. Examples of the metal oxide include cerium oxide, aluminum oxide, and titanium oxide. Among them, it is preferred that the inorganic particles are cerium oxide particles.

上述無機粒子之主成分為無機物質。關於上述無機粒子,只要碳原子為少量,則亦可含有碳原子。上述無機粒子100重量%中,碳原子之含量較佳為20重量%以下,更佳為10重量%以下。含有少量碳原子之粒子亦包含於無機粒子中。The main component of the above inorganic particles is an inorganic substance. The inorganic particles may contain carbon atoms as long as the carbon atoms are small. The content of carbon atoms in 100% by weight of the inorganic particles is preferably 20% by weight or less, more preferably 10% by weight or less. Particles containing a small amount of carbon atoms are also contained in the inorganic particles.

作為上述第1反應性官能基,可列舉:羥基、烷氧基、環氧基、(甲基)丙烯醯基、胺基、巰基及異氰酸酯基等。其中,就可於無機粒子之表面容易且大量地導入官能基方面而言,較佳為羥基。Examples of the first reactive functional group include a hydroxyl group, an alkoxy group, an epoxy group, a (meth)acrylinyl group, an amine group, a mercapto group, and an isocyanate group. Among them, a hydroxyl group is preferred in that the functional group is easily and in a large amount to be introduced onto the surface of the inorganic particles.

上述無機粒子較佳為含有聚矽氧烷骨架。上述無機粒子較佳為 使矽烷化合物進行水解及縮合而獲得。上述矽烷化合物亦可具有烷基及乙烯基等有機基。使用此種具有有機基之矽烷化合物所獲得之粒子只要主成分為無機物質,則亦稱為無機粒子。上述無機粒子亦可使用有機聚矽氧烷而形成。The inorganic particles preferably contain a polyoxyalkylene skeleton. The above inorganic particles are preferably It is obtained by subjecting a decane compound to hydrolysis and condensation. The above decane compound may have an organic group such as an alkyl group or a vinyl group. The particles obtained by using such an organic group-containing decane compound are also referred to as inorganic particles as long as the main component is an inorganic substance. The inorganic particles may be formed using an organic polysiloxane.

作為上述矽烷化合物,可列舉:下述式(1)所表示之化合物(以下,有時記載為化合物(1))、下述式(2)所表示之化合物(以下,有時記載為化合物(2))、及下述式(3)所表示化合物(以下,有時記載為化合物(3))等。作為上述矽烷化合物,較佳為使用選自由化合物(1)、化合物(2)及化合物(3)所組成之群中之至少1種。若使用此種化合物,則所獲得之無機粒子之表面自具有矽烷醇基變為具有羥基。The compound represented by the following formula (1) (hereinafter, referred to as the compound (1)) or the compound represented by the following formula (2) (hereinafter, may be described as a compound (hereinafter may be mentioned) 2)), and a compound represented by the following formula (3) (hereinafter, it may be described as a compound (3)). As the decane compound, at least one selected from the group consisting of the compound (1), the compound (2), and the compound (3) is preferably used. When such a compound is used, the surface of the obtained inorganic particles changes from having a stanol group to having a hydroxyl group.

上述式(1)中,Ra表示(甲基)丙烯醯基,Rb表示可具有取代基之碳數1~20之二價有機基,R1及R2分別表示氫原子、碳數1~5之烷基或碳數2~5之醯基,Z表示碳數1~5之烷基、碳數2~5之醯基或碳數1~5之烷氧基。In the above formula (1), Ra represents a (meth) acrylonitrile group, Rb represents a divalent organic group having 1 to 20 carbon atoms which may have a substituent, and R1 and R2 each represent a hydrogen atom and an alkyl group having 1 to 5 carbon atoms. The base or a fluorenyl group having 2 to 5 carbon atoms, and Z represents an alkyl group having 1 to 5 carbon atoms, a fluorenyl group having 2 to 5 carbon atoms or an alkoxy group having 1 to 5 carbon atoms.

上述式(2)中,R1、R2及R3分別表示氫原子、碳數1~5之烷基或 碳數2~5之醯基。In the above formula (2), R1, R2 and R3 each represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or A thiol group with a carbon number of 2 to 5.

上述式(3)中,Ra表示甲基或乙基,R1、R2及R3分別表示氫原子、碳數1~5之烷基或碳數2~5之醯基。In the above formula (3), Ra represents a methyl group or an ethyl group, and R1, R2 and R3 each represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a mercapto group having 2 to 5 carbon atoms.

上述化合物(1)具有Ra-O-Rb-基。該基具有Ra基作為含有聚合性不飽和基之基。藉由使化合物(1)中之聚合性不飽和基進行自由基聚合反應,而形成撓性較高之有機聚合物骨架。另一方面,若不使用化合物(1)而僅使用化合物(2),則無法形成撓性足夠高之有機聚合物骨架。The above compound (1) has a Ra-O-Rb- group. This group has a Ra group as a group containing a polymerizable unsaturated group. The polymerizable unsaturated group in the compound (1) is subjected to radical polymerization to form a highly flexible organic polymer skeleton. On the other hand, if the compound (2) is used without using the compound (1), an organic polymer skeleton having sufficiently high flexibility cannot be formed.

上述式(1)中之Ra表示(甲基)丙烯醯基。Ra in the above formula (1) represents a (meth)acrylonitrile group.

上述式(1)中之Rb表示可具有取代基之碳數1~20之二價有機基。藉由此種有機基之存在,而形成撓性較高之有機聚合物骨架。Rb in the above formula (1) represents a divalent organic group having 1 to 20 carbon atoms which may have a substituent. By virtue of the presence of such an organic group, a highly flexible organic polymer skeleton is formed.

作為上述Rb中之碳數1~20之二價有機基,可列舉:亞甲基、伸乙基、伸丙基、伸丁基、伸己基、伸辛基等伸烷基及於該伸烷基鍵結有取代基之基、或伸苯基及於該伸苯基鍵結有取代基之基、或伸烷基經由醚鍵鍵結而成之基、或伸苯基經由醚鍵而鍵結而成之基等。其中,較佳為伸丙基或伸苯基,更佳為伸丙基。Examples of the divalent organic group having 1 to 20 carbon atoms in the above Rb include a methylene group, an exoethyl group, a propyl group, a butyl group, a hexyl group, a decyl group, and the like. The base bond has a substituent group, or a phenyl group and a group having a substituent bonded to the phenyl group, or a group in which an alkyl group is bonded via an ether bond, or a phenyl group is bonded via an ether bond. The basis of the knot. Among them, a propyl group or a phenyl group is preferred, and a propyl group is more preferred.

上述式(1)中,Z表示碳數1~5之烷基、碳數2~5之醯基或碳數1~5之烷氧基。就反應基點增多方面而言,上述式(1)中之Z較佳為碳數1~5之烷氧基或碳數1~3之烷基,可為碳數1~5之烷氧基,亦可為碳數1~3之烷基。於上述式(1)中之Z為烷氧基之情形時,Z更佳為碳 數1或2之烷氧基。於上述式(1)中之Z為烷基之情形時,Z更佳為碳數1或2之烷基,進而較佳為甲基。In the above formula (1), Z represents an alkyl group having 1 to 5 carbon atoms, a mercapto group having 2 to 5 carbon atoms or an alkoxy group having 1 to 5 carbon atoms. In terms of an increase in the number of reaction sites, Z in the above formula (1) is preferably an alkoxy group having 1 to 5 carbon atoms or an alkyl group having 1 to 3 carbon atoms, and may be an alkoxy group having 1 to 5 carbon atoms. It can also be an alkyl group having 1 to 3 carbon atoms. In the case where Z in the above formula (1) is an alkoxy group, Z is more preferably carbon. Number 1 or 2 alkoxy groups. In the case where Z in the above formula (1) is an alkyl group, Z is more preferably an alkyl group having 1 or 2 carbon atoms, and further preferably a methyl group.

上述式(3)中,Ra表示甲基或乙基。上述式(3)中之Ra較佳為甲基。In the above formula (3), Ra represents a methyl group or an ethyl group. Ra in the above formula (3) is preferably a methyl group.

上述式(1)、(2)、(3)中,R1、R2及R3分別表示氫原子、碳數1~5之烷基或碳數2~5之醯基。該等基為水解性基。就水解速度適度加快方面而言,上述式(1)、(2)、(3)中之R1、R2及R3分別較佳為碳數1~3之烷基或碳數2之醯基,更佳為碳數1~3之烷基,進而較佳為碳數1或2之烷基,尤佳為甲基。In the above formulae (1), (2) and (3), R1, R2 and R3 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a mercapto group having 2 to 5 carbon atoms. These groups are hydrolyzable groups. In terms of moderately increasing the hydrolysis rate, R1, R2 and R3 in the above formulas (1), (2), and (3) are preferably an alkyl group having 1 to 3 carbon atoms or a fluorenyl group having 2 carbon atoms, respectively. It is preferably an alkyl group having 1 to 3 carbon atoms, more preferably an alkyl group having 1 or 2 carbon atoms, and particularly preferably a methyl group.

作為上述化合物(1),例如可列舉:3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷、及3-丙烯醯氧基丙基三乙氧基矽烷等。上述化合物(1)可僅使用1種,亦可併用2種以上。Examples of the above compound (1) include 3-methacryloxypropylmethyldimethoxydecane, 3-methylpropenyloxypropyltrimethoxydecane, and 3-methylpropene oxime. Oxypropylmethyldiethoxydecane, 3-methacryloxypropyltriethoxydecane, and 3-propenyloxypropyltriethoxydecane. The compound (1) may be used alone or in combination of two or more.

作為上述化合物(2),例如可列舉:乙烯基三甲氧基矽烷、及乙烯基三乙氧基矽烷等。上述化合物(2)可僅使用1種,亦可併用2種以上。Examples of the compound (2) include vinyltrimethoxydecane and vinyltriethoxydecane. The compound (2) may be used alone or in combination of two or more.

作為上述化合物(3),例如可列舉:甲基三甲氧基矽烷及乙基三甲氧基矽烷等。上述化合物(3)可僅使用1種,亦可併用2種以上。The compound (3) may, for example, be methyltrimethoxydecane or ethyltrimethoxydecane. The compound (3) may be used alone or in combination of two or more.

上述含烷氧基之有機聚矽氧烷具有可與上述第1反應性官能基進行反應之第2反應性官能基。上述第2反應性官能基可根據上述第1反應性官能基之種類適當選擇。作為上述第2反應性官能基,可列舉:羥基、烷氧基、環氧基、(甲基)丙烯醯基、胺基、巰基及異氰酸酯基等。例如,於上述第1反應性官能基為羥基之情形,由於羥基與烷氧基進行反應,故而上述含烷氧基之有機聚矽氧烷中之烷氧基相當於第2反應性官能基。其中,就與上述無機粒子中之第1反應性官能基之反 應容易進行方面而言,較佳為:環氧基、(甲基)丙烯醯基、巰基或烷氧基,更佳為:環氧基、(甲基)丙烯醯基或烷氧基。上述含烷氧基之有機聚矽氧烷中,作為上述第2反應性官能基,較佳為具有環氧基、(甲基)丙烯醯基或巰基,更佳為具有環氧基或(甲基)丙烯醯基,亦更佳為具有環氧基或巰基,進一步較佳為具有環氧基,更進一步較佳為具有(甲基)丙烯醯基,進而較佳為具有烷氧基,更佳為具有環氧基、(甲基)丙烯醯基或巰基與烷氧基,進而較佳為具有環氧基或巰基與烷氧基,尤佳為具有環氧基與烷氧基。上述烷氧基較佳為甲氧基或乙氧基。The alkoxy group-containing organopolyoxane has a second reactive functional group reactive with the first reactive functional group. The second reactive functional group can be appropriately selected depending on the type of the first reactive functional group. Examples of the second reactive functional group include a hydroxyl group, an alkoxy group, an epoxy group, a (meth)acrylinyl group, an amine group, a mercapto group, and an isocyanate group. For example, when the first reactive functional group is a hydroxyl group, since the hydroxyl group reacts with the alkoxy group, the alkoxy group in the alkoxy group-containing organopolyoxane corresponds to the second reactive functional group. Wherein, in opposition to the first reactive functional group in the above inorganic particles In terms of ease of carrying out, an epoxy group, a (meth) acrylonitrile group, a fluorenyl group or an alkoxy group is preferred, and an epoxy group, a (meth) acryl fluorenyl group or an alkoxy group is more preferred. In the above alkoxy-containing organopolyoxane, the second reactive functional group preferably has an epoxy group, a (meth)acrylinyl group or a fluorenyl group, more preferably an epoxy group or (A) Further, the propylene group is more preferably an epoxy group or a fluorenyl group, more preferably an epoxy group, still more preferably a (meth) acryl fluorenyl group, and further preferably an alkoxy group. It is preferred to have an epoxy group, a (meth)acrylinyl group or a mercapto group and an alkoxy group, and further preferably have an epoxy group or a mercapto group and an alkoxy group, and more preferably have an epoxy group and an alkoxy group. The above alkoxy group is preferably a methoxy group or an ethoxy group.

