TWI456194B - Quantitative analytical method of phosphine gas using photocatalytic technique - Google Patents

Quantitative analytical method of phosphine gas using photocatalytic technique Download PDF

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TWI456194B
TWI456194B TW100149378A TW100149378A TWI456194B TW I456194 B TWI456194 B TW I456194B TW 100149378 A TW100149378 A TW 100149378A TW 100149378 A TW100149378 A TW 100149378A TW I456194 B TWI456194 B TW I456194B
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phosphine gas
photocatalytic
concentration
quantitatively analyzing
ultrapure water
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TW100149378A
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Chinese (zh)
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TW201326811A (en
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Yao Hsuan Tseng
Che Lee
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Univ Nat Taiwan Science Tech
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一種利用光催化技術之磷化氫氣體定量分析方法，其包含：配製一系列已知濃度的磷化氫氣體，並利用一光觸媒表面來分別光催化分解該系列之各別已知濃度的磷化氫氣體，以於該光觸媒表面相應生成各別的反應物，並將各別的反應物以超純水進行水洗後回收該超純水；分析各別超純水中之反應物的含量或訊號值；將已知濃度的磷化氫氣體與相對應之反應物的含量或訊號值間之關係，製備成一檢量線；以及利用該光觸媒表面來光催化分解一未知濃度的磷化氫氣體之實際樣品，並於該光觸媒表面相應生成一實際樣品之反應物，再將該實際樣品之反應物以超純水進行水洗後回收該超純水，再分析超純水中實際樣品之反應物的含量或訊號值，並依據該檢量線來推算實際樣品之濃度。A method for quantitatively analyzing phosphine gas using photocatalytic technology, comprising: preparing a series of known concentrations of phosphine gas, and utilizing a photocatalyst surface to photocatalyticly decompose the respective known concentrations of phosphating of the series Hydrogen gas to generate respective reactants on the surface of the photocatalyst, and the respective reactants are washed with ultrapure water to recover the ultrapure water; and the content or signal of the reactants in each ultrapure water is analyzed. a relationship between a known concentration of phosphine gas and a corresponding reactant content or signal value to prepare a calibration line; and photocatalytic decomposition of an unknown concentration of phosphine gas using the photocatalyst surface Actual sample, and correspondingly generating a reactant of the actual sample on the surface of the photocatalyst, and then the reactant of the actual sample is washed with ultrapure water to recover the ultrapure water, and then the reactant of the actual sample in the ultrapure water is analyzed. The content or signal value, and the concentration of the actual sample is estimated based on the calibration curve. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該反應物的含量之量測濃度範圍係介於10 ppm-5 ppb之間。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique as described in claim 1, wherein the content of the reactant is in a concentration ranging from 10 ppm to 5 ppb. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該配製一系列已知濃度的磷化氫氣體的步驟係：利用一質量流量控制器來將標準濃度之磷化氫氣體，配製成一系列已知濃度的磷化氫氣體。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique as described in claim 1, wherein the step of preparing a series of known concentrations of phosphine gas is: using a mass flow controller to measure the standard concentration The phosphine gas is formulated into a series of known concentrations of phosphine gas. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該推算實際樣品之濃度的步驟更包含：設定一系列相同標準濃度的磷化氫氣體，再各別以不同的累計反應時間在該光觸媒表面上進行光催化反應，來製備之一校正曲線，其中該校正曲線的一座標軸係為不同累計反應時間之磷化氫氣體的去除量，而另一座標軸則為磷化氫氣體經由光催化反應所生成之反應物的含量。The method for quantitatively analyzing phosphine gas using photocatalytic technology according to claim 1, wherein the step of estimating the concentration of the actual sample further comprises: setting a series of phosphine gas of the same standard concentration, and then separately A calibration curve is prepared by performing a photocatalytic reaction on the photocatalyst surface with different cumulative reaction times, wherein one calibration axis of the calibration curve is the removal amount of phosphine gas with different cumulative reaction time, and the other coordinate axis is The content of the reactant formed by the photocatalytic reaction of the phosphine gas. 