就可獲得更進一步良好之壓縮變形特性方面而言,上述含烷氧基之有機聚矽氧烷較佳為具有環氧基、甲氧基或乙氧基作為上述第2反應性官能基。In view of obtaining further excellent compression set characteristics, the alkoxy group-containing organopolyoxane preferably has an epoxy group, a methoxy group or an ethoxy group as the second reactive functional group.

作為上述含烷氧基之有機聚矽氧烷,例如可列舉烷氧基低聚物等,可列舉:信越化學工業公司製造之X-41-1053、X-41-1059A(以上,具有環氧基、甲氧基、乙氧基)、X-41-1056(具有環氧基、甲氧基)、X-41-1805(具有巰基、甲氧基、乙氧基)、X-41-1818(具有巰基、乙氧基)、X-41-1810(具有巰基、甲氧基)、X-41-2651(具有胺基、甲氧基)、X-40-2655A(具有甲基丙烯醯基、甲氧基)、KR-513(具有丙烯醯基、甲氧基)、KC-89S、KR-500、X-40-9225、X-40-9246、X-40-9250、KR-401N、X-40-9227、X-40-9247、KR-510、KR-9218、KR-213、X-40-2308(以上,具有甲氧基)、及X-40-9238(具有乙氧基)等。上述含烷氧基之有機聚矽氧烷可僅使用1種,亦可併用2種以上。Examples of the alkoxy group-containing organic polyoxosiloxane include an alkoxy oligomer, and the like, and X-41-1053 and X-41-1059A manufactured by Shin-Etsu Chemical Co., Ltd. (above, having an epoxy resin) , methoxy, ethoxy), X-41-1056 (having an epoxy group, methoxy group), X-41-1805 (having a fluorenyl group, a methoxy group, an ethoxy group), X-41-1818 (having an indenyl group, an ethoxy group), X-41-1810 (having an indenyl group, a methoxy group), X-41-2651 (having an amine group, a methoxy group), and X-40-2655A (having a methyl methacrylate group) , methoxy), KR-513 (with acrylonitrile, methoxy), KC-89S, KR-500, X-40-9225, X-40-9246, X-40-9250, KR-401N, X-40-9227, X-40-9247, KR-510, KR-9218, KR-213, X-40-2308 (above, with methoxy), and X-40-9238 (with ethoxy) Wait. The alkoxy group-containing organopolyoxane may be used alone or in combination of two or more.

上述含烷氧基之有機聚矽氧烷亦可為環狀矽氧烷、與具有上述第2反應性官能基之矽烷化合物之反應物。關於上述反應物,較佳為上述環狀矽氧烷開環。上述具有第2反應性官能基之矽烷化合物亦可為矽烷偶合劑。The alkoxy group-containing organopolyoxane may be a reaction product of a cyclic siloxane and a decane compound having the above second reactive functional group. With respect to the above reactant, it is preferred that the above cyclic oxirane is opened. The decane compound having the second reactive functional group may also be a decane coupling agent.

又,上述含烷氧基之有機聚矽氧烷較佳為具有直接鍵結於矽原子之烷基。該烷基為有機官能基。Further, the alkoxy group-containing organopolyoxane preferably has an alkyl group directly bonded to a ruthenium atom. The alkyl group is an organic functional group.

上述無機粒子更佳為具有環氧基與烷氧基作為上述第2反應性官能基。上述無機粒子進而較佳為具有環氧基或(甲基)丙烯醯基或巰基、烷氧基、及直接鍵結於矽原子之烷基,尤佳為具有環氧基或(甲基)丙烯醯基、烷氧基、及直接鍵結於矽原子之烷基,最佳為具有環氧基、烷氧基、及直接鍵結於矽原子之烷基。藉由該等較佳之第2反應性官能基之存在,及藉由該等較佳之第2反應性官能基及有機官能基之存在,可獲得進而更加良好之壓縮變形特性。More preferably, the inorganic particles have an epoxy group and an alkoxy group as the second reactive functional group. The above inorganic particles are further preferably an epoxy group or a (meth)acryl fluorenyl group or a fluorenyl group, an alkoxy group, and an alkyl group directly bonded to a ruthenium atom, and more preferably an epoxy group or a (meth) propylene group. A mercapto group, an alkoxy group, and an alkyl group directly bonded to a halogen atom are preferably an epoxy group, an alkoxy group, and an alkyl group directly bonded to a halogen atom. Further, better compression deformation characteristics can be obtained by the presence of the preferred second reactive functional groups and by the presence of the preferred second reactive functional groups and organic functional groups.

上述含烷氧基之有機聚矽氧烷之重量平均分子量較佳為500以上,更佳為1000以上,較佳為10000以下,更佳為7000以下。上述重量平均分子量表示藉由凝膠滲透層析法(GPC)測定而求出之以聚苯乙烯換算之重量平均分子量。The weight average molecular weight of the alkoxy group-containing organopolyoxane is preferably 500 or more, more preferably 1,000 or more, more preferably 10,000 or less, still more preferably 7,000 or less. The weight average molecular weight is a weight average molecular weight in terms of polystyrene determined by gel permeation chromatography (GPC).

就可獲得更進一步良好之壓縮變形特性方面而言,上述有機無機複合粒子較佳為使上述第1反應性官能基與上述第2反應性官能基進行反應而獲得。In view of obtaining further excellent compression deformation characteristics, the organic-inorganic composite particles are preferably obtained by reacting the first reactive functional group with the second reactive functional group.

就可獲得更進一步良好之壓縮變形特性方面而言,上述有機無機複合粒子較佳為複數個上述無機粒子經由來自上述含烷氧基之有機聚矽氧烷之構造而一體化。In view of obtaining further excellent compression deformation characteristics, it is preferable that the organic-inorganic composite particles are integrated by a plurality of the inorganic particles via a structure derived from the alkoxy-containing organic polyoxyalkylene.

上述有機無機複合粒子為複數個上述無機粒子之集合體。於上述有機無機複合粒子中,集合體中之無機粒子之數為2以上,較佳為5以上,更佳為10以上。再者,下述實施例中,集合體中之無機粒子之數為10以上。集合體中之無機粒子之數之上限並無特別限定。The organic-inorganic composite particles are a collection of a plurality of the above inorganic particles. In the above organic-inorganic composite particles, the number of the inorganic particles in the aggregate is 2 or more, preferably 5 or more, and more preferably 10 or more. Further, in the following examples, the number of inorganic particles in the aggregate was 10 or more. The upper limit of the number of inorganic particles in the aggregate is not particularly limited.

於上述有機無機複合粒子中,集合體中之各無機粒子之粒徑較佳為0.1nm以上,更佳為1nm以上,進而較佳為3nm以上,且較佳為1000nm以下,更佳為500nm以下,進而較佳為200nm以下,尤佳為 100nm以下。若上述集合體中之無機粒子之粒徑為上述下限以上,則晶界少量存在,故而不易變脆,若為上述上限以下,則空隙少量存在於有機無機複合粒子中,故而有不易變脆之傾向。In the organic-inorganic composite particles, the particle diameter of each of the inorganic particles in the aggregate is preferably 0.1 nm or more, more preferably 1 nm or more, still more preferably 3 nm or more, and is preferably 1000 nm or less, more preferably 500 nm or less. Further preferably 200 nm or less, especially preferably Below 100 nm. When the particle diameter of the inorganic particles in the aggregate is at least the above lower limit, the grain boundary is present in a small amount, so that it is less likely to become brittle. When the content is less than or equal to the above upper limit, a small amount of voids are present in the organic-inorganic composite particles, so that it tends to be less brittle. .

就更進一步抑制有機無機複合粒子之損傷之觀點而言,上述有機無機複合粒子之破裂荷重較佳為5mN以上,更佳為10mN以上,進而較佳為11mN以上。若上述破裂荷重為上述下限以上,則於壓縮時上述有機無機複合粒子變得不易破裂或損傷。The rupture load of the organic-inorganic composite particles is preferably 5 mN or more, more preferably 10 mN or more, and still more preferably 11 mN or more from the viewpoint of further suppressing damage of the organic-inorganic composite particles. When the breaking load is at least the above lower limit, the organic-inorganic composite particles are less likely to be broken or damaged during compression.

上述破裂荷重例如可以如下之方式進行測定。使用微壓縮試驗機,以圓柱(直徑100μm,金剛石製)之平滑壓頭端面,於25℃、壓縮速度0.3mN/秒、及最大試驗荷重20mN之條件下壓縮有機無機複合粒子。測定此時之荷重值(N)及壓縮位移(mm)。可由所獲得之測定值並根據下述式求出上述壓縮彈性模數。作為上述微壓縮試驗機,例如可使用Fischer公司製造之「Fischerscope H-100」等。The above rupture load can be measured, for example, in the following manner. The organic-inorganic composite particles were compressed using a micro-compression tester under the conditions of a smooth head end of a cylinder (100 μm in diameter, made of diamond) at 25 ° C, a compression speed of 0.3 mN/sec, and a maximum test load of 20 mN. The load value (N) and the compression displacement (mm) at this time were measured. The above-described compression elastic modulus can be obtained from the obtained measurement values according to the following formula. As the micro-compression tester, for example, "Fischerscope H-100" manufactured by Fischer Co., Ltd. or the like can be used.

上述破裂荷重表示在荷重值與壓縮位移之測定曲線中確認到臨界點時之荷重值。The above-mentioned breaking load indicates the load value when the critical point is confirmed in the measurement curve of the load value and the compression displacement.

上述有機無機複合粒子之壓縮恢復率較佳為60%以上,更佳為70%以上,進而較佳為80%以上。若上述壓縮恢復率為上述下限以上,則上述有機無機複合粒子不易損傷,對應於基板間或電極間之間隔變動,上述有機無機複合粒子容易充分地追隨而變形。因此,不易產生基板間或電極間之連接不良。The compression recovery ratio of the above organic-inorganic composite particles is preferably 60% or more, more preferably 70% or more, and still more preferably 80% or more. When the compression recovery ratio is equal to or higher than the lower limit, the organic-inorganic composite particles are less likely to be damaged, and the organic-inorganic composite particles are likely to be sufficiently followed to be deformed in accordance with the fluctuation between the substrates or between the electrodes. Therefore, connection failure between substrates or between electrodes is less likely to occur.

上述壓縮恢復率例如可以如下之方式進行測定。將有機無機複合粒子散佈於試樣台上。對1個所散佈之有機無機複合粒子,使用微壓縮試驗機於有機無機複合粒子之中心方向施加負載(反轉荷重值)直至有機無機複合粒子發生30%壓縮變形為止。其後,進行卸載直至原點用荷重值(0.40mN)為止。可測定該期間之荷重-壓縮位移,並根據下述式求出壓縮恢復率。再者,將負載速度設為0.33mN/秒。作為上 述微壓縮試驗機,例如可使用Fischer公司製造之「Fischerscope H-100」等。The above compression recovery ratio can be measured, for example, as follows. The organic-inorganic composite particles are spread on the sample stage. The organic-inorganic composite particles dispersed were applied with a load (inversion load value) in the center direction of the organic-inorganic composite particles using a micro-compression tester until the organic-inorganic composite particles were subjected to 30% compression deformation. Thereafter, the unloading was performed until the origin load value (0.40 mN). The load-compression displacement during this period can be measured, and the compression recovery rate can be obtained from the following equation. Furthermore, the load speed was set to 0.33 mN/sec. As above As the micro compression tester, for example, "Fischerscope H-100" manufactured by Fischer Co., Ltd. or the like can be used.

壓縮恢復率(%)=[(L1-L2)/L1]×100Compression recovery rate (%) = [(L1-L2) / L1] × 100

L1:自施加負載時之原點用荷重值至到達反轉荷重值為止之壓縮位移L1: compression displacement from the origin load value to the reverse load value when the load is applied

L2:自解除負載時之反轉荷重值至到達原點用荷重值為止之卸載位移L2: Unloading displacement from the reverse load value when the load is released to the load value at the origin

上述有機無機複合粒子之粒徑較佳為0.1μm以上,更佳為1μm以上,進而較佳為1.5μm以上,尤佳為2μm以上,且較佳為1000μm以下,更佳為500μm以下,更進一步較佳為300μm以下,進而較佳為50μm以下,尤佳為30μm以下,最佳為5μm以下。若上述有機無機複合粒子之粒徑為上述下限以上及上述上限以下,則可將上述有機無機複合粒子較佳地用於電子零件用途。上述有機無機複合粒子之粒徑表示最大徑。The particle diameter of the organic-inorganic composite particles is preferably 0.1 μm or more, more preferably 1 μm or more, further preferably 1.5 μm or more, particularly preferably 2 μm or more, and more preferably 1,000 μm or less, more preferably 500 μm or less, further. It is preferably 300 μm or less, more preferably 50 μm or less, still more preferably 30 μm or less, and most preferably 5 μm or less. When the particle diameter of the organic-inorganic composite particles is not less than the above lower limit and not more than the above upper limit, the organic-inorganic composite particles can be preferably used for electronic component applications. The particle diameter of the above organic-inorganic composite particles means the largest diameter.

為了測定上述有機無機複合粒子之粒徑,例如可利用使用雷射光散射、電阻值變化、拍攝後之圖像解析等原理之粒度分佈測定機。In order to measure the particle diameter of the above-mentioned organic-inorganic composite particles, for example, a particle size distribution measuring machine using the principles of laser light scattering, resistance value change, and image analysis after photographing can be used.

(有機無機複合粒子之製造方法)(Method for producing organic-inorganic composite particles)

上述有機無機複合粒子之製造方法並無特別限定。上述有機無機複合粒子之製造方法較佳為具備使矽烷化合物進行水解及縮合而獲得無機粒子之水解及縮合步驟。於該方法中,可獲得具有均勻之粒徑、且具有更進一步良好之壓縮變形特性之有機無機複合粒子。上述水解及縮合步驟中,於矽烷化合物與水溶劑之接觸界面,發生水解及縮合反應,而形成聚矽氧烷骨架,獲得無機粒子。The method for producing the above organic-inorganic composite particles is not particularly limited. The method for producing the organic-inorganic composite particles preferably includes a step of hydrolyzing and condensing the decane compound to obtain hydrolysis and condensation of the inorganic particles. In this method, organic-inorganic composite particles having a uniform particle diameter and further excellent compression deformation characteristics can be obtained. In the above hydrolysis and condensation step, hydrolysis and condensation reaction occur at the contact interface between the decane compound and the aqueous solvent to form a polyoxyalkylene skeleton, and inorganic particles are obtained.

上述水解及縮合步驟中,通常使用觸媒。於觸媒之存在下,使上述矽烷化合物進行反應。上述水解及縮合步驟中,具體而言,例如使用水與酸性觸媒或鹼性觸媒。上述觸媒可僅使用1種,亦可併用2種 以上。In the above hydrolysis and condensation steps, a catalyst is usually used. The above decane compound is reacted in the presence of a catalyst. In the above hydrolysis and condensation steps, specifically, for example, water and an acidic catalyst or an alkaline catalyst are used. The above catalysts may be used alone or in combination of two. the above.

作為上述酸性觸媒,例如可列舉:無機酸、有機酸、無機酸之酸酐及其衍生物、及有機酸之酸酐及其衍生物。Examples of the acidic catalyst include inorganic acid, organic acid, acid anhydride of an inorganic acid and a derivative thereof, and an acid anhydride of an organic acid and a derivative thereof.

上述水解及縮合步驟中,除水以外,亦可使用適當之有機溶劑。作為該有機溶劑之具體例,可列舉:醇類、酮類、酯類、(環)烷烴類、醚類及芳香族烴等。上述有機溶劑可僅使用1種,亦可併用2種以上。In the above hydrolysis and condensation steps, a suitable organic solvent may be used in addition to water. Specific examples of the organic solvent include alcohols, ketones, esters, (cyclo)alkanes, ethers, and aromatic hydrocarbons. The organic solvent may be used alone or in combination of two or more.

上述水解及縮合步驟中之反應溫度並無特別限定,較佳為0℃以上,且較佳為100℃以下,更佳為70℃以下。上述水解及縮合步驟中之反應時間並無特別限定,較佳為30分鐘以上,且較佳為100小時以下。The reaction temperature in the hydrolysis and condensation steps is not particularly limited, but is preferably 0 ° C or higher, and preferably 100 ° C or lower, more preferably 70 ° C or lower. The reaction time in the hydrolysis and condensation steps is not particularly limited, but is preferably 30 minutes or longer, and preferably 100 hours or shorter.

上述有機無機複合粒子之製造方法較佳為具備如下步驟:使表面具有第1反應性官能基之複數個無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷進行反應,而獲得上述無機粒子之集合體。於該步驟中,較佳為使複數個上述無機粒子經由來自上述含烷氧基之有機聚矽氧烷之構造而一體化。較佳為使複數個無機粒子經由來自含烷氧基之有機聚矽氧烷之構造(構造部)而一體化,獲得無機粒子之集合體。The method for producing the organic-inorganic composite particles preferably includes the steps of: a plurality of inorganic particles having a first reactive functional group on the surface; and a second reactive functional group capable of reacting with the first reactive functional group. The alkoxy-containing organopolyoxane is reacted to obtain an aggregate of the above inorganic particles. In this step, it is preferred that a plurality of the above inorganic particles are integrated via a structure derived from the alkoxy group-containing organic polyoxyalkylene. It is preferred that a plurality of inorganic particles are integrated via a structure (structure portion) derived from an alkoxy group-containing organic polyoxyalkylene to obtain an aggregate of inorganic particles.

例如,亦可於容器內,於使水與含有上述含烷氧基之有機聚矽氧烷之上述矽烷化合物之層分離之狀態下、或於使含有水及上述矽烷化合物之層與含有上述含烷氧基之有機聚矽氧烷之層分離之狀態下,使矽烷化合物進行水解及縮合,而獲得無機粒子,使上述含烷氧基之有機聚矽氧烷附著及析出於所獲得之無機粒子之表面,使表面具有第1反應性官能基之複數個無機粒子與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷進行反應,而獲得上述無機粒子之集合體。For example, in a state in which water is separated from a layer containing the above-described decane compound containing an alkoxy group-containing organopolyoxane, or a layer containing water and the above decane compound is contained, In the state in which the layer of the alkoxy group of the polyorganosiloxane is separated, the decane compound is hydrolyzed and condensed to obtain inorganic particles, and the alkoxy group-containing organopolyoxane is attached and precipitated to obtain the obtained inorganic particles. On the surface, a plurality of inorganic particles having a first reactive functional group on the surface are reacted with an alkoxy-containing organic polyoxyalkylene having a second reactive functional group reactive with the first reactive functional group. And an aggregate of the above inorganic particles is obtained.

(有機無機複合粒子之用途)(Use of organic-inorganic composite particles)

上述有機無機複合粒子之用途並無特別限定。上述有機無機複合粒子可較佳地用於要求破裂荷重較高之各種用途。上述有機無機複合粒子較佳為用於電子零件。上述有機無機複合粒子較佳為電子零件用有機無機複合粒子。The use of the above organic-inorganic composite particles is not particularly limited. The above organic-inorganic composite particles can be preferably used for various applications requiring a high breaking load. The above organic-inorganic composite particles are preferably used for electronic parts. The organic-inorganic composite particles are preferably organic-inorganic composite particles for electronic parts.

上述有機無機複合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,或用作液晶顯示元件用間隔物。上述有機無機複合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子。上述有機無機複合粒子較佳為用作液晶顯示元件用間隔物。由於上述有機無機複合粒子之破裂荷重較高,故而於將上述有機無機複合粒子用作液晶顯示元件用間隔物而配置於基板間、或於表面形成導電層而用作導電性粒子而將電極間電性連接之情形時,液晶顯示元件用間隔物或導電性粒子不易破裂、且不易損傷。尤其於對使用上述液晶顯示元件用間隔物之液晶顯示元件及使用上述導電性粒子之連接構造體施加衝擊時,液晶顯示元件用間隔物及導電性粒子不易破裂、且不易損傷。The organic-inorganic composite particles are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer, or to be used as a spacer for a liquid crystal display element. The organic-inorganic composite particles are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer. The organic-inorganic composite particles are preferably used as a spacer for a liquid crystal display element. Since the organic-inorganic composite particles have a high breaking load, the organic-inorganic composite particles are disposed between the substrates as spacers for liquid crystal display elements, or a conductive layer is formed on the surface to serve as conductive particles, and the electrodes are interposed between the electrodes. In the case of electrical connection, the spacer for the liquid crystal display element or the conductive particles is less likely to be broken and is not easily damaged. In particular, when an impact is applied to the liquid crystal display device using the spacer for a liquid crystal display element and the connection structure using the conductive particles, the spacer for the liquid crystal display element and the conductive particles are less likely to be broken and are less likely to be damaged.

進而,上述有機無機複合粒子可較佳地用作衝擊吸收劑或振動吸收劑。例如,作為橡膠或彈簧等之代替品,可使用上述有機無機複合粒子。Further, the above organic-inorganic composite particles can be preferably used as an impact absorber or a vibration absorber. For example, as the substitute for rubber or a spring or the like, the above-described organic-inorganic composite particles can be used.

圖2中,以剖面圖模式性地表示使用圖1所示之有機無機複合粒子之導電性粒子。In Fig. 2, conductive particles using the organic-inorganic composite particles shown in Fig. 1 are schematically shown in a cross-sectional view.

圖2所示之導電性粒子21具有:有機無機複合粒子1、與配置於有機無機複合粒子1之表面上之導電層31A。The conductive particles 21 shown in FIG. 2 have an organic-inorganic composite particle 1 and a conductive layer 31A disposed on the surface of the organic-inorganic composite particle 1.

導電層31A被覆有機無機複合粒子1之表面。導電性粒子21係由導電層31A被覆有機無機複合粒子1之表面而成的被覆粒子。The conductive layer 31A covers the surface of the organic-inorganic composite particle 1. The conductive particles 21 are coated particles in which the surface of the organic-inorganic composite particles 1 is coated with the conductive layer 31A.

圖3中,以剖面圖模式性地表示使用圖1所示之有機無機複合粒 子之導電性粒子之變化例。In Fig. 3, the organic-inorganic composite particles shown in Fig. 1 are schematically shown in a sectional view. Examples of changes in the conductive particles of the child.

圖3所示之導電性粒子22具有:有機無機複合粒子1、導電層31B、複數個芯物質32、以及複數個絕緣性物質33。The conductive particles 22 shown in FIG. 3 have an organic-inorganic composite particle 1, a conductive layer 31B, a plurality of core materials 32, and a plurality of insulating substances 33.

導電層31B係配置於有機無機複合粒子1之表面上。導電層31B具有作為內層之第1導電層31Ba與作為外層之第2導電層31Bb。有機無機複合粒子1之表面上配置有第1導電層31Ba。第1導電層31Ba之表面上配置有第2導電層31Bb。The conductive layer 31B is disposed on the surface of the organic-inorganic composite particle 1. The conductive layer 31B has a first conductive layer 31Ba as an inner layer and a second conductive layer 31Bb as an outer layer. The first conductive layer 31Ba is disposed on the surface of the organic-inorganic composite particles 1. The second conductive layer 31Bb is disposed on the surface of the first conductive layer 31Ba.

導電性粒子22於導電性之表面具有複數個突起。導電層31B及第2導電層31Bb於外表面具有複數個突起。如此,上述導電性粒子可於導電性粒子之導電性之表面具有突起,亦可於導電層及第2導電層之外表面具有突起。複數個芯物質32配置於有機無機複合粒子1之表面上。複數個芯物質32被嵌入導電層31B內。芯物質32係配置於導電性粒子22及導電層31B之突起之內側。導電層31B被覆複數個芯物質32。導電層31B之外表面藉由複數個芯物質32而隆起,形成突起。The conductive particles 22 have a plurality of protrusions on the surface of the conductivity. The conductive layer 31B and the second conductive layer 31Bb have a plurality of protrusions on the outer surface. As described above, the conductive particles may have protrusions on the surface of the conductive particles and may have protrusions on the outer surfaces of the conductive layer and the second conductive layer. A plurality of core materials 32 are disposed on the surface of the organic-inorganic composite particles 1. A plurality of core materials 32 are embedded in the conductive layer 31B. The core material 32 is disposed inside the protrusions of the conductive particles 22 and the conductive layer 31B. The conductive layer 31B is coated with a plurality of core materials 32. The outer surface of the conductive layer 31B is embossed by a plurality of core materials 32 to form protrusions.