如申請專利範圍第4項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該磷化氫氣體的去除量係以至少一儀器來分析經光催化反應後通過光觸媒表面之磷化氫氣體的濃度，並與反應前之磷化氫氣體的濃度相比較並經由計算而得知。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique according to the fourth aspect of the invention, wherein the phosphine gas is removed by at least one instrument to analyze the phosphating of the surface of the photocatalyst after the photocatalytic reaction. The concentration of the hydrogen gas is compared with the concentration of the phosphine gas before the reaction and is known by calculation. 如申請專利範圍第5項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該儀器係為傅立葉轉換紅外線光譜儀。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique as described in claim 5, wherein the apparatus is a Fourier transform infrared spectrometer. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中該光觸媒表面之材質係選自二氧化鈦、氧化鋅、二氧化錫或硫化鎘。The method for quantitatively analyzing phosphine gas using photocatalytic technology according to claim 1, wherein the material of the photocatalyst surface is selected from the group consisting of titanium dioxide, zinc oxide, tin dioxide or cadmium sulfide. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中分析各別超純水中之反應物的含量或訊號值之步驟，係使用離子層析儀來分析反應物中的磷酸鹽。The method for quantitatively analyzing phosphine gas using photocatalytic technology as described in claim 1, wherein the step of analyzing the content or signal value of the reactants in each ultrapure water is analyzed by using an ion chromatograph. Phosphate in the reaction. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中分析各別超純水中之反應物的含量或訊號值之步驟，係使用原子吸收光譜儀、感應耦合電漿原子發射光譜儀、感應偶合電漿質譜儀或是其等之組合，以分析反應物中的磷原子。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique as described in claim 1, wherein the step of analyzing the content or signal value of the reactants in each ultrapure water is performed by using an atomic absorption spectrometer, inductive coupling A plasma atomic emission spectrometer, an inductively coupled plasma mass spectrometer, or the like, is used to analyze the phosphorus atoms in the reactants. 如申請專利範圍第1項所述之利用光催化技術之磷化氫氣體定量分析方法，其中利用該光觸媒表面來光催化分解一未知濃度的磷化氫氣體之實際樣品的步驟，係在一半導體製程無塵室中進行。A method for quantitatively analyzing a phosphine gas using a photocatalytic technique as described in claim 1, wherein the photocatalytic surface is used to photocatalyticly decompose an actual sample of an unknown concentration of phosphine gas, in a semiconductor The process is carried out in a clean room.
TW100149378A 2011-12-28 2011-12-28 Quantitative analytical method of phosphine gas using photocatalytic technique TWI456194B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62204157A (en) * 1986-03-05 1987-09-08 Mitsui Toatsu Chem Inc Simple quantitative analysis of phosphine
US5024823A (en) * 1988-01-28 1991-06-18 Messer Griesheim Gmbh Copper sulfate absorption mass to remove AsH3, PH3, B2 H.sub.4 and SiH4
US5182088A (en) * 1990-09-07 1993-01-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Removal of gaseous hydrides
JP2002250722A (en) * 2001-02-27 2002-09-06 Taiyo Toyo Sanso Co Ltd Method and equipment for analyzing extremely low concentration hydrogen sulfide
JP2003290663A (en) * 2002-04-02 2003-10-14 Keiji Yamada Photocatalyst modified by phosphine gas and method for preparing the same
JP2005300198A (en) * 2004-04-07 2005-10-27 Taiyo Nippon Sanso Corp Low-concentration hydrogen sulfide analysis method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62204157A (en) * 1986-03-05 1987-09-08 Mitsui Toatsu Chem Inc Simple quantitative analysis of phosphine
US5024823A (en) * 1988-01-28 1991-06-18 Messer Griesheim Gmbh Copper sulfate absorption mass to remove AsH3, PH3, B2 H.sub.4 and SiH4
US5182088A (en) * 1990-09-07 1993-01-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Removal of gaseous hydrides
JP2002250722A (en) * 2001-02-27 2002-09-06 Taiyo Toyo Sanso Co Ltd Method and equipment for analyzing extremely low concentration hydrogen sulfide
JP2003290663A (en) * 2002-04-02 2003-10-14 Keiji Yamada Photocatalyst modified by phosphine gas and method for preparing the same
JP2005300198A (en) * 2004-04-07 2005-10-27 Taiyo Nippon Sanso Corp Low-concentration hydrogen sulfide analysis method

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