導電性粒子22具有配置於導電層31B之外表面上之絕緣性物質33。導電層31B之外表面之至少一部分區域由絕緣性物質33被覆。絕緣性物質33係由具有絕緣性之材料形成,為絕緣性粒子。如此,上述導電性粒子亦可具有配置於導電層之外表面上之絕緣性物質。The conductive particles 22 have an insulating material 33 disposed on the outer surface of the conductive layer 31B. At least a part of the outer surface of the conductive layer 31B is covered with the insulating material 33. The insulating material 33 is formed of an insulating material and is an insulating particle. As described above, the conductive particles may have an insulating material disposed on the outer surface of the conductive layer.

用以形成上述導電層之金屬並無特別限定。作為該金屬,例如可列舉:金、銀、鈀、銅、鉑、鋅、鐵、錫、鉛、鋁、鈷、銦、鎳、鉻、鈦、銻、鉍、鉈、鍺、鎘、矽及該等之合金等。又,作為上述金屬,可列舉摻錫氧化銦(ITO)及焊料等。其中,由於可更進一步降低電極間之連接電阻,故而較佳為含錫之合金、鎳、鈀、銅或金,較佳為鎳或鈀。The metal for forming the above conductive layer is not particularly limited. Examples of the metal include gold, silver, palladium, copper, platinum, zinc, iron, tin, lead, aluminum, cobalt, indium, nickel, chromium, titanium, ruthenium, osmium, iridium, osmium, cadmium, iridium and Such alloys and the like. Further, examples of the metal include tin-doped indium oxide (ITO), solder, and the like. Among them, an alloy containing tin, nickel, palladium, copper or gold is preferable since nickel-palladium is preferable because the connection resistance between the electrodes can be further lowered.

如導電性粒子21般,上述導電層可由1層形成。如導電性粒子22般,導電層亦可由複數層形成。即,導電層亦可具有2層以上之積層 構造。於導電層由複數層形成之情形時,最外層較佳為金層、鎳層、鈀層、銅層或含有錫與銀之合金層,更佳為金層。於最外層為該等較佳之導電層之情形時,電極間之連接電阻更進一步降低。又,於最外層為金層之情形時,耐腐蝕性更進一步提高。Like the conductive particles 21, the above conductive layer may be formed of one layer. Like the conductive particles 22, the conductive layer may be formed of a plurality of layers. That is, the conductive layer may have a laminate of two or more layers. structure. In the case where the conductive layer is formed of a plurality of layers, the outermost layer is preferably a gold layer, a nickel layer, a palladium layer, a copper layer or an alloy layer containing tin and silver, more preferably a gold layer. In the case where the outermost layer is the preferred conductive layer, the connection resistance between the electrodes is further reduced. Moreover, when the outermost layer is a gold layer, the corrosion resistance is further improved.

於上述有機無機複合粒子之表面形成導電層之方法並無特別限定。作為形成導電層之方法,例如可列舉:利用無電電鍍之方法、利用電鍍之方法、利用物理蒸鍍之方法、及將金屬粉末或含有金屬粉末與黏合劑之膏塗佈於有機無機複合粒子之表面之方法等。其中,就導電層之形成較為簡便方面而言,較佳為利用無電電鍍之方法。作為上述利用物理蒸鍍之方法,可列舉:真空蒸鍍、離子鍍著及離子濺鍍等方法。The method of forming the conductive layer on the surface of the above-described organic-inorganic composite particles is not particularly limited. Examples of the method of forming the conductive layer include a method using electroless plating, a method using electroplating, a method using physical vapor deposition, and a method of applying a metal powder or a paste containing a metal powder and a binder to an organic-inorganic composite particle. Surface method, etc. Among them, in terms of the ease of formation of the conductive layer, it is preferred to use a method of electroless plating. Examples of the method using physical vapor deposition include vacuum deposition, ion plating, and ion sputtering.

上述導電性粒子之粒徑較佳為0.1μm以上,更佳為0.5μm以上,進而較佳為1μm以上,較佳為520μm以下,更佳為500μm以下,更進一步較佳為100μm以下,進而較佳為50μm以下,尤佳為20μm以下。若導電性粒子之粒徑為上述下限以上及上述上限以下,則於使用導電性粒子連接電極間之情形,導電性粒子與電極之接觸面積充分增大,且形成導電層時不易形成凝聚之導電性粒子。又,經由導電性粒子所連接之電極間之間隔不過度增大,且導電層不易自有機無機複合粒子之表面剝離。又,若導電性粒子之粒徑為上述下限以上及上述上限以下,則可將導電性粒子較佳地用於導電材料之用途。The particle diameter of the conductive particles is preferably 0.1 μm or more, more preferably 0.5 μm or more, further preferably 1 μm or more, more preferably 520 μm or less, still more preferably 500 μm or less, still more preferably 100 μm or less, and further It is preferably 50 μm or less, and particularly preferably 20 μm or less. When the particle diameter of the conductive particles is not less than the above lower limit and not more than the above upper limit, the contact area between the conductive particles and the electrode is sufficiently increased when the conductive particles are connected between the electrodes, and the conductive layer is less likely to form when the conductive layer is formed. Sex particles. Moreover, the interval between the electrodes connected via the conductive particles does not excessively increase, and the conductive layer is less likely to be peeled off from the surface of the organic-inorganic composite particles. Further, when the particle diameter of the conductive particles is not less than the above lower limit and not more than the above upper limit, the conductive particles can be preferably used for the use of the conductive material.

關於上述導電性粒子之粒徑,於導電性粒子為圓球狀之情形時表示直徑,於導電性粒子為除圓球狀以外之形狀之情形時表示最大徑。The particle diameter of the above-mentioned conductive particles indicates a diameter when the conductive particles are in a spherical shape, and indicates a maximum diameter when the conductive particles have a shape other than a spherical shape.

上述導電層之厚度(於導電層為多層之情形時為導電層整體之厚度)較佳為0.005μm以上,更佳為0.01μm以上,較佳為10μm以下,更佳為1μm以下,進而較佳為0.3μm以下。若導電層之厚度為上述下限 以上及上述上限以下,則可獲得充分之導電性,且導電性粒子不過度變硬,於連接電極間時導電性粒子充分地變形。The thickness of the conductive layer (the thickness of the entire conductive layer when the conductive layer is a plurality of layers) is preferably 0.005 μm or more, more preferably 0.01 μm or more, more preferably 10 μm or less, still more preferably 1 μm or less, and further preferably It is 0.3 μm or less. If the thickness of the conductive layer is the above lower limit Above the above and below the above upper limit, sufficient conductivity can be obtained, and the conductive particles are not excessively hardened, and the conductive particles are sufficiently deformed when the electrodes are connected.

於上述導電層由複數層形成之情形時,最外層之導電層之厚度較佳為0.001μm以上,更佳為0.01μm以上,較佳為0.5μm以下,更佳為0.1μm以下。若上述最外層之導電層之厚度為上述下限以上及上述上限以下,則最外層之導電層之被覆變得均勻,耐腐蝕性充分提高,且電極間之連接電阻更進一步降低。又,上述最外層為金層之情形,金層之厚度越薄,成本越低。When the conductive layer is formed of a plurality of layers, the thickness of the outermost conductive layer is preferably 0.001 μm or more, more preferably 0.01 μm or more, more preferably 0.5 μm or less, still more preferably 0.1 μm or less. When the thickness of the outermost conductive layer is not less than the above lower limit and not more than the above upper limit, the coating of the outermost conductive layer becomes uniform, the corrosion resistance is sufficiently improved, and the connection resistance between the electrodes is further lowered. Further, in the case where the outermost layer is a gold layer, the thinner the thickness of the gold layer, the lower the cost.

上述導電層之厚度可藉由使用例如穿透式電子顯微鏡(TEM)觀察導電性粒子之剖面而進行測定。The thickness of the above conductive layer can be measured by observing a cross section of the conductive particles using, for example, a transmission electron microscope (TEM).

上述導電性粒子亦可於上述導電層之外表面具有突起。該突起較佳為複數。於藉由導電性粒子而連接之電極之表面形成有氧化被膜之情況較多。於使用具有突起之導電性粒子之情形,藉由在電極間配置導電性粒子並壓接,可藉由突起有效地去除上述氧化被膜。因此,可使電極與導電性粒子之導電層更進一步確實地接觸,可降低電極間之連接電阻。進而,於導電性粒子在表面具備絕緣性物質之情形時,或於使導電性粒子分散於黏合劑樹脂中而用作導電材料之情形時,藉由導電性粒子之突起,可有效地去除導電性粒子與電極之間之絕緣性物質或黏合劑樹脂。因此,可提高電極間之導通可靠性。The conductive particles may have protrusions on the outer surface of the conductive layer. The protrusions are preferably plural. The oxide film is often formed on the surface of the electrode connected by the conductive particles. In the case of using conductive particles having protrusions, by disposing conductive particles between the electrodes and pressing them, the oxide film can be effectively removed by the protrusions. Therefore, the electrode and the conductive layer of the conductive particles can be brought into further firm contact, and the connection resistance between the electrodes can be reduced. Further, when the conductive particles have an insulating material on the surface, or when the conductive particles are dispersed in the binder resin and used as a conductive material, the conductive particles can be effectively removed by the protrusions of the conductive particles. An insulating substance or a binder resin between the particles and the electrode. Therefore, the conduction reliability between the electrodes can be improved.

作為於上述導電性粒子之表面形成突起之方法,可列舉:使芯物質附著於有機無機複合粒子之表面後利用無電電鍍形成導電層之方法,及於有機無機複合粒子之表面利用無電電鍍形成導電層後,使芯物質附著,進而利用無電電鍍形成導電層之方法等。又,為了形成突起,亦可不使用上述芯物質。The method of forming a protrusion on the surface of the conductive particle includes a method of forming a conductive layer by electroless plating after attaching a core substance to a surface of the organic-inorganic composite particle, and forming a conductive layer by electroless plating on the surface of the organic-inorganic composite particle. After the layer, a core material is adhered, and a method of forming a conductive layer by electroless plating is used. Moreover, in order to form a protrusion, the above-mentioned core substance may not be used.

上述導電性粒子亦可具備配置於上述導電層之外表面上之絕緣性物質。於該情形,若將導電性粒子用於電極間之連接,則可防止鄰 接之電極間之短路。具體而言,複數個導電性粒子接觸時,複數個電極間存在絕緣性物質,故而不僅可防止上下之電極間之短路,亦可防止橫向比鄰之電極間之短路。再者,藉由在電極間連接時以2個電極對導電性粒子進行加壓,可容易地去除導電性粒子之導電層與電極之間之絕緣性物質。於導電性粒子在上述導電層之表面具有突起之情形時,可更進一步容易地去除導電性粒子之導電層與電極之間之絕緣性物質。上述絕緣性物質較佳為絕緣性樹脂層或絕緣性粒子,更佳為絕緣性粒子。上述絕緣性粒子較佳為絕緣性樹脂粒子。The conductive particles may further include an insulating material disposed on the outer surface of the conductive layer. In this case, if conductive particles are used for the connection between the electrodes, the neighbors can be prevented. A short circuit between the electrodes. Specifically, when a plurality of conductive particles are in contact with each other, an insulating material is present between the plurality of electrodes, so that not only short-circuiting between the electrodes above and below but also short-circuiting between adjacent electrodes can be prevented. Further, when the conductive particles are pressurized by two electrodes when the electrodes are connected, the insulating material between the conductive layers of the conductive particles and the electrodes can be easily removed. When the conductive particles have protrusions on the surface of the conductive layer, the insulating material between the conductive layer of the conductive particles and the electrode can be more easily removed. The insulating material is preferably an insulating resin layer or insulating particles, and more preferably insulating particles. The insulating particles are preferably insulating resin particles.

(導電材料)(conductive material)

上述導電材料含有上述導電性粒子與黏合劑樹脂。上述導電性粒子較佳為分散於黏合劑樹脂中而被用作導電材料。上述導電材料較佳為各向異性導電材料。上述導電材料較佳為電路連接用導電材料。The conductive material contains the conductive particles and the binder resin. The conductive particles are preferably dispersed in a binder resin and used as a conductive material. The above conductive material is preferably an anisotropic conductive material. The above conductive material is preferably a conductive material for circuit connection.

上述黏合劑樹脂並無特別限定。作為上述黏合劑樹脂,可使用公知之絕緣性之樹脂。作為上述黏合劑樹脂,例如可列舉:乙烯系樹脂、熱塑性樹脂、硬化性樹脂、熱塑性嵌段共聚物及彈性體等。上述黏合劑樹脂可僅使用1種,亦可併用2種以上。The above binder resin is not particularly limited. As the above binder resin, a known insulating resin can be used. Examples of the binder resin include an ethylene resin, a thermoplastic resin, a curable resin, a thermoplastic block copolymer, and an elastomer. The binder resin may be used alone or in combination of two or more.

作為上述乙烯樹脂,例如可列舉:乙酸乙烯酯樹脂、丙烯酸系樹脂及苯乙烯樹脂等。作為上述熱塑性樹脂,例如可列舉:聚烯烴樹脂、乙烯-乙酸乙烯酯共聚物及聚醯胺樹脂等。作為上述硬化性樹脂,例如可列舉:環氧樹脂、胺基甲酸酯樹脂、聚醯亞胺樹脂及不飽和聚酯樹脂等。再者,上述硬化性樹脂亦可為常溫硬化型樹脂、熱硬化型樹脂、光硬化型樹脂或濕氣硬化型樹脂。上述硬化性樹脂亦可與硬化劑併用。作為上述熱塑性嵌段共聚物,例如可列舉:苯乙烯-丁二烯-苯乙烯嵌段共聚物、苯乙烯-異戊二烯-苯乙烯嵌段共聚物、苯乙烯-丁二烯-苯乙烯嵌段共聚物之氫化物、及苯乙烯-異戊二烯-苯乙烯嵌段共聚物之氫化物等。作為上述彈性體,例如可列舉:苯乙烯-丁 二烯共聚橡膠、及丙烯腈-苯乙烯嵌段共聚橡膠等。Examples of the vinyl resin include a vinyl acetate resin, an acrylic resin, and a styrene resin. Examples of the thermoplastic resin include a polyolefin resin, an ethylene-vinyl acetate copolymer, and a polyamide resin. Examples of the curable resin include an epoxy resin, a urethane resin, a polyimide resin, and an unsaturated polyester resin. Further, the curable resin may be a room temperature curing resin, a thermosetting resin, a photocurable resin or a moisture curing resin. The curable resin may be used in combination with a curing agent. Examples of the above thermoplastic block copolymer include a styrene-butadiene-styrene block copolymer, a styrene-isoprene-styrene block copolymer, and a styrene-butadiene-styrene. a hydride of a block copolymer, a hydride of a styrene-isoprene-styrene block copolymer, and the like. As the above elastomer, for example, styrene-butyl A diene copolymer rubber, an acrylonitrile-styrene block copolymer rubber, or the like.

上述導電材料除上述導電性粒子及上述黏合劑樹脂以外,例如亦可含有:填充劑、增量劑、軟化劑、塑化劑、聚合觸媒、硬化觸媒、著色劑、抗氧化劑、熱穩定劑、光穩定劑、紫外線吸收劑、潤滑劑、抗靜電劑及阻燃劑等各種添加劑。The conductive material may contain, in addition to the conductive particles and the binder resin, a filler, a bulking agent, a softener, a plasticizer, a polymerization catalyst, a curing catalyst, a colorant, an antioxidant, and a heat stabilization. Various additives such as agents, light stabilizers, ultraviolet absorbers, lubricants, antistatic agents and flame retardants.

關於使上述導電性粒子分散於上述黏合劑樹脂中之方法,可使用先前公知之分散方法,並無特別限定。作為使上述導電性粒子分散於上述黏合劑樹脂中之方法,例如可列舉:向上述黏合劑樹脂中添加上述導電性粒子後,利用行星混合機等進行混練使之分散之方法,使用均化器等使上述導電性粒子均勻分散於水或有機溶劑中後,添加至上述黏合劑樹脂中,利用行星混合機等進行混練使之分散之方法,及將上述黏合劑樹脂以水或有機溶劑等進行稀釋後,添加上述導電性粒子,利用行星混合機等進行混練使之分散之方法等。A conventionally known dispersion method can be used as the method of dispersing the above-mentioned conductive particles in the above-mentioned binder resin, and is not particularly limited. In the method of dispersing the above-mentioned conductive particles in the above-mentioned binder resin, for example, a method in which the conductive particles are added to the binder resin and then kneaded by a planetary mixer or the like is used, and a homogenizer is used. After the conductive particles are uniformly dispersed in water or an organic solvent, they are added to the binder resin, and the mixture is kneaded by a planetary mixer or the like, and the binder resin is water or an organic solvent. After the dilution, the conductive particles are added and mixed by a planetary mixer or the like to disperse the particles.

上述導電材料可用作導電膏及導電膜等。於將本發明之導電材料用作導電膜之情形,亦可對含有該導電性粒子之導電膜積層不含導電性粒子之膜。上述導電膏較佳為各向異性導電膏。上述導電膜較佳為各向異性導電膜。The above conductive material can be used as a conductive paste, a conductive film, or the like. In the case where the conductive material of the present invention is used as a conductive film, a film containing conductive particles may be laminated on the conductive film containing the conductive particles. The above conductive paste is preferably an anisotropic conductive paste. The above conductive film is preferably an anisotropic conductive film.

上述導電材料100重量%中,上述黏合劑樹脂之含量較佳為10重量%以上,更佳為30重量%以上,進而較佳為50重量%以上,尤佳為70重量%以上,較佳為99.99重量%以下,更佳為99.9重量%以下。若上述黏合劑樹脂之含量為上述下限以上及上述上限以下,則導電性粒子有效率地配置於電極間,由導電材料所連接之連接對象構件之連接可靠性更進一步提高。The content of the binder resin in 100% by weight of the conductive material is preferably 10% by weight or more, more preferably 30% by weight or more, still more preferably 50% by weight or more, and particularly preferably 70% by weight or more. 99.99% by weight or less, more preferably 99.9% by weight or less. When the content of the binder resin is not less than the above lower limit and not more than the above upper limit, the conductive particles are efficiently disposed between the electrodes, and the connection reliability of the member to be joined connected by the conductive material is further improved.

上述導電材料100重量%中,上述導電性粒子之含量較佳為0.01重量%以上,更佳為0.1重量%以上,較佳為40重量%以下,更佳為20重量%以下,進而較佳為10重量%以下。若上述導電性粒子之含量為 上述下限以上及上述上限以下,則電極間之導通可靠性更進一步提高。The content of the conductive particles in 100% by weight of the conductive material is preferably 0.01% by weight or more, more preferably 0.1% by weight or more, more preferably 40% by weight or less, still more preferably 20% by weight or less, and still more preferably 10% by weight or less. If the content of the above conductive particles is When the lower limit is equal to or higher than the above upper limit, the conduction reliability between the electrodes is further improved.

(連接構造體及液晶顯示元件)(connection structure and liquid crystal display element)

使用上述導電性粒子、或使用包含上述導電性粒子與黏合劑樹脂之導電材料連接連接對象構件,藉此可獲得連接構造體。The connection structure can be obtained by connecting the connection member using the conductive particles or a conductive material containing the conductive particles and the binder resin.

上述連接構造體較佳為如下者:其具備第1連接對象構件、第2連接對象構件、及連接第1連接對象構件與第2連接對象構件之連接部,且該連接部由上述導電性粒子形成、或由包含上述導電性粒子與黏合劑樹脂之導電材料形成。於單獨使用導電性粒子之情形時,連接部本身為導電性粒子。即,第1、第2連接對象構件由導電性粒子連接。用以獲得上述連接構造體之上述導電材料較佳為各向異性導電材料。Preferably, the connection structure includes a first connection target member, a second connection target member, and a connection portion that connects the first connection target member and the second connection target member, and the connection portion is made of the conductive particles. It is formed or formed of a conductive material containing the above conductive particles and a binder resin. In the case where the conductive particles are used alone, the connecting portion itself is a conductive particle. In other words, the first and second connection target members are connected by conductive particles. The above conductive material for obtaining the above-mentioned connection structure is preferably an anisotropic conductive material.

上述第1連接對象構件較佳為表面具有第1電極。上述第2連接對象構件較佳為表面具有第2電極。較佳為上述第1電極與上述第2電極由上述導電性粒子而電性連接。Preferably, the first connection target member has a first electrode on its surface. Preferably, the second connection target member has a second electrode on its surface. Preferably, the first electrode and the second electrode are electrically connected by the conductive particles.

圖4係模式性地表示使用圖2所示之導電性粒子21之連接構造體之剖面圖。Fig. 4 is a cross-sectional view schematically showing a connection structure using the conductive particles 21 shown in Fig. 2 .

圖4所示之連接構造體51具備:第1連接對象構件52、第2連接對象構件53、以及連接第1連接對象構件52與第2連接對象構件53之連接部54。連接部54由包含導電性粒子21與黏合劑樹脂之導電材料形成。圖4中,為了便於圖示,示意性地表示導電性粒子21。除導電性粒子21以外,亦可使用導電性粒子22等其他導電性粒子。The connection structure 51 shown in FIG. 4 includes a first connection target member 52, a second connection object member 53, and a connection portion 54 that connects the first connection object member 52 and the second connection object member 53. The connecting portion 54 is formed of a conductive material containing conductive particles 21 and a binder resin. In FIG. 4, the electroconductive particle 21 is shown typically for convenience of illustration. Other conductive particles such as the conductive particles 22 may be used in addition to the conductive particles 21.

第1連接對象構件52於表面(上表面)具有複數個第1電極52a。第2連接對象構件53於表面(下表面)具有複數個第2電極53a。第1電極52a與第2電極53a由1個或複數個導電性粒子1電性連接。因此,第1、第2連接對象構件52、53由導電性粒子21電性連接。The first connection target member 52 has a plurality of first electrodes 52a on the front surface (upper surface). The second connection target member 53 has a plurality of second electrodes 53a on the front surface (lower surface). The first electrode 52a and the second electrode 53a are electrically connected to one or a plurality of conductive particles 1. Therefore, the first and second connection object members 52 and 53 are electrically connected by the conductive particles 21 .

上述連接構造體之製造方法並無特別限定。作為連接構造體之製造方法之一例,可列舉:於第1連接對象構件與第2連接對象構件之間配置上述導電材料而獲得積層體後,對該積層體加熱及加壓之方法等。上述加壓之壓力為9.8×104 ~4.9×106 Pa左右。上述加熱之溫度為120~220℃左右。用以連接撓性印刷基板之電極、配置於樹脂膜上之電極及觸控面板之電極的上述加壓之壓力為9.8×104 ~1.0×106 Pa左右。The method for producing the above-described connection structure is not particularly limited. An example of the method of manufacturing the connection structure is a method in which the conductive material is placed between the first connection target member and the second connection target member to obtain a laminate, and the laminate is heated and pressurized. The pressure of the above pressurization is about 9.8 × 10 4 to 4.9 × 10 6 Pa. The heating temperature is about 120 to 220 °C. The pressing pressure of the electrode for connecting the flexible printed circuit board, the electrode disposed on the resin film, and the electrode of the touch panel is about 9.8×10 4 to 1.0×10 6 Pa.

作為上述連接對象構件,具體而言,可列舉:半導體晶片、電容器及二極體等電子零件、及印刷基板、撓性印刷基板、玻璃環氧基板及玻璃基板等電路基板等電子零件等。上述導電材料較佳為用以連接電子零件之導電材料。上述導電膏較佳為膏狀之導電材料,並以膏狀之狀態塗敷於連接對象構件上。Specific examples of the connection target member include electronic components such as a semiconductor wafer, a capacitor, and a diode, and electronic components such as a printed circuit board, a flexible printed circuit board, and a circuit board such as a glass epoxy substrate and a glass substrate. The conductive material is preferably a conductive material for connecting electronic components. The conductive paste is preferably a paste-like conductive material and is applied to the member to be joined in a paste state.

上述導電性粒子及上述導電材料亦可較佳地用於觸控面板。因此,上述連接對象構件亦較佳為撓性印刷基板、或樹脂膜之表面上配置有電極之連接對象構件。上述連接對象構件較佳為撓性印刷基板,較佳為樹脂膜之表面上配置有電極之連接對象構件。上述撓性印刷基板通常表面具有電極。The conductive particles and the conductive material described above can also be preferably used for a touch panel. Therefore, the connection target member is preferably a flexible printed circuit board or a connection target member in which an electrode is disposed on the surface of the resin film. The connection target member is preferably a flexible printed circuit board, and is preferably a connection target member in which an electrode is disposed on the surface of the resin film. The above flexible printed substrate usually has electrodes on its surface.

作為設置於上述連接對象構件之電極,可列舉:金電極、鎳電極、錫電極、鋁電極、銅電極、鉬電極及鎢電極等金屬電極。於上述連接對象構件為撓性印刷基板之情形時,上述電極較佳為金電極、鎳電極、錫電極或銅電極。於上述連接對象構件為玻璃基板之情形時,上述電極較佳為鋁電極、銅電極、鉬電極或鎢電極。再者,於上述電極為鋁電極之情形時,可為僅以鋁所形成之電極,亦可為金屬氧化物層之表面積層有鋁層之電極。作為上述金屬氧化物層之材料,可列舉摻雜有三價金屬元素之氧化銦及摻雜有三價金屬元素之氧化鋅等。作為上述三價金屬元素,可列舉:Sn、Al及Ga等。Examples of the electrode provided in the connection target member include metal electrodes such as a gold electrode, a nickel electrode, a tin electrode, an aluminum electrode, a copper electrode, a molybdenum electrode, and a tungsten electrode. In the case where the connection target member is a flexible printed circuit board, the electrode is preferably a gold electrode, a nickel electrode, a tin electrode or a copper electrode. In the case where the connection target member is a glass substrate, the electrode is preferably an aluminum electrode, a copper electrode, a molybdenum electrode or a tungsten electrode. Further, in the case where the electrode is an aluminum electrode, it may be an electrode formed only of aluminum, or an electrode having an aluminum layer on the surface layer of the metal oxide layer. Examples of the material of the metal oxide layer include indium oxide doped with a trivalent metal element and zinc oxide doped with a trivalent metal element. Examples of the trivalent metal element include Sn, Al, Ga, and the like.

又,上述有機無機複合粒子可較佳地用作液晶顯示元件用間隔物。即,上述有機無機複合粒子可較佳地用以獲得具備構成液晶單元之一對基板、封入於該一對基板間之液晶、以及配置於上述一對基板間之液晶顯示元件用間隔物之液晶顯示元件。Moreover, the above-mentioned organic-inorganic composite particles can be preferably used as a spacer for a liquid crystal display element. In other words, the organic-inorganic composite particles can be preferably used to obtain a liquid crystal including a liquid crystal cell, a liquid crystal sealed between the pair of substrates, and a liquid crystal display element spacer disposed between the pair of substrates. Display component.

圖5中,以剖面圖表示將本發明之一實施形態之有機無機複合粒子用作液晶顯示元件用間隔物之液晶顯示元件。In Fig. 5, a liquid crystal display element in which an organic-inorganic composite particle according to an embodiment of the present invention is used as a spacer for a liquid crystal display element is shown in a cross-sectional view.

圖5中所示之液晶顯示元件81具有一對透明玻璃基板82。透明玻璃基板82於對向之面具有絕緣膜(未圖示)。作為絕緣膜之材料,例如可列舉SiO2 等。透明玻璃基板82中之絕緣膜上形成有透明電極83。作為透明電極83之材料,可列舉ITO等。透明電極83例如可藉由光微影法進行圖案化而形成。透明玻璃基板82之表面上之透明電極83上形成有配向膜84。作為配向膜84之材料,可列舉聚醯亞胺等。The liquid crystal display element 81 shown in FIG. 5 has a pair of transparent glass substrates 82. The transparent glass substrate 82 has an insulating film (not shown) on the opposite surface. Examples of the material of the insulating film include SiO 2 and the like. A transparent electrode 83 is formed on the insulating film in the transparent glass substrate 82. As a material of the transparent electrode 83, ITO etc. are mentioned. The transparent electrode 83 can be formed, for example, by patterning by photolithography. An alignment film 84 is formed on the transparent electrode 83 on the surface of the transparent glass substrate 82. The material of the alignment film 84 is, for example, polyimine.

一對透明玻璃基板82間封入有液晶85。一對透明玻璃基板82間配置有複數個有機無機複合粒子1。有機無機複合粒子1可用作液晶顯示元件用間隔物。藉由複數個有機無機複合粒子1,可限制一對透明玻璃基板82之間隔。一對透明玻璃基板82之邊緣部間配置有密封劑86。藉由密封劑86,防止液晶85向外部流出。於圖5中,為了方便圖示,示意性地表示有機無機複合粒子1。除有機無機複合粒子1以外,亦可使用其他有機無機複合粒子。The liquid crystal 85 is sealed between the pair of transparent glass substrates 82. A plurality of organic-inorganic composite particles 1 are disposed between the pair of transparent glass substrates 82. The organic-inorganic composite particles 1 can be used as a spacer for a liquid crystal display element. The interval between the pair of transparent glass substrates 82 can be restricted by the plurality of organic-inorganic composite particles 1. A sealant 86 is disposed between the edge portions of the pair of transparent glass substrates 82. The liquid crystal 85 is prevented from flowing out to the outside by the sealant 86. In FIG. 5, the organic-inorganic composite particles 1 are schematically shown for convenience of illustration. Other organic-inorganic composite particles may be used in addition to the organic-inorganic composite particles 1.

於上述液晶顯示元件中,每1mm2 之液晶顯示元件用間隔物之配置密度較佳為10個/mm2 以上,且較佳為1000個/mm2 以下。若上述配置密度為10個/mm2 以上,則單元間隙變得更均勻。若上述配置密度為1000個/mm2 以下,則液晶顯示元件之對比度變得更良好。In the liquid crystal display device, the arrangement density of the spacer for liquid crystal display elements per 1 mm 2 is preferably 10 pieces/mm 2 or more, and preferably 1000 pieces/mm 2 or less. If the above-described arrangement density is 10 pieces/mm 2 or more, the cell gap becomes more uniform. When the above arrangement density is 1000/mm 2 or less, the contrast of the liquid crystal display element becomes better.

以下,列舉實施例及比較例具體地說明本發明。本發明並非僅限於以下之實施例。Hereinafter, the present invention will be specifically described by way of examples and comparative examples. The invention is not limited to the following examples.

(實施例1)(Example 1)

向安裝有攪拌機及溫度計之500mL之反應容器內添加0.13重量%之氨水溶液300g。繼而,向反應容器內之氨水溶液中緩慢添加甲基三甲氧基矽烷4.1g、乙烯基三甲氧基矽烷19.2g、以及聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」,具有甲氧基、乙氧基、環氧基、及直接鍵結於矽原子之烷基,重量平均分子量:約1600)0.7g之混合物。一面進行攪拌一面使之進行水解及縮合反應後,添加25重量%氨水溶液2.4mL,其後自氨水溶液中單離粒子,將所獲得之粒子於氧分壓10-17 atm、400℃之條件下焙燒2小時,獲得有機無機複合粒子。將所獲得之有機無機複合粒子之粒徑示於下述之表1。To a 500 mL reaction vessel equipped with a stirrer and a thermometer, 300 g of a 0.13 wt% aqueous ammonia solution was added. Then, 4.1 g of methyltrimethoxydecane, 19.2 g of vinyltrimethoxydecane, and a polyoxyalkyloxyoxyl oligomer (X-manufactured by Shin-Etsu Chemical Co., Ltd.) were slowly added to the aqueous ammonia solution in the reaction vessel. 41-1053", a mixture having a methoxy group, an ethoxy group, an epoxy group, and an alkyl group directly bonded to a halogen atom, and having a weight average molecular weight of about 1600) and 0.7 g. After performing hydrolysis and condensation reaction while stirring, 2.4 mL of a 25 wt% aqueous ammonia solution was added, and then the particles were separated from the aqueous ammonia solution, and the obtained particles were subjected to a partial pressure of oxygen at 10 -17 atm and 400 ° C. The following baking was carried out for 2 hours to obtain organic-inorganic composite particles. The particle diameter of the obtained organic-inorganic composite particles is shown in Table 1 below.

(實施例2)(Example 2)

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為烷氧基低聚物(信越化學工業公司製造之「KR-500」,具有甲氧基與直接鍵結於矽原子之烷基,重量平均分子量:3000~10000),除此以外,以與實施例1相同之方式,獲得有機無機複合粒子。The polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was changed to an alkoxy oligomer ("KR-500" manufactured by Shin-Etsu Chemical Co., Ltd.), having a methoxy group. The organic-inorganic composite particles were obtained in the same manner as in Example 1 except that the alkyl group directly bonded to the ruthenium atom had a weight average molecular weight of 3,000 to 10,000.

(實施例3)(Example 3)

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為聚矽氧低聚物(信越化學工業公司製造之「X-41-1805」,具有甲氧基、乙氧基、及巰基,重量平均分子量:約1800),除此以外,以與實施例1相同之方式,獲得有機無機複合粒子。Poly-alkoxy alkoxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was changed to poly-xyloxy oligomer (X-41-1805) manufactured by Shin-Etsu Chemical Co., Ltd. Organic-inorganic composite particles were obtained in the same manner as in Example 1 except that the oxy group, the ethoxy group, and the fluorenyl group had a weight average molecular weight of about 1800.

(實施例4)(Example 4)

向安裝有攪拌機及溫度計之500mL之反應容器內添加0.13重量%之氨水溶液300g。繼而,向反應容器內之氨水溶液中緩慢添加甲基三甲氧基矽烷4.1g、與乙烯基三甲氧基矽烷19.2g之混合物。一面進行攪拌一面使之進行水解及縮合反應後,添加聚矽氧烷氧基低聚物 (信越化學工業公司製造之「X-41-1053」,具有甲氧基、乙氧基、環氧基、及直接鍵結於矽原子之烷基)0.7g,緩慢攪拌。聚矽氧烷氧基低聚物消失後,添加25重量%氨水溶液2.4mL,其後自氨水溶液單離粒子,將所獲得之粒子於氧分壓10-17 atm、400℃之條件下焙燒2小時,獲得有機無機複合粒子。To a 500 mL reaction vessel equipped with a stirrer and a thermometer, 300 g of a 0.13 wt% aqueous ammonia solution was added. Then, a mixture of 4.1 g of methyltrimethoxydecane and 19.2 g of vinyltrimethoxydecane was slowly added to the aqueous ammonia solution in the reaction vessel. After the hydrolysis and the condensation reaction are carried out while stirring, a polyphosphonium alkoxy oligomer (X-41-1053) manufactured by Shin-Etsu Chemical Co., Ltd. is added, and has a methoxy group, an ethoxy group, and an epoxy group. And 0.7 g directly bonded to the alkyl group of the ruthenium atom, and slowly stirred. After the polyoxyalkyloxy oligomer disappeared, 2.4 mL of a 25 wt% aqueous ammonia solution was added, and then the particles were separated from the aqueous ammonia solution, and the obtained particles were calcined at an oxygen partial pressure of 10 -17 atm at 400 ° C. After 2 hours, organic-inorganic composite particles were obtained.

(實施例5)(Example 5)

向安裝有攪拌機及溫度計之500mL之反應容器內添加0.13重量%之氨水溶液300g。繼而,向反應容器內之氨水溶液中緩慢添加3-甲基丙烯醯氧基丙基三甲氧基矽烷1.9g、甲基三甲氧基矽烷4.1g、乙烯基三甲氧基矽烷17.3g、以及聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」,具有甲氧基、乙氧基、環氧基、及直接鍵結於矽原子之烷基)0.7g之混合物。一面進行攪拌一面使之進行水解及縮合反應後,添加25重量%氨水溶液2.4mL,其後自氨水溶液中單離粒子,將所獲得之粒子於氧分壓10-17 atm、400℃之條件下焙燒2小時,獲得有機無機複合粒子。To a 500 mL reaction vessel equipped with a stirrer and a thermometer, 300 g of a 0.13 wt% aqueous ammonia solution was added. Then, 1.9 g of 3-methylpropenyloxypropyltrimethoxydecane, 4.1 g of methyltrimethoxydecane, 17.3 g of vinyltrimethoxydecane, and polyfluorene were slowly added to the aqueous ammonia solution in the reaction vessel. Oxyalkoxy oligomer (X-41-1053, manufactured by Shin-Etsu Chemical Co., Ltd., a mixture of methoxy, ethoxy, epoxy, and alkyl groups directly bonded to a ruthenium atom) of 0.7 g . After performing hydrolysis and condensation reaction while stirring, 2.4 mL of a 25 wt% aqueous ammonia solution was added, and then the particles were separated from the aqueous ammonia solution, and the obtained particles were subjected to a partial pressure of oxygen at 10 -17 atm and 400 ° C. The following baking was carried out for 2 hours to obtain organic-inorganic composite particles.

(實施例6)(Example 6)

使作為環狀矽氧烷之環戊矽氧烷(信越化學工業公司製造之「KF-995」)、與作為環氧矽烷偶合劑之3-縮水甘油氧基丙基三甲氧基矽烷(信越化學工業公司製造之「KBM-403」)進行反應,獲得含烷氧基之有機聚矽氧烷A(具有環氧基與烷氧基,重量平均分子量約1500)。Cyclopentaoxane ("KF-995" manufactured by Shin-Etsu Chemical Co., Ltd.) and 3-glycidoxypropyltrimethoxydecane (Xinyue Chemical) as an epoxy decane coupling agent "KBM-403" manufactured by Industrial Co., Ltd. was reacted to obtain an alkoxy group-containing organopolyoxosiloxane A (having an epoxy group and an alkoxy group and having a weight average molecular weight of about 1,500).

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為含烷氧基之有機聚矽氧烷A,除此以外,以與實施例4相同之方式,獲得有機無機複合粒子。The same procedure as in Example 4 except that the polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was changed to the alkoxy-containing organopolyoxane A. In the manner, organic-inorganic composite particles are obtained.

(實施例7)(Example 7)

使作為環狀矽氧烷之環戊矽氧烷(信越化學工業公司製造之「KF-995」)、與作為具有丙烯醯基之矽烷偶合劑之3-丙烯醯氧基丙基三甲 氧基矽烷(信越化學工業公司製造之「KBM-5103」)進行反應,獲得含烷氧基之有機聚矽氧烷B(具有丙烯醯基與烷氧基,重量平均分子量:約1300)。Cyclopentaoxane ("KF-995" manufactured by Shin-Etsu Chemical Co., Ltd.) as a cyclic oxirane and 3-acryloxypropyltrimethyl methacrylate as a decane coupling agent having an acrylonitrile group Oxydecane ("KBM-5103" manufactured by Shin-Etsu Chemical Co., Ltd.) was reacted to obtain an alkoxy-containing organic polyoxosiloxane B (having an acrylonitrile group and an alkoxy group, and a weight average molecular weight: about 1300).

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為含烷氧基之有機聚矽氧烷B,除此以外,以與實施例4相同之方式,獲得有機無機複合粒子。The same procedure as in Example 4 except that the polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was changed to the alkoxy-containing organopolyoxane B. In the manner, organic-inorganic composite particles are obtained.

(實施例8)(Example 8)

使作為環狀矽氧烷之環戊矽氧烷(信越化學工業公司製造之「KF-995」)、與作為具有甲基丙烯醯基之矽烷偶合劑之3-甲基丙烯醯氧基丙基三甲氧基矽烷(信越化學工業公司製造之「KBM-503」)進行反應,獲得含甲基丙烯醯氧基之有機聚矽氧烷C(具有甲基丙烯醯基與烷氧基,重量平均分子量:約2000)。Cyclopentaoxane ("KF-995" manufactured by Shin-Etsu Chemical Co., Ltd.) as a cyclic oxirane and 3-methylpropenyloxypropyl group as a decane coupling agent having a methacryl oxime group Trimethoxy decane ("KBM-503" manufactured by Shin-Etsu Chemical Co., Ltd.) is reacted to obtain a methacryloxy group-containing organic polyoxyalkylene C (having a methacryl fluorenyl group and an alkoxy group, weight average molecular weight : About 2000).

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為含烷氧基之有機聚矽氧烷C,除此以外,以與實施例4相同之方式,獲得有機無機複合粒子。The same procedure as in Example 4 except that the polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was changed to the alkoxy-containing organopolyoxane C. In the manner, organic-inorganic composite particles are obtained.

(實施例9)(Example 9)

(1)鈀附著步驟(1) Palladium attachment step

準備實施例4中所獲得之有機無機複合粒子。對有機無機複合粒子進行蝕刻、水洗。繼而,向含有鈀觸媒8重量%之鈀觸媒化液100mL中添加有機無機複合粒子,進行攪拌。其後,進行過濾、清洗。向pH值6之0.5重量%二甲基胺硼烷液中添加有機無機複合粒子,獲得附著有鈀之有機無機複合粒子。The organic-inorganic composite particles obtained in Example 4 were prepared. The organic-inorganic composite particles are etched and washed with water. Then, the organic-inorganic composite particles were added to 100 mL of a palladium catalyst solution containing 8 wt% of a palladium catalyst, followed by stirring. Thereafter, filtration and washing are carried out. The organic-inorganic composite particles were added to a 0.5 wt% dimethylamine borane solution having a pH of 6, to obtain an organic-inorganic composite particle to which palladium adhered.

(2)芯物質附著步驟(2) Core substance attachment step

將附著有鈀之有機無機複合粒子於離子交換水300mL中攪拌3分鐘,使其分散而獲得分散液。繼而,花費3分鐘將金屬鎳粒子漿料(平均粒徑100nm)1g添加至上述分散液中,獲得附著有芯物質之有機無 機複合粒子。The organic-inorganic composite particles to which palladium adhered were stirred in 300 mL of ion-exchanged water for 3 minutes, and dispersed to obtain a dispersion. Then, 1 g of a metal nickel particle slurry (average particle diameter: 100 nm) was added to the above dispersion liquid over 3 minutes to obtain an organic non-core substance. Machine composite particles.

(3)無電解鍍鎳步驟(3) Electroless nickel plating step

藉由無電電鍍法而於附著有芯物質之有機無機複合粒子之表面上形成鎳層,製作導電性粒子。再者,鎳層之厚度為0.1μm。A nickel layer was formed on the surface of the organic-inorganic composite particles to which the core substance adhered by electroless plating to prepare conductive particles. Further, the thickness of the nickel layer was 0.1 μm.

(實施例10)(Embodiment 10)

(1)絕緣性粒子之製作(1) Production of insulating particles

於安裝有四口可分離蓋、攪拌葉、三通活栓、冷卻管及溫度探針之1000mL之可分離式燒瓶中,將含有甲基丙烯酸甲酯100mmol、N,N,N-三甲基-N-2-甲基丙烯醯氧基乙基氯化銨1mmol、以及2,2'-偶氮雙(2-脒基丙烷)二鹽酸鹽1mmol之單體組合物以固形物成分率成為5重量%之方式稱取至離子交換水中後,以200rpm進行攪拌,於氮氣環境下以70℃進行聚合24小時。反應結束後,進行冷凍乾燥,獲得表面具有銨基、且平均粒徑220nm及CV(Coefficient of Variation,變異係數)值10%之絕緣性粒子。In a 1000 mL separable flask equipped with four separable caps, stirring leaves, three-way stopcock, cooling tube and temperature probe, it will contain 100 mmol of methyl methacrylate, N, N, N-trimethyl- A monomer composition of 1 mmol of N-2-methylpropenyloxyethylammonium chloride and 1 mmol of 2,2'-azobis(2-amidinopropane) dihydrochloride showed a solid content ratio of 5 After weighing in % by weight, the mixture was stirred at 200 rpm, and polymerization was carried out at 70 ° C for 24 hours under a nitrogen atmosphere. After completion of the reaction, lyophilization was carried out to obtain insulating particles having an ammonium group and an average particle diameter of 220 nm and a CV (Coefficient of Variation) value of 10%.

使絕緣性粒子於超音波照射下分散於離子交換水中,獲得絕緣性粒子之10重量%水分散液。The insulating particles were dispersed in ion-exchanged water under ultrasonic irradiation to obtain a 10% by weight aqueous dispersion of the insulating particles.

(2)附有絕緣性粒子之導電性粒子之製作(2) Production of conductive particles with insulating particles

使實施例9中所獲得之導電性粒子10g分散於離子交換水500mL中,添加絕緣性粒子之水分散液4g,於室溫下攪拌6小時。利用3μm之篩網過濾器進行過濾後,進而利用甲醇進行清洗、乾燥,獲得附著有絕緣性粒子之導電性粒子。10 g of the conductive particles obtained in Example 9 was dispersed in 500 mL of ion-exchanged water, 4 g of an aqueous dispersion of insulating particles was added, and the mixture was stirred at room temperature for 6 hours. The mixture was filtered through a 3 μm mesh filter, and further washed with methanol and dried to obtain conductive particles to which insulating particles were attached.

藉由掃描型電子顯微鏡(SEM)進行觀察,結果發現,導電性粒子之表面僅形成有1層由絕緣性粒子所得之被覆層。藉由圖像解析而算出相對於距導電性粒子之中心2.5μm之面積之絕緣性粒子之被覆面積(即,絕緣性粒子之粒徑之投影面積),結果被覆率為30%。Observation by a scanning electron microscope (SEM) revealed that only one layer of the insulating layer was formed on the surface of the conductive particles. The coating area of the insulating particles (i.e., the projected area of the particle diameter of the insulating particles) with respect to the area of 2.5 μm from the center of the conductive particles was calculated by image analysis, and as a result, the coverage ratio was 30%.

(比較例1)(Comparative Example 1)

不使用聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」),除此以外,以與實施例1相同之方式獲得有機無機複合粒子。The organic-inorganic composite particles were obtained in the same manner as in Example 1 except that the polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) was used.

(比較例2)(Comparative Example 2)

將聚矽氧烷氧基低聚物(信越化學工業公司製造之「X-41-1053」)變更為不具有反應性之甲基苯基聚矽氧油(信越化學工業公司製造之「KF-56A」),除此以外,以與實施例1相同之方式獲得有機無機複合粒子。Changed polyoxyalkyloxy oligomer ("X-41-1053" manufactured by Shin-Etsu Chemical Co., Ltd.) to non-reactive methylphenyl polyfluorene (KF-manufactured by Shin-Etsu Chemical Co., Ltd.) The organic-inorganic composite particles were obtained in the same manner as in Example 1 except for the above.

(評價)(Evaluation)

(1)有機無機複合粒子之粒徑(1) Particle size of organic-inorganic composite particles

關於所獲得之有機無機複合粒子之粒徑,使用粒度分佈測定裝置(Beckman Coulter公司製造之「Multisizer3」),測定約10000個有機無機複合粒子之粒徑。求出所測定之粒徑之平均值,設為有機無機複合粒子之粒徑。About the particle diameter of the obtained organic-inorganic composite particle, the particle size of about 10,000 organic-inorganic composite particle was measured using the particle size distribution measuring apparatus ("Multisizer3" by the Beckman Coulter company. The average value of the measured particle diameters was determined, and the particle diameter of the organic-inorganic composite particles was determined.

(2)有機無機複合粒子之上述破裂荷重(2) The above rupture load of the organic-inorganic composite particles

藉由上述方法,使用Fischer公司製造之「Fischerscope H-100」測定所獲得之有機無機複合粒子之上述破裂荷重。The above-mentioned breaking load of the obtained organic-inorganic composite particles was measured by the above method using "Fischerscope H-100" manufactured by Fischer.

(3)集合體中之各無機粒子(每1個無機粒子)之粒徑(3) Particle size of each inorganic particle (per inorganic particle) in the aggregate

於所獲得之有機無機複合粒子中,集合體中之各無機粒子之粒徑係使用X射線小角度散射(RIGAKU公司製造、粉末X射線繞射裝置SmartLab(平行光束法)),利用透射法進行測定。採用使用解析軟體NANO-Solver所求出之平均尺寸。解析軟體NANO-Solver中之模型係將散射體模型設為球,將粒子設為SiO2 ,將基質設為空氣。In the obtained organic-inorganic composite particles, the particle diameter of each inorganic particle in the aggregate is measured by a transmission method using X-ray small-angle scattering (manufactured by RIGAKU Co., Ltd., powder X-ray diffraction device SmartLab (parallel beam method)). Determination. The average size determined using the analytical software NANO-Solver was used. The model in the analytical software NANO-Solver has a scatterer model as a ball, a particle as SiO 2 , and a matrix as air.

於所求出之有機無機複合粒子中,集合體中之各無機粒子之粒徑為1~500nm。In the obtained organic-inorganic composite particles, the particle diameter of each inorganic particle in the aggregate is 1 to 500 nm.

(4)連接電阻(4) Connection resistance

導電性粒子之製作:將實施例1~8及比較例1、2中所獲得之有機無機複合粒子進行清洗、乾燥。其後,藉由無電電鍍法而於所獲得之有機無機複合粒子之表面上形成鎳層,製作導電性粒子。再者,鎳層之厚度為0.1μm。直接使用實施例9及10中所獲得之導電性粒子。Preparation of Conductive Particles: The organic-inorganic composite particles obtained in Examples 1 to 8 and Comparative Examples 1 and 2 were washed and dried. Thereafter, a nickel layer was formed on the surface of the obtained organic-inorganic composite particles by electroless plating to prepare conductive particles. Further, the thickness of the nickel layer was 0.1 μm. The conductive particles obtained in Examples 9 and 10 were used as they were.

連接構造體之製作:將雙酚A型環氧樹脂(三菱化學公司製造之「Epikote 1009」)10重量份、丙烯酸系橡膠(重量平均分子量約80萬)40重量份、甲基乙基酮200重量份、微膠囊型硬化劑(旭化成E-MATERIALS公司製造之「HX3941HP」)50重量份、以及矽烷偶合劑(Dow Corning Toray Silicone公司製造之「SH6040」)2重量份進行混合,以含量成為3重量%之方式添加導電性粒子,並進行分散,獲得樹脂組合物。Production of a connection structure: 10 parts by weight of bisphenol A type epoxy resin ("Epikote 1009" manufactured by Mitsubishi Chemical Corporation), 40 parts by weight of acrylic rubber (weight average molecular weight: about 800,000), and methyl ethyl ketone 200 50 parts by weight of a microcapsule-type hardening agent ("HX3941HP" manufactured by Asahi Kasei E-MATERIALS Co., Ltd.) and 2 parts by weight of a decane coupling agent ("SH6040" manufactured by Dow Corning Toray Silicone Co., Ltd.) were mixed to obtain a content of 3 parts by weight. Conductive particles were added in a weight % manner and dispersed to obtain a resin composition.

將所獲得之樹脂組合物塗佈於單面經脫模處理之厚度50μm之PET(聚對苯二甲酸乙二酯)膜,以70℃之熱風乾燥5分鐘,製作各向異性導電膜。所獲得之各向異性導電膜之厚度為12μm。The obtained resin composition was applied to a PET (polyethylene terephthalate) film having a thickness of 50 μm which was subjected to release treatment on one side, and dried by hot air at 70 ° C for 5 minutes to prepare an anisotropic conductive film. The thickness of the obtained anisotropic conductive film was 12 μm.

將所獲得之各向異性導電膜切斷為5mm×5mm之大小。將經切斷之各向異性導電膜貼附於一面設置有具有電阻測定用之牽引線之ITO(高度0.1μm,L/S=20μm/20μm)之PET基板(寬度3cm,長度3cm)之ITO電極側之大致中央。繼而,將設置有相同金電極之2層撓性印刷基板(寬度2cm,長度1cm)以電極彼此重疊之方式進行對位後貼合。將該PET基板與2層撓性印刷基板之積層體於10N、180℃、及20秒之壓接條件下進行熱壓接,獲得連接構造體。再者,使用聚醯亞胺膜上形成有銅電極、且銅電極表面經鍍金之2層撓性印刷基板。The obtained anisotropic conductive film was cut into a size of 5 mm × 5 mm. The cut anisotropic conductive film was attached to an ITO (width: 3 cm, length: 3 cm) of a PET substrate (having a height of 0.1 μm, L/S = 20 μm/20 μm) provided with a pull line for electric resistance measurement. The center of the electrode is approximately the center. Then, a two-layer flexible printed circuit board (width: 2 cm, length: 1 cm) provided with the same gold electrode was subjected to alignment and post-bonding so that the electrodes overlap each other. The laminate of the PET substrate and the two-layer flexible printed circuit board was thermocompression bonded under pressure bonding conditions of 10 N, 180 ° C, and 20 seconds to obtain a bonded structure. Further, a two-layer flexible printed circuit board in which a copper electrode was formed on a polyimide film and the surface of the copper electrode was gold-plated was used.

藉由四端子法測定所獲得之連接構造體之對向之電極間之連接電阻。以下述基準判定連接電阻。The connection resistance between the opposing electrodes of the obtained connection structure was measured by a four-terminal method. The connection resistance was determined on the basis of the following criteria.

[連接電阻之評價基準][Evaluation criteria for connection resistance]

○○:連接電阻為3.0Ω以下○○: The connection resistance is 3.0 Ω or less

○:連接電阻超過3.0且為4.0Ω以下○: The connection resistance exceeds 3.0 and is 4.0 Ω or less.

△:連接電阻超過4.0且為5.0Ω以下△: The connection resistance exceeds 4.0 and is 5.0 Ω or less.

×:連接電阻超過5.0Ω×: The connection resistance exceeds 5.0Ω

將結果示於下述之表1。The results are shown in Table 1 below.

(5)作為液晶顯示元件用間隔物之使用例(5) Example of use as a spacer for a liquid crystal display element

STN(Super Twisted Nematic,超扭轉向列)型液晶顯示元件之製作:向含有異丙醇70重量份與水30重量份之分散介質中,以於所獲得之間隔物分散液100重量%中固形物成分濃度成為2重量%之方式添加實施例1~8之液晶顯示元件用間隔物(有機無機複合粒子)並進行攪拌,獲得液晶顯示元件用間隔物分散液。Preparation of STN (Super Twisted Nematic) type liquid crystal display element: in a dispersion medium containing 70 parts by weight of isopropyl alcohol and 30 parts by weight of water, in a solid content of 100% by weight of the obtained spacer dispersion The spacers (organic-inorganic composite particles) for liquid crystal display devices of Examples 1 to 8 were added and stirred, and the spacer dispersion liquid for liquid crystal display elements was obtained, and the content of the component was 2% by weight.

對一對透明玻璃板(縱50mm,橫50mm,厚度0.4mm)之一面,利用CVD(Chemical Vapor Deposition,化學氣相沈積法)法蒸鍍SiO2 膜後,對SiO2 膜之整個表面藉由濺鍍而形成ITO膜。於所獲得之附有 ITO膜之玻璃基板藉由旋轉塗佈法塗敷聚醯亞胺配向膜組合物(日產化學公司製造,SE3510),於280℃下焙燒90分鐘,藉此形成聚醯亞胺配向膜。對配向膜實施摩擦處理後,對一個基板之配向膜側以每1mm2 成為100~200個之方式濕式散佈液晶顯示元件用間隔物。於另一個基板之周邊形成密封劑後,將該基板與散佈有間隔物之基板以摩擦方向成為90°之方式進行對向配置,而將兩者貼合。其後,於160℃下處理90分鐘,使密封劑硬化,而獲得空單元(未注入液晶之畫面)。向所獲得之空單元中注入添加有手性劑之STN型液晶(DIC公司製造),其次利用密封劑堵住注入口後,於120℃下進行30分鐘熱處理,獲得STN型液晶顯示元件。By depositing a SiO 2 film by a CVD (Chemical Vapor Deposition) method on one side of a pair of transparent glass plates (50 mm in length, 50 mm in width, and 0.4 mm in thickness), the entire surface of the SiO 2 film is used. The ITO film was formed by sputtering. The glass substrate with the ITO film obtained was applied by a spin coating method to a polyimide film composition film (manufactured by Nissan Chemical Co., Ltd., SE3510), and calcined at 280 ° C for 90 minutes to form a polysiloxane. Amine alignment film. After the rubbing treatment is applied to the alignment film, the spacer for the liquid crystal display element is wet-laid on the alignment film side of one substrate so as to be 100 to 200 per 1 mm 2 . After the sealant was formed on the periphery of the other substrate, the substrate and the substrate on which the spacers were dispersed were placed in a direction in which the rubbing direction was 90°, and the two were bonded together. Thereafter, it was treated at 160 ° C for 90 minutes to harden the sealant to obtain an empty cell (a screen in which no liquid crystal was injected). STN liquid crystal (manufactured by DIC Corporation) to which a chiral agent was added was injected into the obtained empty cell, and then the injection port was blocked with a sealant, and then heat-treated at 120 ° C for 30 minutes to obtain an STN liquid crystal display device.

於所獲得之液晶顯示元件中,藉由實施例1~8之液晶顯示元件用間隔物所獲得之基板間之間隔被良好地限制。又,液晶顯示元件顯示出良好之顯示品質。In the obtained liquid crystal display device, the interval between the substrates obtained by the spacers for liquid crystal display elements of Examples 1 to 8 was favorably limited. Moreover, the liquid crystal display element exhibits good display quality.

1‧‧‧有機無機複合粒子1‧‧‧Organic and inorganic composite particles

11‧‧‧無機粒子11‧‧‧Inorganic particles

12‧‧‧來自含烷氧基之有機聚矽氧烷之構造部12‧‧‧From the structure of the alkoxy-containing organopolyoxane

Claims (10)

一種有機無機複合粒子,其係使用表面具有第1反應性官能基之複數個無機粒子、與具有可與上述第1反應性官能基進行反應之第2反應性官能基之含烷氧基之有機聚矽氧烷而獲得,且為上述無機粒子之集合體,上述含烷氧基之有機聚矽氧烷之重量平均分子量為1000以上、10000以下,上述含烷氧基之有機聚矽氧烷具有環氧基作為上述第2反應性官能基。 An organic-inorganic composite particle comprising a plurality of inorganic particles having a first reactive functional group on a surface thereof and an alkoxy-containing organic group having a second reactive functional group reactive with the first reactive functional group The alkoxy group-containing organopolyoxane has a weight average molecular weight of 1,000 or more and 10,000 or less, and the alkoxy group-containing organopolyoxane has a polysiloxane. An epoxy group is used as the second reactive functional group. 如請求項1之有機無機複合粒子,其中上述第1反應性官能基為羥基。 The organic-inorganic composite particle according to claim 1, wherein the first reactive functional group is a hydroxyl group. 如請求項1或2之有機無機複合粒子,其中複數個上述無機粒子可經由來自上述含烷氧基之有機聚矽氧烷之構造而一體化,獲得上述無機粒子之集合體。 The organic-inorganic composite particle according to claim 1 or 2, wherein the plurality of the inorganic particles are integrated by a structure derived from the alkoxy group-containing organic polyoxyalkylene to obtain an aggregate of the inorganic particles. 如請求項1或2之有機無機複合粒子,其中上述含烷氧基之有機聚矽氧烷具有甲氧基作為上述第2反應性官能基。 The organic-inorganic composite particle according to claim 1 or 2, wherein the alkoxy-containing organopolyoxane has a methoxy group as the second reactive functional group. 如請求項1或2之有機無機複合粒子,其中上述含烷氧基之有機聚矽氧烷具有直接鍵結於矽原子之烷基。 The organic-inorganic composite particle of claim 1 or 2, wherein the alkoxy-containing organic polyoxyalkylene has an alkyl group directly bonded to a halogen atom. 如請求項1或2之有機無機複合粒子,其係用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,或用作液晶顯示元件用間隔物。 The organic-inorganic composite particle according to claim 1 or 2, which is used for forming a conductive layer on a surface to obtain conductive particles having the above-mentioned conductive layer, or as a spacer for a liquid crystal display element. 如請求項1或2之有機無機複合粒子,其係用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,上述導電性粒子係用以將電極間進行電性連接。 The organic-inorganic composite particle according to claim 1 or 2, which is used for forming a conductive layer on a surface to obtain conductive particles having the conductive layer, wherein the conductive particles are used to electrically connect the electrodes. 一種導電性粒子,其具備:如請求項1至7中任一項之有機無機複合粒子,及配置於上述有機無機複合粒子之表面上之導電層。 A conductive particle comprising the organic-inorganic composite particle according to any one of claims 1 to 7, and a conductive layer disposed on a surface of the organic-inorganic composite particle. 一種導電材料,其包含:導電性粒子與黏合劑樹脂,且上述導電性粒子具備:如請求項1至7中任一項之有機無機複合粒子、與配置於上述有機無機複合粒子之表面上之導電層。 A conductive material comprising: an electroconductive particle and a binder resin, wherein the electroconductive particle comprises: the organic-inorganic composite particle according to any one of claims 1 to 7 and a surface disposed on the surface of the organic-inorganic composite particle Conductive layer. 一種連接構造體,其具備:第1連接對象構件,其表面具有第1電極,第2連接對象構件,其表面具有第2電極,及連接部,其連接上述第1連接對象構件與上述第2連接對象構件;並且上述連接部由導電性粒子形成,或由包含上述導電性粒子與黏合劑樹脂之導電材料形成,上述導電性粒子具備:如請求項1至7中任一項之有機無機複合粒子、與配置於上述有機無機複合粒子之表面上之導電層,且上述第1電極與上述第2電極由上述導電性粒子電性連接。 A connection structure comprising: a first connection member having a first electrode on its surface, a second connection member having a second electrode on its surface, and a connection portion connecting the first connection member and the second The connection member is formed of conductive particles or formed of a conductive material containing the conductive particles and a binder resin, and the conductive particles are provided with the organic-inorganic composite according to any one of claims 1 to 7. The particles and the conductive layer disposed on the surface of the organic-inorganic composite particles, wherein the first electrode and the second electrode are electrically connected to each other by the conductive particles.
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